Photographic Index for 10-80 and 10-160 Implanters P/N 30660 OEM 1707760 Straight Filament P/N 30661 2% Thoriated Straight Filament P/N 30670 OEM 1789850 Pigtail Filament P/N 30672 Pigtail Filament P/N 30680 OEM 7230-0003-0014, 2866002 or 5001608 Ceramic Standoff P/N 30681 OEM 7230-0003-0004, 2866000 or 24-811803-00 Ceramic Standoff P/N 40556 OEM 6950-0017-0002 Retainer Screw P/N 40557 OEM 4710-0059-0002 Arc Chamber Mounting Block P/N 40558 OEM 4710-0060-0002 Arc Chamber Mounting Block P/N 40559 OEM 5053-0031-0001 Retainer Nut P/N 40561 OEM 3850-0644-0001 Retainer Screw Retrofit Kit* P/N 40562 OEM 17143870 Filament Clamp,.50 wide *kit components on page 10 of this section P/N 40563 Retainer Screw Assembly P/N 99000 Source Gage Set P/N 99001 OEM 17043870 Filament Clamp,.4 wide P/N 99002 (also in graphite, 99002G or tantalum, 99002T) OEM 1200321 Filament Insulator Insert P/N 99002A OEM 53276 Filament Insulator Insert (Preset) P/N 99002W (tungsten) OEM 17119610 Filament Insulator Insert P/N 99003 OEM 1700310 Filament Clamp,.625 wide P/N 99004 (also in tantalum, 99004T) OEM 1704990 Side Plate 1
P/N 99005 OEM 1708670 End Plate P/N 99006 OEM 1705000 Dual Gas Base Plate P/N 99007 (also in tantalum, shown, 99007T) OEM 1717480 Face Plate P/N 99007A (for retainer screw 40556) Face Plate P/N 99007C OEM 1717480 (uses retainer screw 40556) Face Plate.095 Slot P/N 99007EEC OEM 1717480 Face Plate (thicker slot) P/N 99008 (also in tantalum, 99008T) OEM 1789810 End Plate P/N 99009 (also in tantalum, 99009T) OEM 1789820 Filament Shield P/N 99009A Filament Shield with corner radii P/N 99010 OEM 1789830 Graphite Repeller Plate P/N 99010A OEM 1789830 Graphite Repeller Plate squared corners P/N 99011(also in graphite, 99011G or tantalum, 99011T) OEM 1789840 Repeller Retainer Insert P/N 99012 (also in tantalum, 99012T) OEM 1790420 Repeller Shield P/N 99013 OEM 17037680 Electrode Ground Plate P/N 99014 OEM 1200080 or 17036440 Retainer Pin Assembly P/N 99015 OEM 17062350 Electrode High Voltage Plate P/N 99016 OEM 17037720 High Voltage Aperture P/N 99017 OEM 17037760 Low Voltage Aperture P/N 99018 OEM 17037930 Electrode Ground Plate P/N 99019 OEM 1789800 Filament Clamp 2
P/N 99019A Filament Clamp with Retainer P/N 99022* OEM 1708680 or 3420 90081, Alumina Ceramic Filament Insulator P/N 99023 OEM 17032830 or 1709830 Ceramic Filament Insulator P/N 99024 OEM 1706380 Vaporizer Nozzle Retainer Cap *P/N 99022TI (pkg of 25) P/N 99025 OEM 1740090 Beam Defining Plate P/N 99026 OEM 1717950 Beam Aperture P/N 99026A Modified Beam Aperture P/N 99027 OEM 1744550 Beam Plate P/N 99028 OEM 1704940 Curved Field Block P/N 99028A OEM 1704940 Curved Field Block P/N 99029 OEM 1740130 Strike Plate P/N 99030 OEM 1712070 Electrode Ground Plate P/N 99031 OEM 1745670 Accel Aperture #1 P/N 99033 OEM 1900400 Electron Shower Filament P/N 99033K Flood Gun Filament Kit* P/N 99034 OEM 1718300 Electron Shower Filament Insulator *kit components on page 10 of this section P/N 99035 OEM 4000059 or E40000001 Spring P/N 99035A OEM 4001167 Spring, Inconel P/N 99040 OEM 1744520 Burn-thru Sensor Plate P/N 99041 OEM 1713050 Graphite End Plate 3
P/N 99042 OEM 1706440 Filament Shield P/N 99043 Base Plate P/N 99044 (also in graphite, 99044G) Long Gas Port P/N 99044P Long Gas Port, Plugged P/N 99045 (also in graphite, 99045G, shown, or tantalum, 99045T) Short Gas Port P/N 99045P Short Gas Port, Plugged P/N 99047 Retaining Rod, SST P/N 99048 OEM 4300031 Retainer Ring P/N 99049 OEM 1789880 Silver Strap P/N 99050 OEM 1715230 or 82908K or 17097340 Silver Strap (.625 wide) P/N 99051 OEM 1789890 Silver Feed Strap P/N 99052 OEM 5000024 Ceramic Standoff P/N 99052UG Ceramic Standoff (No glaze) P/N 99053 OEM 1789870 Arc Chamber Mounting Plate P/N 99054 OEM 5000132, 24-811912-00, 2866042 or E59000003 Ceramic Standoff P/N 99054UG Ceramic Standoff (No glaze) P/N 99055 OEM 1741070 Accel Aperture #2 P/N 99056 OEM 1741080 Accel Aperture #3 P/N 99057 OEM 1741090 Accel Aperture #4 P/N 99058 OEM 1740330 Beam Aperture 4
P/N 99059 OEM 1796700 180Kv Accel Aperture P/N 99063 OEM 1200320 Filament Insulator Insert P/N 99065 OEM 17021870 Electron Shower Filament Aperture P/N 99066 OEM 1700230 Vespel Feed-thru P/N 99067 OEM 1700240 Vespel Spacer P/N 99068 OEM 1705030 Arc Chamber Mounting Block P/N 99069 OEM 1713040 Source Shield Tab P/N 99070 (also in tantalum, 99070T) OEM 1705001 Single Gas Base Plate P/N 99071 OEM 1769060 Flood Gun Source Frame P/N 99073 OEM 1769040 Terminal Insulator P/N 99074 OEM 1769050 Mounting Insulator P/N 99075 (Graphite) OEM 1769100 Electron Shower Bias Plate P/N 99076 OEM 17044220 Cover Ring P/N 99077 OEM 1769020 Cover P/N 99077A OEM 1769020 Flood Gun Cover P/N 99078 OEM 1769090 Lower Aperture P/N 99079 OEM 1769080 Upper Aperture P/N 99080 OEM 1741450 Feed-thru Stud P/N 99082 OEM 1741490 Feed-thru Insulator P/N 99083 OEM 1741460 Feed-thru Washer 5
P/N 99084 OEM 1769030 Silver Strap P/N 99086 OEM 1769120 Lower Aperture Insulator P/N 99087 OEM 1744570 Standoff Insulator P/N 99088 OEM 1744690 Top Insulator P/N 99090 OEM 1769110 Side Panel P/N 99091 OEM 1741430 Cup Spacer P/N 99092 OEM 4000323 Aperture Standoff P/N 99093 OEM 1718960 Filament Mounting P/N 99094 OEM 4100028 Filament Collar P/N 99098 OEM 17044200 Mounting Cover P/N 99099 OEM 1718290 Electron Shower Filament Shield P/N 99101 OEM 1740290 Upper Gas Feed Tube P/N 99102 Filament Clamp Spacer P/N 99103 Side Port Gas Feed Tube P/N 99110 OEM 1102030 Lower Gas Feed Tube, 1/8" NPT P/N 99110A OEM 1102030 Lower Gas Feed Tube, 1/16" NPT P/N 99113 OEM 17070550 Source Housing Exit Aperture P/N 99116 OEM 1706370 Vapor Nozzle P/N 99117 OEM 1700130 Source Handle P/N 99120 OEM 1700220 Threaded Stud 6
P/N 99121 OEM 1715240 Terminal Extension Buss P/N 99123 OEM 1789900 Source Body P/N 99124 OEM 1100040 Ion Source Assembly, No Vaporizer (Straight Filament) P/N 99128 OEM 17037290 Source Liner Ring P/N 99129 OEM 1740120 Outside Radius Block P/N 99130 OEM 17066870 Strike Plate P/N 99133 Electron Shower Filament Adjustment P/N 99134 OEM 1769130 Electron Shower Aperture Plate P/N 99137 OEM 1701730 Bar P/N 99138 OEM 1711262 Small Cup P/N 99139 OEM 1711261 Large Cup P/N 99140 OEM 1712390 Standoff P/N 99141 OEM 1712400 Bracket P/N 99142 OEM 1715000 Support Plate P/N 99143 OEM 1711280 Block Carrier P/N 99144 OEM 1102460 Electrode Assembly P/N 99145 OEM 1712960 Vaporizer Crucible, Sb P/N 99146 OEM 1712970 Vaporizer Nozzle, Sb P/N 99147 OEM 1712980 Vaporizer Top, Sb P/N 99151, Waveguide Set 7
P/N 99151-1 OEM 17062931 P/N 99151-2 OEM 17062932 P/N 99151-3 OEM 17062933 P/N 99151-4 OEM 17062934 P/N 99151-5 OEM 17062935 P/N 99152 Wave Guide Liner Block Mounting Assembly P/N 99152-1 OEM 1733010 Pivot P/N 99152-2 OEM 1733000 Pivot Body P/N 99153 OEM 1706310 Blank-off Plate P/N 99155 OEM 1732990 P/N 99157 OEM 1704991 Side Plate with Gas Port P/N 99158 Base Plate, No Port P/N 99159 (also in tantalum, 99159T or tungsten, 99159W) OEM 1717481 Aperture Shim P/N 99160 OEM 1103970 Wave Guide with graphite P/N 99163 OEM 4000073 Source Knob P/N 99173 OEM 1100440 Ceramic Feed-thru Tube P/N 99178 OEM 17033170B Filament Strap (.500 wide) P/N 99181 OEM 1740680 Graphite Aperture P/N 99182 OEM 1796720 Electrode Connector P/N 99187 OEM 1700142 Left Hand Terminal Stud 8
P/N 99188 OEM 1700141 Right Hand Terminal Stud P/N 99197 OEM 1712040 Graphite Bearing P/N 99199 OEM 1723250 Flag Strike Plate P/N 99201 OEM 1711990 Electrode Mounting Plate P/N 99202 OEM 1714970 Graphite Bushing P/N 99205 OEM 1751940 Input Chuck Flex P/N 99209 OEM 1701450 Seal Set P/N 99210 OEM 1127550 Bernas Source, no vaporizer P/N 99218 OEM 1740091 Graphite Aperture P/N 99234 (also in tantalum, 99234T) OEM 17033030 or 17072941 Repeller Retainer P/N 99234A Repeller Retainer P/N 99239 OEM 17100430 Repeller Plate P/N 99246 OEM 17091240B Magnetic Deflector Housing P/N 99247 OEM 1749600 Magnetic Deflector Aperture P/N 99248 OEM 1749640 Magnetic Deflector Magnet P/N 99249 Magnetic Deflector Side Plate P/N 99250 OEM 1115760 Magnetic Deflector Assembly P/N 99274 Glemco design of OEM 1713040 Source Shield Tab P/N 99310 Source Service Kit P/N 99337 OEM 17036190 Rev B Vaporizer Nozzle Retainer Cap 9 *kit components on page 10 of this section
P/N 99340 OEM 17033360 Cooling Tube Assembly P/N 99341 OEM 1714990 Swivel Pin P/N 99348 OEM 116441011 or 1164411 Electron Shower Assembly, Version #3 P/N 99348-1 OEM 7700066 Bias Voltage Wire Assembly P/N 99349 OEM 1118840 Electron Shower Assembly, Version #2 P/N 99350 Electron Shower Assembly, Version #1 P/N 99351 Electron Shower Assembly, Version #4 P/N 99356 OEM 17101260 1/4-16 X 1.90" SHCS, Electrode Adjusting Screw P/N K99900 Minor Source Rebuild Kit* *kit components on page 10 of this section P/N 40561 (OEM 3850-0644-0001), Retainer Screw Retrofit Kit contains the following components: P/N 40555 (OEM 7142-0006-0001B) Front Slit Arc Chamber Face Plate (1) P/N 40557 (OEM 4710-0059-0002) Arc Chamber Mounting Block (1) P/N 40558 (OEM 4710-0060-0002) Arc Chamber Mounting Block (1) P/N 40563 Retainer Screw Assembly (4) P/N 82385 (OEM 1236200403) 4-40 X 1/4,SHCS, ss (4) P/N 99033K Flood Gun Filament Kit contains the following components: P/N 99033 (OEM 1900400) Electron Shower Filament (1) P/N 99034 (OEM 1718300) Electron Shower Filament Insulator (1) P/N 99086 (OEM 1769120) Lower Aperture Insulator (2) P/N 99087 (OEM 1744570) Standoff Insulator (4) P/N 99088 (OEM 1744690) Top Insulator (2) P/N 99099 (OEM 1718290) Electron Shower Filament Shield (1) P/N 99310 Source Service Kit contains the following components: P/N 30670 (OEM 1789850) Pigtail Filament (1) P/N 99010 (OEM 1789830) Graphite Repeller Plate (1) P/N 99022 (OEM 1708680 or 3420 90081) Ceramic Filament Insulator (7) P/N 99023 (OEM 17032830 or 1709830) Ceramic Filament Insulator (1) P/N K99900 Minor Source Rebuild Kit contains the following components: P/N 30670 (OEM 1789850) Pigtail Filament (1) P/N 99002 (OEM 1200321) Filament Insulator Insert (2) P/N 99010 (OEM 1789830) Graphite Repeller Plate (1) P/N 99022 (OEM 1708680 or 3420 90081) Ceramic Filament Insulator (7) P/N 99023 (OEM 17032830 or 1709830) Ceramic Filament Insulator (1) P/N 99052 (OEM 5000024) Ceramic Standoff (2) 10