Miniature Solenoid Valves Precision Fluidics. PNEUMATIK. HYDRAULIK. E-ACHSEN. BILDVERARBEITUNG Komponenten & Systemintegration

Precision Fluidics PNEUMATIK. HYDRAULIK. E-ACHSEN. BILDVERARBEITUNG Komponenten & Systemintegration

Electronic Pressure Control When you partner with the global leader in motion and control technologies, expect to move your business and the world forward. From miniature solenoid valves to highly integrated automation systems, our innovations are critical to life-saving medical devices and scientific instruments used for drug discovery and pathogen detection. Not to mention, critical to decreasing time to market and lowering your overall cost of ownership. So partner with Parker, and get ready to move, well, anything. www.parker.com/precisionfluidics 1 603 595-1500

Table of Contents product page Pneumatic X-Valve Miniature 8 mm Pneumatic Solenoid Valve Designed for Portable and Stationary Applications Requiring 4 a Small Footprint and Low Power Consumption Series MX 11 Miniature 10 mm Pneumatic Solenoid Valve Designed for Portable and Stationary Applications Requiring Highest Flow to Power Consumption Ratio Increasing Device Battery Life Ten X Miniature 10 mm Pneumatic Solenoid Valve Designed for Portable and Stationary Applications Requiring 19 Higher Throughput and Low Power Consumption Ten X Le Miniature 10 mm Pneumatic Solenoid Valve Designed for Portable and Stationary Applications Requiring Higher 5 Pressure and Throughput with Low Power Consumption Miniature 10 mm Pneumatic Solenoid Valve SRS Designed for Applications Requiring Low Power Consumption 31 with Limited Manifold Space Miniature 10 mm Pneumatic Solenoid Valve PND Series Designed for Applications Requiring Rapid Pressure Relief 37 and Fail Safe Operation Miniature 15 mm Pneumatic Solenoid Valve Series 11 Designed for Portable and Stationary Applications requiring Compact Integration 41 and Long Life with Numerous Material and Pneumatic Connectivity Options Miniature 15 mm Pneumatic Solenoid Valve Series 5 Designed for Portable and Stationary Applications requiring Long Life 49 and Male Threaded Pneumatic Connectivity Miniature 15 mm Pneumatic Solenoid Valve Series 6 Designed for Portable and Stationary Applications requiring Long Life, 56 Compact Integration, and Female Threaded Pneumatic Connectivity V Miniature 15 mm Pneumatic Solenoid Valve Economical Valve Designed for Portable and Stationary Applications 63 requiring Long Life and Minimal Weight Value Added Application-Specific Solutions 70

4 X-Valve 8mm Solenoid Valve Typical Applications Product Specifications Mechanical Valve Type: 3-Way, Solenoid-actuated poppet style - Universal (6 psig & 30 psig models) - Normally Closed (100 psig model) -Way Solenoid-actuated poppet style - Normally Closed, Bi-Directional Flow (6 & 30 psig models) - Normally Closed, Directional Flow (100 psig model) Media: Non-Reactive gases Operating Environment: 3 to 1 F (0 to 50 C) Storage Temperature: -40 to 158 F (-40 to 70 C) Dimensions: - Length: 0.9 in (3.4 mm) - Width: 0.31 in (7.9 mm) - Height: 0.48 in (1. mm) to Barb End / 0.35 in (8.9 mm) to Manifold Face Spacing: 0.315 in (8 mm) center Porting: - Barbs for 1/16 in (1.5 mm) I. D. Tubing, (1/3 in Wall Max.) - Manifold Mount (Gasket accessory required, see ordering info) Weight: 0.16 oz (4.5 g) Internal Volume: 0.0056 in 3 (0.09 cm 3 ) Miniature Pneumatic Solenoid Valve The X-Valve is a miniature pneumatic solenoid valve measuring only 8 mm in width. The compact size, light weight and low power consumption of the X-Valve is the ideal solution for portable applications and those applications with limited space and available power. The body construction of the X-Valve is suited for manifold or barbed-tube pneumatic connections and is available in -way normally closed and 3-way universal configurations. Features system design application requirements Electrical Power Options: 0.5 Watt (6 psig model) 1.0 Watt (30, 100 psig model) Voltage Options: 3, 5, 1 or 4 VDC Further power reduction may be achieved through the use of spike and hold or PWM electrical control. Electrical Connections: PC Pins, 4 mm centers (all models) Lead Wire/Connector Assembly (Accessory, see ordering info) Wetted Materials Bobbin/Body: PBT (Polybutylene terephthalate) Pole & Plunger: 430 FR Series Stainless Steel Seal (Options): FKM, EPDM, Silicone Other: 30 Series Stainless Steel Performance Characteristics Leak Rate: Tested with Air <0.016 sccm (6 psig Silicone) <0.016 sccm (30 psig FKM) <0.16 sccm (6 psig EPDM & FKM) <0. sccm (100 psig only) Response: < 0 ms maximum cycling (FKM, Silicone) < 50 ms maximum cycling (EPDM) Pressure/Vacuum: 0 to 6 psid (0.4 bar differential) 0 to 30 psid (.0 bar differential) 0 to 100 psid (6.9 bar differential) Proof Pressure: 00 psig (13.7 bar) Minimum Flow: 4 slpm @ 6 psid (0.4 bar differential) 6 slpm @ 30 psid (.0 bar differential) 9 slpm @ 100 psid (6.9 bar differential) Orifice Sizes/Equivalent Cv: 0.045 (1.14 mm) / 0.018 0.030 (0.75 mm) / 0.010 0.00 (0.5 mm) / 0.005 Reliability: Life Cycle rating of 5 million (worst case tested, no performance degradation) X-Valve is a registered trademark of Parker Hannifin Corporation.

5 X-Valve Miniature Pneumatic Solenoid Valve Typical Flow Curve All Models pm) Flow Rate (sl Pressure (bar) 0 1 3 4 5 6 1 10 8 6 4 0.00" (0.51 mm) Orifice 0.030" (0.76 mm) Orifice 0.045" (1.14 mm) Orifice 0 0 10 0 30 40 50 60 70 80 90 100 Pressure (psi) pm) Rate (sl Flow Pressure (bar) 0 01 0.1 0 0. 03 0.3 04 0.4 6 5 4 3 1 0 Models 1 and 6 0.045 (1.14 mm) Orifice 0 1 3 4 5 6 Pressure (psi) pm) Rate (sl Flow Pressure (bar) 00 0.0 05 0.5 10 1.0 15 1.5 0.0 9 8 7 6 5 4 3 1 0 Models and 7 0.030 (0.76 mm) Orifice 0 5 10 15 0 5 30 Pressure (psi) Models 5 and 8 0.00 (0.51 mm) Orifice Pressure (bar) 1 0 1 3 4 5 6 10 pm) Rate (sl Flow 8 6 4 0 0 10 0 30 40 50 60 70 80 90 100 Pressure (psi)

6 X-Valve Miniature Pneumatic Solenoid Valve Pressure and Flow Capabilities/Power Model No. Orifice Size Nominal Cv Maximum Operating Pressure Differential Power Consumption 1 and 6 0.045 in (1.14 mm) 0.018 6 psi (0.4 bar differential) 0.5 Watt and 7 0.030 in (0.76 mm) 0.010 30 psi (.0 bar differential) 1 Watt 5 and 8 0.00 in (0.51 mm) 0.005 100 psi (6.9 bar differential) 1 Watt Pneumatic Interface / Electrical Interface Short Pin (For Pin/Wire Lead or PCB Terminal Housing Connection) [Reference Accessories section] Long Pin (For Pin/PCB solder mount connection) Coil Connections Electrical Connection Options: or equivalent. Mechanical Integration Dimensions 3-WAY UNIVERSAL, NORMALLY OPEN PORT -WAY NORMALLY CLOSED, BLOCKED PORT (NOT USED) (3X) BARB FITTING FOR 1/16" I.D. THIN WALL POLYURETHANE TUBING.100 [.54] TO RECEPTACLE CENTER LINE..150 [3.81] X.140 [3.56] TO PIN C/L.157 [4.00] RECEPTACLE CONTACTS FOR.05 [0.64] SQ. TERMINAL POSTS.180 [4.57].714 [18.14].916 [3.7].640 [16.6].854 [1.69] COMMON PORT NORMALLY CLOSED PORT.375 [9.53].480 [1.19].155 [3.94].310 [7.87] UNITS IN [MM]

7 X-Valve Miniature Pneumatic Solenoid Valve ANSI Symbols PRESSURE (3) EXHAUST (1) SUPPLY PRESSURE Pneumatic Schematics by Valve Types UNIVERSAL OPTION #1 (NORMALLY CLOSED) 1 3 UNIVERSAL OPTION # (NORMALLY OPEN) (1) ATM (3) SUPPLY LEGEND: SUPPLY: Pneumatic Source or Supply Pressure EXHAUST: Exhaust to Atmospheric Pressure REQMT: Customer Requirement or Application ATM: Atmospheric Pressure (3) SUPPLY 1 3 (3) ATM (1) EXHAUST (1) SUPPLY PRESSURE UNIVERSAL OPTION #3 (DISTRIBUTOR) (3) REQMT (3) SUPPLY () SUPPLY (1) REQMT 1 3 (1) SUPPLY PRESSURE (3) EXHAUST NORMALLY CLOSED (MODEL-5 / 100 PSI VERSION ONLY) 1 3 (3) SUPPLY (1) SUPPLY (1) ATM PRESSURE -WAY NORMALLY CLOSED, BI-DIRECTIONAL FLOW (MODELS 6 AND 7) (3) BLOCKED INTERNALLY 1 (3) BLOCKED INTERNALLY () SUPPLY OR REQMT (1) SUPPLY OR REQMT () SUPPLY OR REQMT (1) SUPPLY OR REQMT PRESSURE (3) BLOCKED INTERNALLY -WAY NORMALLY CLOSED, DIRECTIONAL (MODEL 8) 1 (3) BLOCKED INTERNALLY (1) SUPPLY () SUPPLY (1) REQMT

8 X-Valve Miniature Pneumatic Solenoid Valve Installation and Use.315 [8.00].157 [3.99].64 [16.31] X-Valve Manifold Mount Diagram Parker Precision Fluidics recommends 3-5 in-oz of torque for the screws.047 X.0 ±.0 [Ø1.19 X 5.1 ±0.5] 0-80 UNF - B.15.0 [3.8 ±0.5].535 [13.59].675 [17.15].030 [0.76] (90 ) (Ø.13 [Ø3.35]).315 [8.00].090 X "DEPTH".11/.115.110 [Ø.84/.9.79] 90 TO Ø.13 ±.003 Ø3.35 ±0.07] (SEE DETAIL "B") DETAIL "B" UNITS IN [MM] Recommended X-Valve Manifold Dimensions 4X Ø.047.19 ±.0 [Ø1.19 4.8 ±0.5] 0-80 UNF-B.14 ±.0 [3.6 ±0.5].170 [4.3].600 [15.4].315 [8.00].350 [8.89].158 [4.01].030 [0.76].170 [4.3].535 [13.59] 1.5 [31.8].64 [16.31].535 [13.59].675 [17.15] X Ø.090.375 [Ø.9 9.53] 10-3 UNF-B.5 ±.0 [3.6 ±0.5].375 [9.53].750 [19.05] (90 ) 3X Ø.090.350 [Ø.9 8.89] Ø.114 ±.00.110 [Ø.90 ±0.05.79] 90 TO Ø.13 [Ø3.35] (SEE DETAIL "A") (Ø.13 [Ø3.35]).375 [9.53] Ø.090.410 [Ø.9 10.41] 10-3 UNF-B.5 ±.0 [3.6 ±0.5].350 [8.89] UNITS IN [MM] DETAIL "A"

9 X-Valve Miniature Pneumatic Solenoid Valve Installation and Use Recommended X-Valve Mounting (4) MOUNTING SCREWS ARE REQUIRED FOR SINGLE VALVE INSTALLATION ALTERNATING MOUNTING SCREWS CAN BE USED TO FACILITATE MULTIPLE VALVE INSTALLATION Accessories Manifold Rubber Gasket (FKM) Mounting Options 1 Wire Leads Screw 0-80 x 1/ Binding Head, Phillips 191-000100-08 (see valve mounting recommendations above) Retention Pin PCB PIN SECURED VIA SOLDER CONNECTION TO PCB RETENTION PIN PCB X Ø.036 [Ø0.91] I.D. X Ø.060 [Ø1.5] O.D. PAD PTH PRINTED CIRCUIT BOARD.157 [3.99] X Ø.038 [Ø0.97] I.D. X Ø.100 [Ø.54] O.D. PAD PTH.80 [7.11].077 [1.96].015 [.38].775 [19.69].131 [3.33] UNITS IN [MM]

10 X-Valve Miniature Pneumatic Solenoid Valve Ordering Information Sample Product ID X 1 05 L F Description Series Model Number: Pressure / Orifice / Power / Type Voltage Electrical Coil Connection Elastomer Options X 1: 6 psig / 0.045 / 0.5 Watt / 3-Way Universal 03: 3 VDC S: Short Pins () F: FKM : 30 psig / 0.030 / 1 Watt / 3-Way Universal 05: 5 VDC L: Long Pins (3) E: EPDM (6 psig only) 5: 100 psig / 0.00 / 1 Watt / 3-Way NC only 1: 1 VDC S: Silicone (6 psig only) 6: 6 psig / 0.045 / 0.5 Watt / -Way NC, Bi-Directional Flow (1) 4: 4 VDC 7: 30 psig / 0.030 / 1 Watt / -Way NC, Bi-Directional Flow (1) 8: 100 psig / 0.00 / 1 Watt / -Way NC, Directional Flow (1) () For Pin/Wire Lead or PCB Terminal Housing Connection (1) -Way NC configurations only available in FKM (3) For Pin/PCB solder mount connection Product ID Reference Order Part Number Product ID Reference Order Part Number Product ID Reference Order Part Number X-1-03-L-F 91-000001-001 X-1-05-S-F 91-000001-009 X-5-1-S-F 91-000001-019 X-1-1-L-F 91-000001-00 X-1-05-L-F 91-000001-010 X-5-4-S-F 91-000001-00 X--1-L-F 91-000001-003 X--03-S-F 91-000001-011 X-5-1-L-F 91-000001-01 X--4-L-F 91-000001-004 X--03-L-F 91-000001-01 X-5-4-L-F 91-000001-0 X-1-03-S-F 91-000001-005 X-5-03-S-F 91-000001-013 X-5-05-L-F 91-000001-031 X-1-1-S-F 91-000001-006 X-5-03-L-F 91-000001-014 X-5-05-S-F 91-000001-03 X--1-S-F 91-000001-007 X-1-4-S-F 91-000001-017 X--05-L-F 91-000001-033 X--4-S-F 91-000001-008 X-1-4-L-F 91-000001-018 X--05-S-F 91-000001-034 ORDER ON-LINE Product ID Reference Order Part Number Product ID Reference Order Part Number Product ID Reference Order Part Number X-6-03-L-F 91-000007-001 X-6-05-S-F 91-000007-009 X-8-1-S-F 91-000007-019 X-6-1-L-F 91-000007-00 X-6-05-L-F 91-000007-010 X-8-4-S-F 91-000007-00 X-7-1-L-F 91-000007-003 X-7-03-S-F 91-000007-011 X-8-1-L-F 91-000007-01 X-7-4-L-F 91-000007-004 X-7-03-L-F 91-000007-01 X-8-4-L-F 91-000007-0 X-6-03-S-F 91-000007-005 X-8-03-S-F 91-000007-013 X-8-05-L-F 91-000007-031 X-6-1-S-F 91-000007-006 X-8-03-L-F 91-000007-014 X-8-05-S-F 91-000007-03 X-7-1-S-F 91-000007-007 X-6-4-S-F 91-000007-017 X-7-05-L-F 91-000007-033 X-7-4-S-F 91-000007-008 X-6-4-L-F 91-000007-018 X-7-05-S-F 91-000007-034 Accessories 195-000159-001: Rubber (FKM) Gasket (1) (1) Not supplied with the valve. Used as a seal between the valve ports and manifold. 90-006061-001: 1" (30.5 cm) Wire Leads () () Not supplied with the valve. Used to electrically interface with the valve. 190-00600-001: Retention Pin, PCB (3) (3) Not supplied with the valve. Used to secure the valve for printed circuit board solder mounting. 191-000100-08: Screw, 0-80 x 1/", Binding Head, Phillips (4) (4) Not supplied with the valve. Four (4) screws are required for single station manifold valve mounting. See Recommended X-Valve Mounting for multiple station mounting screw requirements. For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US September 014

11 Series MX 10 mm Solenoid-Actuated Poppet Valve Typical Markets Typical Applications Control Product Specifications Mechanical Valve Type: Solenoid-Actuated Poppet Style - and 3-Way Normally Closed (NC) - and 3-Way Normally Open (NO) - 3-Way Distributor Media: Non-Reactive gases Operating Environment: 41 to 1 F (5 to 50 C) Storage Temperature: -40 to 158 F (-40 to 70 C) Dimensions: - Length: 1.50 in (38.1 mm) - Width: 0.40 in (10.1 mm) - Height: 0.6 in (15.7 mm) to Barb End / 0.44 in (11.1 mm) to Manifold Face Valve to Valve Spacing: 0.400 in (10 mm) center Porting: - Barbs for 3/3 in ( mm) I. D. Tubing - Manifold Mount Weight: 0.3 oz (8.5 g) Internal Volume: 0.0147 in 3 (0.043 cm 3 ) Filtration: 40 micron recommended Miniature Pneumatic Solenoid Valve helping medical device manufacturers increase battery life and reduce system weight without sacrificing performance. The universal design supports manifold or barbed-tube mounting and is available in ideal solution for portable medical devices with limited space and available power. Features Electrical Power Options (Hit/Hold): 6 psid model (1.0/0.5 Watt) 15 psid model (.0/0.5 Watts) 30 psid model (3.0/0.75 Watts) Voltage Options: 5, 1 or 4 VDC Series MX-Model 7 is not rated for continuous duty and must employ hit and hold control. Electrical Connections: -Pin PCB (for PCB solder connection) -Pin Up (for connector interface) 0.30 in (7.6 mm) pin centers (Lead Wire/Connector Assembly available, see ordering information) Wetted Materials Body/Plunger: PPE/PA (Polyphenylene Ether/Polyamide) Armature: 430 FR Series Stainless Steel Seal: FKM Other: 30/304 Series Stainless Steel EPDM (Manifold Gasket) Performance Characteristics Leak Rate: Tested with Air <0. sccm Response: < 0 ms maximum cycling Pressure/Vacuum: 0 to 6 psid (0.4 bar differential) 0 to 15 psid (1.0 bar differential 0 to 30 psid (.0 bar differential) Proof Pressure: 100 psig (6.9 bar) Typical Flow: 17.5 slpm @ 6 psid (0.4 bar differential) 30 slpm @ 15 psid (1.0 bar differential) 48 slpm @ 30 psid (.0 bar differential) Orifice Sizes/Equivalent Cv: 0.075 in (1.91 mm) / 0.08 Reliability: Life Cycle rating of 5 million (worst case tested)

1 Series MX Miniature Pneumatic Solenoid Valve Typical Flow Curve 6 PSID Model Flow Rate (slpm) 0 16 1 8 4 Pressure (bar) 0 0.08 0.16 0.4 0.3 0.4 0 0 1 3 4 5 6 Pressure (psi) 15 PSID Model Pressure (bar) 35 0 0. 0.4 0.6 0.8 1 30 Flow Rate (slpm) 5 0 15 10 5 0 0 3 6 9 1 15 Pressure (psi) 30 PSID Model Pressure (bar) Flow Rate (slpm) 50 45 40 35 30 5 0 15 10 5 0 0 0.5 1 1.5 0 5 10 15 0 5 30 Pressure (psi)

13 Series MX Miniature Pneumatic Solenoid Valve Pressure and Flow Capabilities Model No. Orifice Size Electrical Interface Pin-PCB (For Pin/PCB solder mount connection) Table 1 Maximum Operating Pressure Differential 6 psid (0.4 bar) Typical Flow at Rated Pressure 17.5 slpm Nominal Cv 7 0.075 in (1.9 mm) 15 psid (1.0 bar) 30 slpm 0.014 30 psid (.0 bar) 48 slpm 0.06 0.08 Pin-Up (For Pin/Wire Lead or PCB Terminal Housing Connection) [Reference Accessories section] Coil Connections PIN-PCB PIN-UP Electrical Connection Options: Terminal or equivalent. Electrical Requirements Rated Hit Voltage* (VDC ±5%) Minimum Hold Voltage (VDC) 5.5 1 4 6 1 Hold Power (Watts) Table 6 PSI Model 15 PSI Model Coil Resistance (Ohms) Hold Power (Watts) 0.5 4.5 0.5 0.5 0.5 Typical values rated at @ 0 C 0.5 Coil Resistance (Ohms) Hold Power (Watts) 30 PSI Model Coil Resistance (Ohms) 1.5 0.75 8 71 0.75 50 85 0.75 189 *Valve is not rated for continuous duty at rated hit voltage. Recommended minimum rated valve hit time is 50 milli seconds. Rated hit voltage time must not exceed 0 seconds. 145 567 0.5

14 Series MX Miniature Pneumatic Solenoid Valve Pneumatic Integration NORMALLY CLOSED PORT COMMON PORT BLOCKED PORT -WAY NORMALLY CLOSED BLOCKED PORT COMMON PORT NORMALLY OPEN PORT -WAY NORMALLY OPEN 3-WAY NC, NO AND DISTRIBUTOR NORMALLY CLOSED PORT COMMON PORT NORMALLY OPEN PORT Mechanical Integration SIDE VIEW BOTTOM VIEW Mounting Requirements Mounting Screw Size/Type* -56 x 1/" Pan Head Machine Screw M x 14 mm Pan Head Machine Screw Mounting Screw Torque 10 to 1 oz-in 0.07 to 0.08 N-m * Mounting screws are not provided with the valve. See Accessories.

15 Series MX Miniature Pneumatic Solenoid Valve ANSI Symbols PRESSURE BLOCKED (3) INTERNALLY (1) SUPPLY Pneumatic Schematics by Valve Types TYPE 1 -WAY NORMALLY CLOSED 1 LEGEND: SUPPLY: Pneumatic Source or Supply Pressure EXHAUST: Exhaust to Atmospheric Pressure REQMT: Customer Requirement or Application ATM: Atmospheric Pressure (1) REQMT BLOCKED (3) INTERNALLY () SUPPLY PRESSURE TYPE -WAY NORMALLY OPEN 3 (3) SUPPLY (3) REQMT () SUPPLY (1) BLOCKED INTERNALLY (1) BLOCKED INTERNALLY PRESSURE TYPE 3 3-WAY NORMALLY CLOSED (3) EXHAUST (1) SUPPLY 1 3 (3) SUPPLY (1) ATM PRESSURE TYPE 4 3-WAY NORMALLY OPEN (3) SUPPLY (1) EXHAUST 1 3 (3) ATM (1) SUPPLY PRESSURE TYPE 5 3-WAY DISTRIBUTOR 1 3 (3) REQMT () SUPPLY (3) SUPPLY (1) REQMT (1) SUPPLY

16 Series MX Miniature Pneumatic Solenoid Valve Installation and Use Hit and Hold Specifications The Series MX valve is designed for use with Hit and Hold control. Hit and Hold is a common control method used to reduce component power consumption without sacrificing performance. Spike state refers to the rated voltage required to actuate the valve. The state is a substantial reduction in the rated voltage (normally 50% of the rated voltage) that maintains the valve in an actuated state. Hit and Hold control can be incorporated using several different approaches, including discrete component circuits or programmable logic. The graph below illustrates method. This method greatly reduces power consumption because the valve only draws full current for a short period of time (in this case, a minimum of 50 msec), making it ideal for applications with sensitive power budgets. Rated voltage must be applied to the Series MX valve for a minimum of 50 msec to ensure full valve actuation in all operating conditions. Important Note: The Series MX valve is not designed for continuous use at rated voltage. Therefore, rated voltage should not be applied for greater than 0 seconds. Exceeding rated voltage for longer than 0 seconds will consume an excessive amount of power dissipated by the coil as heat and may adversely affect valve performance.

17 Series MX Miniature Pneumatic Solenoid Valve Installation and Use Recommended Series MX Mounting Series MX Manifold Mount Diagram.400 ±.00 [10.16 ±0.05] VALVE CENTER TO CENTER.14 [3.6] MINIMUM TYPICAL.00 ±.00 [5.08 ±0.05] TYPICAL SPACING.177 ±.00 [4.50 ±0.05].177 ±.00 [4.50 ±0.05].1 [3.0] MINIMUM TYPICAL Ø.10 ±.00 [Ø3.05 ±0.05].00 [5.08] MINIMUM DEPTH CHAMFER NOT RECOMMENDED -56 UNF - B.0 [5.1] NOTE: RECOMMENDED SURFACE FINISH 16 OR BETTER UNITS IN [MM] Accessories Manifold Rubber Gasket (EPDM) 18 (4.6 cm) Wire Leads Screw -56 x 1/ Pan Head, Phillips 191-00011-008 (see valve mounting requirements above)

18 Series MX Miniature Pneumatic Solenoid Valve Ordering Information Sample Product ID Description 961 7 1 1 1 1 1 000 Series Model Number: Orifice Size Options 961 7: 0.075 " (1.9 mm) Orifice Voltage Electrical Interface Type Pressure/ Power (Hold) Elastomer 1: 5 VDC 1: Pin-Up 1: -Way NC 1: 6 psid / 0.5 Watt 1: FKM : 1 VDC : Pin-PCB : -Way NO : 15 psid / 0.5 Watt 3: 4 VDC 3: 3-Way NC 3: 30 psid / 0.75 Watt 4: 3-Way NO 5: 3-Way Dist Accessories Part Number Description Comments 00044-05-E099 Manifold Rubber Gasket, EPDM Manifold gasket is supplied with each valve. Used as a seal between the valve and manifold. 90-006061-00 Cable, 4 Position, 18" Lead Not supplied with the valve. Used to electrically interface with the Pin-Up configurated valve. 191-00011-008 Screw -56 x 1/ Pan Head Not supplied with the valve. Two () required for each valve. ORDER ON-LINE Document: Document Number For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US September 014

19 Ten-X Miniature Pneumatic Solenoid Valve 10 mm Normally Open/Closed Solenoid Valve Typical Applications Product Specifications Mechanical Valve Type: 3 Port, Direct acting poppet style - Normally Open (NO) - Normally Closed (NC) - Distributor *Reference ordering information for available configurations. Media: Non-Reactive Gases Operating Environment: 3 to 1 F (0 to 50 C ) Storage Temperature: -40 to 158 F (-40 to 70 C) Dimensions: - Length: 1.5 in (31.8 mm) - Width: 0.39 in (9.9 mm) - Height: 0.48 in (1.1 mm) to Manifold Face / 0.65 in (16.4 mm) to Barb End Porting: - Barbs for 5/64 in ( mm) I. D. Tubing - Manifold Mount (Gasket accessory required, see ordering info) Weight: 0.39 oz (10.7 g) Internal Volume: 0.0080 in 3 (0.131 cm 3 ) The Ten-X ideal solution for applications with limited space and available power. The Ten-X miniature pneumatic solenoid valve features repeatable on and off response times,stable performance and a universal body design that is suited for manifold or barbed-tube mounting. The Ten-X miniature pneumatic solenoid valve is available in -way or Features worst case tested, no performance degradation Electrical Power: 0.5 Watt & 1.0 Watt Not all power options are available in all models, see ordering info. Voltage: 5, 1 or 4 VDC Further power reduction may be achieved through the use of spike and hold or PWM electrical control. Electrical Connections: - PC Pins, 6 mm centers (all models) - Lead Wire/Connector Assembly, (Accessory, see ordering info) Wetted Materials Bobbin/Body: PBT (Polybutylene terephthalate) Glass Filled Pole & Plunger: 430 FR Series Stainless Steel Seal (Options): Silicone, EPDM, or FKM Other: 30 Stainless Steel, Nickel Plated Performance Characteristics Leak Rate: 0.016 sccm - (Air) - Valve Type #1 (Normally Open - Silicone/EPDM) - Valve Type #7 (Normally Open - Silicone) 0. sccm - (Air) - Valve Type # (Normally Closed - FKM) - Valve Type #6 (Distributor - FKM/EPDM) Response Time: < 5 ms maximum cycling (Silicone) < 0 ms maximum cycling (FKM, EPDM) < 0 ms cycling (Viton & EPDM) Pressure/Vacuum: 6 psid (0.4 bar differential) Proof Pressure: 00 psig (13.7 bar) Minimum Flow: 8 slpm @ 6 psid (0.4 bar differential) Orifice Sizes/Equivalent Cv: 0.060 (1.5 mm) / 0.04 Ten-X is a registered trademark of Parker Hannifin Corporation.

0 Ten-X Miniature Pneumatic Solenoid Valve Typical Flow Curve Model 1 0.060 (1.5 mm) Orifice Pressure (bar) 00 0.0 01 0.1 0 0. 03 0.3 04 0.4 10 8 pm) Rate (sl Flow 6 4 0 0 1 3 4 5 6 Pressure (psi) Pneumatic Interface / Electrical Interface Short Pin (For Pin/Wire Lead or PCB Terminal Housing Connection) [Reference Accessories section] Long Pin (For Pin/PCB solder mount connection)

1 Ten-X Miniature Pneumatic Solenoid Valve Pneumatic Interface / Electrical Interface Coil Connections Electrical Connection Options: or equivalent. Mechanical Integration Dimensions NORMALLY OPEN PORT (3X) BARB FITTING FOR.078 [1.98] I.D. POLYURETHANE TUBING X.175 [4.45] TO PIN C/L.07 [5.6].36 [5.99] RECEPTACLE CONTACTS FOR.00 [0.51] SQ. TERMINAL POSTS.1 [5.38].870 [.10].760 [19.30].966 [4.54] 1.5 [31.75] COMMON PORT NORMALLY CLOSED PORT.170 [4.3].475 [1.07].195 [4.95].390 [9.91] UNITS IN [MM]

Ten-X LEGEND: Miniature Pneumatic Solenoid Valve SUPPLY: Pneumatic Source or Supply Pressure ANSI Symbols PRESSURE (3) SUPPLY (1) EXTERNAL PLUG Pneumatic Schematics by Valve Types TYPE 1 (-WAY NORMALLY OPEN) (SILICONE AND EPDM ONLY) 3 EXHAUST: Exhaust to Atmospheric Pressure REQMT: Customer Requirement or Application ATM: Atmospheric Pressure EXTERNAL PLUG: External Port Plug (Customer Supplied) (3) REQMT () SUPPLY (1) EXTERNAL PLUG PRESSURE TYPE (-WAY NORMALLY CLOSED OPTION) (FKM ONLY) (3) EXTERNAL PLUG 1 (3) EXTERNAL PLUG (1) SUPPLY () SUPPLY (1) REQMT PRESSURE TYPE (3-WAY NORMALLY CLOSED OPTION) (FKM ONLY) (3) EXHAUST 1 3 (3) SUPPLY (1) SUPPLY (1) ATM PRESSURE TYPE 6 (DISTRIBUTOR) (FKM AND EPDM ONLY) (3) REQMT (3) SUPPLY 1 3 () SUPPLY (1) REQMT (1) SUPPLY PRESSURE TYPE 7 (3-WAY NORMALLY OPEN) (SILICONE ONLY) (3) SUPPLY 1 3 (3) ATM (1) EXHAUST (1) SUPPLY

3 Ten-X Miniature Pneumatic Solenoid Valve Installation and Use Ten-X Manifold Mount Diagram Parker Precision Fluidics recommends 3-5 in-oz of torque for the screws.394 [10.01] -56 UNC-B.14 [3.6] (40 ).197 [5.00].005 [0.13] (Ø.154 [Ø3.91]) (Ø.13 [Ø3.35]).871 [.1].760 [19.30].966 [4.54].394 [10.01] DETAIL "B".090 [.9] X "DEPTH".13 ±.001.180 [Ø3.35 ±0.03 4.6] Ø.154 ±.003.055 ±.00 [Ø3.91 ±0.08 1.40 ±0.05] 40 TO.13 (SEE DETAIL B) UNITS IN [MM] Recommended Ten-X Manifold Dimensions 4X Ø.070.19 ±.0 [Ø1.78 4.8 ±0.5] -56 UNC-B.14 ±.0 [3.6 ±0.5].600 [15.4].394 [10.01].170 [4.3].350 [8.89].197 [5.00].005 [0.13] SEE DETAIL "B".170 [4.3] TO PORT.760 [19.30] 1.55 [39.4].871 [.1].760 [19.30] PORT TO PORT.966 [4.54] PORT TO PORT X Ø.090.375 [Ø.9 9.53] 10-3 UNF-B.5 ±.0 [6.4 ±0.5].375 [9.53].750 [19.05] (40 ) (Ø.154 [Ø3.91]) (Ø.13 [Ø3.35]) X.090.350 [Ø.9 8.89].13 ±.001.180 [Ø3.35 ±0.03 4.57] Ø.154 ±.003.055 ±.00 [Ø3.91 ±0.08 1.40 ±0.05] 40 TO.13 [Ø3.35] (SEE DETAIL A) DETAIL "A" (.005 [0.13]).375 [9.53].350 [8.89] Ø.090.415 [Ø.9 10.54] 10-3 UNF-B.5 ±.0 [6.4 ±0.5] DETAIL "B" UNITS IN [MM]

4 Ten-X Miniature Pneumatic Solenoid Valve Accessories Manifold Rubber Gasket (FKM) 18 Wire Lead with connector (For use with Short Pin valve configuration) Mounting Options Manifold Rubber Gasket (EPDM) Screw #-56 x 5/8 Pan Head ( required for each valve) Ordering Information Sample Part ID 914 1 1 1 05 1 Electrical Description Series Elastomer Valve Type / Elastomer / Power Model Voltage Coil Connection Options 914 1: Silicone 1: -Way Normally Open* 6 PSIG Silicone / EPDM Elastomer / 0.5 Watt : FKM (viton) : /3 Way Normally Closed 6 PSIG FKM Elastomer Only / 1 Watt 1: Standard 05: 5 VDC 1: Pins (6 mm) 3: EPDM 6: Distributor 6 PSIG 4: 4 VDC 7: 3-Way Normally Open 6 PSIG Silicone Elastomer / 1 Watt 1: 1 VDC : PC Mount * Port 1 requires an external plug Accessories 195-00011-001: Manifold Rubber Gasket (FKM) 195-0004-001: Manifold Rubber Gasket (EPDM) 590-000106-001: 18 Wire Leads with connector 191-00011-010: Screw -56 x 5/8 Pan Head ( required for each valve) ORDER ON-LINE For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US September 014

5 Ten-X Low Energy Miniature Pneumatic Solenoid Valve Le 10 mm Normally Open/Closed Solenoid Valve Typical Applications Product Specifications Mechanical Valve Type: 3 Port, Direct acting poppet style - /3-Way Normally Closed (NC) - /3-Way Normally Open (NO) - 3-Way Distributor *Reference ordering information for available configurations. Media: Non-Reactive Gases Operating Environment: 3 to 1 F (0 to 50 C ) Storage Temperature: -40 to 158 F (-40 to 70 C) Dimensions: - Length: 1.30 in (33.1 mm) - Width: 0.39 in (9.9 mm) - Height: 0.6 in (15.7 mm) to Manifold Face / 0.79 in (0.0 mm) to Barb End Porting: - Barbs for 5/64 in ( mm) I. D. Tubing, (0.055 in Wall Max.) - Manifold Mount (Gasket accessory required, see ordering info) The Ten-X e minimize power consumption making it an ideal solution for applications with limited space and available power. The Ten-X e miniature solenoid valve features repeatable on and off response times, stable performance and a universal body design that is suited for manifold or barbed-tube mounting. The Ten-X e miniature solenoid valve is available in -way Features and ease integration Electrical Power: 0.5 Watt Voltage: 5, 1, or 4 VDC Electrical Connections: - PC Pins,.5 mm centers (all models) - 18 Lead Wire/Connector Assembly, (Accessory, see ordering info) Constant Voltage supply required (Includes internal PWM circuit) Wetted Materials Bobbin/Body: PBT (Polybutylene terephthalate) Glass Filled Pole & Plunger: 430 FR Series Stainless Steel Seal (Options): FKM, EPDM Other: 30 Stainless Steel, Nickel Plated Performance Characteristics Leak Rate: 0. sccm of air max. Response Time: <0 ms cycling Pressure/Vacuum: 30 psid (.0 bar differential) Proof Pressure: 00 psig (13.7 bar) Minimum Flow: slpm @ 30 psid (.0 bar differential) Orifice Sizes/Equivalent Cv: 0.060 (1.5 mm) / 0.04 Life Requirement: 0 million cycles Weight: 0.4 oz. (1 g) Internal Volume: 0.0080 in 3 (0.131 cm 3 ) Ten-X is a registered trademark of Parker Hannifin Corporation.

6 Ten-X Le Low Energy Miniature Pneumatic Solenoid Valve Typical Flow Curve Model 0.060 (1.5 mm) Orifice Pressure (bar) 00 0.0 05 0.5 10 1.0 15 1.5 0.0 30 5 pm) Rate (sl Flow 0 15 10 5 0 0 5 10 15 0 5 30 Pressure (psi) Pneumatic Interface / Electrical Interface Standard Pin

7 Ten-X Le Low Energy Miniature Pneumatic Solenoid Valve Pneumatic Interface / Electrical Interface Coil Connections Wire Lead Connector 590-000073-001 Wire Lead connector assembly required for electrical connectivity Mechanical Integration Dimensions NORMALLY OPEN PORT (3X) BARB FITTING FOR.078 [1.98] I.D. POLYURETHANE TUBING.67 [6.78].6 [6.65].870 [.10] 1.303 [33.10] 1.174 [9.8] COMMON PORT.760 [19.30].361 [9.17].100 [.54] CONNECTOR TERMINATION.1 [5.38] NORMALLY CLOSED PORT.170 [4.3].619 [15.7].966 [4.54].195 [4.95].390 [9.91]

8 Ten-X Le Low Energy Miniature Pneumatic Solenoid Valve ANSI Symbols PRESSURE (3) EXTERNAL PLUG (1) SUPPLY Pneumatic Schematics by Valve Types TYPE 3 (-WAY NORMALLY CLOSED OPTION) 1 (3) EXTERNAL PLUG () SUPPLY (1) REQMT LEGEND: SUPPLY: Pneumatic Source or Supply Pressure EXHAUST: Exhaust to Atmospheric Pressure REQMT: Customer Requirement or Application ATM: Atmospheric Pressure EXTERNAL PLUG: External Port Plug (Customer Supplied) PRESSURE TYPE 3 (3-WAY NORMALLY CLOSED OPTION) (3) EXHAUST 1 3 (3) SUPPLY (1) SUPPLY (1) ATM PRESSURE TYPE 4 (-WAY NORMALLY OPEN OPTION) (3) SUPPLY 3 (3) REQMT () SUPPLY (1) EXTERNAL PLUG (1) EXTERNAL PLUG PRESSURE TYPE 4 (3-WAY NORMALLY OPEN OPTION) (3) SUPPLY 1 3 (3) ATM (1) EXHAUST (1) SUPPLY PRESSURE TYPE 5 (DISTRIBUTOR) (3) REQMT (3) SUPPLY 1 3 () SUPPLY (1) REQMT (1) SUPPLY

9 Ten-X Le Low Energy Miniature Pneumatic Solenoid Valve Installation and Use Ten-X Le Manifold Mount Diagram Parker Precision Fluidics recommends 3-5 in-oz of torque for the screws.394 [10.01] -56 UNC-B.14 [3.6] (40 ).197 [5.00].005 [0.13] (Ø.154 [Ø3.91]) (Ø.13 [Ø3.35]).871 [.1].760 [19.30].966 [4.54].394 [10.01] DETAIL "B".090 [.9] X "DEPTH".13 ±.001.180 [Ø3.35 ±0.03 4.6] Ø.154 ±.003.055 ±.00 [Ø3.91 ±0.08 1.40 ±0.05] 40 TO.13 (SEE DETAIL B) UNITS IN [MM] Recommended Ten-X Le Manifold Dimensions 4X Ø.070.19 ±.0 [Ø1.78 4.8 ±0.5] -56 UNC-B.14 ±.0 [3.6 ±0.5].600 [15.4].394 [10.01].170 [4.3].350 [8.89].197 [5.00].005 [0.13] SEE DETAIL "B".170 [4.3] TO PORT.760 [19.30] 1.55 [39.4].871 [.1].760 [19.30] PORT TO PORT.966 [4.54] PORT TO PORT X Ø.090.375 [Ø.9 9.53] 10-3 UNF-B.5 ±.0 [6.4 ±0.5].375 [9.53].750 [19.05] (40 ) (Ø.154 [Ø3.91]) (Ø.13 [Ø3.35]) X.090.350 [Ø.9 8.89].13 ±.001.180 [Ø3.35 ±0.03 4.57] Ø.154 ±.003.055 ±.00 [Ø3.91 ±0.08 1.40 ±0.05] 40 TO.13 [Ø3.35] (SEE DETAIL A) DETAIL "A" (.005 [0.13]).375 [9.53].350 [8.89] Ø.090.415 [Ø.9 10.54] 10-3 UNF-B.5 ±.0 [6.4 ±0.5] DETAIL "B" UNITS IN [MM]

30 Ten-X Le Low Energy Miniature Pneumatic Solenoid Valve Accessories Manifold Rubber Gasket (FKM) Mounting Options Manifold Rubber Gasket (EPDM) 18 Wire Lead with latching connector 590-000073-001 Screw #-56 x 3/4 Pan Head ( required for each valve) Ordering Information Sample Part ID 914 3 05 3 000 Description Series Elastomer Valve Type / Pressure Model Voltage Electrical Coil Connection Options 914 : FKM (Viton) 3: /3 Way Normally Closed / 30 psi : Integrated Electronics 05: 5 VDC 3: Pins (.54mm) 3: EPDM 4: /3 Way Normally Open / 30 psi 1: 1 VDC 5: 3-Way Distributor / 0 psi 4: 4 VDC 195-00011-001: Manifold Rubber Gasket (FKM) 195-0004-001: Manifold Rubber Gasket (EPDM) 590-000073-001: 18 Lead Wires with connector 191-00011-01: Screw -56 x 3/4 Pan Head ( required for each valve) Accessories ORDER ON-LINE For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US September 014

31 SRS Miniature Pneumatic Solenoid Valve 10 mm Manifold Mount Solenoid Valve Typical Applications Product Specifications Mechanical Valve Type: 3 Port, Direct-acting poppet style - Normally Closed - Normally Open - Distributor Media: Non-Reactive gases Operating Environment: 3 to 131 F (0 to 55 C) Storage Temperature: -40 to 158 F (-40 to 70 C) Dimensions: - Length: 1.5 in (38.1 mm) - Width: 0.39 in (10.0 mm) - Height: 0.61 in (15.5 mm) Porting: Manifold mount; Gasket supplied Weight: 0.3 oz (6.5 g) Internal Volume: 0.0016 in 3 (0.07 cm 3 ) Filtration: 40 micron (recommended) mm manifold mount solenoid valve designed for portable instruments and medical devices requiring minimal power consumption and quiet portable instruments and medical devices. Features integration non-reactive gases Electrical Power Options: 0.5 or 1.0 Watt Voltage Options: (±10%) 5, 1 or 4 VDC Further power reduction may be achieved through the use of spike and hold or PWM electrical control. Wetted Materials Bobbin/Body: Glass Reinforced PBT (Polybutylene terephthalate) Pole & Plunger: 430 FR Stainless Steel Seal: FKM Other: 300 Series Stainless Steel Performance Characteristics Leak Rate: <0.016 sccm of air Response: <30 ms cycling Pressure: 0 to 85 psid (5.86 bar) Vacuum: 0-7 in Hg (686 mm Hg) Burst Pressure: 00 psig (13.7 bar) Orifice Sizes / Equivalent Cv: 0.045 (1.14 mm) / 0.07 0.030 (0.76 mm) / 0.017 0.00 (0.51 mm) / 0.0075 (See Life-cycle information in Performance Parameters section.)

3 SRS Miniature Pneumatic Solenoid Valve Typical Flow Curve pm) Rate (sl Flow All Models Pressure (bar) 0 1 3 4 5 6 0 18 16 14 1 10 8 6 4 0.045 in (1.14 mm) 0030in(076mm) 0.030 (0.76 0.00 in (0.51 mm) 0 0 10 0 30 40 50 60 70 80 90 100 Pressure (psi) Models 10 and 11 0.00 (0.51 mm) Orifice Pressure (bar) Models 13 and 14 0.030 (0.76 mm) Orifice Pressure (bar) pm) Rate (sl Flow 14 1 10 8 6 4 0 1 3 4 5 6 pm) Rate (sl Flow 00 0.0 05 0.5 10 1.0 15 1.5 0.0 5.5 30 3.0 0 16 1 8 4 0 0 15 30 45 60 75 90 Pressure (psi) 0 0 10 0 30 40 50 Pressure (psi) Models 16 and 17 0.045 (1.14 mm) Orifice Pressure (bar) 0 0 05 0.5 1 15 1.5 16 pm) Rate (sl Flow 1 8 4 0 0 5 10 15 0 5 Pressure (psi)

33 SRS Miniature Pneumatic Solenoid Valve Performance Parameters Model No. Orifice Size Maximum Supply Pressure Maximum Supply Vacuum Power Consumption Pneumatic Interface Life Requirements (millions of cycles) 10 0.00 in (0.51 mm) 35 psi (.41 bar) 7 in Hg (686 mm Hg) 0.5 Watt 175 11 0.00 in (0.51 mm) 85 psi (5.86 bar) 7 in Hg (686 mm Hg) 1 Watt 50 13 0.030 in (0.76 mm) 0 psi (1.37 bar) 7 in Hg (686 mm Hg) 0.5 Watt 00 14 0.030 in (0.76 mm) 50 psi (3.44 bar) 7 in Hg (686 mm Hg) 1 Watt 5 16 0.045 in (1.14 mm) 10 psi (0.68 bar) 0 in Hg (508 mm Hg) 0.5 Watt 100 17 0.045 in (1.14 mm) 0 psi (1.37 bar) 7 in Hg (686 mm Hg) 1 Watt 5 Mechanical Integration Dimensions.394 [10.01] X Ø.070 [Ø1.78] SRS Basic Valve Dimensions X.063 [1.60] 1.50 [38.1] MAX. X.5 [6.4] (.455 [11.56]).138 [3.51].61 [15.5].495 [1.57] SEE DETAIL "A".76 [7.01].188 [4.78] NORMALLY OPEN PORT (N.O.).094 [.39].15 [3.18].09 [5.31].166 [4.].00 [0.51].458 [11.63] COMMON PORT (C) 3X.081 [.06] X.060 [1.5] PORTS NORMALLY CLOSED PORT (N.C.) 3X.197 [5.00] DETAIL "A" UNITS IN. [mm.]

34 SRS Miniature Pneumatic Solenoid Valve Electrical Interface.15 [3.8].17 [4.3].30 [7.6] PINS: X.05 [0.64] SQ. TIN PLATED BeCu CONTACTS PINS: X.05 [0.64] SQ. TIN PLATED BeCu CONTACTS.15 [3.8].30 [7.6].17 [4.3].483 [1.7].483 [1.7] "F" - TYPE ELECTRICAL CONNECTION (.05 [0.64] SQUARE PINS, FRONT) "M" - TYPE ELECTRICAL CONNECTION (.05 [0.64] SQUARE PINS, MANIFOLD INTERFACE) LEAD WIRES: X 6 AWG, 18.5±.5 [470±13] LG. LEAD WIRES: X 6 AWG, 18.5±.5 [470±13] LG..483 [1.7].483 [1.7] "R" - TYPE ELECTRICAL CONNECTION (INSLATED WIRE LEADS, 18" [457.] MANIFOLD INTERFACE) "L" - TYPE ELECTRICAL CONNECTION (INSLATED WIRE LEADS, 18" [457.] FRONT) UNITS IN. [mm.]

35 SRS Miniature Pneumatic Solenoid Valve ANSI Symbols PRESSURE (3) EXHAUST (1) SUPPLY Pneumatic Schematics by Valve Types TYPE 1 3-WAY NORMALLY CLOSED 1 3 LEGEND: SUPPLY: Pneumatic Source or Supply Pressure EXHAUST: Exhaust to Atmospheric Pressure REQMT: Customer Requirement or Application ATM: Atmospheric Pressure (3) SUPPLY (1) ATM PRESSURE TYPE 3-WAY NORMALLY OPEN 1 3 (3) SUPPLY (3) ATM (1) EXHAUST (1) SUPPLY PRESSURE TYPE 3 3-WAY DISTRIBUTOR 1 3 (3) REQMT () SUPPLY (3) SUPPLY (1) REQMT (1) SUPPLY Installation and Use SRS Manifold Mount Diagram

36 SRS Miniature Pneumatic Solenoid Valve Accessories Seal, Valve Manifold, SRS 195-000139-001 SEE DETAIL "B" Test Manifold, Single Station, SRS 990-00136-001 X 4-40 UNC-B X.15 [3.8].500 [1.70] Screw 0-80 x 9/16 Pan Head, Phillips 191-000100-009 ( required for each valve).040 [1.0].350 [8.89].700 [17.78].550 [13.97].350 [8.89].49 [1.4].00 [5.08].40 [10.].100 [.54].480 [1.19].130 [3.30].10 [3.05] 3X.75 ±.010 [6.99 ±0.5] Ø.15 [Ø3.18] Ø.100 [Ø.54] UNITS IN. [mm.] Ordering Information Sample Part ID SRS 10 P V 1 M Model Number: Seal Description Series Type Material Voltage Electrical Connection Pressure / Orifice Material Options SRS 10: 0-35 psi / 0.00" 1: 3-Way NC P: Engineering Plastic V: FKM 5: 5 VDC F: 0.05" Square Pins, Front 11: 0-85 psi / 0.00" : 3-Way NO 1: 1 VDC M: 0.05" Square Pins, Manifold Interface 13: 0-0 psi / 0.030" 3: 3-Way NC 4: 4 VDC L: Insulated Wire Leads, 18", Front or Distributor 14: 0-50 psi / 0.030" R: Insulated Wire Leads, 18", Manifold Interface 16: 0-10 psi / 0.045" 17: 0-0 psi / 0.045" DETAIL "B" UNITS IN. [mm.] Accessories 195-000139-001: Seal, Valve Manifold, SRS * * Used as seal between manifold and valve body 191-000100-009: Screw 0-80 x 9/16", Pan Head, Phillips ( required for each valve) 990-00136-001: Test Manifold, Single Station, SRS ORDER ON-LINE For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US September 014

37 PND Series Miniature Pneumatic Solenoid Valve 10 mm Normally Open Exhaust Valve Typical Applications Devices Product Specifications Mechanical Valve Type: Port, Direct-acting poppet style - Normally Open (NO) Media: Air, Nitrogen, Argon, Carbon Dioxide, & other non-reacting gasses Operating Environment: 3 to 131 F (0 to 55 C ) Storage Temperature: -13 to 158 F (-5 to 70 C) Dimensions: - Length: 1.01 in (5.7 mm) - Width: 0.39 (10.0 mm) - Height: 0.47 in (1.0 mm) Porting: Single Barb for 0.078 (.0 mm) I.D. Tubing Weight: PND-05A: 0.60 oz (17.0 g) PND-05D: 0.40 oz (11.8 g) Internal Volume: PND-05A: 0.0036 in 3 (0.059 cm 3 ) PND-05D: 0.005 in 3 (0.041 cm 3 ) Filtration: 40 micron (recommended) solution for safety oriented applications that require pressure relief to atmosphere upon power loss. Features power loss Electrical Power: PND-05A: 0.36 Watt PND-05D: 0.50 Watt Voltage: 3, 6 or 1 VDC Further power reduction can be achieved with the use of PWM control. Wetted Materials Bobbin: PBT (Polybutylene terephthalate) Plunger/Barb: SUM4L Steel Seal: Silicone Frame: SPCC Steel (Treatment: MFZn-c) Other: 304 Stainless Steel Performance Characteristics Leak Rate: < 0.016 sccm of air Response: < 100 ms cycling Pressure: 0 to 6 psig (0.4 bar) Orifice Sizes/Equivalent Cv: PND-05A: 0.050 (1.7 mm) / 0.035 PND-05D: 0.030 (0.75 mm) / 0.017 Reliability: Life cycle rating of 50,000 cycles (worst case tested, no performance degradation)

38 PND Series Miniature Pneumatic Solenoid Valves Typical Flow Curve Flow Rate (s slpm) Pressure (bar) 0 01 0.1 0 0. 03 0.3 04 0.4 10 0.030" (0.76 mm) orifice 8 0.050" (1.7 mm) orifice 6 4 All Models 0 0 1 3 4 5 6 Pressure (psi) Model PND-05A 0.050 (1.7 mm) Orifice Pressure (bar) 10 0 0.1 0. 0.3 0.4 8 Flow Rate (slpm) 6 4 0 0 1 3 4 5 6 Pressure (psi) Model PND-05D 0.030 (0.76 mm) Pressure (bar) 6 0 0.1 0. 0.3 0.4 5 Flow Rate (slpm) 4 3 1 0 0 1 3 4 5 6 Pressure (psi)

39 PND Series Miniature Pneumatic Solenoid Valves Pressure and Flow Capabilities/Power Model No. Orifice Size Nominal Cv Maximum Supply Pressure Power Consumption PND-05A 0.050 in (1.7 mm) 0.035 6 psig (0.4 bar) 0.36 Watt PND-05D 0.030 in (0.76 mm) 0.017 6 psig (0.4 bar) 0.50 Watt Pneumatic Interface PND Series 05A PDN Series 05D Mechanical Integration Dimensions Basic Dimensions, PND-05D Basic Dimensions, PND-05A UNITS IN. [mm.]

40 PND Series Miniature Pneumatic Solenoid Valves Installation and Use Mounting Guidelines (PND-05A Only) Ordering Information Sample Part ID PND - 05D - 1 Description Series - Model: Orifice / Power - Voltage Options PND 05A: 0.050" / 0.36 Watt 03: 3 VDC 05D: 0.030" / 0.50 Watt 06: 6 VDC 1:1 VDC ORDER ON-LINE For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US September 014

41 Series 11 Miniature Pneumatic Solenoid Valve 15 mm Solenoid Valve Typical Applications Product Specifications Mechanical Valve Type: Solenoid-actuated poppet style - /3 Port, Normally Closed (NC) - /3 Port, Normally Open (NO) - 3 Port, Distributor - Port, Normally Closed (NC) - Universal Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & other non-reacting gasses Operating Environment: 3 to 158 F (0 to 70 C) Storage Temperature: -40 to 158 F (-40 to 70 C) Dimensions: - Length: 1.73 in (43.9 mm) - Width: 0.63 in (15.8 mm) - Height: 0.67 in (17.0 mm) Weight:.1 oz (60 g) Internal Volume: 0.06 in 3 (0.46 cm 3 ) Filtration: 40 micron (recommended) Oxygen Clean: Call For Details and proven product with a reputation for reliable and consistent miniature solenoid valve is an ideal solution for general purpose applications and those applications requiring low out-gassing and a bubble-tight seal. Features integration and control Electrical Power Options: 0.5, 1.0, or.0 Watts Voltage Options: 5, 1 or 4 VDC Further power reduction may be achieved through the use of spike and hold or PWM electrical control. Electrical Connections: Wire Leads, PC Pins, Solder Tabs, Quick Disconnect Spade Wetted Materials Body: 36000 HO Brass; 303 Series Stainless Steel Stem Base: 36000 HO Brass; 303 Series Stainless Steel Poppet Options: FKM or EPDM All Others: 430 FR Series Stainless Steel 30 Series Stainless Steel Performance Characteristics Leak Rate: <0.016 sccm of air <0.1 sccm of air (Model 0 only) Response: <30 ms cycling Pressure: 0 to 100 psig (6.9 bar) Vacuum: 0-7 in Hg (686 mm Hg) Orifice Sizes: 0.030" (0.76 mm) 0.050" (1.7 mm) 0.10 (.59 mm)

4 Series 11 Typical Flow Curve Flow Rate (slpm) Miniature Pneumatic Solenoid Valve 50 45 40 35 30 5 0 15 10 5 0 0 1 3 4 5 6 All Models Pressure (bar) 0.10 in (.59 mm) 0.050 in (1.7 mm) 0.030 in (0.76 mm) 0 10 0 30 40 50 60 70 80 90 100 Pressure (psi) Pressure and Flow Capabilities/Life Requirements Model No. Orifice Size Nominal Cv 1 13 15 16 18 19 Maximum Supply Pressure Leak Rate 10 0.030 in (0.76 mm) 0.017 100 psi (6.89 bar) <0.016 sccm Watts 0.050 in (1.7 mm) 0.05 5 psi (1.7 bar) <0.016 sccm 1 Watt 0.030 in (0.76 mm) 0.017 5 psi (1.7 bar) <0.016 sccm 0.5 Watt 0.050 in (1.7 mm) 0.01 10 psi (0.69 bar) <0.016 sccm 0.5 Watt 0.050 in (1.7 mm) 0.05 70 psi (4.83 bar) <0.016 sccm Watts (Air) Power Consumption 0.050 in (1.7 mm) 0.031 50 psi (3.45 bar) <0.016 sccm Watts 0.030 in (0.76 mm) 0.017 50 psi (3.45 bar) <0.016 sccm 1 Watt Elastomer Life Requirements (millions of cycles)* FKM 100 EPDM 0 FKM 100 EPDM 0 FKM 00 EPDM 40 FKM 00 EPDM 40 FKM 60 EPDM 60 FKM 60 EPDM 60 FKM 0 EPDM 16 0 0.10 in (.59 mm) 0.069 5 psi (1.7 bar) <0.1 sccm 1 Watt FKM 5 @parker.com

43 Series 11 Miniature Pneumatic Solenoid Valve Pneumatic Interface Mechanical Integration Dimensions Manifold Mount Basic Dimensions, -Way Valve Configuration UNITS IN. [mm.] X Ø.13 ±.003 [3.1 ±0.08] (I.D.).67 [17.0].305 [7.75].65 [15.88] MAX..305 [7.75] PORT (OUTLET).7 [6.9].81 [7.14] 1.785 [45.34] X Ø.15 [Ø3.18].156 [3.96].31 [7.9].15 [3.18] PORT 1 (INLET).055 [1.40].500 [1.70].500 [1.70].055 [1.40] UNITS IN. [mm.] Basic Dimensions, 3-Way Valve Configuration UNITS IN. [mm.] PORT 3 (NORMALLY OPEN).67 [17.0].305 [7.75].65 [15.88] MAX..305 [7.75] PORT (COMMON) X Ø.13 ±.003 [3.1 ±0.08] (I.D.).81 [7.14] 1.785 [45.34].5 [6.35].7 [6.9].156 [3.96].31 [7.9].15 [3.18] PORT 1 (NORMALLY CLOSED).055 [1.40].500 [1.70] X Ø.15 [Ø3.18].500 [1.70].055 [1.40] UNITS IN. [mm.]

44 Series 11 Miniature Pneumatic Solenoid Valve Pneumatic Interface Barbed Barb Options 1/16 (1.5 mm) Barbs 5/64 ( mm) Barbs 1/8 (3 mm) Barbs

45 Series 11 Miniature Pneumatic Solenoid Valve Electrical Interface COIL TYPE: WIRE Coil LEADS Type: Wire Leads (See Order Info F ) X #6 AWG. BLACK WIRES 18 1/" ± 1/" [469.9 ± 1.7] LG..65 [15.88].305 [7.75] Coil Type: Quick Connect Spade (See Order Info Q ).110 [.79].195 [4.95].39 [9.9].43 [10.9] 1.53 [38.9] APPROX..018 [0.46] COIL TYPE: SOLDER TAB Coil Type: Solder Tab (See Order Info S ) Coil Type: 4 PC Pins* (See Order Info P ) *See Isometric Drawing below.15 [3.18].195 [4.95].64 ±.015 [6.71 ±0.38].195 [4.95].39 [9.9].50 ±.015 [6.35 ±0.38] UNITS IN. [mm.].018 [0.46].86 [1.8].018 [0.46] SQ. PIN.88 [.4] *4 PC PIN PCB Interface (.038 [0.97]) (.430 [10.9]) BODY MOUNTING HOLE X Ø.15 [Ø3.18] (OPTIONAL) PCB SOLDERING HOLE 4X Ø.05 [Ø1.3] THRU PAD Ø.15 [Ø3.18].880 [.35] PCB.390 [9.91] COIL CONNECTIONS

46 Series 11 ANSI Symbols Miniature Pneumatic Solenoid Valve Pneumatic Schematics by Valve Types LEGEND: SUPPLY: Pneumatic Source or Supply Pressure EXHAUST: Exhaust to Atmospheric Pressure REQMT: Customer Requirement or Application ATM: Atmospheric Pressure

47 Series 11 Miniature Pneumatic Solenoid Valve Installation and Use Manifold & O-Ring Dimensions & Design Accessories O-Ring (Manifold Seal) Dimensions (see Accessories table below for part numbers) Body Standoff 890-00007-001 ( required for each valve) PCB BODY STANDOFF Screw 4-40 x 1/ Pan Head 191-000100-08

48 Ordering Information Sample Part ID 11 10 3 BV 1 P 7 7 Description Series Model Number Pressure / Orifice / Power Type Material XX: Body / Poppet & Seal Voltage Electrical Coil Connection Pneumatic Connection Body Pneumatic Connection Stem Options 11 10: 0-100 psi / 0.030" / Watts 1: -Way NC BV: Brass / FKM () 5: 5 VDC F: Wire Leads, 18", No Termination 0: Manifold Mount (3) 0: Manifold Mount (4) 1: 0-50 psi / 0.050" / Watts : -Way NO SV: Stainless Steel / FKM 1: 1 VDC P: PC Mount, 4 PC Pins 6: 1/16" (1.5 mm) Barbs 6: 1/16" (1.5 mm) Barbs (5) 13: 0-50 psi / 0.030" / 1 Watt 3: 3-Way NC or Distributor BE: Brass / EPDM 4: 4 VDC S: PC Mount, Solder Tabs 7: 5/64" ( mm) Barbs 7: 5/64" ( mm) Barbs 15: 0-5 psi / 0.050" / 1 Watt 4: 3-Way NO Q: Quick Connect Spade 8: 1/8" (3 mm) Barbs 8: 1/8" (3 mm) Barbs 16: 0-5 psi / 0.030" / 0.5 Watt 6: -Way NC Universal (1) 18: 0-10 psi / 0.050" / 0.5 Watt 19: 0-70 psi / 0.050" / Watts 0: 0-5 psi / 0.10" / 1 Watt (1) Model 0 (0.10" orifice) only available in -Way NC Universal configuration () Model 0 (0.10" orifice) only available in Brass/FKM configuration (3) Model 0 (0.10" orifice) only available in manifold mount body (4) Type 1 and 6 configurations only (5) Not available on Models 1, 15, 18 and 19 (0.050" orifice) Accessories 190-00704-001: O-ring, Buna-N * * Used as a seal between the manifold and valve body 190-00704-00: O-ring, FKM * ** Used to create a flush mount between the coil and valve body 890-00007-001: Body Standoff ** 191-000115-010: Screw, 4-40 x 5/8" Pan Head, Phillips ORDER ON-LINE For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US September 014

49 Series 5 Miniature Pneumatic Solenoid Valve 15 mm Solenoid Valve Typical Applications Concentrators Product Specifications Mechanical Valve Type: /3 Port, Direct-acting poppet style - Normally Closed (NC) - Normally Open (NO) - Distributor Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & other non-reacting gasses Operating Environment: 3 to 158 F (0 to 70 C) Storage Temperature: -40 to 158 F (-40 to 70 C) Dimensions: - Length: 1.73 in (43.9 mm) - Width: 0.63 in (15.8 mm) - Height: 0.67 in (17.0 mm) Weight:.1 oz (60 g) Internal Volume: 0.06 in 3 (0.46 cm 3 ) Filtration: 40 micron (recommended) Oxygen Clean: Call For Details and proven product with a reputation for reliable and consistent valve bodies made from nickel-plated brass and multiple pneumatic valve is the ideal solution for general purpose applications and those applications requiring low out-gassing and a bubble-tight seal. Features integration and control contamination Electrical Power Options: 0.5, 1.0 or.0 Watts Voltage Options: 5, 1 or 4 VDC Further power reduction may be achieved through the use of spike and hold or PWM electrical control. Electrical Connections: Wire Leads, PC Pins, Solder Tabs, Quick Disconnect Spade Wetted Materials Body: 36000 HO Brass, Nickel Plated Stem Base: 36000 HO Brass; Poppet Options: FKM All Others: 430 FR Series Stainless Steel 30 Series Stainless Steel 36000 HO Brass, Nickel Plated Performance Characteristics Leak Rate: <0.016 sccm of air (bubble tight) Response: <30 ms cycling Pressure: 0 to 100 psig (6.9 bar) Vacuum: 0-7 in Hg (686 mm Hg) Orifice Sizes: 0.030" (0.76 mm) 0.050" (1.7 mm)

50 Series 5 Miniature Pneumatic Solenoid Valve Typical Flow Curve pm) Rate (sl Flow 40 35 30 5 0 15 10 5 Pressure (bar) 0 1 3 4 5 6 Model 18 Model 15 Model 16 All Models Model 1 Model 13 Model 19 0.050 in (1.7 mm) 0.030 in (0.76 mm) Model 10 0 0 10 0 30 40 50 60 70 80 90 100 Pressure (psi) Pressure and Flow Capabilities/Life Requirements Model No. Orifice Size Nominal Cv Maximum Supply Pressure Power Consumption 10 0.030 in (0.76 mm) 0.017 100 psig (6.9 bar) Watts Elastomer FKM Life Requirements (millions of cycles*) 100 1 0.050 in (1.7 mm) 0.031 50 psig (3.5 bar) Watts FKM 100 13 0.030 in (0.76 mm) 0.017 50 psig (3.5 bar) 1 Watt FKM 00 15 0.050 in (1.7 mm) 0.05 5 psig (1.7 bar) 1 Watt FKM 00 16 0.030 in (0.76 mm) 0.017 5 psig (1.7 bar) 0.5 Watt FKM 60 18 0.050 in (1.7 mm) 0.01 10 psig (0.7 bar) 0.5 Watt FKM 60 19 0.050 in (1.7 mm) 0.05 70 psig (4.8 bar) Watts FKM 0 @parker.com

51 Series 5 Miniature Pneumatic Solenoid Valve Mechanical Integration Dimensions UNITS IN. [mm.] Basic Dimensions, -Way Valve Configuration X 10-3 UNF-B X.188 [4.78] DP..594 [15.09].67 [17.0].305 [7.75] 1.785 [45.34].65 [15.88] MAX..305 [7.75] PORT (OUTLET).54 [13.31].683 [17.35].336 [8.53].194 [4.93].31 [7.9] PORT 1 (INLET).375 [9.53].15 [3.18].155 [3.94] Ø.750 [Ø19.05].500 [1.70] X 6-3 UNF-B X.5 [6.35] DP. UNITS IN. [mm.] Basic Dimensions, 3-Way Valve Configuration PORT 3 (NORMALLY OPEN).67 [17.0].65 [15.88] MAX. REFERENCE STEM OPTIONS BELOW FOR DIMENSIONS. X 10-3 UNF-B X.188 [4.78] DP..594 [15.09].305 [7.75] 1.785 [45.34].305 [7.75] PORT (COMMON).54 [13.31].194 [4.93] PORT 1 (NORMALLY CLOSED).375 [9.53] Ø.750 [Ø19.05].683 [17.35].336 [8.53].31 [7.9].15 [3.18].155 [3.94].500 [1.70] X 6-3 UNF-B X.5 [6.35] DP. UNITS IN. [mm.]

5 Series 5 Miniature Pneumatic Solenoid Valve Mechanical Integration Dimensions 10-3, MALE THREAD compatible liquid-curing fastener to secure mating fitting in place. Stem Options Barb Options 10-3, FEMALE THREAD wrench to support the fitting when fitting.

53 Series 5 Miniature Pneumatic Solenoid Valve Electrical Interface COIL TYPE: WIRE LEADS X #6 AWG. BLACK WIRES 18 1/" ± 1/" [469.9 ± 1.7] LG. Coil Type: Wire Leads (See Order Info F ).65 [15.88].305 [7.75] Coil Type: Quick Connect Spade COIL TYPE: QUICK CONNECT SPADE (See Order Info Q ).110 [.79].195 [4.95].39 [9.9].43 [10.9] 1.53 [38.9] APPROX..018 [0.46] COIL TYPE: SOLDER TAB Coil Type: Solder Tab (See Order Info S ) Coil Type: 4 PC Pins* (See Order Info P ) *See Isometric Drawing below.15 [3.18].195 [4.95].64 ±.015 [6.71 ±0.38].195 [4.95].39 [9.9].50 ±.015 [6.35 ±0.38] UNITS IN. [mm.].018 [0.46].86 [1.8].018 [0.46] SQ. PIN.88 [.4] *4 PC PIN PCB Interface PCB.880 [.35].390 [9.91] PCB SOLDERING HOLE 4X Ø.05 [Ø1.3] THRU PAD Ø.15 [Ø3.18] COIL CONNECTIONS

54 Series 5 Miniature Pneumatic Solenoid Valve ANSI Symbols (1) SUPPLY PRESSURE Pneumatic Schematics by Valve Types TYPE 1 -WAY NORMALLY CLOSED 1 (1) REQMT LEGEND: SUPPLY: Pneumatic Source or Supply Pressure EXHAUST: Exhaust to Atmospheric Pressure REQMT: Customer Requirement or Application ATM: Atmospheric Pressure () SUPPLY TYPE -WAY NORMALLY OPEN (3) SUPPLY PRESSURE (3) REQMT 3 () SUPPLY TYPE 3 3-WAY NORMALLY CLOSED 3-WAY DISTRIBUTOR (3) EXHAUST PRESSURE (3) SUPPLY 1 3 (1) SUPPLY (1) ATM (3) REQMT PRESSURE (3) SUPPLY () SUPPLY 1 3 (1) REQMT (1) SUPPLY TYPE 4 3-WAY NORMALLY OPEN (3) SUPPLY PRESSURE (3) ATM 3 1 (1) EXHAUST (1) SUPPLY

55 Series 5 Miniature Pneumatic Solenoid Valve Ordering Information Sample Part ID 5 10 3 NV 1 P 5 7 Description Series Model Number: Pressure / Orifice / Power Type Material XX: Body / Poppet & Seal Voltage Electrical Coil Selection Pneumatic Connection Body Pneumatic Connection Stem Options 5 10: 0-100 psi / 0.030 orifice / Watts 1: -Way NC NV: Nickel-plated Brass / FKM 5: 5 VDC F: Wire Leads, 18", No Termination 5: 10-3 Female 0: Manifold Mount (-Way NC Only) 1: 0-50 psi / 0.050 orifice / Watts : -Way NO 1: 1 VDC P: PC Mount, 4 PC Pins 13: 0-50 psi / 0.030 orifice / 1 Watt 3: 3-Way NC or Distributor 15: 0-5 psi / 0.050 orifice / 1 Watt 16: 0-5 psi / 0.030 orifice / 0.5 Watt 18: 0-10 psi / 0.050 orifice / 0.5 Watt 19: 0-70 psi / 0.050 orifice / Watts 4: 3-Way NO 4: 4 VDC S: PC Mount, Solder Tabs Q: Quick Connect Spade 4: 10-3 Male 5: 10-3 Female 6: 1/16" (1.5mm) Barbs* 7: 5/64" ( mm) Barbs 8: 1/8" (3 mm) Barbs *1/16" Barbs not available for 0.050" orifice valves ORDER ON-LINE For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US September 014

56 Series 6 Miniature Pneumatic Solenoid Valve 15 mm Solenoid Valve Typical Applications Concentrators Product Specifications Mechanical Valve Type: /3 Port, Direct-acting poppet style - Normally Closed (NC) - Normally Open (NO) - Distributor Media: Air, argon, helium, hydrogen, methane, nitrogen, oxygen, & other non-reacting gasses Operating Environment: 3 to 158 F (0 to 70 C) Storage Temperature: -40 to 158 F (-40 to 70 C) Dimensions: Length: 1.53 in (38.8 mm) Diameter: 0.75 in (19.0 mm) Weight:.1 oz (60 g) Internal Volume: 0.06 in 3 (0.46 cm 3 ) Filtration: 40 micron (recommended) Oxygen Clean: Call For Details and proven product with a reputation for reliable and consistent valve bodies made from nickel-plated brass and multiple pneumatic valve is the ideal solution for general purpose applications and those applications requiring low out-gassing and a bubble-tight seal. Features integration and control and eases valve installation contamination Electrical Power Options: 0.5, 1.0 or.0 Watts Voltage Options: 5, 1 or 4 VDC Further power reduction may be achieved through the use of spike and hold or PWM electrical control. Electrical Connections: Wire Leads, PC Pins, Solder Tabs, Quick Disconnect Spade Wetted Materials Body: 36000 HO Brass, Nickel Plated Stem Base: 36000 HO Brass; Poppet Options: FKM All Others: 430 FR Series Stainless Steel 30 Series Stainless Steel 36000 HO Brass, Nickel Plated Performance Characteristics Leak Rate: <0.016 sccm of air (bubble tight) Response: <30 ms cycling Pressure: 0 to 100 psig (6.9 bar) Vacuum: 0-7 in Hg (686 mm Hg) Orifice Sizes: 0.030" (0.76 mm) 0.050" (1.7 mm)

57 Series 6 Miniature Pneumatic Solenoid Valve Typical Flow Curve pm) Rate (sl Flow All Models Pressure (bar) 0 1 3 4 5 6 40 35 30 5 0 15 10 5 Model 19 Model 1 Model 10 Model 15 Model 13 Model 18 Model 16 0.050 in (1.7 mm) 0.030 in (0.76 mm) 0 0 10 0 30 40 50 60 70 80 90 100 Pressure (psi) Pressure and Flow Capabilities/Life Requirements Model No. Orifice Size Nominal Cv Maximum Supply Pressure Power Consumption 10 0.030 in (0.76 mm) 0.017 100 psig (6.9 bar) Watts Elastomer FKM Life Requirements (millions of cycles*) 100 1 0.050 in (1.7 mm) 0.031 50 psig (3.5 bar) Watts FKM 100 13 0.030 in (0.76 mm) 0.017 50 psig (3.5 bar) 1 Watt FKM 00 15 0.050 in (1.7 mm) 0.05 5 psig (1.7 bar) 1 Watt FKM 00 16 0.030 in (0.76 mm) 0.017 5 psig (1.7 bar) 0.5 Watt FKM 60 18 0.050 in (1.7 mm) 0.01 10 psig (0.7 bar) 0.5 Watt FKM 60 19 0.050 in (1.7 mm) 0.05 70 psig (4.8 bar) Watts FKM 0 @parker.com

58 Series 6 Miniature Pneumatic Solenoid Valve Mechanical Integration Dimensions.65 [15.88] MAX..305 [7.75] 1.530 [38.86].15 [3.8] #10-3 UNF-A THREAD.375 [9.53] SEE O-RING DETAIL. [5.6] Basic Dimensions, -Way Valve Configuration.67 [17.0].305 [7.75] 3X Ø.17 [Ø4.3] SPANNER HOLES 10 APART.375 [9.53].180 [4.57] Ø.75 [Ø19.1] PORT (OUTLET) Ø.547 [Ø13.89] Ø.173 [Ø4.39] X.07 [1.83] GROOVE WIDTH PORT 1 (INLET) Ø.357 [Ø9.07].075 [1.91] GROOVE WIDTH O-RING DETAIL #10-3 THREAD NOT SHOWN UNITS IN. [mm.] Basic Dimensions, 3-Way Valve Configuration PORT 3 (NORMALLY OPEN).65 [15.88] MAX..305 [7.75] 1.530 [38.86].15 [3.8] #10-3 UNF-A THREAD.375 [9.53] SEE O-RING DETAIL. [5.6].67 [17.0].305 [7.75] REFERENCE STEM OPTIONS BELOW FOR DIMENSIONS. 3X Ø.17 [Ø4.3] SPANNER HOLES10 APART.375 [9.53].180 [4.57] Ø.75 [Ø19.1] PORT (COMMON) Ø.547 [Ø13.89] X.07 [1.83] GROOVE WIDTH Ø.357 [Ø9.07].075 [1.91] GROOVE WIDTH O-RING DETAIL #10-3 THREAD NOT SHOWN Ø.173 [Ø4.39] PORT 1 (NORMALLY CLOSED) UNITS IN. [mm.]

59 Series 6 Miniature Pneumatic Solenoid Valve Mechanical Integration Dimensions 10-3, MALE THREAD compatible liquid-curing fastener to secure mating fitting in place. Stem Options 10-3, FEMALE THREAD wrench to support the fitting when fitting. Barb Options

60 Series 6 Miniature Pneumatic Solenoid Valve Electrical Interface Coil Type: Wire Leads COIL TYPE: WIRE (See LEADS Order Info F ) X #6 AWG. BLACK WIRES 18 1/" ± 1/" [469.9 ± 1.7] LG..65 [15.88].305 [7.75] Coil Type: Quick Connect Spade (See Order Info Q ).110 [.79].195 [4.95].39 [9.9].43 [10.9] 1.53 [38.9] APPROX..018 [0.46] COIL TYPE: SOLDER TAB Coil Type: Solder Tab (See Order Info S ) Coil Type: 4 PC Pins* (See Order Info P ) *See Isometric Drawing below.15 [3.18].195 [4.95].64 ±.015 [6.71 ±0.38].195 [4.95].39 [9.9].50 ±.015 [6.35 ±0.38] UNITS IN. [mm.].018 [0.46].86 [1.8].018 [0.46] SQ. PIN.88 [.4] *4 PC PIN PCB Interface PCB.880 [.35].390 [9.91] PCB SOLDERING HOLE 4X Ø.05 [Ø1.3] THRU PAD Ø.15 [Ø3.18] COIL CONNECTIONS

61 Series 6 Miniature Pneumatic Solenoid Valve ANSI Symbols (1) SUPPLY PRESSURE Pneumatic Schematics by Valve Types TYPE 1 -WAY NORMALLY CLOSED 1 () SUPPLY LEGEND: SUPPLY: Pneumatic Source or Supply Pressure EXHAUST: Exhaust to Atmospheric Pressure REQMT: Customer Requirement or Application ATM: Atmospheric Pressure (1) REQMT TYPE 3 3-WAY NORMALLY CLOSED 3-WAY DISTRIBUTOR (3) EXHAUST PRESSURE (3) SUPPLY 1 3 (1) SUPPLY (1) ATM (3) REQMT PRESSURE (3) SUPPLY 1 3 () SUPPLY (1) REQMT (1) SUPPLY TYPE 4 3-WAY NORMALLY OPEN (3) SUPPLY PRESSURE (3) ATM 3 1 (1) EXHAUST (1) SUPPLY

6 Series 6 Miniature Pneumatic Solenoid Valve Ordering Information Sample Part ID 6 10 3 NV 1 P 4 7 Description Series Model Number: Pressure / Orifice / Power Type Material Voltage Electrical Coil Selection Pneumatic Connection Body Pneumatic Connection Stem Options 6 10: 0-100 psig / 0.030 orifice / Watts 1: -Way NC NV: Nickel-plated Brass/FKM 5: 5 VDC F: Wire Leads, 18", No Termination 4: 10-3 Male 0: Manifold Mount 1: 0-50 psig / 0.050 orifice / Watts 3: 3-Way NC or Distributor 13: 0-50 psig / 0.030 orifice / 1 Watt 4: 3-Way NO 1: 1 VDC P: PC Mount, 4 PC Pins (-Way NC Only) 4: 4 VDC S: PC Mount, Solder Tabs 4: 10-3 Male 15: 0-5 psig / 0.050 orifice / 1 Watt Q: Quick Connect Spade 5: 10-3 Female 16: 0-5 psig / 0.030 orifice / 0.5 Watt 6: 1/16" (1.5 mm) Barbs* 18: 0-10 psig / 0.050 orifice / 0.5 Watt 7: 5/64" ( mm) Barbs 19: 0-70 psig / 0.050 orifice / Watts 8: 1/8" (3 mm) Barbs *1/16" Barbs not available for 0.050" orifice valves ORDER ON-LINE For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US September 014

63 V Valve 15 mm Pneumatic Solenoid Valve Typical Applications Product Specifications Mechanical Valve Type: /3 Port, Direct-acting poppet style - Normally Closed (NC) - Normally Open (NO) - Distributor (Dist) Media: Air, Oxygen, Helium, Nitrogen, Carbon Dioxide/Monoxide, & other non-reactive gases. Operating Environment: 3 to 158 F (0 to 70 C ) Storage Temperature: -40 to 158 F (-40 to 70 C) Dimensions: - Length: 1.73 in (43.9 mm) - Width: 0.63 in (15.9 mm) - Height: 0.67 in (17.0 mm) Weight: 1. oz (34.3 g) Internal Volume: 0.0009 in 3 (0.016 cm 3 ) Filtration: 40 micron (recommended) Miniature Pneumatic Solenoid Valve The V miniature pneumatic solenoid valve is a proven product with for medical device and system manufacturers, the V miniature miniature pneumatic solenoid valve also offers pneumatic and electrical design tube configurations and is also available with either wire lead, quick Features termination to ease integration Electrical Power Options: 0.5, 1.0, or.0 Watts Voltage Options: 5, 1 or 4 VDC Further power reduction may be achieved through the use of spike and hold or PWM electrical control. Wetted Materials Body: PBT Stem Base: 36000 HO Brass All Others: FKM 430 FR Series Stainless Steel 30 Series Stainless Steel Performance Characteristics Leak Rate (Air): <0. sccm Response: <30 ms cycling Pressure: 0 to 100 psig (6.89 bar) Vacuum: 0-7 in Hg (686 mm Hg) Orifice Sizes: 0.030" (0.76 mm) 0.050" (1.7 mm) Reliability: Life cycle rating of 5 million (worst case tested, no performance degradation)

64 V Valve Miniature Pneumatic Solenoid Valve Typical Flow Curve pm) Rate (sl Flow All Models Pressure (bar) 0 1 3 4 5 6 40 35 30 5 0 15 10 5 Model 10 Model 14 Model 13 Model 17 Model 0 0.050 in (1.7 mm) 0.030 in (0.76 mm) 0 0 10 0 30 40 50 60 70 80 90 100 Pressure (psi) Pressure and Flow Capabilities Model No. Orifice Size Nominal Cv Maximum Supply Pressure Power Consumption 10 0.030 in (0.76 mm) 0.017 100 psig (6.89 bar) Watts 13 0.030 in (0.76 mm) 0.017 50 psig (3.45 bar) 1 Watt 14 0.050 in (1.7 mm) 0.034 30 psig (.07 bar) Watts 16 0.030 in (0.76 mm) 0.017 5 psig (1.7 bar) 0.5 Watt 17 0.050 in (1.7 mm) 0.03 15 psig (1.03 bar) 1 Watt 0 0.050 in (1.7 mm) 0.030 6 psig (0.41 bar) 0.5 Watt

65 V Valve Miniature Pneumatic Solenoid Valve Mechanical Integration Dimensions V Basic Dimensions, Barbed Configuration SEE DETAIL PORT 3: (-WAY, NONE) (3-WAY, NORMALLY OPEN) Barbed.67 [17.0].305 [7.75].65 [15.88] MAX..305 [7.75] X Ø.080 [Ø.03] (I.D.) PORT : (-WAY, OUTLET) (3-WAY, COMMON) X.Ø170 [Ø4.3] 1.98 [50.3] (3-WAY) 1.73 [43.9] (-WAY) 1.46 [37.1] X Ø.133 [Ø3.38] PORT 1: X.70 [6.86] (-WAY, INLET) (3-WAY, NORMALLY CLOSED) Ø.130 [Ø3.30] Ø.170 [Ø4.3].055 [1.40] Ø.500 [Ø1.70].15 [3.18] (.5 [6.4]) UNITS IN. [mm.] V Basic Dimensions, Manifold Mount Configuration Manifold Mount.65 [15.88] MAX..305 [7.75].67 [17.0].305 [7.75] SEE DETAIL PORT 3: (-WAY, NONE) (3-WAY, NORMALLY OPEN) X Ø.15 [Ø3.18].65 [6.73].500 [1.70].055 [1.40] 1.75 [44.5] (-WAY).055 [1.40].500 [1.70] Ø.130 [Ø3.30] Ø.170 [Ø4.3].00 [50.8] (3-WAY).81 [7.14] Ø.10 [Ø3.05] (I.D.) PORT : (-WAY, OUTLET) (3-WAY, COMMON).15 [3.18].075 [1.91] SQ..156 [3.96] PORT 1: (-WAY, INLET).31 [7.9] (3-WAY, NORMALLY CLOSED).15 [3.18] (.5 [6.4]) UNITS IN. [mm.]

66 V Valve Miniature Pneumatic Solenoid Valve Electrical Interface : SOLDER TAB COIL TYPE: QUICK CONNECT SPADE Coil Type: Solder Tab (See Order Info S ).15 [3.18].195 [4.95].64 ±.015 [6.71 ±0.38] Coil Type: Quick Connect Spade (See Order Info Q ).110 [.79].195 [4.95].39 [9.9].43 [10.9] UNITS IN. [mm.].018 [0.46].86 [1.8].018 [0.46] Coil Type: Wire Leads (See Order Info F ) Coil Type: 4 PC Pins* (See Order Info P ) X #6 AWG. BLACK WIRES 18 1/" ± 1/" [469.9 ± 1.7] LG..65 [15.88].305 [7.75] 1.53 [38.9] APPROX..018 [0.46] SQ. PIN.195 [4.95].39 [9.9].50 ±.015 [6.35 ±0.38].88 [.4] *PCB Pin Layout (Coil Type 4 PC Pin) (.038 [0.97]) (.430 [10.9]) BODY MOUNTING HOLE X Ø.15 [Ø3.18] (OPTIONAL) PCB SOLDERING HOLE 4X Ø.05 [Ø1.3] THRU PAD Ø.15 [Ø3.18].880 [.35] PCB.390 [9.91] COIL CONNECTIONS

67 V Valve Miniature Pneumatic Solenoid Valve ANSI Symbols Pneumatic Schematics by Valve Types MANIFOLD BODY OPTION () (1) (3) PORT LOCATIONS BARB BODY OPTION () (3) (1) LEGEND: SUPPLY: Pneumatic Source or Supply Pressure EXHAUST: Exhaust to Atmospheric Pressure REQMT: Customer Requirement or Application ATM: Atmospheric Pressure PRESSURE TYPE 1 -WAY NORMALLY CLOSED 1 () SUPPLY (1) SUPPLY (1) REQMT PRESSURE TYPE 3 3-WAY NORMALLY CLOSED (3) EXHAUST (3) SUPPLY 1 3 (1) SUPPLY (1) ATM PRESSURE TYPE 3 3-WAY DISTRIBUTOR (3) REQMT (3) SUPPLY () SUPPLY 1 3 (1) REQMT (1) SUPPLY PRESSURE TYPE 4 3-WAY NORMALLY OPEN (3) SUPPLY (3) ATM 3 1 (1) EXHAUST (1) SUPPLY

68 V Valve Miniature Pneumatic Solenoid Valve Accessories O-Ring (Manifold Seal) Dimensions 190-00704-00 Body Standoff 890-00007-001 ( required for each valve) PCB BODY STANDOFF Screw 4-40 x 5/8 Pan Head 191-000115-010 ( required for each valve) Ordering Information Sample Part ID V 14 3 PV 1 P 8 8 Description Series Model Number: Pressure / Orifice / Power Type Material XX: Body / Poppet Seal Options V 10: 0-100 psi / 0.030 orifice / Watts 1: -Way NC PV: Plastic / FKM 5: 5 VDC 13: 0-50 psi / 0.030 orifice / 1 Watt 3: 3-Way NC or Distributor Voltage Coil Type Body Styles Topseat Barbs F: Wire Leads, 18", No Termination 14: 0-30 psi / 0.050 orifice / Watts 4: 3-Way NO 4: 4 VDC S: PC Mount, Solder Tabs 0: Manifold Mount 0: None (-Way NC Only) 1: 1 VDC P: PC Mount, 4 PC Pins 8: 1/8" (3 mm) Barbs 8: 1/8" (3 mm) Barbs 16: 0-5 psi / 0.030 orifice / 0.5 Watt Q: Quick Connect Spade 17: 0-15 psi / 0.050 orifice / 1 Watt 0: 0-6 psi / 0.050 orifice / 0.5 Watt 191-000115-010: Screw 4-40 x 5/8" Pan Head, Phillips 890-00007-001: Body Standoff 190-00704-00: O-ring, FKM Accessories Used to create a flush mount between coil and valve body Used as seal between manifold and valve body ORDER ON-LINE For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US September 014

69 NOTES

70 Value Added Application-Specific Solutions Gassing Control System Mixed gassing logic design includes VSO proportional valves, X-Valve, pressure switch, pressure sensors, and PCB interface 7 Position X-Valve Pneumatic Manifold sensors logic design manifold sensors Vacuum Gas Control Module 6 Position VSO Proportional Valve Pneumatic Manifold Assembly tested on mass spectrometer fittings Circuit board with mass electrical termination 5 Position SRS Model Pneumatic Manifold 8 Position SRS Model Pneumatic Manifold logic assembly sensors board mounting termination Pressed in barbed fittings 10 Position X-Valve Pneumatic Manifold 10 Position SRS Model Pneumatic Manifold logic design mass termination Circuit board with transducers Pressed in barbed fittings For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics