Precise, flexible, efficient automation solutions for the semiconductor industry

Precise, flexible, efficient automation solutions for the semiconductor industry

3 Wafer Handling High rigidity, no overshoot, no backlash: Rexroth wafer handling solutions are designed for perfect balance between high-dynamic servo drives, high-rigidity linear subsystems and pneumatic actuators. What this means to you is less unproductive time combined with standardized handling thoughout your front-end operations. Predefined algorithms on the motion control systems prevent vibration. Higher-order motion profiles and spline functions produce smoother motion sequences. Wafer Stages The wafer stages program supports high-precision motion control in the nanometer range for wafer alignment, positioning and testing, as used in inspection and quality control. The NYCe 4000 motion control system guarantees high precision at 1 5 nm resolution as well as slow uniform motion 50 nm/s. Special servo motors and ironless linear and torque motors enhance dynamic performance. High-precision linear guides eliminate vibration. By adding a pneumatic subsystem, we can put together a complete automation package.

4 Linear Motion System An external non-contact motion system moves the wafers through the process chambers: The Rexroth LMS Linear Motion System features a simplified design which offers extremely high flexibility. Coils mounted outside the chamber provide drive power for magnetic carriers having no need for seals. All of the components are mounted outside the chamber increasing the availability to the machine. The technology is suited for virtually all load factors, precision levels, and motion profiles. The system offers great flexibility allowing individual carriers to move forwards and backwards at different speeds. Back End Rexroth s modular high-speed, high-precision solutions handle work pieces with no overshoot at the end position, seamlessly integrating all types of sensors and actuators. Our back end program covers the entire process flow from dicing and die bonding to pick-and-place. Rexroth supports the entire range of motors: servo, 2-phase stepper, voice coil, and piezo. The power ratings range from several W to kw.

5 Bosch Rexroth EcoShape The Tubular Framing System Implement applications almost anywhere in record time with only 14 standard components The Original Aluminum Modular Profile System Strong profiles Guaranteed performance data Fully machined, corrosion resistant surfaces Reusability Industry-best connection technology Easier to assemble Easier to reconfigure Greater flexibility Quick & Easy 30 different machining options for each profile 500,000 combination options Easy, fast configuration with planning software Manual Production System Workstations, Material Flow, Material Supply Clean Room Profile System Eliminates particulatetrapping surfaces, minimizes out gassing and enhances airflow with thoughtfully engineered components

6 has the components you need Precision Ball Screws Full line ranging from 8 mm to 60 mm Nominal diameter d 0 6 8 12 16 20 25 32 40 50 63 80 Lead P 1 2 2.5 5 10 12 16 20 25 32 40 64 Different ball nut solutions to choose from Full range of bearings, pillow block units, and ball nut housings Lead accuracy from T5 (0.023/300mm) to T9 (0.130/30mm) Preload and non-preload solutions available Corrosion resistant designs with our TDC (Thin Dense Chrome) plating Customized or standard end machining possibility Ball Rail Systems Full line of standard and mini rails and runner blocks Available in sizes from 7 mm to 125 mm rails and runner blocks 4 carriage types, 6 accuracy classes Corrosion resistant plating options Different preload options Interchangeable rails and runner blocks Rail seal mounting hole cover strip

7 to build your motion control system Industrial PCs and HMIs Broad range for control, operation and visualization Reliable system technology Integrated Motion Control and Drives High bandwidth control loops Powerful tuning and visualization software Open architecture PLC and Motion Control Scalable hardware platform Runtime system with motion, robot and logic controls Extensive software libraries in conformity with IEC 61131-3 and PLCopen Smart Compact Drives 100 W 3.5 kw Ethernet-based communications Multi-encoder interface Safety on board Drive-integrated motioncontrol (IEC 61131-3) Servo Motors: 100 Watt 3.5 kwatt and higher MSM motors Torque up to 7.1 Nm Speed up to 5,000 rpm Multi-turn absolute encoder MSK motors Torques up to 495 Nm Speed up to 9,000 rpm Encoder systems for a wide and diverse range of applications Linear Motors Ironless core Force up to 1,700 N Velocity up to 1,400 m/min No cogging forces High acceleration and dynamics Simple integration thanks to various mounting planes Iron core motors Force of up to 21,500 N Velocity up to 600m/min Compact dimensions Heat dissipation minimized by thermal encapsulation

8 all from one source Linear Systems Compact Modules Belt driven Ball screw driven Linear motor driven Linear Systems Precision Modules High load capacity, precision and rigidity Extremely high positioning accuracy and repeatability Cartesian Systems Easy Handling Basic Mechanical and pneumatic components, grippers, rotary modules, motors, sensors, single- and multiaxis linear systems Actuator Ball Screw Toothed Belt Linear Motor Precision Module Compact Module Customized Systems One responsibility For design, manufacturing and quality Global standards For design, manufacturing and quality Dimensions W x H (mm) Maximum Length (mm) CKK 9 70 70 x 32 650 CKK 12 90 90 x 40 750 CKK 15 110 110 x 50 1500 CKK 20 145 145 x 65 1800 CKK 20 200 200 x 100 2200 (5500) CKK 9 70 70 x 32 650 CKK 12 90 90 x 40 5500 CKK 15 110 110 x 50 5500 CKK 20 145 145 x 65 5500 CKK 20 200 200 x 100 10000 CKL 90 90 x 56 5500 CKL 110 110 x 66 5500 CKL 145 145 x 85 5500 CKL 200 200 x 127 5500 Dimensions W x H (mm) Maximum Length (mm) PSK 40 40 x 20 350 PSK 50 50 x 26 600 PSK 60 60 x 33 940 PSK 90 86 x 46 940 Comfort Basic + pre-parameterized servo drives and the commissioning assistant Mechanics + Drives + Controls = Easy Handling Saving cost Simplify final assembly Simplify supply chain Simplify quality control Simplify supplier man- More than 20,000 wafer lifts produced in the U.S. Advanced agement Comfort + pre-configured, Simplify service scalable controls Reduce inventory

Bosch Rexroth Corporation Corporate Headquarters 14001 South Lakes Drive Charlotte, NC 28273 Telephone (800) 438-5983 Facsimile (704) 583-0523 www.boschrexroth-us.com Find your local contact person here: www.boschrexroth-us.com/addresses RA 08042/06.12 Bosch Rexroth Corporation 2012 Subject to revisions Printed in the United States