Z SLIDERS. Introducing a low profile actuator installing a circulating type linear guide!

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Z SLIDERS Introduing a low profile atuator installing a irulating type linear guide! Developed mainly for movement in the Z axis diretion, as refleted in the Z Slider name. The thin, lightweight, and ompat body offers the best math for lifters, stoppers, and pik-and-plae on different levels in automated manufaturing system. Ahieve auray, rigidity, and stroke travel linearity, in response to preision mahining and requirements on assembly at the best prie. Appliation example of use as a Z axis Thin, lightweight, and low enter of gravity optimum for ompat design! A onave ross-setion body a new onept restrits the height to the table and shortens the overall length, to ahieve lightweight, ompat shape, and low enter of gravity. This onfiguration redues the overhang distane on the Z axis. (Comparison with Koganei Rod Slider) ARS1640 Mass 650g [22.93oz.] Sensor swith an be mounted on either of 2 surfaes! Mounting grooves are provided in the both side surfaes and top surfae of the body, for mounting the embedded sensor swith (horizontal or vertial lead wire). (Optional) (The side mounted sensor swith an also be wired to the rod side.) 38mm [1.496in.] 27mm [1.063in.] ZS1640 Mass 495g [17.46oz.] Note: Top surfae mounting groove is not available in the 6 [0.236in.] size. With buffer mehanism also available! A buffer mehanism absorbs deviation of positions or shoks at the bottom end of the stroke (extended end) due to pik-and-plae in positions at different levels, or to workpiee insertion, for preise position adjustment. Spring fore an be adjusted to 4 levels. Linear guide ensures stroke travel linearity! A irulating type linear guide is used for improved auray, rigidity, and stroke travel linearity. Moreover, stainless steel for the rail and unit ensures superior orrosion-resistant, while a shortened distane between the enter of the ylinder and the ball irulating setion enter in the guide ensures table and plate auray and rigidity, and improves stroke travel linearity. (A rubber bumper is standard equipment.) Twin rods ensure high thrust! Use of 2 ylinders ahieves high thrust. Moreover, the retrated side thrust is inreased by an average 17% larger than onventional Koganei produts, for improved yle time. 939

Appliation example of use as a pusher and lifter Piping in 2 diretions improves spae utilization effiieny! Piping ports are found on 2 sides on the side surfae, and also on the head side in preparation for use as a Z axis, failitating rational piping design. Diverse installation and sturdy mounting brakets! Mounting holes for seuring the body in plae inlude 4 holes in the through hole type on the table surfae, and 4 tapped holes type on the bak surfae (the long strokes have 6 loations). Also, for mounting the workpiee in plae, there are 6 threads on the table surfae (4 threads for the -stroke type) and 4 threads on the plate surfae, with larger thread sizes for sturdy mounting. Furthermore, loating dowel pin holes are provided on the body mounting surfae and the table mounting surfae. Z SLIDERS Two types of stroke adjustment! (When adjustment mehanism is provided) For stroke adjustment, selet from 2 types aording to your appliations. (Optional) With rubber stopper With shok absorber Standard Z Slider ompatible non-ion speifiation. The extended side stroke adjustment type is not available for the mm stroke. The shok absorber annot be used for the 6 size. Symmetrial ylinder saves spae! Also available with end keep mehanism! Cylinders with ompletely sequened operation-type end keeps are a standard of the line-up. It prevents the ylinder from falling even if the air supply is ut off. The symmetrial ylinder reverses the sensor mounting loation, onnetion port, and stopper position to the opposite side with respet to the body enter line in relation to the standard ylinder. The result is effetive use of mounting spae and effiient spae savings. Standard ylinder Symmetrial ylinder Only head side end keep 940

Line-up inludes 8 variations Standard ylinders The standard Z Slider ahieves thin and ompat in Z axis diretion. Cylinders with end keeps Prevent workpiee from falling down when air supply is ut off or air pressure has redued. Available in ompat at the same size as the standard type. Cylinders with buffers Built-in spring absorbs workpiee impat shoks at the extended stroke end. The spring return fore an be adjusted in 4 levels. Symmetrial ylinders Plae sensor mounting or onnetion port, et., on symmetrial, opposite position, for flexible design. Cylinders with buffers and end keeps Symmetrial ylinders with buffers Symmetrial ylinders with end keeps Symmetrial ylinders with buffers and end keeps Combinations of different variations are available. (Made to order) For delivery, onsult us. Options Stroke adjustment mehanism Redues the impats at the end of the stroke. Selet either a rubber stopper or shok absorber. Rubber stopper Shok absorber Combinations of variations and options ZS Standard ylinder ZSG Cylinder with buffer ZSK Cylinder with end keep Note 1 ZSBB Symmetrial ylinder ZSGK Cylinder with buffer and end keep Note 1 ZSBBG Symmetrial ylinder with buffer ZSBBK Symmetrial ylinder with end keep Note 1 ZSBBGK Symmetrial ylinder with buffer and end keep Note 1 Made to order produts. For speifiation, dimensions and delivery, onsult us. Notes: 1. The ylinder with end keep has the head side end keep only. 2. Shok absorber is not available for ylinders with bore size of 6 [0.236in.]. 3. Not available for both ends or extended side mm stroke. 941 Model Type Corresponding bore size 6 [0.236] 6 [0.236] 6 [0.236] 6 [0.236] [0.394] [0.394] [0.394] [0.394] 16 [0.630] 16 [0.630] 16 [0.630] 16 [0.630] 16 [0.630] 16 [0.630] 16 [0.630] 16 [0.630] [0.787] [0.787] [0.787] [0.787] [0.787] [0.787] [0.787] [0.787] 25 [0.984] 25 [0.984] 25 [0.984] 25 [0.984] 25 [0.984] 25 [0.984] 25 [0.984] 25 [0.984] Stroke adjustment Note 3 (Blank: no adjusting mehanism) Rubber stopper Shok absorber Note 2 Extended side end -RSF Retrated side end -RSR Both ends -RS2 Extended side end -SSF Retrated side end -SSR Both ends -SS2 Sensor swith Mountable Embedded sensor swith Lead wire: Horizontal lead wire type Vertial lead wire type

Handling Instrutions and Preautions Seletion, installation, stroke adjustment, and piping Seletion 1. Use Sizing Guide on p.944 to selet the load so that maximum load, allowable moment, and operating speed, et., do not exeed the speifiations limit. Maintaining values at about 80% of the allowable range is reommended. This level will onstrain detrimental effets on the ylinder and guide to a minimum. 2. If using an external stopper to perform an intermediate stop, take preautions to prevent the unit from popping up due to the ontrol iruit or external ontrol method. Popping up an result in damage to equipment. Mounting 1. While any mounting diretion is allowed, the mounting surfae should always be flat. Twisting or bending during mounting may disturb the auray and may also result in air leaks or improper operation. 2. Caution should be exerised that srathes or dents on the Z slider s mounting surfae may damage its flatness. 3. In appliations subjet to large shoks, reinfore the bolt mounting, by installing a support to the Z Slider body, for example, is reommended. 4. Do not leave srathes or dents in the areas where the piston rod ontats. It ould result in damage to the seals or in air leaks. 5. In ases where the mounting bolts and nuts for the body, stroke adjusting braket, or workpiee ould beome loosened by shoks or vibrations, take measures to prevent loosening. For the reommended tightening torque and the sizes of the various bolts and nuts, see the table below. Reommended tightening torques of the mounting bolts and nuts for the body, stroke adjusting braket, and workpiee Bolt size Bore size 6 [0.236] [0.394] 16 [0.630] [0.787] 25 [0.984] Reommended tightening torque Nm [ftlbf] For mounting body Through hole Female thread Nut size For mounting Braket A and B workpiees Stopper B Reommended tightening torque Nm [ftlbf] Size for the mounting bolts and nuts for the body, stroke adjusting braket, and workpiee For seuring stroke adjustment Stopper A Rubber stopper and shok absorber Stroke adjustment The optional stroke adjusting braket set is available with either the rubber stopper type or shok absorber type. In both types, stroke adjustment within the range shown on p.949 is easy for both the extended and retrated sides (for end keep type, extended side only). For both the extended and retrated sides, rotating the stroke adjusting stopper bolt or shok absorber to the right (lokwise) shortens the stroke. After adjustment, tighten the lok nut to seure it in plae. Note that the rubber stopper or shok absorber are inluded at shipping but not assembled. Piping loation and operating diretion The plate and table move to the extended side when air is supplied to the B or C onnetion ports, and to the retrated side when air is supplied to the A or D onnetion ports. Note that, at shipping, the C and D onnetion ports are plugged. Retrated side Extended side Control iruit for the end keep ylinder 1. For ontrol of the Z Slider with End Keep, we reommend the use of 2-position, 4-, 5-port valves. Avoid the use of ontrol iruit with ABR onnetion (exhaust enters) 3-position valves that exhaust air from 2 delivery ports. 2. Always use meter-out ontrol for speed ontrol. Meter-in ontrol may result in failure of the loking mehanism to release. 3. Always set the air pressure to 0.2MPa [29psi.] or more. Cautions: 1. It is dangerous to supply air to a onnetion port on a side with a loking mehanism while the ylinder has already been exhausted, beause the piston rod may suddenly extend, et. In addition, sine the lok piston ould also ause galling of the lok piston and piston rod, resulting in defetive operation. Always supply air to the onnetion port opposite the one adjaent to the loking mehanism to ensure applying bak pressure. 2. When restarting operations after air has been exhausted from the ylinder due to ompletion of operations or to an emergeny stop, always start by supplying air to a onnetion port opposite the one adjaent to the loking mehanism. 3. Connet the valve port A (NC) to the onnetion port on the side with the loking mehanism. Manual operation of loking mehanism While the loking mehanism is M30.5 srew normally released automatially Pull out through ylinder operations, it an Lok nut also be released manually. For manual release, insert an M30.5 srew that has 30mm [1.18in.] srew length into the opening for the manual override, thread it in about 3 turns into the internal lok piston, and then pull up the srew. To maintain the manual override for adjustment, et., thread the loknut onto the srew, and with the loking mehanism in a released state, tighten the loknut against the ylinder. Cautions: 1. It is dangerous to release the lok when load (weight) is present on the piston rod, beause it may ause the unintended piston rod s extension, et. In this ase, always supply air to the onnetion port opposite the one adjaent to the loking mehanism before releasing the loking mehanism. 2. If the loking mehanism annot easily be released even with manual override, it ould be the result of galling of the lok piston and piston rod. In this ase, supply air to the onnetion port opposite the one adjaent to the loking mehanism before releasing the loking mehanism. 3. Water, oil, dust, et., intruding through the opening for the manual override may ause defetive lok or other errati operation. If using in loations subjet to dripping water, dripping oil, et., or large amounts of dust, use a over to protet the unit. 942 Z SLIDERS

Handling Instrutions and Preautions With buffer Operating onditions 1. For appliations with buffer type, use and plae the buffer mehanism side in the down side in vertial installation, or horizontal installation. Beause the ylinder buffer may operate even at the buffer s full-stroke onditions depending on the load and/or speed, adjust the load and speed to avoid it in the ase. 2. Do not operate the buffer mehanism while it is on the retrated side. 3. Do not apply external fore on the sub-plate in the diretion from the table surfae to the bottom of the body, either after ompletion of the stroke or during the stroke movement. Spring return fore The spring return fore inorporated into the plate with buffer an be adjusted in 4 levels. The return fore at shipping is set to the lowest level (at Level 1), with the snap ring on the plate front surfae retained in the losest groove to the front. To hange the return fore, squeeze the snap ring and move it together with the washer to the groove position for giving the desired return fore, then use the snap ring to seure the washer and spring into plae. When squeezing the snap ring, take aution that the washer or snap ring do not pop out due to the spring return fore. In addition, be areful to avoid over-squeezing the snap ring. It ould lead to damage the ring. After adjusting the spring fore, hek that the snap ring is seured in the position. Spring return fore (with buffer) Bore size () 6 Level 2 [0.236] Level 3 Level 4 Level 1 Level 2 [0.394] Level 3 Level 4 Level 1 16 Level 2 [0.630] Level 3 Level 4 Level 1 Level 2 [0.787] Level 3 Level 4 Level 1 25 Level 2 [0.984] Level 3 Level 4 Adjusting Spring length () Spring fore (N [lbf.]) loation At zero At stroke At zero At stroke stroke end stroke end Level 1 24.0 [0.945] 22.0 [0.866].0 [0.787] 18.0 [0.709] 24.2 [0.953] 22.2 [0.874].2 [0.795] 18.2 [0.717] 30.0 [1.181] 28.0 [1.2] 26.0 [1.024] 24.0 [0.945] 30.0 [1.181] 28.0 [1.2] 26.0 [1.024] 24.0 [0.945] 33.0 [1.299] 31.0 [1.2] 29.0 [1.142] 27.0 [1.063] 14.0 [0.551] 12.0 [0.472].0 [0.394] 8.0 [0.315] 14.2 [0.559] 12.2 [0.480].2 [0.402] 8.2 [0.323].0 [0.787] 18.0 [0.709] 16.0 [0.630] 14.0 [0.551].0 [0.787] 18.0 [0.709] 16.0 [0.630] 14.0 [0.551] 23.0 [0.906] 21.0 [0.827] 19.0 [0.748] 17.0 [0.669] 0.69 [0.155] 0.96 [0.216] 1.24 [0.279] 1.51 [0.339] 1.94 [0.436] 2.65 [0.596] 3.35 [0.753] 4.06 [0.913] 4.96 [1.115] 6.77 [1.522] 8.57 [1.927].38 [2.333] 7.55 [1.697].30 [2.315] 13.04 [2.931] 15.79 [3.550].15 [2.282] 14.66 [3.296] 19.17 [4.309] 23.68 [5.323] 2.06 [0.463] 2.33 [0.524] 2.61 [0.587] 2.88 [0.647] 5.47 [1.230] 6.18 [1.389] 6.88 [1.547] 7.59 [1.706] 13.98 [3.143] 15.79 [3.550] 17.59 [3.954] 19.40 [4.361] 21.28 [4.784] 24.03 [5.402] 26.77 [6.018] 29.52 [6.636] 32.71 [7.353] 37.22 [8.367] 41.73 [9.381] 46.24 [.395] Spring poket diameter () 7 [0.276] 8 [0.315] 12 [0.472] 14 [0.551] 17 [0.669] Snap ring Spring poket diameter Washer Level 4 Level 1 943

Sizing Guide Seletion proedure 1 Chek operating onditions Chek the operating onditions, with onsideration for the workpiee shape and the ylinder mounting diretion, et. 2 3 Calulate the allowable load mass Use the allowable kineti energy Ea (J) formula to alulate the allowable load mass Wa (kg). Calulate the kineti energy Calulate the kineti energy E (J) of the workpiee. Chek that the kineti energy of the workpiee does not exeed the allowable kineti energy Ea (J). or Calulation formula and data Model Cylinder mounting diretion Average ylinder speed Va (mm/s) Load mass W (kg) Amount of overhang Ln (mm) [Figure 1] Workpiee mounting position and shape Center of gravity for workpiee Seletion example Impat speed V1.5 Va Corretion oeffiient (as a guide) Allowable kineti energy Ea (J) [Table 1] Ea0.11 E W Note: If Wa exeeds Wmax in the Table 1, use Wmax in the ase. Impat speed V1.5 Va Corretion oeffiient (as a guide) Allowable kineti energy Ea (J) [Table 1] Ea0.11 Kineti energy E Allowable kineti energy Ea The seletion is satisfatory sine E 0.08.11. Cylinder: ZS1640 Vertially downward mounting Average ylinder speed: Va300 (mm/s) Load mass: W0.8 (kg) L 230 (mm) L 3 (mm) (Under these onditions, L1 is not required) 2 1 V Ea Wa 00 Wa2Ea 00 ( Wa.11 1.086 V ) 2 2 00 ( 1.5300) 1 2 2 ( ) ( ) 2 2 1 1.5300 E 0.8( ) 0.081 2 V 00 00 Z SLIDERS 4 5 6 Calulate the stati moment Calulate the stati moment M (Nm). Chek the allowable moment Ma (Nm). Dynami moment Calulate the dynami moment MD (Nm). Chek the allowable moment Ma (Nm). Chek the load ratio If the total sum of the load ratio does not exeed 1, then the seletion is satisfatory. LnAn M9.8W 00 Moment enter orretion value An [Table 1] Allowable moment Ma (Nm) [Table 1] LnAn MD9.8W 00 Moment enter orretion value An [Table 1] Allowable moment Ma (Nm) [Table 1] W M MD 1 Wa Ma Ma Pithing Calulate MP. MP9.80.8 A218.5 MaP6.17 Yawing Calulate MY. MY9.80.8 A315 MaY4.94 Pithing Calulate MDP. MDP9.80.8 A218.5 MaP6.17 3018.5 00 15 00 3018.5 00 0.380 0.274 0.380 Yawing Calulate MDY. 15 MDY9.80.8 0.274 00 A315 MaY4.94 W MP MY MDP MDY Wa MaP MaY MaP MaY 0.8 0.380 0.274 0.380 0.274 1.086 6.17 4.94 6.17 4.94 0.971 As shown by the above alulation, the seletion is satisfatory. 944

Sizing Guide [Table 1] Item Code Unit ZS6 ZS ZS16 ZS ZS25 Allowable kineti energy Maximum allowable load mass Moment enter orretion value Allowable moment Ea Wmax A1 A2 A3 MaP MaY MaR J kg mm mm mm Nm Nm Nm Figure 1 Overhang distane Ln (mm), and moment enter orretion value An (mm) Pithing Yawing Rolling Stati moment Dynami moment Stati moment: Moment due to load mass Dynami moment: Moment generated when stoppers ollide Code table Impat speed Average ylinder speed Load mass Allowable load mass Maximum allowable load mass Overhang distane mm J J Nm Nm Nm Moment enter orretion value Kineti energy Allowable kineti energy Stati moment Dynami moment Allowable moment 945

Sizing Guide Seletion proedure 1 Chek operating onditions Chek the operating onditions, with onsideration for the workpiee shape and the ylinder mounting diretion, et. 2 Calulate the allowable load weight Use the allowable kineti energy E'a [ftlbf] formula to alulate the allowable load weight W'a [lbf]. or Calulation formula and data Model Cylinder mounting diretion Average ylinder speed V'a [in./se.] Load weight W' [lbf.] Amount of overhang L'n [in.] [Figure 2] Workpiee mounting position and shape 1 W'a E'a 2 2 V' 32.2 ( 12) 12 ( ) W'a232.2E'a Center of gravity for workpiee Impat speed V'1.5 V'a Corretion oeffiient (as a guide) V' 2 Seletion example Cylinder: ZS1640 Vertially downward mounting Average ylinder speed: V'a11.8 [in./se.] Load weight: W'1.76 [lbf.] L' 21.181 [in.] L' 30.787 [in.] (Under these onditions, L1 is not required) W'a232..0811 12 ( ) 1.511.8 2 2.40 3 Calulate the kineti energy Calulate the kineti energy E' [ftlbf] of the workpiee. Chek that the kineti energy of the workpiee does not exeed the allowable kineti energy E'a [ftlbf]. 4 Calulate the stati moment Calulate the stati moment M' [ftlbf]. Chek the allowable moment M'a [ftlbf]. Allowable kineti energy E'a [ftlbf] [Table 2] E'a0.0811 Note: If W'a exeeds W'max in the Table 2, use W'max in the ase. 1 W' E' 2 Impat speed V'1.5 V'a Corretion oeffiient (as a guide) Allowable kineti energy E'a [ftlbf] [Table 2] Kineti energy E' Allowable kineti energy E'a L'nA'n M'W' 12 Moment enter orretion value A'n [Table 2] Allowable moment M'a [ftlbf] [Table 2] 2 V' 32.2 ( 12) ( ) 2 1 1.76 1.511.8 E' 0.0595 2 32.2 12 E'a0.0811 The seletion is satisfatory sine E' 0.05950.0811. Pithing Calulate M' P. 1.18.728 M' P1.76 0.280 12 A'.728 M'aP4.551 Yawing Calulate M' Y. 0.7870.591 M' Y1.76 0.2 12 A' 30.591 M'aY3.644 Z SLIDERS 5 6 Dynami moment Calulate the dynami moment M' D [ftlbf]. Chek the allowable moment M'a [ftlbf]. Chek the load ratio If the total sum of the load ratio does not exeed 1, then the seletion is satisfatory. L'nA'n M' DW ' 12 Moment enter orretion value A'n [Table 2] Allowable moment M'a [ftlbf] [Table 2] W' M' M' D 1 W'a M'a M'a Pithing Calulate M' DP. 1.18.728 M' DP1.76 0.280 12 A'.728 M'aP4.551 Yawing Calulate M' DY. M' DY1.76 0.7870.591 0.2 12 A' 30.591 M'aY3.644 W' M' P M' Y M' DP M' DY W'a M'aP M'aY M'aP M'aY 1.76 0.280 0.2 0.280 0.2 2.40 4.551 3.644 4.551 3.644 0.971 As shown by the above alulation, the seletion is satisfatory. 946

Sizing Guide [Table 2] Item Code Unit ZS6 ZS ZS16 ZS ZS25 Allowable kineti energy Maximum allowable load weight Moment enter orretion value Allowable moment E'a W'max A' 1 A' 2 A' 3 M'aP M'aY M'aR ftlbf lbf. in. in. in. ftlbf ftlbf ftlbf Figure 2 Overhang distane L'n [in.], and moment enter orretion value A'n [in.] Pithing Yawing Rolling ' ' ' ' ' ' ' ' ' ' Stati moment ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' Dynami moment ' ' ' ' Stati moment :Moment due to load weight Dynami moment :Moment generated when stoppers ollide Code table V' in./se. V'a in./se. W' lbf. W'a lbf. W'max lbf. L'nn13 in. Impat speed Average ylinder speed Load weight Allowable load weight Maximum allowable load weight Overhang distane A'nn13 in. E' ftlbf E'a ftlbf M'M' P, M ' Y, M ' R ftlbf M' DM ' DP, M ' DY, M ' DR ftlbf M'aM'aP, M'aY, M'aR ftlbf Moment enter orretion value Kineti energy Allowable kineti energy Stati moment Dynami moment Allowable moment 947

Plate and Table Auray Parallelism of the table surfae and perpendiularity of the plate surfae with regard to the mounting surfae are shown in the diagram below. Y A X A A Traveling parallelism of the table with regard to the mounting surfae is shown in the diagrams below. Z SLIDERS Cylinder Thrust Load When arrying a load, the load should be the maximum allowable load mass or below, and set the load ratio (load ratio Calulated value ), where the alulated values are shown in the table, to 50% or less when the mounting diretion is vertial, and to 70% or less when the mounting diretion is horizontal. N [lbf.] Bore size Rod diameter Operation Pressure Air pressure MPa [psi.] area diretion mm 2 [in. 2 ] 0.15 [22] 0.2 [29] 0.3 [44] 0.4 [58] 0.5 [73] 0.6 [87] 0.7 [2] 6 [0.236] 3 [0.118] Push side 56 [0.087] 8.4 [1.89] 11.2 [2.52] 16.8 [3.78] 22.4 [5.04] 28.0 [6.29] 33.6 [7.55] 39.2 [8.81] Pull side 42 [0.065] 6.3 [1.42] 8.4 [1.89] 12.6 [2.83] 16.8 [3.78] 21.0 [4.72] 25.2 [5.66] 29.4 [6.61] [0.394] 5 [0.197] Push side 157 [0.243] 23.6 [5.31] 31.4 [7.06] 47.1 [.59] 62.8 [14.12] 78.5 [17.65] 94.2 [21.18] 9.9 [24.71] Pull side 117 [0.181] 17.6 [3.96] 23.4 [5.26] 35.1 [7.89] 46.8 [.52] 58.5 [13.15] 70.2 [15.78] 81.9 [18.41] 16 [0.630] 6 [0.236] Push side 402 [0.623] 60.3 [13.56] 80.4 [18.07] 1.6 [27.11] 160.8 [36.15] 1.0 [45.18] 241.2 [54.22] 281.4 [63.26] Pull side 345 [0.535] 51.8 [11.64] 69.0 [15.51] 3.5 [23.27] 138.0 [31.02] 172.5 [38.78] 7.0 [46.53] 241.5 [54.29] [0.787] 8 [0.315] Push side 628 [0.973] 94.2 [21.18] 125.6 [28.23] 188.4 [42.35] 251.2 [56.47] 314.0 [70.59] 376.8 [84.70] 439.6 [98.82] Pull side 527 [0.817] 79.1 [17.78] 5.4 [23.69] 158.1 [35.54] 2.8 [47.39] 263.5 [59.23] 316.2 [71.08] 368.9 [82.93] 25 [0.984] [0.394] Push side 981 [1.521] 147.2 [33.09] 196.2 [44.11] 294.3 [66.16] 392.4 [88.21] 490.5 [1.26] 588.6 [132.32] 686.7 [154.37] Pull side 824 [1.277] 123.6 [27.79] 164.8 [37.05] 247.2 [55.57] 329.6 [74.09] 412.0 [92.62] 494.4 [111.14] 576.8 [129.66] 948

Z SLIDERS Symbols Bore Size and Stroke Standard Speifiations With end keep mm Bore size 6 16 25 Standard strokes,, 30, 40, (50, 60, 70),, 30, 40, 50, (60, 70, 80, 90, 0),, 30, 40, 50, (60, 70), 80, (90, 0),, 30, 40, 50, (60, 70), 80, (90, 0),, 30, 40, 50, (60, 70), 80, (90, 0) Maximum available stroke 70 0 1 150 150 Note: Figures in parentheses ( ) are for made to order produts. For speifiation and delivery, onsult us. Standard Model Item ZS6 ZS ZS16 ZS ZS25 Bore size 6 [0.236] [0.394] 16 [0.630] [0.787] 25 [0.984] Stroke tolerane 1 0.039 0[ 0.039 ] Operation type Media Operating pressure range MPa [psi.] Double Ating Type Air 0.150.7 [222] Proof pressure MPa [psi.] 1.05 [152] Operating temperature range C [ F] 060 [32140] Operating speed range mm/s [in./se.] 50500 [2.019.7] Cushion Standard Rubber bumper Options Shok absorber Lubriation Cylinder portion Not required (If lubriation is required, use Turbine Oil Class 1 [ISO VG32] or equivalent.) Guide portion Not required (If lubriation is required, use lithium soap-based grease.) Repeatability Note 1 0.05 [0.002] Traveling parallelism Note 2 0.1 [0.004] (Up to standard maximum stroke 6: 40mm, : 50mm, 16,, 25: 80mm) Parallelism of table top surfae Note 2 0.2 [0.008] (Exeeds the standard maximum stroke, up to the maximum available stroke) Perpendiularity of plate surfae Note 2 Stroke Rubber stopper retrated side 50 [ 0.1970] adjusting Rubber stopper extended side 1 [ 0.47] 1 [ 0.4330] 140 [ 0.55] 130 [ 0.51] 170 [ 0.6690] range Note 3 Shok absorber retrated side 50 [ 0.1970] 1 [ 0.4330] 0 [ 0.3940] 70 [ 0.2760] Shok absorber extended side 1 [ 0.4330] 190 [ 0.7480] 180 [ 0.7090] 170 [ 0.6690] Maximum allowable load mass kg [lb.] 6.7 [14.8] 16.6 [36.6] 22.9 [50.5] 41.7 [91.9] 63.4 [139.8] Port size M50.8 R1/8 Notes: 1. For shok absorber with stroke adjusting braket type. (Not available for 6 [0.236in.]) 2. The datum is the ylinder body mounting surfae parallel to the table, and measured when no load and air pressure are applied. 3. For unit with stroke adjusting braket. (Shok absorber type is not available for 6 [0.236in.]) Z slider with buffer Model Item ZSG6 ZSG ZSG16 ZSG ZSG25 Bore size Operating speed range mm/s [in./se.] 50500 [2.019.7] (At horizontal: 50300 [2.011.8]) Buffer stroke [0.394] MAX. Remarks: 1. For speifiations not speified with-buffer Z sliders, use the standard speifiations. 2. If using Z slider with-buffer speifiation, see the Handling Instrutions and Preautions on p.943. 3. For Z slider with-buffer type stroke and spring fore, et., see the table on p.943. Note that the spring fore is set to the lowest level at shipping. 949 Z slider with end keep Model Item Bore size Operating pressure range MPa [psi.] Maximum holding fore at end keep N [lbf.] ZSK16 ZSK ZSK25 16 [0.630] [0.787] 25 [0.984] 0..7 [297] 96 [21.6] 151 [33.9] 235 [52.8] Baklash at end keep 1 [0.039] MAX. Remarks: 1. For speifiations not speified with-end-keep Z sliders, use the standard speifiations. 2. If using Z slider with-end-keep speifiation, see the Handling Instrutions and Preautions on p.942. 3. The operating life at maximum holding fore is 0.5million yles.

Shok Absorber Speifiations Item Model KSHA55-D KSHA68-F KSHA78-G KSHA78-K Appliable ylinder ZS ZS16 ZS ZS25 Maximum absorption Note J [ftlbf] 1.0 [0.74] 2.9 [2.14] 3.9 [2.88] 5.9 [4.35] Absorbing stroke Maximum impat speed m/s [ft./se.] Maximum operating frequeny yle/min Spring return fore N [lbf.] 3.9 [0.88] 6.5 [1.46] Angle variation 1 or less 3 or less Operating temperature range C [ F] Mass g [oz.] Note: Do not exeed the Z Slider maximum speed, even when it is within the shok absorber s absorption range. Remarks: 1. Do not loosen the small srew on the rear end of the shok absorber. The oil inside will leak out, whih will fail the funtion of the shok absorber. 2. The life of shok absorber may vary from the Z Slider, depending on its operating onditions. 3. For details about the shok absorber, see the General Catalog of Air Treatment, Auxiliary, and Vauum. Order Codes ZS G 6Å - MS 2 - ZE1 A 1 00W Z Slider double ating type Operation Blank : Standard ylinder G : Cylinder with buffer K : Cylinder with end keep Note 1 BB : Symmetrial ylinder Bore size Stroke Stroke adjusting mehanism Blank : No stroke adjustment RS SS : With shok absorber Note 2 : With rubber stopper Notes: 1. The end keep mehanism is available in 1625 head side only. 2. Not mountable on the 6 size. 3. Not available with both-end and extended side mm stroke ylinders. 4. For ylinders with end keep, stroke adjustment annot be performed on the retrated side. 5. The lead wire of sensor swithes is a vertial type. Order odes for options only Stroke adjusting braket set Note 4 S 2 - ZS 6 Stroke adjusting position 2 : Both ends (with 2 units) Note 2 F : Extended end (with 1 unit) R : Retrated end (with 1 unit) Note 2 Cylinder basi model Stroke adjusting position Note 3 2 : Both ends (with 2 units) Note 4 F : Extended end (with 1 unit) R : Retrated end (with 1 unit) Note 4 Bore size 6 : For 6 [0.236in.] : For [0.394in.] 16 : For 16 [0.630in.] : For [0.787in.] 25 : For 25 [0.984in.] Stroke adjusting braket set Note 1 Notes: 1. Extended side stroke adjustment annot be performed on the mm stroke. 2. For ylinders with end keep, stroke adjustment annot be performed on the retrated side. 3. For the ontents of a set, see the table to the right. 4. The sets do not inlude a shok absorber or rubber stopper. Number of sensor swithes 1 : With 1 sensor swith 2 : With 2 sensor swithes 3 : With 3 sensor swithes Lead wire length A : 00mm [39in.] B : 3000mm [118in.] Sensor swith Blank : No sensor swith ZE1 : Reed swith type without indiator lamp Horizontal lead wire DC528V, AC85115V ZE2 : Reed swith type with indiator lamp Horizontal lead wire DC28V, AC85115V ZE1 : Reed swith type without indiator lamp Vertial lead wire Note5 DC528V, AC85115V ZE2 : Reed swith type with indiator lamp Vertial lead wire Note5 DC28V, AC85115V ZE135 : 2-lead wire Solid state type with indiator lamp Horizontal lead wire DC28V ZE155 : 3-lead wire Solid state type with indiator lamp Horizontal lead wire DC4.528V ZE235 : 2-lead wire Solid state type with indiator lamp Vertial lead wire Note5 DC28V ZE255 : 3-lead wire Solid state type with indiator lamp Vertial lead wire Note5 DC4.528V For details of sensor swithes, see p.1544. Set ontents Item Model Braket A Braket A mounting bolt Braket B Braket B mounting bolt Stopper A Stopper A mounting bolt Stopper B Stopper B mounting bolt S2 SF SR p. Z SLIDERS Shok absorber single unit Bore size 6 [0.236in.] [0.394in.] KSHA55-D 16 [0.630in.] KSHA68-F [0.787in.] KSHA78-G 25 [0.984in.] KSHA78-K Remarks: 1. For details of the shok absorbers, see Shok Absorbers KSHA Series in the General Catalog of Air Treatment, Auxiliary, Vauum. 2: The set onsists of the shok absorber body and mounting nuts. Rubber stopper single unit Bore size 6 [0.236in.] CRK570 [0.394in.] CRK571 16 [0.630in.] CRK572 [0.787in.] CRK573 25 [0.984in.] CRK574 Remark: The set onsists of the rubber stopper body and mounting nuts. 950

Options (Stroke Adjusting Mehanism) Caution: When mounting the stroke adjusting braket, use the reommended tightening torque on p.942. Parts names are as shown below. Stopper A Note Stopper B Braket A Rubber stopper Shok absorber Note: When mounting Braket A, plae Stopper B between Braket A and the Z Slider body for assembly. Braket B Rubber stopper Shok absorber Remark: When assembling Stopper B and Brakets A and B, assemble arefully to avoid interferene between parts. Mass Body mass Bore size Zero stroke mass Additional mass for eah mm [0.394in.] Additional mass of buffer g [oz.] Additional mass of end keep 6 [0.236] [0.394] 16 [0.630] [0.787] 25 [0.984] 85 [3.00] 170 [6.00] 323 [11.39] 577 [.35] 973 [34.32] Additional mass for options Bore size Additional mass of stroke adjusting braket -S2 -SF -SR Additional mass of 1 adjusting bolt Additional mass of 1 shok absorber g [oz.] Additional mass of 1 sensor swith Lead wire 00mm [39in.] Lead wire 3000mm [118in.] 6 [0.236] [0.394] 16 [0.630] [0.787] 25 [0.984] Calulation example) For ZSGK1640-RSF-ZE1A2 695 951

Inner Constrution of Standard Cylinder Diagrams show 16 [0.630in.]. Note Major Parts and Materials Parts Materials q w e r t y u i o!0!1!2!3 Body Guide Piston Housing Bumper A Piston rod Bolt Support Plate Table Seal holder Plug End plate 6 [0.236in.] Aluminum alloy (anodized) Stainless steel Aluminum alloy (speial rust prevention treatment) Aluminum alloy (speial wear-resistant treatment) Syntheti rubber (NBR) Stainless steel Stainless steel or steel (nikel plated) Aluminum alloy (speial rust prevention treatment) Speial aluminum alloy (anodized) Aluminum alloy (anodized) Aluminum alloy (speial rust prevention treatment) Mild steel Plasti!4!5!6!7!8!9 @0 @1 @2 @3 @4 @5 @6 @7 Bumper B Magnet Bolt retainer Sleeve Steel ball Rod seal Piston seal Seal O-ring Snap ring Washer Joint nut A Joint nut B Rod over Syntheti rubber (NBR) Sintered alloy magnet Mild steel (nikel plated) Mild steel (nikel plated) Stainless steel Syntheti rubber (NBR) Syntheti rubber (NBR) Syntheti rubber (NBR) Syntheti rubber (NBR) Mild steel (nikel plated) Steel (nikel plated) Mild steel (nikel plated) Mild steel (nikel plated) Aluminum alloy (speial wear-resistant treatment) and 25 [0.787, 0.984in.] Note: This onave portion is not available for stroke. Remarks Only 6 [0.236in.]16 [0.630in.] Hard hrome plated for only 16 [0.236in.]25 [0.984in.] 6 [0.236in.]: Aluminum alloy (anodized) Only 6 [0.236in.]16 [0.630in.] 6 [0.236in.]16 [0.630in.]: Nikel plated [0.787in.], 25 [0.984in.]: Zin plated 6 [0.236in.]: Aluminum alloy (anodized) 25 [0.984in.]: Urethane Baked on mild steel (only 6 [0.236in.]16 [0.630in.]) Only 6 [0.236in.]25 [0.984in.] Only [0.787in.] and 25 [0.984in.] Z SLIDERS 952

Inner Constrution of Cylinder with Buffer and End Keep Mehanism Diagrams show 16 [0.630in.]. With buffer With end keep Major Parts and Materials Parts Materials q w e r t y u i Buffer spring Plate Sub-plate Washer Snap ring Pin Sleeve Head over Stainless steel Aluminum alloy (anodized) Speial aluminum alloy (anodized) Aluminum alloy (anodized) Mild steel (nikel plated) Stainless steel (heat treated) Aluminum alloy (anodized) Aluminum alloy (anodized) o!0!1!2!3!4!5!6 Cover Piston rod Lok end Lok piston seal Lok piston Lok spring O-ring Srew Parts Materials Aluminum alloy (anodized) Stainless steel (hard hrome plated) Steel (heat treated) Syntheti rubber (NBR) Steel (heat treated) Stainless steel Syntheti rubber (NBR) Mild steel (zin plated) Inner Constrution of Cylinder with Stroke Adjusting Mehanism Diagrams show 16 [0.630in.]. Major Parts and Materials Parts Materials 953 Note With shok absorber With rubber stopper Note: Not available for stroke mm. Remark: The ombinations shown here are not available in order ode. q w e r t y u i o Braket A Braket B Adjusting bolt Stopper A Stopper B Bumper Bolt Nut Shok absorber Mild steel (nikel plated) Aluminum alloy (anodized) Mild steel (nikel plated) Steel (nikel plated) Steel (nikel plated) Syntheti rubber (NBR) Stainless steel, steel (nikel plated) Mild steel (zin plated)

6 [0.236in.] Dimensions (mm) Standard ylinder ZS6 Stroke 4-M40.7 Depth6 2-M30.5.5 2-M50.8 (Connetion port with plug) F-M40.7 Depth6 E-3.3 (Through hole for M3) Counterbore depth 2-M30.5 Depth5.5 2-M50.8 (Connetion port) Mounting groove for stroke adjusting mehanism (Not available for stroke.) Z SLIDERS E-M40.7 Depth6 Depth Code Stroke 30 40 (50) (60) (70) Note: Strokes in parentheses ( ) are made to order produts. Symmetrial ylinder ZSBB6 Stroke Remark: The sensor mounting loation, onnetion port, and stopper position are on the opposite side with respet to the body enter line in relation to the standard ylinder shown above. Connetion port 954

6 [0.236in.] Dimensions (mm) For dimensions not shown in the drawings below, see the Standard Cylinder. Cylinder with buffer ZSG6 Stroke Buffer spring Return fore adjusting portion Buffer spring MAX. (Buffer stroke) Cylinder with rubber stopper ZS6 Stroke -RS2 (Stroke) For extended side stroke end For retrated side stroke end 955

[0.394in.] Dimensions (mm) Standard ylinder ZS Stroke 4-M40.7 Depth8 2-M30.5 Depth6 (Connetion port with plug) F-M40.7 Depth8 E-3.3 (Through hole for M3) Counterbore depth 13 Depth 2-M50.8 (Connetion port) Mounting groove for stroke adjusting mehanism (Not available for stroke.) Z SLIDERS E-M40.7 Depth6 Code Stroke 30 40 50 (60) (70) (80) (90) (0) Note: Strokes in parentheses ( ) are made to order produts. Symmetrial ylinder ZSBB Stroke Remark: The sensor mounting loation, onnetion port, and stopper position are on the opposite side with respet to the body enter line in relation to the standard ylinder shown above. Connetion port 956

[0.394in.] Dimensions (mm) For dimensions not shown in the drawings below, see the Standard Cylinder. Cylinder with buffer ZSG Stroke Buffer spring Return fore adjusting portion MAX. (Buffer stroke) Buffer spring Cylinder with rubber stopper ZS Stroke -RS2 (Stroke) For extended side stroke end For retrated side stroke end Cylinder with shok absorber ZS Stroke -SS2 (Stroke) For extended side stroke end For retrated side stroke end 957

16 [0.630in.] Dimensions (mm) Standard ylinder ZS16 Stroke 4-M50.8 Depth8 2-M40.7 Depth6.5 2-M50.8 (Connetion port with plug) F-M50.8 Depth E-4.2 (Through hole for M4) Counterbore depth16 2-M40.7 Depth8 2-M50.8 (Connetion port) Mounting groove for stroke adjusting mehanism (Not available for stroke.) Z SLIDERS E-M50.8 Depth7 Depth Depth Stroke 30 40 50 (60) (70) 80 (90) (0) Code 24 34 44 54 64 74 84 94 4 Note: Strokes in parentheses ( ) are made to order produts. Symmetrial ylinder ZSBB16 Stroke Remark: The sensor mounting loation, onnetion port, and stopper position are on the opposite side with respet to the body enter line in relation to the standard ylinder shown above. Connetion port 958

16 [0.630in.] Dimensions (mm) For dimensions not shown in the drawings below, see the Standard Cylinder. Cylinder with buffer ZSG16 Stroke Cylinder with end keep ZSK16 Stroke Buffer spring Return fore adjusting portion Buffer spring MAX. (Buffer stroke) Opening for manual override M30.5 Cylinder with rubber stopper ZS16 Stroke -RS2 (Stroke) For extended side stroke end For retrated side stroke end Cylinder with shok absorber ZS16 Stroke -SS2 (Stroke) For extended side stroke end For retrated side stroke end 959

[0.787in.] Dimensions (mm) Standard ylinder ZS Stroke 4-M61 Depth12 2-M50.8 Depth8 2-R1/8 (Connetion port with plug) (Connetion port) F-M61 Depth12 (Through hole for M5) Counterbore depth 2-M50.8 Depth8 Depth Depth Mounting groove for stroke adjusting mehanism (Not available for stroke.) Z SLIDERS E-M61 Depth9 Stroke 30 40 50 (60) (70) 80 (90) (0) Code Note: Strokes in parentheses ( ) are made to order produts. Symmetrial ylinder ZSBB Stroke Remark: The sensor mounting loation, onnetion port, and stopper position are on the opposite side with respet to the body enter line in relation to the standard ylinder shown above. Connetion port 960

[0.787in.] Dimensions (mm) For dimensions not shown in the drawings below, see the Standard Cylinder. Cylinder with buffer ZSG Stroke Cylinder with end keep ZSK Stroke Buffer spring Return fore adjusting portion Buffer spring MAX. (Buffer stroke) Opening for manual override Cylinder with rubber stopper ZS Stroke -RS2 (Stroke) For extended side stroke end For retrated side stroke end Cylinder with shok absorber ZS Stroke -SS2 (Stroke) For extended side stroke end For retrated side stroke end 961

25 [0.984in.] Dimensions (mm) Standard ylinder ZS25 Stroke 4-M81.25 Depth12 2-M61 Depth9 2-R1/8 (Connetion port with plug) F-M81.25 Depth15 E-6.6 (Through hole for M6) Counterbore depth22.5 2-M61 Depth 2-R1/8 (Connetion port) Mounting groove for stroke adjusting mehanism (Not available for stroke.) Z SLIDERS E-M81.25 Depth12 Stroke 30 40 50 (60) (70) 80 (90) (0) Code Note: Strokes in parentheses ( ) are made to order produts. Symmetrial ylinder ZSBB25 Stroke Remark: The sensor mounting loation, onnetion port, and stopper position are on the opposite side with respet to the body enter line in relation to the standard ylinder shown above. Connetion port 962

25 [0.984in.] Dimensions (mm) For dimensions not shown in the drawings below, see the Standard Cylinder. Cylinder with buffer ZSG25 Stroke Cylinder with end keep ZSK25 Stroke Buffer spring Return fore adjusting portion Buffer spring MAX. (Buffer stroke) Opening for manual override Cylinder with rubber stopper ZS25 Stroke -RS2 (Stroke) For extended side stroke end For retrated side stroke end Cylinder with shok absorber ZS25 Stroke -SS2 (Stroke) For extended side stroke end For retrated side stroke end 963

SENSOR SWITCHES Solid State Type, Reed Swith Type Symbol Order Codes Sensor swith ZE135 ZE235 ZE1 ZE1 ZE155 ZE255 ZE2 ZE2 - ZS Lead wire length A B For details of sensor swithes, see p.1544. Series ZSZ Slider Z SLIDERS 964

Minimum Cylinders Strokes when Using Sensor Swithes Moving Sensor Swith Solid state type mm Bore size 2 ps. mounting 1p. mounting 6 [0.236] Note 1 Top surfae mounting Side mounting 5 Top surfae mounting Side mounting 5 [0.394] Note 2 5 5 1625 [0.6300.984] 5 Reed swith type mm Bore size 2 ps. mounting 1p. mounting 6 [0.236] Note 1 Top surfae mounting Side mounting Top surfae mounting Side mounting 5 [0.394] Note 2 5 1625 [0.6300.984] Notes: 1. There is no sensor mounting groove on the top surfae of the 6. 2. Sine only 1 sensor mounting groove is on the top surfae of the size, this ase assumes that 2 sensor swithes have been mounted in the single groove faing lead wires outward. Loosening the mounting srew allows the sensor swith to be moved along the swith mounting groove of the ylinder body. Tighten the mounting srew with a tightening torque of 0.1 0.2N m [0.91.8in lbf]. Overtightening ould damage the sensor swith and atuator. Sensor Swith Operating Range, Response Differential, and Maximum Sensing Loation Operating range: R The distane the piston travels in one diretion, while the swith is in the ON position. Response differential: C The distane between the point where the piston turns the swith ON and the point where the swith is turned OFF as the piston travels in the opposite diretion. Solid state type Item Bore 6 [0.236] [0.394] 16 [0.630] [0.787] 25 [0.984] Operating range: R Response differential :C Maximum sensing loation Note Remark: The above table shows referene values. Note: This is the length measured from the swith s opposite end side to the lead wire. Reed swith type Item Bore 6 [0.236] [0.394] 16 [0.630] [0.787] 25 [0.984] Operating range: R Response differential :C Maximum sensing loation Note 2.53.5 2.54.0 [0.0980.138] [0.0980.157] 6 [0.236] 2.04.5 [0.0790.177] 1.0 [0.039] or less 1.2 [0.047] or less 4.57.5 [0.1770.295] 6.58.5 [0.2560.335] 1.5 [0.059] or less [0.394] Remark: The above table shows referene values. Note: This is the length measured from the swith s opposite end side to the lead wire. 2.55.5 [0.0980.217] 1.5 [0.059] or less 6.08.0 7.09.5 [0.2360.315] [0.2760.374] C (Response differential) R R C (Response differential) Maximum sensing loation Mounting Loation of End of Stroke Detetion Sensor Swith When the sensor swith is mounted in the loations shown below, the magnet omes to the maximum sensing loation of the sensor swith at the end of the stroke. Solid state type (ZE135, ZE155, ZE235, ZE255) Code Bore 6 [0.236] [0.394] A B C D 6.25 [0.246] 28.75 [1.132] 18.25 [0.719] 16.75 [0.659] 9.25 [0.364] 37.75 [1.486] 21.25 [0.837] 25.75 [1.014] 16 [0.630] 11.5 [0.453] 48.5 [1.909] 23.5 [0.925] 36.5 [1.437] [0.787] 13.6 [0.535] 55.4 [2.181] 25.6 [1.008] 43.4 [1.709] 25 [0.984] 17.0 [0.669] 72.0 [2.835] 29.0 [1.142] 60.0 [2.362] 965 A C B D Reed swith type (ZE1, ZE2, ZE1, ZE2) Code Bore 6 [0.236] [0.394] A B C D 2.25 [0.089] 32.75 [1.289] 22.25 [0.876] 12.75 [0.502] 5.25 [0.7] 41.75 [1.644] 25.25 [0.994] 21.75 [0.856] 16 [0.630] 7.5 [0.295] 52.5 [2.067] 27.5 [1.083] 32.5 [1.280] [0.787] 9.6 [0.378] 59.4 [2.339] 29.6 [1.165] 39.4 [1.551] 25 [0.984] 13.0 [0.512] 76.0 [2.992] 33.0 [1.299] 56.0 [2.5] A: Extended side mounting loation (when lead wire is pulled out to head side) B: Retrated side mounting loation (when lead wire is pulled out to head side) C: Extended side mounting loation (when lead wire is pulled out to rod side) D: Retrated side mounting loation (when lead wire is pulled out to rod side) Note: The sensor swith mounting loation is the distane between the main body end surfae and the sensor swith end surfae opposite to the lead wire side.