Electro-Pneumatic Regulator Electronic Vacuum Regulator

Electro-Pneumatic Regulator Electronic Vacuum Regulator New Stepless control of air pressure proportional to an electrical signal Added Fieldbus compliant specifications to Series ITV//! Reduced wiring Applicable Fieldbus protocols Compact/lightweight (Integrated communicatioin parts) Weight: g Note ) (ITV) Power consumption: 4 W Note ) or less Note ) Value for communications type. (PROFIBUS DP) Electro-Pneumatic Regulators Series ITV Maximum flow rate 6 l/min (ANR) Set pressure:.6 MPa Supply pressure:. MPa Built-in communication board, so no converter needed. Added RS-C specification to serial communications! Note ) ITV. Dimensions in parentheses ( ) are for the CC-Link or PROFIBUS DP. Series ITV Maximum flow rate l/min (ANR) Set pressure:.6 MPa Supply pressure:. MPa Grease-free specification (wetted parts) [Option] RoHS New IP6 Note ) 98(8) Series ITV Maximum flow rate l/min (ANR) Set pressure:.6 MPa Supply pressure:. MPa Series ITV Maximum flow rate 4 l/min (ANR) Set pressure:.6 MPa Supply pressure:. MPa Electronic Vacuum Regulators Series ITV9 Series ITV9 Series ITV CAT.ES6-F

Compact Electro-Pneumatic Regulator Series ITV Compact Vacuum Regulator Series ITV9 Compact mm With a simplified highdensity circuit board design, an extremely compact size has been achieved. Cable connectors Straight type and right angle type are available. Straight type Right angle type Built-in One-touch fittings With error indication LED Brackets Flat and L-brackets are available. Lightweight g Flat bracket L-bracket Realizes spacesaving and reduction of weight for manifold use. Stations can easily be increased or decreased due to DIN rail mount design. Model ITV ITV ITV ITV9 Pressure range. MPa MPa.9 MPa kpa Power supply voltage 4 VDC VDC Input signal 4 to ma DC to ma DC to VDC to VDC Output signal Analog output to V Option Cable connectors Straight type Right angle type Brackets Flat bracket L-bracket Equivalent to IP6 Linearity: Within ±% (F.S.) Hysteresis: Within % (F.S.) Repeatability: Within ±% (F.S.) High-speed response time:. sec (Without load) High stability Sensitivity within.% (F.S.) Air Filter ( µm or less) Mist separator (. µm or less) ( µm or less) IR (Precision regulator) W ITV (Electro-pneumatic regulator) Electro-Pneumatic Regulator Series ITV// Electronic Vacuum Regulator Series ITV9 New Added Fieldbus compliant specifications to Series ITV//! Reduced wiring Applicable Fieldbus protocols ITV ITV Sensitivity: Within.% (F.S.) Linearity: Within ±% (F.S.) Hysteresis: Within % (F.S.) IP6 Cable connections in directions Straight type New Added RS-C specification to serial communications! Right angle type Application examples Multi-stage control to analog control Controller s Pressure regulators OUT. Electro-pneumatic regulator OUT. Electrostatic coating control Mist separator SUP. Electro-pneumatic regulator Control signal ITV ITV9 Coating material Grease-free specification (Series ITV) Features SUP. Mist separator Mist separator SUP. Controller Analog control Controller Coating nozzle

Electro-Pneumatic Regulator Electronic Vacuum Regulator Stepless control of air pressure proportional to an electrical signal. Series ITV Series Model Set pressure range Input signal Port size Page Series ITV ITV ITV ITV to. MPa to MPa to.9 MPa Current type: 4 to ma DC Current type: to ma DC Voltage type: to VDC Voltage type: to VDC Built-in One-touch fittings Metric size: ø4 Inch size: ø/ Electro-Pneumatic Regulator Series ITV Series ITV New New ITV ITV ITV ITV ITV ITV to. MPa to MPa to.9 MPa to. MPa to MPa to.9 MPa Current type: 4 to ma DC (Sink type) Current type: to ma DC (Sink type) Voltage type: to VDC Voltage type: to VDC Preset input New CC-Link compatible /8, /4 /4, /8 9 9 Series ITV New ITV to. MPa New DeviceNet compatible New PROFIBUS DP compatible New RS-C communication ITV to MPa /4, /8, / 9 ITV to.9 MPa Electronic Vacuum Regulator Series ITV9 Series ITV9 New ITV9 to kpa Current type: 4 to ma DC Current type: to ma DC Voltage type: to VDC Voltage type: to VDC Current type: 4 to ma DC (Sink type) Current type: to ma DC (Sink type) Voltage type: to VDC Built-in One-touch fittings Metric size: ø4 Inch size: ø/ ITV9. to 8 kpa Voltage type: /4 4 to VDC Preset input New CC-Link compatible New DeviceNet compatible New PROFIBUS DP compatible New RS-C communication 7 Features

PWR ERR PWR ERR Compact Electro-Pneumatic Regulator Series ITV RoHS How to Order [Option] For single unit and single unit for manifold ITV N Pressure range. MPa MPa.9 MPa Power supply voltage 4 VDC ±% to VDC Cable connector (Option) N S L Without cable connector Straight type m Right angle type m CE compliant Nil Q CE compliant For detailed information on models for CE, refer to SMC's website. Input signal Current type 4 to ma DC Current type to ma DC Voltage type to VDC Voltage type to VDC Bracket/Option for single unit only Nil Without bracket Flat Bracket Built-in One-touch fittings type For single unit Symbol SUPz OUTx Nil Metric size (Light gray) ø4 U Inch size (Orange) ø/" c B C L-bracket For manifold Symbol Metric size Nil (Light gray) U Inch size (Orange) SUPz ø6 ø/4" OUTx ø4 ø/" c ø6 ø/4" Base type Nil M For single unit For manifolds Manifold IITV n Stations stations stations stations One-touch fitting size for supply/ exhaust parts (End plate) Nil U ø6 (Light gray) ø/4" (Orange) Option If a DIN rail longer than the specified stations is required, specify the applicable stations in two digits. (Maximum stations) Example) IITV--7 How to Order Manifold Assembly (Example) Indicate the part numbers of electro-pneumatic regulators and options to be mounted below the manifold part number. Example) Due to the common supply/exhaust feature, note that different pressure range combinations are not available. IITV- set (Manifold part no.) ITV-MS sets (Electro-pneumatic regulator part no. (, stations)) ITV-ML set (Electro-pneumatic regulator part no. ( stations)) Indicate part numbers in order starting from the first station on the D side. Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. The asterisk ( ) specifies mounting. Add an asterisk ( ) at the beginning of electro-pneumatic regulator part numbers to be mounted. D side PWR ERR PWR ERR Note) A DIN rail with the length specified by the number of stations is attached to the manifold. For dimensions of the DIN rail, refer to the external dimensions. PWR ERR DIN rail ITV-MS ITV-ML

Compact Electro-Pneumatic Regulator Series ITV Specifications Accessories (Option) Bracket Minimum supply pressure Maximum supply pressure Set pressure range Maximum flow rate Power supply Input signal Input impedance Output signal Linearity Hysteresis Repeatability Sensitivity Voltage Voltage type Current type Voltage type Current type Analog output Temperature characteristics Operating temperature range Enclosure Connection type Connection size Note ) Weight Model Current consumption For single unit Manifold Cable connector ITV. MPa to. MPa. l/min(anr) (Supply pressure:. MPa) Metric size Inch size Metric size Inch size ITV Set pressure +. MPa to MPa. MPa 6 l/min(anr) (Supply pressure:.6 MPa) 4 VDC ±%, to VDC to VDC, to VDC 4 to ma DC, to ma DC Approximately kω Approximately Ω Within ±% (Full span) Within % (Full span) Within ±% (Full span) Within.% (Full span) Within ±.% (Full span)/ C to C (No condensation) Equivalent to IP6 Built-in One-touch fittings g or less (without option) ITV to.9 MPa 6 l/min(anr) (Supply pressure:.6 MPa) Power supply voltage 4 VDC type:. A or less Power supply voltage to VDC type:.8 A or less to VDC (Load impedance: kω or more) Output accuracy: Within ±6% (Full span) z, x, c: ø4 z, x, c: ø/" z, c: ø6, x: ø4 z, c: ø/4", x: ø/" Note ) Indicates the weight of a single unit. For IITV-n Total weight (g) Stations (n) x + (Weight of end block A, B assembly) + Weight (g) of DIN rail Note ) When there is a downstream flow consumption, pressure may become unstable depending on piping conditions. Note ) When the power is turned on, a noise may be generated. This noise is normal and does not indicate a fault. When using under the conditions equivalent to IP6, connect the fitting or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on back page ) Flat bracket assembly (includes mounting screws) P98 Straight type M8-4DSXMG4 L-bracket assembly (includes mounting screws) P98 Right angle type ELWIKA-KV448 PVC M Tighting torque when assembling is. N m.

Series ITV Working Principle When the input signal rises, the air supply soloenoid q turns ON. Due to this, part of the supply pressure passes through the air supply solenoid q and changes to output pressure. This output pressure feeds back to the control circuit r via the pressure sensor e. Here, pressure corrections continue until output pressure becomes proportional to the input signal, enabling output pressure that is proportional to the input signal. Diagram of working principle Power supply and error LED indication Power supply Input signal r Control circuit Output signal q Air supply solenoid w Exhaust solenoid e Pressure sensor SUP OUT Block diagram Supply pressure Input signal + r Control circuit q Air supply solenoid w Exhaust solenoid Output pressure Discharged to atmosphere e Pressure sensor

Compact Electro-Pneumatic Regulator Series ITV Series ITV Linearity, Hyteresis Repeatability With % of signal input Output deviation factor (% F.S.).8.6.4...4.6.8 Return Out Output deviation factor (% F.S.) 7 Input signal (%F.S.) 4 Count Pressure Characteristics Set pressure: MPa Flow Characteristics Supply pressure:. MPa Output deviation factor (% F.S.) Out Return Set pressure (kpa) 8 6 4 kpa 8 kpa 6 kpa 4 kpa kpa kpa.6.7.8.9 Supply pressure (MPa).... Flow rate (l/min (ANR)) 4 Series ITV Linearity, Hyteresis Repeatability With % of signal input Output deviation factor (% F.S.).8.6.4...4.6.8 Return Out Output deviation factor (% F.S.) 7 Input signal (%F.S.) 4 Count Pressure Characteristics Set pressure:. MPa Flow Characteristics Supply pressure:.6 MPa 6 Output deviation factor (% F.S.) Out Return Set pressure (kpa) 4 kpa 4 kpa kpa kpa kpa kpa...4.6.7.8.9 Supply pressure (MPa). 4 6 Flow rate (l/min (ANR)) 7 4

Series ITV Series ITV Linearity, Hyteresis Output deviation factor (% F.S.).8.6.4...4.6.8 Return Out 7 Input signal (%F.S.) Repeatability Output deviation factor (% F.S.) 4 Count With % of signal input Pressure Characteristics Output deviation factor (% F.S.) Out Return.4.6.8. Supply pressure (MPa) Set pressure:.4 MPa. Flow Characteristics Set pressure (kpa) Supply pressure:. MPa 9 9 kpa 8 kpa 8 7 7 kpa 6 6 kpa kpa 4 4 kpa kpa kpa kpa kpa 4 6 7 Flow rate (l/min (ANR))

Compact Electro-Pneumatic Regulator Series ITV Dimensions For Single Unit PWR ERR 4 x ø6 depth of counterbore x ø6 depth of counterbore. L-bracket (Option) PWR ERR M8 x Cable connection thread Flat bracket (Option) 6 Port Location No. z x c ITV SUP OUT 9 Note) When using under the conditions equivalent to IP6, connect the fittings or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on back page ) Note) Breathing hole (M x ) OUT port (ø4, ø/") 8 88.7.7 OUTx 89 SUPz c SUP port (ø4, ø/") port (ø4, ø/").7 8 9 L-bracket (Option) 74 9 7 9 x M x thread depth. Bracket mounting hole 4 x ø. Flat bracket (Option) x ø. 64 + (.9) 8 Minimum bending radius 8 Body ø4 Cable connector (4-wire) Straight type (Option) 8.7 9.9 7 4 Cable connector (4-wire) Right angle type (Option) Minimum bending radius 8 Body 8 M8 x ø9.7 4.6 ø4 6

Series ITV Dimensions Single unit for manifold 6 PWR ERR M8 x Cable connection thread 84 86 9 Note) Breathing hole (M x ).7 OUT port OUTx (ø4, ø/") 8 8. Note) When using under the conditions equivalent to IP6, connect the fittings or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on back page ) Bushing assembly 6..7 Note) For dimensions of the cable connector, refer to single unit on page 6. 7

Compact Electro-Pneumatic Regulator Series ITV Dimensions Manifold L L Note) Stations are counted starting from the D side. PWR 4 4 4 x M x thread depth Mounting hole Port Location No. z x c ITV SUP OUT 9. 9. PWR ERR ERR PWR ERR PWR ERR 6 D side stations U side 9 (8) Dimensions in inch are noted in parentheses. SUPz port (ø6, ø/4") 8 6. 6. 89. c port (ø6, ø/4") 4 4 OUTx port (ø4, ø/").7 Note) For dimensions of the cable connector, refer to single unit on page 6. Manifold stations n L L Weight of DIN rail (g) 6 7 4 9 48 7 6 9 6 7 7 8. 4 8 98 6 9 6 4 (mm) 8. 4 Note) Breathing hole (M x ) Note) When using under the conditions equivalent to IP6, connect the fittings or tubing to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on back page ). 8

Electro-Pneumatic Regulator Series ITV// How to Order [Option] RoHS ITV S Model type type type Pressure range. MPa MPa.9 MPa CE compliant Nil Q CE compliant Note) Refer to pages,, and 6 for information on CE compliant made to order products. For detailed information on models for CE, refer to SMC's website. Input signal/ Communication model 4 CC DN PR RC Current type 4 to ma DC (Sink type) Current type to ma DC (Sink type) Voltage type to VDC Voltage type to VDC Preset input CC-Link DeviceNet PROFIBUS DP RS-C communication Power supply voltage 4 VDC to VDC Note) Communication models (CC, DN PR, RC) are available only for 4 VDC. 4 Nil Monitor output Analog output to VDC Switch output/npn output Switch output/pnp output Analog output 4 to ma DC (Sink type) None Thread type Nil N T F Rc NPT NPTF G Nil Note) Note) 4 MPa kgf/cm bar psi kpa Cable connector type S L N Bracket Nil B C Pressure display unit Straight type m Right angle type m Without cable connector Without bracket Flat bracket L-bracket Made to Order Specifications Refer to pages,, and 6 for details. Note) Under Japan's new Measurement Act, this is only for overseas sales (SI units are to be used inside Japan). For the communication models, CC, DN, PR and RC, only Nil is available as it does not have a pressure display. Note) Order communication cable (other than RS-C) separately. See below. Port size 4 /8 ( type) /4 (,, type) /8 (, type) / ( type) 9 For communication cables, use the parts listed below (refer to the catalog [M8/M Connector] CAT.ES-7 for details) or order the product certified for the respective protocol (with M connector) separately. Application Communication cable part number Remarks CC-Link compatibility PCA-677 (Socket type) Dedicated Bus adapter supplied PCA-6777 (Plug type) with the product. DeviceNet PROFIBUS DP PCA-76 (Socket type) PCA-7688 (Socket type) compatibility compatibility PCA-7646 (Plug type) PCA-769 (Plug type) T-branch connector not supplied. T-branch connector not supplied.

Electro-Pneumatic Regulator Series ITV// ITV JIS Symbol Rated pressure Output pressure (MPa) ITV ITV Fieldbus-compatible model This range is outside of the control (output). MPa Input signal (%F.S.) Figure. Input/output characteristics chart Communication Specifications (CC, DN, PR, RC) Standard Specifications Model Minimum supply pressure Maximum supply pressure. Set pressure range Note ) Power supply Input signal Input impedance Note ) Output signal (monitor output) Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Output pressure display Note 4) Weight Note 9) Accuracy Minimum unit Ambient and fluid temperature Enclosure Voltage Current consumption Current type Note ) Voltage type Preset input Current type Voltage type Preset input Analog output Switch output ITV ITV ITV ITV ITV ITV MPa ITV ITV ITV Set pressure +. MPa. MPa to. MPa to MPa to.9 MPa 4 VDC ± %, to VDC Power supply voltage 4 VDC type:. A or less Power supply voltage to VDC type:.8 A or less 4 to ma DC, to ma DC (Sink type) to VDC, to VDC 4 points (Negative common) Ω or less Note 6) Approx. 6. kω Power supply voltage 4 VDC type: Approx. 4.7 kω Power supply voltage VDC type: Approx.. kω to VDC (Load impedance: kω or more) 4 to ma DC (Sink type) (Load impedance: Ω or less) Output accuracy within ±6% (Full span) NPN open collector output: Max. V, 8 ma PNP open collector output: Max. 8 ma Within ±% (Full span) Within % (Full span) Within ±% (Full span) Within.% (Full span) Within ±.% (Full span)/ C ±%F.S. ± digit MPa:, kgf/cm :, bar:, psi:. Note ), kpa: to C (No condensation) IP6 Approx. g (without options) Approx. g (without options) Approx. 64 g (without options) ITV ITV ITV Note ) Note ) Note ) Note ) Please refer to Figure for the relationship between set pressure and input. Because the maximum set pressure differs for each pressure display, refer to back page 6. Note ) -wire type 4 to ma DC is not available. Power supply voltage (4 VDC or to VDC) is required. Note ) Select either analog output or switch output. Further, when switch output is selected, select either NPN output or PNP output. Note 4) Adjustment of numerical values such as the zero/span adjustment or preset input type is set based on the minimum units for output pressure display (e.g. to MPa). Note that the unit cannot be changed. Note ) The minimum unit for.9 MPa ( psi) types is psi. Note 6) Value for the state with no over current circuit included. If an allowance is provided for an over current circuit, the input impedance varies depending on the input current. This is Ω or less for an input current of ma DC. Note 7) The above characteristics are confined to the static state. When air is consumed on the output side, the pressure may fluctuate. Note 8) For communication models, the maximum current consumption is.6 A or less. Note 9) For communication models, add roughly 8 g to the weight ( g for the PROFIBUS DP). Note ) The ITV series is a Grease-free specification (Wetted parts). Model Protocol Version Note ) Communication speed Configulation file Note ) I/O occupation area (input/output data) Communication data resolution Fail safe Terminating resistor ITV -CC CC-Link Ver. 6 k/6 k. M/ M/ M bps 4 word/4 word, bit/ bit (per station, remote device station) bit (496 resolution) HOLD Note ) /CLEAR (Switch setting) ITV -DN DeviceNet Release. k/ k/ k bps EDS 6 bit/6 bit bit (496 resolution) HOLD/CLEAR (Switch setting) ITV -PR PROFIBUS DP DP-V GSD 6 bit/6 bit bit (496 resolution) CLEAR ITV -RC RS-C Built into the product (Switch setting) Note ) Note that version information is subject to change. Note ) Configulation files can be downloaded from the SMC's website: http://www.smcworld.com Note ) The output HOLD value when a CC-Link communications error occurs can be set based on the bit area data. Note 4) The insulation between the electrical signal of the communication system and ITV power supply. 9.6 k/9. k/4.4 k 9.7 k/87. k/ k. M/ M/6 M/ M bps 9.6 kbps bit (4 resolution) Electric insulation Note 4) No No Yes No HOLD

Series ITV// Combinations Standard specifications Combination possible Combination not possible ITV models are not applicable. Applicable model rspacer ITV Specifications Symbol ITV ITV Approx. 89 Approx. qaf 78 wafm el-bracket ITV Standard specifications Accessories Optional specifications Set pressure max.. MPa Set pressure max. MPa Set pressure max..9 MPa Connection Rc /4 Connection Rc /8 Connection Rc / Bracket Bracket Connection NPT/4 Connection NPT/8 Connection NPT/ Connection G /4 Connection G /8 Connection G / 4 B C N N N4 F F F4 Modular Products and Accessory Combinations Applicable products and accessories q Air filter w Mist separator e L-bracket r Spacer t Spacer with L-bracket (e + r) y Spacer with T-bracket ITV models are not applicable. Applicable model ITV ITV AF AFM BL Y YL AF4 AFM4 B4L Y4 Y4L Y4T Accessories (Option)/Part No. Order Made Symbol CE-compliant X8 X6 X9 X7 X X X4 X X X X88 X4 X6 X Made to Order (Refer to pages and 6 for details.) Specifications Not compliant 6 points preset input type Compliant Not compliant Digital input type Compliant Not compliant Reverse type Compliant Not compliant Compliant Not compliant Compliant Not compliant Compliant Not compliant Compliant High pressure type (SUP. MPa, OUT. MPa) Set pressure range to kpa (Except Series ITV) High speed response type (Except Series ITV) For manifold mounting (Except Series ITV) L-bracket assembly (including mounting screws) Power cable connector Dimensions Flat bracket Description Flat bracket assembly (including mounting screws) Straight type m Right angle type m Bus adapter (CC-Link model only) Part No. ITV ITV ITV L-bracket KT-ITV-F P98-- (P98-4- for DeviceNet ) P98-- (P98-- for DeviceNet ) EX9-ACY-MJ 6.6 4 4 x ø7 6 4 84 8 x ø4. 4 x ø. KT-ITV-F KT-ITV-L (8.) 4 6. 4 6 7 4 8 x ø4. 4 x ø. 7 Approx. 4 Approx. 7 qaf4 4 wafm4 Note ) Manifolds are compatible with to 8 stations. Consult with SMC for 9 stations or more. Note ) Products without symbols are also compatible. Consult with SMC separately. 7 KT-ITV-L 4 x R.

Electro-Pneumatic Regulator Series ITV// Working Principles When the input signal rises, the air supply solenoid q turns ON, and the exhaust solenoid w turns OFF. Therefore, supply pressure passes through the air supply solenoid q and is applied to the pilot chamber e. The pressure in the pilot chamber e increases and operates on the upper surface of the diaphragm r. As a result, the air supply t linked to the diaphragm r opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u. Here, a correct operation functions until the output pressure is proportional to the input signal, making it possible to always obtain output pressure proportional to the input signal. Working Principle Diagram Pressure display Pressure display Power supply Input signal i Control circuit Output signal Power supply Input signal q Air supply solenoid r Diaphragm i Control circuit Output signal w Exhaust solenoid u Pressure sensor e Pilot chamber t Supply q Air supply solenoid r Diaphragm y Exhaust t Supply w Exhaust solenoid u Pressure sensor e Pilot chamber SUP OUT SUP OUT ITV ITV, Block diagram Supply pressure Input signal i Control circuit q Air supply solenoid r Diaphragm Pilot Output pressure w Exhaust solenoid u Pressure sensor

Series ITV// Series ITV Linearity Hysteresis.. Out 9 8 7 Return 6 4. 7 7 Input signal (%F.S.) Input signal (%F.S.) Repeatability.. 4 6 8 Repetition Pressure characteristics Set pressure: MPa. Set point.... Supply pressure (MPa) Flow characteristics Supply pressure:. MPa 4 6 8 Flow rate (l/min (ANR)) Relief flow characteristics Supply pressure:. MPa.. 4 6 8 Flow rate (l/min (ANR)) Series ITV Linearity 9 8 7 6 4 7 Input signal (%F.S.) Hysteresis. Out Return. 7 Input signal (%F.S.) Repeatability.. 4 6 8 Repetition Pressure characteristics Set pressure: MPa. Set point.... Supply pressure (MPa) Flow characteristics Supply pressure:. MPa 4 6 Flow rate (l/min (ANR)) Relief flow characteristics Supply pressure:. MPa.. 4 6 8 Flow rate (l/min (ANR))

Electro-Pneumatic Regulator Series ITV// Series ITV Linearity 9 8 7 6 4 7 Input signal (%F.S.) Hysteresis. Out. 7 Input signal (%F.S.) Return Repeatability.. 4 6 8 Repetition Pressure characteristics Set pressure: MPa. Set point.... Supply pressure (MPa) Flow characteristics Supply pressure:. MPa Flow rate (l/min (ANR)) Relief flow characteristics Supply pressure:. MPa.. Flow rate (l/min (ANR)) 4

Series ITV// Series ITV Linearity.6 Hysteresis. Repeatability..4... Out Return 7 Input signal (%F.S.). 7 Input signal (%F.S.). 4 6 8 Repetition Pressure characteristics Set pressure:. MPa. Set point...4.6.8 Supply pressure (MPa) Flow characteristics Supply pressure:.7 MPa.6.4... Flow rate (l/min (ANR)) Relief flow characteristics Supply pressure:.7 MPa.8.7.6.4... Flow rate (l/min (ANR)) Series ITV Linearity.6.4... Hysteresis. Out Return Repeatability. 7 Input signal (%F.S.). 7 Input signal (%F.S.). 4 6 8 Repetition Pressure characteristics. Set pressure:. MPa Set point Flow characteristics.6.4... Supply pressure:.7 MPa Relief flow characteristics.8.7.6.4... Supply pressure:.7 MPa...4.6 Supply pressure (MPa).8 Flow rate (l/min (ANR)) Flow rate (l/min (ANR))

Electro-Pneumatic Regulator Series ITV// Series ITV Linearity.6.4... Hysteresis. Out Retirm Repeatability. 7 Input signal (%F.S.). 7 Input signal (%F.S.). 4 6 8 Repetition Pressure characteristics. Set pressure:. MPa Set point Flow characteristics.6.4... Supply pressure:.7 MPa Relief flow characteristics.8.7.6.4... Supply pressure:.7 MPa...4.6 Supply pressure (MPa).8 4 6 Flow rate (l/min (ANR)) 4 Flow rate (l/min (ANR)) 6

Series ITV// Series ITV Linearity..9.8.7.6.4... 7 Input signal (%F.S.) Hysteresis. Out Return. 7 Input signal (%F.S.) Repeatability.. 4 6 8 Repetition Pressure characteristics Set pressure:.4 MPa. Set point..4.6.8. Supply pressure (MPa) Flow characteristics..9.8.7.6.4... Supply pressure:. MPa Flow rate (l/min (ANR)) Relief flow characteristics..9.8.7.6.4... Supply pressure:. MPa Flow rate (l/min (ANR)) Series ITV Linearity..9.8.7.6.4... 7 Input signal (%F.S.) Hysteresis. Out Return. 7 Input signal (%F.S.) Repeatability.. 4 6 8 Repetition Pressure characteristics Set pressure:.4 MPa. Set point..4.6.8.. Supply pressure (MPa) Flow characteristics..9.8.7.6.4... Supply pressure:. MPa Flow rate (l/min (ANR)) Relief flow characteristics..9.8.7.6.4... Supply pressure:. MPa Flow rate (l/min (ANR)) 7

Electro-Pneumatic Regulator Series ITV// Series ITV Linearity..9 Hysteresis. Repeatability..8.7.6.4... 7 Input signal (%F.S.) Out Return. 7 Input signal (%F.S.). 4 6 8 Repetition Pressure characteristics Set pressure:.4 MPa. Set point..4.6.8.. Supply pressure (MPa) Flow characteristics..9.8.7.6.4... 4 6 7 Flow rate (l/min (ANR)) Supply pressure:. MPa Relief flow characteristics..9.8.7.6.4... 4 6 Flow rate (l/min (ANR)) Supply pressure:. MPa 8

Series ITV// Dimensions ITV Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn. Right angle type (4-wire) Cable connector m Straight type (4-wire) Cable connector m 84 4 x ø7 Mounting hole () 4 Setting part M x Connector (Plug type). () M x Rc /8 Exhaust port 7 9. SUP () OUT () Flat bracket assembly () KT-ITV-F (Option). 4.6 4 x M4 x.7 thread depth 6 mm through x Rc /8, /4 SUP port, OUT port L-bracket 4 x R. 7. (8.) L-bracket assembly KT-ITV-L (Option) 4 9

Electro-Pneumatic Regulator Series ITV// Dimensions (CC-Link, DeviceNet, PROFIBUS DP and RS-C) CC-Link/ITV -CC () M x Communication cable connection thread (Socket type) M x Power cable connection thread (Plug type) () BUS adapter M x Communication cable connection thread (Plug type) DeviceNet /ITV -DN M x Communication cable connection thread (Plug type) M x Power cable connection thread (Plug type) () 8. 8. M x 8 Rc /8 Exhaust port M x 98 SUP () OUT () () SUP () OUT () () Rc /8 Exhaust port x Rc /8, /4 SUP port, OUT port x Rc /8, /4 SUP port, OUT port Dimensions not shown are as on page 9. Dimensions not shown are as on page 9. PROFIBUS DP/ITV -PR M x Communication cable connection thread (Socket type) (6) M x. M x Power cable connection thread (Plug type) 9. 8 () Rc/8 Exhaust port RS-C/ITV -RC M x M x Communication cable connection thread (Plug type) M x Power cable connection thread (Plug type) () 98 SUP () OUT () () SUP () OUT () () 8. Rc/8 Exhaust port x Rc /8, /4 SUP port, OUT port x Rc /8, /4 SUP port, OUT port Dimensions not shown are as on page 9. Dimensions not shown are as on page 9. With power cable connector ITV - Note) Order communication cable (other than RS-C) separately. (Refer to page 9.) CC DN PR RC common dimensions Straight type (4-wire) Cable connector m Right angle type (4-wire) Cable connector m () Note) Do not attempt to rotate, as the cable connector does not turn.

Series ITV// Dimensions ITV Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn. Right angle type (4-wire) Cable connector m Straight type (4-wire) Cable connector m 84 4 x ø7 Mounting hole () 4 M x Connector (Plug type). () M x.8. Rc /4 Exhaust port 9 9 SUP () OUT () () Flat bracket assembly KT-ITV-F (Option) 6.6 4 x M x.8 thread depth 6 mm through x Rc /4, /8 SUP port, OUT port L-bracket 4 x R. 7 6. (8.) L-bracket assembly KT-ITV-L (Option) 4

Electro-Pneumatic Regulator Series ITV// Dimensions (CC-Link, DeviceNet, PROFIBUS DP and RS-C) CC-Link/ITV -CC () M x Communication cable connection thread (Socket type) M x Power cable connection thread (Plug type) () BUS adapter M x Communication cable connection thread (Plug type) DeviceNet /ITV -DN M x Communication cable connection thread (Plug type) M x Power cable connection thread (Plug type) () 8. 8. M x.8 Rc /4 Exhaust port M x.8 SUP () OUT () () SUP () OUT () () Rc /4 Exhaust port Dimensions not shown are as on page. x Rc /4, /8 SUP port, OUT port Dimensions not shown are as on page. x Rc /4, /8 SUP port, OUT port PROFIBUS DP/ITV -PR M x Communication cable connection thread (Socket type) (6) M x.8. () M x Power cable connection thread (Plug type) 9. Rc /4 Exhaust port RS-C/ITV -RC M x.8 M x Communication cable connection thread (Plug type) M x Power cable connection thread (Plug type) 8. () SUP () OUT () () SUP () OUT () () Rc /4 Exhaust port Dimensions not shown are as on page. x Rc /4, /8 SUP port, OUT port Dimensions not shown are as on page. x Rc /4, /8 SUP port, OUT port With power cable connector ITV - Note) Order communication cable (other than RS-C) separately. (Refer to page 9.) CC DN PR RC common dimensions Straight type (4-wire) Cable connector m Right angle type (4-wire) Cable connector m () Note) Do not attempt to rotate, as the cable connector does not turn.

Series ITV// Dimensions ITV Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn. 4 4 x ø7 Mounting hole Right angle type (4-wire) Cable connector m Straight type (4-wire) Cable connector m 84 66 () M x Connector (Plug type). () M x.8. 4 (66) () SUP () OUT () Flat bracket assembly KT-ITV-F (Option).6 4 x M x.8 thread depth 6 mm through 6 x Rc /4, /8, /4 SUP port, OUT port L-bracket 4 x R. 7 6. (8.) L-bracket assembly KT-ITV-L (Option) 4 6

Electro-Pneumatic Regulator Series ITV// Dimensions (CC-Link, DeviceNet, PROFIBUS DP and RS-C) CC-Link/ITV -CC () M x Communication cable connection thread (Socket type) M x Power cable connection thread (Plug type) BUS adapter M x Communication cable connection thread (Plug type) DeviceNet /ITV -DN M x Communication cable connection thread M x (Plug type) Power cable connection thread (Plug type) 8. () 8. () M x.8 M x.8 () () 4 SUP () OUT () SUP () OUT ().6 x Rc/4, /8, /4 SUP port, OUT port Dimensions not shown are as on page. x Rc /4, /8, /4 SUP port, OUT port Dimensions not shown are as on page. M x Power cable connection thread (Plug type) 9. M x Communication cable connection thread (Plug type) M x Power cable connection thread (Plug type) 8. () ().6 PROFIBUS DP/ITV -PR M x Communication cable connection thread (Socket type). (6) RS-C/ITV -RC M x.8 SUP () OUT ().6 M x.8 () () SUP () OUT ().6 4 Dimensions not shown are as on page. x Rc /4, /8, /4 SUP port, OUT port Dimensions not shown are as on page. x Rc /4, /8, /4 SUP port, OUT port With power cable connector ITV - CC DN PR RC common dimensions Straight type (4-wire) Cable connector m () Right angle type (4-wire) Cable connector m Note) Do not attempt to rotate, as the cable connector does not turn. 4

Series ITV// Made to Order Specifications Please contact SMC for detailed dimensions, specifications and lead times. Made to Order Able to control 6-point-pressure by 4 bit switching input ITV ITV ITV 6 Points Preset Input Type 4 4 X8 X8 4 X8 Reverse Type In compliance with input, inverse proportional pressure is displayed. ITV X ITV X ITV X Note ) in part number is the same model no. for the standard products. Note ) Monitor output is switch output type only.this cannot be selected for types without a monitor output or with analog output. Note ) Values can be adjusted starting from the minimum output pressure display units. MPa kgf/cm psi type: psi bar psi. kpa 6 points preset type Symbol CE-compliant X8 Not compliant X6 Compliant Rated pressure Output pressure (MPa) This range is outside of the control (output). MPa Symbol X X Reverse type CE-compliant Not compliant Compliant Digital Input Type Parallel input type with digital bit. ITV ITV ITV 4 4 4 S N S N X9 X9 S N X9 Digital input type Symbol X9 X7 CE-compliant Not compliant Compliant Note ) in part number is the same model no. for the standard products. Note ) Right angle type cable connectors cannot be selected. 4 ITV ITV ITV Input/output characteristics chart Note ) in part number is the same model no. for the standard products. Note ) Except for preset input type. High Pressure Type (SUP. MPa, OUT. MPa) Input signal (%F.S.) High pressure type (SUP. MPa, OUT. MPa) Symbol X4 X X4 X4 X4 CE-compliant Not compliant Compliant ITV ITV Set Pressure Range to kpa Set pressure range to kpa Symbol X X X X CE-compliant Not compliant Compliant

Series ITV// Made to Order Specifications Please contact SMC for detailed dimensions, specifications and lead times. Made to Order 6 High-Speed Response Time Type Pressure response with no load is approx.. sec. Power supply voltage Model type type 4 VDC to VDC ITV S Pressure range. MPa MPa.9 MPa Input signal Current type 4 to ma DC (Sink type) Current type to ma DC (Sink type) Voltage type to VDC Voltage type to VDC Monitor output Analog output to VDC S L N X88 Pressure display unit Straight type m Right angle type m Without cable connector High-speed response time specifications Symbol CE-compliant Nil MPa X88 Not compliant kgf/cm X4 Compliant bar 4 psi kpa Under Japan's new Measurement Act, this is only for overseas sales (SI units are to be used inside Japan). Cable connector type Thread type Nil N T F Rc NPT NPTF G Port size /8 ( type) /4 (, type) /8 ( type) Bracket Nil B C Without bracket Flat bracket L-bracket 7 Manifold Specifications (Except Series ITV) through 8 station manifold. How to Order Manifolds IITV Stations stations 8 8 stations How to Order Manifold Assemblies Example Electro-pneumatic regulator ITV-S-X6 Blanking plate assembly P98- Electro-pneumatic regulator ITV-S-X6 ITV, OUT port size /4 /8 Connection thread type Nil N F PT NPT PF IITV-- set ( station manifold base part no.) ITV-S-X6 set (Electro-pneumatic regulator part no.) Note ) P98- set (Blanking plate assembly part no.) ITV-S-X6 set (Electro-pneumatic regulator part no.) Note ) Note) Refer to the table below for possible mixed combination. Model ITV ITV ITV ITV ITV ITV The is the symbol for mounting. Add the symbol at the beginning of part numbers for electro-pneumatic regulators, etc. to be mounted on the base. ITV ITV ITV ITV ITV ITV Manifold base ( stations) IITV-- Stations Note ) Note ) Electro-pneumatic regulators are counted starting from station on the left side with the OUT ports in front. Note ) The port size for mounted electro-pneumatic regulators is Rc /8 (ITV), Rc /4 (ITV) only. Note ) When there is a large number of stations, use piping with the largest possible inside diameter for the supply side, such as steel piping. Note 4) The use of the straight type cable connector is recommended. To mount right angle type, be certain to check that no possible interference occurs. Note ) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. 6

Compact Vacuum Regulator Series ITV9 RoHS For single unit and single unit for manifold ITV 9 Pressure range 9 kpa Power supply voltage 4 VDC ±% to VDC How to Order N Cable connector (Option) N Without cable connector S Straight type m L Right angle type m [Option] CE compliant Nil Q CE compliant For detailed information on models for CE, refer to the SMC's website. Input signal Current type 4 to ma DC Current type to ma DC Voltage type to VDC Voltage type to VDC Bracket/Option for single unit only Nil Without bracket Flat Bracket PWR ERR Built-in One-touch fittings type For single unit Symbol VACz OUTx Nil Metric size (Light gray) ø4 U Inch size (Orange) ø/" ATMc B C L-bracket PWR ERR For manifold Symbol Metric size Nil (Light gray) U Inch size (Orange) VACz ø6 ø/4" OUTx ø4 ø/" ATMc ø6 ø/4" Base type Nil M For single unit For manifolds Manifold IITV n Stations stations stations stations Option If a DIN rail longer than the specified stations is required, specify the applicable stations in two digits. (Maximum stations) Example) IITV--7 Note) A DIN rail with the length specified by the number of stations is attached to the manifold. For dimensions of the DIN rail, refer to the external dimensions. How to Order Manifold Assembly (Example) Indicate the part numbers of electro-pneumatic regulators and options to be mounted below the manifold part number. Example) Due to the common supply/exhaust feature, note that different pressure range combinations are not available. IITV- set (Manifold part no.) ITV9-MS sets (Vacuum regulator part no. (, stations)) ITV9-ML set (Vacuum regulator part no. ( stations)) Indicate part numbers in order starting from the first station on the D side. Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. The asterisk ( ) specifies mounting. Add an asterisk ( ) at the beginning of electro-pneumatic regulator part numbers to be mounted. D side PWR ERR PWR ERR PWR ERR DIN rail 7 ITV9-MS ITV9-ML

Compact Vacuum Regulator Series ITV9 Specifications Model Minimum supply pressure Maximum supply pressure Set pressure range Maximum flow rate ITV9 Set pressure kpa kpa to kpa l/min (ANR) (Supply pressure: kpa) Accessories (Option) Bracket Power supply Input signal Input impedance Output signal Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Operating temperature range Enclosure Connection type Voltage Current consumption Voltage type Current type Voltage type Current type Analog output 4 VDC ±%, to VDC to VDC, to VDC 4 to ma DC, to ma DC Approximately kω Approximately Ω Within ±% (Full span) Within % (Full span) Within ±% (Full span) Within.% (Full span) Within ±.% (Full span)/ C to C (No condensation) IP6 equivalent Built-in One-touch fittings For single Metric size z, x, c: ø4 unit Inch size z, x, c: ø/" Connection size Metric size z, c: ø6, x: ø4 Manifold Inch size z, c: ø/4", x: ø/" Weight Note ) g or less (without option) Note ) Indicates the weight of a single unit. For IITV-n Total weight (g) Stations (n) x + (Weight of end block A, B assembly) + Weight (g) of DIN rail Note ) When there is a downstream flow consumption, pressure may become unstable depending on piping conditions. When using under the conditions equivalent to IP6, connect the fitting or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on back page ) Cable connector Power supply voltage 4 VDC type:. A or less Power supply voltage to VDC type:.8 A or less to VDC (Load impedance: kω or more) Output accuracy: Within ±6% (Full span) Flat bracket assembly (including mounting screws) P98 Straight type M8-4DSXMG4 L-bracket assembly (including mounting screws) P98 Right angle type ELWIKA-KV448 PVC M Tighting torque when assembling is. N m. 8

Series ITV9 Working Principle When the input signal rises, the air supply soloenoid q turns ON. Due to this, part of the supply pressure passes through the air supply solenoid q and changes to output pressure. This output pressure feeds back to the control circuit r via the pressure sensor e. Here, pressure corrections continue until output pressure becomes proportional to the input signal, enabling output pressure that is proportional to the input signal. Diagram of working principle Power supply and error LED indication Power supply Input signal r Control circuit Output signal q Air supply solenoid w Exhaust solenoid e Pressure sensor VAC ATM OUT Block diagram Supply pressure Input signal + r Control circuit q Air supply solenoid w Exhaust solenoid Output pressure Discharged to atmosphere e Pressure sensor 9

Compact Vacuum Regulator Series ITV9 Series ITV9 Linearity, Hyteresis Repeatability With % of signal input Output deviation factor (% F.S.) Return Out Output deviation factor (% F.S.) 7 4 Input signal (%F.S.) Count Pressure Characteristics Set pressure: kpa Flow Characteristics Output deviation factor (% F.S.) Out Return Set pressure (kpa) 4 6 8 kpa kpa 4 kpa 6 kpa 8 kpa kpa 8 6 4... 4 Supply pressure (kpa) Flow rate (l/min (ANR))

Series ITV9 Dimensions For Single Unit PWR ERR 4 x ø6 depth of counterbore x ø6 depth of counterbore. L-bracket (Option) M8 x Cable connection thread PWR ERR Flat bracket (Option) 6 Port Location No. z x c ITV9 VAC OUT ATM 8 OUTx VACz ATMc 9 74 9 7 9 9 Note) When using under the conditions equivalent to IP6, connect the fittings or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on back page ) Note) Breathing hole (M x ) OUT port (ø4, ø/") 88.7.7 89 VAC port (ø4, ø/") ATM port (ø4, ø/").7 8 L-bracket (Option) x M x thread depth. Bracket mounting hole 4 x ø. Flat bracket (Option) x ø. 64 + 8 Minimum bending radius 8 Body (.9) ø4 Cable connector (4-wire) Straight type (Option) 8.7 9.9 7 4 Cable connector (4-wire) Right angle type (Option) Minimum bending radius 8 Body 8 M8 x ø9.7 4.6 ø4

Compact Vacuum Regulator Series ITV9 Dimensions Single unit for manifold 6 PWR ERR M8 x Cable connection thread 84 86 9 Note) Breathing hole (M x ).7 OUT port OUTx (ø4, ø/") 8 8. Note) When using under the conditions equivalent to IP6, connect the fittings or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on back page ) Bushing assembly 6..7 Note) For dimensions of the cable connector, refer to single unit on page.

Series ITV9 Dimensions Manifold L L PWR ERR PWR ERR 4 4 4 x M x thread depth Mounting hole Port Location No. z x c ITV9 VAC OUT ATM Note) Stations are counted starting from the D side. 9. 9. 6 9 PWR ERR PWR ERR D side stations U side (8) Dimensions in inch are noted in parentheses. 6. 6. VACz port (ø6, ø/4") 8 89. ATMc port (ø6, ø/4") 4 4 OUTx port (ø4, ø/").7 Note) For dimensions of the cable connector, refer to single unit on page. Manifold stations n L L Weight of DIN rail (g) 6 7 4 9 48 7 6 9 6 7 7 8. 4 8 98 6 9 6 4 (mm) 8. 4 Note) Breathing hole (M x ) Note) When using under the conditions equivalent to IP6, connect the fittings or tubing to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on back page )

Electronic Vacuum Regulator Series ITV9/9 How to Order [Option] RoHS ITV 9 S Pressure range 9. to 8 kpa Power supply voltage 4 VDC to VDC Note) Communication models are available only for 4 V DC. CE compliant Nil Q CE compliant Pressure display unit kpa Note) For the communication models, CC, DN, PR and RC, only Nil is available as it does not have a pressure display. 4 CC DN PR RC Input signal/ Communication model Current type 4 to ma DC (Sink type) Current type to ma DC (Sink type) Voltage type to VDC Voltage type to VDC Preset input CC-Link DeviceNet PROFIBUS DP RS-C communication 4 Nil Monitor output Analog output to VDC Switch output/npn output Switch output/pnp output Analog output 4 to ma DC (Sink type) None Bracket Nil B C Cable connector type S Straight type m L Right angle type m N Without cable connector Note) Order communication cable (other than RS-C) separately. See below. Without bracket Flat bracket L-bracket Port size /4 Thread type Nil N T F Rc NPT NPTF G For communications cables, use the parts listed below (refer to the catalog [M8/M Connector] CAT.ES-7 for details) or order the product certified for the respective protocol (with M connector) separately. Application Communication cable part number Remarks CC-Link compatibility PCA-677 (Socket type) Dedicated Bus adapter supplied PCA-6777 (Plug type) with the product. DeviceNet PROFIBUS DP PCA-76 (Socket type) PCA-7688 (Socket type) compatibility compatibility PCA-7646 (Plug type) PCA-769 (Plug type) T-branch connector not supplied. T-branch connector not supplied. 4

Series ITV9/9 Standard Specifications Stepless control of vacuum pressure in proportion to an electrical signal Piping/Wiring Diagram Power supply and input signal (VDC, ma DC) VAC Vacuum pump, Ejector ITV9 OUT Tank Set pressure (Vacuum) Power supply Note ) Minimum supply vacuum pressure Maximum supply vacuum pressure Set pressure range Input signal Input impedance Output signal (Monitor output) Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Output pressure Accuracy display Units Ambient and fluid temperature Enclosure Note 7) Weight Model Voltage Note 4) Current consumption Note ) Current type Voltage type Preset input Current type Voltage type Preset input Analog output Switch output ITV9 ITV9 4 VDC ±% to VDC Note 6) Power supply voltage 4 VDC type:. A or less Power supply voltage to VDC type:.8 A or less Set pressure. kpa kpa. to 8 kpa 4 to ma DC, to ma DC to VDC, to VDC 4 points (Negative common) Note ) Ω or less Approximately 6. kω Power supply voltage 4 VDC type: Approximately 4.7 kω Power supply voltage VDC type: Approximately. kω to VDC (Load impedance: kω or more) 4 to ma DC (Sink type) (Load impedance: Ω or less) Output accuracy within ±6% (Full span) NPN open collector output: Max. V, 8 ma PNP open collector output: Max. 8 ma Within ±% (Full span) Within % (Full span) Within ±% (Full span) Within.% (Full span) Within ±.% (Full span)/ C ±%F.S. digit kpa Note ) Minimum display: to C (No condensation) IP6 g Note ) The minimum supply vacuum pressure should be. kpa less than the maximum vacuum pressure setting value. Note ) 4 to ma DC is not possible with the -wire type. Power supply voltage (4 VDC or to VDC) is required. Note ) Value for the state with no over current circuit included. If an allowance is provided for an over current circuit, the input impedance varies depending on the input power supply. This is Ω or less for an input current of ma DC. Note 4) Either analog output or switch output must be selected. Furthermore, when switch output is selected, either NPN output or PNP output must also be selected. Use caution that the preset input type is not equipped with an output signal function. Note ) Please contact SMC regarding indication with other units of pressure. Note 6) For communication models, the maximum current consumption is.6 A or less. Note 7) For communication models, add roughly 8 g to the weight ( g for the PROFIBUS DP). Communication Specifications (CC, DN, PR, RC) Model Protocol Version Note ) Communication speed Configulation file Note ) I/O occupation area (input/output data) Communication data resolution Fail safe Terminating resistor ITV -CC CC-Link Ver. 6 k/6 k. M/ M/ M bps 4 word/4 word, bit/ bit (per station, remote device station) bit (496 resolution) HOLD Note ) /CLEAR (Switch setting) ITV -DN DeviceNet Release. EDS 6 bit/6 bit bit (496 resolution) Note ) Note that version information is subject to change. Note ) Configulation files can be downloaded from the SMC's website: http://www.smcworld.com Note ) The output HOLD value when a CC-Link communications error occurs can be set based on the bit area data. k/ k/ k bps HOLD/CLEAR (Switch setting) ITV -PR PROFIBUS DP DP-V 9.6 k/9. k/4.4 k 9.7 k/87. k/ k. M/ M/6 M/ M bps GSD 6 bit/6 bit bit (496 resolution) CLEAR Built into the product (Switch setting) ITV -RC RS-C 9.6 kbps bit (4 resolution) HOLD

Electronic Vacuum Regulator Series ITV9 Working Principle Working Principle Power supply Input signal q Vacuum pressure solenoid r Diaphragm Pressure display i Control circuit Output signal w Atmospheric pressure solenoid Atmospheric pressure u Pressure sensor e Pilot chamber When the input signal increases, the vacuum pressure solenoid q turns ON, and the atmospheric pressure solenoid w turns OFF. Because of this, VAC. and the pilot chamber e are connected, the pressure in the pilot chamber e becomes negative and acts on the top of the diaphragm r. As a result, the vacuum pressure t which is linked to the diaphragm r opens, VAC. and OUT. are connected, and the set pressure becomes negative. This negative pressure feeds back to the control circuit i via the pressure sensor u. Then, a correct operation works until a vacuum pressure proportional to the input signal is reached, and a vacuum pressure is obtained which is always proportional to the input signal. Block Diagram VAC. (Vacuum pump, etc.) ATM (Atmospheric pressure) t Vacuum pressure OUT. (Set pressure) y Atmospheric pressure Input signal + t Control circuit q Vacuum pressure solenoid w Atmospheric pressure solenoid VAC. u Pressure sensor r Diaphragm Pilot Set pressure Series ITV9 Linearity Hysteresis Repeatability. Output pressure (kpa) 4 6 Output deviation factor (% F.S.) Return Out Output deviation factor (% F.S.) 8. 7 Pressure Characteristics Output deviation factor (% F.S.) Set point Input signal (% F.S.) Set pressure: kpa. 7 4 6 8 Input signal (% F.S.) Count Flow Characteristics Set pressure (kpa) 4 6 7 8 Supply vacuum pressure: kpa Flow characteristics measurement conditions Exhaust flow rate of the vacuum pump used for measurement: l/min (ANR) Inlet vacuum pressure: kpa (When outlet flow rate is l/min (ANR)) Maximum flow rate: l/min (ANR) (With inlet vacuum pressure at 9 kpa). 8 6 4 VAC. side pressure (Supply pressure) (kpa) 9 Flow rate (l/min(anr)) 6

Series ITV9 Dimensions ITV9 Flat bracket Note) Do not attempt to rotate the cable connector, as it does not turn. Right angle type (4-wire) Cable connector m Straight type (4-wire) Cable connector m 84 4 x ø7 Mounting hole 4 () M x Connector (Plug type). M x.8 Breathing hole 99 () () Rc /4 VAC. port 9 ATM. (Atmospheric pressure) OUT (Set pressure) Flat bracket assembly KT-ITV-F (Option) VAC. (Vacuum pressure) 6..6 x Rc /4 ATM. port, OUT port 4 x M x.8 thread depth 6 mm through L-bracket 4 x R. 7 6. (8.) L-bracket assembly KT-ITV-L (Option) 4 7