Catalogue Index. Pressure gauges Model Data Sheet Page. High Purity cleaned Gauges stainless Steel Wetted Parts APM 130.

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2 Catalogue Index Pressure gauges Model Data Sheet Page High Purity cleaned Gauges stainless Steel Wetted Parts APM Process industry gauge 40 and 50 mm PM with Twist Lock Window - 2'' PM Bourdon Tube APM Ultra High Purity Process with inductive switch Stainless Steel Case 316L VIM/VAR Wetted Material E APM for Clean Dry Air Applications, Safety Pressure Gauges with Solid Baffle Wall acc. to EN PM UHP Flow-Through-Gauge, Nominal Size 1 1/8'' PM UHP Flow-Through-Gauge, Nominal Size 1 1/2'' PM UHP Flow-Through-Gauge, Nominal Size 2'' PM Transducer / Attachable Indicator / indicator Model Data Sheet Page Ultra High Purity Transducer, "Non-Incendive", Single End NWU-10 PE Ultra High Purity Pressure Transducer WU-10 / WU-15 / WU-16 PE Ultra High Purity Attachable indicator with LED WUR-1 PE Ultra High Purity Attachable indicator with LED, "Non-Incendive" NWUR-1 PE Digital indicator DI30 AC HYDRA-Line pressure masurement for UHP chemicals Model Data Sheet Page with mechanical indication HG SP with electrical output HS SP with electrical output, no transmitting fluid inside HD SP LED-indicator for type HD HI SP Diaphragm Seal SP Accessories Model Data Sheet Page Gas cylinder scale AC Low and differential pressure transmitter for cleanroom and filter monitoring DP-10 PE

3 Pressure Systems Bourdon Tube Pressure Gauges High Purity Cleaned Gauges Stainless Steel Wetted Parts Type Application Fluid mediums for semiconductor, Clean Dry Air (CDA), and other high purity applications that require both high purity cleaning and a high degree of accuracy. Fluid medium which does not corrode 316 stainless steel. Any medium which oxidizes with oil based materials. Sizes 2" (50 mm) Accuracy + 2/1/2% of span (ASME B40.1 Grade A) Ranges (All ranges not stocked) Vacuum / Compound to 30"HG / 0 / 300 PSI Pressure from 15 PSI to 10,000 PSI or other equivalent units of pressure or vacuum Working Range Steady: 3/4 of full scale value Fluctuating: 2/3 of full scale value Short time: full scale value Operating Temperature Ambient: -40 F to 140 F (-40 C to 60 C) Media: max. 140 F (+60 C) Temperature Error Additional error when temperature changes from reference temperature of 68 F (20 C) +0.4% for every 18 F (10 C) rising or falling. Percentage of span. Standard Features Connection Material: 316 stainless steel Lower mount (LM) Center back mount (CBM) 1/8" or 1/4" NPT limited to wrench flat area Bourdon Tube Material: 316 stainless steel 15 PSI to 1,000 PSI C-type 1,500 PSI to 10,000 PSI helical type Helium leak tested 2 x 10-9 (Inboard) Movement Stainless steel Dial White aluminum with stop pin and black lettering Pointer Black aluminum Case Electropolished stainless steel Window Twist-lock polycarbonate -1- Cleanliness ASME B40.1 Level IV (for oxygen service) Cleaned and packaged in a Class 100 cleanroom Packaged in single nylon bag Purged with Nitrogen Protective cap over thread connection Order Options (min. order may apply) Alarm contact (830.1E) Monel wetted parts Hastelloy wetted parts Packaged in two nylon bags Other special connections limited to wrench flat area Custom dial layout Stainless steel restrictor Particle test with certificate Dual scales APM (APM )

4 TYPE WEIGHT KEY A B C D E I L M " mm lbs. LM in /4" NPT " mm lbs. CBM in /4" NPT --- THE MEASURE OF Total Performance TM Ordering Information: State computer part number (if available) / type number / size / range / connection size and location / options required. Specifications given in this price list represent the state of engineering at the time of printing. Modifications may take place and the specified materials may change without prior notice. 11/

5 PM Pressure Gauges Bourdon Tube Pressure Gauges for Clean Dry Air Applications Stainless Steel Series Nominal Size 40, 50, 63 mm Model Service intended Suitable for gaseous, liquid and corrosive media, also in a corrosive environment, for demanding high purity applications. Suitable for CDA (Clean Dry Air) applications. Fields of application are especially the semiconductor and electronic industry, medical industry, gene technology, biotechnology and pharmaceutical industry. Design Safety pattern gauge to EN 562 / ISO 5171, leak proof, leak rate 10-8 mbar l/s pressure connection NPT thread (standard) resp. original VCR Fitting with front sealing pressure connection Nominal size 40, 50, 63 mm Accuracy 2/1/2% of span (ASME B 40.1 Grade A) in compliance with accuracy class 1.6 per EN /6 Scale ranges (EN /5) to bar ( to psi) or other equivalent units of pressure or vacuum Model ! VCR - male nut Working pressure Steady: : x of full scale value Fluctuating: b x of full scale value Short time: full scale value Operating temperature Ambient: C Medium: +100 C maximum Temperature effect When temperature of the pressure element deviates from reference temperature (+20 C): max. ±0.4 %/10 K of true scale value Pressure connection Material: stainless steel 316 L (1.4404), lower mount (LM) or centre back mount (CBM), surface finish Ra 0,6 µ m! ¼ NPT - male thread (standard)! VCR compatible face seal fittings: with union nut (female) with male nut! Fixed body 9/16-18 UNF Pressure element Material: stainless steel 316 L (1.4404), < 100 bar: C-type 100 bar: helical type Movement Stainless steel Dial White aluminium, with pointer stop pin With black/red lettering, dual pressure scale (psi/bar), inscription "use no oil" or equivalent to prohibition symbol Pointer Black aluminium pointer Case Stainless steel Window Polycarbonate, snap-fit window Cleaning Cleaned for oxygen service to ASME B 40.1 (Level I) Optional extras - Better finish for wetted parts (pressure connection) Ra 0.3 µ m - Case stainless steel, electropolished - Alarm contacts (50 mm) Sliding contact (Model 811) Inductive contact (Model 831) -3-

6 Dimensions [mm] Radial bottom pressure entry (LM) ¼ " NPT male VCR union nut (female) SS-4-VCR-1 VCR male nut SS-4-VCR-4 Fixed body 9/16-18 UNF union nut (female) male nut Nominal size Dimensions [mm] D H1 H2 H3 H Centre back pressure entry (CBM) ¼ " NPT male VCR union nut (female) SS-4-VCR-1 VCR male nut SS-4-VCR-4 only for NS 50 and NS 63 union nut (female) male nut Fixed body 9/16-18 UNF Nominal size Dimensions [mm] D H1 H2 H3 H4 L Ordering information State: Pressure gauge model / Nominal size / Scale range / Size and location of connection / Optional extras required Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Modifications may take place and materials specified may be replaced by others without prior notice /2004 GB -4-

7 PM Bourdon Tube Pressure Gauges for Clean Dry Air Applications Pressure Gauges with Twist Lock Window Model Service intended Suitable for gaseous, liquid and corrosive media, also in a corrosive environment, for demanding high purity applications. Suitable for all CDA (Clean Dry Air) applications. Fields of application are especially the semiconductor and electronic industry, medical industry, gene technology, biotechnology and pharmaceutical industry. Design Leak proof, leak rate 10-8 mbar l/s pressure connection NPT thread (standard) resp. original VCR Fitting with front sealing pressure connection Nominal size 2 " Accuracy 2/1/2% of span (ASME B 40.1 Grade A) in compliance with accuracy class 1.6 per EN /6 Scale ranges to bar (EN /5) to psi (ASME B 40.1) or other equivalent units of pressure or vacuum Working pressure Steady: : x of full scale value Fluctuating: b x of full scale value Short time: full scale value Operating temperature Ambient: C Medium: +100 C maximum Temperature effect When temperature of the pressure element deviates from reference temperature (+20 C): max. ±0.4 %/10 K of true scale value Pressure connection Material: stainless steel 316 L (1.4404), lower mount (LM) or centre back mount (CBM), surface finish Ra 0,6 µ m! ¼ NPT - male thread (standard)! VCR compatible face seal fittings: with union nut (female) with male nut! Fixed body 9/16-18 UNF! Welding connection Pressure element Material: stainless steel 316 L (1.4404), < 100 bar: C-type 100 bar: helical type Movement Stainless steel Model ! VCR - male nut Dial White aluminium, with pointer stop pin With black/red lettering, dual pressure scale (psi/bar), red inscription "use no oil" Pointer Black aluminium pointer Case Stainless steel, with pressure relief Window and bezel One-piece polycarbonate, screw on (Twist Lock) Cleaning Cleaned for oxygen service to ASME B 40.1 (Level I) Optional extras - Better finish for wetted parts (pressure connection) Ra 0.3 µ m - Case stainless steel, electropolished - 3-hole panel mounting flange, stainless steel, electro polished, with clamp (back entry only) - Panel mounting clamp, stainless steel, (back entry only) - Alarm contacts Electronic contact with NPN output (Model 830.1E) -5-

8 Dimensions [mm] Radial bottom pressure entry (LM) ¼ " NPT male VCR union nut (female) SS-4-VCR-1 VCR male nut SS-4-VCR-4 union nut (female) male nut Fixed body 9/16-18 UNF Welding connection Centre back pressure entry (CBM) ¼ " NPT male VCR union nut (female) SS-4-VCR-1 VCR male nut SS-4-VCR-4 male nut union nut (female) Fixed body 9/16-18 UNF Welding connection Ordering information State: Pressure gauge model / Nominal size / Scale range / Size and location of connection / Optional extras required Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Modifications may take place and materials specified may be replaced by others without prior notice /2004 GB -6-

9 Pressure Gauges Bourdon Tube Pressure Gauges Ultra High Purity Stainless Steel Case 316L VIM/VAR Wetted Material Type Application Fluid mediums for semiconductor and other high purity applications that require both a high degree of accuracy and ultra clean wetted surfaces. Sizes 2" (50 mm) 1½" (40mm) Accuracy ± 2/1/2% of span (ASME B40.1 Grade A) (2") ± 3/2/3% of span (ASME B40.1 Grade B) (1½") Ranges Vacuum / Compound to 30"Hg / 0 / 200 PSI Pressure from 15 PSI to 5,000 PSI or other equivalent units of pressure or vacuum Working Range Steady: 3/4 of full scale value Fluctuating: 2/3 of full scale value Short time: full scale value Operating Temperature Ambient: -40 F to 140 F (-40 C to 60 C) Media: max. 212 F (+100 C) Temperature Error Additional error when temperature changes from reference temperature of 68 F (20 C) ±0.4% for every 18 F (10 C) rising or falling. Percentage of span. Standard Features Connection Material: 316L VIM/VAR, electropolished, 7 ra Avg. Lower mount (LM) Center back mount (CBM) VCR compatible face seal fittings Fixed male, male and female swivel, and NPT Bourdon Tube Material: 316L stainless steel 30"Hg (vac) to 1000 PSI "C" type 1500 PSI to 5,000 PSI helical type Helium leak tested 2 x 10-9 (Inboard) Movement 300 series stainless steel Dial White aluminum with stop pin and black lettering Pointer Black aluminum Case 304 stainless steel Weather Protection Weather resistant (IP 54) Window Twist-lock polycarbonate (2") Snap in acrylic (1½") ORDER OPTIONS (min. order may apply) Custom dials Weld-tee connector Modular surface mount (C, Mini C, W Seals available) Particle test with certificate Dual scales VCR is a registered trademark of Swagelok Companies Teflon is a registered trademark of DuPont Company APM

10 Dimensions " LM FIXED MALE " LM MALE NPT " LM SWIVEL MALE " LM SWIVEL FEMALE TYPE/SIZE WEIGHT KEY A B C D E F G H I K L M " LM Fixed Male " LM NPT " LM Male Swivel " LM Female Swivel 0.25 lbs lbs lbs lbs. mm /16-18 UNF 18.5 in mm /4" NPT in mm /16-18 UNF 18.5 in /8" 0.73 mm /16-18 UNF 18.5 in /4"

11 Dimensions " CBM FIXED MALE " CBM MALE NPT " CBM SWIVEL MALE " CBM SWIVEL FEMALE TYPE/SIZE WEIGHT KEY A B C D E F G H I K L " CBM Fixed Male 0.31 lbs. mm in /16-18 UNF " CBM NPT 0.31 lbs. mm in /4" NPT " CBM Male Swivel 0.31 lbs. mm in /8" 9/16-18 UNF " CBM Female Swivel 0.31 lbs. mm in /4" 9/16-18 UNF -9-

12 Dimensions " CBM U-CLAMP OPTION " CBM FRONT FLANGE OPTION TYPE/SIZE WEIGHT KEY A B C D J M N P R S T " CBM / UC " CBM / FF 0.44 lbs lbs. mm in mm in Recommended panel cutout = 55 mm (2.17 in.) " MODULAR SURFACE MOUNT " CBM SWIVEL FEMALE " CBM WELD-TEE TYPE/SIZE WEIGHT KEY A B C D E F G H I K L " MSM 0.22 lbs. mm in " " CBM Swivel Female 0.22 lbs. mm in /4" 1/4" " CBM Weld-Tee 0.22 lbs. mm in Ordering Information: State computer part number (if available) / type number / size / range / connection size and location / options required. WIKA reserves the right to make design changes without prior notice. 12/

13 Pressure Gauges Bourdon Tube Pressure Gauges Ultra High Purity Process with inductive switch Stainless Steel Case 316L VIM/VAR Wetted Material Type with 830.1E switch Application Fluid mediums for semiconductor and other high purity applications that require both a high degree of switching accuracy with ultra clean wetted surfaces. Sizes 2" (50 mm) Accuracy ± 2/1/2% of span (ASME B40.1 Grade A) Ranges Vacuum / Compound to 30"Hg / 0 / 200 PSI Pressure from 15 PSI to 5,000 PSI or other equivalent units of pressure or vacuum Working Range Steady: 3/4 of full scale value Fluctuating: 2/3 of full scale value Short time: full scale value Operating Temperature Ambient: -40 F to 140 F (-40 C to 60 C) Media: max. 212 F (+100 C) Temperature Error Additional error when temperature changes from reference temperature of 68 F (20 C) ±0.3% for every 18 F (10 C) rising or falling. Percentage of span. Standard Features Connection Material: 316L VIM/VAR Lower mount (LM) Center back mount (CBM) VCR compatible face seal fittings Fixed male, male and female swivel, and NPT Bourdon Tube Material: 316L stainless steel 30"Hg (vac) to 1000 PSI "C" type 1500 PSI to 5,000 PSI helical type Helium leak tested to 2 x 10-9 (Inboard) Movement 300 series stainless steel Dial White aluminum with stop pin and black lettering Pointer Black aluminum Case 304 stainless steel Weather Protection Weather resistant (IP 45) Window Twist-lock polycarbonate Switch Data Operating voltage Switching current Voltage drop when I max Function of switching element Switching frequency Switching hysteresis Output signal Ambient temperature Other ambient conditions Contact assembly Cable length ORDER OPTIONS (min. order may apply) Hastelloy C-22 socket and Bourdon tube Custom dials Particle test with certificate Dual scale DC V with 10% residual ripple < 100 ma and < 100 µa residual <0,7 V closing (open circuit causes alarm) 1000 Hz 0,10...0,20 mm NPN-transistor amplified signal ºC according to the data sheet of basis model PMG-10 factory-mounted 1 meter Standard APM

14 Dimensions " LM FIXED MALE " LM MALE NPT with 830.1E switch 2" LM SWIVEL MALE " LM SWIVEL FEMALE TYPE/SIZE WEIGHT KEY A B C D E F G H I K L M " LM Fixed Male " LM NPT " LM Male Swivel 0.25 lbs lbs lbs " LM 0.25 lbs. Female Swivel mm /16-18 UNF 18.5 in mm /4" NPT in mm /16-18 UNF 18.5 in /8" 0.73 mm /16-18 UNF 18.5 in /4"

15 Dimensions " CBM U-CLAMP OPTION " CBM FRONT FLANGE OPTION TYPE/SIZE WEIGHT KEY A B C D J M N P R S T " CBM / UC " CBM / FF 0.44 lbs lbs. Recommended panel cutout = 55 mm (2.17 in.) mm in mm in

16 Installation Instructions: 1. Remove standard twist-lock window from pressure gauge by turning counterclockwise. 2. Remove standard pointer from pressure gauge using a pointer puller tool (contact factory for more information on this special tool available from WIKA). 3. Calibrate the gauge by pressurizing gauge to a known value. WIKA suggests pressurizing to one of the printed numbers on the dial around the 12 o'clock position. Press the special flag-pointer (P/N ) onto pointer hub tightly with the tip of the flag-pointer on the tick mark of the current pressure. For instance, on a 100 PSI gauge, WIKA suggests pressurizing to 50 PSI which is one of the printed numbers on the dial and is near 12 o'clock. In this case, the flag-pointer should be put on to the hub so that the tip is right at 50 PSI. 4. Attach the window assembly loosely onto the case with about a 1/4 turn. Make sure the yellow inductive sensor and the flag on the flag-pointer are separated. 5. Turn the center portion of the window so that the inductive sensor moves towards the flag of the flagpointer. Make sure that the flag runs through the middle of the inductive sensor. If there is any blockage, bend the flag by hand to a position that allows it to travel through the inductive sensor without touching the sensor. 6. Turn the center portion of the window so that the green setpoint line on the window corresponds to the pressure at which the alarm should activate. 7. Pressing the center portion of the window down to hold it in place, fully tighten the window (about another 1/2 turn). 8. It is possibe that the flag-pointer could be bent during shipping and handling causing the alarm to activate at the wrong pressure. The activation setpoint can be "tweaked" be either changing the position of the flag or changing the position of the inductive sensor. 9. For further technical assistance, contact WIKA Customer Service at WIKA-USA. Dimensions Type 830.1E Pressure Switch Assembly Attached to 2" Pressure Gauge TYPE/SIZE WEIGHT KEY A B C Type 830.1E Pressure Switch Assembly (attached to 2" pressure gauge) 0.05 lbs. (Switch Only) mm in Output 3 (BK) makes connection to minus 2 (BU). The load (R L ) between 3 (BK) and 1 (BN) has to be large enough so that the max. switch-current 100 MA will not be exceeded. Do not make a direct connection between 1 (BN) and 3 (BK)! 03/01 Ordering Information: State computer part number (if available) / type number / size / range / connection size and location / options required. WIKA reserves the right to make design changes without prior notice. -14-

17 PM Pressure Gauges Bourdon Tube Pressure Gauges for Clean Dry Air Applications Safety Pressure Gauges with Solid Baffle Wall acc. to EN Model S Service intended Suitable for gaseous, liquid and corrosive media, also in a corrosive environment, for demanding high purity applications. Suitable for all known CDA (Clean Dry Air) applications. Fields of application are especially the semiconductor and electronic industry, medical industry, gene technology, biotechnology and pharmaceutical industry. Design Safety pattern gauge with solid baffle wall in accordance with requirements and test conditions of EN /9.7.2 leak proof, leak rate 10-8 mbar l/s pressure connection NPT thread (standard) resp. original VCR Fitting with front sealing pressure connection Nominal size 63 mm Accuracy 2/1/2% of span (ASME B 40.1 Grade A) in compliance with accuracy class 1.6 per EN /6 Scale ranges to bar (EN /5) to psi (ASME B 40.1) or other equivalent units of pressure or vacuum Working pressure Steady: ¾ x of full scale value Fluctuating: B x of full scale value Short time: full scale value Operating temperature Ambient: C Medium: +100 C maximum Temperature effect When temperature of the pressure element deviates from reference temperature (+20 C): max. ±0.4 %/10 K of true scale value Ingress protection IP 54 to EN / lec 529 Pressure connection Material: stainless steel 316 L (1.4404), lower mount (LM) or lower back mount (LBM), surface finish Ra 0,6 µ m! ¼ NPT - male thread (standard)! VCR compatible face seal fittings: with union nut (female) with male nut! Fixed body 9/16-18 UNF! Welding connection Pressure element Material: stainless steel 316 L (1.4404), < 100 bar: C-type 100 bar: helical type Movement Stainless steel Model ! VCR - union nut (female) Dial White aluminium, with pointer stop pin With black/red lettering, dual pressure scale (psi/bar), red inscription "use no oil" Pointer Black aluminium pointer Case Stainless steel, with solid baffle wall (solid front) and blow-out back Window Laminated safety glass Bezel ring Cam ring (bayonet type), stainless steel Cleaning Cleaned for oxygen service to ASME B 40.1 (Level I) Optional extras - Better finish for wetted parts (pressure connection) Ra 0,3 µ m - Higher accuracy class Case and cam ring (bayonet type) electropolished - 3-hole panel mounting flange, stainless steel, electropolished, (back entry only) - Alarm contacts Magnetic snap-action contact (Model 821) Inductive contact (Model 831) Electronic contact (Model 830 E) Reed contact (Model 851) -15-

18 Dimensions [mm] Radial bottom pressure entry (LM) ¼ " NPT male VCR union nut (female) SS 4 VCR-1 VCR male nut SS 4 VCR-4 union nut (female) male nut Fixed body 9/16-18 UNF Welding connection Lower back pressure entry (LBM) ¼ " NPT male VCR union nut (female) SS 4 VCR-1 VCR male nut SS 4 VCR-4 union nut (female) male nut Fixed body 9/16-18 UNF Welding connection Ordering information State: Pressure gauge model / Nominal size / Scale range / Size and location of connection / Optional extras required Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Modifications may take place and materials specified may be replaced by others without prior notice /2004 GB -16-

19 Mechanical Pressure Measurement UHP Flow-Through-Gauge Diaphragm Pressure Gauge, Nominal Size 1 1/8" Model WIKA Data Sheet PM Applications T Suitable for gaseous, liquid and corrosive media, also in a corrosive environment, for demanding high purity applications. T Semiconductor and flat panel industry T Gas distribution systems T Medical gases T Hook-up-application Special Features UHP Flow-Through-Gauge, Model /8" T No dead volume in the pressure gauge T Low internal volume for reducing particle generation and entrapment T Compact design T Helium leak tested, leak rate 10-9 mbar l/s T Electropolished internals and case, internal surface finish Ra 0,25 µm Description Nominal size 1 1/8" Accuracy class Grade C according to ASME B40.1 Scale ranges - 30 inhg 60 psi - 30 inhg 130 psi Operating temperature Ambient: C Medium: +60 C maximum Pressure connection Modular Surface Mount (MSM), C-seal Pressure element Inconel Dial White aluminium, with black lettering Pointer Black aluminium Case Material: stainless steel 316L, electropolished Window One piece polycarbonate WIKA Data Sheet PM /2006 Page 1 of 2 UHP Flow-Through-Gauge model /2" see data sheet PM UHP Flow-Through-Gauge model " see data sheet PM

20 Dimensions in mm Modular Surface Mount with C-seal Ordering information Pressure gauge model / Nominal size / Scale range Modifications may take place and materials specified may be replaced by others without prior notice. Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Page 2 of 2 WIKA Data Sheet PM / /2006 GB -18-

21 Mechanical Pressure Measurement UHP Flow-Through-Gauge Diaphragm Pressure Gauge, Nominal Size 1 1/2" Model WIKA Data Sheet PM Applications T Suitable for gaseous, liquid and corrosive media, also in a corrosive environment, for demanding high purity applications. T Semiconductor and flat panel industry T Gas distribution systems T Medical gases T Hook-up-application Special Features UHP Flow-Through-Gauge, Model /2" T No dead volume in the pressure gauge T Low internal volume for reducing particle generation and entrapment T Compact design T Helium leak tested, leak rate 10-9 mbar l/s T Electropolished internals and case, internal surface finish Ra 0,25 µm Description Nominal size 1 1/2" Accuracy class Grade C according to ASME B40.1 Scale ranges - 30 inhg 60 psi - 30 inhg 130 psi Operating temperature Ambient: C Medium: +60 C maximum Pressure connection Fixed male 9/16-18 UNF Pressure element Inconel Dial White aluminium, with black lettering Pointer Black aluminium Case Material: stainless steel 316L, electropolished Window One piece polycarbonate WIKA Data Sheet PM /2006 Page 1 of 2 UHP Flow-Through-Gauge model /8" see data sheet PM UHP Flow-Through-Gauge model " see data sheet PM

22 Mounting position Horizontal mounting Vertical mounting Dimensions in mm Fixed male 9/16-18 UNF Ordering information Pressure gauge model / Nominal size / Scale range / Pressure connection / Mounting position Modifications may take place and materials specified may be replaced by others without prior notice. Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Page 2 of 2 WIKA Data Sheet PM / /2006 GB -20-

23 Mechanical Pressure Measurement UHP Flow-Through-Gauge Diaphragm Pressure Gauge, Nominal Size 2" Model (FTG) WIKA Data Sheet PM Applications T Suitable for gaseous, liquid and corrosive media, also in a corrosive environment, for demanding high purity applications. T Semiconductor and flat panel industry T Gas distribution systems T Medical gases T Hook-up-application Special Features UHP Flow-Through-Gauge, Model " (FTG) T No dead volume in the pressure gauge T Low internal volume for reducing particle generation and entrapment T Helium leak tested, leak rate 10-9 mbar l/s T Electropolished internals and case, internal surface finish Ra 0,25 µm T All high purity connections available Description Nominal size 2" Accuracy class Grade B according to ASME B40.1 accuracy higher on request Scale ranges -1 4 bar / -30 inhg psi -1 9 bar / -30 inhg psi Operating temperature Ambient: C Medium: +60 C maximum Pressure connection All UHP connections available Pressure element Inconel Dial White aluminium, with black/red lettering, dual pressure scale (bar/psi) Pointer Black aluminium Case Material: stainless steel 316L, electropolished Window One piece polycarbonate screw-on WIKA Data Sheet PM /2006 Page 1 of 2 UHP Flow-Through-Gauge model /8" see data sheet PM UHP Flow-Through-Gauge model /2" see data sheet PM

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25 Electronic Pressure Measurement Ultra High Purity Transducer, Non-Incendive Model NWU-10, Single End WIKA Data Sheet PE Applications n Semiconductor and flat panel industry n Microelectronics engineering n Gas distribution systems (Gas sticks, gas panels, bulk-gas supply) n Ultra high purity water supply Special eatures n Classification II 3G EEx n A IIC T4 / T5 / T6 X n Thin-film sensor n Excellent long-term stability n No span adjustment required n Ingress protection IP 65 Description Explosion protection Generally Ex pressure transmitters are designed for applications which place high demands on pressure measuring instruments. These transmitters are an ideal solution for nearly all pressure measuring tasks in hazardous areas. Since the NWU-10 transmitters are classified as "non-incendive equipment" (zone 2, category 3G), there is no connection via IS line transformers or Zener barriers required. Universal As a result of its broad pressure range spectrum (vacuum up to 400 bar or 5000 psi respectively), its compact design and its excellent performance, model NWU-10 offers a perfect combination of an appealing design and proven measuring technology. Reliable Thin-film sensors produced by WIKA have ensured high accuracy, long-term stability in industrial ig. Transducer NWU-10 pressure measurement instrumentation for decades. Special thin-film sensors made of Elgiloy have been developed in order to meet the particular requirements of the ultra pure media industry. By hermetically welding the thin-film sensor, a total seperation of medium has been reached, as well as a longterm high impermeability which is required by the user. Versatile The modular design makes it possible to configure a high number of variants in order to comply with the manifold requirements of UHP applications. All wetted parts are electropolished using state-of-the art equipment prior to the final assembly. The high ingress protection (NEMA-4) allows operation even under the most difficult conditions. WIKA Data Sheet PE /2005 Page 1 of 4 Single End Model WU-10 see data sheet PE low Through Transducer Model WU-15 see data sheet PE MSM Transducer Model WU-16 see data sheet PE Attachable indicator Model WUR-1 see data sheet PE

26 Specifications Model NWU-10 Pressure ranges bar psi Over pressure safety 1) bar Burst pressure 1) bar Measuring principle Materials n Wetted parts n Case 1) 1 bar = psi Other pressure ranges and pressure units (e.g. MPa, kg/cm 2 ) on request Thin-film sensor Elgiloy (Sensor); 316L VIM/VAR (Pressure connection) Stainless steel Surface finish Electropolished, typical Ra < 0.18 µm (RA 7); max. < Ra 0.25 µm (RA 10) Dead volume mm 3 < 1500 Permissible Medium Liquid / Gas / Vapour Power supply U B V DC 10 < U B < 24 Max. current output ma < 30 Response tine ( %) ms < 2 Dielectric strength DC V 500 Accuracy % of span < 0.25 for pressure ranges > 4 bar (BFSL) % of span < 0.5 for pressure ranges < 4 bar (BFSL) < 0.5 2) for pressure ranges > 4 bar < 1.0 2) for pressure ranges < 4 bar 2) Including non-linearity, hysteresis, non-repeatability, zero point and full scale error (corresponds to error of measurement per IEC ). Adjusted in vertical mounting position with lower pressure connection. Non-linearity % of span < 0.15 for pressure ranges > 4 bar (BFSL) according to IEC % of span < 0.3 for pressure ranges < 4 bar (BFSL) according to IEC year stability % of span < 0.2 (at reference conditions) Adjustability zero % of span + 5 Permissible temperature range of n Medium C F n Ambience C F n Storage C F Compensated temperature range C F Temperature coefficients within compensated temperature range: n Mean TC of zero % of span < 0.3 / 10 K n Mean TC of range % of span < 0.15 / 10 K d-protection Signal Output Category 3G ma, 2-wire Ignition protection type EEx na IIC T4 X EEx na IIC T5 X EEx na IIC T6 X Conformity specifications n Power supply DC V n Short circuit rating ma n Power limitation W n Medium temperature C F C F C F n Ambient temperature C F C F C F n Storage temperature C F C F C F n Internal capacity Ci nf 10 n Internal inductivity Li µh 10 For further safety information please see the operating instructions a -conformity 89/336/EWG interference emission and immunity see EN Interference emission limit class A and B 97/23/EG Pressure equipment directive Shock resistance g 500 according to IEC (mechanical shock) Vibration resistance g 10 according to IEC (vibration under resonance) Wiring protection Mass kg Approx. 0.1 Protected against reverse polarity on the instrument side Page 2 of WIKA Data Sheet PE /2005

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28 Order-Code for Model NWU-10 Field No. Code Features Signal output 1 A ma, 2-wire Pressure range BCH -1 bar... 3 bar 1) BCT -1 bar... 6 bar BCL -1 bar... 9 bar BCP -1 bar bar BCQ -1 bar bar BCX -1 bar bar BCY -1 bar bar BC1-1 bar bar BC2-1 bar bar BC3-1 bar bar BBG 0 bar... 4 bar 1) BEF 0 bar... 7 bar BBI 0 bar bar BBK 0 bar bar BBL 0 bar bar BBM 0 bar bar BBN 0 bar bar BBO 0 bar bar BBP 0 bar bar BBQ 0 bar bar BBS 0 bar bar PCE -30 inhg psi 1) PCF -30 inhg psi 1) PCH -30 inhg psi PCK -30 inhg psi PCI -30 inhg psi PCM -30 inhg psi PCX -30 inhg psi PBE 0 psi psi 1) PBF 0 psi psi PBG 0 psi psi PDG 0 psi psi PBI 0 psi psi PDI 0 psi psi PBN 0 psi psi PBO 0 psi psi PBP 0 psi psi PBQ 0 psi psi PBS 0 psi psi 2??? other Process connection VN 1/4" Weld Stub WH 1/4" Swivel Male Face Seal WI 1/4" Swivel Female Face Seal 71 Original VCR Swivel Male 72 Original VCR Swivel Female WT T-connector 3?? other Electrical connection M4 4-pin circular connector M12 x 1 O4 4-pin bayonet connector 4?? other Other UHP-Transducer Series NWU-1X ig. left: Transducer NWU-15 ig. right: Transducer NWU-16 urther information You can obtain further information (data sheets, instructions, etc.) via our internet address 1) Accuracy 1.0 % of span Order code: NWU B G Z Z Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Modifications may take place and materials specified may be replaced by others without prior notice. Page 4 of 4 WIKA Data Ssheet PE / /2005 GB -26-

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30 Specifications Models WU-10, WU-15 and WU-16 Output signal and allowed load WU-16 WU-10 / WU-15 Pressure ranges bar psi Over pressure safety 1) bar Burst pressure 1) bar Measuring principle Materials n Wetted parts n Case 1) 1 bar = psi Other pressure ranges and pressure units (e.g. MPa, kg/cm 2 ) on request Metal thin film sensor (Elgiloy ) sensor; 316L VIM/VAR (Process connection) Stainless steel Surface finish Electropolished, typical Ra < 0.18 µm (RA 7); max. < Ra 0.25 µm (RA 10) Dead volume mm 3 WU-10 < 1500, WU-15 < 1000, WU-16 < 1000 Permissible Medium Liquid / Gas / Vapour Power supply U B DC V 10 < U B < 30 ( V with output signal V) Capacitive load µf Max. 0.1 (Voltage output) Max. current consumption ma < 1 Voltage output signal; Source ma < 30 Current output signal Adjustability zero % of span + 5 via potentiometer in the instrument Response time (10 90 %) ms < 2 Dielectric strength DC V 500 Accuracy % of span < 0.25 for pressure ranges > 4 bar (BFSL) % of span < 0.5 for pressure ranges < 4 bar (BFSL) % of span < 0.5 2) for pressure ranges > 4 bar % of span < 1.0 2) for pressure ranges < 4 bar 2) Including non-linearity, hysteresis, non-repeatability, zero point and full scale error (corresponds to error of measurement per IEC ). In vertical mounting position with lower pressure connection. Non-linearity % of span < 0.15 for pressure ranges > 4 bar (BFSL) according to IEC % of span < 0.3 for pressure ranges < 4 bar (BFSL) according to IEC year stability % of span < 0.2 (at reference conditions) Permissible temperature of n Medium C F n Ambience C F n Storage C F Compensated temp. range C F Temperature coefficients in compensated temperature range: n mean TC of zero % of span < 0.3 / 10 K n mean TC of range % of span < 0.15 / 10 K a -conformity 89/336/EWG Interference emission and immunity see EN , Interference emission limit class A and B, 97/23/EG Pressure equipment directive (Module H) Shock resistance g 500 according to IEC (mechanical shock) Vibration resistance g 10 according to IEC (vibration under resonance) Wiring protection Mass kg Approx ma, 2-wire Protected against reverse polarity and short circuiting on the instrument side permitted range Output current (2-wire) ma: R A < (U B 10 V) / 0.02 A Output voltage (3-wire) V: R A > 5 kohm V: R A > 10 kohm with R A in Ohm and U B in DC V Page 2 of WIKA Data Sheet PE /2005

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35 Electronic Pressure Measurement Ultra High Purity Attachable indicator with LED Model WUR-1 WIKA Data sheet PE Applications T Semiconductor and flat panel industry T Microelectronic Technology T Gas distribution systems (Gas sticks, gas panels, bulk-gas supply) Special features T Top View or Front View T Up to 2 Switch points freely programmable T Ingress Protection IP 65 T 5 different units manually adjustable Fig. left WUR-1, Top View Fig. right WUR-1, Front View Description Dynamic An unique solution for a local display of the process pressure offers the attachable indicator model WUR-1. With this especially for the UHP-Market designed indicator a signal and freely adjustable switch points can be transmitted simultaneously. Due to its universal programmability and simple mounting the attachable indicator can also be easily installed on pressure transmitters which are already in use. Its scale can be fully adjusted directly on site without master instrument. Comfortable Power is directly supplied by the ma-loop, i.e. no extra power supply is required. Practical The seven millimetre high, red LED display is easy to read. In order to be able to adapt the indicator to the application, it is available in two different versions; Front View (connection to the transmitter at the bottom) or Top View (connection to the transmitter at the back). Unit (psi, bar, kpa, MPa and kg/cm²), decimal point, display range, zero point and switch points can be adjusted via the control keys. WIKA Data sheet PE /2002 Page 1 of 4 UHP-Transducer, Single End Model WUS-10 see data sheet PE UHP-Transducer, Flow Through Model WUS-15 see data sheet PE UHP-Transducer, Modular Surface Mount Model WUS-16 see data sheet PE

36 Specifications Model WUR-1 Display T Design 7-Segment-red LED, height 7 mm, 4-digit T Range T Accuracy % of span < digit Scaling adjustment Menu-driven programming via external control keys Adjustable measuring range Adjustable decimal point Programmable pressure units: bar, psi, kg/cm², MPa, kpa Zero point freely adjustable within a range of +10 % of the span Signal input ma , 2-wire (supplied by the current loop, 6 V voltage load) V , 3-wire / , 3-wire Signal output Analogue signal is directly looped through ( ma or V or V) Max. permissible input ma / VDC +40 (short-time) a -conformity Interference emission and Interference compatibility see EN For cable lengths of > 30 m (current) resp. >3 m (voltage) shielded cables must be used Switch points Individually adjustable via external control keys T Number 2 x NPN Open-Collector (potential-free) {MIL-connector: 1 x NPN Open-Collector} galvanically isolated switch points at ma T Function Normally open / Normally closed T Adjustment Freely adjustable within a range of % of the span T Temperature error < 0.1% / 10 K T Accuracy % of span < digit T Max.switching current ma 300 (None-inductive) T Display of switch status LED T Response time ( %) ms < 15 T Hysteresis % 0.5 (fixed) Power supply VDC at ma; at V at V Influence of power supply < 0.1% / 10 V Permissible temperature range T Ambient C F T Storage C F T Compensated C F Temperature error % of span < 0.1/10K Vibration resistance g 5 at Hz Shock resistance g 100 Electrical connection T Input Circular connector (female) M 12x1, 4-pin {MIL connector (female), 4-pin} T Output Circular connector M 12x1, 5 pin {MIL connector, 4-pin or flying lead} Ingress protection per IEC / EN IP 65 Wiring protection Protected against polarity crossing +U B/0V Materials case T Case ABS Position of the electrical connection Front View (connection to the transmitter at the bottom) or Top View (connection to the transmitter at the back) Weight g 50 { } Items in curved brackets are optional extras for additional price. Page 2 of WIKA Data sheet PE /2002

37 Dimensions in inch [mm] ront View (connection to the transducer at the bottom) Circular connector M 12x1, 5-pin lying leads MIL-connecetor, 4-pin Circular connector (female) M 12x1, 4-pin MIL-connector (female), 4-pin Top View (connection of the transducer at the back) Circular connector M 12x1, 5-pin Circular connector (female) M 12x1, 4-pin lying leads MIL-connector, 4-pin MIL-connector (female), 4-pin WIKA Data sheet PE / Page 3 of 4

38 Wiring details Connector- Pin 2-wire Execution current 3-wire Execution voltage Circular connector M 12x1, 5-pin 1 Power supply +UB, S+ Power supply +UB Flying leads MIL-connector, 4-pin 2 Switch out1 Switch out1 3 Power supply 0V, S- Power supply 0V, Switch ground, S- 4 Switch ground (potential-free) Signal S+ 5 Switch out2 Switch out2 red Power supply +UB, S+ Power supply +UB black Power supply 0V, S- Power supply 0V, Switch ground, S- yellow Switch ground (potential-free) Signal S+ brown Switch out1 Switch out1 orange Switch out2 Switch out2 A Power supply +UB, S+ Power supply +UB B Switch ground (potential-free) Signal S+ C Switch out1 Switch out1 D Power supply 0V, S- Power supply 0V, Switch ground, S- Output Input Fig. : WUR-1 Front View Fig. : WUR-1 Top View Connector- Pin 2-wire Execution current Circular connector (female) M 12x1, 4-pin MIL-connector (female), 4-pin 3-wire Execution voltage 1 Power supply +UB, S+ Power supply +UB Power supply 0V, S- Power supply 0V, S Signal S+ A Power supply +UB, S+ Power supply +UB B -- Signal S+ C D Power supply 0V, S- Power supply 0V, S- Modifications may take place and materials specified may be replaced by others without prior notice. Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Page 4 of 4 WIKA Data sheet PE /2002 XXXXXXX 09/2002 GB -36-

39 Electronic Pressure Measurement Ultra High Purity Attachable indicator with LED, Non-Incendive Model NWUR-1 WIKA Data Sheet PE Applications n Semiconductor and flat panel industry n Microelectronic Technology n Gas distribution systems (Gas sticks, gas panels, bulk-gas supply) Special features n Classification II 3G EEx n A IIC T6 X n Top View or ront View n Up to 2 Switch points freely programmable n Ingress Protection IP 65 n 5 different units manually adjustable ig. left NWUR-1, Top View ig. right NWUR-1, ront View Description Explosion protection The attachable indicator NWUR-1 is among increased safety requirements, an unique solution for a local display of the process pressure. Dynamic With this indicator a signal and freely adjustable switch points can be transmitted simultaneously. Due to its universal programmability and simple mounting the attachable indicator can also be easily installed on pressure transmitters which are already in use. Its scale can be fully adjusted directly on site without master instrument. Comfortable The power is directly supplied, i.e. no extra power supply is required. Practical The seven millimetre high, red LED display is easy to read. In order to be able to adapt the indicator to the application, it is available in two different versions; ront View (connection to the transmitter at the bottom) or Top View (connection to the transmitter at the back). Unit (psi, bar, kpa, MPa and kg/cm²), decimal point, display range, zero point and switch points can be adjusted via the control keys. WIKA Data Sheet PE /2003 Page 1 of 4 UHP-Transducer, Non-Incendive Model NWU-10 see data sheet PE

40 Specifications Model NWUR-1 Display n Design 7-Segment-red LED, height 7 mm, 4-digit n Range n Accuracy % of span < digit Scaling adjustment Menu-driven programming via external control keys Material Case ABS Adjustable measuring range Adjustable decimal point Power supply DC V 16 < U B < 30 V Influence of power supply % < 0.1 / 10 V Programmable pressure units: bar, psi, kg/cm², MPa, kpa Zero point freely adjustable within a range of +10 % of the span Signal input ma , 2-wire (supplied by the current loop, 6 V voltage load) Signal output Analogue signal is directly looped through Max. permissible input ma +40 (short-time) Switch points Individually adjustable via external control keys n Number 2 x NPN Open-Collector (potential-free) {MIL-connector: 1 x NPN Open-Collector} galvanically isolated switch points n Function Normally open / Normally closed n Adjustment Freely adjustable within a range of % of the span n Temperature error % < 0.1 / 10 K n Accuracy % of span < digit n Max. switching current ma 300 (non-inductive) n Display of switch status LED n Response time ( %) ms < 15 n Hysteresis % of span 0.5 (fixed) Permissible temperature range n Ambient 1) C F n Storage 1) C F Temperature error % of span < 0.1 / 10 K a -conformity Interference emission and immunity see EN For cable lengths of > 30 m shielded cables must be used Shock resistance g 100 according to IEC (mechanical shock) Vibration resistance g 5 at Hz according to IEC (vibration under resonance) Wiring protection Protected against reverse polarity +U B /0V Ingress protection per IP 65 (per IEC / EN 60529) d-protection Category 3G Ignition protection type EEx na IIC T6 X Conformity specifications n Power supply DC V 30 n Short circuit rating ma 40 n Power limitation W 0,4 n Ambient temperature C n Storage temperature C n Internal capacity Ci nf 22 n Internal inductivity Li µh 0 For further safety information please see the operating instructions Position of the electrical connection Front View (connection to the transmitter at the bottom) or Weight g 50 Top View (connection to the transmitter at the back) 1) Limitations regarding d-protection, please refer to Conformity specifications. Page 2 of WIKA Data sheet PE /2003

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43 Accessories Digital Indicator for Panel Mounting Dimensions 96 x 96 x 71 mm Model DI30 WIKA Data Sheet AC Applications Plant construction Machine tools Test benches Level measurement General industrial applications Special Features Input free selectable ma, ma, V, V Integradet power supply DC 24 V for the transmitter Min. / max. value storage 2 fully programmable alarm outputs Linearisation with up to 10 points possible Digital Indicator Model DI30 Description The digital indicator DI30 has been specially designed to display values measured by electronic transmitters, such as pressure transmitters or temperature transmitters. Different input configurations for standard signals 0/ ma, V and V, are available, which can be selected via the terminal configuration and by the selection of the input signal in the instrument configuration. Thereby alternatively transmitters with current or voltage signals can be connected to the same unit. By means of the transmitter supply current loop transmitters (2-wire) as well as 3-wire and 4-wire transmitters can be operated. The transmitter supply is galvanically isolated from the measuring input. There are two alarm outputs available. In addition the indicator offers the possibility of sensor calibration and linearisation with up to 10 points, thus enabling a further adaptation to many different sensor signals and specific application requirements. The standard features are completed by the adjustable sampling rate and display time as well as the input offset for the correction of zero offsets or sensor drifts. Unauthorised changes of the set instrument parameters can be prevented by a user-definable code on different user levels. All the configuring and programming can be done using the front control keys. WIKA Data Sheet AC /2005 Page 1 of 4-41-

44 Specification Model DI30 Display - Principle 7-segment LED - Display 4-digit, red - Height of digits 20 mm - Indication range Indication time s Scaling adjustment by single program numbers initial value and final value free adjustable between and adjustable decimal point Input - Number and type 1 input for standard signal - Input signal ma, input resistance 100 Ω or ma, input resistance 100 Ω or V, input resistance 150 kω or V, input resistance 150 kω - Input configuration selectable via terminal configuration and programming - Accuracy ± 0.1 % of span ± 1 digit - Measuring time s Alarm outputs - Number and type 2 switching contacts (relay), fully programmable - Relay contact load: AC 230 V, 5 A (resistive load), DC 30 V, 2 A (inductive load cos ϕ = 1) Memory parameter memory EEPROM - Data preservation > 20 Years Transmitter supply DC 24 V, max. 50 ma, galvanically isolated Power supply AC 230 V, 50/60 Hz, ±10 % - Power consumption max. 8 VA Electrical connection detachable screw terminal - Wire cross section 2.5 mm 2 Permissible ambient temperature - Working temperature C - Storage temperature C - Humidity relative humidity 75 %, non-condensing CE-conformity conformity in accordance with 89/336/EWG interference emission and interference compatibility see EN Safety regulations DIN Case - Material aluminium - Colour black - Ingress protection front: IP 54; back: IP 00 (per IEC / EN ) - Mass approx. 530 g - Mounting grid horizontal 120 mm / vertical 120 mm (recommended) - Mounting suspensible mounting element, fixed over screws for a wall thickness from 1 mm up to 10 mm Page 2 or WIKA Data Sheet AC /2005

45 Indication and operating elements 1 Program key [ P ] 2 Down key [ ] 3 Up key [ ] 4 Alarm indication (alarm 1 and alarm 2) 5 7-segment display Terminal arrangement 9-pole terminal block Screw terminal for power supply and alarm contacts 1 2 alarm contact AC 230 V 50/60 Hz (connection L) 5 ground wire (connection PE) 6 AC 230 V 50/60 Hz (connection N) 5-pole terminal block Screw terminal for input signal and transmitter supply 10 + I-in, measuring signal current 11 + U-in, measuring signal voltage 12 - I-in, measuring signal current - U-in, measuring signal voltage 13 - GND, ground for transmitter supply V, transmitter supply 7 8 alarm contact 1 9 WIKA Data Sheet AC / Page 3 of 4

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48 Dimensions HYDRA - line, Model HG, in-line flare process connection HYDRA - line, Model HG, in-line flare process connection Process connection Dimensions [mm] H L L1 F B1 B2 Ød2 in-line 3/8" flare in-line 1/2" flare in-line 3/4" flare in-line 1" flare in-line 1 1/4 " flare Considerations for use: This gauge can be rotated a full 360 by hand. No tools required. The gauge can not be removed or the central PVDF nut loosened from the housing as this may cause the fill fluid to leak destroying the measuring unit

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51 SP HYDRA - line Pressure Systems Ultra High Purity Pressure Transducer Perfluoroalkoxy (PFA) Wetted Parts Stainless Steel Pressure Measurement Devices Hydra Sensor Model HS Application Liquid media for ultra high purity liquid distribution systems that require high degrees of accuracy, ultra clean wetted surfaces, and a high degree of chemical resistance. Process connection In-Line 3/8, 1/2, 3/4, 1 and 1 1/4 flare dead-end 1/4, 3/8 and 1/2 flare, panel mount, dead-end 1/4 NPT female Pressure measurement device Transmitter ma, 2-wire system (with attachable indicator as an option) according to data sheets PE and PE Transmitter has 360 orientation even after installation. Pressure ranges bar bar bar or other equivalent units Overpressure limit Maximum process pressure is limited by pressure-temperature rating of the process connection (see diagram page 3) Operating temperature Ambient: C Media: C Storage: C HYDRA - line, Model HS Transmitter ma, 2-wire system and in-line 1/2 flare process connection Accuracy ± 0.5 % of span Temperature offset Additional error when temperature changes from reference temperature of 20 C ±0.25 % of span for every 10 C rising or falling Electrical connection 4-pin L-plug per DIN (IP 65) Material Wetted parts: PFA or TFM (modified PTFE) Other non-wetted parts: PVDF, EPDM, Viton Transmitter: Stainless steel Diaphragm Vented three Layer Diaphragm Assembly Filling liquid (Precision filled and not field refillable) 50/50 Mix Semiconductor Grade IPA (Isopropyl Alcohol) / DI Water (KN 75) Cleaning and packaging Production of all wetted parts, cleaning, assembly, calibration and packaging are done in a class 100 cleanroom. The offer for sale of this product does not infer or imply chemical compatibility with specific applications. Supplementary data sheets n Hydra Gauge (see data sheet SP 99.20) n Hydra Dry (see data sheet SP 99.22) HYDRA - line, Model HS Transmitter ma, 2-wire system, process connection dead-end 1/2 flare Model HG Model HD -49-

52 Dimensions HYDRA - line, Model HS, in-line flare process connection Process connection Dimensions [mm] H 1 L L 1 F 1 B1 B2 Ød2 in-line 3/8" flare in-line 1/2" flare in-line 3/4" flare in-line 1" flare in-line 1 1/4" flare HYDRA - line, Model HS, dead-end process connection Process connection Dimensions [mm] H1 SW1 SW2 ØD2 dead-end 1/4" flare 205 ± /16 " 64 dead-end 3/8" flare 205 ± /16 " 64 dead-end 1/2" flare 208 ± /16 " 64 dead-end 1/4 NPT female 161 ±

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54 Ordering information for pressure system HYDRA - line, Model HS Field No. Code Features Unit B bar P psi A kpa 1? other Please state as additional text Range 1) BF 0 bar bar 0 psi psi 0 kpa kpa BG 0 bar... 4 bar 0 psi psi 0 kpa kpa BH 0 bar... 6 bar 0 psi psi 0 kpa kpa 2?? other Electrical connection 3 A 4-pin L-plug DIN , IP 65 Didital display Z without 4 L LCD, 4-digit, see data sheet PE Only available with electrical connection L-plug Process connection 06 In-line 3/8 " flare 08 In-line 1/2 " flare 12 In-line 3/4 " flare 16 In-line 1 " flare 20 In-line 1 1/4 " flare 38 dead-end 1/4 " flare 40 dead-end 3/8 " flare 42 dead-end 1/2 " flare 5 50 dead-end 1/4 NPT female Flare nut 77 PFA Only for flare connections, not for NPT 75 PVDF Only for flare connections, not for NPT 6 ZZ without Only with NPT connections Fill fluid 7 L1 KN 75 iso-propyl-alcohol (IPA) / DI-water 50:50 Additional order info YES NO 8 1 Z additional text Please state in clearly understandable text! Order code for Model HS HS - A L1 Additional text: Optional designs on request Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Modifications may take place and materials specified may be replaced by others without prior notice /2004 GB -52-

55 SP HYDRA - line Pressure Systems Ultra High Purity Pressure Transducer Perfluoroalkoxy (PFA) Wetted Parts Dry Ceramic Sensor Hydra Dry Model HD Application Pressure measurement of liquid fluid media for ultra high purity liquid distribution systems. High accuracy and reliability, ultra clean wetted parts and surfaces in contact with media and good chemical resistance are required for optimum performance. Process connection In-Line 3/8, 1/2, 3/4, 1 and 1 1/4 flare dead-end 1/4, 3/8 and 1/2 flare, panel mount, dead-end 1/4 NPT female Signal output ma, 2-wire system Power supply DC 24 V (DC V supply voltage) Accuracy ± 0.5% of span for precise and reliable process control (includes combined effects of hysteresis and linearity) Pressure ranges bar ( psi) bar ( psi) bar ( psi) or other equivalent units Overpressure limit Maximum process pressure is limited by pressure-temperature rating of the process connection (see diagram page 3) Operating temperature Ambient: C Media: C Storage: C Electrical connection 5 m flying lead (IP 67) Material Wetted parts: PFA or TFM (modified PTFE) Other non-wetted parts: PVDF, EPDM, FPM/FKM Cable: FEP jacketed Sensing element Non-metallic ultra-pure-ceramic sensor isolated from process media by vented three layer PFA diaphragm assembly (approved and patented Hydra-technology) thus providing improved protection from diffusion. Fill fluid No fill fluid which avoids possible process contamination Cleaning and packaging Production of all wetted parts, cleaning, assembly, calibration and packaging are done in a class 100 cleanroom. The offer for sale of this product does not infer or imply chemical compatibility with specific applications. HYDRA - line, Model HD In-line 1/2 flare process connection 5 m flying lead Supplementary data sheets n Hydra Gauge (see data sheet SP 99.20) n Hydra Sensor (see data sheet SP 99.21) n Hydra Indicator (see data sheet SP 99.23) HYDRA - line, Model HD dead-end 1/2 flare process connection 5 m flying lead Model HG Model HS Model HI -53-

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58 Ordering information for pressure system HYDRA - line, Model HD Field No. Code Features Unit B bar P psi A kpa 1? other Please state as additional text Range 1) BF 0 bar bar 0 psi psi 0 kpa kpa BG 0 bar... 4 bar 0 psi psi 0 kpa kpa BH 0 bar... 6 bar 0 psi psi 0 kpa kpa 2?? other Please state as additional text Electrical connection 3 H 5 m flying leads with free ends (IP 67, FEP jacketed) Digital indicator Z without 2 integrated 4 digit LED, model HI, see data sheet SP separate for panel mount, 4 digit LED, model HI, see data sheet SP Process connection 06 In-line 3/8 " flare 08 In-line 1/2 " flare 12 In-line 3/4 " flare 16 In-line 1 " flare 20 In-line 1 1/4 " flare 38 dead-end 1/4 " flare 40 dead-end 3/8 " flare 42 dead-end 1/2 " flare 5 50 dead-end 1/4 NPT female Flare nut 77 PFA Only for flare connections, not for NPT 75 PVDF Only for flare connections, not for NPT 6 ZZ without Only with NPT connections Additional order info YES NO 7 1 Z additional text Please state in clearly understandable text! Order code for Model HD HD - H Additional text: Optional designs on request Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Modifications may take place and materials specified may be replaced by others without prior notice. 12/2006 GB -56-

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60 Technical data Model HI, HYDRA-Indicator Display T Design T Range T Accuracy % of span < 0.5 ±1 digit Scaling adjustment 7-Segment-red LED, height 7 mm, 4-digit Menu-driven programming via external control keys Adjustable measuring range einstellbar Adjustable decimal point Programmable pressure units: bar, psi, kg/cm², MPa, kpa Zero point freely adjustable witin a range of ±10 % of the span Signal input ma , 2-wire (supplied by the current loop, 6 V voltage load) Signal output Analogue signal is directly looped through Max. permissible input ma / VDC ±40 (short duration only) CE-conformity 89/336/EWG interference emission and Interference compatibility see EN Switch points T Number T Function T Adjustment T Temperature error T Accuracy % of span < 0.5 ±1 digit T Max. switching current ma 300 T Display of switch status Individually adjustable via external control keys 2 x NPN Open-Collector galvanically isolated Make contact, break contact Freely adjustable within a range of % of the span < 0.1% / 10 K LED T Response time ms < 15 T Hysteresis % 0.5 (fixed) Power supply U B VDC Influence of power supply Permissible temperature range < 0.1% / 10 V T Ambient C T Storage C T Compensated C Temperature error % of span < 0.1/10K Vibration resistance g 5 at Hz Shock resistance g 100 Electrical connection Ingress protection per IEC / EN IP 67 Wiring protection Materials T Case T Cable Installation Flying lead with 5 m cable Protected against polarity crossing +U B/0V PP and PFA Coated with PTFE Panel mount Ø 69.5 mm or mounted on pressure transducer HYDRA-Dry { } Items in curved brackets { } are optional extras for additional price. Page 2 of WIKA Data Sheet SP /2005

61 Dimensions in mm Integrated HYDRA-Indicator HYDRA-Indicator panel-mount WIKA Data Sheet SP / Page 3 of 4

62 Electrical connection Flying leads red Power supply +UB, S+ black Power supply 0V, S- blue Not wired white Switch ground (potential-free) brown Switch out1 yellow Switch out2 Example for connection programmable logic controller (PLC) HYDRA-Dry red black HYDRA-Indicator red brouwn yellow white black Modifications may take place and materials specified may be replaced by others without prior notice. Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Page 4 of 4 WIKA Data Sheet SP / /2003 GB -60-

63 SP Pressure Systems Pressure Gauge with mounted Diaphragm Seal for Ultra High Purity Industry Model with Model Application Pressure measurement in liquid fluid media for semiconductor and other ultra high purity applications that require isolation of the pressure indication device from the media flow. Isolation may be required due to abrasive or pure media that requires electropolished surfaces. Typical applications are solvent delivery and recovery systems and chemical mechanical polishing applications. Design Pressure gauge mounted directly to diaphragm seal. Diaphragm seal upper housing welded with lower housing. Pressure rating 70 bar resp psi Operating temperature 4 C C (40 F to 140 F) Process connection (diaphragm seal) ¼" FFFS (fixed female face seal) wetted parts material: stainless steel 316 L, electropolished Filling liquid 50/50 Mix Semiconductor Grade IPA (Isopropyl Alcohol) / DI Water (KN 75) Standard features (pressure gauge) Recomended bourdon tube pressuer gauge Model Nominal size 63 mm (2½") Accuracy 2/1/2% of span (ASME B 40.1 Grade A) in compliance with accuracy class 1.6 per EN /6 Scale ranges to bar (EN /5) to psi (ASME B 40.1) or other equivalent units of pressure or vacuum Movement Stainless steel Dial White aluminium, with pointer stop pin, with black lettering Pressure gauge Model with mounted diaphragm seal Model Optional extras - Process connection ¼ NPT female - Special material Hastelloy C Alarm contacts for gauge Inductive contact (Model 831) - Dial for gauge dual pressure scale (psi/bar) with black/red lettering Pointer Black aluminium pointer Case Stainless steel, with solid baffle wall (solid front) and blow-out back Window Laminated safety glass Bezel ring Cam ring (bayonet type), stainless steel To determine the effects of temperature and response time in a specific application, contact the factory for an Application Questionnaire. The information provided will allow WIKA Technical Supportto accurately model your application parameters using state-of-the-art computer simulation techniques. -61-

64 Dimensions Standard version Process connection Dimensions [mm] Weight [kg] G D 1 D 2 h 1 h 2 SW ¼" FFFS approx. 0.7 ¼" NPT female approx. 0.6 Ordering information State: Pressure gauge model / Nominal size / Scale range / Diaphragm seal model / Process connection / Filling liquid / Optional extras required Specifications and dimensions given in this leaflet represent the state of engineering at the time of printing. Modifications may take place and materials specified may be replaced by others without prior notice

65 Accessories Gas Cylinder Scale WIKA Data Sheet AC Applications n Weighing gas cylinders in gas cabinets and gas distribution systems n Chemical delivery systems n acility maintenance Special eatures n High overload protection up to 400 % n 0.1 % S Accuracy n Excellent EMI and R I immunity n Scale ranges lbs to lbs n High ingress protection NEMA 4 (IP 65) for processing with high condensation and outdoor use. ig. Gas Cylinder Scale Description Digital indicators The WIKA Gas Cylinder Scale is designed for liquid gas weighing applications by in and outdoor use in gascabinetts or gascontainers with corrosive environments. Condensate on the gascylinders will not be a problem anymore because of the high ingress protection. A carefully designed robust construction, accurate and reliable measurement of the weight maintain the high standards of the Semiconductor gas distribution processes. ig. digital indicator panel mounting Model DI30 see Data Sheet AC EMI and R I protection meets highest standards to guarantee a error free accure operation. The high overload protection and heavy gauge stainless steel component parts secure the maintenance-free performance in industry-grade applications. ig. digital indicator wall mounting Model DI30 see Data Sheet AC WIKA Data Sheet AC /2007 Page 1 of 2-63-

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