The freedom to choose. Agilent Turbo Pumping Systems. Vacuum pumping systems that really fit your needs.

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The freedom to choose. Agilent Turbo Pumping Systems Vacuum pumping systems that really fit your needs.

Agilent Turbo Pumping Systems The freedom to choose. Vacuum pumping systems that really fit your needs. From plug and pump systems through to do-it-yourself pumping solutions and modular customized packages, easily find which turbo pumping system best matches your vacuum needs. The Agilent TPS family features state of the art turbo and primary pumping technologies, to ensure that you get the best experience tailored to your specific application requirements. Meet the TPS family: wide choice, ease-of-use and performance for your own vacuum system Plug and pump solutions - TPS-mini A dry ready to use vacuum system with a TwisTorr FS 70 L/s turbo pump backed by a 10 L/min dry pump. All in a single package, with the smallest footprint and lightest weight in its class. - TPS-compact Do-It-Yourself solutions An integrated system with a TwisTorr FS 70 or 300 L/s turbo pump and IDP3 dry scroll pump included in a single package. For the best vacuum performance and fastest pumpdown times. - TPS-flexy A flexible system with TwisTorr FS 70 or 300 L/s turbo pump, IDP-3 or IDP-7 dry scroll pump or MD-1 diaphragm backing pump, and gauge reading capability. Simply choose your TPS-flexy package, receive all the items and mount the system yourself, using our easy to follow assembly instructions and video tutorial. Customized and portable solutions - TPS-mobile A high capacity, roll-around cart system, featuring high compression ratios and a wide range of pumping speeds. Available with a choice of turbo pumps from 70 to 550 L/sec, with dry scroll pump or oil sealed primary pumps, and a broad choice of gauges and components. 2 Vacuum technology innovations in your TPS TwisTorr stages FS floating suspension IDP dry scroll technology Active gauge capability Adaptive scroll pump driving firmware

Our mission Provide ready-to-use, portable vacuum devices Make users' life easy Offer the right solution for any requirement Guarantee flexibility and adaptability to every application Supply innovative vacuum technologies that increase your productivity Your benefits Optimized combination of turbo and backing pump, for the widest range of applications. Modular design simplifies customization. Agilent quality, for long service life and high reliability. Service-friendly, easy access to components. Plug and Pump: no installation or cabling required. Onboard fore-vacuum safety valve prevents backstreaming in case of power failure. Direct connection and reading of vacuum gauges and controllers. 3

Vacuum made easy: the Agilent TPS family Select your Agilent Turbo Pumping System configuration, also available online. TPS-mini Features Benefits Smallest footprint, lightest weight, compact, dry, clean, and robust system Direct mounting on customer s system (no vacuum pipes needed / improved conductance / plug & pump operation) Active gauge reading capability Can drive a wide range vacuum gauge, no need for external gauge controller Integrated large pressure data display Easy system pressure monitoring Ideal for: Small volume chamber pump-down (<10 L) Laboratories Service purposes Medical applications SEM MS applications Load lock chambers New generation turbomolecular pump TwisTorr 74 FS, backed by a dry 10 L/min diaphragm pump, inside the same case Universal voltage (90 V-240 V) - CE/ CSA certified RS-232 or analogical communication, pressure driven setpoint, analog setpoint Integrated plug and pump dry vacuum system. Cost-effective pumping solution for small volumes Worldwide power configurations, complies with worldwide safety standards Easy to use, easy PLC and PC interfacing 4

TPS-compact Features Benefits Ideal for: Laboratories Universities Medium chamber fast pump-down Industrial applications Electron microscopy and mass spectrometry Integrated IDP-3 dry scroll backing pump Adaptive scroll pump driving system Active gauge reading capability Integrated large pressure data display New generation TwisTorr 74 FS or 304 FS turbomolecular pumps Compact, light, dry, clean, and robust bench top system Nominal voltage (90 240 V) - CE/CSA certified RS-232 or analogical communication, pressure driven setpoint, analog setpoint Wheels option available Very fast pumpdown time. Easy scroll tip-seal replacement (15 min) Extended scroll pump tip-seal life Can drive a wide range vacuum gauge, no need for external gauge controller Easy system pressure monitoring Excellent base pressure, down to 10-10 mbar Plug and pump system, all-in-one, very simple use. Portable, fully Integrated, hydrocarbon-free Worldwide power configurations, complies with worldwide safety standards Easy to use: easy PLC and PC interfacing through A-PLUS software. Easy maneuverability in small space TPS-compact Adaptive Scroll Pump Driving Firmware The Firmware enables a smart management of the scroll pump operation time, to ensure the longest tip-seal lifetime. It continuously monitors the turbo pump s absorbed power, to automatically set up the scroll backing pump operation, according to the pumped gas load. This reduces the overall scroll pump operation time up to 80%, resulting in a much longer scroll pump's tip-seal lifetime. The TPS-compact includes a 70 or 300 L/s turbo with controller, and a dry scroll backing pump in the same package. The Firmware continuously monitors the turbo pump s absorbed power, and automatically sets up the scroll pump operation, according to the pumped gas load. 5

TPS-mobile Features Benefits Roll-around cart Easy maneuverability High capacity systems Wide pumping speed range Very fast pump-down 440 possible configurations, with TwisTorr 74 FS, 304 FS and medium size turbo pumps, backed by Agilent Dry Scroll Pumps (including the new IDP-7) or DS Rotary Vane Pumps Best vacuum performance and base pressure for light gases. The system can be tailored to satisfy any application Large selection of gauges and accessories Gauge reading capability for any pressure range. Easy customization RS-232 or analogical communication, pressure driven setpoint, analog setpoint Easy to use: easy PLC and PC interfacing through A-PLUS software Ideal for: UHV system pump down Ion pump roughing Lamp and tube processing High vacuum system operation System bake-out Onboard fore-vacuum safety valve Nominal voltage (90 240 V) - CE/CSA certified Full system protection against backstreaming in case of power failure. Worldwide power configurations, complies with worldwide safety standards 6

TPS-flexy Features Benefits Flexible, dry,, do-it-yourself solution Adaptable, versatile oil-free solutions. Multiple options for every application need. Only Agilent standard catalog components. Fast availability and delivery. Modular assembling (any component can be replaced separately). Easy and fast field serviceability. Turbo pump is easily detached to mount directly to your chamber Ideal for: UHV system pump-down Laboratories Academic experiments Industrial applications Easy upgrade. Active gauge reading capability through rack control unit Simple configuration upgrade in case of requirements change. Can drive a wide range vacuum gauge, no need for external gauge controller TPS-flexy: Do-it-yourself vacuum! Create your own dry TPS-flexy turbo pumping system with TwisTorr 74 FS or 304 FS turbo pump, onboard or rack controller with gauge reading capability, and IDP-3 or IDP-7 dry scroll pump or MD1 diaphragm pump. TPS-flexy Video Tutorial Order the TPS-flexy package, receive all the items then follow our easy assembly instructions and video tutorial to get your system up and running in a few minutes! Video tutorial with instructions 7

Configure your TPS online You can also configure your Turbo Pumping System using the web app at the following link: Agilent TPS Configurator Learn more: www.agilent.com/chem/turbopumpingsystems Buy online: www.agilent.com/chem/store Contact Us: U.S. and Canada (toll free): +1 800 882 7426 vpl-customercare@agilent.com Europe: (toll free) : +00 800 234 234 00 vpt-customercare@agilent.com China (toll free) : 400 8206778 (mobile) 800 8206778 (landline) contacts.vacuum@agilent.com Asia Pacific: inquiry_lsca@agilent.com Other countries: +39 011 9979 132 This information is subject to change without notice. Agilent Technologies, Inc. 2018 Published in the USA, November, 2018 5994-0540EN