ADRS Series Mechanical-Bearing Rotary Stage

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ADRS Series Mechanical-Bearing Rotary Stage High torque output, direct-drive brushless servomotor Cog-free slotless motor design for outstanding velocity stability Direct coupled, high-accuracy rotary encoder Ultra-low-profile minimizes working height Aerotech s ADRS series with its direct-drive technology and low profile provide a superior alternative to belt- and wormdrive stages. Compact Package The design of the ADRS series direct-drive rotary stage was optimized to minimize stage height. The low profile of the stage reduces the effective working height of the system minimizing stack-up related errors. In addition to the low overall height, the ADRS series provides a clear aperture that can be used for product feed-through or laser beam delivery. Brushless Direct-Drive To maximize positioning performance, the ADRS series utilizes direct-drive brushless motor technology. Direct-drive technology is optimized for 24/7 production environments, as there are no brushes to replace and no gear trains or belts to maintain. Direct drive also provides quicker acceleration and higher top speeds than gear- or belt-driven mechanisms, yielding higher total overall throughput. The low maintenance and high-throughput characteristics of the ADRS series provide a stage that yields the lowest total cost of ownership. Slotless Motor The ADRS series uses a slotless stator design that eliminates torque ripple. This motor technology provides ultra-smooth velocity stability comparable to a high-quality DC brush motor without all the DC motor s inherent maintenance requirements. Since the slotless motor is directly coupled to the tabletop, velocity disturbances created by toothed belt drives or worm gears are eliminated. Multiple Configurations The ADRS series is available in mm, 150 mm, and 200 mm versions. Each stage has options for different motor windings to better match the stage to different operating conditions. The -B winding option provides the highest possible speed operation for a given available bus voltage, while the -A winding gives greater output torque for comparable current levels. Metric and English pattern tabletops are available and slotted mounting holes enable attachment to mm and 1inch hole pattern breadboards. The tabletop of the ADRS series has a labyrinth seal that protects the bearings and encoder from contamination. An optional shaft end seal is available for applications where the bottom of the stage is exposed to contamination. Axial and Radial Cantilevered Load Capability (ADRS) 1

ADRS Series SPECIFICATIONS ADRS Series Rotary Stages ADRS Series ADRS Tabletop Diameter 95 mm 140 mm 190 mm Aperture 6 mm 15 mm 26 mm Bus Voltage 340 VDC Maximum Torque (Continuous) 0.4 N m 2.36 N m 5.99 N m Max Speed (1) 1500 rpm 600 rpm 600 rpm Accuracy(2) Uncalibrated 3 µrad (0 arc sec) Calibrated(3) 29.1 µrad (6 arc sec) Repeatability(2) 14.6 µrad (3 arc sec) Max Load(4) Axial 7 kg 20 kg 40 kg Radial 3 kg 10 kg 20 kg Axial Error Motion(5) 2 µm 5 µm 5 µm Radial Error Motion(5) 3 µm 5 µm 5 µm Tilt Error Motion 4.5 µrad (10 arc sec) Inertia Unloaded 0.00003 kg-m2 0.00242 kg-m2 0.00043 kg-m2 Total Mass 2.0 kg 4.3 kg 7.6 kg Finish Tabletop Stage Hardcoat Black Anodize Notes: 1. Maximum speed is based on stage capability. Actual speed may depend on encoder resolution, load, amplifier bus voltage and motor. See the S-series rotary motor for more information. 2. Repeatability and accuracy are dependent on encoder resolution. To achieve the listed specifications, encoder resolution must be 0.36 arc sec or less. 3. With HALAR. 4. Maximum loads are mutually exclusive. 5. For the ADRS, error motion specifications are below 700 rpm. Above 700 rpm the max radial error is 5 microns. Errors measured mm above the tabletop. ADRS Maxmimum Speeds for Encoder Option Encoder Option ADRS -AS/-X5/-X10/-X 1500 rpm 600 rpm 600 rpm -X50 00 rpm 300 rpm 300 rpm Axial and Radial Cantilevered Load Capability () Axial and Radial Cantilevered Load Capability () 2

ADRS Series DIMENSIONS 45 26 APERTURE 1 [127] B.C. [101.6] B.C. 75 [76.2] B.C. 50 [50.] B.C. 16X M5X0. 5. [10-32 5.] AS SHOWN 75 150 SQ 152.4 SQ 190 X M5X0. 7.6 60 50 200 19 TYP 200 230 22.5 45 75 [76.2] B.C. 50 [50.] B.C. [.4] B.C. 101.6 50 16X M5X0. 5. [10-32 5.] AS SHOWN 15 APERTURE 62.5 1 127 140 X M5X0. 7.6 60 37.5 75 150 10 19.1 TYP 150 3

ADRS Series DIMENSIONS ADRS Series Rotary Stages ADRS 50 [50.] SQ 6 APERTURE [.4] 37.5 75 SQ 4X M4X0.7 4.6 [-32 4.6] 76.2 SQ 95 4X M5X0. 5. PLACES 55 50 19 TYP 130 4

Ordering Example -E1 -M1 -TT1 -SL -PL1 ADRS Series Direct-Drive Rotary Stage ADRS Series Feedback Motor Tabletop Lower Seal Metrology ADRS Feedback (Required) -E1 -E2 -E3 -E4 -E5 ADRS Mechanical-Bearing Direct-Drive Rotary Stage Mechanical-Bearing Direct-Drive Rotary Stage Mechanical-Bearing Direct-Drive Rotary Stage -E1 Incremental Encoder, 1 Vpp (-E1) -E2 Incremental Encoder, TTL, x5 Interpolation (-E2) -E3 Incremental Encoder, TTL, x10 Interpolation (-E3) -E4 Incremental Encoder, TTL, x Interpolation (-E4) -E5 Incremental Encoder, TTL, x50 Interpolation (-E5) -M1 -M2 -TT1 -TT2 (Null) -SL -PL1 -PL2 Motor (Required) -M1 Low Current, -A Winding (-M1) -M2 Low Voltage, -B Winding (-M2) Tabletop (Required) -TT1 -TT2 Metric Tabletop (-TT1) English Tabletop (-TT2) Lower Seal (Optional)* - No Lower Seal -E7 Lower Seal (-SL) *Note: Lower Seal not available for the ADRS Metrology (Required) -PL1 -PL2 Metrology, Uncalibrated with Performance Plots (-PL1) Metrology, Calibrated (HALAR) wtih Performance Plots (-PL2) Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS -TAC Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. Integration - Test as components Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system. 5