Electro-Pneumatic Regulator / Electronic Vacuum Regulator

Electro-Pneumatic Regulator / Electronic Vacuum Regulator Series Series Model Regulating pressure range Port size Page Series With a simplified high-density circuit board design, an extremely compact size has been achieved.. to. MPa. to MPa. to.9 MPa Built-in One-touch fittings Metric size: ø Inch size: ø/ 6 ARJ AR to 9 AMR ARM Electro-Pneumatic Regulator Series Controls air pressure steplessly in proportion to an electric signal. Series Controls air pressure steplessly in proportion to an electric signal. 9 to to KPa. to. MPa. to MPa. to.9 MPa. to. MPa. to MPa /8, / /, /8 6 6 ARP V VEX SRH SRP SRF ARX VCHR IC. to.9 MPa PVQ Series Controls air pressure steplessly in proportion to an electric signal.. to. MPa VEF VEP VER VEA. to MPa /, /8, / 6 VY. to.9 MPa VBA VBAT AP Electronic Vacuum Regulator Series 9 Controls vacuum pressure steplessly in proportion to an electric signal. 9. to 8 kpa / 669 69

Compact Electro-Pneumatic Regulator Series Compact mm With a simplified high-density circuit board design, an extremely compact size has been achieved. Compact electro-pneumatic regulator Series Lightweight g Actual size Realizes space-savings and reduction of weight for manifold use. Stations can easily be increased or decreased due to DIN rail mount design. Cable connectors Straight type and right angle type are available. Straight type Right angle type Built-in One-touch fittings With error indication LED Brackets Flat and s are available. Model 9 Pressure range. MPa MPa.9 MPa kpa Power supply voltage VDC VDC Input signal to ma to ma Output signal Analog output Option Cable connectors Straight type Right angle type to VDC to V Brackets Flat bracket to VDC Flat bracket Equivalent to IP6 Linearity within ±% (Full span) Hysteresis % (Full span) Repeatability ±% (Full span) High-speed response time. sec (Without load) High stability Sensitivity.% (Full span) W (Electro-pneumatic regulator) Mist separator (. μm or less) (. μm or less) (Precision regulator) Air Filter ( μm or less) 6

ERR Compact Electro-Pneumatic Regulator Series How to Order For single unit and single unit for manifold N Pressure range. MPa Power supply voltage 9 MPa.9 MPa kpa VDC ±% to VDC Input signal Current type to ma DC Current type to ma DC Voltage type to VDC Voltage type to VDC Option Built-in One-touch fittings type For single unit Nil Manifold I n Stations stations stations stations U Nil U Symbol Metric size (Light gray) Inch size (Orange) For manifold Symbol Metric size (Light gray) Inch size (Orange) SUP z OUTx (VAC) ø ø/" SUP z OUTx (VAC) ø6 ø/" ø ø/" EXH c (ATM) Option If a DIN rail longer than the specified stations is required, specify the applicable stations in two digits. (Maximum stations) Example) I--7 Note) A DIN rail with the length specified by the number of stations is attached to the manifold. For dimensions of the DIN rail, refer to the external dimensions. EXH c (ATM) ø6 ø/" Nil M Cable connector (Option) N S L Without cable connector Straight type m Right angle type m Bracket/ Option for single unit only Nil Without bracket B C Base type Flat Bracket For single unit For manifolds How to Order Manifold Assembly (Example) Indicate the part numbers of electro-pneumatic regulators and options to be mounted below the manifold part number. Example) Due to the common supply/exhaust feature, note that different pressure range combinations are not available. I- set (Manifold part no.) -MS sets (Electro-pneumatic regulator part no. (, stations)) -ML set (Electro-pneumatic regulator part no. ( stations)) Indicate part numbers in order starting from the first station on the D side. Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. The asterisk ( ) specifies mounting. Add an asterisk ( ) at the beginning of electro-pneumatic regulator part numbers to be mounted. D side PWR ERR PWR ERR PWR ERR PWR ERR ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP PWR DIN rail -MS -ML 6

Series Specifications Option Bracket Flat bracket assembly P98 Model Min. supply pressure Max. supply pressure Regulating pressure range Maximum flow rate Voltage Power supply Current consumption Voltage type Input signal Current type Voltage type Input impedance Current type Analog Output signal output Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Operating temperature range Enclosure Connection type For single Metric size unit Inch size Connection size Metric size Manifold Inch size Mass (). l/min(anr) (Supply pressure:. MPa) Set pressure +. MPa. MPa. MPa 6 l/min(anr) (Supply pressure:.6 MPa). to. MPa. to MPa. to.9 MPa 6 l/min(anr) (Supply pressure:.6 MPa) VDC ±%, to VDC to VDC, to VDC to madc, to madc Approximately kω Approximately Ω Within ±% (Full span) Within % (Full span) Within ±% (Full span) Within.% (Full span) Within ±.% (Full span)/ C to C (With no condensation) IP6 equivalent Built-in One-touch fittings g or less (without options) 9 Set pressure kpa kpa to kpa l/min(anr) (Supply pressure: kpa) Power supply voltage VDC type:. A or less Power supply voltage to VDC type:.8 A or less to VDC (Load impedance: kω or more) Output accuracy: Within ±6% (Full span) z, x, c: ø z, x, c: ø/" z, c: ø6, x: ø z, c: ø/", x: ø/" Note ) Indicates the mass of a single unit. For I-n Total mass (g) Stations (n) x + (Mass of end block A, B assembly) + Mass (g) of DIN rail Note ) Specifications other than the following are optional. Pressure range:. MPa, MPa,.9 MPa, Power supply voltage: VDC, Input signal: to VDC Note ) When there is a downstream flow consumption, pressure may become unstable depending on piping conditions. When using under the conditions equivalent to IP6, connect the fitting or tube to the breathing hole prior to use. (For details, refer to page 69 in Specific Product Precautions.) Cable connector Straight type M8-DSXMG assembly P98 Right angle type ELWIKA-KV8 PVC M Tighting torque when assembling is. N m. 6

Compact Electro-Pneumatic Regulator Series Working Principle When the input signal rises, the air supply soloenoid valve q turns ON. Due to this, part of the supply pressure passes through the air supply solenoid valve q and changes to output pressure. This output pressure feeds back to the control circuit r via the pressure sensor e. Here, pressure corrections continue until output pressure becomes proportional to the input signal, enabling output pressure that is proportional to the input signal. Diagram of working principle Block diagram Input signal Power supply Input signal q Air supply solenoid valve SUP (VAC) EXH (ATM) + r Control circuit e Pressure sensor Power supply and error LED indication r Control circuit Supply pressure q Air supply solenoid valve w Exhaust solenoid valve Discharged to atmosphere Output signal w Exhaust solenoid valve OUT (OUT) e Pressure sensor Output pressure ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP 6

Series Series Linearity, Hyteresis.8 Repeatability With % of signal input Output deviation factor (% F.S.).6.....6.8 Return Out 7 Output deviation factor (% F.S.) Count Pressure Characteristics Set pressure:. MPa Flow Characteristics Supply pressure:. MPa Output deviation factor (% F.S.) Out Return..6.7.8.9 Supply pressure (MPa). Set pressure (kpa) 8 6... kpa 8 kpa 6 kpa kpa kpa kpa Series Linearity, Hyteresis.8 Repeatability With % of signal input Output deviation factor (% F.S.).6.....6.8 Return Out 7 Output deviation factor (% F.S.) Count Pressure Characteristics Output deviation factor (% F.S.) Out Return Set pressure:. MPa....6.7.8.9 Supply pressure (MPa). Flow Characteristics Set pressure (kpa) 6 Supply pressure:.6 MPa 6 kpa kpa kpa kpa kpa kpa 7 6

Compact Electro-Pneumatic Regulator Series Series Linearity, Hyteresis Output deviation factor (% F.S.).8.6.....6.8 7 Pressure Characteristics Output deviation factor (% F.S.) Return Out Out..6.8. Series 9 Linearity, Hyteresis Output deviation factor (% F.S.) Return Supply pressure (MPa) 7 Pressure Characteristics Output deviation factor (% F.S.) Return Out Out Return Set pressure:. MPa 8 6 Supply pressure (kpa). Set pressure: kpa Repeatability Output deviation factor (% F.S.) Flow Characteristics Set pressure (kpa) Count With % of signal input Supply pressure:. MPa 9 9 kpa 8 kpa 8 7 7 kpa 6 6 kpa kpa kpa kpa kpa kpa kpa 6 Repeatability Output deviation factor (% F.S.) Flow Characteristics Set pressure (kpa) 6 8 kpa kpa kpa 6 kpa 8 kpa kpa Count With % of signal input... 7 6 ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP

Series Dimensions For Single Unit x ø6 x ø6 (Option) PWR ERR M8 x Cable connection thread Flat bracket (Option) 6 Note) Breathing hole (M x ) OUT port (ø, ø/") 8 88 9 OUTx SUPz VACz EXHc ATMc SUP, VAC port (ø, ø/") EXH, ATM port (ø, ø/") 9 (Option) x M x thread depth. Bracket mounting hole Flat bracket (Option) 7 9 7 9 PWR ERR Port Location No. z x c 9 SUP VAC OUT EXH ATM Note) When using under the conditions equivalent to IP6, connect the fittings or tube to the breathing hole prior to use. (For details, refer to page 69 in Specific Product Precautions.).7.7 89.7 8 6 x ø. x ø. 6 + (.9) 8 Minimium bending radius 8 Body ø Cable connector (-wire) Straight type (Option) 8.7 9.9 7 Cable connector (-wire) Right angle type (Option) Minimium bending radius 8 Body 8 M8 x ø9.7.6 ø 66

Compact Electro-Pneumatic Regulator Series Dimensions Single unit for manifold 6 8 Note) Breathing hole (M x ) OUT port (ø, ø/") OUTx Bushing assembly M8 x Cable connection thread 86 Note) When using under the conditions equivalent to IP6, connect the fittings or tube to the breathing hole prior to use. (For details, refer to page 69 in Specific Product Precautions.) Note) For dimensions of the cable connector, refer to single unit on page 66. 9.7 PWR ERR 8. 6. 8.7 ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP 67

Series Dimensions Manifold x M x thread depth Mounting hole Port Location No. z x c SUP OUT EXH 9 VAC ATM Note) Stations are counted starting from the D side. 9. PWR ERR PWR L L ERR PWR ERR PWR ERR 9. 6 D side stations U side 9 (8) Dimensions in inch are noted in parentheses. 6. 6. SUP, VACzport (ø6, ø/") 8 89. EXH, ATMcport (ø6, ø/") OUTxport (ø, ø/").7 Note) For dimensions of the cable connector, refer to single unit on page 66. Manifold stations n L L Mass of DIN rail (g) 6 7 9 8 7 6 9 6 7 7 8. 8 98 6 9 6 (mm) 8. Note) Breathing hole (M x ) Note) When using under the conditions equivalent to IP6, connect the fittings or tubing to the breathing hole prior to use. (For details, refer to Specific Product Precautions on page 69.) 68

Series Specific Product Precautions Be sure to read before handling. Refer to front matters and for Safety Precautions and pages 87 to 9 for Precautions on every series. Terminal no. Lead wire color Wiring Caution Caution : () : () : () : () Wiring diagram Current signal type Vs A Power supply Signal COM Monitor Air Supply. Install an air filter near this product on the supply side. Select a filtration degree of μm or less.. Compressed air containing large amounts of drainage can cause malfunction of this product and other pneumatic equipment. As a countermeasure, install an aftercooler, air dryer or Drain Catch, etc.. If large amounts of carbon dust are generated by the compressor, it can accumulate inside this product and cause malfunction. For details on the above compressed air quality, refer to pages and. Note) Wiring Connect the cable to the connector on the body with the wiring arranged as shown below. Proceed carefully, as incorrect wiring can cause damage. Further, use DC power with sufficient capacity and a low ripple. Vs : Power supply VDC ±% to VDC A : Input signal to madc to madc Monitor output wiring diagram Analog output, voltage type Monitor output voltage Voltage signal type Vs Vin Vs : Power supply VDC ±% to VDC Vin : Input signal to VDC to VDC Body Note) A right angle type is also available. The entry directions for the right angle type connector is downward (OUT port side). Never turn the connector as it is not designed to turn. If forced, it will damage the connector port. Caution Handling. Do not use a lubricator on the supply side of this product, as this can cause malfunction. When lubrication of terminal equipment is necessary, connect a lubricator on the output side of this regulator.. If electric power is shut off while pressure is being applied, output pressure will be maintained. However, this output pressure is held only temporarily and is not guaranteed. If exhausting of this pressure is desired, shut off the power after reducing the set pressure, and discharge the air using a residual pressure exhaust valve, etc.. If power supply to this regulator is cut off due to a power failure, etc., when it is in a regulated state, output pressure will be maintained temporarily. Handle carefully when operaing with output pressure released to the atmosphere, as air will continue to flow out until reaching atmospheric pressure.. If supply pressure to this regulator is interrupted while the power is still on, the internal solenoid valve will continue to operate and a humming noise may be generated. Since the life of the solenoid valve may be shortened by this, be sure to shut off the power supply when supply pressure is shut off.. This product is adjusted for each specification at the time of shipment from the factory. Avoid unnecessary disassembly or removal of parts, as this can lead to a malfunction. 6. The optional cable connector is a -wire type. When the monitor output (analog output) is not being used, keep the monitor output wire (black) from touching the other wires as this can cause malfunction. 7. Use caution that the right angle cable does not rotate and is limited to only one entry direction. 8. Take the following steps to avoid malfunction caused by noise. ) Remove power supply noise during operation by installing a line filter, etc. in the AC power line. ) For avoiding the influence of noise or static electricity, install this product and its wiring as far as possible from strong electric fields such as those of motors and power lines, etc. ) Make sure to take protective measures against load surge for an induction load (solenoid valves, relays, etc.). 9. Characteristics are limited only to the static state, and when air is consumed on the output side, pressure may fluctuate.. For details on the handling of this product, refer to the instruction manual included with the product.. In locations where the body is exposed to water, dust, etc., there is a possibility that they can enter into the body throught the breathing hole. Use a fitting/tube (M-AU- fitting and TIUm-mm tube are recommended), extend the piping to the location where there is no water, dust, etc.. When using in an enclosed environment, like an inspection box, etc., make sure to install a fan or other such device to prevent from overheating. When power is on, an operating tone occurs to confirm the operation of the solenoid valves. Note that this is not abnormal. Breathing hole M x ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP 69

6

Electro-Pneumatic Regulator Series // (Option) Stepless control of air pressure proportional to an electrical signal /min (ANR) Sensitivity: /min (ANR) /min (ANR) ( kpa specifications) Pressure range:.9 MPa, Supply pressure:. MPa Equivalent to IP6 ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP Linearity: Within (F.S.) Hysteresis: Within (F.S.) 6

Electro-Pneumatic Regulator Series // Standard Specifications JIS Symbol Rated pressure Output pressure (MPa) This range is outside.mpa of the control (output). Graph () Input/output characteristics chart Model Minimum supply pressure Maximum supply pressure Set pressure range Note ) Voltage Power supply Current consumption Input signal Input impedance Note ) Output signal (monitor output) Note ) Current type Voltage type Preset input Current type Voltage type Preset input Analog output Switch output Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Output pressure Accuracy display Minimum unit Ambient and fluid temperature Enclosure Mass How to Order Set pressure +. MPa. MPa. MPa. to. MPa. to MPa. to.9 MPa VDC ± %, to VDC Power supply voltage VDC type:. A or less Power supply voltage to VDC type:.8 A or less to ma, to ma (Sink type) to VDC, to VDC points Ω or less Approx. 6. kω Approx..7 kω to VDC (Load impedance: kω or more) to ma (Sink type) (Load impedance: Ω or less) Output accuracy within ±6% (full span) NPN open collector output: Max. V, ma PNP open collector output: Max. ma Within ±% (full span) Within % (full span) Within ±% (full span) Within.% (full span) Within ±.% (full span)/ C ±% (full span) MPa:., kgf/cm :., bar:., psi:., kpa: to C (No condensation) Equivalent to IP6 Approx. g (without options) Approx. g (without options) Approx. 6 g (without options) Note ) Note ) Note ) Please refer to graph, relation to the differences between the set pressure and input. Additionally, refer to page 668 as maximum set pressure differs on unit of standard measure. Note ) -wire type to ma is not available. Power supply voltage ( VDC or to VDC) is required. Note ) Select either analog output or switch output. Further, when switch output is selected, select either NPN output or PNP output. Note ) Values can be adjusted starting from the minimum output pressure display units (ex.. to MPa) are used for the zero/span adjustment or the preset input type adjustment. Units are not interchangeable. Note ) The minimum unit for the.9 MPa ( psi) type is psi. Note 6) The above characteristics are confined to the static state. When air is consumed on the output side, the pressure may fluctuate. Model type type type Power supply voltage 6 VDC to VDC S Pressure range. MPa MPa.9 MPa Input signal Current to ma (Sink type) Current to ma (Sink type) Voltage to VDC Voltage to VDC Preset input Monitor output None (for preset input) Analog output to V DC Switch output/npn output Switch output/pnp output Analog output to ma (Sink type) Thread type Nil N T F Rc NPT NPTF G Port size Cable connector type S L N /8 ( type) / (,, type) /8 (, type) / ( type) Pressure display unit Nil MPa Note ) kgf/cm bar Note ) psi kpa Straight type m Right angle type m Without cable connector Bracket Nil B C Nil Not compliant Q Compliant Note) Refer to pages 6, 66 and 66 for CE marked products in the Made to Order specifications. Please visit our SMC homepage: http://www.smcworld. com for the latest details on our CE compliant products. Made to Order Refer to pages 6, 66 and 66 for details. Without bracket Flat bracket CE compliance

Electro-Pneumatic Regulator Series // Combinations Standard specifications Combination possible Combination not possible models are not applicable. Applicable model rspacer SMC REGULATOR Specifications Symbol Approx. 89 Approx. Approx. Approx. 7 qaf qaf 78 wafm wafm e Made to Order (Refer to pages 66 and 66 for details.) Symbol CE-compliant Specifications X8 Not compliant DeviceNet compliant X Compliant X Not compliant CC-Link compliant X Compliant X Not compliant RS-C compliant Compliant X8 Not compliant 6 points preset input type X6 Compliant X9 Not compliant Digital input type X7 Compliant X Not compliant Reverse type X Compliant X Not compliant High pressure type X Compliant (SUP. MPa, OUT. MPa) X Not compliant Set pressure range to kpa X Compliant (Except Series ) X88 Not compliant High speed response type X Compliant (Except Series ) X6 Not compliant For manifold mounting X Compliant (Except Series ) Note ) Manifolds are compatible with to 8 stations. Consult with SMC for 9 stations or more. Note ) Products without symbols are also compatible. Consult with SMC separately. REGULATOR Standard specifications Accessories Optional specifications Accessory (Option)/Part No. Dimensions Set pressure max.. MPa Set pressure max. MPa Set pressure max..9 MPa Connection Rc / Connection Rc /8 Connection Rc / Bracket B Bracket C Connection NPT/ N Connection NPT/8 N Connection NPT/ N Connection G / F Connection G /8 F Connection G / F Modular Products and Accessory Combinations Applicable products and accessories q Air filter w Mist separator e r Spacer t Spacer with (e + r) Cable connector Description Flat bracket Flat bracket Part No. INI-98--6 (Mounting thread is not included.) Straight P98-- type m Right angle P98-- type m x ø7.6 P (Mounting thread is not included.) 6 8 6 8 x ø. x ø. 7 7 (8.) 6 7 models are not applicable. Applicable model AF AF AFM AFM BL BL Y Y YL YL 6 x R. 8 x ø. x ø.. 6 ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP

Series // Working Principles When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF. Therefore, supply pressure passes through the air supply solenoid valve q and is applied to the pilot chamber e. The pressure in the pilot chamber e increases and operates on the upper surface of the diaphragm r. As a result, the air supply valve t linked to the diaphragm r opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u. Here, a correct operation functions until the output pressure is proportional to the input signal, making it possible to always obtain output pressure proportional to the input signal. Working Principle Diagram Pressure display Power supply Input signal q Air supply solenoid valve r Diaphragm Pressure display i Control circuit Output signal w Exhaust solenoid valve EXH u Pressure sensor e Pilot chamber t Supply valve Power supply Input signal q Air supply solenoid valve r Diaphragm y Exhaust valve t Supply valve i Control circuit Output signal w Exhaust solenoid valve u Pressure sensor e Pilot chamber EXH EXH SUP OUT SUP OUT EXH, Block diagram Supply pressure Input signal i Control circuit q Air supply solenoid valve r Diaphragm Pilot valve Output pressure w Exhaust solenoid valve u Pressure sensor 6

Electro-Pneumatic Regulator Series // Series Linearity.. Out..9.8.7 Return.6........ 7 7 Pressure characteristics...... Series Linearity..9.8.7.6...... 7.. Supply pressure (MPa) Pressure characteristics.... Supply pressure (MPa) Set pressure:. MPa Set point.... 7 Set pressure:. MPa Set point. Hysteresis Flow characteristics...... 6 8 Hysteresis Flow characteristics Out Return Supply pressure:. MPa Supply pressure:. MPa 6 Repeatability... 6 8 Relief flow characteristics...... 6 8 Repeatability... 6 8 Relief flow characteristics..... Repetition Repetition. 6 8 Back pressure:. MPa Back pressure:. MPa ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP 6

Series // Series Linearity..9.8.7.6...... 7 Hysteresis. Out. Return. 7 Repeatability... 6 8 Repetition Pressure characteristics Set pressure:. MPa. Set point...... Supply pressure (MPa) Flow characteristics Supply pressure:. MPa.... Relief flow characteristics Back pressure:. MPa...... 66

Electro-Pneumatic Regulator Series // Series Linearity Pressure characteristics Series Linearity.6..... 7 Pressure characteristics.6..... 7......6 Supply pressure (MPa)......6 Supply pressure (MPa) Set pressure:. MPa Set point Hysteresis... 7 Set pressure:. MPa Set point.8.8 Hysteresis Flow characteristics Flow characteristics...6......6.... Out Return. 7 Supply pressure:.7 MPa Out Return Supply pressure:.7 MPa. Repeatability Repeatability... 6 8 Repetition Relief flow characteristics... 6 8 Repetition Relief flow characteristics.8.7.6.....8.7.6.... Back pressure:.7 MPa. Back pressure:.7 MPa. ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP 67

Series // Series Linearity.6 Hysteresis. Repeatability...... 7 Out. Retirm. 7.. 6 8 Repetition Pressure characteristics Set pressure:. MPa. Set point.....6.8 Supply pressure (MPa) Flow characteristics Supply pressure:.7 MPa.6..... 6 Relief flow characteristics.8.7.6.... Back pressure:.7 MPa. 68

Electro-Pneumatic Regulator Series // Series Linearity Pressure characteristics Series Linearity..9.8.7.6..... 7 Pressure characteristics..9.8.7.6..... 7.....6.8. Supply pressure (MPa).. Set pressure:. MPa...6.8.. Supply pressure (MPa) Hysteresis... 7 Set pressure:. MPa Set point Set point Hysteresis Flow characteristics Flow characteristics....9.8.7.6.......9.8.7.6... Out Return. 7 Out Return Supply pressure:. MPa Supply pressure:. MPa.. Repeatability Repeatability.. 6 8 Repetition Relief flow characteristics... 6 8 Repetition Relief flow characteristics..9.8.7.6......9.8.7.6.... Back pressure:. MPa. Back pressure:. MPa. ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP 69

Series // Series Linearity..9.8.7.6..... 7 Hysteresis. Out. Return. 7 Repeatability... 6 8 Repetition Pressure characteristics Set pressure:. MPa. Set point....6.8.. Supply pressure (MPa) Flow characteristics..9.8.7.6.... Supply pressure:. MPa. 67 Relief flow characteristics..9.8.7.6.... Back pressure:. MPa. 6 66

Electro-Pneumatic Regulator Series // Dimensions Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn. Cable connector (-wire) Cable connector (-wire) Right angle type Straight type x ø7 Mounting hole () ARJ AR to 9 SMCE P REGULATOR SMC E P REGULATOR AMR RESET SET ARM UNLOCK LOCK ARP Setting part 8 V (). M x Cable connection threads VEX SRH SRP Rc /8 Pressure gauge connection port SMCE P REGULATOR MPa SRF ARX M x Solenoid valve EXH SUP () INPUT OUTPUT ~VDC.~MPa MADE IN JAPAN G GY OUT () 7 Solenoid valve EXH 9. OUT Rc /8 Exhaust port EXH () VCHR IC PVQ Flat bracket P (Optional) x Rc /8, / SUP port, OUT port VEF VEP VER x M x.7 thread depth 6 mm through Mounting hole VEA VY VBA VBAT G OUT AP R. 7. (8.) INI-98--6 (Optional) x Rc /8, / SUP port, OUT port 66

Series // Dimensions Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn. Cable connector (-wire) Right angle type Cable connector (-wire) Straight type x ø7 Mounting hole () SMC REGULATOR SMC REGULATOR RESET UNLOCK SET LOCK 8. M x Cable connection threads () SMC REGULATOR M x.8 Solenoid valve EXH Rc /8 Pressure gauge connection port SUP () OUT () 9 Solenoid valve EXH Rc / Exhaust port OUT 9. EXH () 6 Flat bracket P (Optional) x Rc /, /8 x M x.8 thread depth 6 mm through SUP port, OUT port Mounting hole G OUT 9 R. 7 6 66 (8.) INI-98--6 (Optional) x Rc /, /8 SUP port, OUT port.

Electro-Pneumatic Regulator Series // Dimensions Flat bracket 66 Note) Do not attempt to rotate, as the cable connector does not turn. Cable connector (-wire) Cable connector (-wire) Right angle type Straight type x ø7 Mounting hole () ARJ AR to 9 SMC REGULATOR SMC REGULATOR AMR UNLOCK RESET SET LOCK ARM ARP 8. M x Cable connection threads V VEX SMC REGULATOR () SRH SRP M x.8 Solenoid valve EXH Rc / Pressure gauge connection port Solenoid valve EXH SRF ARX SUP() OUT().7 8 OUT Rc / Exhaust port EXH() VCHR IC PVQ VEF VEP 6 Flat bracket P (Optional) x M x.8 thread depth 6 mm through x Rc /, /8, / SUP port, OUT port VER VEA Mounting hole VY VBA VBAT G OUT AP R. 7 6 (8.) INI-98--6 (Optional) x Rc /, /8, / SUP port, OUT port. 66

Series // Made to Order Specifications Contact SMC regarding detailed dimensions, specifications and delivery times. Fluoro rubber is used for the rubber parts of seals. 8 DeviceNet Compliant It is conforming to DeviceNet. Note ) in part number is the same model no. for the standard products. Note ) The pressure is not indicated. Note ) in part number is the same model no. for the standard products. Note ) Monitor output is switch output type only. This cannot be selected for types without a monitor output or with analog output. Note ) Values can be adjusted starting from the minimum output pressure display units. CC-Link Compliant It is conforming to CC-Link Note ) in part number is the same model no. for the standard products. Note ) The pressure is not indicated. RS-C Compliant It is conforming to RS-C. Note ) in part number is the same model no. for the standard products. Note ) The pressure is not indicated. Able to control 6-point-pressure by bit switching input Ozone Resistant Specifications Standard model number Ozone resistant specifications 6 Points Preset Input Type MPa. X8 X8 X8 DeviceNet compliant Symbol X8 X X X X Symbol X8 X6 CE-compliant Not compliant Compliant CC-Link compliant Symbol CE-compliant X Not compliant X Compliant X X X RS-C compliant X8 X8 kgf/cm. * psi type: psi 66 bar. psi. kpa X8 6 points preset type CE-compliant Not compliant Compliant 6 Digital Input Type Parallel input type with digital bit. S N S N Digital input type X9 X9 S N X9 Symbol X9 X7 CE-compliant Not compliant Compliant Note ) in part number is the same model no. for the standard products. Note ) Right angle type cable connectors cannot be selected. 7 Reverse Type In compliance with input, inverse proportional pressure is displayed. Rated pressure Symbol X X Reverse type CE-compliant Not compliant Compliant X X X Note ) in part number is the same model no. for the standard products. Note ) Except for preset input type. 8 Output pressure (MPa) This range is outside of the control (output).. MPa Input/output characteristics chart 9 High Pressure Type (SUP. MPa, OUT. MPa) High pressure type (SUP. MPa, OUT. MPa) Symbol X X Symbol X X CE-compliant Not compliant Compliant Set Pressure Range to kpa Set pressure range to kpa CE-compliant Not compliant Compliant X X X X X

Series // Made to Order Specifications Contact SMC regarding detailed dimensions, specifications and delivery times. High-Speed Response Time Type Pressure response with no load is approx.. sec. Manifold Specifications (Except Series ) through 8 station manifold. Note) Refer to the table below for possible mixed combination. Model Model type type Power supply voltage VDC to VDC S Pressure range How to Order Manifolds,. MPa MPa.9 MPa Monitor output Analog output to VDC Thread type Nil N T F Input signal Current to ma (Sink type) Current to ma (Sink type) Voltage to VDC Voltage to VDC I Rc NPT NPTF G OUT port size Connection thread type Nil N F PT NPT PF Valve stations stations 8 / /8 8 stations Port size I-- set ( station manifold base part no.) -S-X6 set (Electro-pneumatic regulator part no.) Note ) P98- set (Blanking plate assembly part no.) -S-X6 set (Electro-pneumatic regulator part no.) Note ) The is the symbol for mounting. Add the symbol at the beginning of part numbers for electro-pneumatic regulators, etc. to be mounted on the base. /8 ( type) / (, type) /8 ( type) Electro-pneumatic regulator -S-X6 Manifold base ( stations) I-- E UNLOCK SMC REGULATOR P G MPa SET RESET LOCK OUT X88 Pressure display unit Nil MPa kgf/cm bar psi kpa Cable connector type S L N Straight type m Right angle type m Without cable connector Bracket Nil B C Without bracket Flat bracket How to Order Manifold Assemblies Example Blanking plate assembly P98- Electro-pneumatic regulator E UNLOCK SMC REGULATOR P G MPa SET RESET LOCK High-speed response time specifications Symbol X88 X -S-X6 SUP Stations CE-compliant Not compliant Compliant Note ) Note ) Electro-pneumatic regulators are counted starting from station on the left side with the OUT ports in front. Note ) The port size for mounted electro-pneumatic regulators is Rc /8 (), Rc / () only. Note ) When there is a large number of stations, use piping with the largest possible inside diameter for the supply side, such as steel piping. Note ) The use of the straight type cable connector is recommended. To mount right angle type, be certain to check that no possible interference occurs. Note ) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. 66 ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP

Series // Electro-Pneumatic Regulator Precautions Be sure to read before handling. Refer to front matters and for Safety Instructions and pages 667 and 668 for Specific Product Precautions. Warning. Screw piping together with the recommended proper torque while holding the side that has female threads. Looseness or faulty sealing will occur if tightening torque is insufficient, while thread damage will result if the torque is excessive. Furthermore, if the side with the female threads is not held while tightening, excessive force will be applied directly to piping brackets, etc. causing damage or other problems. Connection thread Piping. Do not allow twisting or bending moment to be applied other than the weight of the equipment itself. Provide separate support for external piping, as damage may otherwise occur.. Since excessive moment loads and the propagation of vibrations, etc. can easily result from inflexible piping made of materials such as steel, avoid these problems by using flexible tubing for intermediate connections. Caution. Preparation before piping Before piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe. 666 Torque Recommended proper torque: N. m (kgf. cm) /8 / /8 / 7 to 9 (7 to 9) to ( to ) REGULATOR REGULATOR to ( to ) 8 to (8 to ) Piping. Wrapping of pipe tape When screwing together pipes and fittings, etc., be certain that chips from the pipe threads and sealing material do not get inside the piping. Also, when pipe tape is used, leave. to thread ridges exposed at the end of the threads. Wrapping direction Expose approx. threads Pipe tape Operating Environment Warning. Do not operate in locations having an atmosphere of corrosive gases, chemicals, sea water, or where there will be contact with the same.. Do not operate in locations where vibration or impact occurs.. In locations which receive direct sunlight, provide a protective cover, etc.. In locations near heat sources, block off any radiated heat.. In locations where there is contact with spatter from water, oil or solder, etc., implement suitable protective measures. Caution In locations where the body is exposed to water, steam, dust, etc., there is a possibility that moisture or dust could enter the body through the EXH (solenoid) ports, thereby causing problems. To overcome this, simply install tubing to each port, using the fittings, and extend the tubing so that the other end is at a location where no water splash, etc. occurs. Make sure not to bend, or block the I.D. of the tubing as this will have a detrimental affect on the pressure control. Warning Air Supply. These products are designed for use with compressed air. Contact SMC if any other fluid will be used.. Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salt, or corrosive gases, etc., as this can cause damage or malfunction.

Series // Specific Product Precautions Be sure to read before handling. Refer to front matters and for Safety Instructions. Warning Caution Air Supply. Install an air filter near this product on the supply side. Select a filtration degree of μm or less.. Compressed air containing large amounts of drainage can cause malfunction of this product and other pneumatic equipment. As a countermeasure, install an aftercooler, air dryer or Drain Catch, etc.. If large amounts of carbon dust are generated by the compressor, it can accumulate inside this product and cause malfunction. For details on the above compressed air quality, refer to pages and. Caution Operating Environment. Employ suitable protective measures in locations where there is contact with water droplets, oil or welding spatter, etc.. Consult with SMC when used in power plants, or if instrumentation related. Handling. Do not use a lubricator on the supply side of this product, as this can cause malfunction. When lubrication of terminal equipment is necessary, connect a lubricator on the output side of this equipment.. If electric power is shut off while pressure is being applied, pressure will be retained on the output side. However, this output pressure is held only temporarily and is not guaranteed. If exhausting of this pressure is desired, shut off the power after reducing the set pressure, and discharge the air using a residual pressure exhaust valve, etc.. If power to this product is cut off due to a power failure, etc. when it is in a controlled state, output pressure will be retained temporarily. Handle carefully when operating with output pressure released to the atmosphere, as air will continue to flow out. Caution Handling. If supply pressure to this product is interrupted while the power is still on, the internal solenoid valve will continue to operate and a humming noise may be generated. Since the life of the product may be shortened, shut off the power supply also when supply pressure is shut off.. In this product, the output side pressure cannot be completely relieved within the range of. MPa or less. If it is desired to reduce the pressure completely to MPa, install a way valve or other device on the output side to exhaust the pressure. 6. This product is adjusted for each specification at the time of shipment from the factory. Avoid careless disassembly or removal of parts, as this can lead to malfunction. 7. The optional cable connector is a wire type. When the monitor output (analog output or switch output) is not being used, keep it from touching the other wires as this can cause malfunction. 8. Please note that the right angle cable does not rotate and is limited to only one entry direction. 9. Take the following steps to avoid malfunction due to noise. ) Remove power supply noise during operation by installing a line filter, etc. in the AC power line. ) For avoiding the influence of noise or static electricity, install this product and its wiring as far as possible from strong electric fields such as those of motors and power lines, etc. ) Be sure to implement protective measures against load surge for induction loads (solenoid valves, relays, etc.).. Due to the large volume of the output side, a loud exhaust noise will be produced when being used for the purpose of a relief function. Therefore, install a silencer (SMC Series AN or AN) on the exhaust port (EXH port). The port sizes are Rc /8, Rc / and Rc /.. Specifications on page 6 is in case of static environment. Pressure may fluctuate when air is consumed at the output side.. For details on the handling of this product, refer to the instruction manual which is included with the product. ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP 667

Series // Specific Product Precautions Be sure to read before handling. Refer to front matters and for Safety Instructions. Caution Connect the cable to the connector on the body with the wiring arranged as shown below. Proceed carefully, as incorrect wiring can cause damage. Further, use DC power with sufficient capacity and a low ripple. : () : () : () : () Wiring Monitor output wiring diagram Analog output, voltage type Monitor output current Body Note) RESET Switch output, NPN type Current signal type Voltage signal type Power supply Input signal GND (COMMON) Monitor output Preset input type Power supply Input signal GND (COMMON) Input signal Load Note) A right angle type cable is also available. The entry direction for the right angle type connector is to the left (SUP port side). Never turn the connector as it is not designed to turn. Switch output, PNP type Wiring diagram Current signal type Vs A Vs: Power supply VDC to VDC A : Input signal to madc to madc Voltage signal type Vs Vin Vs : Power supply VDC to VDC Vin: Input signal to VDC to VDC Load Analog output, current type (sink type) Monitor output current Preset input type Vs S When ma DC or more is applied, detecting device for overcurrent starts activating and then emits an error signal. (Error number ) S Vs: Power supply VDC to VDC One of the preset pressures P through P is selected by the ON/OFF combination of S and S. S S Preset pressure OFF OFF P ON OFF P OFF ON P ON ON P For safety reasons, it is recommended that one of the preset pressures be set to MPa. Values can be adjusted starting from the minimum output pressure display units. MPa kgf/cm.. psi type: psi 668 bar. psi. kpa Regulating pressure range, by unit of standard measured pressure Unit MPa kgf/cm bar psi kpa Set Pressure Range The regulating pressure range, by unit of standard measured pressure, is shown in the table below. Regulating pressure range. to.. to. to.9. to. to. to 9. to. to. to 9.7 to.7 to 7.7 to to to to 9

Electronic Vacuum Regulator Series 9/9 Stepless control of vacuum pressure in proportion to an electric signal Piping/Wiring Diagram Power supply and input signal (VDC, madc) Power supply voltage VAC Vacuum pump, Ejector 9 VDC to VDC OUT Input signal Current type to madc Current type to madc Voltage type to VDC Voltage type to VDC Preset input Tank Set pressure (Vacuum) Standard Specifications How to Order 9 S Pressure range 9. to 8 kpa Model Voltage Power supply Current consumption Minimum supply vacuum pressure () Maximum supply vacuum pressure Set pressure range Input signal Input impedance Output signal () (Monitor output) Monitor output None (For preset input) Analog output to VDC Switch output/npn output Switch output/pnp output Analog output to madc (Sink type) Current type () Voltage type Preset input Current type Voltage type Preset input Analog output Switch output Thread type Nil Rc N NPT T NPTF F G 9 VDC ±% Pressure display unit kpa Port size / Cable connector type S Straight type m L Right angle type m N Without cable connector Option (Bracket) Nil B C 9 to VDC Power supply voltage VDC type:. A or less Power supply voltage to VDC type:.8 A or less Set pressure. kpa kpa. to 8 kpa to ma, to ma to VDC, to VDC points Ω or less Approximately 6. kω Approximately.7 kω to VDC (Load impedance: kω or more) to ma (Sink type) (Load impedance: Ω or less) Output accuracy within ±6% (Full span) NPN open collector output: Max. V, ma PNP open collector output: Max. ma Linearity Within ±% (Full span) Hysteresis Within % (Full span) Repeatability Within ±% (Full span) Sensitivity Within.% (Full span) Temperature characteristics Within ±.% (Full span)/ C Accuracy ±% (Full span) Output pressure display Units kpa () Minimum display: Ambient and fluid temperature to C (No condensation) Enclosure IP6 equivalent Mass g Note ) The minimum supply vacuum pressure should be. kpa less than the maximum vacuum pressure setting value. Note ) to ma is not possible with the -wire type. Power supply voltage ( VDC or to VDC) is required. Note ) Either analog output or switch output must be selected. Furthermore, when switch output is selected, either NPN output or PNP output must also be selected. Use caution that the preset input type is not equipped with an output signal function. Note ) Please contact SMC regarding indication with other units of pressure. CE-compliant Nil Q Without bracket Flat bracket Not compliant Compliant 669 ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP

Series 9 Working Principle Power supply Input signal q Vacuum pressure solenoid valve r Diaphragm Pressure display i Control circuit Output signal w Atmospheric pressure solenoid valve Atmospheric pressure u Pressure sensor e Pilot chamber Working Principle When the input signal increases, the vacuum pressure solenoid valve q turns ON, and the atmospheric pressure solenoid valve w turns OFF. Because of this, VAC. and the pilot chamber e are connected, the pressure in the pilot chamber e becomes negative and acts on the top of the diaphragm r. As a result, the vacuum pressure valve t which is linked to the diaphragm r opens, VAC. and OUT. are connected, and the set pressure becomes negative. This negative pressure feeds back to the control circuit i via the pressure sensor u. Then, a correct operation works until a vacuum pressure proportional to the input signal is reached, and a vacuum pressure is obtained which is always proportional to the input signal. Block Diagram VAC. VAC. (Vacuum pump, etc.) ATM (Atmospheric pressure) t Vacuum pressure valve OUT. (Set pressure) y Atmospheric pressure valve Input signal + t Control circuit q Vacuum pressure solenoid valve w Atmospheric pressure solenoid valve u Pressure sensor r Diaphragm Pilot valve Set pressure Series 9 Linearity Hysteresis Repeatability. Output pressure (kpa) 6 Output deviation factor (% F.S.) Return Out Output deviation factor (% F.S.) 8 7 Input signal (% F.S.) Pressure Characteristics Output deviation factor (% F.S.). Set point Set pressure: kpa 7 Flow Characteristics Set pressure (kpa) 6 7 8 Input signal (% F.S.) Supply vacuum pressure: kpa. 6 8 Count Flow characteristics measurement conditions Exhaust flow rate of the vacuum pump used for measurement: l/min (ANR) Inlet vacuum pressure: kpa (When outlet flow rate is l/min (ANR)) Maximum flow rate: l/min (ANR) (With inlet vacuum pressure at 9 kpa). 8 6 VAC. side pressure (Supply pressure) (kpa) 9 Flow rate (l /min(anr)) 67

Electronic Vacuum Regulator Series 9 Dimensions 9 Note) Do not attempt to rotate the cable connector, as it does not turn. Cable connector (-wire) Right angle type Cable connector (-wire) Straight type x ø7 Mounting hole ARJ AR to 9 SMC E PREGULATOR SMC E PREGULATOR AMR RESET SET UNLOCK LOCK 9 9 ARM ARP 8 V (99) () 9 ATM (Atmospheric pressure) SMC E PREGULATOR 9 G Rc /8 Pressure gauge connection port OUT (Set pressure). OUT M x Cable connection thread Rc / VAC port VAC (Vacuum pressure) VEX SRH SRP SRF ARX VCHR IC PVQ.6 6 Flat bracket P (Option) x M x.8 thread depth 6 mm through Mounting hole x Rc / ATM port, OUT port VEF VEP VER VEA VY G OUT VBA VBAT AP 9 R. 7 6 () (7) 6 INI-98--6 (Option) x Rc / ATM port, OUT port. 67

Series 9 Accessory (Option)/Part No. Description Flat bracket Cable connector Straight type m Right angle type m Part no. P (Not including mounting screws) INI-98--6 (Not including mounting screws) P98-- P98-- Dimensions Flat bracket x ø. 6 x ø7 8 7 (8.) 7 6 x R.. 6 6 7 7.6 x ø. 67

Series 9 Specific Product Precautions Be sure to read before handling. Refer to front matters and for Safety Precautions and pages 87 to 9 for Precautions on every series. Handling Caution. Connect the vacuum pump to the port, which is labeled VAC.. Pressure adjustment changes from atmospheric pressure to vacuum pressure when the input signal is increased, and from vacuum pressure to atmospheric pressure when the input signal is decreased.. When adjusting the vacuum pressure, be careful not to block the atmospheric pressure inlet port labeled ATM.. Since this product is designed exclusively for use with negative pressure, be careful not to apply positive pressure in error.. In cases where the vacuum pump being used has a relatively small capacity, or the piping has a small inside diameter, etc., large variations in the set pressure (the range of pressure variation when changing from no flow to flow state) may appear. In this situation, the vacuum pump or the piping, etc. should be changed. In cases where it is not practical to change the vacuum pump, install a capacity tank (volume depending on the operating conditions) on the VAC side. 6. The vacuum pressure response time after a change in the input signal is influenced by the internal volume on the setting side (including piping). Since the capacity of the vacuum pump also influences the response time, give careful consideration to these points before operation. 7. If the electric power is shut off when in a control state, the pressure on the setting side will go into a holding condition. However, this setting side pressure will be held only temporarily and is not guaranteed. In addition, when atmospheric pressure is desired, shut off the power after reducing the set pressure, and then introduce atmospheric pressure by using a vacuum release valve, etc. 8. If the power for this product is cut off by a power failure, etc. when it is in a controlled state, the setting side pressure will be held temporarily. Further, if operated without sealing the setting side so that atmospheric air is sucked in, handle with care as air will continue to be sucked in. 9. If the VAC side pressure to this product is interrupted while the power is still on, the internal solenoid valve will continue to operate and may cause a humming noise. Since this may shorten the life of the product, be sure to shut off the power when the VAC side pressure is shut off.. The setting side pressure cannot be completely released from this product in the range below. kpa. In cases where the pressure needs to be reduced completely to kpa, install a port valve, etc. on the setting side to discharge the residual pressure.. This product is adjusted for each specification at the factory before shipment. Avoid careless disassembly or removal of parts, as this can cause failure.. The optional cable connector is a -wire type. When the monitor output (analog output, switch output) is not being used, keep it from touching the other wires, as this can cause malfunction.. Use caution that the right angle cable does not rotate and is limited to only one entry direction.. Take the following steps to avoid malfunction due to noise. ) Eliminate power supply noise during operation by installing a line filter, etc. in the AC power line. ) For avoiding the influence of noise or static electricity, install this product and its wiring as far as possible from strong electric fields such as those of motors and power lines, etc. ) Make sure to take protective measures against load surge for an induction load (solenoid valves, relays, etc.).. Refer to the instruction manual included with the product for details on its handling. ARJ AR to 9 AMR ARM ARP V VEX SRH SRP SRF ARX VCHR IC PVQ VEF VEP VER VEA VY VBA VBAT AP 67