Thermocouple Gauge Replacement for VS Series Leak Detectors

Transcription

1 vacuum technologies Thermocouple Gauge Replacement for VS Series Leak Detectors FIELD INSTALLATION INSTRUCTIONS DRAFT 3/13/06 Part Number Rev. B March 2006

2 Varian Field Instruction Sheet Thermocouple Gauge Replacement for VS Series Leak Detectors Preface Documentation Standards This manual uses the following documentation standards: NOTE Notes contain important information. Cautions appear before instructions, which if not followed, could cause damage to the equipment or data loss. WARNING Warnings appear for a particular procedure or practice which, if not followed correctly, could lead to serious injury or death. Hazard and Safety Information The common international symbols used in this manual and on the equipment are defined below. l OFF Supply (Power) ON Supply (Power) Earth (Ground) Terminal Caution, Hot Surface AC Alternating Current Warning, Risk of danger Caution, Risk of Electrical Shock Protective Conductor Terminal Frame or chassis Terminal Thermocouple Gauge Replacement for VS Series Leak Detectors Page 1 of 6 Prepared by Checked by Approved by Date Date Date

3 Operators and service personnel must be aware of all hazards associated with this equipment. They must know how to recognize hazardous and potentially hazardous conditions, and know how to avoid them. The consequences of unskilled, improper, or careless operation of the equipment can be serious. Every operator or service person must read and thoroughly understand operation/maintenance manuals and any additional information provided by Varian. All warning and cautions must be read carefully and strictly observed. Consult local, state, and national agencies regarding specific requirements and regulations. Address any safety, operation, and/or maintenance questions to your nearest Varian office. Solvents WARNING The mechanical components of leak detectors may be cleaned with one of the recommended solvents. When heated, sprayed, or exposed to hightemperature equipment, these solvents become flammable and explosive, causing serious injury or death. Do not use these solvents near a hightemperature source. Ventilate the working area with a blower and work in a large, wellventilated room. Solvents are irritants, narcotics, depressants and/or carcinogens. Their inhalation and/or ingestion may produce serious side effects. Prolonged or continued contact with the skin results in absorption through the skin and moderate toxicity. Always ensure that cleaning operations are carried out in large, wellventilated rooms, and wear eye shields, gloves, and protective clothing. Due to the effective cleaning nature of VacuSolv solvent and its residuefree properties, Varian Component and Spectrometer Cleaning Kit (Part Number ), used in accordance with the kit instructions, is recommended for cleaning spectrometer components. The kit can also be used for fine cleaning of other parts in the leak detector s vacuum system such as valves and fittings. No rinsing steps or hightemperature drying is required following cleaning with VacuSolv. Although appropriate precautions are advised, VacuSolv is compatible with most materials and does not contain toxic chemicals or CFCs (chlorofluorocarbons). Other acceptable solvents are isopropyl alcohol (IPA) or Dow Corning OS20. To clean the leak detector plastic enclosure, the LCD display and Front Panel buttons, use only a soft cloth slightly dampened with water or a mild soap. Do NOT use excess water or cleaning solvents of any kind. Avoid splashing any cleaning solvents into the unit through the ventilation openings or Front Panel buttons. Wipe the surface with a dry lintfree cloth. Vacuum Equipment and Cleanliness Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are some techniques that are more important in leak detector servicing than in general vacuum work: Wear nonpowdered, ESDsafe Nitride or equivalent gloves to prevent skin oils from getting on spectrometer internal components. Thermocouple Gauge Replacement for VS Series Leak Detectors Page 2 of 6

4 Oring Care When removing, checking or replacing Orings, keep in mind the following: NOTE Varian recommends replacing all Orings during routine maintenance or during any maintenance procedure requiring that Orings be removed. Remove Orings carefully with your fingers. Do not use metal tools for this task; this prevents scratching of any sealing surfaces. Wipe all Orings clean with a lintfree cloth before installation to ensure that no foreign matter is present to impair the seal. Do not use grease or any other substance on Orings that will come in contact with the vacuum surfaces. Do not use alcohol, methanol or other solvents on Orings. Doing so causes deterioration and reduces their ability to hold a vacuum. Varian does not recommend the use of vacuum grease. If applicable, apply a small amount of Apiezon L grease and wipe the Orings shiny dry. Metal Seal Care Metal Seals must be replaced any time a spectrometer is opened. All fasteners must be installed and torqued per assembly procedure specifications. Remove Metal Seals carefully with your fingers or a soft tool. Metal tools scratch sealing surfaces. Metal Seals are supplied in precleaned condition. No cleaning is required. If necessary, Metal Seals can be cleaned using the recommended solvents. Wipe Metal Seals clean with a lintfree cloth before installation to ensure that no foreign matter impairs the seal. Do not use grease or any other substance on Metal Seals that will come in contact with the spectrometer. Spectrometer Store the Ion Source/Preamplifier subassembly in a cool, dry area in a tightly sealed, ESD protected container. Wear nonpowdered, ESDsafe Nitride or equivalent gloves when handling the spectrometer. Wash hands thoroughly after handling the spectrometer filaments and especially before smoking or eating. The spectrometer and PCB s are static sensitive devices. Wear a grounding strap when performing any maintenance on these units and especially when performing maintenance of static sensitive parts. The spectrometer operates at a very high vacuum produced by the high vacuum turbomolecular pump. Service of the spectrometer requires that this vacuum be vented to the atmosphere. Thermocouple Gauge Replacement for VS Series Leak Detectors Page 3 of 6

5 Equipment Required Extended Length M5 Allen Wrench Metric Allen Wrench Set Installation Procedure For clarity, some items have been omitted from views. Figure 1: Rear and Front Cover Screws WARNING Disconnect power from the unit before performing any maintenance procedure that requires physically disconnecting any part of the system. 1. Turn off the power switch located on the back of the unit and unplug. 2. Wait 30 seconds for the high voltage to dissipate. 3. Using an extended length M5 Allen wrench, remove the four screws holding the rear plastic cover (Figure 1: Rear and Front Cover Screws) and detach the rear plastic cover from the unit. 4. Remove the four screws holding the front plastic cover and detach the cover from the unit. Two screws are situated at the front of the unit (not shown) and two screws are positioned inside the unit (Figure 1: Rear and Front Cover Screws). Thermocouple Gauge Replacement for VS Series Leak Detectors Page 4 of 6

6 Figure 2: Fan and TC Gauge Assemblies NOTE Cables not shown for clarity. 5. Disconnect the fan cable and remove the fan assembly by unfastening two wing nuts and one M4 socket head cap screw (Figure 2: Fan and TC Gauge Assemblies). 6. Detach the TC gauge cable plug from the mother board PCB and disconnect the ground cable from the chassis. 7. Remove the TC gauge cable from the cable ties. Figure 3: TC Gauge Location 8. Using an M4 Allen wrench remove the TC gauge and cable assembly from the valve block. Retain the two screws and the two washers. Discard the TC gauge and cable assembly (Figure 3: TC Gauge Location). Thermocouple Gauge Replacement for VS Series Leak Detectors Page 5 of 6

7 Figure 4: Alignment Mark and Ground Lug Take extreme care to avoid damaging the TC GAUGE when handling and installing the device. 9. Install the replacement TC gauge and Oring in the valve block and loosely install existing hardware. 10.Install the ground lug between the washer and the screw (Figure 4: Alignment Mark and Ground Lug). 11.Ensure that the alignment mark is positioned to the center of the screw as shown in Figure 4: Alignment Mark and Ground Lug, then tighten the two screws. 12.Route the TC cable back through the assembly in the same position as the removed cable. 13.Attach the TC gauge cable plug and chassis ground to the location shown in Figure 2: Fan and TC Gauge Assemblies. 14.Attach the fan assembly (Figure 2: Fan and TC Gauge Assemblies) by fastening the two wing nuts and one M4 socket head cap screw. Then connect the fan cable to the unit. 15.Attach the front cover and secure to the frame using existing hardware. 16.Leak test the TC gauge to ensure a leak free joint. 17.Attach the rear cover and secure to the frame using existing hardware. 18.Connect the power cord and power up the unit. 19.Watch the Home screen to verify that the Spectube Pressure Wait message progresses to Stabilization Wait and System Ready within ten minutes. Refer to the operator's manual if the system fails to reach the System Ready mode. 20.Refer to the TC gauge calibration section of the user's manual for the correct calibration procedure for the TC gauge. 21.Varian recommends a full calibration of the unit prior to leak test operations. Thermocouple Gauge Replacement for VS Series Leak Detectors Page 6 of 6

8 Sales and Service Offices Sales and Service Offices Canada Central coordination through: 121 Hartwell Avenue Lexington, MA USA Tel: (781) Fax:(781) Toll Free: (800) China Varian Technologies Beijing Room 1201, Jinyu Mansion No. 129A, Xuanwumen Xidajie Xicheng District Beijing P.R. China Tel: (86) Fax:(86) France and Benelux Varian s.a. 7 avenue des Tropiques Z.A. de Courtaboeuf B.P. 12 Les Ulis cedex (Orsay) France Tel: (33) Fax:(33) Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach Darmstadt Germany Tel: (49) Fax:(49) India Varian India PVT LTD , 1st Floor 1010 Competent House 7, Nangal Raya Business Centre New Delhi India Tel: (91) Fax:(91) Italy Via F.lli Varian, Leini, (Torino) Italy Tel (39) Fax (39) Japan Sumitomo Shibaura Building, 8th Floor Shibaura Minatoku, Tokyo 108 Japan Tel: (81) Fax:(81) Korea Varian Technologies Korea, Ltd. Shinsa 2nd Building 2F 9665 Daechidong Kangnamgu, Seoul Korea Tel: (82) Fax:(82) Mexico Varian S.A. Concepcion Beistegui No 109 Col Del Valle C.P Mexico, D.F. Tel: (52) Fax:(52) Russia Central coordination through: via F.lli Varian Leini, (Torino) Italy Tel: (39) Fax: (39) Taiwan Varian Technologies Asia Ltd. 18F13 No.79, Hsin Tai Wu Road Sec. 1, Hsi Chih, Taipei Hsien Taiwan, R.O.C. Tel: (886) Fax:(886) UK and Ireland Varian Ltd. 28 Manor Road WaltonOnThames Surrey KT 12 2QF England Tel: (44) Fax:(44) United States 121 Hartwell Avenue Lexington, MA USA Tel: (781) Fax:(781) Other Countries Via F.lli Varian Leini, (Torino) Italy Tel: (39) Fax:(39) Customer Support and Service: North America Tel: 1 (800) (tollfree) vtl.technical.support@varianinc.com Europe Tel: 00 (800) (tollfree) vtl.technical.support@varianinc.com Japan Tel: (81) (dedicated line) vtj.technical.support@varianinc.com Korea Tel (82) (dedicated line) vtk.technical.support@varianinc.com Taiwan Tel: 0 (800) (tollfree) vtw.technical.support@varianinc.com Worldwide Web Site, Catalog and Online Orders: Representatives in most countries 12/04