Characteristics of Mechatronics Series

Types and Characteristics Types of Mechatronics Series of Mechatronics Series Characteristics of Mechatronics Series Motion direction Stroke length Thrust force Speed Acceleration Positioning accuracy motor drive Moving coil Moving magnet Timing belt drive Direct drive Slide table Coreless type Stator core Rotor core Moving table Stator magnet Slide table Moving coil Ball screw Stator coil Motor Moving table Timing belt Moving magnet Core type Motor Coil Magnet motor drive Direct drive Timing belt drive Moving coil Moving magnet Vertical Rotation 3 Code description Excellent Good Fair

Mechatronics Series Lineup Precision Positioning Table TE Precision Positioning Table TU Precision Positioning Table LB Nano NT High-strength aluminum alloy is used for main components Light weight, low profile and compact positioning table TE B High rigidity U-shaped track rail adopted Various table specifications are available according to your use. TU High-speed type using a timing belt drive Parallel arrangement of Way ensures stable and high operating performance. TSLB Pursuing ultimate compactification Very low profile of NT38V: only mm A wide variety of selections support optimal choice according to your use. NT V NT H NT XZ NT XZH Precision Positioning Table L Precision Positioning Table LH Stage SA Motor Table LT Standard type highly-proven in various fields Parallel arrangement of Ways with stable performance Component parts from rigorous selection ensure high accuracy and reliability. High rigidity and large carrying mass Sectional height of 3 axes X, Y and is only 2mm (SA6DE). X- and Y-axis: 0.m, -axis: excellent resolution as high as 0.36 sec (SA20DE) Both high speed and high resolution are achieved. High acceleration / deceleration, high response and smooth operations Long term maintenance free specification with C-Lube built in TSL M TSLH M CTLH M SA DE LT CE LT LD LT H Super Precision Positioning Table TX Cleanroom Precision Positioning Table TC Rotary Table RT Table AT Achieved ultimate positioning performance with rolling guide type High accuracy attained by fully-closed loop control Optional for use in high cleanliness environment for semiconductor and LCD manufacturing machines Light weight, low profile and compact positioning table High speed and high resolution rotary positioning table Crossed Roller Bearing ensures high accuracy and high rigidity. High accuracy positioning ensuring precise angle correction Crossed Roller Bearing ensures high rigidity and compactness. TX M CTX M TC EB RT AT Micro Precision Positioning Table TM Precision Positioning Table TS/CT Module AM Precision Elevating Table TZ Ground ball screw drive realizes ultra-small size with sectional height of 20mm and width of 7mm. High positioning accuracy and excellent durability Compact structure with low profile Crossed Roller Way guaranteeing high reliability and high accuracy Supports free designing of stage according to your use Control tolerance of height within 0m Unique wedge mechanism ensures compact and high accuracy vertical positioning. TZX achieving high accuracy and high rigidity through adoption of C-Lube Roller Way Super MX TM TS CT AM TZ TZ H TZ X N=0.02kgf=0.228lbs. mm=0.03937inch 6

Mechatronics Series INDEX Motion direction and feeding mechanism Shape Series Models of single-axis specification Models of multi-axis specification Reference page Precision Positioning Table TE TE B Page - Precision Positioning Table TU TU Page - Precision Positioning Table L TSL M Page -96 TE B TSL M TC EB Precision Positioning Table LH Super Precision Positioning Table TX Cleanroom Precision Positioning Table TC TSLH M TX M TC EB CTLH M CTX M Page -6 Page - Page -6 Micro Precision Positioning Table TM TM Page -80 TM CT TX M Precision Positioning Table TS/CT TS CT Page -96 Timing belt drive TSLB Precision Positioning Table LB Nano NT TSLB NT V NT H NT XZ NT XZH Page -28 Page -2 Rotation motor drive Direct drive LT CE NT V SA DE/X RT Stage SA Motor Table LT Rotary Table RT SA DE/X LT CE LT LD LT H RT SA DE/XY SA DE/XS SA DE/XYS Page -260 Page -276 Page -6 Table AT AT Page -36 AT Module AM AM Page -328 AM motor drive SA DE/S Stage SA SA DE/S SA DE/XS SA DE/XYS Page -260 Vertical TZ Precision Elevating Table TZ TZ TZ H TZ X Page -32 7 8

Models and Size Variations Precision Positioning Table TE TE B High-strength aluminum alloy is used for main components Light weight, low profile and compact positioning table High accuracy positioning Long term maintenance free specification with C-Lube built in Excellent cost performance Precision Positioning Table L TSL M Standard type highly-proven in various fields Parallel arrangement of Ways with stable performance High running accuracy and positioning accuracy Many size variations support easy multi-axis system configurations. Long term maintenance free specification with C-Lube built in TE0B TE60B TE86B 20 000 860, 8 0, 20 TSL 90 M TSL 20 M TSL 70 M TSL 70 S M TSL 220 M 0 600 000 000 96 Precision Positioning Table TU Precision Positioning Table LH TU Original high rigidity U-shaped track rail adopted Various table specifications are available according to your use. Slide table with high accuracy and high rigidity in a single structure Easy ordering just by specifying the identification number for the required functions and performance TSLH M CTLH M Component parts from rigorous selection ensure high accuracy and reliability. High rigidity and large carrying mass High running accuracy and positioning accuracy The series including ultra large size with table width of 20mm Long term maintenance free specification with C-Lube built in (Single-axis specification) (Two-axis specification) TU 2 TU TU 0 TU 0 TU 60 TU 86 TU 00 TU 00 2 28 60 00 00 0 260 00 000 860 80 0 0, 8, 20 0, 20 20 2 TSLH20M TSLH220M TSLH320M TSLH20M CTLH20M CTLH220M CTLH320M 0 00 0 0 00 00 6 9 N=0.02kgf=0.228lbs. mm=0.03937inch 0

Models and Size Variations Super Precision Positioning Table TX Micro Precision Positioning Table TM TX M CTX M (Single-axis specification) (Two-axis specification) Achieved ultimate positioning performance with rolling guide type Fully-closed loop control equipped with super high accuracy linear encoder ensuring high accuracy Control method selectable according to needs Long term maintenance free specification with C-Lube built in TM Ground ball screw drive realizes ultra-small size with sectional height of 20mm and width of 7mm. High positioning accuracy and excellent durability Two types of slide table shapes selectable according to needs Super-miniature sensor can be built in. TX 20M TX 220M TX 320M TX 20M CTX 20M CTX 220M 0 00 0 200 00 0 TM TMG 60 0 0 0 0.,.0,. 0.,.0,. 80 Precision Positioning Table TS/CT Cleanroom Precision Positioning Table TC TC EB TS CT (Single-axis specification) (Two-axis specification) TC0EB TC60EB TC86EB 200 00 000 Optional for use in high cleanliness environment for semiconductor and LCD manufacturing machines Light weight, low profile and compact positioning table Compatible with cleanliness class 3 Long term maintenance free specification with C-Lube built in, 8 0, 20 6 TS / TS 7/ 7 TS 2/ 2 TS 2/ 220 TS 220/ 220 TS 220/ TS 260/ 30 CT / CT 7/ 7 CT 2/ 2 CT 220/ 220 CT 260/ 30 CT 30/ 30 X-axis Y-axis 7. 2. 2 60 7 2 7. 2. 2 60 60 90 2 7. 2. 2 60 2 2 Compact structure with low profile Crossed Roller Way guaranteeing high reliability and high accuracy positioning Compact design achieved by utilizing wide area of slide table,, 96 N=0.02kgf=0.228lbs. mm=0.03937inch 2

Models and Size Variations Precision Positioning Table LB Timing belt drive TSLB Nano NT Standard Type NT V motor drive Timing belt drive achieves high speed travel at,mm/s. Parallel arrangement of Way ensures stable and high operating performance. Long stroke up to,200mm Pursuing ultimate compactification Very low profile of NT38V: only mm A wide variety of selections support optimal choice according to your use. High acceleration / deceleration ensuring highly responsive positioning Two-axis combination of X and Y TSLB 90 TSLB 20 TSLB 70 600 000 200 Resolution 0. 0. 0. 28 High Type NT H Pursuing ultimate compactification High attitude accuracy High speed stability Simple system configuration motor drive Pick and Place Unit NT XZ NT XZH motor drive Pursuing ultimate compactification High-tact positioning Ultrathin and space saving Operation monitoring function NT38V NTV NT80V NT88H NT80XZ NT90XZH 8 6 20 6 2 0 0 00 0 0 Resolution m 0., 0. 0., 0. 0., 0. 0.0, 0.0 0., 0. 0., 0. Item NT V NT H NT XZ 2 3 N=0.02kgf=0.228lbs. mm=0.03937inch

Models and Size Variations Stage SA Motor Table LT SA DE motor drive Compact Type LT CE motor drive Slim and compact design with sectional height of 3 axes, X, Y and being only 2mm (SA6DE) X- and Y-axis: 0.m, -axis: excellent resolution as high as 0.36 sec (SA20DE) Free and independent combination of X, Y and Compact High static stability High speed stability High acceleration / deceleration and high response Long term maintenance free specification with C-Lube built in SA 6 DE/X SA 20 DE/X SA 6 DE/S SA 20 DE/S SA 200 DE/S Maximum operating angle Resolution 0 20 0 degree 60 degree 280 degree 720degree/s 20degree/s 270degree/s 0., 0.m 0., 0.m 0.6s 0.36s 0.2s 260 Long Stroke Type LT LD motor drive Super long stroke High static stability High speed stability Both high speed and high resolution are achieved. Long term maintenance free specification with C-Lube built in High Thrust Type LT H motor drive High thrust High acceleration / deceleration, high response and smooth operations High static stability Air-cooling capable Long term maintenance free specification with C-Lube built in Resolution m Item LT CE LT LD LT H LT00CE LT0CE LTLD LT70LD LTH LT70H 000 200 2 760 2 720 2 70 2 670 2 000 2 000 3 000 3 000 0., 0.,.0 0., 0.,.0 0., 0.,.0 0., 0.,.0 0., 0.,.0 0., 0.,.0 276 N=0.02kgf=0.228lbs. mm=0.03937inch 6

Models and Size Variations Rotary Table RT RT Direct drive Rotation Module AM AM Maximum operating angle degree Max. number of revolution s- Number of encoder fraction sizes RT8A2 360-degree endless 2. 2 62 0 High speed and high resolution rotary positioning table Crossed Roller Bearing ensures high accuracy and high rigidity. High resolution optical encoder adopted Compact and smooth rotation 6 AM2 AM0 AM60 AM86 90 20 Length of track rail 80 290 390 Supports free designing of stage according to your use Control tolerance of height within 0m Variety of positioning operations in combination of X, Y, and Ideal for large size equipment High accuracy, high rigidity, and high reliability 328 Table AT AT Precision Elevating Table TZ TZ AT20 AT200 AT0 Maximum operating angle degree 0 2 High accuracy positioning ensuring precise angle correction Crossed Roller Bearing ensures high rigidity and compactness. High positioning repeatability A series of 3 sizes Rotator resolution m 2 36 TZ20 TZ20X TZ200H TZ200X 0 0 2 2 00 00 2 2 Unique wedge mechanism ensures compact and high accuracy vertical positioning. TZX achieving high accuracy and high rigidity through adoption of C-Lube Roller Way Super MX encoder mountable Long term maintenance free with C-Lube built in A series of two types of reduction ratios 32 7 N=0.02kgf=0.228lbs. mm=0.03937inch 8