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Vapor pumps Vapor pumps for scientific instruments and R&D applications Diffusion pumps Standard diffstak 7 Cryo cooled diffstak 4 Unvalved diffstak 45 Diffstak installation 49 Diffstak combined outfits 5 Vapor pumps for TV display and monitor pumping TV water cooled diffusion pump 55 TVA5/6 air cooled diffusion pump 56 TVW5/6 water cooled diffusion pump 57 Diffstak 6 for TV tube applications 5 Grippers (compression heads) for TV tube applications 59 9 Vapor pumps for industrial applications HT high throughput diffusion pump 6 HT6 high throughput diffusion pump 6 HT high throughput diffusion pump 65 EO5 high throughput diffusion pump 67 B4A vapor booster pump 69 B5M vapor booster pump 7 Accessories 7 shop online: www.bocedwards.com The dimension drawings in this section display both metric and imperial measurements. Imperial measurements are shown in brackets.

VAPOR PUMPS HT high throughput vapor pump BOC Edwards vapor pumps suit the widest range of applications, as we offer the most comprehensive range of pumps and accessories available from any supplier. Our compact scientific pumps are designed for instrument and general R & D applications. Our industrial, high throughput diffusion pumps and vapor booster pumps fulfil the requirements of applications like vacuum metallurgy, distillation and coating. And we also offer a dedicated range of pumps for TV tube pumping. By matching the pump of your choice with appropriate accessories, we offer a complete high vacuum pumping solution for all applications. Pumping speed and throughput The pumping speed (volume flowrate) of a vapor pump is the volume of gas and vapor passing through the inlet of the pump in one second. The unit of measurement is l s -. The throughput (mass flowrate) is the mass of gas passing through the pump in one second and is measured in mbar l s -. The throughput of the pump is the same at the pump inlet and pump outlet. At a given pressure, pumping speed (S) and throughput (Q) are related by the simple equation: Q P S, where P is the pressure. You can use this equation to convert between pumping speed and throughput measurements. Below about - mbar, pumping speed is the most convenient measure of the pump's performance. At these pressures, the pumping speed is proportional to the diameter of the pump inlet: a large pump is required to obtain higher pumping speeds. Above about - mbar, the pump's throughput is most often used to characterize its performance. At these pressures, the performance of the pump is affected by its internal construction as well as its overall size. To choose the best type of vapor pump for your application, you must define the operation pressure and the pumping speed (or throughput) requirement of your application and match these to the performance characteristics of our range of vapor pumps. Remember that, when you calculate the required pumping speed, you must include provision for the process gas throughput, the outgassing of the vacuum system and the leakage into the system. You may also have to consider how quickly you want to achieve the operation pressure. Measurement methods The methods used to measure pressure and flow have become more accurate in recent years allowing much tighter controls over system conditions. The speeds and throughputs quoted in the catalog for the HT diffusion pumps are based on actual pump data derived from measurements made with the latest technology total pressure gauges and mass flow transducers in accordance with ISO standards. Some confusion could arise with previously published speed and throughput figures for older designed pumps where, historically, pressure measurements were made with partial pressure gauges like the McLeod gauge. This older gauge can indicate speeds up to % higher than that expected using state of the art total pressure gauges. Further confusion could arise from the measurement standards chosen to determine pumping performance. In the case of AVS (American Vacuum Society), this can indicate speeds and throughput up to 5% higher than ISO figures. Historical industry practice meant that in considering the above, and potential gauge accuracy of ± 5%, it was possible to have speeds quoted 6% higher than might be expected using modern total pressure measurement equipment. This should be carefully considered when comparing specifications for older derived data published for similarly sized competitor pumps and the BOC Edwards HT diffusion pumps. Ultimate vacuum The ultimate vacuum of a vapor pump is the lowest pressure achieved in tests on the pump, measured above the inlet of the pump (or above the high vacuum valve for the Diffstaks). The ultimate vacuum depends on: the type of fluid used in the pump; the temperature of the inlet baffle; the amount of outgassing from the vacuum system; and the amount of leakage into the system. Critical backing pressure The critical backing pressure is the highest pressure that a pump can tolerate in the backing line. If the pressure is higher than the critical backing pressure, the pump may stall. The critical backing pressure depends on: the pump design; the power of the heaters; and the fluid used in the vapor pump. Backstreaming Backstreaming is the direct movement of molecules of pump fluid vapor from the pump toward the vacuum system. All BOC Edwards pumps are specially designed to minimize backstreaming; the pumps have a guard ring (sometimes called a cool-cap) fitted above the top jet. The guard ring condenses vapor molecules moving from the top jet toward the vacuum system. In some sensitive applications, backstreaming may be very undesirable; you can minimize backstreaming if you fit a baffle or a trap to the top of the pump. Accessories Accessories for vapor pumps include thermal snap-switches, baffles, traps and special isolation valves. For our new range of HT pumps we also offer a thermal probe to measure the pump temperature, a heat shield to protect you from the hot surfaces of the pump base and an inlet baffle to reduce backstreaming. Baffles (fitted between the pump and the vacuum system) are used to reduce the amount of pump fluid vapor backstreaming into your vacuum system. Liquid nitrogen cooled traps are positioned above the vapor pump inlet and trap condensable vapors from both the vacuum system and from the pump itself. Traps therefore reduce the vapor load on the pump and reduce backstreaming. For North American orders shop online: www.bocedwards.com or call: --4-9

VAPOR PUMPS FOR SCIENTIFIC INSTRUMENTS, R&D AND TV DISPLAY INDUSTRY Scientific and R & D applications require special vapor pumps and accessories. It is important to minimize any backstreaming of the vapor pump fluid, and the number of elastomer seals used in system design needs to be kept to a minimum, to give clean pumping with minimal outgassing. For benchtop or transportable instruments, compact air-cooled pumps are essential. BOC Edwards offers a range of vapor pumps and accessories which are designed to meet these needs. EO5/6 diffusion pump The EO5/6 is a compact, fast warm-up, air-cooled diffusion pump and makes a good choice for small, low-cost systems. The high helium pumping speed from a pump only 76 mm high is a particular benefit for GCMS applications. SI diffusion pump For enhanced performance, the SI produces even higher pumping speeds for light gases and incorporates an integral Peltier baffle to give extremely low levels of backstreaming. The test rig for SI pumps ensures BOC Edwards stringent product reliability standards are maintained. EO diffusion pumps BOC Edwards EO range of rugged standard diffusion pumps are fully fractionating pumps which are ideal in many demanding scientific and R&D pumping applications. They comprise three pumps: EOK, EO4K and EO6K. All three are available as water-cooled and the EOK is also offered as an air-cooled pump. Diffstak vapor diffusion pumps The patented, compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Diffstak design has been proven over many years with thousands of pumps installed. They are supplied in three types: standard, cryo-cooled and unvalved. (C - collar model pumps). The standard Diffstak pumps have integral high vacuum valves and watercooled baffles. The cryo-cooled versions (CR - model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. Valves on both versions are supplied as either manually operated (M-model pumps) or pneumatically operated (P-model pumps). When comparing pumping speeds, note that the speeds quoted for valved Diffstaks are the speeds above the high vacuum valve, taking full account of the valve's impedance. Standard Diffstaks 6/5P, 6/7P and /P The unvalved Diffstaks are for systems requiring the highest possible ultimate vacuum or for those which do not need a high vacuum valve. All sizes are available with ISO flanges while two sizes are also available with CF flanges. (F - ConFlat model pump). The complete range is shown in the table below. Refer to the following pages for full technical data for each of the pumps and also for full details of installations, spares and accessories. STANDARD CRYO-COOLED UNVALVED DIFFSTAK DIFFSTAK DIFFSTAK ISO FLANGE CF FLANGE 6/5M or P CR6/5M or P 6/5C - /M or P CR/M or P /C /F 6/7M or P CR6/7M or P 6/7C 6/7F 5/M or P CR5/M or P 5/C - Fast cycling on unvalved systems For fast cycling pumping systems we recommend our TV range of water or air-cooled pumps. Primarily designed for the evacuation of cathode ray tubes, they will also suit other fast cycling pumping applications (see page 55). APPLICATIONS Mass spectrometry Gas analysis Leak detection Thin film coating High vacuum systems Lamp evacuation Surface physics Small vacuum ovens Vacuum isolation/cryo transfer VAPOR PUMPS For North American orders shop online: www.bocedwards.com or call: --4-9

EO5/6 AIR COOLED DIFFUSION PUMP ls - 7 6 5 4 EO5/6-5 -4 - - - mbar - - Pa - DC74EU Santovac 5 4 (.6) 54 (.) 76 (.99) 6 (.6) 76 (6.9) 54 (.6) (.) The model EO5/6 is a compact, fast warm-up air-cooled diffusion pump supplied complete with high integrity inlet Co-Seal, flange clamping ring and optional baffle. The jet assembly is removable for easy cleaning. It meets the need for a low-cost, high vacuum pump for use in desk top or mobile scientific instruments, leak detectors, and general laboratory applications. In many applications the rapid warm-up capability will enable the EO5/6 to be used without an isolation valve. However, the pump is not intended for use on valveless systems where rapid cycling from atmospheric pressure through the hot pump is required. BOC Edwards offers the TV range of diffusion pumps for these applications. Pumping speed Air 6 l s - (7 l s - baffled) Hydrogen 7 l s - (5 l s - baffled) Fluid charge ml Recommended fluid Santovac 5, Silicone DC74EU Minimum backing pump displacement m h - EM.5 Inlet connection NW5 flange Backing connection NW flange W or 5 W Warm-up time 4 min kg Minimum cooling air flow 4.5 m h - CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5 - Silicone DC7. 5-6 Silicone DC74EU. 5-7 Silicone DC75.6 5-7 EO5/6 pump, 5/6 Hz, single phase Pump voltage Fan voltage 9 V (.5 kw) 5 V B-7-9 -5 V (. kw) 5 V B-7- V (.5 kw) V B-7- -5 V (. kw) V B-7- -5V (. kw) V B-7-4 Supplied with: NW5 combined baffle and centering-ring, NW5 centering-ring and O ring, NW5 clamp and NW Co-Seal and clamp. NW 9 (.5) 4 (5.59) NW5 Heater (. kw) -5 V H7-7-6-5 V H7-7-6-5 V H7-7-6 Heater (.5 kw) 9 V H7-7-75 V H7-7-7 Inlet Co-Seal fluoroelastomer B7-5-466 Backing NW O ring assembly, nitrile C5--9 6 (.44) (.5) ACCESSORIES Pump ready thermal snap-switch Cooling fail thermal snap-switch Santovac 5 ( ml) Silicone DC74EU (5 ml) For valves, see page 4. For NW pipeline fittings, see page 45. For vapor pump fluids, see page 49. For North American orders shop online: www.bocedwards.com or call: --4-9 B-4- B79--6 H4-- H--4

SI DIFFUSION PUMP SI ls - 6 Santovac 5, helium 4-5 -4 - - - mbar - - - Pa 4 (.6) 5 (4.9). (7.9) 74. (.94) 7.5 (.) 6. (.5) 6. 74 (.9) (.7) 4 (.) The SI is a compact, fast warm-up, air cooled diffusion pump. The pump has an integral Peltier baffle. The design of the pump and Peltier baffle is optimized to give extremely low levels of backstreaming, while maintaining a high pumping speed for helium. The compactness, high compression ratios for light gases and air-cooled design mean that the SI is ideally suited for use in desk-top or mobile scientific instruments that require high pumping speed for helium and hydrogen. Pumping speed Helium l s - Nitrogen 65 l s - Argon 6 l s - Throughput at 4 - mbar RV backing pump.5 mbar l s - RV5 backing pump.7 mbar l s - Critical backing pressure (Santovac 5).4 mbar Ultimate pressure (Santovac 5) 5 - mbar Fluid charge ml Recommended fluid Santovac 5 Minimum backing pump displacement 5 m h - Inlet connection ISO compatible Backing connection NW6 W Warm-up time min 4. kg SI pump 9 V ac heater supply B44-5-9 V ac heater supply B44-5- Supplied with: Inlet flange screws (4), inlet O ring Inlet-baffle thermoelectric device E9-- Pump heater 9 V ac, 5 W H7-7-75 V ac, 5 W H7-7-7 Pump inlet O ring H-6-6 Inlet baffle O ring H-6-5 ACCESSORIES 4 (5.) 67 (.64) Cooling-fail thermal snap-switch Pump-ready thermal snap-switch Santovac 5 ( ml) 6 (.4) 59 (6.6) NW6 B79--6 B-4- H4-- VAPOR PUMPS For vapor pump fluids, see page 49. For North American orders shop online: www.bocedwards.com or call: --4-9

EOK DIFFUSION PUMP Ø. (5.) Ø77 (.) Ø. (5.) Ø77 (.) Ø (4.5) 9.7 (.69) Water cooled Air cooled (4.7) Ø4. (4.5) x Ø. (.5) 6 77 (.9) 74. (.9) (4.6) NW 5 (5.9) 77 (.9) 7 (.76) Ø (4.5) 5 (5.9) 9.6 (.6) NW (.44) Ø4. (4.5) x Ø. (.5) 4 Pumping speed (air) 5 l s - ISO 7 l s - AVS Pumping speed (hydrogen) l s - ISO Fluid charge 75 ml Minimum backing pump displacement for maximum throughput 5 m h - RV5 Inlet connection. holes on 4. PCD Backing connection NW flange Cooling water connection ¼in BSP Minimum cooling water flow at C 5 l h -.4 kw (water cooled) 4 kg (air cooled) 7 kg RV for many applications CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.4 5-7 Silicone DC7.9 5-6 Silicone DC74EU.6 5-7 Silicone DC75.45 5-7 ls - 5 5-9 Santovac 5 DC75 - DC74EU -7-6 DC7-5 -4 DC74EU DC75 Santovac 5 - DC7 EOK - mbar EOK water cooled -5 V -phase 5/6 Hz B4-9- -5 V -phase 5/6 Hz B4-9- -5 V -phase 5/6 Hz B4-9-4 EOK air cooled -5 V -phase 5/6 Hz B4-- -5 V -phase 5/6 Hz B4-- -5 V -phase 5/6 Hz B4--4 Supplied with: NW elbow, NW centering-ring, NW clamp, water pipe couplings and ferrules (water cooled pump only). Heater (.4 kw) -5 V H7-- -5 V H7--5-5 V H7-- Inlet Co-Seal ISO6 fluoroelastomer B7-5-5 Backing NW O ring assembly, nitrile C5--9 Drain plug O ring VITA (pack of 5) H-6-5 ACCESSORIES Cooling-fail thermal snap-switch Santovac 5 ( ml) Silicone DC7 (5 ml) Silicone DC74EU (5 ml) Silicone DC75 (5 ml) BOC Edwards L9 ( liter) B-- H4-- H4--7 H--4 H4--7 H5--5 For valves, see page 4. For NW pipeline fittings, see page 45. For vapor pump fluids, see page 49. -7-6 -5-4 - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

EO4K DIFFUSION PUMP Ø (7.9) Ø (5.4) 76 (4.) 5 (6.) 7 (7.) Ø5.5 (6.) (5.4) NW5 44 (.7) ISO6 (5.4) Pumping speed (air) 6 l s - ISO 6 l s - AVS Pumping speed (hydrogen) l s - ISO Fluid charge 75 ml Minimum backing pump displacement for maximum throughput 6.6 m h - RV or RV Inlet connection compatible with ISO6 Backing connection NW5 flange Cooling water connection ¼ in BSP Minimum cooling water flow at C 75 l h -.5 kw kg for very fast roughing flange internal diameter as shown CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5. 5-7 Silicone DC7. 5-6 Silicone DC74EU. 5-7 Silicone DC75.9 5-7 ls - 7 6 4-9 DC75 Santovac 5 L9 EO4K - DC74EU -7-6 DC7-5 DC74EU DC75 Santovac 5-4 DC7 - - mbar EO4K, -5V -phase 5/6 Hz B6-4- EO4K, -5V -phase 5/6 Hz B6-4- EO4K, -5V -phase 5/6 Hz B6-4-4 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules. Heater (.5 kw) -5 V H7--4-5 V H7--4-5 V H7--7 Inlet Co-Seal ISO6 fluorelastomer B7-5-74 Backing NW5 O ring assembly nitrile C5-4-9 Drain plug O ring VITA (pack of 5) H-6-5 ACCESSORIES QSB6 quarter swing valve, manual Rotatable flange 6 mm Cooling-fail thermal snap-switch Pump-ready thermal snap-switch Santovac 5 ( ml) Silicone DC7 (5 ml) Silicone DC74EU (5 ml) Silicone DC75 (5 ml) BOC Edwards L9 ( liter) B4-- C-- B-- B-4- H4-- H4--7 H--4 H4--7 H5--5 For valves, see page 4. For NW pipeline fittings, see page 45. For vapor pump fluids, see page 49. 5 VAPOR PUMPS -7-6 -5-4 - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

EO6K DIFFUSION PUMP Ø54 (.) Ø7 (7.) Ø99. (7.5) 46 (5.75) Ø.6 (9.) x Ø (.4) 6 (.6) (.6) 477 (.) 4 (7.4) (.) 47 (5.79) (7.95) (9.7) 5 (9.5) 6 Pumping speed (air) 5 l s - ISO 5 l s - AVS Pumping speed (hydrogen) l s - ISO Maximum throughput.5 mbar l s - Fluid capacity ml Minimum backing pump displacement m h - EM or EM Inlet connection. holes on.6 PCD Backing connection NW5 flange Cooling water connection!/ in BSP Minimum cooling water flow at C 75 l h -.5 kw kg for very fast roughing CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.4 5-7 Silicone DC7.9 5-6 Silicone DC74EU.6 5-7 Silicone DC75.5 5-7 ls - 5 4 6 4-6 Santovac 5.75 EO6K -5-4 - - - mbar -4 - - - Pa - mbar ls EO6K, -5 V -phase 5/6 Hz B-- EO6K, -5 V -phase 5/6 Hz B-- EO6K, -5 V -phase 5/6 Hz B--4 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules (One heater of each wattage required) Heater (. kw) -5 V H7--59-5 V H7--6-5 V H7--54 Heater (.5 kw) -5 V H7-- -5 V H7--7-5 V H7-- Inlet O ring VOR44 H-5-5 Backing NW5 O ring assembly nitrile C5-4-9 Drain plug O ring VIT4A (pack of 5) H-6-5 ACCESSORIES NW5 45 (.77) QSB5 quarter swing valve, manual B4-- Cooling-fail thermal snap-switch B-- Pump-ready thermal snap-switch B-4- Santovac 5 ( ml) H4-- Silicone DC7 (5 ml) H4--7 Silicone DC74EU (5 ml) H--4 Silicone DC75 (5 ml) H4--7 BOC Edwards L9 ( liter) H5--5 For valves, see page 4. For NW pipeline fittings, see page 45. For vapor pump fluids, see page 49. For North American orders shop online: www.bocedwards.com or call: --4-9

STANDARD DIFFSTAK 6/5M AND 6/5P 6 (4.7) (.) Ø (5.) 5 7 (4.) (.67) 4 x Ø9 (.5) x Ø (4.) 94 (.7) 5 (.97) 7 (.75) 65 5 (.56) (.5) (5.6) 6 (.5) Ø76 (.99) 5 (4.9) Diffstak 6/5M Standard Diffstak 6/5M Standard Diffstak 6/5P M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. Pumping speed nitrogen 5 l s - hydrogen l s - Minimum backing pump displacement 5 m h - RV5 Recommended fluid Santovac 5 Fluid charge (dry) 6 ml Inlet connection compatible with ISO6 Backing connection NW Cooling water connection 6 mm compression fittings.45 kw Minimum cooling-water flow at C 4 l h - Pneumatic connections 6 mm coupling x!/4 BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbfin - Maximum 6.9 bar / lbfin - 6/5M kg 6/5P 9 kg For maximum throughput. For applications where maximum throughput is not required, use an RV. 6/5P only CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 - - ls Diffstak 6/5P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak 6/5M -5 V -ph 5/6 Hz B44--976-5 V -ph 5/6 Hz B44--977-5 V -ph 5/6 Hz B44--97 Diffstak 6/5P -5 V -ph 5/6 Hz B44--976-5 V -ph 5/6 Hz B44--977-5 V -ph 5/6 Hz B44--97 Supplied with: NW elbow, NW centering-ring, NW clamp, water pipe couplings and ferrules, inlet ISO 6 Co-Seal 6 (4.7) (.) Ø (5.) 5 7 (4.) (.67) 94 (.7) 5 (.97) 4 x Ø9 (.5) x Ø (4.) Ø76 (.99) 5 (4.9) Heater (.45 kw) -5 V H7-- -5 V H7--6-5 V H7--9 Valve plate O ring VIT5 H-6-5 Valve shaft seal O ring VIT H-6- Valve blanking plate O ring VIT H-6- Backing O ring assembly (fluoroelastomer) C5--95 Drain and filler plug O rings H--7 Pack of 5 For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. 5 (5.) 7 (.75) 65 5 (.56) (.5) (.66) 7 VAPOR PUMPS - -7-6 Diffstak 6/5-5 -4 mbar - -4-6 -5 - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

STANDARD DIFFSTAK /M AND /P 47 (7.) 76 (.7) Ø65 (6.5) 5 (4.5) (.) x Ø9 (.5) x Ø45 (5.7) Ø (4.7) 7 (5.) (7.) 4 (.5) 6 (.9) 6 (4.7) (4.) 7 (.67) Diffstak /M Standard Diffstak /M Standard Diffstak /P M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. Pumping speed nitrogen l s - hydrogen 5 l s - Minimum backing pump displacement 5 m h - RV5 or RV Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO Backing connection NW5 Cooling water connection 6 mm compression fittings.65 kw Minimum cooling-water flow at C 6 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbfin - Maximum 6.9 bar / lbfin - /M kg /P kg For maximum throughput /P only CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 - - ls - -7-6 Diffstak / -5-4 - - mbar 47 (7.) Diffstak /P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak /M -5 V -ph 5/6 Hz B46--976-5 V -ph 5/6 Hz B46--977-5 V -ph 5/6 Hz B46--97 Diffstak /P -5 V -ph 5/6 Hz B46--976-5 V -ph 5/6 Hz B46--977-5 V -ph 5/6 Hz B46--97 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO Co-Seal 76 (.7) Ø65 (6.5) 5 (.) (4.5) x Ø9 (.5) x Ø45 (5.7) 5 (6.) Ø (4.) 7 (5.) 7 (5.) (7.) 4 (.57) Heater (.65 kw) -5 V H7--99-5 V H7--97-5 V H7--9 Valve plate O ring VIT46 H-6-6 Valve shaft seal O ring VIT H-6- Valve blanking plate O ring VIT H-6- Backing O ring assembly (fluoroelastomer) C5-4-95 Drain and filler plug O rings H--7 Pack of 5 For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. 6 (.9) 6 (4.) (4.7) 75 (.) -6-5 -4 - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

STANDARD DIFFSTAK 6/7M AND 6/7P 6 (4.) 64 (4.) Ø5 (.6) 5 (4.4) (.) x Ø (.4) x Ø (7.7) 9 (7.56) 5 (5.9) Ø57 (6.) 7 (6.69) (.5) 9 (.54) 4 5 (4.) (5.9) 54 (.94) Diffstak 6/7M Standard Diffstak 6/7P M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. Pumping speed nitrogen 7 l s - hydrogen l s - Minimum backing pump displacement m h - RV or EM Recommended fluid Santovac 5 Fluid charge (dry) 55 ml Inlet connection compatible with ISO6 Backing connection NW5 Cooling water connection 6 mm compression fittings.5 kw Minimum cooling-water flow at C 5 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbfin - Maximum 6.9 bar / lbfin - 6/7M 6 kg 6/7P 7 kg For maximum throughput 6/7P only CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 - - ls 4 - -6-7 -6-5 -4 - Diffstak 6/7-5 -4 - - mbar - - Pa 6 (4.) Diffstak 6/7P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak 6/7M -5 V -ph 5/6 Hz B4--976-5 V -ph 5/6 Hz B4--977-5 V -ph 5/6 Hz B4--97 Diffstak 6/7P -5 V -ph 5/6 Hz B4--976-5 V -ph 5/6 Hz B4--977-5 V -ph 5/6 Hz B4--97 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO 6 Co-Seal 49 (9.9) Ø5 (.6) 5 (4.4) (.) 9 (7.5) x Ø (.4) x Ø (7.7) 9 (7.56) 5 (5.9) Ø57 (6.) 7 (6.69) (.5) 4 5 (4.) (5.9) (.99) Heater (one heater of each power is required) -5 V.5 kw H7-- -5 V kw H7--59-5 V.5 kw H7--7-5 V kw H7--6-5 V.5 kw H7-- -5 V kw H7--54 Valve plate O ring VIT H-6- Valve shaft seal O ring VIT H-6- Valve blanking plate O ring VIT H-6- Backing O ring assembly (fluoroelastomer) C5-4-95 Drain and filler plug O rings H--7 Pack of 5 For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. 9 (.5) 9 VAPOR PUMPS For North American orders shop online: www.bocedwards.com or call: --4-9

STANDARD DIFFSTAK 5/M AND 5/P 769 (.) 65 (4.6) Ø5 (.9) Diffstak 5/M 94 (.7) (.5) 4 (.5) 4 (.) 9 (.4) x Ø (.4) x Ø (.) Ø6 (.) 4 (9.5) 4 (6.) (7.9) (.94) 4 (5.) (.) 6 (4.9) 4 Standard Diffstak 5/M M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. Pumping speed nitrogen l s - hydrogen l s - Minimum backing pump displacement 4 m h - EM4 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO5 Backing connection NW4 Cooling water connection 6 mm compression fittings.5 kw Minimum cooling-water flow at C l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbfin - Maximum 6.9 bar / lbfin - 5/M 59 kg 5/P 6 kg For maximum throughput. 5/P only CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 - - ls 4 - -7-6 Diffstak 5/ -5-4 - - mbar 769 (.) Diffstak 5/P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak 5/M -5 V -ph 5/6 Hz B5--976-5 V -ph 5/6 Hz B5--977-5 V -ph 5/6 Hz B5--97 Diffstak 5/P -5 V -ph 5/6 Hz B5--976-5 V -ph 5/6 Hz B5--977-5 V -ph 5/6 Hz B5--97 Supplied with: NW4 elbow, NW4 centering-ring, NW4 clamp, water pipe couplings and ferrules, inlet ISO 5 trapped O ring 74 (.5) Ø5 (.9) 94 (.5) (.7) 4 (.5) 465 (.) x Ø (.4) x Ø (.) 9 (9.) Ø6 (.) (9.5) 4 (6.) Heater (one heater of each power is required) -5 V.5 kw H7--4-5 V.4 kw H7--6-5 V.5 kw H7--4-5 V.4 kw H7--55-5 V.5 kw H7--7-5 V.4 kw H7--5 Valve plate O ring VIT449 H-6-9 Valve shaft seal O ring VIT (pack of ) H-6- Valve blanking plate O ring VIT (pack of ) H-6- Backing O ring assembly (fluoroelastomer) C5-6-95 Drain and filler plug O rings (pack of 5) H--7 For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. 4 9 (.4) (7.9) (.94) 4 (5.) (.) 59 (.) -5-6 -4 - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

CRYO-COOLED DIFFSTAK CR6/5M AND CR6/5P 97 (.69) (.9) Ø46 (5.75) 9 94 (.54) 7 (.7) Ø (5.) 4 x Ø9 (.5) (.76) x Ø (4.) Ø76 (.99) 7 5 (.67) (4.) 45 (6.7) 9 (7.44) 5 (4.9) 5 (.97) 65 5 (.56) (.5) 6 (.5) (.) Diffstak CR6/5M Cryo-cooled Diffstak CR6/5M Cryo-cooled Diffstak CR6/5P CR - model pumps have a cryo cooled baffle. M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have pneumatically actuated high vacuum isolation valve. Pumping speed nitrogen l s - hydrogen 9 l s - water vapor 5 l s - Minimum backing pump displacement 5 m h - RV5 Recommended fluid Santovac 5 Fluid charge (dry) 6 ml Inlet connection compatible with ISO6 Backing connection NW Cooling water connection 6 mm compression fittings.45 kw Minimum cooling-water flow at C 4 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbfin - Maximum 6.9 bar / lbfin - Liquid nitrogen charge.7 l Liquid nitrogen charge duration h 6/5M 6 kg 6/5P 7 kg For maximum throughput. CR6/5P only CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6-9 - ls 97 (.69) (.9) (.) Diffstak CR6/5P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak CR6/5M -5 V -ph 5/6 Hz B44-7-976-5 V -ph 5/6 Hz B44-7-977-5 V -ph 5/6 Hz B44-7-97 Diffstak CR6/5P -5 V -ph 5/6 Hz B44--976-5 V -ph 5/6 Hz B44--977-5 V -ph 5/6 Hz B44--97 Supplied with: NW elbow, NW centering-ring, NW clamp water pipe couplings and ferrules. Ø46 (.75) 9 (.54) Ø (5.) 7 5 (4.) (.67) 45 (6.7) 5 4 x Ø9 (.5) x Ø (4.) (.99) 9 (7.44) 5 (4.9) 5 (.97) Heater (.45 kw) -5 V H7-- -5 V H7--6-5 V H7--9 Liquid nitrogen drain O ring VIT56-4 H--7 Liquid nitrogen line O ring VOR49 H-5-49 Pack of 5 For information about other spares, refer to standard Diffstak 6/5 (see page 7). For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. (5.) 7 (.76) Ø76 94 (.7) 5 65 (.5) (.56) (.66) 4 VAPOR PUMPS - -7-6 Diffstak CR6/5-5 -4 mbar - -6-5 -4 - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

CRYO-COOLED DIFFSTAK CR/M AND CR/P 64 (.4) 79 (.) (.5) Ø74 (6.5) 76(.7) Ø65 (6.5) Diffstak CR/M 5 (4.5) (.) 49 (9.6) 9 (9.) x Ø9 (.5) x Ø45 (5.7) Ø (4.7) 6 7 (4.57) (5.) (7.) 4 (.57) 6 (.9) 6 (4.7) (4.) 7 (.67) 4 Cryo-cooled Diffstak CR/P CR - model pumps have a cryo-cooled baffle. M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. Pumping speed nitrogen l s - hydrogen 45 l s - water vapor 9 l s - Minimum backing pump displacement 5 m h - RV5 or RV Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO Backing connection NW5 Cooling water connection 6 mm compression fittings.65 kw Minimum cooling-water flow at C 6 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbfin - Maximum 6.9 bar / lbfin - Liquid nitrogen charge.7 l Liquid nitrogen charge duration h /M kg /P kg For maximum throughput. CR/P only CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 7-9 - ls 64 (.4) 79 (.5) (.) Diffstak CR/P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak CR/M -5 V -ph 5/6 Hz B46-7-976-5 V -ph 5/6 Hz B46-7-977-5 V -ph 5/6 Hz B46-7-97 Diffstak CR/P -5 V -ph 5/6 Hz B46--976-5 V -ph 5/6 Hz B46--977-5 V -ph 5/6 Hz B46--97 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules. Ø74 (6.5) 76 (.7) Ø65 (6.5) 5 (.) (4.5) 49 (9.6) 5 (6.) x Ø9 (.5) x Ø45 (5.9) 9 (9.) Ø (4.7) 6 7 (4.57) (5.) 6 (.9) 6 (4.7) (4.) 75 (.) Heater (.65 kw) -5 V H7--99-5 V H7--97-5 V H7--9 Liquid nitrogen drain O ring VIT56-4 H--7 Liquid nitrogen line O ring VOR49 H-5-49 Pack of 5 For information about other spares, refer to standard Diffstak / (see page ). For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. 7 (5.) (7.) 4 (.57) - -7-6 Diffstak CR/ -5-4 mbar - -6-5 -4 - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

CRYO-COOLED DIFFSTAK CR6/7M AND CR6/7P 4 (6.6) 94 (4.) (.7) 64 (4.96) Ø5 (.6) Ø4 (.) Diffstak CR6/7M 7 5 7 (.) (6.69) (.) 7 (.9) 9 (7.56) 5 (5.9) Ø57 x Ø (.4) x Ø (7.7) (6.) 7 (6.69) (.5) 9 4 5 (.54) (4.) (5.9) 59 (4.) Cryo-cooled Diffstak CR6/7M CR - model pumps have a cryo-cooled baffle. M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. Pumping speed nitrogen 6 l s - hydrogen l s - water vapor l s - Minimum backing pump displacement m h - RV or EM Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO6 Backing connection NW5 Cooling water connection 6 mm compression fittings.5 kw Minimum cooling-water flow at C 5 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbfin - Maximum 6.9 bar / lbfin - Liquid nitrogen charge 7. l Liquid nitrogen charge duration h 4 kg For maximum throughput. CR6/7P only CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 7-9 4 Diffstak CR6/7 4 (6.6) 94 (4.) (.7) Diffstak CR6/7P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak CR6/7M -5 V -ph 5/6 Hz B4-7-976-5 V -ph 5/6 Hz B4-7-977-5 V -ph 5/6 Hz B4-7-97 Diffstak CR6/7P -5 V -ph 5/6 Hz B4--976-5 V -ph 5/6 Hz B4--977-5 V -ph 5/6 Hz B4--97 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules. Ø4 (.) 49 (9.9) Ø5 (.6) 7 5 (6.69) (.) 7 (.) (7.9) 7 (.9) 5 (5.9) x Ø (.4) x Ø (7.7) Ø57 (6.) 7 (6.69) (.5) Heater (one heater of each power is required) -5 V.5 kw H7-- -5 V kw H7--59-5 V.5 kw H7--7-5 V kw H7--6-5 V.5 kw H7-- -5 V kw H7--54 Liquid nitrogen drain O ring VIT56-4 H--7 Liquid nitrogen line O ring VOR49 H-5-49 Pack of 5 9 (7.56) (.46) 4 5 (4.) (5.9) (.99) 4 VAPOR PUMPS - ls - -7-6 -5-4 - - mbar For information about other spares, refer to standard Diffstak 6/7 (see page 9). For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. -4-6 -5 - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

44 CRYO-COOLED DIFFSTAK CR5/M AND CR5/P CR - model pumps have a cryo-cooled baffle. M - model pumps have a manually operated high vacuum isolation valve. P - model pumps have a pneumatically actuated high vacuum isolation valve. Pumping speed nitrogen 7 l s - hydrogen l s - water vapor 6 l s - Minimum backing pump displacement 4 m h - EM4 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO5 Backing connection NW4 Cooling water connection 6 mm compression fittings.5 kw Minimum cooling-water flow at C l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 lbfin - Maximum 6.9 bar / lbfin - Liquid nitrogen charge 6 l Liquid nitrogen charge duration 4 h 5 kg For maximum throughput. CR5/P only CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 7-9 - ls 4 - -7-6 Diffstak CR5/ -5-4 - - mbar 5 (4.4) 97 (.) 56 (.) 96 (.7) Diffstak CR5/P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak CR5/M -5 V -ph 5/6 Hz B5-7-976-5 V -ph 5/6 Hz B5-7-977-5 V -ph 5/6 Hz B5-7-97 Diffstak CR5/P -5 V -ph 5/6 Hz B5--976-5 V -ph 5/6 Hz B5--977-5 V -ph 5/6 Hz B5--97 Supplied with: NW4 elbow, NW4 centering-ring, NW4 clamp, water pipe couplings and ferrules, inlet ISO 5 trapped O ring. Ø54 (.) 74 (.5) Ø5 (.9) 94 (.5) (.7) 4 (.5) 466 (.5) x Ø (.4) x Ø (.) 9 (9.) 4 9 (9.57) (.4) (7.9) Ø6 (.) 4 (9.5) 49 (6.) 4 (6.) (.94) 4 (5.) (.) Heater (one heater of each power is required) -5 V.5 kw H7--4-5 V.4 kw H7--6-5 V.5 kw H7--4-5 V.4 kw H7--55-5 V.5 kw H7--7-5 V.4 kw H7--5 Liquid nitrogen drain O ring VIT56-4 H--7 Liquid nitrogen line O ring VOR49 H-5-49 Pack of 5 For information about other spares, refer to standard Diffstak 5/ (see page 4). For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. 59 (.) -6-5 -4 - - - Pa 5 (4.4) 96 56 (.) 97 (.) (.7) Ø54 (.) 65 (4.6) Ø5 (.9) 94 (.5) (.7) 4 (.5) x Ø (.4) x Ø (.) 4 (6.6) 4 9 (9.57) (.4) (7.9) Ø6 (.) 4 (9.5) 49 (6.) 4 (6.) 4 (.94) (5.) (.) 6 (4.9) Diffstak CR5/M For North American orders shop online: www.bocedwards.com or call: --4-9

UNVALVED DIFFSTAK 6/5C - ls - -7-6 Diffstak 6/5C -5-4 mbar - -6-5 -4 - - - Pa Ø95 (.74) 69 (.7) 4 (5.) 79 (7.5) 4 (.5) 7 (.76) Ø76 (.99) 5 (.97) 5 (.5) 55 (6.) 94 (.7) (4.) 9 (7.56) Unvalved Diffstak 6/5C C - model pumps have an unvalved ISO collar inlet flange. Pumping speed nitrogen 5 l s - hydrogen 5 l s - Minimum backing pump displacement 6 m h - RV5 Recommended fluid Santovac 5 Fluid charge (dry) 6 ml Inlet connection ISO6 Backing connection NW Cooling water connection 6 mm compression fittings Minimum cooling-water flow at C 4 l h -.45 kw 5 kg For maximum throughput. CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 - Diffstak 6/5C -5 V -ph 5/6 Hz B44--976-5 V -ph 5/6 Hz B44--977-5 V -ph 5/6 Hz B44--97 Supplied with: NW elbow, NW centering-ring, NW clamp, water pipe couplings and ferrules, inlet ISO 6 Co-Seal. Heater (.45 kw) -5 V H7-- -5 V H7--6-5 V H7--9 For information about spares, refer to standard Diffstak 6/5 (see page 7). For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. 45 VAPOR PUMPS For North American orders shop online: www.bocedwards.com or call: --4-9

UNVALVED DIFFSTAK /C AND /F Ø (5.) 4 (.) 77 (6.97) 6 (.) 44 (6.) 7 (5.) Ø (4.7) 4 (.57) 6 (.9) (4.) 6 (.5) 7 (5.) 59 (6.6) 5 (9.9) Diffstak /C 46 Unvalved Diffstak /C Unvalved Diffstak /F C - model pumps have an unvalved ISO collar inlet flange. F - model pumps are unvalved and have a copper compression gasket flange (ConFlat ). Pumping speed nitrogen l s - hydrogen 55 l s - Minimum backing pump displacement 5 m h - RV5 or RV Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection /C ISO /F 6 inch Backing connection NW5 Cooling water connection 6 mm compression fittings Minimum cooling-water flow at C 6 l h -.65 kw /C 9 kg /F kg For maximum throughput CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 - - ls Diffstak /F Diffstak /C -5 V -ph 5/6 Hz B46--976-5 V -ph 5/6 Hz B46--977-5 V -ph 5/6 Hz B46--97 Diffstak /F -5 V -ph 5/6 Hz B46-4-976-5 V -ph 5/6 Hz B46-4-977-5 V -ph 5/6 Hz B46-4-97 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules inlet ISO Co-Seal (C version only). Ø5 (5.9) 5 (4.) 9 (7.) 7 (.94) 6 x Ø. (.) x Ø. (5.) 45 (7.) Ø9 (4.9) 7 (5.) 7 (5.) 59 (6.6) 5 (9.9) Heater (.65 kw) -5 V H7--99-5 V H7--97-5 V H7--9 For information about spares, refer to standard Diffstak / (see page ). For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. 4 (.57) 6 (.9) (4.) 6 (.5) - -7-6 Diffstak /C, F -5-4 - - mbar -6-5 -4 - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

UNVALVED DIFFSTAK 6/7C AND 6/7F Ø (7.9) (4.5) 4 (9.5) 9 (.4) 57 (.76) 9 (7.56) 5 (5.9) Ø56 (6.4) 9 (.54) 5 (5.9) 7 (.) PHOTO REQUIRED 7 (6.69) (.5) 55 (.9) Diffstak 6/7C Unvalved Diffstak 6/7C Unvalved Diffstak 6/7F Ø (7.99) (4.65) 5 (9.9) x Ø. (.) x Ø (7.) (.) 5 (.5) 9 (7.56) 5 (5.9) Ø56 (6.4) 7 (6.69) 9 (.54) 5 (5.9) 7 (.) C - model pumps have an unvalved ISO collar inlet flange. F - model pumps are unvalved and have a copper compression gasket flange (ConFlat ). Pumping speed nitrogen 76 l s - hydrogen 4 l s - Minimum backing pump displacement m h - RV or EM Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection 6/7C ISO6 6/7F inch Backing connection NW5 Cooling water connection 6 mm compression fittings Minimum cooling-water flow at C 5 l h -.5 kw 6/7C kg 6/7F kg For maximum throughput CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 - Diffstak 6/7F Diffstak 6/7C -5 V -ph 5/6 Hz B4--976-5 V -ph 5/6 Hz B4--977-5 V -ph 5/6 Hz B4--97 Diffstak 6/7F -5 V -ph 5/6 Hz B4-4-976-5 V -ph 5/6 Hz B4-4-977-5 V -ph 5/6 Hz B4-4-97 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO 6 Co-Seal (C version only). (.5) 55 (.9) Heater (one heater of each power is required) -5 V.5 kw H7-- -5 V kw H7--59-5 V.5 kw H7--7-5 V kw H7--6-5 V.5 kw H7-- -5 V kw H7--54 47 VAPOR PUMPS - ls For information about spares, refer to standard Diffstak 6/7 (see page 9). For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. - -7-6 Diffstak 6/7C, F -5-4 - - mbar -6-5 -4 - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

UNVALVED DIFFSTAK 5/C C - model pumps have an unvalved ISO collar inlet flange. Pumping speed nitrogen l s - hydrogen l s - Minimum backing pump displacement 4 m h - EM4 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection ISO5 Backing connection NW4 Cooling water connection 6 mm compression fittings Minimum cooling-water flow at C l h -.5 kw 46 kg For maximum throughput CRITICAL BACKING PRESSURE ULTIMATE PRESSURE FLUID (mbar) (mbar) Santovac 5.6 5-9 Silicone DC7. 7-6 Silicone DC74EU. 7 - Silicone DC75.6 - Diffstak 5/C -5 V -ph 5/6 Hz B5--976-5 V -ph 5/6 Hz B5--977-5 V -ph 5/6 Hz B5--97 Supplied with: NW4 elbow, NW4 centering-ring, NW4 clamp, water pipe couplings and ferrules, inlet ISO 5 trapped O ring Heater (one heater of each power is required) -5 V.5 kw H7--4-5 V.4 kw H7--6-5 V.5 kw H7--4-5 V.4 kw H7--55-5 V.5 kw H7--7-5 V.4 kw H7--5 For information about spares, refer to standard Diffstak 5/ (see page 4). For information about installation of Diffstak pumps, see page 49. For details of suitable backing/ roughing valves, see page 4; for electropneumatic control valves, see page 44; for thermal snap-switch accessories, see page 5; for hardware components, see page 445; and for vapor pump fluids, see page 49. 4 4 - ls - -7-6 Diffstak 5/C -5-4 mbar - -6-5 -4 - - - Pa Ø9 (.4) 4 (5.59) 57 (4.6) (5.) 76 (7.) 9 (.4) (7.9) Ø6 (.) (.94) (.) 5 (.55) 4 (9.5) 9 (.4) 5 (9.) For North American orders shop online: www.bocedwards.com or call: --4-9

DIFFSTAK INSTALLATION M-model pumps have a manually operated high vacuum valve. P-model pumps have a pneumatically operated high vacuum valve. Both M-model and P-model pumps have inlet flanges which are compatible with ISO flanges: the internal diameter of the inlet flange is narrower and the flange is deeper than a standard ISO flange, to accommodate the high vacuum valve. C-model pumps do not have a high vacuum valve and have an ISO flange on the inlet (see pages 45-4). F-model pumps do not have a high vacuum valve and have a CF flange on the inlet (see pages 46 and 47). Refer to the diagrams and the tables on these pages to identify the pipeline components and valves required to complete the typical Diffstak installation shown. Items supplied with the pump are shown as a dotted line. Read the footnotes below the diagrams and the tables for more information and for details of the installation requirements for the different models of Diffstaks. 6/5, /, 6/7 installation ** 5P 9 7 6 5 *** 5P 4 * 4P 4P * 49 DIAGRAM COMPONENT 6/5 COMPONENT / COMPONENT 6/7 COMPONENT KEY DESCRIPTION SIZE QUANTITY SIZE QUANTITY SIZE QUANTITY ISO tube/collar assembly ISO6 ISO ISO6 Rotable flange pack ISO6 ISO ISO6 4 Bolts (size minimum length, mm) M- and P-model M 75 4 M 75 M 9 F-model - - M 55 6 M 6 4 5 Inlet seal ISO6 ISO ISO6 5 BRV valve, manual BRVM BRV5M BRV5M BRV valve, pneumatic BRVP BRV5P BRV5P 6 Clamp NW NW5 NW5 7 O' ring assembly NW NW5 NW5 6 4-port light-weight electropneumatic - - - control valve 9 6 5-port electropneumatic control valve - - - *** 5-port electropneumatic control valve - - - VAPOR PUMPS These items are supplied with the pumps, except that the inlet seal for the F-model pumps is not supplied. Not required for F-model pumps; use CF fittings (which must be obtained from another supplier) Not required for C-model pumps; use claw clamps to bolt the pump ISO inlet flange directly to the ISO tube/collar assembly. 4 Bolts are not available from BOC Edwards. Bolts are not required for C-model pumps; use claw clamps to bolt the pump ISO inlet flange directly to the ISO tube/collar assembly; use 4 claw clamps for ISO6, ISO and ISO6 flanges. 5 These inlet seals are suitable for standard, cryo-cooled and C-model pumps only; use CF fittings (which must be obtained from another supplier) for F-model pumps. 6 Required only for pneumatic operation BRV valves; use either 5-port control valve or 4-port control valves. If you use 4-port control valves, you can use the isolation position of the BRV valve. 7 Required only for P-model pumps, to control the operation of the high vacuum valve. For North American orders shop online: www.bocedwards.com or call: --4-9

5/ installation 7 6 P ** 5P 5 4 * 7 6 9 7 7 6 6 * P ** 5 5 DIAGRAM COMPONENT COMPONENT KEY DESCRIPTION SIZE QUANTITY ISO tube/collar assembly ISO5 Rotatable flange pack ISO5 Bolts (size, minimum M length, mm) M- & P-model 4 Inlet seal, trapped O ring ISO5 5 PV4 valve, manual PV4MK PV4 valve, pneumatic PV4PK 6 Clamp NW4 5 7 O' ring assembly NW4 5 T' piece NW4 These items are supplied with the pump. 9 Elbow NW4 Not required for C-model pumps; use 6 claw clamps to bolt the pump ISO inlet flange directly to the ISO tube/collar assembly. 4 -port electropneumatic Bolts are not available from BOC Edwards. Bolts are not required for Model-C pumps; use 6 claw clamps to clamp the pump ISO inlet flange directly to the ISO tube/collar assembly. control valve - 4 Required only for pneumatic operation PVPK valves; use -port control valve for each of the two 5 5-port electropneumatic PVPK valves. control valve - 5Required only for P-model pumps, to control the high vacuum valve. For North American orders shop online: www.bocedwards.com or call: --4-9

DIFFSTAK COMBINED OUTFITS mm Diffstak outfit Pumping speed above Diffstak valve l s - Ultimate vacuum (with Santovac 5 fluid) x - mbar x -6 Pa Minimum cooling water 6 l h - Maximum power. kw (approx.) 6 kg Inlet connection ISO Outlet connection NW5 Vapor pump Diffstak / M Rotary vacuum pump RV5 Backing/roughing valve BRV5K Vacuum gauge - pirani APG-M-NW5 65 (4.) 54 (.6) 4 (.9) Compact unit, delivering ~ x - mbar ultimate pressure (depending on vapor pump fluid used) Integrated manual backing/roughing valve and water cooled baffle Active Pirani gauge head * in backing line automatically interlocks the Diffstak Enhanced safety shields for the highest temperature surfaces Castors are fitted as standard Fully factory tested These are compact, high performance units featuring either the 6 mm or mm Diffstak both backed by the RV5 two-stage rotary pump. Inlet pumping speeds above the valve are 5 l s - and l s - respectively. The Diffstak has an integral water cooled baffle and is fitted with manual quarterswing and backing/roughing valves. A manual air admittance valve and a Pirani gauge are fitted in the backing line to the rotary pump. The unit is supplied complete with rotary pump oil but vapor pump fluid should be selected from the fluids and sealants section. Additional gauges are optional extras (see page 79). A separate display or controller is required to show the pressure measured by the Pirani gauge head. 6 mm Diffstak outfit Pumping speed above Diffstak valve 5 l s - Ultimate vacuum (with Santovac 5 fluid) x - mbar x -6 Pa Minimum cooling water flow 4 l h - Maximum power. kw (approx.) 5 kg Vapor pump Diffstak 6 / 5M Rotary vacuum pump RV5 Backing/roughing valve BRVK Vacuum gauge - pirani APG-M-NW6 6 mm Diffstak Combined Outfit (requires electrical supply cable) 5 V -ph 5/6 Hz B64-6-99 V -ph 5/6 Hz B64-6-95 45 V -ph 5/6 Hz B64-6-96 mm Diffstak Combined Outfit (requires electrical supply cable) 5 V -ph 5/6 Hz B66--99 V -ph 5/6 Hz B66--95 45 V -ph 5/6 Hz B66--96 ACCESSORIES Line cords for combined outfit - m electrical supply cable with IEC socket UK, three pin plug A55-5- North European plug A55-6- No plug A55-- USA plug A55-7- The Diffstak combination includes the inlet flange Co-Seal, rotary pump oil and instruction manual. The Diffusion pump oil is not included, but can be ordered through BOC Edwards, see page 49. The power cable (line cord) is not included and needs to be ordered separately, through BOC Edwards, see above. To meet your special requirements we also offer custom built Diffstak combined outfits or combined outfits featuring turbomolecular pumps, see page 76. Please contact us for further details. 5 VAPOR PUMPS For North American orders shop online: www.bocedwards.com or call: --4-9

VAPOR PUMP - THERMAL SNAP-SWITCHES COOLING-FAIL THERMAL SNAP-SWITCH This switch opens at a preset temperature to indicate failure of the cooling water flow. The switch resets (closes) when the pump cools down to a preset temperature. 5 (.) COOLING-FAIL THERMAL SNAP-SWITCH (TVA5/6 AND TVW5/6) This switch opens at a preset temperature to indicate failure of the cooling water flow. The switch resets (closes) when the pump cools down to a preset temperature. Ø5. (.6) Ø.6 (.4).5.54 (.) (.7) 65 (.56) 4 (.55) 5 Use with these pumps Diffstak, EO, EO4, EO6, EO9 B4A and B5A Electrical data 5 A at V ac or 4 V ac Preset operation temperatures Open 46 ± 5 ºC Close (automatic reset) ± 5 ºC Cooling-fail thermal snap-switch B-- COOLING-FAIL THERMAL SNAP-SWITCH (EO5/6 AND SI) This switch opens at a preset temperature to indicate failure of the cooling water flow. The switch resets (closes) when the pump cools down to a preset temperature. Ø5. (.6) Ø.6 (.4).5.54 (.) (.7) Use with these pumps Electrical data Preset operation temperatures Open 6 ± ºC Close (automatic reset) 5 ± ºC Cooling-fail thermal snap-switch TVA5/6, TVW5/6 5 A at V ac resistive or A at 4 V ac resistive B-4- PUMP-READY THERMAL SNAP-SWITCH This switch opens at a preset temperature to indicate that the pump is at operating temperature. It can be used to control the opening of a high vacuum valve. The switch resets (closes) when the pump cools down to a preset temperature..5 (.9). (.94).5 (.9). (.94) Ø6..5 5.5 (.6) (.) (.6) Ø.6 (.4).5 (.9). (.94) Use with these pumps Electrical data Preset operation temperatures Open 5 ± ºC Close (automatic reset) 5 ± ºC EO5/6, SI, EO/9 5 A at V ac resistive or A at 4 V ac resistive Use with these pumps All Diffstak, EO5/6, SI, EO/9 EO4, EO6, EO9 Electrical data 6 A at V ac resistive or A at 4 V ac resistive or 7 A ar V ac or dc, resistive Preset operation temperatures Open ±. ºC Close (automatic reset) 6 ±. ºC Cooling-fail thermal snap-switch B79--6 Pump-ready thermal snap-switch B-4- For North American orders shop online: www.bocedwards.com or call: --4-9

BOILER PROTECTION THERMAL SNAP- SWITCH This switch opens at a preset temperature when the pump boiler base exceeds the maximum safe operating temperature. The switch resets (closes) when the pump cools down to a preset temperature.. Ø. (.7) Ø.6 (.4).5 5.49 (.) (.6).5 (.9). (.94) Use with these pumps Electrical data EO5/6, EO/9, SI 5 A at V ac 5/6 Hz A at 4V ac 5/6 Hz Pre-set operation temperatures Open ± 4.4 ºC Close (automatic reset) 4 ± 4.4 ºC Boiler protection thermal snap-switch B-4-5 VAPOR PUMPS For North American orders shop online: www.bocedwards.com or call: --4-9

VAPOR PUMPS FOR TV DISPLAY AND MONITOR PUMPING BOC Edwards has produced equipment for evacuating and aluminizing of cathode ray tubes for decades, and we have an installed base of over, vapor and mechanical pumps for major television production lines all over the world. The following pages give details of vapor pumps designed for television and monitor tube pumping. We offer either full system design or individual components, to give you the flexibility you need for an optimized system. Low power for low cost of ownership Compact design Low fluid loss through use of fluid economizers Fast heat up and cool down Designed to withstand implosions and fast cycle times Air and water cooled pumps available The graph illustrates a typical comparison between the BOC Edwards low powered diffusion pump ( W), turbomolecular pump and a competitor s 5 W diffusion pump. 6 5 4 4 5 6 7 9 Years TV Cost of ownership comparison cost per pump vs years. BOC Edwards TVA5/6 diffusion pump ( W) Turbomolecular pump Competitor s diffusion pump (5 W) 54 (Photograph courtesy of Avasarala Automations Ltd, Bangalore). Reduced cost of ownership Minimizing costs has become ever more important in the TV tube manufacturing industry. With the right choice of products, you can generate savings in both capital and operation costs. Water free pumps and grippers BOC Edwards have developed air cooled diffusion pumps and grippers (compression heads). Use of these products allows you to remove water cooling systems from exhaust machines, which provides major savings in both capital and operation costs. Low power pumps The use of our low power diffusion pumps delivers major savings in power consumption. The low power diffusion pumps can be compared with alternative technologies such as the turbomolecular pump. Air cooled turbomolecular pumps can also provide operational cost savings, but are considerably more expensive to buy and to maintain (with the need for bearing changes). In addition, turbomolecular pumps require the installation of additional filters to protect the high speed bearings from damage, both during routine operation and particularly after tube implosions. Full range of products The TV tube industry has specific vacuum needs which BOC Edwards can support through its comprehensive product range. We offer a full range of primary and secondary pumps, together with instruments and vacuum system components. Vapor pumps Recommended pumps for in-line machines: TVA5/6, TVW5/6, TV, Diffstak 6/. See pages 55-5. Recommended pumps for aluminizer machines: Diffstak /P, 6/ 7P, 5/P. See pages - 4. Manufactured in a flow line system. Mechanical pumps Recommended pumps for in-line machines: RV5, RV, RV. See pages -. Recommended pumps for aluminizer machines: EM4, EM. See pages 5 and 5. Manufactured using the most modern technology. Mist filters for mechanical pumps Recommended products for in-line machines: EMF, EMF. See page. Recommended filters for aluminizer machines: MF. See page 57. Instruments Recommended gauge heads: AIM, APG. See pages 5 and 79 Recommended displays and controllers: AGD display, AGC Controller. See pages 46 and 44. Valves Recommended valves for aluminizer machines: PVEK solenoid valves, see page 47; PVPK pneumatic valves, see page 45; and air admit valves, see page 44. Coupling components Recommended products: clamps, seals, flexible bellows and pipelines, elbows and T-pieces. See page 445. Fluids Vacuum fluids for diffusion and rotary pumps, see page 49. Oils for mechanical pumps, see page 49. Greases, see page 495. Leak detectors Spectron E and Spectron 5. See pages 56 and 5. For North American orders shop online: www.bocedwards.com or call: --4-9

TV WATER COOLED DIFFUSION PUMP Ø9 (.5) 4 x ¼" BSF Ø9 (4.69) Ø76. (.) (.5) 97 (.69) 9.5 (.7) 69 (.7) 4 (.) 7 (7.) Pumping speed (air) 6 l s - ISO Throughput at 5 - mbar (nitrogen).5 mbar l s - Critical backing pressure (DC74EU).4 mbar Minimum backing pump displacement for maximum throughput 5 m h - RV Recommended fluid DC74EU Fluid charge 75 ml Inlet connection 4 holes ¼ inch BSF on 76. PCD Backing connection NW5 flange Water connections 6 mm o.d. tube 5 W Warm-up time to operational temperature 5 min Minimum cooling-water flow at C l h -. kg 7.4 For vapor pump fluids, see page 49. TV (water cooled), 5/6 Hz, -phase -5 V B-64- -5 V B-64- -5 V B-64-4 Supplied with: NW5 centering-ring, NW5 clamp and inlet O ring. Heater, 5W, 5/6 Hz, -phase (one required) -5 V H7--9-5 V H7-- -5 V H7--4 Inlet O ring VIT6 H-6-6 Backing NW5 O ring assembly, nitrile C5-4-96 ACCESSORIES Cooling-fail thermal snap-switch Silicone DC74EU (5 ml) B-- H--4 55 VAPOR PUMPS 6 5. ls - 4. - ls mbar TVWC. -5-4 -. - - mbar - - - Pa For North American orders shop online: www.bocedwards.com or call: --4-9

TVA5/6 AIR COOLED DIFFUSION PUMP ISO6 NW TV NW5 6.5 (.) NW5 NW5 5 (.6) (.) 95 (7.6) 75 (.95) 75 (.95) 56 Pumping speed, nitrogen Unbaffled >6 l s - ISO Baffled > l s - ISO Critical backing pressure, DC74EU.4 mbar Backstreaming rate Unbaffled 6 x - mg cm - min - Baffled 4 x -4 mg cm - min - Ultimate pressure DC74EU 5 x -7 mbar DC7 5 x -6 mbar Nominal fluid charge ml Minimum fluid charge 5 ml Recommended fluids DC74EU, DC7 RV5, RV Standard inlet connection NW5 Standard backing connection NW5 W Fan wattage W Warm-up time to operational temperature 5 minutes Minimum cooling water flow at C 5 l h - kg 7 6 5 TVA5/6 TVW5/6 TVA, TVW.5..5 Other flange options for customized connections are available on request. B Supplied with: optically dense baffle, inlet fluoroelastomer O ring, NW5 centering ring with nitrile O ring, NW5 clamping ring. ACCESSORIES Inlet flange NW5 TV STYLE 5 ISO6 7 NW Voltage V supply V supply V supply 4 4V supply 77 77V supply An air cooled gripper assembly to accept the TV tubes is available: please contact BOC Edwards for more information. Cooling fail thermal snap-switch B-4- - ls 4-5 TVA5/6 TVW5/6..5..5. -4 - - - mbar - - - Pa - mbar ls Pump heater W V H7-7-9 V H7-7-9 V H7-7-9 4 V H7-7-9 77 V H7-7-9 Sight glass (pack of 5) B-7-47 Sight port NW5 O ring, fluoroelastomer B7-5-49 Pump inlet O ring, fluoroelastomer NW5 C5-7-95 ISO6 B7-5-64 Pump outlet NW5 O ring, nitrile C5-4-96 For North American orders shop online: www.bocedwards.com or call: --4-9

TVW5/6 WATER COOLED DIFFUSION PUMP ISO6 NW NW5 6.5 (.) TV NW5 NW5 5 (.97) 5 (.6) (.) 95 (7.6) 75 (.95) 75 (.95).6 (.5) 67.4 (.65) Pumping speed, nitrogen Unbaffled >6 l s - ISO Baffled > l s - ISO Critical backing pressure, DC74EU.4 mbar Backstreaming rate Unbaffled 6 x - mg cm - min - Baffled 4 x -4 mg cm - min - Ultimate pressure DC74EU 5 x -7 mbar DC7 5 x -6 mbar Nominal fluid charge ml Minimum fluid charge 5 ml Recommended fluids DC74EU, DC7 RV5, RV Standard inlet connection NW5 Standard backing connection NW5 Water connection 6 mm od tube W Warm-up time to operational temperature 5 minutes Minimum cooling water flow at C 5 l h - kg - ls 7 6 5 4-5 TVA5/6 TVW5/6 TVA5/6 TVW5/6.5..5..5..5. -4 - - - mbar - - - TVA, TVW Pa - mbar ls Other flange options for customized connections are available on request. Supplied with: optically dense baffle, inlet fluoroelastomer O ring, NW5 centering ring with nitrile O ring, NW5 clamping ring. ACCESSORIES An air cooled gripper assembly to accept the TV tubes is available: please contact BOC Edwards for more information. Cooling fail thermal snap-switch B-4- B Flange type NW5 4 TV style 6 ISO6 NW Voltage V supply V supply V supply 4 4V supply 77 77V supply Pump heater W V H7-7-9 V H7-7-9 V H7-7-9 4 V H7-7-9 77 V H7-7-9 Sight glass (pack of 5) B-7-47 Sight port NW5 O ring, fluoroelastomer B7-5-49 Pump inlet O ring, fluoroelastomer NW5 C5-7-95 ISO6 B7-5-64 Pump outlet NW5 O ring, nitrile C5-4-96 57 VAPOR PUMPS For North American orders shop online: www.bocedwards.com or call: --4-9

DIFFSTAK 6 FOR TV TUBE APPLICATIONS Ø95 (.74) 9 (4.6) 6 (5.5) 6 (.) 5 (.97) (.5) 5 (5.9) 5 6/5 Diffstak The Diffstak 6 diffusion pumps have been designed to meet the specific needs of in-line exhaust machines in the TV tube industry. Diffstak 6 pumps have integral water-cooled baffles (to provide clean pumping) and also incorporate a fluid economizer (to reduce fluid loss). Optionally, we fit an integral quick-cool base to the pump to provide a quick-cooling pump for use on short cycle production lines. These pumps are ideal for in-line exhaust machines, where unvalved pumps are required. Fluid economizer The economizer minimizes fluid loss from the diffusion pump during the air admit phase of the TV tube production cycle. This increases the service life of the pump. The economizer can either be an integral part of the Diffstak or can be clamped to the outlet port, depending on the required system configuration. Quick-cool base The optional quick-cool base is used to remove heat from the pump body and fluid. Select this option for very fast production cycles. The integral quick-cool base reduces the boiler temperature to ºC in 5 minutes. This allows for correct operation of the Diffstak during the air admit phase of the TV tube production cycle and, like the economizer, it minimizes fluid loss from the pump. Aluminizer machines These machines require a valved pumping system. We recommend that you select pumps from our range of pneumatic operation Diffstak pumps. The Diffstak /P, 6/7P and 5/P pumps are all suitable for use with aluminizers, see pages - 4. Pumping speed Nitrogen 5 l s - Hydrogen 5 l s - Minimum backing pump displacement for maximum throughput 6 m h - Recommended fluid DC74EU Fluid charge (dry) 6 ml Fluid charge (dry) for integral QCC 75 ml Inlet connection ISO6 Backing connection NW5 Cooling water connections 6 mm compression coupling.45 kw Minimum cooling-water flow at C 4 l h 5 kg 6/5 Diffstak with welded economizer (no quick-cool coil) 6/5 Diffstak with welded economizer (no quick-cool coil on the pump base) 5 V -phase 5/6 Hz B44-4- 5 V -phase 5/6 Hz B44-4- 5 V -phase 5/6 Hz B44-4-4 Supplied with: NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO 6 trapped O ring. 6/5 Diffstak with welded economizer and integral quick-cool pump base 5 V -phase 5/6 Hz B44-56- 5 V -phase 5/6 Hz B44-56- 5 V -phase 5/6 Hz B44-56-4 Supplied with: NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO 6 trapped O ring. 6/5 Diffstak with condenser, clamped-on economizer and integral quick-cool the pump base 5 V -phase 5/6 Hz B44-55- 5 V -phase 5/6 Hz B44-55- 5 V -phase 5/6 Hz B44-55-4 Supplied with: NW5 centering ring (), NW5 clamp (), water pipe couplings and ferrules, inlet ISO 6 trapped O ring, economizer, claw clamps (4). Heater, 45 W, 5/6 Hz (one required) 5 V H7-- 5 V H7--6 5 V H7--9 ACCESSORIES Cooling fail thermal snap-switch Silicone DC74EU (5 ml) (.94) (7.9) NW5 B-- H--4 For North American orders shop online: www.bocedwards.com or call: --4-9

GRIPPERS (COMPRESSION HEADS) FOR TV TUBE APPLICATIONS 57.5 (.7).5 (.) 4 (.) 56 (.).5 (.) Ø5 (.5) 5 (6.) Ø (.5) x Ø (.4) R67.5 (.66) 6 (.6).5 (4.5) (7.4) 45 Gripper with TVA5/6 During the exhaust phase of the TV tube production cycle, the TV tube is connected to the vacuum seal. The flexible seal bears on the tubulator of the tube gun and this connection is a crucial part of the vacuum system. This seal must be leak tight and must withstand operation at ºC and above. BOC Edwards meets these requirements with a range of grippers (compression heads) that are designed and manufactured to the highest standard. Vacuum-brazed construction All stainless steel construction Integral glass trap Double bend, to prevent fluid migration towards the tube Technology advances To reduce the operating costs of TV tube production and to operate in-line exhaust machines without water, BOC Edwards has developed a new, patented technology gripper that does not require cooling water, but which has a standard gripper rubber seal. This advance allows TV tube carts to be operated without loss of performance. Heat is removed from the area of the gripper seal using heat pipe technology. The cooling is achieved using the cooling fan of the diffusion pump. For more information about this product, please contact BOC Edwards or your local supplier. 45 Note: The best gripper for your application depends on your exhaust machine configuration and the number of tubes on the machine. Please contact BOC Edwards for a recommendation of a design to suit your applications that also ensures ease of maintenance and serviceability. 59 VAPOR PUMPS For North American orders shop online: www.bocedwards.com or call: --4-9

6 VAPOR PUMPS FOR INDUSTRIAL APPLICATIONS BOC Edwards has long been a pioneer of vapor pumps and diffusion pump technology with innovations such as the diffusion pump cold cap and the combined diffusion pump, the Diffstak. BOC Edwards's range of high throughput diffusion pumps have many advantages in industrial applications. High throughput gives high pumping speeds at high pressures, earlier cross over from backing pump set to the diffusion pump, thus reducing pump down time to process pressure. A high tolerance to gas surges and high critical backing pressures are additional benefits of this range of pumps. The pumps, in back to back testing, are comparable to the best leading competition but also incorporating the above benefits. To offer even higher pumping speeds, of up to 45 m h - at pressures intermediate between mechanical boosters and diffusion pumps BOC Edwards can supply our industrially proven vapor booster pumps. Vapor boosters from BOC Edwards have been proven in the field for over years. A constant program of updates and improvements, with input from OEM's and end users, ensures that the vapor boosters always meet the requirements of the industry. This combined with inherent reliability, ease of use, ease of maintenance and tolerance to a wide range of inlet and exhaust pressures means they have been used extensively in metallurgy and coating industries as well as many other specialist applications. Vacuum metallurgy Distillation, drying and degassing Thin film coating and metallizing Large scale research Industrial applications require a robustly designed and constructed vapor pump often with very high throughputs. BOC Edwards provides a complete range of vapor diffusion pumps and vapor boosters to meet these needs. All industrial diffusion pumps are water-cooled. HT series and EO5 pumps These pumps are designed to give high throughput (pressure multiplied by pumping speed) at 4 x - mbar making them ideal for industrial processes that evolve large quantities of gases. Their high critical backing pressure means that they are more tolerant to sudden increases in load. They are particularly suitable for large coating systems and furnaces. All BOC Edwards vapor diffusion pumps are fully fractionating. This means that volatile components are fed to the lower stages of the vapor pump and the vapor fed to the inlet stage is stripped of these fractions and this improves the ultimate vacuum performance of the pump. Conduction cooled baffles above the pump help to prevent pump fluid migration into the vacuum system, which would prevent the pump achieving its ultimate vacuum. Baffles also ensue that backstreaming is minimized. The outgassing from the system, its leak tightness, the vapor pressure of the pump fluid and the number of joints and elastomers used for seals all contribute to the pump down time and ultimate vacuum achievable. Ultimate vacuum is a function of the vapor pressure of the pump fluid selected, at a particular temperature, and in most industrial applications the pump's throughput at a particular pressure is more important than obtaining a very high ultimate vacuum. For these reasons we have elected not to quote an ultimate vacuum for our industrial vapor diffusion pumps, since it would not provide a useful measure of their performance. By combining BOC Edwards vapor diffusion pumps with either our GV series dry pump combinations or our oil-sealed rotary pump combinations fast pump-down and process times are achievable. Our applications specialists are able to recommend suitable pump combinations to meet specific process requirements. Vapor booster pumps Vapor booster pumps operate in a similar way to vapor diffusion pumps but generate boiler pressures approximately ten times higher than is typical for a vapor diffusion pump. The high boiler pressure feed supplies powerful ejector nozzles, that are specifically designed to increase further the throughput of the pump. The ultimate pressure of these pumps is typically in the range -4 to -5 mbar, above which the pumps exhibit considerable pumping speed for permanent gases. Additionally, they are tolerant to high backing pressures. Vapor boosters are typically used in the - to - 4 mbar range where primary pump combinations are often at their limit and ordinary diffusion pumps exhibit instability. BOC Edwards booster pumps are particularly tolerate to pumping contaminated systems and processes with high gas loads of hydrogen, hence their suitability for use in metallurgical and chemical process applications. By combining BOC Edwards vapor booster pumps with either our GV series dry pump combinations or our oil-sealed rotary pump combinations fast pump-down and process times are achievable. Our applications specialists are able to recommend suitable pump combinations to meet specific process requirements. Leak detection As in all vacuum systems, it is essential that systems are maintained as leak tight as possible in order to achieve pumpdown to the required pressure in the desired time. BOC Edwards mass-spectrometer leak detectors are ideal for industrial leak detection and are available in console or transportable versions. For more information, see page 5. For North American orders shop online: www.bocedwards.com or call: --4-9

HT HIGH THROUGHPUT DIFFUSION PUMP Features Highest throughput of comparative sized pumps Earliest crossover pressure of similar sized pumps Excellent maximum backing line pressure and tolerance to gas surges Comparative pumping speed to similar sized pumps Integral cold cap for best performance and low backstreaming Self fractionating for low ultimate pressures Easy change heater assembly Comparative pumping speed 465 l s - ISO pumping speed Nitrogen l s - Helium 465 l s - Maximum throughput (nitrogen) mbar l s - / 7.5 Torr l s - Critical backing pressure (DC74EU). mbar /. Torr Minimum backing pump displacement for maximum throughput 6 m h - / 5 ft min - GV / EM Recommended fluid DC74EU Fluid charge (dry) 5 ml /. qt Inlet/backing connection ANSI / ANSI or EO inch / EO mm or ISO / ISO6 Water connections / inch NPT female 5. kw / 6. hp Warm-up time mins Minimum cooling-water flow at 5 C 4 l h - /. US gal min - Pressure drop across cooling-water supply bar / 4.5 psi kg / 76 lb These are given for guidance, please contact BOC Edwards for a recommendation of pump combinations best suited for your application. ISO speed and throughout data obtained with total pressure measurement. Partial pressure readings typically increase data by ~%. ISO speed measurements are typically % less than AVS measurements for the same pump. 5, 4,5 4, 6 EHVI ISO6 ANSI 95 (.6) 79 (.) ls -,5,,5,,5, 5 HT -4 - - - mbar - - Pa Comparative pumping speeds from back to back testing ISO pumping speed obtained using total pressure gauges ISO throughput obtained using total pressure gauges 4 6 4 - mbar ls 6 VAPOR PUMPS 5, 4,5 5.5 ISO ANSI 4, ANSI,5.5 ls -,,5 9 7.5 - Torr ls, 6 ISO6 EHVI " EHVI 47 (.54),5 4.5, HT 5.5-4 - - - Torr Comparative pumping speeds from back to back testing ISO pumping speed obtained using total pressure gauges ISO throughput obtained using total pressure gauges For North American orders shop online: www.bocedwards.com or call: --4-9

6 HT, ANSI/ANSI V B-- V B-- V B-- 4 V B--4 45 V B--45 44 V B--44 46 V B--46 4 V B--4 HT, EO/EO mm V B-- V B-- V B-- 4 V B--4 45 V B--45 44 V B--44 46 V B--46 4 V B--4 HT, ISO/ISO6 V B-- V B-- V B-- 4 V B--4 45 V B--45 46 V B--46 4 V B--4 Supplied with: ANSI and ISO pumps include O rings, 4 V ac integral electrical control circuits and electrical connections HT, ANSI /ANSI OEM version V B-- 4 V B--4 45 V B--45 44 V B--44 46 V B--46 4 V B--4 Supplied with: O rings and basic electrical connection Heater 7 W, 5/6Hz, -ph (three required) V H7-6- V H7-6- V H7-6- 4 V H7-6- 45 V H7-6-4 46 V H7-6-5 4 V H7-6-6 ANSI inlet O ring VIT454 H-6-99 EO inch inlet O ring VOR456 H-5- ISO inlet trapped O ring nitrile B7-5-95 ANSI backing O ring VOR H-5-5 EO mm backing O ring VOR4 H-5-55 Thermal snap-switch assembly B--9 Pack of 5 For full information about HT pump accessories, see page 7. For vapor pump fluids, see page 49. For North American orders shop online: www.bocedwards.com or call: --4-9

HT6 HIGH THROUGHPUT DIFFUSION PUMP Features Highest throughput of comparative sized pumps Earliest crossover pressure of similar sized pumps Excellent maximum backing line pressure and tolerance to gas surges Comparative pumping speed to similar sized pumps Integral cold cap for best performance and low backstreaming Self fractionating for low ultimate pressures Easy change heater assembly Comparative pumping speed 5 l s - ISO pumping speed Nitrogen 65 l s - Helium 7 l s - Maximum throughput (nitrogen) mbar l s - /.5 Torr l s - Critical backing pressure (DC74EU).4 mbar / Torr Minimum backing pump displacement for maximum throughput 94 m h - / 55 ft min - GV / GV6M / EM75 Recommended fluid DC74EU Fluid charge (dry) 4 ml /.5 qt Inlet/backing connection ANSI6 / ANSI or ISO5 / ISO Water connections ¾ inch NPT female 9 kw / hp Warm-up time 6 mins Minimum cooling-water flow at 5 C 7 l h - /. US gal min - Pressure drop across cooling-water supply bar / 4 psi 5 kg / 4 lb These are given for guidance, please contact BOC Edwards for a recommendation of pump combinations best suited for your application. ISO speed and throughout data obtained with total pressure measurement. Partial pressure readings typically increase data by ~%. ISO speed measurements are typically % less than AVS measurements for the same pump.,,, 9,, 5 7 4 ISO 6 (4.) ls - 7, 6, 5, 4,, 5 9 - mbar ls 6 ANSI 4 (47.), 6 HT6, -4 - - - mbar - - Pa Comparative pumping speeds from back to back testing ISO pumping speed obtained using total pressure gauges ISO throughput obtained using total pressure gauges VAPOR PUMPS,,, 6.5 4.75.5 ISO5 ANSI6 9,.5, ANSI ls - 7, 6, 5, 5.75.5.5 - Torr ls 4, 9, 6.75 ISO,, HT6 4.5.5 6 (4.) -4 - - - Torr Comparative pumping speeds from back to back testing ISO pumping speed obtained using total pressure gauges ISO throughput obtained using total pressure gauges For North American orders shop online: www.bocedwards.com or call: --4-9

64 HT6, ANSI6/ANSI V B-4- V B-4- V B-4-4 V B-4-4 45 V B-4-45 44 V B-4-44 46 V B-4-46 4 V B-4-4 HT6, ISO5/ISO V B-5- V B-5- V B-5-4 V B-5-4 45 V B-5-45 44 V B-5-44 46 V B-5-46 4 V B-5-4 Supplied with: ANSI and ISO pumps include O rings, 4 V ac integral electrical control circuits and electrical connections HT6, ANSI 6/ANSI OEM version V B-- 4 V B--4 45 V B--45 44 V B--44 46 V B--46 4 V B--4 Supplied with: O rings and basic electrical connections Heater, 5 W, 5/6 Hz, -phase (six required) V H7-6- V H7-6- V H7-6- 4 V H7-6- 45 V H7-6-4 44 V H7-6- 46 V H7-6-5 4 V H7-6-6 ANSI6 inlet O ring fluroelastomer H-4-49 ANSI backing O ring VOR44 (pack of ) H-5-7 ISO backing Co-Seal nitrile B7-5-7 Thermal snap-switch assembly B--9 For full information about HT pump accessories, see page 7. For vapor pump fluids, see page 49. For North American orders shop online: www.bocedwards.com or call: --4-9

HT HIGH THROUGHPUT DIFFUSION PUMP ISO6 54 (.99) B Comparative pumping speed l s - ISO Pumping speed Nitrogen l s - Helium 6 l s - Maximum throughput (nitrogen) 9 mbar l s - / 4. Torr l s - Critical backing pressure (DC74EU). mbar / Torr Minimum backing pump displacement for maximum throughput 5 m h - / ft min - GV6M / EM75 Recommended fluid DC74EU Fluid charge (dry) 6 ml /. qt Inlet/backing connection ANSI / ANSI4 or ISO6 / ISO6 Water connections ¾ inch NPT female.6 kw / 6.9 hp Warm-up time to operational temperature 75 mins Minimum cooling-water flow at 5 C 96 l h - / 4. US gal min - Pressure drop across cooling-water supply. bar / 7.4 psi kg / 74 lb These are given for guidance, please contact BOC Edwards for a recommendation of pump combinations best suited for your application. ISO speed and throughput data obtained with total pressure measurement. Partial pressure readings typically increase data by ~%. ISO speed measurements are typically % less than AVS measurements for the same pump.,, 5 45 ANSI4 C (5.6) ls - 6, 4,,, 4 5 5 ls - mbar 65 6 5 ISO6 ANSI 4-5 -4 - - - - - - Comparative pumping speeds from back to back testing ISO pumping speed obtained using total pressure gauges ISO throughput obtained using total pressure gauges HT 5 - mbar Pa VAPOR PUMPS ANSI4 ISO6 A B C A 65 (5.) Electrical supply connector Water inlet connector Water outlet connector HT, ANSI/ANSI4 V B4-- V B4-- V B4-- 4 V B4--4 45 V B4--45 44 V B4--44 46 V B4--46 4 V B4--4 For North American orders shop online: www.bocedwards.com or call: --4-9

HT, ISO6/ISO6 V B4-- V B4-- V B4-- 4 V B4--4 45 V B4--45 44 V B4--44 46 V B4--46 4 V B4--4 Supplied with: ANSI and ISO pumps include O rings, 4 V ac integral electrical control circuits and electrical connections HT, ANSI /ANSI 4 OEM version V B4-- 4 V B4--4 45 V B4--45 44 V B4--44 46 V B4--46 4 V B4--4 Supplied with O rings and basic electrical connections 66 Heater, W, 5/6 Hz, -phase (six required) V H7-6- V H7-6- V H7-6- 4 V H7-6- 45 V H7-6-4 46 V H7-6-5 4 V H7-6-6 ANSI inlet O ring H-4-5 ANSI4 backing O ring H-5-75 ISO6 backing Co-Seal nitrile B7-5-7 Thermal snap-switch assembly B--9 For full information about HT pump accessories, see page 7. For vapor pump fluids, see page 49. For North American orders shop online: www.bocedwards.com or call: --4-9

EO5 HIGH THROUGHPUT DIFFUSION PUMP Features High throughput of comparative sized pumps Earliest crossover pressure of similar sized pumps Excellent maximum backing line pressure and tolerance to gas surges Comparative pumping speed to similar sized pumps Integral cold cap for best performance and low backstreaming Self fractionating for low ultimate pressures Easy change heater assembly Comparative pumping speed 4 ls - ISO pumping speed nitrogen ls - Maximum throughput (nitrogen) DC74 BU mb l s - / 6.5 Torr l s - DC7 6 mb ls - / 9.5 Torr l s - Critical backing pressure (DC74EU). mbar / Torr Minimum backing pump displacement for maximum throughput 5 m h - / 45 ft min - GV6M / EM75 Recommended fluid DC74EU Fluid charge (dry) 6 ml / 6.4 qt Inlet/backing connection ANSI 5 / ISO ANSI 6 / ISO Water connections 4 x female ¾ inch NPT female 5 kw / hp Warm-up time 45 mins Minimum cooling-water flow at 5 C 4 lh - / 6.6 US gal min - Pressure drop across cooling-water supply.4 bar /. psi 45 kg / 99 lbs These are given for guidance, please contact BOC Edwards for a recommendation of pump combinations best suited for your application ISO speed and throughput data obtained with total pressure measurement. Partial pressure readings typically increase data by ~%. ISO speed measurements are typically % less than AVS measurements for the same pump.. ls - 5, 45, 4, 5,, 5,, 5 45 4 5 5 - ls mbar 67 (.9) ISO 6" ANSI 5,, 5, -5-4 - - - EO5 mbar - - Pa - Comparative pumping speed from extrapolated back to back testing ISO pumping speed obtained using total pressure gauges ISO throughput obtained using total pressure gauges 5 5 VAPOR PUMPS. 6" ANSI ISO ISO 7 (4.4) 5" ANSI EO5, ANSI5, ANSI6 V B5-- 4 V B5--4 45 V B5--45 44 V B5--44 46 V B5--46 4 V B5--4 EO5, ISO, ISO V B5-- 4 V B5--4 45 V B5--45 44 V B5--44 46 V B5--46 4 V B5--4 For North American orders shop online: www.bocedwards.com or call: --4-9

Heater,.5 kw 5/6 Hz, -phase (six required) V H7-6- 4 V H7-6- 45 V H7-6- 44 V H7-6-95 46 V H7-6- 4 V H7-6-4 ANSI 5 inlet O ring H-5-6 ANSI 6 backing O ring H--6 Thermal snap switch assembly B--9 ISO inlet O ring (order metres) H--5 ISO backing centering O ring C--74 6 For North American orders shop online: www.bocedwards.com or call: --4-9

B4A VAPOR BOOSTER PUMP 6 (4.7) A C (4.4) 6 (6.) D 54 (.) (.79) (74.) (5.5) 9 (47.99) Very large pumping speed at high operating pressures Very high throughput at operating pressures Quick crossover for excellent pumpdown times Industry proven for over years Excellent reliability Pumping speed (air) 4 l s - Pumping speed (hydrogen) 6 l s - Maximum throughput mbar l s - / 75 Torr ls - Critical backing pressure (with AP fluid) -.6 mbar /.5 - Torr displacement 9 m h - / ft min - GV6M / EM75 Recommended fluid AP Fluid charge liter / 9.5 qts 6. kw / hp Warming-up time for full performance at maximum heater input 6 min Minimum water flow 75 l h - /. US gal min - @ C inlet Water block threaded hole ½inch BSP Backing connection inch union 65kg / 65 lb These are given for guidance, please contact BOC Edwards for a recommendation of pump combinations best suited for your application. - ls 5 4 AP ls - mbar A in (5 mm) internal B Position of base securing holes. in (54 mm) external tube &/6 in (.7 mm) on %/ in (549 mm) p.c.d. C / in water inlet D / in water outlet B4A -phase 5/6 Hz - V delta B65-- - V delta B65-- 4-5 V delta B65--4-4 V star B65-- 45-44 V star B65--44 46-4 V star B65--4 Ø7 (7.) x Ø (.4) x Ø7.4 (5.5) Heater, kw, three required V (for B65--) H7--5 V (for B65--, B65--) H7--9 4 V (for B65--4, B65--44) H7-- 77 V (for B65--4) H7--7 Inlet O ring VIT454 H-6-99 Backing O ring VIT59 H-6-59 Drain plug O ring VIT6 (pack of 5) H-6-6 Dipstick O ring VIT (pack of ) H-6- Boiler protection thermal snap-switch B64-- Spares kit B65-- B 47 (.5) 57 (.4) 54 (.6) 69 VAPOR PUMPS -4 - - B4A - - mbar ACCESSORIES PRA pneumatic baffle & isolation valve Adaptor flange (for PRA) Cooling-fail thermal snap-switch Apiezon AP ( liters) B46-5- B46-5-7 B-- H6--5 - - Pa For vapor pump fluids, see page 49. For North American orders shop online: www.bocedwards.com or call: --4-9

B5M VAPOR BOOSTER PUMP 5 AP 4 - ls ls - mbar -4 - B5M - - - mbar - - Pa 966 (.) 569 (.4) (.99) O.5 Ø77 (9.) O.5 6 (.5) 7 Very large pumping speed at high operating pressures Very high throughput at operating pressures Quick crossover for excellent pumpdown times Industry proven for over years and continuously updated to suit OEM and end-user requirements Excellent reliability Boiler access at both ends for ease of cleaning Pumping speed (air) 5 l s - Pumping speed (hydrogen) 5 l s - Maximum throughput mbar l s - / 7.5 Torr l s - Critical backing pressure (with AP) 5. - 6 mbar / 4-4.5 Torr displacement 9 m h - / 7 ft min - Torr GV4M / EM75 Recommended fluid Apiezon AP Fluid charge 55 liter / 5 qt Inlet connection.6 holes on 66. PCD Backing connection 4 6.7 holes on 5 PCD Water connection inch BSP 6 kg / 67 lb.5 kw / hp Warming-up time to operating temperature 6 min Minimum water flow 5 l h - / 9.9 US gal min - These are given for guidance, please contact BOC Edwards for a recommendation of pump combinations best suited for your application. (.4) (5.) 67 (6.66) Heaters may be withdrawn either end, allow 54 mm for this purpose A = boiler cleaning point A 49 (6.5) 45 B B5M -ph 5/6 Hz with terminal box V B64-7- 4 V B64-7-4 45 V B64-7-45 44 V B64-7-44 46 V B64-7-46 4 V B64-7-4 B5M -ph 5/6 Hz with control box V B64-- 4 V B64--4 45 V B64--45 44 V B64--44 46 V B64--46 4 V B64--4 O Ø79 (.9) A (.) 67 (.6) For North American orders shop online: www.bocedwards.com or call: --4-9 Heater.5 kw ( required) V (for V pumps) H7-- V (for 4 V pumps) H7--4 4 V (for 45 V pumps) H7--5 54 V (for 44 V pumps) H7--6