Pneutronics. Miniature Proportional Valves. Catalog PND-MPV-001/US January 2007

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Pneutronics Miniature Proportional Valves January 2007

Non-Thermally Compensated Proportional Valve HF 200 Miniature Ultra High Flow Proportional Valve HF 200 is a high flow proportional valve that provides flows up to more than 240 slpm while consuming less than 2 watts of power. By offering 18% more flow and using 25% less power than the nearest competitive valve on the market, the HF 200 becomes the ideal solution for applications requiring low hysteresis and fast response, such as ventilators with fresh breathing circuit gas delivery, as well as other medical, analytical, and pathogen detection devices. This valve can be used with inlet pressures of up to 60 psid and features three standard control voltage ranges, including 5, 12, and 24 VDC. Features Capable of 240 slpm flow and pressures up to 60 psid. Face seal manifold mount or barbed body options. Proven performance to 25 million life cycles. Physical Properties Valve Type: 2-Way Normally Closed Media: Air, oxygen, hydrogen, heliox, carbon dioxide, argon, nitrogen & others Operating Environment: 5 to 55 C Storage Temperature: -40 to 70 C Length: 0.68 in (17.2 mm) Width: 0.63 in (16 mm) Height: 2.08 in (53 mm) Porting: Manifold Mount; Barbed body [.25 ID Tube] Weight: 0.153 lbs (70 grams) Lubrication: None required Oxygen Clean Electrical Power: 2.0 Watts @ max current at 68 F (20 C) Voltage: 0-5, 0-12 or 0-24 VDC ±5% Electrical Termination: 18" Flying Leads Flow Flow Rate (slpm) 300 250 200 150 100 Performance Characteristics Response: < 10-20 msec cycling 10-90% of full flow Pressure: 0 to 60 psid Flow: 240 L/min of air/nitrogen @ 60 psid & maximum current Effective Orifice Size: 0.115" (2.9mm) C v : ~0.2 Typical Flow Characteristics @ 45 psi 10 psi 20 psi 30 psi 40 psi 50 psi 60 psi 50 0 0 20 40 60 80 100 120 140 160 180 Current (ma)

HF200 Dimensions.625 [15.88 mm].113 [2.86 mm].400 [10.16 mm].400 [10.16 mm].900 [22.86 mm] 2.072 [52.62 mm].500 [12.70 mm].677 [17.20 mm] Manifold Mount.625 [15.88 mm] 2X ø.208 ID O-RING,VITO N.370 [9.40 mm].195 [4.95 mm] COIL CONNECTIONS ARE CONFIGURABLE.610 [15.49 mm] (BOBBIN).313 [7.94 mm] NOTES: 1- ALL DIMENSIONS ARE REFERENCE. 2- DIMENSIONS ARE in INCHES [MM] INLET (POSITIVE PRESSURE) Barbed Mount.225 [5.72 mm].900 [22.86 mm] 2.054 [52.17 mm].625 [15.88 mm].313 [7.95 mm].500 [12.70 mm] INLET (POSITIVE PRESSURE) 2X 6-32 UNC - 2B x.25 [6.35 mm] BARBS FOR ø.25 [6.35 mm] TUBIN G MATERIAL: BRASS 1.00 [2.54 mm] 2X.490 [12.45 mm].425 [10.80 mm].625 [15.88 mm].677 [17.20 mm] BRASS BODY.100 [2.54 mm].425 [10.80 mm].595 [15.11 mm] COIL CONNECTIONS ARE CONFIGURABLE.610 [15.49 mm] (BOBBIN).313 [7.95 mm] Sample Part ID HF200 1 V A F 8 O Description Series Model Number Elastomer Coil Selection Electrical Interface Pneumatic Interface Cleaning Options #: Max. Operating Pressure/Orifice Size V: FKM X: Max Voltage* F: Wire Leads, 18" 1: Manifold Mount O: Oxygen Service 1: 60 psid / 0.115 (2.9mm) A: 5 VDC* 8: Barbed Body D: 12 VDC* F: 24 VDC* * Valves may require additional voltage for full flow operation at max rated duty and temperature To order, please call 1.603.595.1500 Rev. 01/2007

Non-Thermally Compensated Proportional Valve HF PRO High Flow Standard Proportional Valve The HF Pro controls the flow of gas proportionally to input current. The valve may be driven with DC current or Pulse Width Modulation. HF Pro achieves optimal system performance when it uses closed loop feedback. Features Capable of 60 lpm flow and pressures up to 50 psig. Face seal manifold mount or 5mm barbed body options. Proven performance to 35 million life cycles. Non-thermally compensated proportional valve. Physical Properties Valve Type: 2-Way Normally Closed Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & others Operating Environment: 0 to 50 C Storage Temperature: -40 to 70 C Length: 1.785 in (45.34 mm) Width: 0.625 in (16.51 mm) Height: 0.67 in (17.02 mm) Porting: Manifold Mount; Barbed body [5 mm (0.195 ) ID Tube] Weight: 2.2 oz (62.86 grams) Internal Volume: 0.031 in 3 (.508 sccm) Filtration: 43 micron Lubrication: None required Oxygen Clean Electrical Power: 2.25 Watt nominal at 68 F (20 C) 3 Watt max Voltage: See Coil Selection under Flow Flow Rate (slpm) 60 50 40 30 20 10 psi 20 psi 30 psi 40 psi 50 psi Performance Characteristics Leak Rate: 0.5 SCCM Max. N2 at 1 and 10 psid* Response: <30 msec cycling Pressure: 0 to 50 psig Vacuum: 0-27 in Hg HF Pro Typical Flow Effective Orifice Size: 0.070 (1.8mm) *Low differential pressure represents the worst case condition due to the reverse flow (pressure-assist) nature of the valve. Coil: 68 Ohm 10 0 0.000 0.038 0.075 0.113 0.150 0.188 Current (Amps)

HF PRO Dimensions Barbed Mount Option Manifold Mount Option Sample Part ID HFPRO 7 V A F 8 O Description Series Model Number Elastomer Coil Selection Electrical Interface Pneumatic Interface Cleaning Options #: Max. Operating Pressure/Orifice Size V: FKM X: Max Voltage* F: Wire Leads, 18" 1: Manifold Mount O: Oxygen Service 7: 50 psid/0.70 A: 5 VDC 8: Barbed Body D: 12 VDC F: 24 VDC * Max Voltage for continuous full flow, ambient temperature 55 C NOTE: Please consult Parker Pneutronics for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002243-001 and Drawing #890-003191-001 (Manifold) or #890-003192-001 (Barbed). To order, please call 1.603.595.1500 Rev. 01/2007

Non-Thermally Compensated Proportional Valve MD PRO The MD PRO is a miniature solenoid-operated proportional valve that provides application-specific OEM solutions. Features Miniature Proportional Valve Offers automated calibration. Provides repeatability across its operating range. Offers a superior combination of value and performance. Rated for 10 million life cycles. Physical Properties Valve Type: 2-Way Normally Closed Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & others Operating Environment: 0 to 60 C Storage Temperature: -40 to 70 C Length: 1.785 in (45.34 mm) Width: 0.625 in (16.51 mm) Height: 0.67 in (17.02 mm) Porting: 1/8 barbs; manifold mount with 43 micron screen Weight: 2.2 oz (62.86 grams) Internal Volume: 0.031 in 3 (.508 sccm) Filtration: 43 micron Lubrication: None required Oxygen Clean: Available Electrical Power: 2.0 Watts @ max current Voltage: See Coil Selection under Flow Performance Characteristics Response: <0.22 sccm of air (bubble tight) Pressure: <30 msec cycling Flow: 0 to 100 psig (See Ordering Info.) Vacuum: 0-27 in Hg Orifice Sizes: (See Ordering Info.) 0.040 (1.02 mm) 0.050 (1.27 mm) 0.065 (1.65 mm)

MD PRO Dimensions Sample Part ID MDPRO 4 V A F 8 S Description Series Model Number Elastomer Coil Selection Electrical Interface Pneumatic Interface Cleaning #: Max. Operating Pressure/Orifice Size V: FKM X: Max Voltage* F: Wire Leads, 18" 1: Manifold Mount with S: Standard Screen* Cleaning A: 5.5 VDC P: PC Board Mount Options 4: 75 psid/0.040" B: 8 VDC 8: 1/8" Barbs 5: 100 psid/0.050" 6: 50 psid/0.065" C: 11.5 VDC D: 13.5 VDC E: 20 VDC F: 29 VDC * 43 Micron Screen (Port 2) O: Oxygen Service* *Selection of this option affects the valve price; contact factory for details * Max Voltage for continuous full flow, ambient temperature 55 C NOTE: Please consult Parker Life Sciences for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002206-001 and Drawing #890-003022-001. To order, please call 1.603.595.1500 Rev. 01/2007

Thermally Compensated Proportional Valve VSO The VSO, Voltage Sensitive Orifice, is a miniature solenoid valve that controls the flow of gas in proportion to input current. You can drive the valve with either DC current or pulse width modulation and use closed loop feedback to deliver optimal system performance. Medical and analytical OEMs worldwide choose VSO as their preferred miniature proportional valve. Features Miniature Proportional Valve Offers operating pressure up to 150 psig and a range of orifice sizes. Satisfies a 0.2 sccm leakage specification of He for 100 million life cycles and offers high repeatability. Provides computer-automated calibrations and full calibration traceability. Uses either DC current or pulse width modulation with closed loop feedback to deliver optimal system performance. Maintains ideal flow through thermal compensation. Physical Properties Valve Type: 2-Way Normally Closed Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & others Operating Environment: 0 to 55 C Storage Temperature: -40 to 70 C Length: 1.785 in (45.34 mm) Width: 0.625 in (16.51 mm) Height: 0.67 in (17.02 mm) Porting: Barbs or 10-32 female; manifold mount with screens Weight: 2.2 oz (62.86 grams) Internal Volume: 0.031 in 3 (.508 sccm) Filtration: Types 1 & 2: 17 micron Types 3, 4, 5, & 6: 40 micron Lubrication: None required Oxygen Clean: Available Electrical Power: 2.0 Watts maximum Voltage: See Coil Selection under Ordering Information Oxygen and analytically clean: Standard Flow Performance Characteristics Leak Rate: <0.2 sccm of helium (bubble tight) Response: <30 msec cycling (2 Watts) Pressure: 0 to 150 psig Vacuum: 0-27 in Hg Effective Orifice Sizes: (See Ordering Info.) 0.010 (0.245 mm) 0.020 (0.510 mm) 0.030 (0.762 mm) 0.040 (1.016 mm) 0.050 (1.270 mm) 0.065 (1.651 mm) VSO is a registered trademark of.

VSO Dimensions Sample Part ID VSONC 1 S 11 V A F 8 Description Standard Model Number Series Body Series Elastomer Coil Selection Electrical Interface Pneumatic Interface (Series 11 only except with Option 5) #: Max. Operating Pressure/Orifice 11: Series 11 V: FKM/Brass X: Max Voltage* F: Wire Leads, 18" 0: Manifold Mount Options 1: 150 psid/0.010" 2: 150 psid/0.020" 3: 150 psid/0.030" 4: 75 psid/0.040" 5: 100 psid/0.050" 6: 50 psid/0.065" 25: Series 25 (available in nickel-plated brass only) C: FFKM*/Brass I: FKM/Stainless Steel H: FFKM*/Stainless Steel *Selection of this option affects the valve price; consult factory for details A: 5.5 VDC B: 8 VDC C: 11.5 VDC D: 13.5 VDC E: 20 VDC F: 29 VDC P: PC Board Mount, 4 PC Pins 1: Manifold Mount with Screens* (this option will affect price) 5: 10-32 Threaded Female (Series 25) 8: 1/8" Barbs * Max Voltage for continuous full flow, ambient temperature 55 C NOTE: Please consult Parker Life Sciences for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002115-001 and Drawing #890-003022-001. To order, please call 1.603.595.1500 Rev. 01/2007

Thermally Compensated Proportional Valve VSO Low Flow Low Flow Miniature Proportional Valve The VSO LF (Low Flow) offers the same benefits as the VSO valve with enhanced flow control for applications where control is critical or flow is required below 600 sccm. This miniature solenoid-operated valve automates the flow of gas in proportion to the input current. Features Uses either DC current or pulse width modulation; closed loop feedback delivers optimal system performance. Offers computer automated calibrations and full calibration traceability. Rated for 10 million life cycles. Maintains ideal flow through thermal compensation. Highly repeatable. Physical Properties Valve Type: 2-Way Normally Closed Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & others Operating Environment: 0 to 55 C Storage Temperature: -40 to 70 C Length: 1.785 in (45.34 mm) Width: 0.625 in (16.51 mm) Height: 0.67 in (17.02 mm) Porting: Manifold mount with 17 micron screens Weight: 2.2 oz (62.86 grams) Internal Volume: 0.031 in 3 (.508 sccm) Filtration: 17 micron Lubrication: None required Oxygen Clean: Available Electrical Power: 2.0 Watts maximum Voltage: See Coil Selection under Ordering Information Oxygen and analytically clean: Standard Flow Performance Characteristics Leak Rate: <0.2 sccm of helium (bubble tight) Response: <15 msec cycling Orifice Sizes: (See Ordering Info.) 0.003 (0.076 mm) VSO is a registered trademark of.

VSO Low Flow Dimensions Sample Part ID 910 _ 000200 _ 001 Description Series _ Model Number _ Coil Selection Options VSO, Low Flow, 0.003" orifice size X: Max Voltage* 001: 6.5 VDC 002: 8 VDC 003: 12 VDC 004: 18 VDC/ * Max Voltage for continuous full flow, ambient Temp 55 C, NOTE: Please consult Parker Life Sciences for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002160-002 and Drawing #890-003022-022. To order, please call 1.603.595.1500 Rev. 01/2007

Thermally Compensated Proportional Valve Lone Wolf Normally Open Miniature Proportional Valve With its patented technology, the Lone Wolf valve has the highest performance characteristics of any Normally Open proportional valve available on the market. This VSO valve offers silent operation, provides repeatable highspeed performance, and ensures maximum accuracy. Features Achieves rapid, stable performance. Enhances system control and patient comfort. Maintains ideal flow through Normally Open valve with thermal compensation. Extremely reliable. Physical Properties Valve Type: 2-Way Normally Open Media: Air, nitrogen, oxygen, & others Operating Environment: 0 to 50 C Storage Temperature: -40 to 70 C Length: 1.785 in (45.34 mm) Width: 0.625 in (16.51 mm) Height: 0.67 in (17.02 mm) Porting: Manifold mount with 43 micron screens, 1/8 Barbs, 5/64 Barbs Weight: 2.2 oz (62.86 grams) Internal Volume: 0.031 in 3 (.508 sccm) Filtration: 40 micron Lubrication: None required Electrical Power/Orifice Size: 0.5 Watt/0.024 1.0 Watt/0.030 2.0 Watts/0.036 Voltage: 3 to 60 VDC Electrical Terminal: PC Mount, Spade Lugs, 18 Wire Leads Flow Performance Characteristics Leak Rate: Internal: 0.2 sccm (bubble tight) External: 0.016 sccm Response: <30 msec cycling (2 Watts) Pressure: 15 psig maximum Vacuum: 0-20 in Hg VSO is a registered trademark of.

Lone Wolf Dimensions Sample Part ID LW 1 B V A F 8 Description Series Model Number Material Elastomer Coil Resistance Electrical Interface Pneumatic Interface No: Pressure/Orifice*/Coil Wattage Options 1: 0-10 psi/0.024"/0.5 Watt C: 47 ohms 2: 0-20 psi/0.030"/1 Watt D: 68 ohms 3: 0-25 psi/0.036"/2 Watt B: Brass V: FKM A: 11 ohms F: Wire Leads, 18"-19" 0: Manifold Mount B: 23 ohms P: PC Board Mount, 4 PC Pins F: 274 ohms 1: Manifold Mount with Screens* (this option will affect price) 8: 1/8" Barbs *Median Effective Orifice NOTE: Please consult Parker Life Sciences for other considerations. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-002131-001 and Drawing #890-003079-001. To order, please call 1.603.595.1500 Rev. 01/2007

WARNING FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMS DESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY, AND PROPERTY DAMAGE. This document and other information from, its subsidiaries and authorized distributors provide product and/or system options for further investigation by users having technical expertise. It is important that you analyze all aspects of your application and review the information concerning the product or system in the current product catalog. Due to the variety of operating conditions and applications for these products or systems, the user, through its own analysis and testing, is solely responsible for making the final selection of the products and systems and assuring that all performance, safety, and warning requirements of the application are met. The products described herein, including without limitation, product features, specifications, designs, availability and pricing, are subject to change by and its subsidiaries at any time without notice. Parker Life Sciences 26 Clinton Dr., Unit 103 Hollis, NH 03049 Tel: (603) 595-1500 (NH office) (973) 575-4844 (NJ office) Fax: (603) 595-8080 Email: PNDinfo@parker.com 01/07 Printed in USA