Installation, Operating & Maintenance Instructions

Installation, Operating & Maintenance Instructions Variable leak valve DN 16 (5/8") with integrated controller with Logic interface Series 590 DN 16 mm (I.D. 5/8") This manual is valid for the following product ordering number: 59024-GEGC-0001 configured with firmware 612P.1E.D3 Sample picture 603841EA Edition 2013-09-02

Imprint Manufacturer VAT Vakuumventile AG, CH-9469 Haag, Switzerland Website: Phone: Fax: Email: www.vatvalve.com +41 81 771 61 61 +41 81 771 48 30 CH@vatvalve.com Publisher VAT Vakuumventile AG, CH-9469 Haag, Switzerland Editor VAT Vakuumventile AG, CH-9469 Haag, Switzerland Print VAT Vakuumventile AG, CH-9469 Haag, Switzerland Copyright VAT Vakuumventile AG 2013 No part of these Instructions may be reproduced in any way (photocopies, microfilms or any other reproduction processes) nor may it be manipulated with electronic systems, duplicated or distributed without written permission from VAT. Offenders are liable to pay damages. The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people. The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle third parties to consider these names to be unprotected and to use them freely. This is in accordance with the meaning of the laws and acts covering brand names and trademarks. 2/50 Edition 2013-09-02 603841EA

Contents 1 Description of product... 5 1.1 Identification of product... 5 1.2 Use of product... 5 1.3 Used abbreviations... 5 1.4 Related documents... 5 1.5 Important information... 5 1.6 Technical data... 6 1.6.1 Control and actuating unit... 6 1.6.2 Valve unit... 7 2 Safety... 8 2.1 Compulsory reading material... 8 2.2 Danger levels... 8 2.3 Personnel qualifications... 9 3 Design and Function... 10 3.1 Design... 10 3.2 Function... 10 4 Installation... 11 4.1 Unpacking... 11 4.2 Installation into the system... 12 4.2.1 Installation space condition... 13 4.2.2 Connection overview... 14 4.2.3 Installation procedure... 15 4.2.4 Admissible forces... 15 4.2.4.1 Admissible forces at controller... 15 4.2.5 Requirements to sensor connection... 16 4.3 Electrical connection... 16 4.3.1 Sensor supply concepts... 17 4.3.2 Power and sensor connection (+24 VDC sensors)... 17 4.3.2.1 Sensor power wiring via controller... 17 4.3.2.2 Sensor power wiring external... 18 4.3.3 Service port connection... 19 4.4 Logic interface... 19 4.4.1 Functions and Wiring... 19 4.4.2 Digital inputs... 22 4.4.3 Digital outputs... 24 4.4.4 Analog inputs and outputs... 25 4.5 Initial operation... 26 4.5.1 Setup procedure... 26 4.5.2 Interface configuration... 27 4.5.3 Fixed PI upstream configuration... 28 4.5.3.1 Optimize P-Gain, I-Gain... 30 4.5.3.2 Valve speed adjustment... 31 5 Operation... 32 5.1 Normal operation... 32 5.1.1 Local operation... 32 5.1.2 Remote operation... 33 5.2 Close valve... 34 5.3 Open valve... 34 5.4 Position control... 34 5.5 Pressure control... 34 5.6 Display information... 35 603841EA Edition 2013-09-02 3/50

5.6.1 Power up... 35 5.6.2 Operation... 36 5.6.3 Errors... 36 5.6.4 Safety mode... 36 5.7 Operation under increased temperature... 37 5.7.1 Bake-out... 37 5.8 Behavior during power up... 37 5.9 Behavior during power failure... 38 5.10 Trouble shooting... 39 6 Maintenance... 41 7 Repairs... 42 8 Dismounting and Storage... 43 8.1 Dismounting... 43 8.2 Storage... 44 9 Packaging and Transport... 45 9.1 Packaging... 45 9.2 Transport... 46 10 Disposal... 47 11 Spare parts... 48 12 Appendix... 49 4/50 Edition 2013-09-02 603841EA

DESCRIPTION OF PRODUCT 1 Description of product 1.1 Identification of product The fabrication number and order number are fixed on the product directly or by means of an identification plate. 590.. -.... -.... /.... made in Switzerland Fabrication number 1.2 Use of product Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. 1.3 Used abbreviations Abbreviation CPA Description Control Performance Analyzer 1.4 Related documents Product data sheet Dimensional drawing 1.5 Important information This symbol points to a very important statement that requires particular attention. Example: VAT disclaims any liability for damages resulting from inappropriate packaging. 603841EA Edition 2013-09-02 5/50

DESCRIPTION OF PRODUCT Series 590 1.6 Technical data 1.6.1 Control and actuating unit Description Input voltage 1) +24 VDC (±10%) @ 0.5 V pk-pk max. [connector: POWER] Power consumption 38 W [connector: POWER] Sensor power supply output 2) +24 VDC / 1500 ma max. [connector: SENSOR] Sensor input Signal input voltage / Input resistance ADC resolution Sampling time 0-10 VDC / Ri>100 kω (linear to pressure) 0.23 mv 10 ms [connector: SENSOR] Digital inputs 3) ±24 VDC max. [connector: INTERFACE] Digital outputs 3) Input voltage Input current Breaking capacity 70 VDC or 70 V peak max. 0.5 ADC or 0.5 A peak max. 10 W max. [connector: INTERFACE] Analog outputs 3) (optional) 0-10 VDC / 1 ma max. [connector: INTERFACE] Ambient temperature Pressure control accuracy Position resolution / position control capability Typical closing / opening time 0 C to +50 C max. (<35 C recommended) 5 mv or 0.1% of setpoint, whichever is greater 100 000 (full stroke) 3.5 s Table 1-1 1) Internal overcurrent protection by a PTC device. 2) Refer to chapter «Sensor supply concepts» for details. 3) Refer to chapter «Schematics» for details. 6/50 Edition 2013-09-02 603841EA

DESCRIPTION OF PRODUCT 1.6.2 Valve unit Description Leak rate to outside 1 10E-10 mbar l/s -1 Leak rate valve seat at (close position) 1 10E-10 mbar l/s -1 Cycles until first service 20 000 Bake-out temperature - Open / closed - actuator Heating and cooling rate Mounting position 300 C 50 C 60 Ch-1 Process side materials body 1.4943, AISI 660 / 1.4404, AISI 316 L Test pressure Pressure range at 20 C Differential pressure diaphragm Max. differential pressure on plate during opening Any 1.4310, AISI 301, gold plated 1 bar UHV to 10 bar (abs) 10 bar 10 bar Adjustable gas flow [air, 1 bar, RT] 1 10-10 mbar ls -1 100 mbar ls -1 Dead volume - seat port - side port Dimensions Table 1-2 2.7 cm 3 1.1 cm 3 Refer to dimensional drawing of specific valve ordering number (available on request) 603841EA Edition 2013-09-02 7/50

SAFETY Series 590 2 Safety 2.1 Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life. Lack of knowledge NOTICE Failing to read this manual may result in property damage. Firstly, read manual. These Installation, Operating & Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system. They must be stored together with the other documentation and accessible for anybody who is authorized to work with the system at any time. 2.2 Danger levels High risk DANGER Indicates a hazardous situation which, if not avoided, will result in death or serious injury. Medium risk WARNING Indicates a hazardous situation which, if not avoided, could result in death or serious injury. Low risk CAUTION Indicates a hazardous situation which, if not avoided, may result in minor or moderate injury. Command NOTICE Indicates a hazardous situation which, if not avoided, may result in property damage. 8/50 Edition 2013-09-02 603841EA

SAFETY 2.3 Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 603841EA Edition 2013-09-02 9/50

DESIGN AND FUNCTION Series 590 3 Design and Function 3.1 Design open closed mechanical position indicator Figure 3-1 3.2 Function The valve plate acts as a throttling element and varies the conductance of the valve opening. Actuation is performed with a stepper motor and controller. The stepper motor/controller version ensures accurate pressure control due to exact gate positioning. 10/50 Edition 2013-09-02 603841EA

INSTALLATION 4 Installation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 4.1 Unpacking Physical overstraining at controller NOTICE Inappropriate handling with the valve may cause in damage of controller. Do not place the valve on the controller panel. Damage of valve and flanges NOTICE Inappropriate handling with the valve may cause in damage of controller. Pay attention that valve and flanges don t get damaged when the valve is lifting out of the box and handled afterwards. Contamination NOTICE Plate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve. Make sure that the supplied products are in accordance with your order. Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. Store the original packaging material. It may be useful if products must be returned to VAT. 1. Open the transport case and remove inside packing material as far as necessary. 2. Lift the valve carefully and place it on a clean place. Do not remove protective foils from valve opening 603841EA Edition 2013-09-02 11/50

INSTALLATION Series 590 4.2 Installation into the system Sealing surfaces NOTICE Sealing surfaces of valve and vacuum system could be damage in case of incorrect handling. Only qualified personal are allowed to install the valve into the vacuum system. Wrong connection NOTICE Wrong connection may result in damage of controller or power supply. Connect all cables exactly as shown in the following descriptions and schematics. Burned connector pins (spark) NOTICE Connector pins or electronic parts could damage, if plugged and unplugged under power. Do not plug or unplug connectors under power. Contamination NOTICE Plate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve. Mount valve to a clean system only. 12/50 Edition 2013-09-02 603841EA

INSTALLATION 4.2.1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below. 75 Figure 4-1 603841EA Edition 2013-09-02 13/50

INSTALLATION Series 590 4.2.2 Connection overview System: 9 2 5 6 1 M 4 7 8 3 1 Valve 2 Process chamber 3 Gas inlet 4 Controller 5 Pressure sensor 6 Sensor cable 7 Cable to remote control unit (Logic) 8 Cable to power supply 9 Pump Controller: Figure 4-2 14/50 Edition 2013-09-02 603841EA

INSTALLATION 4.2.3 Installation procedure 1. Remove protection flanges only prior assembly into the vacuum system. 2. Install valve [1] into the vacuum system. The valve seat side is indicated by the symbol on dimensional drawing, see also Figure 4-1. Do not admit higher forces to the valve than indicated under «Admissible forces». Make sure that enough space is kept free to do preventive maintenance work. The required space is indicated on the dimensional drawing. 3. Install the sensor [5] according to the recommendations of the sensor manufacturer and directives given under «Requirements to sensor connection». 4. Connect pressure sensor cable [6] to sensor and then to valve (connector: SENSOR). Refer to chapter «Electrical connection» for correct wiring. 59024-GEGC-0001 supports 1 sensor. 5. Connect valve to Logic remote control unit [7] (connector: INTERFACE). Refer to «Functions and Wiring» for correct wiring. 6. Connect power supply [8] to valve (connector: POWER). Refer to chapter «Electrical connection» for correct wiring. To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and thevalve enters the safety mode and is not operative. Refer also to «Safety mode». 7. Perform «Setup procedure» to prepare valve for operation. Without performing the setup procedure the valve will not be able to do pressure control. 4.2.4 Admissible forces Force at valve body and flange NOTICE Forces from the weight of other components can lead to deformation of the valve body and flanges. Do not apply any force at valve body or flanges. 4.2.4.1 Admissible forces at controller Force at controller NOTICE Forces from the weight of other components can lead to deformation the controller. Do not apply any force at controller. 603841EA Edition 2013-09-02 15/50

INSTALLATION Series 590 4.2.5 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: < 50ms. The sensor is normally connected to the chamber by a pipe. To maintain that the response time is not degraded by this connection it needs to meet the following requirements: Inner diameter of connection pipe: > = 10 mm Length of connection pipe: < = 300 mm These conductance guidelines must include all valves and limiting orifices that may also be present. Make also sure that there is no obstruction in front of sensor connection port inside the chamber. The sensor should also be mounted free of mechanical shock and vibration. Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. Pressure Sensor L1 min. 10 mm L2 min. 10 mm Process Chamber L1 + L2 < = 300 mm Isolation Valve (optional) 4.3 Electrical connection Wrong connection NOTICE Wrong connection may result in damage of controller or power supply. Connect all cables exactly as shown in the following descriptions and schematics. Burned connector pins (spark) NOTICE Connector pins or electronic parts could damage, if plugged and unplugged under power. Do not plug or unplug connectors under power. 16/50 Edition 2013-09-02 603841EA

INSTALLATION 4.3.1 Sensor supply concepts Concepts: External +24 VDC supplied to POWER connector is feedthrough to SENSOR connector to supply 24 VDC sensors. Refer to chapter «Power and sensor connection (+24 VDC sensors)» for schematic and correct wiring. 4.3.2 Power and sensor connection (+24 VDC sensors) 4.3.2.1 Sensor power wiring via controller Pins 4 and 8 must be bridged for operation. An optional switch would allow for motor interlock to prevent valve from moving. Figure 4-3 603841EA Edition 2013-09-02 17/50

INSTALLATION Series 590 Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect Power supply (+24 / GND) at DB 9 male power connector and Sensors (+24V / 0V / + / -) at DB 15 female sensor connector exactly as shown in the drawing above! Connector: Use only screws with 4 40 UNC thread for fastening the connectors! 4.3.2.2 Sensor power wiring external Pins 4 and 8 must be bridged for operation. An optional switch would allow for motor interlock to prevent valve from moving. Figure 4-4 18/50 Edition 2013-09-02 603841EA

INSTALLATION Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. Connect Power supply (+24 / GND) at DB 9 male power connector and Sensors (0V / + / -) at DB 15 female sensor connector exactly as shown in the drawing above! Connector: Use only screws with 4 40 UNC thread for fastening the connectors! 4.3.3 Service port connection The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'. Alternatively the VAT Service Box2 can be connected to the service port for setup and local operation. The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and not for permanent control. Refer also to chapter: «Local Operation» for details and to chapter «Spare parts / Accessories» for ordering numbers of service cable, software and Service Box 2. Use only screws with 4 40 UNC thread for fastening the service port connector. 4.4 Logic interface NOTICE Wrong connection Wrong connection may result in damage of controller. Connect all cables exactly as shown in the following schematic. 4.4.1 Functions and Wiring Logic interface allows for remote operation by means of digital and analog signals. Digital inputs may be operated either by switches or by voltage sources. 603841EA Edition 2013-09-02 19/50

INSTALLATION Series 590 a) Configuration with switches for digital inputs: Do not connect other pins than indicated in the schematics above! Use only screws with 4-40UNC thread for fastening the DB-25 connector! 20/50 Edition 2013-09-02 603841EA

INSTALLATION b) Configuration with voltage source for digital inputs: Do not connect other pins than indicated in the schematics above! Use only screws with 4-40UNC thread for fastening the DB-25 connector! 603841EA Edition 2013-09-02 21/50

INSTALLATION Series 590 4.4.2 Digital inputs Pin Function Signal type Description Priority 7 CONTROL MODE Digital Input 1) This pin selects the control mode. This valve may either be operated as pressure controller or as position controller. PRESSURE CONTROL is activated as long as optocoupler is on. The PID controller controls the chamber pressure according to the pressure SETPOINT by means of the valve position. POSITION CONTROL is activated when optocoupler is off. The valve position is directly controlled according to the position SETPOINT. 6 2) This pin selects the SETPOINT RANGE. Low range extension is activated as long as optocoupler is on. It s effective in pressure control mode only. 5 SETPOINT RANGE Digital input 1) This function extends the lower 10% range of sensor full scale (SFS) to the full 0-10V for SETPOINT input. N/A Example with SFS = 100mTorr: Not active (10V=100%) >> 10V setpoint = 100mTorr Active (10V=10%): >> 10V setpoint = 10mTorr 16 HOLD Digital input 1) This function stops the valve at the current position. After release of the signal the valve will return to the selected CONTROL MODE. Only PRESSURE or POSITION Mode. This function is activated as long as optocoupler is on. 5 2) This function will open the valve. 17 OPEN VALVE Digital input 1) This function is activated as long as optocoupler is on in non inverted configuration. This function is activated as long as optocoupler is off in inverted configuration. 3 2) Configuration can be done in local operation via service port. Default settings is not inverted This function will close the valve. 15 CLOSE VALVE Digital input 1) This function is activated as long as optocoupler is on in non inverted configuration. This function is activated as long as optocoupler is off in inverted configuration. 2 2) Configuration can be done in local operation via service port. Default settings is not inverted 1) All digital inputs are digitally filtered. Filter delay is 50ms. This means that digital signals must be applied for at least 50ms to be effective. Refer to «Function and wiring» for details about input circuit. 2) Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. 22/50 Edition 2013-09-02 603841EA

INSTALLATION Pin Function Signal type Description Priority 3 ZERO Digital 2) 1) Input 1 Not available for this valve. 19 LEARN Digital Input 1) Not available for this valve. 4 2) 18 LOCK Digital input 1) This function locks the valve in remote operation. In case the valve is in local operation it will turn to remote operation. Local operation via service port is not possible when LOCK is activated. When the signal is released the valve remains in remote operation but local operation may be activated via service port. N/A 6 DIGITAL GROUND Digital ground Ground for all digital inputs. Ground is used when digital inputs are operated by switches. Connect switches to ground. Refer also to «Function and wiring» configuration a). 4 DIGITAL COMMON Digital common Common for all digital inputs. Common is used when digital inputs are driven by voltage sources. Connect + or terminal of source with common (input optocouplers are capable of bidirectional operation). Refer also to «Function and wiring» configuration b). 1) All digital inputs are digitally filtered. Filter delay is 50ms. This means that digital signals must be applied for at least 50ms to be effective. Refer to «Function and wiring» for details about input circuit. 2) Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. 603841EA Edition 2013-09-02 23/50

INSTALLATION Series 590 4.4.3 Digital outputs Pin Function Signal type Description This output is active in all operation modes and indicates either that the valve is open or that a service is requested. 8 VALVE OPEN or SERVICE REQUEST Digital output 1) A service request is indicated when the valve requires cleaning due to contamination. Configuration of the functionality of this output can be done in local operation via service port. By default the output indicates open This output is active in all operation modes and indicates either that the valve is close or that a service is requested. 9 VALVE CLOSED or SERVICE REQUEST Digital output 1) A service request is indicated when the valve requires cleaning due to contamination. Configuration of the functionality of this output can be done in local operation via service port. By default the output indicates close The meaning of the valve status output depends on the operation mode. 22 VALVE STATUS 21 READY 20 COMMON Digital output 1) Digital output 1) Digital common PRESSURE CONTROL: Actual pressure is out of ±2% range of SETPOINT POSTION CONTROL: Actual position is out of ±0.1% range of SETPOINT This signal indicates that the valve is ready for remote operation. If this signal is not active the valve is in one of the following modes: Synchronization during power up Local operation via service port Safety mode. Refer to «Safety mode» for details. Common for all digital outputs. 1) Refer to «Function and wiring» for details about output circuit. 24/50 Edition 2013-09-02 603841EA

INSTALLATION 4.4.4 Analog inputs and outputs Pin Function Signal type Description PRESSURE CONTROL: A voltage of 0-10V shall be applied to this input as pressure setpoint. The pressure setpoint is in linear relation to the applied voltage. Depending on selected SETPOINT RANGE 10V means either sensor full scale or 10% of sensor full scale. 25 SETPOINT Analog input 1) POSITION CONTROL: A voltage of 0-10V shall be applied to this input as position setpoint. The position setpoint is in linear relation to the applied voltage. 0V is closed but not isolation function and 10V is open position. (Use digital input for isolation function) 12 PRESSURE 11 POSITION 13 ANALOG GROUND 1 CHASSIS GROUND Analog output 1) Analog output 1) Analog ground Chassis ground This output indicates the current pressure as 0-10V. The output voltage is in linear relation to the pressure. Depending on the selected SETPOINT RANGE 10V means either sensor full scale or 10% of sensor full scale. This output indicates the current valve position as 0-10V voltage range. The voltage is in linear relation to the valve position. 0V is closed but not isolation function and 10V is open position. (Use digital output for isolation function) Ground for analog input and analog outputs. Chassis ground connected to case. Shall be used to connect cable shield. 1) Refer to «Function and wiring» for details about input / output circuit. 603841EA Edition 2013-09-02 25/50

INSTALLATION Series 590 4.5 Initial operation 4.5.1 Setup procedure To enable the valve for pressure control setup steps 1 to 3 must be performed. In case position control is required only it s sufficient to perform steps 1 to 3. Setup steps 1 Power up Description Turn on external + 24VDC power supply of valve (and external 15 VDC for sensor power supply if required). Refer to chapter «Behavior during power up» for details. 2 3 Interface configuration Fixed PI upstream configuration Refer to chapter «Interface configuration» for details. Determination of the vacuum system characteristic to accommodate thepid controller. Refer to chapter: «Fixed PI upstream configuration» for details. Table 4-1 26/50 Edition 2013-09-02 603841EA

INSTALLATION 4.5.2 Interface configuration Interface configuration must be adapted according to application needs. Default configuration: OPEN input CLOSE input OPEN output CLOSE output not inverted not inverted open close Functionality of digital inputs CLOSE VALVE and OPEN VALVE must be selected. These may be configured as not inverted or inverted. Default is not inverted. LEARN range configuration for remote operation must be selected. This may either be full range or pressure limit according of analog SETPOINT input. Default is full range. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Do configuration in menu Setup / Interface. Remote operation: It s not possible to do Interface configuration via remote operation. 603841EA Edition 2013-09-02 27/50

INSTALLATION Series 590 4.5.3 Fixed PI upstream configuration Note: Select the pressure control algorithm with s:02 command see table below. Local operation: ( Control View or Control Performance Analyzer ) 1. Open CV or CPA 2. Go to «Tools» > «Terminal» and send setup command s:02 according to application needs. (possibility of adjustment see below) Set Get Command s:02abcdefgh configuring Control mode a s:02a switch to Control mode a without configuring i:02 get configuration actual Control mode i:02a get configuration Control mode a Describtion Acknowledgement (within 10ms after reception of command) s:02 s:02 i:02abcdefgh i:02abcdefgh This command selects control mode, gain factor, sensor response time, setpoint ramp time, p-gain, i-gain and soft pump for the PID controller. Remote operation: Note: (It s not possible to do Fixed PI configuration via remote operation.) data length 8 characters a pressure control algorithms: 2 = Fixed PI upstream (default) bc = 00 defgh = parameter (see parameter describtion) Example: s:0210000612 = Fixed PI upstream, ramp time 0, P-Gain 0.0056, I-Gain 0.032 Note: For adjustment see table below. 28/50 Edition 2013-09-02 603841EA

INSTALLATION a (control mode) 1 PI downstream control and 2 PI upstream control parameter description bc not used, set 00 d Setpoint Ramp Time (s): (default is 0 = 0.0) 0 = 0.0, 1 = 0.5, 2 = 1.0, 3 = 1.5, 4 = 2.0, 5 = 2.5, 6 = 3.0, 7 = 3.5, 8 = 4.0,9 = 4.5, A = 5.0, B = 5.5, C = 6.0, D = 6.5, E = 7.0, F = 7.5, G = 8.0, H = 8.5, I = 9.0, J =9.5, K = 10.0 ef P-Gain: (default is 06 = 0.0056) 00 = 0.0010, 01 = 0.0013, 02 = 0.0018, 03 = 0.0024, 04 = 0.0032, 05 = 0.0042, 06 = 0.0056, 07 = 0.0075, 08 = 0.010, 09 = 0.013, 10 = 0.018, 11 = 0.024, 12 = 0.032, 13 = 0.042, 14 = 0.056, 15 = 0.075, 16 = 0.10, 17 = 0.13, 18 = 0.18, 19 = 0.24, 20 = 0.32, 21 = 0.42, 22 = 0.56, 23 = 0.75, 24 = 1.0, 25 = 1.3, 26 = 1.8, 27 = 2.4, 28 = 3.2, 29 = 4.2, 30 = 5.6, 31 = 7.5, 32 = 10, 33 = 13, 34 = 18, 35 = 24, 36 = 32, 37 = 42, 38 = 56, 39 = 75, 40 = 100 gh I-Gain: (default is 12 = 0.032) 00 = 0.0010, 01 = 0.0013, 02 = 0.0018, 03 = 0.0024, 04 = 0.0032, 05 = 0.0042, 06 = 0.0056, 07 = 0.0075, 08 = 0.010, 09 = 0.013, 10 = 0.018, 11 = 0.024, 12 = 0.032, 13 = 0.042, 14 = 0.056, 15 = 0.075, 16 = 0.10, 17 = 0.13, 18 = 0.18, 19 = 0.24, 20 = 0.32, 21 = 0.42, 22 = 0.56, 23 = 0.75, 24 = 1.0, 25 = 1.3, 26 = 1.8, 27 = 2.4, 28 = 3.2, 29 = 4.2, 30 = 5.6, 31 = 7.5, 32 = 10, 33 = 13, 34 = 18, 35 = 24, 36 = 32, 37 = 42, 38 = 56, 39 = 75, 40 = 100 Table 4-2 Note: To optimize P-Gain, I-Gain to chapter «Optimize P-Gain and I-Gain». 603841EA Edition 2013-09-02 29/50

INSTALLATION Series 590 4.5.3.1 Optimize P-Gain, I-Gain 1. Introduction For pressure control the parameters P-Gain and I-Gain have to be set according to the systems characteristics. The best set of parameters can be found empirically. Normally the default settings (P-Gain=0.0056; I-Gain=0.032) will result in good pressure control performance. For some applications tuning may be required to improve performance. 2. Slow pressure response If the response to a set point change is slow the control speed can be increased by raising P-Gain and I-Gain. 3. Fast pressure response with oscillations If the response to a set point change is too fast and the pressure is oscillating the control speed can be reduced by lowering P-Gain and I-Gain. 4. Parameter adjustment It is recommended first to increase / decrease the P-Gain by one step. The also the I-Gain can be changed by one step. After each change the response should be tested. If different set points are required it is recommend to test the response at the highest and at the lowest set point. 30/50 Edition 2013-09-02 603841EA

INSTALLATION 4.5.3.2 Valve speed adjustment Valve speed effects: Response time Default value is 1000. Adjustment range is from 1 to 1000. This parameter effects valve plate actuating speed. Speed adjustment is effective for PRESSURE CONTROL and POSITION CONTROL. Normally best pressure control response is achieved with max. valve speed. In particular applications it may be of advantage to have a slower valve response. OPEN and CLOSE are always done with max. speed. Adjustment procedure: 1. Use optimal P-gain, I-Gain and Setpoint ramp time according to preceding tuning steps. 2. Open valve. 3. Control a typical pressure / flow situation. 4. Repeat from step 2 with slower valve speed until required response is achieved. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Go to Setup / Control Parameter menu. Select valve speed. Remote operation: Note: (It s not possible to do Fixed PI configuration via remote operation.) 603841EA Edition 2013-09-02 31/50

OPERATION Series 590 5 Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. CAUTION Valve opening Human body parts may get jammed or easily injured. Do not operate before valve is installed completely in the vacuum system. 5.1 Normal operation This valve is designed for upstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible. 5.1.1 Local operation Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT is required. You can use our Software (freeware) 'Control Performance Analyzer' which can be downloaded from: http://www.vatvalve.com/customer-service/informations-and-downloads/control-performance-analyzer. These softwares are beneficial especially for setup, testing and maintenance. How to start: Connect service cable, start software and push button LOCAL to enable for operation. Then enter menu Setup / Sensor and do sensor configuration according to your application to make sure that you get the correct pressure displayed. 'Control Performance Analyzer' supports: Valve setup Sensor setup Pressure control Interface setup Manual control Sequence ontrol Numeric and graphical monitoring Data recording Data analysis Advanced diagnostic Figure 5-1 32/50 Edition 2013-09-02 603841EA

OPERATION When communication to service port is interrupted the valve will change to remote operation. So when service cable will be disconnected or software will be shut down, the valve returns automatically to remote operation. This may result in an immediate movement of the valve depending on remote control. Refer to chapter: «Accessories» for ordering numbers of service cable, software and Service Box 2. 5.1.2 Remote operation This product is equipped with a Logic interface to allow for remote operation. See section «Logic interface» for details. 'Control Performance Analyzer' software or 'Service Box 2' may be used for monitoring during remote control. 'Control Performance Analyzer' software 'Service Box 2' In case Control Performance Analyzer software is connected to valve make sure REMOTE button is pushed to enable for remote operation. In case Service Box 2 is connected to valve make sure the LED on button LOCAL is OFF for remote operation. 603841EA Edition 2013-09-02 33/50

OPERATION Series 590 5.2 Close valve Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Remote operation: (Refer to chapter «Digital inputs» for details) Push CLOSE button Send CLOSE VALVE 5.3 Open valve Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Remote operation: (Refer to chapter «Digital inputs» for details) Push OPEN button Send OPEN VALVE 5.4 Position control The valve position is directly controlled according to the position setpoint. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Select or enter position setpoint Remote operation: (Refer to chapter «Digital inputs» and «Analog inputs and outputs» for details) 1. Set CONTROL MODE to POSITION CONTROL 2. Set position SETPOINT Operating in position control mode can be done very easily. When setting a defined position by opening the valve, a pressure in the chamber will be achieved dependent on application specific parameters. This pressure will be slightly higher than the same defined position set by closing the valve. It is therefore recommended that this difference is evaluated prior to operating in position control. 5.5 Pressure control To prepare valve for PRESSURE CONTROL perform complete «Setup procedure». The valve has parameters that may be modified to tune pressure control performance. Refer to «Tuning of control performance». Operating in position control mode can be done very easily. When setting a defined position by opening the valve, a pressure in the chamber will be achieved dependent on application specific parameters. This pressure will be slightly higher than the same defined position set by closing the valve. It is therefore recommended that this difference is evaluated prior to operating in position control. Local operation: ( Control View, Control Performance Analyzer or Service Box 2 ) Select or enter pressure setpoint Remote operation: (Refer to chapter «Digital inputs» and «Analog inputs and outputs» for details) 1. Set CONTROL MODE to PRESSURE CONTROL 2. Set pressure SETPOINT 34/50 Edition 2013-09-02 603841EA

OPERATION 5.6 Display information 1 2 3 4 There is a 4 digit display located on the panel. It displays configuration, status and position information. For details refer to following tables. Figure 5-2 5.6.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 At first all dots are illuminated then configuration is displayed: 1 E 0 0 Firmware version [e.g. 1E00] (1st information for about 3s) Controller configuration (2nd information for about 3s) 1 = Logic interface 0 = basic 1 = 1 sensor version In case D999 is displayed, motor interlock is active. Refer to chapter «Safety mode» for details. Table 5-1 S Y N C 603841EA Edition 2013-09-02 35/50

OPERATION Series 590 5.6.2 Operation Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 PRESSURE CONTROL mode POSITION CONTROL mode Valve closed Valve open HOLD (position frozen) activated Safety mode established. Refer to chapter «Safety mode» for details. Power failure Table 5-2 P V C O H D F 0... 100 = valve position (%, 0 = closed / 100 = open) 5.6.3 Errors Description Digit 1 Digit 2 Digit 3 Digit 4 Fatal error occurred Table 5-3 E Error code. Refer to chapter: «Trouble shooting» for details. 5.6.4 Safety mode By means of an external switch (see connection diagrams chapter «Electrical connection») the motor power supply can be interrupted. In this case the valve enters the safety mode. This motor interlock prevents the valve from moving (e.g. maintenance work). Data reading from the control unit remains possible. When motor interlock is active during power up the valve directly enters the safety mode and is not able to synchronize. Display shows D C or D999. In this case synchronization cycle will be done when motor interlock is deactivated. Then Display shows INIT for a moment followed by SYNC. When safety mode is entered from operation (i.e. pressure control mode), the unit will automatically switch to position control mode and remain at current position. Once motor interlock is deactivated the unit remains in position control mode. 36/50 Edition 2013-09-02 603841EA

OPERATION 5.7 Operation under increased temperature Hot valve CAUTION Heated valve may result in minor or moderate injury. Do not touch valve during operation. Wait until the valve is cooled down complete before doing any work. This valve may be operated in the temperature range mentioned in chapter «Technical data». Temperature differences NOTICE Temperature differences they may affect the performance of the valve. Temperature differences exceeding 30 C throughout the valve are not allowed. Ideally the valve do not get actuated until the temperature is levelled throughout the valve. 5.7.1 Bake-out Bake out temperature Open / Close: 300 C Actuator: 50 C Beak-out area 30 mm 300 C 50 C 5.8 Behavior during power up Valve position before power up: Closed (isolated) All other than closed (not isolated) Reaction of valve: Valve power up configuration = closed (default) Table 5-4 Refer also to chapter «Display information». Valve remains closed. Display shows alternately C C and INIT. Synchronization will be done when first movement command is received. Valve runs to max. throttle position to detect limit stop for synchronization. Display shows configuration of product resp. SYNC until synchronization is done. Valve position after power up is closed 603841EA Edition 2013-09-02 37/50

OPERATION Series 590 5.9 Behavior during power failure Valve position before power failure: Any Table 5-5 Reaction of valve: Without Power Failure Option (PFO) Valve remains at current position. All parameters are stored in a power fail save memory. 38/50 Edition 2013-09-02 603841EA

OPERATION 5.10 Trouble shooting Failure Check Action - No dots lighted on display - 24 V power supply ok? - Connect valve to power supply according to chapter «Electrical connection» and make sure that power supply is working. - Remote operation does not work - Local operation via service - Switch to remote operation. port active - Safety mode active, check for D on display? - Provide power to motor to allow for operation. - Refer to chapter «Electrical connection» for details. - Display shows «E 20» and position is 009999 - (fatal error - limit stop of valve unit not detected) - Display shows «E 22» and position is 009999 - (fatal error - rotation angle of valve plate limited during operation) - Display shows «E 40» and position is 009999 - (fatal error - motor driver failure detected) - Display shows «D 0» - Motor Interlock is open - Clamp coupling screw not fastened? - Valve unit heavy contaminated? - Valve plate mechanically obstructed? - CLOSE VALVE does not work - Safety mode active, check for D on display? - Maintenance mode active - OPEN VALVE does not work - Safety mode active, check for D on display? - Maintenance mode active - Display shows «M C» - Maintenance mode active - Display shows «M100» - Maintenance mode active Table 5-6 - Tighten screw. Refer to chapter «Tightening torque» for details. RESET or restart of valve is necessary. - Clean valve unit according to chapter «Maintenance procedure». - Resolve obstruction. - Reset control unit. Cycle power (OFF ON). or - Send reset command: - local via service port with CV/CPA/Service Box2. - Replace control and actuating unit according to chapter «Maintenance procedures». - Motor power supplied? - Provide power to motor to allow for operation. - Refer to chapter «Electrical connection» for details. - Provide power to motor to allow for operation. - Refer to chapter «Electrical connection» for details. - Refer to Display shows «M C» in this table - Provide power to motor to allow for operation. - Refer to chapter «Electrical connection» for details. - Refer to Display shows «M100» in this table - Pin 14 of service connector is connected to ground. Plate will close. Further movement of plate is blocked. 1) - Pin 13 of service connector is connected to ground. Plate will open. Further movement of plate is blocked. 1) 1) Priority of pin 14 is higher than pin 13. If pin 14 is connected to ground after pin 13 the valve will close. Ground of service connector is at pin 4 and 8. 603841EA Edition 2013-09-02 39/50

OPERATION Series 590 Failure Check Action - Pressure reading is wrong - Sensor(s) connected? - Refer to chapter «Electrical connection». or - Check valve version on page 1. Verify configuration. - pressure reading is negative Refer to chapter «Setup procedure». - Does sensor power supply - Verify sensor supply voltage. provide enough power for sensor(s)? - PRESSURE CONTROL does not work - PRESSURE CONTROL not optimal Table 5-7 - Safety mode active, check for D on display? - PRESSURE CONTROL selected, check for P on display? - Fixed PI done? - Perform Fixed PI. - Provide power to motor to allow for operation. - Refer to chapter «Electrical connection» for details. - Select PRESSURE CONTROL mode. - Refer to chapter «Pressure control» for details. - Refer to chapter «Setup procedure» for details. - Setup done completely? - Perform «Setup procedure» completely. - Fixed PI done? - Perform Fixed PI. - Fixed PI interrupted? - Repeat Fixed PI. - Repeat Fixed PI with stable gas flow. - Optimizing fixed PI done? - Optimizing fixed PI for application. - Refer to «Optimize P-Gain, I-Gain» for details. - Is sensor range suited for application? - Use a sensor with suitable range (controlled pressure should be >3% and < 98% of sensor full scale). - Noise on sensor signal? - Make sure a shielded sensor cable is used. If you need any further information, please contact one of our service centers. You will find the addresses on our website: www.vatvalve.com. 40/50 Edition 2013-09-02 603841EA

MAINTENANCE 6 Maintenance Maintenance may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the maintenance, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com. 603841EA Edition 2013-09-02 41/50

REPAIRS Series 590 7 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com. 42/50 Edition 2013-09-02 603841EA

DISMOUNTING AND STORAGE 8 Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 8.1 Dismounting 1. Close the valve Harmful substances WARNING Risk of serious injury in case of contact with harmful substances. Remove harmful substances (e. g. toxic, caustic or microbiological) from the valve before dismounting. Contamination Product may get contaminated. NOTICE Always wear cleanroom gloves when handling the product. 2. For dismounting the valve please follow the instructions of chapter: «Installation», however in reverse order. 603841EA Edition 2013-09-02 43/50

DISMOUNTING AND STORAGE Series 590 8.2 Storage Wrong storage NOTICE Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: relative humidity between 10% and 70% temperature between +10 C and +50 C non-condensing environment Inappropriate packaging NOTICE Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. 1. Clean / decontaminate valve. 2. Cover all valve openings with a protective foil. 3. Pack valve appropriately, by using the original packaging material. 44/50 Edition 2013-09-02 603841EA

PACKAGING AND TRANSPORT 9 Packaging and Transport WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Harmful substances WARNING Risk of serious injury in case of contact with harmful substances. Remove harmful substances (e. g. toxic, caustic or microbiological) from valve before you return the valve to VAT. Inappropriate packaging NOTICE Product may get damaged if inappropriate packaging material is used. Always use original packaging material and handle product with care. When returning products to VAT, please fill out the VAT form «Declaration of Chemical Contamination of Vacuum Valves and Components» and send it to VAT in advance. The form can be downloaded from our website www.vatvalve.com (Section: Services After sales). If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 9.1 Packaging 1. Cover all valve openings with a protective foil. 2. Pack valve appropriately, by using the original packaging material. VAT disclaims any liability for damages resulting from inappropriate packaging. 603841EA Edition 2013-09-02 45/50

PACKAGING AND TRANSPORT Series 590 9.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 46/50 Edition 2013-09-02 603841EA

DISPOSAL 10 Disposal WARNING Harmful substances Environmental pollution. Discard products and parts according to the local regulations. 603841EA Edition 2013-09-02 47/50

SPARE PARTS Series 590 11 Spare parts There are no spare parts defined. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com. 48/50 Edition 2013-09-02 603841EA

APPENDIX 12 Appendix 603841EA Edition 2013-09-02 49/50

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