EM OIL SEALED ROTARY PUMPS APPLICATION AND ACCESSORY INFORMATION EM ROTARY PUMPS BROAD APPLICATION COVERAGE

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1 4 EM OIL SEALED ROTARY PUMPS Oil sealed pumps and combinations BOC Edwards rugged mechanical oil sealed pumps are available in sizes from 4 to 75 m 3 h - / 3-6 ft 3 min -, in both one and two stage designs. They feature: Advanced oil lubrication circuit High reliability Accessories to match your application needs APPLICATION AND ACCESSORY INFORMATION EM ROTARY PUMPS The use of BOC Edwards rotary pumps with our comprehensive range of accessories will result in enhanced performance and reliability. The information below will help you to select the correct accessories for your application. However, we recommend that you treat this as a guide only, because the final selection of components can be influenced by the operation of your vacuum system and the process by-products. If in doubt, please contact BOC Edwards or your local supplier for further advice from an BOC Edwards application specialist. When you select accessories for your system, the major aim is to prolong the life and the safe operation of the pumps and to ensure that the system continues to perform at its ultimate specification. To do this, you need to ensure that the system is able to accommodate the process media and any process by-products, including vapors, liquids or particulates, which may damage the pumps. At the same time, you should ensure that any materials discharged from the system to atmosphere are not harmful to the environment and to people nearby. BROAD APPLICATION COVERAGE Industrial Industrial EM primary pumps are annotated with the suffix "IND". EM primary pumps are safe to handle non-flammable gases and vapors within the normal operating parameters of the pump. Flammable gases and vapors may also be pumped, provided they are outside the flammable range, please consult BOC Edwards for advice. PFPE EM primary pumps may be supplied for use with PFPE oil. This enables them to be used in harsh (corrosive) processes, or where the presence of Oxygen will result in rapid degradation of hydrocarbon oils. ATEX EM primary pumps (hydrocarbon oil only) may be supplied with ATEX classification either as part of a pump system or stand-alone. Please consult BOC Edwards. ATEX compliance is typically specified for use in Europe, but may also be required in other areas. ATEX compliant EM primary pumps are suitable for operation in ATEX systems rated as follows: Pump Internal External Classification Classification Classification EM4, EM4, EM8 & EM8 II 3 Gc IIB T4 II G IIB T4 EM75, EM75, EM75 & EM75 II 3 Gc IIB T4 II G IIB T6 Where the following classification... Symbol Meaning Specifies that an ATEX-compliant EM pump can be used in a potentially explosive atmosphere II Equipment Group II = non-mining equipment 3 (Int) (Ext) G Equipment Category 3 (or ) G = Gas c Constructional safety IIB Gas Group Suitable to pump gases in gas group IIB Where no gas group is mentioned, there are no limitations T4 T6 Temperature Class Gas auto-ignition temperature greater than: T4 = 35 C, T6 = 6 C A four-pole, three-phase ATEX approved flameproof motor provides direct drive through an ATEX certified flexible coupling to the EM4, EM8, EM75 and EM75 pumps. A cooling fan is attached to the drive coupling on the EM4 and EM8 pumps. The EM75 and EM75 pumps are water-cooled. Lubrication is provided by a sliding vane oil pump, which delivers pressurized oil to the vacuum pumping mechanism. Pumps are supplied with sealed Gas Ballast. Plugs have been fitted to prevent flammable atmospheres accidentally entering the pump. If the gas ballast facility is required, an N purge must be used, or clean air supplied from a safe area. For much of the operating cycle the pump operates at pressures significantly below.8 bar (.6 psi) absolute. However, the final stage of the pump will exhaust to atmosphere and there is a startup and shutdown period where the whole pump is briefly operating at atmospheric pressure. A surface temperature thermal snap switch is fitted to the body of the EM75 and EM75 rotary pumps. This must be connected to an intrinsically safe circuit suitable for the hazardous zone in which it may be located; otherwise it must be located in a safe area. If the pump temperature should rise due to a fault condition, the snap switch activates and the pump will shut-off. Trapping particulates In any application, first ensure that particulates in the process stream are trapped before they get into the pump: use the ITM or ITF inlet filters which are suitable for use with oil-sealed and dry pumps. However, in processes which generate or contain large amounts of particulates, some will enter the pump: use our EOF an external oil filter to remove particulates from the pump oil during operation. ITF inlet dust filters If the mechanical pump is a backing pump for a diffusion pump, the diffusion pump will trap particulates during normal operation, but the diffusion pump will not trap dust during the roughing stage of the process cycle. We recommend you fit an ITF filter to the mechanical pump inlet (that is, in the foreline): this filter has a replaceable element. Note that the impedance of a clean filter will cause the pumping speed to decrease by about % at mbar and % at - mbar. The ITF filter is more that 6% efficient, when tested in accordance with BS83. ITM high capacity inlet dust filters Use an ITM filter for applications where there is a high load of dust and particulates. Fit the ITM directly to the inlet of a rotary or mechanical booster pump. This filter has a stainless steel mesh element that can be washed and re-used. It is ideal for use when backing diffusion pumps or for wet processes where a paper filter may become blocked quickly. The ITM filter has high conductance and is therefore ideal for applications which require fast pump down times. The ITM filter has an efficiency of %, when tested in accordance with BS383.

2 EOF external oil filters Use the EOF s with the EM oil-sealed rotary pumps, to remove particulates trapped in the pump oil. There are two types of EOF filter. The EOFA and EOFM filters use the internal pressurized oil system of the pump to continually filter a proportion of the pump oil. These filters are only suitable for hydrocarbon oil. The EOFM filter removes particulates down to.5 microns, and the EOFA filter both removes particulates and includes an active element to remove acidic and other aggressive contaminants from the oil. EOF pumped external oil filters have their own oil re-circulation pump. The re-circulation pump has a high flow rate and allows large quantities of oil to be filtered. The filter is fitted with a gauge which indicates when the filter need to be changed. This filter is suitable for hydrocarbon and PFPE oils. Pumping vapors The use of gas ballast significantly improves vapor handling capability of oil sealed rotary pumps. We offer a number of accessories to improve the utility of gas ballast. EBV gas ballast control valve Fit EBV gas ballast control valve to allow remote or automated control of gas ballast. TCV temperature control valve The vapor pumping performance of the larger oil sealed pumps can be enhanced by fitting a TCV. Use the TCV both to warm-up the pump faster (which reduces the amount of condensation in the pump) and to reduce water usage and cost. ITC inlet chemical traps Fit an ITC trap to the inlet of the pump to protect against the aggressive process vapors that may corrode the pump or degrade the oil. Trapping liquids The use of gas ballast allows an oil sealed pump to process significant quantities of vapor. However, oil sealed pumps can not pump liquid streams and it is important both to remove liquids before they reach the pump inlet and to prevent condensed liquids from flowing back into the pump outlet. The following accessories may be suitable for your application: ITO inlet trap The ITO inlet trap is ideal for processes where there is a risk of liquids in the process entering the pump inlet. Fit the ITO trap to the pump inlet or elsewhere in the foreline. CP catchpot Process vapors passing through the pump may condense after the pump outlet, in the exhaust line. Fit a CP catchpot to the pump outlet to trap the condensates and prevent them flowing back into the pump. Exhaust management You should aim to minimize the impact of gases and vapors which exhaust from the pump outlet. BOC Edwards offers a range of exhaust management systems for the most exacting applications (see page 7-). However, for most straight-forward applications of oil sealed rotary pumps, we recommend that you fit an oil mist filter to the pump outlet to remove oil mist vapor. A mist filter is not required if you vent the exhaust gases remotely or pass them through exhaust scrubbing equipment. MF oil mist filters The MF filters remove oil mist (vapor) from the process gases exhausted from the outlet of an oil sealed pump. The filters remove both odor and oil vapor and so prevent it from reaching the atmosphere and the workplace. Back migration When operated at ultimate pressure for extended periods of time, any oil sealed pump allows oil vapor to back migrate into the process chamber. The back-migration of oil vapor could contaminate your process or your vacuum system. ITC inlet chemical trap Fit an ITC inlet chemical trap (filled with an alumina charge) to the pump inlet to trap oil vapor and to prevent back migration. APPLICATIONS Refrigeration dehydration Brake line evacuation TV aluminizers Vacuum metallurgy Fluorescent light tube pumping Thin film coating IT hard disc coating Vacuum distillation Cryogenic vessel evacuation Transformer and cable drying Pharmaceutical freeze drying Space simulation Crystal growing Automotive Chemical processing INDUSTRIAL PUMPS AND PUMPING SYSTEMS 5

3 DATA SUMMARY EM OIL SEALED ROTARY PUMPS PUMP EM4 EM4 EM8 EM8 Catalog page -7-8 Displacement5 Hz m 3 h - / ft 3 min / 5 8 / Hz m 3 h - / ft 3 min /.7 6 / 56.5 Speed 5 Hz m 3 h - / ft 3 min - 37 /.8 74 / 43.6 (Pneurop)6 Hz m 3 h - / ft 3 min - 44 / 5. / 53 Number of stages Ultimate vacuum (total pressure) without gas ballast mbar / Torr. x - / 7.7 x -. x -3 / 7.7 x x - / 5.4 x -. x -3 / 7.7 x -4 with gas ballast mbar / Torr 5. x - / 3.8 x - 7. x -3 / 5.4 x x - / 3. x - 7. x -3 / 5.4 x -3 Inlet connection ISO4 ISO4 Outlet connection 5 mm flange suitable for NW5 5 mm flange suitable for NW5 Maximum permitted pressure at outlet bar gauge.5.5 Maximum inlet pressure for water mbar / Torr 4 / 3 7 / /.5 5 / 3.8 vapor Maximum water vapor pumping kg h - / lb h -. /.4. /.4.7 / /.7 rate Weight kg / lb 7.5 / 55 7 / 5 5 / 5 / 3 Motor protection rating IP 44 or or 54 Motor power5 Hz kw / hp. /.5. / 3 Motor power6 Hz kw / hp.5 / 3 / 4 Standard oil capacity maximum liter / qt 4.6 / / / / 6.7 minimum liter / qt. /.3. /.3 4. / / 4. PFPE oil capacity maximum liter / qt 3.5 / / 4. minimum liter / qt.3 /.6. /.3 Recommended oil Ultragrade 7 Ultragrade 7 Noise level db(a) PUMP EM75 EM75 EM75 EM75 Catalog page - - Displacement5 Hz m 3 h - / ft 3 min - 78 / 5 / 7 6 Hz m 3 h - / ft 3 min - 4 / 6 35 / 6 Speed5 Hz m 3 h - / ft 3 min - 6 / 4 55 / 5 (Pneurop)6 Hz m 3 h - / ft 3 min - 6 / 5 36 / 8 Number of stages Ultimate vacuum (total pressure) without gas ballast mbar / Torr 7. x - / 5.4 x -. x -3 / 7.7 x -4. x - / 6. x -. x -3 / 7.7 x -4 with gas ballast mbar / Torr 4. x - / 3. x - 5. x -3 / 3.75 x x - / 4.6 x - 5. x -3 / 3.8 x -3 Inlet connection ISO 63 blank flange with seal ISO 63 blank flange with seal Outlet connection ISO 4 flange center tapped ½ in BSP ISO 4 flange center tapped ½ in BSP Maximum permitted pressure at outlet bar gauge.5.5 Maximum inlet pressure for water mbar / Torr 5 / 38 / 5 5 / 38 / vapor Maximum water vapor pumping kg h - / lb h /.8.4 / 5.3. /.3.3 / 5. rate Weight kg / lb 4 / 48 / 44 / / 45 Motor protection rating IP Motor power5 Hz kw / hp 5.5 / / Motor power6 Hz kw / hp 6.5 / / Standard oil capacity maximum liter / qt 5 / 6 8 /.5 minimum liter / qt 6 / 7 / PFPE oil capacity maximum liter / qt 8 / 8 / minimum liter / qt 6.5 / 6. 7 / 7 Recommended oil Ultragrade 7 Ultragrade 7 Noise level db(a)

4 EM4 ONE STAGE, EM4 TWO STAGE 4.5 m 3 h -, 5 ft 3 min -, 7 l min - EM oil sealed rotary pumps 3 m h ft min EM4 3 4 EM Pa 5 Hz EM4 without gas ballast 5 Hz EM4 with gas ballast 3 5 Hz EM4 without gas ballast 4 5 Hz EM4 with gas ballast (3.43) EM4 EM4 without gas ballast with gas ballast 87 (3.43) 5Hz 6Hz x Ø (.47) mbar Torr INDUSTRIAL PUMPS AND PUMPING SYSTEMS 7 ISO4 4 x M8 x 5 (.5) 4 (.45) 35 (5.55) 665 (6.8) 4 5 (.6) (7.5) (8.66) 5 (.8) NW5 45 (4.7) 37 (5.63) EM4 Industrial EM4-4 V or V, 3-ph, 5 Hz A34435 EM4 8-3 V or 46 V, 3-ph, 6 Hz A3448 EM4-4 V or V, 3-ph, 5 Hz A36435 EM4 8-3 V or 46 V, 3-ph, 6 Hz A3648 EM4 PFPE* EM4FX -4 V or V, 3-ph, 5 Hz A36435 EM4FX 8-3 V or 46 V, 3-ph, 6 Hz A3648 EM4 ATEX** EM4T4 4 V, 3-ph, 5 Hz A34483 EM4T4 4 V, 3-ph, 5 Hz A36483 Ultragrade 7 oil, NW4 "O" ring and centering ring, ISO 4 "C" clamp, bolts, washers, 8 mm external diameter coupling tube and compression sleeve for outlet, ISO 5 "C" clamp, bolts and washers supplied with each pump * No oil supplied ** ATEX EM pumps may be supplied with ATEX classification either as part of a pump system or stand-alone, on application. Please consult BOC Edwards. 5 (.7)

5 EM8 ONE STAGE, EM8 TWO STAGE 8 m 3 h -, 47 ft 3 min -, 333 l min h m 3 4 EM8 Industrial EM8-4 V or V, 3-ph, 5 Hz A34535 EM8 8-3 V or 46 V, 3-ph, 6 Hz A3458 EM8-4 V or V, 3-ph, 5 Hz A36535 EM8 8-3 V or 46 V, 3-ph, 6 Hz A3658 EM8 PFPE* EM8FX -4 V or V, 3-ph, 5 Hz A36535 EM8FX 8-3 V or 46 V, 3-ph, 6 Hz A3658 EM8 ATEX** EM8T4 4 V, 3-ph, 5 Hz A34583 EM8T4 4 V, 3-ph, 5 Hz A36583 Ultragrade 7 oil, NW4 "O" ring and centering ring, ISO 4 "C" clamp, bolts, washers, 8 mm external diameter coupling tube and compression sleeve for outlet, ISO 5 "C" clamp, bolts and washers supplied with each pump * No oil supplied ** ATEX EM pumps may be supplied with ATEX classification either as part of a pump system or stand-alone, on application. Please consult BOC Edwards EM8 EM8 5Hz mbar Pa 5 Hz EM8 without gas ballast 5 Hz EM8 with gas ballast 3 5 Hz EM8 without gas ballast 4 5 Hz EM8 with gas ballast min - ft EM8-3 - EM8 - without gas ballast with gas ballast 6Hz Torr (8.66) 8 8 (3.86) 8 (3.86) 48 (6.85) 4 x Ø (.47) 8 55 (.4) 55 (.65) 75 (3.3) 43 (6.3) 5 (.8) ISO4 4 x M8 x 5 (.5) NW5 66 (.47) (.) 33 (5.4)

6 EM75 ONE STAGE, EM75 TWO STAGE 78 m 3 h -, 5 ft 3 min -, 67 l min - 3 EM75 Industrial EM75-4 V or V, 3-ph, 5 Hz A34635 EM V or 46 V, 3-ph, 6 Hz, 4-pole A34638 EM75-4 V or V, 3-ph, 5 Hz A36635 EM V or 46 V, 3-ph, 6 Hz, 4-pole A36638 EM75 PFPE* EM75FX -4 V or V, 3-ph, 5 Hz A EM75FX 8-3 V or 46 V, 3-ph, 6 Hz A36668 EM75 ATEX** EM75T4 4 V, 3-ph, 5 Hz A34683 EM75T4 4 V, 3-ph, 5 Hz A36683 Ultragrade 7 oil, NW4 "O" ring and centering ring, ISO 4 "C" clamp, bolts, washers, 8 mm external diameter coupling tube and compression sleeve for outlet, ISO 5 "C" clamp, bolts and washers supplied with each pump * No oil supplied ** ATEX EM pumps may be supplied with ATEX classification either as part of a pump system or stand-alone, on application. Please consult BOC Edwards. 3 m h ft min A B -4 3 EM Pa 5 Hz EM75 without gas ballast 5 Hz EM75 with gas ballast 3 5 Hz EM75 without gas ballast 4 5 Hz EM75 with gas ballast (.3) C 5 (6.6) D EM without gas ballast with gas ballast 55 (6.) 45 (5.7) 6 (8.) E (.4) 388 (5.8) 44 (5.) 58 (.3) EM75-48 (.76) 4 x Ø4 (.55) EM75-38 (36.3) (.8) 4 x M 75 4 (.55) 8 (3.5) 3 (5.35) 5Hz 6Hz 3 (.5) ISO63 6 (7.7) 3 (.5) (4.4) mbar Torr 55 (.7) F 3 (.8) ISO4 INDUSTRIAL PUMPS AND PUMPING SYSTEMS (.33) 45 3 (4.45) 8 (5.4) A B C Union for oil return connection from oil mist filter Gas ballast control valve Water connections (tapped /8 in BSP) D E F Oil drain tap (tapped ½ in BSP) Oil filter mounting plate (allow 33 mm to withdraw filter from pump) Oil pressure take-off (tapped!/8 in BSP)

7 EM75 ONE STAGE, EM75 TWO STAGE m 3 h -, 7 ft 3 min -, 4867 l min h m EM75 Industrial EM75-4 V or V, 3-ph, 5 Hz A34735 EM V or 46 V, 3-ph, 6 Hz, 4-pole A34738 EM75-4 V or V, 3-ph, 5 Hz A36735 EM V or 46 V, 3-ph, 6 Hz, 4-pole A36738 EM75 PFPE* EM75FX On application EM75 ATEX** EM75T4 4 V, 3-ph, 5 Hz A34783 EM75T4 4 V, 3-ph, 5 Hz A36783 Ultragrade 7 oil, NW4 "O" ring and centering ring, ISO 4 "C" clamp, bolts, washers, 8 mm external diameter coupling tube and compression sleeve for outlet, ISO 5 "C" clamp, bolts and washers supplied with each pump * No oil supplied ** ATEX EM pumps may be supplied with ATEX classification either as part of a pump system or stand-alone, on application. Please consult BOC Edwards. -4 EM75 EM75 5Hz mbar Pa min ft -4 EM75 EM75 6Hz Torr A B 54 (.3) C 55 (6.) 6 (8.) 58 (.3) 36 (4.7) (.8) 75 4 (.55) 3 (.5) 55 (.7) F 5 (6.6) D 45 (5.7) E (.4) 388 (5.8) 44 (5.) 48 (.76) 4 x Ø4 (.55) 4 x M 8 (3.5) 3 (5.35) 45 (6.73) ISO63 4 (.58) (4.4) 3 (.8) ISO (3.) 45 3 (4.45) 8 (5.4) A B C Union for oil return connection from oil mist filter Gas ballast control valve Water connections (tapped /8 in BSP) D E F Oil drain tap (tapped ½ in BSP) Oil filter mounting plate (allow 33 mm to withdraw filter from pump) Oil pressure take-off (tapped!/8 in BSP)

8 SPARES The clean and overhaul kit contains all of the springs, gaskets, seals and other components required for routine maintenance and whenever the pump is dismantled. Add a blade kit for a full service. The major service kit contains gaskets, seals, filters, blades, bearings and other components required for a complete service after prolonged operation or after pumping corrosive gases and vapors. EM4/EM4 Clean and overhaul kit A3443 EM4 Blade kit A3445 EM4 Blade kit A3645 EM4 Major service kit A34484 EM4 Major service kit A36484 EM8/EM8 Clean and overhaul kit A3453 EM8 Blade kit A3455 EM8 Blade kit A3655 EM8 Major service kit A34584 EM8 Major service kit A36584 EM75/EM75 EM75 Clean and overhaul kit A3463 EM75 Clean and overhaul kit A3663 EM75 Blade kit A34634 EM75 Blade kit A36634 EM75 Major service kit A34683 EM75 Major service kit A36683 EM75 Complete interior assembly A346 EM75 Complete interior assembly A366 EM75/EM75 EM75 Clean and overhaul kit A3463 EM75 Clean and overhaul kit A3663 EM75 Blade kit A34734 EM75 Blade kit A36734 EM75 Major service kit A34783 EM75 Major service kit A36783 EM75 Complete interior assembly A347 EM75 Complete interior assembly A367 ACCESSORIES EM4/EM4 MF outlet mist filter A463 MFAE outlet mist filter A46 Vibration isolators (set of 4) A4845 EM8/EM8 MF outlet mist filter A463 MFAE outlet mist filter A46 Vibration isolators (set of 4) A4845 EM75/EM75 MF3 outlet mist filter A464 Vibration isolators (set of 4) A4846 EM75/EM75 MF3 outlet mist filter A464 Vibration isolators (set of 4) A4846 For accessories, see page -. For rotary pump oils, see page LARGE PUMP ACCESSORIES 7 8 Inlet dust filter Inlet catchpot 3 Outlet catchpot 4 Oil level monitor (E/M4 + E/M8 only) 5 Thermostatic control valve (E/M75 + E/M75 only) 6 Vibration isolators 7 Pumped external oil filter 8 External oil filter Industrial wet pumps are used in a wide variety of applications and produce reliable vacuum for many processes. To optimize the installation and to prolong pump life, BOC Edwards offer a range of accessories for our large oil-sealed pumps. Our pumps and accessories are designed to ensure that accessories are easy to install. We offer inlet and exhaust traps and filters, together with external oil filtration and oil pressure monitoring, pump temperature control and vibration isolators INDUSTRIAL PUMPS AND PUMPING SYSTEMS

9 MF OUTLET MIST FILTERS CP OUTLET CATCHPOTS The MF3, MF and MF3 mist filters are suitable for pumps from EM8 to EM75. They are very efficient at.85% DOP test (pre-wetted filter;.5% with dry element). The oil level sight-glass provides easy monitoring of mist filter status. The MFAE is a version of the MF, designed for use with corrosive gases and vapors and for greater security when processing toxic substances. It is very efficient at.% DOP test (pre-wetted; 8.4% with dry element). This version is leak tested to -4 mbar l s - / 3.8 x -3 Torr. The filter element, sight-glasses and seals are resistant to chemical attack. The MFAE is fitted with an acrylic sight-glass (for use with fluorinated processes); a glass sight-glass is also supplied with the filter (for use with chlorinated processes). A version of the EMF clean application oil return kit is available for all the MF filters, except the MFAE. Model MF mist filter ( kg/6.5 lb) A463 Model MFAE mist filter ( kg/6.5 lb) A46 Model MF3 mist filter (8 kg/6 lb) A464 Supplied with two NW5 "C" clamps, NW5 elbow, two NW5 centering ring and "O" rings, bolts, washers, mounting brackets and studs Supplied with two ISO4 "C" clamps, ISO4 elbow, two 4 mm Co-Seals, bolts, washers, mounting brackets and studs ACCESSORIES Clean application oil return kit (EM4 to EM8) Clean application oil return kit (EM75 to EM75) SPARES MF MFAE MF3 Spares kits MF, MFAE MF3 MFAE sight-glass kit A54 A55 A34 A345 A34 A4638 A4648 A58 In some industrial applications it is desirable for pumps to be provided with piped exhaust arrangements to carry gases and vapors to the outside of the building. There is always a risk that some vapor carried out with the effluent gas will cool and condense as it travels up the exhaust line and the liquid produced will drain back into the pump causing serious contamination. For this reason, it is good practice to use a catchpot between the pump outlet and the exhaust line to prevent this from happening. These catchpots are designed for fitting directly to the pump outlet, or can be remotely mounted if required. A "high level" sight glass is provided to indicate the need for draining the catchpot when the nominal capacity is reached. A drain plug is also provided. Note: When an oil mist filter is used, a separate catchpot is generally unnecessary. Model CP outlet catchpot, A liter/6. qt capacity (. kg/6.5 lb) Model CP3 outlet catchpot, A liter/ qt capacity (8. kg/6 lb) Supplied with two NW5 "C" clamps, NW5 elbow, two NW5 centering rings and "O" rings, bolts, washers, mounting bracket and studs. Supplied with two ISO4 "C" clamps, ISO4 elbow, two 4 mm "O" rings and centering rings, bolts, washers, mounting brackets and studs. EXTERNAL OIL FILTERS: EOFA/3A (CHEMICAL) AND EOFM/3M (DUST) These filters are operated by the internal pressurized oil system of the pump, which by-passes a proportion of the oil through the filter. The filters are easy to install just connect the flexible hoses supplied to the oil outlet and return connectors on the pump. The oil capacities are approximately 6 liters / 5.7 qt (EOF) and 5 liters / 4.3 qt (EOF3). The EOFA and EOF3A chemical filters have a renewable high-capacity, activated earth element. The filters purify the oil by removing acidic and other aggressive contaminants. These filters are intended for use with hydrocarbon oils, and they will greatly increase the interval between oil changes.

10 The EOFM and EOF3M dust filters have pleated paper elements which trap small dust particles (down to.5 micron diameter). Use these filters for applications which produce large quantities of abrasive dust (for example, vacuum furnaces). External oil filter, without connection kit EOFA EOFM External oil filter, with EM/EM75 and 75 connection kit EOF3A EOF3M Connection kit for EM/EM4 and EM/EM8 EOFA and M EOF3A and M Activated earth element EOFA EOF3A Dust filter element EOFM EOF3M PUMPED EXTERNAL OIL FILTERS EOF filters have their own pump, which delivers 3.5 l min - /.8 US gal min - (5 Hz) clean, decontaminated oil to the pump oil system. The canister is available in two sizes to suit the contaminant load. The 5P and 4P elements filter dust contaminants from the oil. The 5C and 4C elements filter both dust and chemical contaminants. Both elements have a pleated paper filter to trap dust particles; the 5C and 4C elements have a bed of activated alumina for chemical adsorption. Oil pump flow rate 3.5 l min - /.8 US gal min - (5 Hz) Electrical supply - / -4 V, -ph, 5/6 Hz Current 5 A (start),.5 A (run) Dimensions Height 435 mm / 6.7 in Width 385 mm / 5. in Depth 3 mm /.4 in Weight (dry) Base units.5 kg / 5 lb 5 CR canister.8 kg / 6 lb 4 CR canister 4 kg / lb Please consult BOC Edwards or your supplier for other technical data. A54 A55 A53 A53 A53 A364 A3443 A3433 A3444 A344 OPG OIL PRESSURE GAUGES Fit the OPG to the pump to allow visual indication of the oil pressure. This will provide early indication of a reduction in oil pressure so you can plan preventative maintenance. The 3 psig OPG gauges are buffered against pulses in the oil pressure, to give a steady reading. The OPGHC is made of brass construction. VIBRATION ISOLATORS CR base module, PFPE prepared A54 Supplied with hoses and pairs of disconnects. When you order, specify a base module, canister, element and a pump connection kit separately. EOF canisters 5CR A54 4CR A544 Spare elements 4P A3468 5C A34 4C A34 Oil sampling valve A54 Canister outlet pressure gauge H3 Pump connection kits EM/EM4 A54 EM/EM8 A544 EM/EM75 On application EM/EM75 On application OPGHC brass oil pressure gauge Connection kit for fitting You may need to fit vibration isolators to your pump if you mount it into a frame or system, if the mounting points are not level or if you need to minimize the transmission of vibration and noise in your application. You must fit flexible bellows or other flexible pipes to the pump inlet and outlet. PUMP APPROXIMATE REDUCTION IN HEIGHT WITH PUMP FITTED (mm) WEIGHT SET OF FOUR A5435 On application EM4/EM4.5.6 kg/.3 lb A4845 EM8/EM8.5.6 kg/.3 lb A4845 EM75/EM75 3. kg/ lb A4846 EM75/EM kg/ lb A4846 Details of vibration isolators for use with rotary/mechanical booster pump combinations are available on request. INDUSTRIAL PUMPS AND PUMPING SYSTEMS 3

11 OLM OIL LEVEL MONITOR ITF INLET DUST FILTERS 4 Fit the OLM in place of the oil sight glass on the EM/EM 4 and 8 pumps. The OLM continues to allow visual inspection of the oil level and condition, while also providing a switched output for remote indication. Technical data: 4 V a.c. or d.c., maximum current.5 A, switching power W ( VA). OLM oil level monitor EBV GAS BALLAST CONTROL VALVES Fit the EBV valve (EBV for RVs and EM.5 to EM8, EBVS for EM4 and 8, EBV3S for EM75 and 75, EBV3D for EM4, 8, 75 and 75) to allow remote operation of the pump s gas ballast control. For example, the EBV can be configured to switch off the gas ballast when the pump is switched off, to provide suck-back protection. The EBV can also be configured to prevent the 75 and 75 from running backwards when the gas ballast valve is open and the pumps are stopped under vacuum. EBV (.5 kg) 4 V s.ph 5/6 Hz EBVS (.5 kg) 4 V s.ph 5/6 Hz EBV3S (. kg) 4 V s.ph 5/6 Hz EBV3D (. kg) 4 V s.ph 5/6 Hz TCV3 TEMPERATURE CONTROL VALVE A5433 A563 A583 A563 A573 The ITF inlet dust filters prevent the entry of dust particles into the pump. The impedance of a clean filter reduces the pumping speed of a m 3 h - / ft 3 min - pump by about % at mbar /.75 Torr and 5% at mbar / 7.5 Torr. Depending on your application, you can normally clean the filter element with a vacuum cleaner or a clean air blast, and then re-use the element. The benefits of the ITF filters include: Thick aluminum casting, to withstand abrasion Tangential entry port, to promote centrifugal separation of dust particles Filter efficiency better than 6% (tested to BS83, dust number ) ITF inlet dust filter (7. kg/5 lb)* ITF3 inlet dust filter (8.3 kg/8 lb) ITF8 inlet dust filter (. kg/44 lb)** ITF3 inlet dust filter * Supplied with bolts, washers, 4 mm "O" ring and centering ring Supplied with 63 mm Co-Seal, bolts and washers ** Supplied with mm Co-Seal, bolts and washers Supplied with 6 mm Co-Seal, bolts and washers SPARES ITF element and gasket kit ITF3 element and gasket kit ITF8 element and gasket kit ITF3 element ( required) A44 A443 A444 A44 A448 A4438 A4448 A3437 ITM HIGH CAPACITY INLET DUST FILTERS The ITM deep, stainless steel mesh elements are ideal for applications where fast pump-down times are required and which produce high levels of dust and grit (which would normally clog the ITF filters very quickly). You can wet the stainless steel mesh element with oil to improve dust adhesion. You can wash the mesh elements and re-use them indefinitely. The benefits of the ITM filters include: Thick aluminum casting, to withstand abrasion Tangential entry port, to promote centrifugal separation of dust particles Filter efficiency better than % (tested to BS83, dust number ) Glass cover, to allow a visual check of the filter element Use the TCV3 with the EM/EM75 and 75 pumps. The valve facilitates rapid pump warm-up and higher operation temperatures. This improves the pump s vapor pumping performance. The TCV3 also reduces the use of cooling water and reduces operation costs. TCV3 (. kg/.6 lb) A5

12 ITM high capacity dust filter (7. kg/6 lb)* ITM3 high capacity dust filter (8.7 kg/ lb) ITM8 inlet dust filter (. kg/44 lb)** ITM3 inlet dust filter ITM5 inlet dust filter * Supplied with bolts, washers, 4 mm "O" ring and centering ring Supplied with 63 mm Co-Seal, bolts and washers ** Supplied with mm Co-Seal, bolts and washers Supplied with 6 mm Co-Seal, bolts and washers SPARES ITM filter element ITM3 filter element ITM8 filter element ITM3 filter element ( required) ITP8 DUST & PARTICULATE TRAP A443 A4433 A4434 A443 A4433 A35 A35 A358 A3533 These catchpots minimize the entry of condensable vapors into the pump. Benefits of the catchpots include: Capture condensable vapors Helps prevent froth or spray from the process from carrying over to the pump Corrosion-resistant body Visual indication of trapped liquid level Hand-tightened drain plug, for easy drainage ITO inlet catchpot, 5.47 liters/5. qt capacity (6.8 kg, 5 lb)* ITO3 inlet catchpot, 7.87 liters/7.5 qt capacity (8. kg/8 lb) IT8 inlet catchpot,.5 liters/ qt capacity (.5 kg/43 lb)** * Supplied with bolts, washers, 4 mm "O" ring and centering ring Supplied with 63 mm Co-Seal, bolts and washers ** Supplied with mm Co-Seal, bolts and washers NEW A44 A443 A444 The ITP8 dust and particulate trap is intended for use in processes where large quantities of dust and particulates will block conventional filters in a matter of hours or days. Although primarily intended for Semicon applications such as SACVD, BPSG and some PECVD processes, the ITP8 is also suitable for high-dust industrial processes. Constructed from a series of concentric fine mesh cylinders, the ITP8 provides an unrestricted gas flow, but presents a large surface area onto which dust is collected. The ITP8 has a complete self-contained filter element in a canister which is quick, safe and easy to remove and replace, thus reducing downtime. Contaminants are contained within the canister, reducing the risk of spillage at the pump. ITP8 dust & particulate trap complete Weight kg/48 lb SPARES C self contained filter element spare ITO INLET CATCHPOTS A4454 A4467 ITC INLET CHEMICAL TRAPS The ITC series of chemical traps provides the following benefits: Protection against various aggressive vapors, which may attack the pump or pump oil Prevent high molecular weight vapors (such as might arise in a resin treatment plant), from reaching the pump. These vapors could cause lacquering or clogging The standard sorbent (activated charcoal), has relatively high trapping properties (absorbs around 5% of its own weight), even when large amounts of water vapor are being pumped When filled with activated alumina on two-stage pumps, backstreaming of pump oil can be controlled ITC inlet chemical trap* Charcoal charge.75 kg/.7 lb, weight 6.5 kg/.7 lb ITC3 inlet chemical trap Charcoal charge. kg/.4 lb, weight kg/ lb ITC8 inlet chemical trap ** Charcoal charge 3.3 kg/.4 lb, weight kg/ lb * Supplied with bolts, washers, 4 mm "O" ring and centering ring Supplied with 63 mm Co-Seal, bolts and washers ** Supplied with mm Co-Seal, bolts and washers SPARES A444 A4443 A kg/. lb activated charcoal H5 3 kg/6.6 lb activated charcoal H5.45 kg/ lb activated alumina H65. kg/.5 lb activated alumina H656 INDUSTRIAL PUMPS AND PUMPING SYSTEMS 5

13 ALL TERRITORIES EXCEPT NORTH AMERICA RC Rotary pump (includes pump, frame and coupling components) EM4 with ultragrade oil EM4 with ultragrade oil 3 EM4F with PFPE oil 4 EM8 with ultragrade oil 5 EM8 with ultragrade oil 6 EM8F with PFPE oil 7 EM75 with ultragrade oil 8 EM75 with ultragrade oil EM75F with PFPE oil A EM75 with ultragrade oil B EM75 with ultragrade oil C EM75F with PFPE oil D EM4FX PFPE prepared no oil E EM8FX PFPE prepared no oil F EM75FX PFPE prepared no oil G EM75FX PFPE prepared no oil Booster pump (includes booster and coupling components) Territory English French German 3 Italian 4 Chinese 5 Japanese 6 Korean 7 Spanish 8 Dutch Other EU A Other European B Other Asian Vibration Isolators No vibration isolators Vibration isolators small Vibration isolators large Voltage 6 No booster EH5 with ultragrade oil EH5F with PFPE oil 3 EH5 with ultragrade oil 4 EH5F with PFPE oil 5 EH with ultragrade oil 6 EHF with PFPE oil 7 EH6 with ultragrade oil 8 EH6F with PFPE oil EH4 with ultragrade oil A EH4F with PFPE oil B EH5FX PFPE prepared no oil C EH5FX PFPE prepared no oil D EHFX PFPE prepared no oil E EH6FX PFPE prepared no oil F EH4FX PFPE prepared no oil Mist filter No mist filter MF MFAE 3 MF3 4 MF with oil return 5 Not available 6 MF3 with oil return 38/45 V, 5 Hz 3/46 V, 6 Hz 3 38 V, 6 Hz 4 V, 5/6 Hz Oil level monitor No oil level monitor Oil level monitor rotary pump only Oil level monitor booster pump only 3 Oil level monitor both pumps Electric control No on-line starter On line starter EM4/8 (both pumps) On line starter EM75/75 (both pumps) Oil filtration (includes connection kit) No oil filtration EOFA EOFM 3 EOF3A 4 EOF3M 5 Pumped EOF 5CR 6 Pumped EOF 4CR In some applications it may be possible to use oil sealed rough pumps or our range of MB mechanical booster pumps as an alternative. Should this be of interest please discuss your requirements with BOC Edwards or your local representative.

14 NORTH AMERICA DM - - G - - DM Simple direct mount, accessories optional for self assembly G Easy roll around frame, fully assembled system and tested Rotary pump (includes pump, frame, and coupling components) None EM4 EM8 3 EM4 + oil level 4 EM8 + oil level 5 EM4 6 EM8 7 EM4 + oil level 8 EM8 + oil level B EM75 C EM75 D EM75 E EM75 Booster pump (includes booster and coupling components) None EH5 EH5 3 EH 4 EH5 + oil level 5 EH5 + oil level 6 EH + oil level 7 EH6 8 EH4 Mist filter None MFAE (for E/EM4, E/EM8) MFAE with semi-automatic oil return 3 MFAE with oil return 7 MF3 8 MF3 with semi-automatic oil return MF3 with oil return Oil filtration (includes connection kit) None EOF4 + pressure flow switch 6 EOF4 + outlet pressure gauge 8 EOF4 Oil (prices included with pump) Electrical Supply (no additional charge) None 8 V, 6 Hz 3 V, 6 Hz 3 46 V, 6 Hz V, 6 Hz 5 V, 6 Hz 6 38 V, 6 Hz 7 45 V, 6 Hz Electrical controls motor control module, stop/start switches and interlocks (credit) S X Flow control None-PFPE prepared PFPE 3 BOC Edwards TW 4 Ultragrade oil Controls Supplied No Controls Supplied EH5, EH5 and EH Combinations EH6 and EH4 Combinations None Dry Nitrogen Box Purge (OB) Dry Nitrogen Gas Ballast 3 External Gas Module (EGM) 4 External Gas Module Corrosive Applications (EGMFS) 5 Dry Nitrogen Oil Box Purge and Oil Pressure Alarm 6 Gas Ballast and Oil Pressure Alarm (AOP) 7 External Gas Module (EGM) and Oil Pressure Alarm (AOP) 8 External Gas Module (EGMFS) and Oil Pressure Alarm (AOP) Dry Nitrogen Oil Box Purge, Gas Ballast and Oil Pressure Alarm (AOP) INDUSTRIAL PUMPS AND PUMPING SYSTEMS 7

15 8 MICROVAC SERIES OIL SEALED ROTARY PISTON PUMPS In today's globally competitive environment, the need for manufacturing and process equipment delivers maximum performance and reliability is greater than ever. Whether you operate at low pressure, handle large gas loads, or simply need increased capacity for your existing system, BOC Edwards can help you meet your pumping requirements. Rugged, reliable operation Every design consideration, feature and detail is thoroughly engineered to maximize uptime and extend operating life. Below are just a few features that testify to the integrity of these rugged multistage vacuum pumps. Efficient, time proven design to deliver ease of maintenance Robust cast and ductile iron construction Hardened replaceable shaft sleeve enhances wear resistance Application specific seals maximize resistance to heat and corrosion while providing protection from gas stream oil contamination Standard, totally enclosed fan-cooled motor on direct drive units provide an economic alternate to belt drive units Solutions to fit your needs Our total vacuum capabilities include a full line of pumping systems from 3 to 788 ft 3 min - capacities. Choose from microvac rotary piston pump (H or J series), 7 series high capacity packages., and 8 series mechanical booster packages, or a custom designed package to meet all your pumping needs. H & J series overview The J series microvac rotary piston pump sets the standard for performance and reliability as the industry's most efficient, space-saving design. The microvac rotary piston pump has been improved, upgraded, and fine-tuned to deliver even better dependability and productivity combined with minimal maintenance and process downtime. An integral oil distribution system eliminates external piping and delivers leak-free operation in a more stylized design for the J series. A larger oil sight glass and paddle wheel design flow indicator provides easier viewing of the oil system function. A stiffer motor mounting platform cuts flexibility to minimize motor belt wear. A stylized oil reservoir cover and side cover "O" rings improve sealing to eliminate oil leakage. An integral gas ballast valve built into the side cover allows quick adaptation to automatic gas ballast. Most importantly, these improvements don t increase the industry leading space saving footprint. Inlet, outlet and mounting dimensions are exactly the same as the H series microvac rotary piston pump. Features & benefits Rugged reliable operation robust cast and ductile iron construction Efficient design provides maximum uptime with minimal moving parts and large clearance Low ultimate blank-off pressures down to < - Torr Quiet operation-new valve design virtually eliminates valve maintenance and noise Space saving design saves up to 5% of valuable floor space Complete and self-contained delivered and ready to install Automatic lubrication system provides proper flow of oil to bearings and sealing surfaces, prevents back flow into system Controlled balancing reduces vibration to a practical minimum Gas ballast- standard on all models Total capability includes the manufacturing and service capabilities to keep your equipment in top operation with a broad range of vacuum system accessories Oxygen service models available APPLICATIONS By combining over a century of technical experience with a global sales and service network, BOC Edwards adds value to your process. Our applications specialists can offer advice on a single pump or component through to a complete pumping system, custom tailored to your specifications. Applications suitable for the microvac rotary piston pump include: Automotive Chemical processing General applications Heat treatment Leak detection Metallurgy PET processing Pharmaceuticals Transformer drying and cable fluid conditioning Vacuum coating Vacuum melting