ellows-sealed Valves ellows-sealed Valves V-64 SVH Series High Pressure ellows-sealed Valves Features Packless valves with all-metal seal to atmosphere ompact designed body with minimal dead space 16 SS precision-formed bellows for long cycle life PTFE stem tip material with remarkable chemical and thermal resistance Normally closed and normally open pneumatic actuator optional ottom mounting Technical Data Ports Size Flow oefficient (v) Orifice Size Max. Working Pressure ctuator Operating Pressure Temperature eak Rate (Helium) Internal External 1/4" to /8" or 6 mm to 8 mm 0.0 0.15 in. (.8 mm) 500 psig (241 bar) 60 to 90 psig (4.2 to 6.2 bar) PTFE: -40~150 F (- 40~65 ) Vespel : -40~400 F (-40~204 ) -9 4x10 mbar l/s -9 4x10 mbar l/s Flow Data ir @ 70 F (21 ) Water @ 60 F (16 ) Pressure Drop to tmosphere psi (bar) 10 (0.68) 50 (.4) 100 (6.8) ir (l/min) 96 250 450 Water (l/min).6 7.9 11.0 s Valves & Regulators Product Technology Grade Technology Product Grade General Purpose Special leaning and Packaging Ultra High Purity Material/Specification Wetted Surface Roughness Polishing Process leaning and Packaging Specification F-01 Standard leaning and Packaging 16 SS/STM 479 16 SS/STM 479 Ra 20 μin. (0.51 μm) Machine finished F-02 Special leaning and Packaging 16 SS/STM 479 Ra 10 μin. (0.25 μm) Electropolished F-0 Ultra High Purity leaning and Packaging leaning Process Thrice degreasing ultrasonic cleaning Special cleaning with non-ozone-depleting chemicals Ultra high purity cleaning in continuously monitored ultrasonic cleaning system with deionized water ssembly Environment t atmosphere In specially cleaned areas In ISO lass 5/Federal lass 100 cleanroom Packaging Process Individually bagged Double bagged Double bagged and vacuum sealed in cleanroom
V-65 ellows-sealed Valves Major Materials of onstruction s Valves & Regulators Normally losed Model 1 2 4 5 6 Item 1 2 4 5 6 omponent Material/ Specification ctuator onnet Nut Gasket ellows Seat ody luminum 04 SS/ STM 479 PTFE-coated 16 SS/240 16 SS/ STM 269 PTFE/STM D140 or Vsepel 16 SS/STM 479 or 16 SS/STM 479 ctuators Normally open, "N.O." marked on the top of the cylinder Normally closed, "N.." marked on the top of the cylinder
ellows-sealed Valves V-66 Dimensions and Ordering Information Straight Type Dimensions Dimensions, in inches (millimeters), are for reference only. Normally losed s 2.12 ( 5.8) 1/8-27 NPT 2.12 ( 5.8) ctuation Port 1/8-27 NPT ctuation Port.74.74 Valves & Regulators with 10-2 mounting screws with 10-2 mounting screws 1.1 1.1 asic Ordering Number SVH -F4- SVH -T4- SVH -FFR4- SVH -FR4- SVH -F6- SVH -M6- onnection Type and Size 1/4" Tube utt Weld 1/4" Female FR 1/4" Integral Male FR 1/4" FITOK Tube /8" FITOK Tube 6 mm FITOK Tube Dimensions in. (mm) 0.25 (6.4) 1.75 (44.4) 0.85 (21.6) 2.76 (70.1) 0.62 (15.7) 2.0 (58.4) 2.46 (62.5) 0.76 (19.) 2.58 (65.5) 2.46 (62.5)
V-67 ellows-sealed Valves Ordering Number Description SVHSS - F4 - M6 - VF2 s Valves & Regulators ody Material 6 16 SS T SS 16 SS MT FR FFR F M ranch Type Inlet Type utt Weld utt Weld Integral Male FR Female FR Inlet Size 4 1/4" 6 6 mm or /8" 8 8 mm Outlet Type Outlet Size Same as Inlet Specified in the sameway as Inlet type and size O ctuator Type Normally losed V Seat Technology Grade F2 F PTFE Vespel General Purpose Special leaning and Packaging Ultra High Purity Dimensions Dimensions, in inches (millimeters), are for reference only. Normally losed 2.12 ( 5.8) 1/8-27 NPT ctuation Port.74 with 10-2 mounting screws 1.1
ellows-sealed Valves V-68 2.12 ( 5.8) 1/8-27 NPT ctuation Port s.74 Valves & Regulators with 10-2 mounting screws 1.1 asic Ordering Number DH -T4- SVH -T4- onnection Type and Size 1/4" Tube utt Weld 1/4" Tube utt Weld Dimensions in. (mm) 0.25 (6.4) 0.25 (6.4) 1.75 (44.4) 1.75 (44.4) SVH -FFR4-1/4" Female FR 0.85 (21.6) 0.85 (21.6) 2.76 (70.1) SVH -FR4-1/4" Integral Male FR 0.62 (15.7) 0.62 (15.7) 2.0 (58.4) SVH -F4-1/4" FITOK Tube 2.46 (62.5) SVH -F6- /8" FITOK Tube 0.76 ( 19.) 0.76 (19.) 2.58 (65.5) SVH -M6-6 mm FITOK Tube 2.46 (62.5) Flow Paths Flow paths as viewed from the top D Flow E Flow F Flow G Flow K Flow
V-69 ellows-sealed Valves Ordering Number Description SVHSS - T4 - FR4 - FFR4 - G - VF2 s Valves & Regulators ody Material 6 16 SS SS 16 SS T MT FR FFR F M Port 1 Type utt Weld utt Weld Integral Male FR Female FR Port 1 Size 4 1/4" 6 6 mm or /8" 8 8 mm Port 2/ Type Port 2/ Size Same as Port 1 Specified in the same way as port 2/ type and size Port 2/ Type Flow Path D E F G K O ctuator Type Normally losed Technology Grade F2 F General Purpose Special leaning and Packaging Ultra High Purity V Seat PTFE Vespel