Sensor specifications Model no.

Miniature size Analog output type/switch output type FSM-V Series (air/nitrogen gas) Flow rate range:.5,.1,.5, 1, 5, /min. Pressure Sensor specifications Model no. Flow rate range ( /min) Note -.5 to +.5 -.1 to +.1 -.5 to +.5-1 to + 1-5 to + 5 - to + -.5 to +.5 -.1 to +.1 -.5 to +.5-1 to + 1-5 to + 5 - to + Ref.: Applicable nozzle for suction/release applications.1 nozzle.2 nozzle.3 nozzle Collet nozzle.1 nozzle.2 nozzle.3 nozzle Collet nozzle Working fluid Max. working pressure MPa Min. working pressure MPa air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2) Note 1, nitrogen gas.2 -.1 Withstanding pressure MPa.3 Ambient temperature/humidity Working fluid temperature to 5, 9%RH or less (with no dew condensation) to 5 Display Power display (green) Power display (green), switch output display (yellow) Output Analog output 1 point Note 2 Switch output 2 points Note 3 (1-5V voltage output, connected load impedance 5K and over) (NPN or PNP open collector output, 3 VDC 5mA or less, PLC/reraly compatible) Linearity 5%F.S. or less (.1MPa, 25, flow rate range %F.S.) Pressure characteristics 5%F.S. or less (-.9 to.2mpa, where.1mpa is reference) Temperature characteristics.2%f.s./ or less (15 to 35, where 25 is reference) Repeatability (repeatability) 1%F.S. or less 2%F.S. or less 2%F.S. or less Working conditions Installation Analog output precision * Responsiveness Power voltage Current consumption Lead wire Installation attitude Strait piping section Protective structure Vibration resistance EMC directive Weight g -R5 -R Analog output type -R5 -R -R5 -R FSM-V-N/P -R5 5ms or less (when discrete sensor is reaching 9% of ultimate output voltage) Note 5 12/2 VDC (.8 to 26.V) 3mA or less FSM-V-N/P -R Switch output type FSM-V-N/P -R5 FSM-V-N/P -R.15mm 2 x 3-conductor (3m).15mm 2 x -conductor (3m) Free Not required IEC standards IP to 15 Hz, double amplitude 1.5 mm, maximum G, two hours each in X, Y, Z directions EN5511, EN6-6-2, EN--2/3//6/8 Approx. 8 (excluding leads, joints) FSM-V-N/P FSM-V-N/P -R5 -R Note 1: Refer to the Compressed air quality classes according to JIS B 8392-1:23 on page 1281. Note 2: Analog output indicate 3 V when the flow is, and changes to the 5 V side when the lead when gas flows to the right looking at the unit with leads on the right. Analog output changes to the 1 V side when the flow is reversed. Note 3: The Fixed hysteresis 1 boundary value judgment type switch output is used. The Output can be set within the full flow range by turning the trimmer. OUT1 and OUT2 operation modes are opposite. Note : F.S. (full scale) in these specifications indicates the flow range. For example, F.S. for flow rate - to + /min is 2 /min. Note 5: Response time varies depending on the piping conditions. Note 6: When using this product to confirm suction, be sure to insert an air (filtration rate 3 m or less) between the suction nozzle and this product to prevent foreign matter from being sucked in. A for drainage removal must be inserted on the primary (upstream) side when compressed air is used. Note : Converted to volumetric flow at 2 1 barometric pressure (1 kpa). 136

Separated display specifications (analog output dedicated) Note 8 Note 8: The separate display is dedicated to analog output type. It must not be connected to switch output. Note 9: This indicates the minimum display for the flow, and does not guarantee display accuracy. FSM-V Series Specifications Model no. Separate indicator FSM-V-DN/P-R5 FSM-V-DN/P-R FSM-V-DN/P-R5 FSM-V-DN/P-R FSM-V-DN/P-R5 FSM-V-DN/P-R Connectable analog output -R5 -R -R5 -R -R5 -R Type of display Flow display (-segment 3-digit, orange), run and switch output display (orange) Display min. unit Note 9.1mL/min. Note 1mL/min. Note.1L/min. Note.1L/min. Note Switch output 2 points Output (NPN or PNP open collector output, 3 VDC and 5 ma or less, voltage drop of 2. V or less, PLC- and relay-compatible) Analog output 1 point (1-5V voltage output, connected load impedance 5K and over) Power voltage Current consumption Lead wire Functions 12/2 VDC (.8 to 26.V) 5mA or less (only indicator) 3..2mm 2 x 5 conductor (1m) Flow display, flow display peak hold, switch output, analog output Ambient temperature/humidity Protective structure to 5, 85%RH or less (no dew) IEC standards IP EMC directive Weight g EN5511, EN6-6-2, EN--2/3//6/8 Approx. (including lead wire 1m) Indicator Pressure Miniature 13

FSM-V Series Pressure How to order Sensor FSM Model no. V A H 3 A Output type B Lead wire direction C R5 Lead wire length D Flow rate range Separate indicator (analog output type dedicated) FSM Model no. V D N Bracket for separate indicator PPD3 KL-D R5 A Switch output type A Bracket kit H2 B Flow rate range E type Symbol A Output type A N P Analog output Switch output (NPN) Switch output (PNP) B Lead wire direction H Axial V Radial C Lead wire length 3 3m D Flow rate range R5 R R5 R R5 R.5 /min..1 /min..5 /min. 1 /min. 5 /min. /min. E type H2 Straight 1.8 fiber tube H Straight push-in HL L type push-in M5 Port size M5 Symbol A Switch output type N P NPN output PNP output B Flow rate range R5.5 /min. R.1 /min. R5.5 /min. R 1 /min. R5 5 /min. R /min. * Refer to pages 131 to 1321 for the operation dimensions, etc. Symbol A Bracket kit KL-D Single foot bracket (L type) KD-D Both sides foot bracket (parallel) KHS-D Panel mount bracket set with cover KC Operation protective cover * Refer to page 131 and 1315 for dimensions and mounting size of bracket. 138

Internal structure and parts list For FSM-V-**3-R*-M5/analog output type (The switch output type internal structure is also the same.) FSM-V Series How to order / internal structure and parts list 13 16 5 3 15 1 12 11 1 6 8 9 2 No. 1 2 3 5 6 8 Parts name Body Case Lead wire holder Bush Bush holder Sensor gasket Sensor chip P tight screw Material PBT (glass fiber 3%) PBT (glass fiber 3%) PBT (glass fiber 3%) Nitrile rubber Aluminum alloy Fluoro rubber Silicone Iron steel (zinc plating) No. 9 11 12 13 1 15 16 Parts name n circuit board Lead wire Rectifier Filter Cartridge joint (M5) O ring fixing pin Front seat Note 1: Appearances of a front seat section differ in an analog output type/switch output type. Separate indicator FSM-V-D*-R * Material Glass epoxy resin Halogen-free polyethylene resin blended one Stainless steel Stainless steel Aluminum alloy Nitrile rubber Stainless steel Polyester film Pressure Refer to Page 131 for internal structure. Miniature 139

FSM-V Series Dimensions (analog output type, switch output type common) FSM-V-*V3-R*-H2 (Radial lead wire, straight 1.8 fiber tube) FSM-V-*H3-R*-H2 (Axial lead wire, straight 1.8 fiber tube) 33 33 (5.8) (5.8) FSM-V-*V3-R*-H (Radial lead wire, straight push-in) FSM-V-*H3-R*-H (Axial lead wire, straight push-in) Pressure 33 33 (51.8) (51.8) * Appearances of a front seat section differ in an analog output type/switch output type. 13

Dimensions FSM-V Series Dimensions FSM-V-*V3-R*-HL (Radial lead wire, L type push-in) FSM-V-*H3-R*-HL (Radial lead wire, L type push-in) (21.5) (21.5) 33 33 (58.6) (58.6) FSM-V-*V3-R*-M5 (Radial lead wire, port size M5) FSM-V-*H3-R*-M5 (Axial lead wire, port size M5) Pressure 33 33 (5) (5) Miniature * Appearances of a front seat section differ in an analog output type/switch output type. 1311

FSM-V Series Pressure Analog output characteristics Output (V) -R.2. 3.8 3.6 3. 3.2 3. 2.8 Response speed (Example for suction/release applications) Nozzle diameter.3 Nozzle diameter.25 Nozzle diameter.2 Pressure loss characteristics FSM-V-*-R5-H.5.5..35.3.25.2.15.1.5.1.2.3. FSM-V-*-R5-H.18.16.1.12.1.8.6..2.1.2.3. FSM-V-*-R5-H 6 5 3 2 1 Piping diameter: ( Pipe length (nozzle to vacuum source):.3m ) 2 3 Time (ms).5.5 -.5MPa.1MPa.2MPa -.5MPa.1MPa.2MPa -.5MPa.1MPa.2MPa Voltage level when not sucked Voltage level when sucked Analog output (V) 6 5 3 2 1 FSM-V-*-R-H FSM-V-*-R-H FSM-V-*-R-H Analog output data (example) -1 -.8 -.6 -. -.2.2..6.8 1.1.9.8..6.5..3.2.1.2..6.8.5.5..35.3.25.2.15.1.5.2..6.8 16 1 12 8 6 2 Flow ( /min).1 1 -.5MPa.1MPa.2MPa -.5MPa.1MPa.2MPa -.5MPa.1MPa.2MPa 1 2 3 5 2 6 8 * When using the fiber tube, the pressure loss may increase depending on the piping conditions. 1312

Operation section names / functions and setting Switch output type POWER display Turns ON when power supply ON. Output (OUT1) display Turns ON when OUT1 output ON. FSM-V Series Operation section names / functions and setting Output (OUT2) display Turns ON when OUT2 output ON. How to set switch (switch operation and fluid flow directions) Turn SET1 and SET2 trimmers to turn the two switch output points (OUT1 and OUT2) on or off. 2-point output has different switch operations as shown at right. Use bit (+) driver. SET1 trimmer Set switch output operating point of OUT1. POWER OUT1 OUT2 SET1 SET2 - + - + FSM-V SET2 trimmer Set switch output operating point of OUT2. Flow direction- Flow direction + OUT1 switch operation ON Setting trimmer SET1 Separate indicator (-FS) Large flow rate (-FS) Large flow rate Flow OUT2 switch operation Flow OFF Large flow rate (+ FS) (Cautions) Switch output hysteresis is fixed (%F.S. or less). Do not press the trimmer forcibly with a screwdriver. The trimmer could break. ON OFF Large flow rate (+ FS) Refer to page 1318 for details on the separated display's display and operation section names, functions, and operation. SET2 Pressure Miniature 1313