Proposal Center for Process Analytical Chemistry New Sampling/Sensor Initiative. October 18, 2000 CONTENTS. 1. Scope of the Proposal

1. Scope of the Proposal CONTENTS 2. SWAGELOK IGC II Technology 3. Automation and Integration 4. Design Concepts Functional Descriptions 5. Design Concepts - Drawings a. CPAC Drawing No.1 (10 drawings) b. CPAC Drawing No.2 ( 2 drawings) c. CPAC Drawing No.3 ( 2 drawings) d. CPAC Drawing No.4 ( 2 drawings) e. CPAC Drawing No.5 ( 4 drawings) f. CPAC Drawing No.6 ( 9 drawings) (Please note the following: The panel schematics included in the Swagelok directory were drawn with SolidWorks2000. Therefore, to view the files, SolidWorks Viewer 2000 must be used. For a free download of the software, go to SolidWorks' homepage at www.solidworks.com. Note inserted by PVV/RND) Page 1 of 34

SCOPE This proposal is in response to the request from the Center for Process Analytical Chemistry (CPAC), dated August 1, 2000, to offer design concepts for miniature modular sample systems as described in the information package, (NeSSI). Swagelok Company is offering design concepts for all six (6) sample systems, based upon our IGC-II technology. Included with the proposal for each system is the following information: 1. Two-dimension drawings of the arrangement of the substrates and components of the miniaturized system. 2. A three-dimensional SolidWorks drawing of the proposed concept. 3. Schematic drawings of the flow path through the miniaturized system. (CPAC Drawing No. 1 only) 4. Schematic drawings for the electrical requirements. (CPAC Drawing No. 1 only) 5. A functional description of the proposed concept, including descriptions of: - the flow path through the proposed miniaturized system - the various functional fluid control components - different approaches to certain specific functional requirements. The miniaturized concept for CPAC Drawing No. 1, Measurement of ppm H 2 O and O 2 in a High Purity Hydrocarbon Steam, is dealt with in detail. Concepts for the remaining five show the results of the miniaturization process, but with less detail regarding the schematics of the flow paths and the electrical requirements for automation and integration. The approach to these issues will be similar to those used to describe the miniaturized version of CPAC Drawing No. 1. Each concept was developed to mimic exactly the specific functional requirements of the system as provided in the Information Package. Automation and integration concepts are dealt with on a general basis only. Some suggestions regarding how miniaturized IGC II sample systems might be Page 2 of 34

automated and integrated into an overall DCS are included. However, specific solutions to automation issues will likely depend upon end-user preferences. The design concepts address the sample system located inside the enclosures. The few components from the sample tap to the enclosure generally don t lend themselves well to miniaturization if the sample transport lines are long. If the analyzer and its associated sample system is located at the process line, then it would be possible to miniaturize and modularize sample extraction and return. The availability of many components for these sample systems in a surface mount configuration is limited. The concepts provided by Swagelok Company are based upon the use of surface mount components typically used in miniaturized semiconductor gas handling systems. This is done for conceptual purposes only. It is anticipated that as the implementation of this initiative moves forward, the appropriate components will become available in surface mount configurations. The connections selected for installation of a miniature sample system are metal gasket face-seal fittings, Swagelok VCR, that require no axial clearance for installation or removal. The valves used in the conceptual designs are metal diaphragm valves. Although they are typically used in semiconductor gas handling systems, they are also appropriate for use in sample systems. They are designed for clean service, exhibit very high cycle life, and have no sliding stem seals, a typical source of leakage in sample systems. SWAGELOK IGC II TECHNOLOGY The IGC II System A typical IGC II system consists of three layers a substrate assembly, a manifold assembly, and mounting components. The manifold and substrate assemblies are combined to form the conduit for the system fluid, and can be customized for any flow configuration. The IGC II components are assembled with simple mounting components and hardware. Substrate Assembly The assembly provides the flow path for the process fluid through the system. The substrate assembly consists of a substrate channel and a variety of drop-in flow components. A lock-down plate secures the flow component at each end of the substrate channel. The substrate channels are available in a variety of lengths to accommodate up to 14 surface-mounts on a single substrate. The IGC II assemblies accept any SEMI-2787.1 surface mount component Substrate channel Flow components Page 3 of 34

Manifold Assembly The manifold assembly provides the flow path between two or more parallel fluid streams. The manifold assembly consists of a manifold channel and a variety of drop-in flow components. The manifold channels are available in a variety of lengths to accommodate up to 10 parallel fluid streams. Optional parallel manifold assemblies are available to provide an additional flow path. Flow component Manifold channel Substrate-Manifold Assembly The substrate assembly fits into locating ribs on the manifold assembly. A c-ring gasket provides a leaktight seal between the substrate and manifold components. The substrate-manifold assembly bolts together with stainless steel cap screws. Manifold assembly Substrate assembly Mounting Components and Caps A foot block bolts to each end of the substrate assembly, providing panel-mount capability. A support block provides mid-line supports for longer substrate assembly. A conversion plate provides the mounting capacity for a mass flow controller. Foot A cap is available to cover an unused position on a substrate or manifold; a tube port is available to provide a 1/4 inch vertical tube port Cap on a manifold or substrate. Support Conversion plate Page 4 of 34

AUTOMATION AND INTEGRATION Integration refers to the ability to connect the measurements and control signals indicated on the P&ID diagram to the plant control system, presumed to be a Distributed Control System (DCS). In an integrated system, the sampled process fluids can be monitored and regulated from the Control Room. Operations such as purge, zero and span calibrations and the like, would require a technician to select the various flow paths by manually opening and closing the appropriate valves on the sample panel. For this proposal, we focused on integrating the first panel as a proof of concept exercise, believing that the demonstrated integration techniques could be applied in a similar manner to the remaining five applications. At this point in time, there are a couple of ways to approach measuring the process. One could use general industry process probes or semiconductor industry downmount transmitters could be used. These options are compared in the following paragraphs. Sensors and Actuators The off-the-shelf, general industry measuring devices consist of an integrated sensor and transducer probe that can be inserted into the flow path. With a ¼ probe element body, made from stainless steel tubing, the measurement probe could be welded directly into an IGC II single port tube stub forming a sensor in a fluid measurement well. Alternatively, any standard fitting could be welded to the tube stub to accommodate a variety of readily available fluid wells and their associated measurement probes. This configuration is best suited to simple pressure and temperature measuring devices. This method could be applied to more complex sensors like flow, H 2 O and O 2 probes with an additional IGC II downmount interface, which could be designed to provide the appropriate flow over (or through) these types of sensors. Typically the transducer output of these types of probes is an analog signal like an RTD signal, 4-20ma or 0-10V signal that is connected to the DCS through an I/O module. These types of transducers would be very compatible and easily integrated into a typical DCS with distributed I/O control system. The main advantages of this architecture are: Cost effective Architecture/Network independent. Readily available process probes. Small process probes consistent with on-line miniature theme. In some cases, simplified the IGC II substrate configuration. Page 5 of 34

An IGC II compatible smart process probe would consist of a sensor, transducer and transmitter integrated into a 1½ x 1½ x 5 or smaller housing with a C seal downmount. Smart general industry process probes compatible with the IGC II platform are currently not available but could be developed based on devices currently used in the semiconductor industry. Devices developed for the semiconductor industry will have Ultra High Purity (UHP) wetted components and a wide variety of communication options. Smart transmitters that provide self-identification, maintenance and repair information, on-line configuration, calibration features and so on, have a digital field bus communications conforming to the semiconductor industry SEMI SAN (Sensor Actuator Network) standard. The SEMI SAN encompasses the following open communication protocols: DeviceNet Modbus TCP LonWorks Profibus Seriplex SDS Unfortunately, these protocols are not as commonly found in general process applications as HART or Foundation Field bus may be. Thermal mass flow meters (MFM) and thermal mass flow controllers (MFC), which are prevalent in the semiconductor industry, can provide a cost-effective method of measuring and controlling flow. At a minimum, an MFC will have two analog (4-20ma) signals, one for the process variable (Actual Mass Flow output) and the other for the setpoint (desired Mass Flow input). MFC are available with digital communications, like DeviceNet, that enable on-line access to the device s smart features. A single MFC can replace a flow meter, a control valve and actuator and the I/P positioner and is IGC II downmount compatible. Distributed I/O Architecture Example Simple field devices characterize the distributed I/O Architecture. Typically, these process sensors transmit only a single analog variable over a 4-20ma current loop. Any functionality associated with a process sensor or actuator that might be considered intelligent, such as calibration, scaling and selfidentification is proxied in the system s I/O modules. In this example, the process is measured by simple, loop powered sensor probes, which are connected, to I/O devices that might be DIN rail mounted, single point modules. Such I/O devices, offered by companies like Rockwell Automation, Beckhoff Industries, Pepperl & Fuchs and others, are small, cost effective, with a high degree of proxied functionality, and provide connectivity to a variety of open networks. Flow control is effected by a downmount MFC with 4-20ma I/O connections. Page 6 of 34

There are a couple of ways to monitor the H 2 0 and O 2 content of the process fluid. The first, shown in this example, is to insert a sensor probe having an analog output (ie. 4-20ma) directly into a single port downmount, sample well component on the IGC II panel. Another way is to provide a sample port that diverts the sample flow into the analyzer and a port to return the sample to the IGC II panel. The single port method uses one downmount port as opposed to the two ports to sample to and return from the analyzer, which further simplifies the IGC II substrate. The single port method also allows the analyzer electronics to be remotely located from the on-line IGC II sample panel. The sample fluid temperature is monitored by an RTD sensor and maintained above dew point by an electric heating foil that can be attached with adhesives to the IGC II substrate. In this configuration the DCS can control the fluid temperature by controlling the heater relay through a discrete I/O module. In the Distributed I/O system, small, relatively inexpensive sensors are welded or fitted to standard IGC II single port tube stubs. The IGC II panel could be easily located near the process sample point. The electronics, analyzers, I/O and power supplies, would likely be located in a nearby equipment enclosure. The main benefit of this type of system is that it is immediately realizable with currently available products and can be integrated into any standard DCS. Smart Field Device Architecture Example The main characteristic of the smart field device architecture is connectivity of the field devices through a field bus and the elimination of the I/O modules. The selection of fieldbus protocol in currently available field devices is largely limited to the protocols used in the semiconductor industry. It s likely that a semiconductor protocol would need to be translated in to a protocol more commonly used in the general process industries through a gateway communications module. Performing a protocol translation always raises a number of compatibility and ease of installation issues. Additionally, the semiconductor protocols are not designed to meet intrinsic safety requirements for operation in hazardous locations found in many general industry applications. The choice of communication protocols needs to be addressed in future smart, IGC II compatible device offerings. Automation refers to the ability of the sample system to run in an automatic or unattended mode, remotely operated from the control room. In an automated system many or all of the manual flow direction valves would be replaced by either electric or pneumatically actuated valves and could be operated from the control room. Automating this example is a matter of being able to remotely configure the flow path for a desired state, for example: Page 7 of 34

monitoring, purging, zeroing, and so on, by replacing the manual control valves with remotely actuated valves. If intrinsic safety was not a requirement, the sampling system could be simplified by eliminating the need for instrument air by using electrically actuated control components. Whether to actuate the remote control valves pneumatically or electrically is a choice that is based on the availability of instrument air and the need for intrinsic safety. With electrically actuated valves, the scheme for controlling these valves might be a powered fieldbus optimized for discrete devices such as DeviceNet. Again, this type of device protocol raises the compatibility issues but a process-orientated fieldbus may be cost prohibitive for this type of device. For pneumatically operated control valves, a block of air-logic, solenoid valves from a local controller like a micro PLC is probably a good choice. Power of intrinsically safe devices in Class 1 Div 1 hazardous zones needs to be limited to about a half watt or less. A typical MFC requires as much as 7 watts or more for normal operation. Electric heaters may require hundreds of watts depending on the volume of fluid and the components being heated. The use of the IGC II based panels is likely to be limited to safe areas or safe enclosures because of the relatively high power requirements associated with electric valves and heaters. The two drawings included with the concept drawings for CPAC Drawing No. 1, Measurement of ppm H 2 O and O 2 in a High Purity Hydrocarbon Stream, show how that system might be integrated. Page 8 of 34

FUNCTIONAL DESCRIPTION DWG. NO. 1: Measurement of ppm H 2 O and O 2 in a High Purity Hydrocarbon Stream General Additional material is supplied for CPAC Drawing No. 1, such as flow path, bill of material, and explosion views. The IGC-II modular design is contained to within the heated enclosure. The total panel size is 29.6 x 9.6 The internal flow path of the substrate flow components and surface mount components are equivalent in size to ¼ tubing. Surface Mount Components All valves are Swagelok Manual DP valves with a standard blue tee handle (part number 6LVV-MSM-DP-2-P). Other handle colors can be used to designate the different fluids, and various styles can be used to operate the valves, such as a manual locking handle or a pneumatic actuator. These valves are packless diaphragm valves that do not require periodic maintenance to ensure proper operation. The regulators are Swagelok HF regulators set to an outlet pressure of 10 or 20 psig. The pressure gauges are welded to a tube stub that is machined into the top of a Swagelok flow through blind (part number 6LVV-MSM- CAP-2-P). The pressure transmitter is welded to a Swagelok tube port component. The RTD was converted to a Swagelok flow through blind with a tube stub that is machined into the top for connection to the temperature transmitter. Flow to and from the Moisture Probe Assembly and the O 2 Probe Assembly communicates with the IGC-II gas panel through welded tube ports. Microfits and ¼ tubing assemblies make the connections between the gas panel and the probe assemblies. Microfits are ¼ weld fittings that eliminate the need to bend tubing. The flow transmitter and flow control valve are replaced with a mass flow controller. Page 9 of 34

Panel Connections All end connections on the gas panel are ¼ VCR fittings. VCR fittings are face seal components that utilize a metal gasket to create a leak tight seal. A VCR to bulkhead assembly is used to connect the panel to the enclosure. The top left connection is the inlet from the N 2 supply line (center inlet in the CPAC panel schematic). The top center connection is the inlet from the sample tap main line (top inlet in the CPAC panel schematic). The top right connection is the inlet from the air supply line (bottom inlet in the CPAC panel schematic). This inlet was moved to the right side of the panel to allow for improved access to the main line at the O 2 Probe Assembly. The bottom left connection is the outlet from the N 2 purge line (top outlet in the CPAC panel schematic). This outlet was moved closer to the N 2 inlet to reduce the size of the modular panel. Tubing is used to connect the outlet to the desired bulkhead connection in the enclosure. The bottom center two connections are the outlets from the N 2 and air vents (vertical outlets in the CPAC panel schematic). The bottom right connection is the main line outlet to the aspirator. System Heating The system is heated with cartridge style heating elements that span the length of the substrate channels. The power supply for the heaters is a central control device that maintains a preset temperature in the gas panel. A thermocouple is attached to the panel at the RTD flow component that will provide feedback to the heater control device. Page 10 of 34

Figure 1.1 displays the CPAC drawing number 1 in the orientation used to create the IGC-II modular panel. The air inlet was moved to the right side of the panel for improved access to the O 2 probe assembly, and the N 2 purge line was shortened to decrease the size of the modular panel. Figure 1.1 Updated Flow Schematic Page 11 of 34

Figure 1.2 highlights in red the flow path and components that are exposed to system fluid during standard operation. Figure 1.2 Operational Flow Schematic Page 12 of 34

Figure 1.3 highlights in blue the flow path and components that are exposed to nitrogen during the purging of the Moisture Probe Assembly. Figure 1.3 N 2 Purge Flow Schematic Page 13 of 34

Figure 1.4 highlights in green the flow path and components that are exposed to air during the purging of the Oxygen Probe Assembly. Figure 1.4 Air Purge Flow Schematic Page 14 of 34

Figure 1.5 displays the converted flow diagram into a two dimensional IGC-II schematic. Substrate flow is highlighted in green while manifold flow is highlighted in orange. Each surface mount position is outlined in a dark black border. In the bottom left corner of each position is a designator for the type of surface mount component at that position (MV=manual valve, F=filter, REG=regulator, PG=pressure gauge, MFC=mass flow controller, B=blind, TP=tube port, CAP=substate cap). On the right side of each position is the designator for the type of flow component needed to achieve the appropriate flow path. Figure 1.5 IGC-II Conversion Page 15 of 34

Figure 1.6 displays the final bill of material for the flow components used in CPAC drawing number 1 (some surface mounts require additional information in order to determine final part numbers). Figure 1.6 IGC-II Bill of Material Page 16 of 34

FUNCTIONAL DESCRIPTION DWG. NO. 2: Measurement of ph in an Aqueous Acid/Base stream General The IGC-II modular design is contained to within the heated enclosure. The cylinder, regulator, and flexible hose (parts 22, 23, and 24 respectively) were not included in the IGC-II system. The total panel size is 14.3 X 9.6 All internal flow paths of the substrate flow components and surface mount components are equivalent in size to ¼ tubing. Surface Mount Components All ball valves were converted to Swagelok Manual DP valves with a standard blue tee handle (part number 6LVV-MSM-DP-2-P). Other handle colors can be used to designate the different fluids, and various styles can be used to operate the valves, such as a manual locking handle or a pneumatic actuator. DP valves are packless diaphragm valves that do not require periodic maintenance to ensure proper operation. The check valves are Swagelok CW valves with weld ends that connect to the IGC-II substrate through a welded tube port. The needle valve is a Swagelok BM valve with a micrometer handle (part number 6LVV-MSM-BM-2). The air-actuated valve is a Swagelok Pneumatic DP valve that is normally closed under no air pressure (part number 6LVV-MSM-DP-2- P-C). The airline from the valve connects to the gas panel at the welded tube port adjacent to the instrument air inlet. If a flexible air hose is required, the appropriate fitting can be welded to the tube port to accommodate this tubing. The pressure gauges are welded to a tube stub that is machined into the top of a Swagelok flow through blind (part number 6LVV-MSM- CAP-2-P). Page 17 of 34

Panel Connections All end connections on the gas panel are ¼ VCR fittings. VCR fittings are face seal components that utilize a metal gasket to create a leak tight seal. A VCR to bulkhead assembly is used to connect the panel to the enclosure. The top left connection is the inlet from the cylinder supply line (parts 22 through 24 in the CPAC panel schematic). The second top connection is the inlet from the instrument air line (top flow inlet in the CPAC panel schematic). The third top connection is the return line (center flow inlet in the CPAC panel schematic). The top right connection is the inlet from the supply line (bottom inlet in the CPAC panel schematic). The first three bottom connections are the outlets from the instrument air, return, and supply lines that connect to the ph Cell. VCRs, Microfits, and tubing are used to connect the outlets to the ph Cell within the heated enclosure. Microfits are ¼ weld fittings that eliminate the need to bend tubing. The bottom right connection is the main line outlet from the heated enclosure (vertical outlet in the CPAC panel schematic). System Heating The system is heated with cartridge style heating elements that span the length of the substrate channels. The power supply for the heaters is a central control device that maintains a preset temperature in the gas panel. A thermocouple is attached to the panel that will provide feedback to the heater control device. Page 18 of 34

Figure 2.1 displays the converted flow diagram into a two dimensional IGC-II schematic. Figure 2.1 IGC-II Conversion Page 19 of 34

FUNCTIONAL DESCRIPTION DWG. NO. 3: O 2 Measurement in a Stack Gas (low pressure system) General The IGC-II modular design is contained to within the heated enclosure. The total panel size is 23.5 x 9.6 All internal flow paths of the substrate flow components and surface mount components are equivalent in size to ¼ tubing. Surface Mount Components All manual valves are Swagelok Manual DP valves with a standard blue tee handle (part number 6LVV-MSM-DP-2-P). Other handle colors can be used to designate the different fluids, and various styles can be used to operate the valves, such as a manual locking handle or a pneumatic actuator. DP valves are packless diaphragm valves that do not require periodic maintenance to ensure proper operation. All air-actuated valves are Swagelok Pneumatic DP valves that are normally closed under no air pressure (part number 6LVV-MSM-DP-2- P-C). The airline to the valve is connected to the enclosure through a bulkhead connection with flexible hose. The five-way ball valve is replaced with four Swagelok Manual DP valves located on substrate positions connected by a singular manifold. The change in flow characteristic is that more than one line can be open at any time in this situation. If this is undesirable, the valves should be switched to Swagelok s Pneumatic DP valves and operated with a controller to eliminate the risk of operator error. The regulator is a Swagelok HF regulator set to the desired outlet pressure. Mass flow meters are used in the bypass flow and sample flow lines. Flow to and from the pump and coalescing filter communicates with the IGC-II gas panel through weld tube ports. Microfits and ¼ tubing assemblies make the connections between the gas panel and the probe assemblies. Microfits are ¼ weld fittings that eliminate the need to bend tubing. Page 20 of 34

Figure 3.1 displays the converted flow diagram into a two dimensional IGC-II schematic. Figure 3.1 IGC-II Conversion Page 22 of 34

FUNCTIONAL DESCRIPTION DWG. NO. 4: Sampling System for a Toxic Gas Measurement (by Photometry/Spectroscopy) General The IGC-II modular design is contained to within the outside shelter. The total panel size is 29.4 x 11.3 All internal flow paths of the substrate flow components and surface mount components are equivalent in size to ¼ tubing. The current IGC-II system is manufactured from a special grade of 316L stainless steel that was developed for improved corrosion resistance. If monel is required, a manufacturing development project could be initiated to provide additional material selections. Surface Mount Components All valves are Swagelok Manual DP valves with a standard blue tee handle (part number 6LVV-MSM-DP-2-P). Other handle colors can be used to designate the different fluids, and various styles can be used to operate the valves, such as a manual locking handle or a pneumatic actuator. These valves are packless diaphragm valves that do not require periodic maintenance to ensure proper operation. Each three way ball valve is replaced with a three port and a two port Swagelok Manual DP valve placed in series along a substrate. The change in flow characteristic is that both lines can be open at any time in this situation. If this is undesirable, the valves should be switched to Swagelok s Pneumatic DP valves and operated with a controller to eliminate the risk of operator error. The regulators are Swagelok HF regulators set to an outlet pressure of 10 or 45 psig. The pressure gauge is welded to a tube stub that is machined into the top of a Swagelok flow through blind (part number 6LVV-MSM-CAP-2- P). The inlet and bypass to the coalescing filter connect to the welded tube ports in the sample tap substrate. The main outlet from the coalescing filter connects to the tube port at the start of the fifth substrate from the left. Page 23 of 34

Figure 4.1 displays the converted flow diagram into a two dimensional IGC-II schematic. Figure 4.1 IGC-II Conversion Page 25 of 34

FUNCTIONAL DESCRIPTION DWG. NO. 5: Two Stream Sampling System (Liquid -> Vapour) General The IGC-II modular design is contained to the sample inlet system and the sample bypass system in the Analyzer House - Outside. The modular panel ends following the bypass filter in the sample bypass system due to the reduction in tube size. The total panel size for the sample inlet system is14.3 x 9.7 The total panel size for the sample bypass system is 21.8 x 9.7 All internal flow paths of the substrate flow components and surface mount components are equivalent in size to ¼ tubing. Surface Mount Components All valves are Swagelok Manual DP valves with a standard blue tee handle (part number 6LVV-MSM-DP-2-P). Other handle colors can be used to designate the different fluids, and various styles can be used to operate the valves, such as a manual locking handle or a pneumatic actuator. These valves are packless diaphragm valves that do not require periodic maintenance to ensure proper operation. The regulators are Swagelok HF regulators set to an outlet pressure of 30 psig. The bypass filters and the transmission cell are represented as downmount components in this panel to show the capabilities of developing this version of these components. The bypass flow transmitter is replaced with a mass flow meter. The bypass flow control valve is replaced with a mass flow controller. Page 26 of 34

Panel Connections All end connections on the gas panel are ¼ VCR fittings. VCR fittings are face seal components that utilize a metal gasket to create a leak tight seal. A VCR to bulkhead assembly is used to connect the panel to the enclosure. The top left connection in drawing A is the inlet from the stream #1 line (bottom inlet in the CPAC panel schematic). The top center connection in drawing A is the sample return line (center connection in the CPAC panel schematic). The top right connection in drawing A is inlet from the stream #2 line (top inlet in the CPAC panel schematic). The left side manifold connections, from top to bottom, connect to: the process drain, a pressure gauge, the N 2 purge, a pressure gauge, and an atmosphere vent. The right side manifold connection is the stream #2 atmosphere vent. The bottom connections in drawing A are the stream #1 and stream #2 outlets. The top connections in drawing B are the stream #1 and stream #2 inlets. The bottom connections in drawing B are the stream #1 and stream #2 outlets to a check valve. The check valve could be made modular and included in the panel following the mass flow controller. The welded tube ports on the right side of each stream line, from top to bottom, connect to: the pressure gauge, the main line outlet from the bypass filter, the inlet to the lab sample bomb, and the outlet from the lab sample bomb. System Heating The system is heated with cartridge style heating elements that span the length of the substrate channels. The power supply for the heaters is a central control device that maintains a preset temperature in the gas panel. A thermocouple is attached to the panel that will provide feedback to the heater control device. Page 27 of 34

Figure 5.1 displays the converted flow diagram into a two dimensional IGC-II schematic for the Sample Inlet System. Figure 5.1 IGC-II Conversion (Sample Inlet System) Page 28 of 34

Figure 5.2 displays the converted flow diagram into a two dimensional IGC-II schematic for the Sample Bypass System. Figure 5.2 IGC-II Conversion (Sample Bypass System) Page 29 of 34

FUNCTIONAL DESCRIPTION DWG. NO. 6: Eight Stream Sampling System General The IGC-II modular design was applied to the sample bypass panel, the sample bypass enclosure, and the sample system panel. The sample bypass enclosure was separated into four sub panels to increase the ease of transportation and installation. The total panel size for the sample bypass panel is 11.3 x 12.9 The total panel size for the sample bypass enclosure is 21.8 x 52.4 The total panel size for the sample system panel is 17.4 x 8.1 All internal flow paths of the substrate flow components and surface mount components are equivalent in size to ¼ tubing. Surface Mount Components All valves are Swagelok Manual DP valves with a standard blue tee handle (part number 6LVV-MSM-DP-2-P). Other handle colors can be used to designate the different fluids, and various styles can be used to operate the valves, such as a manual locking handle or a pneumatic actuator. These valves are packless diaphragm valves that do not require periodic maintenance to ensure proper operation. The pressure gauges are welded to a tube stub that is machined into the top of a Swagelok flow through blind (part number 6LVV-MSM- CAP-2-P). The bypass filters and analyzer bypass controllers (pressure and temperature) are represented as downmount components in this panel to show the capabilities of developing this version of these components. Panel Connections All end connections on the gas panel are ¼ VCR fittings. VCR fittings are face seal components that utilize a metal gasket to create a leak tight seal. A VCR to bulkhead assembly is used to connect the panel to the enclosure. The top connections in the sample bypass panel are the eight sample stream inlets. The side manifold connections in the sample bypass panel are the two connections to the sample return line. The bottom connections in the sample bypass panel are the eight sample stream outlets. Page 30 of 34

The welded tube ports in the sample bypass panel are the connections to the process drain HDR. The top connections in the sample bypass enclosure are the eight sample stream inlets. The top side manifold connection in the sample bypass enclosure is the atmosphere vent. The bottom side manifold connections in the sample bypass enclosure are the two connections to the sample system panel. The bottom connections in the shorter substrates (6 surface mount positions) of the sample bypass enclosure are the eight VCR connections to the three port valves. The bottom connections in the longer substrates (12 surface mount positions) of the sample bypass enclosure are the outlets to the check valves and WR Vent HDR line. The check valve could be made modular and included in the panel following the mass flow controller. The first two connections on the top left of the sample system panel are the two inlets from the sample bypass enclosure. The top right connection of the sample system panel is the inlet form the CAL Switching Panel. The left side manifold connection of the sample system panel is the N 2 purge line. The two connections on the bottom left of the sample system panel are the WR Vent and Atmosphere Vent, respectively. The two connections on the bottom right of the sample system panel are the outlets to the GC-TC device. System Heating The system is heated with cartridge style heating elements that span the length of the substrate channels. The power supply for the heaters is a central control device that maintains a preset temperature in the gas panel. A thermocouple is attached to the panel that will provide feedback to the heater control device. Page 31 of 34

Figure 6.1 displays the converted flow diagram into a two dimensional IGC-II schematic for the Sample Bypass Panel. CPAC Panel #6 Flow Schematic Figure 6.1 IGC-II Conversion (Sample Bypass Panel) Page 32 of 34

Figure 6.2 displays the converted flow diagram into a two dimensional IGC-II schematic for two of the lines in the Sample Bypass Enclosure. Figure 6.2 IGC-II Conversion (Sample Bypass Enclosure) Page 33 of 34

Figure 6.3 displays the converted flow diagram into a two dimensional IGC-II schematic for the Sample System Panel. Figure 6.3 IGC-II Conversion (Sample System Panel) Page 34 of 34