AGR Series Gear-Driven Rotary Stages

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AGR Series Gear-Driven Rotary Stages Enhanced speed and load capacity Large aperture addresses a wide range of applications Continuous 360 degrees rotary positioning Rotary Stages AGR Series Direct encoder options available AGR gear-driven rotary stages have a large, clear aperture and are available with a variety of motor selections to meet your needs. AGR series motorized rotary stages provide significant improvements in speed, load capacity, and long-term positioning performance over previous generations of worm-gear-drive stages. AGR series stages address a wide range of applications for general purpose positioning in laboratory and industrial uses. Construction Features The presence of a large, clear aperture in the stage allows the AGR series to address applications requiring a throughhole or accommodations to mount an optic, including articulation of beam polarizing lenses, through-holes for cabling and/or air lines, or vision/camera/inspection applications. The AGR stage base is fabricated from an aluminum alloy that offers significant weight savings in multi-axis arrangements and other weight critical applications, while providing high structural stiffness and long-term stability. Each stage is designed with two high-precision angular contact bearings with optimal spacing to provide excellent error motions coupled with high load capacities in a small, compact package. Flexible Options Options include flexible motor selections as well as a direct encoder mounted to the stage shaft for outstanding repeatability and to virtually eliminate hysteresis and backlash. Vacuum-compatible versions (for use in pressures as low as 10-6 torr) are also available. Motor and Drives Standard AGR stage configurations feature Aerotech s brushless servomotors. However, all AGR stages can be outfitted with stepper or DC brush motors. A full range of matching drives and controls are available for a complete single-source solution. www.aerotech.com 1

AGR Series SPECIFICATIONS AGR Series Rotary Stages Mechanical Specifications AGR AGR75 AGR AGR1 AGR Travel Accuracy Repeatability (Uni-Directional) Repeatability (Bi-Directional) Tilt Error Motion Uncalibrated Calibrated Uncalibrated with Direct Encoder Option Calibrated with Direct Encoder Option Standard Direct Encoder (1) Standard 0.87 mrad (180 arc sec) 0.29 mrad (60 arc sec) 58 µrad (12 arc sec) 360 (Limited Travel Versions Available) 0.58 mrad (120 arc sec) 0.24 mrad ( arc sec) 97 µrad (20 arc sec) 49 µrad (10 arc sec) 49 µrad (10 arc sec) 24 µrad (5 arc sec) 0.22 mrad (45 arc sec) Direct Encoder (1) 39 µrad (8 arc sec) 29 µrad (6 arc sec) 49 µrad (10 arc sec) Axial Error Motion 5 µm Radial Error Motion 10 µm Gear Ratio 51:1 67:1 85:1 117:1 126:1 Maximum Speed (2) with Brushless Servomotor (BM and BMS Models) 180 /s with Stepper Motor 60 /s 40 /s Maximum Acceleration (3) 720 /s 2 480 /s 2 Aperture mm mm 75 mm mm 1 mm mm Load Capacity Axial 40 kg kg kg 300 kg 4 kg Radial 20 kg kg kg 1 kg kg Moment See Moment Load Curves Maximum Torque Load to Stage Shaft 2.5 N m 3.5 N m 12 N m 20 N m 80 N m Rotor Inertia (Unloaded) 0.00052 kg m 2 0.0013 kg m 2 0.0035 kg m 2 0.011 kg m 2 0.076 kg m 2 Stage Mass (No Motor) Material Standard 1.9 kg 2.4 kg 4.5 kg 6.1 kg 18.6 kg Direct Encoder 2.5 kg 3.1 kg 5.6 kg 7.6 kg 21.7 kg Aluminum 120 /s Notes: 1. Direct encoder repeatability specifications are for systems using the -E1 or -E3 direct encoder options only. 2. Maximum speed is load dependent. Contact an Aerotech Application Engineer if imbalanced loads are present. 3. Unloaded acceleration. 4. On-axis loading is listed. 5. Specifications are for single-axis systems measured mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications. 2 Electrical Specifications AGR AGR75 AGR AGR1 AGR Drive System Feedback Maximum Bus Voltage Limit Switches Home Switch Standard Direct Encoder with Brushless Servomotor (BM Models) with Brushless Servomotor (BMS Models) Precision Worm-Gear with Brushless Servomotor or Stepper Motor Noncontact Rotary Encoder Contained Within Motor; See Motor Description Under Ordering Options Section for Details Noncontact Rotary Encoder Directly Mounted to AGR Stage Shaft 15744 Lines/Rev 18000 Lines/Rev 23600 Lines/Rev 31488 Lines/Rev 40000 Lines/Rev 80 VDC 320 VDC 320 VDC with Stepper Motor 40 VDC 80 VDC Note: 1. For stepper motors with Aerotech controllers, amplifier bus voltages are 2X values listed 5 V, Normally Closed or Normally Open Near Limit (for Limited Travel Stage Version) Recommended Controller AGR AGR75 AGR AGR1 AGR Multi-Axis A3 Ndrive MP10/Ndrive CP10/Npaq Ensemble Ensemble MP10/Ensemble CP10/Epaq Single Axis Soloist Soloist MP10/Soloist CP10 www.aerotech.com

AGR Series SPECIFICATIONS Max Load (kg) 45 40 35 30 20 15 10 5 0 Axial Radial 0 1 2 300 Max Load (kg) 120 80 60 40 20 0 Axial Radial 0 1 2 300 Rotary Stages AGR Series Distance (mm) from Axis of Rotation (Axial) Distance (mm) from Tabletop/Shaft (Radial) Distance (mm) from Axis of Rotation (Axial) Distance (mm) from Tabletop/Shaft (Radial) Axial and Radial Cantilevered Load Capability (AGR) Axial and Radial Cantilevered Load Capability (AGR75) Max Load (kg) 2 1 Axial Radial Max Load (kg) 3 300 2 1 Axial Radial 0 0 1 2 300 0 0 300 400 0 Distance (mm) from Axis of Rotation (Axial) Distance (mm) from Tabletop/Shaft (Radial) Distance (mm) from Axis of Rotation (Axial) Distance (mm) from Tabletop/Shaft (Radial) Axial and Radial Cantilevered Load Capability (AGR) Axial and Radial Cantilevered Load Capability (AGR1) Max Load (kg) 4 400 3 300 2 1 0 Axial Radial 0 300 400 0 Distance (mm) from Axis of Rotation (Axial) Distance (mm) from Tabletop/Shaft (Radial) Axial and Radial Cantilevered Load Capability (AGR) www.aerotech.com 3

AGR AGR Series Rotary Stages MOTOR LENGTH "A" SHAFT INPUT DIAMETER "C" NO MOTOR - 6.35 [0.] -M1, -M3 1 6.35 [0.] -M2, -M4 153 6.35 [0.] -M5 91.1 6.35 [0.] -M6 128 6.35 [0.] -M7 127 5.0 -M8 132 5.0 OPTION HEIGHT "B" DEFAULT -SL1 60 -E1, -E2, -E3 66.4 -SL1 + -E1, -E2, -E3 76.4 4X M4X0.7 6 10.5 APERTURE 75 8X M5X0.8 7.5 4X 63 BC 5.5 THRU ALL 10 TO DEPTH SHOWN 10.5 4X M4X0.7 6 20 129.8 31 GREASE FITTING 22 3 20 69.4 37 SQ 31 SQ 20 TYP 105 C 2 120.8 A 12X M3X0.5 6 CW 15 CCW MOTOR HIDDEN FOR CLARITY TABLETOP BC ORIENTATION AT CENTER OF TRAVEL 1. 4X M5X0.8 7.5 75 B 10.5 NOTES: 1. CW AND CCW TRAVEL LIMITATIONS APPLY TO -TRXXX LIMITED TRAVEL OPTION ONLY. ORIENTATION OF TABLETOP BC AT CENTER OF TRAVEL IS CONSISTENT FOR ALL CONFIGURATIONS. DIMENSIONS: MILLIMETERS [INCHES] 4 www.aerotech.com

AGR Accessories 4X 6.8 THRU ALL 11.1 SLOT 6.8 4X M5X0.8 7.5.8 -MP1 MOUNTING PLATE 31 101.6 129.8 Rotary Stages AGR Series 69.4 52 THRU 10 105 120.8 -TT1 TABLETOP -TT2 TABLETOP SQ TYP.4 SQ TYP SQ TYP.8 SQ TYP 16X M5X0.8 7.5 16X 10-32 UNF 7.2 63 BC 8X 5.5 THRU ALL 10 6 EVENLY SPACED ON BC 63 BC 8X 5.5 THRU ALL 10 6 EVENLY SPACED ON BC 12 12 DIMENSIONS: MILLIMETERS www.aerotech.com 5

AGR Series Rotary Stages AGR75 MOTOR LENGTH "A" SHAFT INPUT DIAMETER "C" NO MOTOR - 6.35 [0.] -M1, -M3 1 6.35 [0.] -M2, -M4 153 6.35 [0.] -M5 91.1 6.35 [0.] -M6 128 6.35 [0.] -M7 127 5.0 -M8 132 5.0 OPTION HEIGHT "B" DEFAULT -SL1 60 -E1, -E2, -E3 66.4 -SL1 + -E1, -E2, -E3 76.4 146.2 10.5 75 APERTURE 94.5 1 8X M5X0.8 7.5 85 BC 4X 5.5 THRU ALL 10 TO DEPTH SHOWN 10.5 4X M4X0.7 6 4X M4X0.7 6 155.2 GREASE FITTING 82.1 46.5 TYP 22 3 37 SQ 31 SQ 20 TYP 12.7 120.8 A C 12X M3X0.5 6 CW 15 CCW MOTOR HIDDEN FOR CLARITY TABLETOP BC ORIENTATION AT CENTER OF TRAVEL 1. 4X M5X0.8 7.5 75 B NOTES: 10.5 1. CW AND CCW TRAVEL LIMITATIONS APPLY TO -TRXXX LIMITED TRAVEL OPTION ONLY. ORIENTATION OF TABLETOP BC AT CENTER OF TRAVEL IS CONSISTENT FOR ALL CONFIGURATIONS. DIMENSIONS: MILLIMETERS [INCHES] 6 www.aerotech.com

AGR75 Accessories 4X 6.8 THRU ALL 11.1 SLOT 6.8 4X M5X0.8 7.5 76.2 75 -MP1 MOUNTING PLATE 29.5 1 127 155.2 Rotary Stages AGR Series 82.1 46.5 77 THRU 120.8 10 1 146.2 -TT1 TABLETOP -TT2 TABLETOP 1 SQ TYP SQ TYP 1.4 SQ TYP.8 SQ TYP 75 SQ TYP 76.2 SQ TYP 85 BC 24X M5X0.8 7.5 8X 5.5 THRU ALL 10 6 EVENLY SPACED ON BC 85 BC 24X 10-32 UNF 7.2 8X 5.5 THRU ALL 10 6 EVENLY SPACED ON BC 12 12 DIMENSIONS: MILLIMETERS www.aerotech.com 7

AGR Series Rotary Stages AGR MOTOR LENGTH "A" -M1, -M3, -M5, -M7 132.3 -M2, -M4, -M6, -M8 209.5 -M9 110.9 -M10 111.9 OPTION HEIGHT "B" DEFAULT 65 -SL1 78 -E1, -E2, -E3 81 -SL1 + -E1, -E2, -E3 94 1 17.2 APERTURE 127 8X M6X1.0 9 112.5 BC 17.2 4X M5X0.8 7.5 190.7 80 4X 6.6 THRU ALL 12.7 TO DEPTH SHOWN GREASE FITTING 4X M5X0.8 7.5 104.9 38.1 4.5 47.1 SQ 33.4 TYP 3.2 171.6 15 A 6.35 [1/4"] SHAFT INPUT 4X M4X0.7 8 MOTOR HIDDEN FOR CLARITY CW CCW TABLETOP BC ORIENTATION AT CENTER OF TRAVEL 1. 4X M6X1.0 9 1 B 40 9.7 NOTE: BRAKE OPTIONS PROTRUDE BELOW MOUNTING SURFACE 2.4 NOTES: 1. CW AND CCW TRAVEL LIMITATIONS APPLY TO -TRXXX LIMITED TRAVEL OPTION ONLY. ORIENTATION OF TABLETOP BC AT CENTER OF TRAVEL IS CONSISTENT FOR ALL CONFIGURATIONS. DIMENSIONS: MILLIMETERS 8 www.aerotech.com

AGR Accessories 4X 6.8 THRU ALL 11.1 SLOT 7 4X M6X1.0 9 101.6 -MP1 MOUNTING PLATE 49.5 80 1 152.4 190.7 Rotary Stages AGR Series 104.9 102 THRU 12 1 171.6 -TT1 TABLETOP 8X 6.6 THRU ALL 11 7 EVENLY SPACED ON BC 32X M6X1.0 9 157 8X 6.6 THRU ALL 11 7 EVENLY SPACED ON BC -TT2 TABLETOP 32X 1/4-20 UNC 9.5 157 112.5 BC SQ TYP 112.5 BC.4 SQ TYP SQ TYP.8 SQ TYP 75 SQ TYP SQ TYP 76.2 SQ TYP 101.6 SQ TYP 15 15 DIMENSIONS: MILLIMETERS www.aerotech.com 9

AGR Series Rotary Stages AGR1 MOTOR LENGTH "A" -M1, -M3, -M5, -M7 132.3 -M2, -M4, -M6, -M8 209.5 -M9 110.9 -M10 111.9 OPTION HEIGHT "B" DEFAULT 65 -SL1 78 -E1, -E2, -E3 81 -SL1 + -E1, -E2, -E3 94 222.4 17.2 4X M5X0.8 7.5 1 APERTURE 177 8X M6X1.0 9 164 BC 4X 6.6 THRU ALL 12.7 TO DEPTH SHOWN 17.2 4X M5X0.8 7.5 241.5 1 GREASE FITTING 130.3 58.8 TYP 38.1 4.5 47.1 SQ 33.4 TYP.4 171.6 15 A 6.35 [1/4"] SHAFT INPUT 4X M4X0.7 8 MOTOR HIDDEN FOR CLARITY CW CCW TABLETOP BC ORIENTATION AT CENTER OF TRAVEL 1. 4X M6X1.0 9 1 B 40 NOTES: 9.7 1. CW AND CCW TRAVEL LIMITATIONS APPLY TO -TRXXX LIMITED TRAVEL OPTION ONLY. ORIENTATION OF TABLETOP BC AT CENTER OF TRAVEL IS CONSISTENT FOR ALL CONFIGURATIONS. NOTE: BRAKE OPTIONS PROTRUDE BELOW MOUNTING SURFACE DIMENSIONS: MILLIMETERS 2.4 10 www.aerotech.com

AGR1 Accessories 4X 6.8 THRU ALL 11.1 SLOT 7 4X M6X1.0 9 152.4 1 -MP1 MOUNTING PLATE 72 Rotary Stages AGR Series 1 203.2 241.5 130.3 58.8 171.6 152 THRU 12 222.4 8X 6.6 THRU ALL 11 7 EVENLY SPACED ON BC -TT1 TABLETOP 40X M6X1.0 9 207 8X 6.6 THRU ALL 11 7 EVENLY SPACED ON BC -TT2 TABLETOP 40X 1/4-20 UNC 9.5 207 164 BC SQ TYP 164 BC.4 SQ TYP SQ TYP.8 SQ TYP 75 SQ TYP SQ TYP 1 SQ TYP 76.2 SQ TYP 101.6 SQ TYP 127 SQ TYP 15 15 DIMENSIONS: MILLIMETERS www.aerotech.com 11

AGR Series DIMENSIONS AGR Series Rotary Stages AGR MOTOR LENGTH "A" SHAFT INPUT DIAMETER "C" -M1, -M3, -M5, -M7 190 12.7 [0.5] -M2, -M4, -M6, -M8 245.6 12.7 [0.5] -M9 177.1 9.5 [0.375] -M10 187.1 9.5 [0.375] OPTION HEIGHT "B" DEFAULT 90 -SL1 107 -E1, -E2, -E3 108.5 -SL1 + -E1, -E2, -E3 1.5 305 2 17 APERTURE 235 8X M8X1. 12 217 BC 4X 9 THRU ALL 15 TO DEPTH SHOWN 17 4X M6X1.0 9 4X M6X1.0 9 1 340.1 GREASE FITTING 1 187.6 85 TYP 73 4 69.6 SQ 57.9 TYP 14 277 15 A C 4X M5X0.8 10 MOTOR HIDDEN FOR CLARITY CW CCW TABLETOP BC ORIENTATION AT CENTER OF TRAVEL 1. 4X M8X1. 12 B NOTES: 17 NOTE: STEPPER MOTOR OPTION PROTRUDES BELOW MOUNTING SURFACE 0.9 1. CW AND CCW TRAVEL LIMITATIONS APPLY TO -TRXXX LIMITED TRAVEL OPTION ONLY. ORIENTATION OF TABLETOP BC AT CENTER OF TRAVEL IS CONSISTENT FOR ALL CONFIGURATIONS. DIMENSIONS: MILLIMETERS [INCHES] 12 www.aerotech.com

AGR Accessories 4X 6.8 THRU ALL 11.1 SLOT 8 4X M8X1. 12 177.8 175 -MP1 MOUNTING PLATE 117.6 Rotary Stages AGR Series 2 4 340.1 187.6 85.1 202 THRU 15 2 277 305 8X 9 THRU ALL 15 9 EVENLY SPACED ON BC -TT1 OPTION 48X M6X1.0 9 285 8X 9 THRU ALL 15 9 EVENLY SPACED ON BC -TT2 OPTION 48X 1/4-20 UNC 9.5 285 217 BC 217 BC SQ TYP SQ TYP 75 SQ TYP SQ TYP 1 SQ TYP 1 SQ TYP.4 SQ TYP.8 SQ TYP 76.2 SQ TYP 101.6 SQ TYP 127 SQ TYP 152.4 SQ TYP 20 20 DIMENSIONS: MILLIMETERS www.aerotech.com 13

AGR Series ORDERING INFORMATION AGR Series Gear-Driven Rotary Stages AGR Series Rotary Stages Model (Required) AGR AGR75 AGR AGR1 AGR Motor (Optional) Gear-driven rotary stage, mm diameter clear aperture Gear-driven rotary stage, 75 mm diameter clear aperture Gear-driven rotary stage, mm diameter clear aperture Gear-driven rotary stage, 1 mm diameter clear aperture Gear-driven rotary stage, mm diameter clear aperture -M1 BMS35 brushless servomotor and 0-line TTL encoder (AGR, AGR75) BMS60 brushless servomotor and 20-line TTL encoder (AGR, AGR1) BMS280 brushless servomotor and 20-line TTL encoder (AGR) -M2 BMS35 brushless servomotor and 0-line TTL encoder with brake (AGR, AGR75) BMS60 brushless servomotor and 20-line TTL encoder with brake (AGR, AGR1) BMS280 brushless servomotor and 20-line TTL encoder with brake (AGR) -M3 BMS35 brushless servomotor and 0-line 1 Vpp encoder (AGR, AGR75) BMS60 brushless servomotor and 0-line 1 Vpp encoder (AGR, AGR1) BMS280 brushless servomotor and 0-line 1 Vpp encoder (AGR) -M4 BMS35 brushless servomotor and 0-line 1 Vpp encoder with brake (AGR, AGR75) BMS60 brushless servomotor and 0-line 1 Vpp encoder with brake (AGR, AGR1) BMS280 brushless servomotor and 0-line 1 Vpp encoder with brake (AGR) -M5 BM22 brushless servomotor and 0-line TTL encoder (AGR, AGR75) BM75 brushless servomotor and 20-line TTL encoder (AGR, AGR1) BM2 brushless servomotor and 20-line TTL encoder (AGR) -M6 BM22 brushless servomotor and 0-line TTL encoder with brake (AGR, AGR75) BM75 brushless servomotor and 20-line TTL encoder with brake (AGR, AGR1) BM2 brushless servomotor and 20-line TTL encoder with brake (AGR) -M7 SM35 stepper motor (AGR, AGR75) BM75 brushless servomotor and 0-line 1 Vpp encoder (AGR, AGR1) BM2 brushless servomotor and 0-line 1 Vpp encoder (AGR) -M8 SM35 stepper motor with brake (AGR, AGR75) BM75 brushless servomotor and 0-line 1 Vpp encoder with brake (AGR, AGR1) BM2 brushless servomotor and 0-line 1 Vpp encoder with brake (AGR) -M9 SM60 high voltage stepper motor (AGR, AGR1) SM280 high voltage stepper motor (AGR) -M10 SM60 high voltage stepper motor with brake (AGR, AGR1) S M280 high voltage stepper motor with brake (AGR) Motor Location (Required) -ML1 -ML2 Motor Orientation (Optional) Motor located on right side of stage housing, standard (see diagram) Motor located on left side of stage housing (see diagram) -2 Motor orientation 2 (see diagram) -3 Motor orientation 3, standard (see diagram) -4 Motor orientation 4 (see diagram) -5 Motor orientation 5 (see diagram) Travel (Required) -TR015 -TR030 -TR045 -TR060 -TR075 -TR090 Continuous travel (standard) Limited travel, ±7.5 degrees Limited travel, ±15 degrees Limited travel, ±22.5 degrees Limited travel, ±30 degrees Limited travel, ±37.5 degrees Limited travel, ±45 degrees 14 www.aerotech.com

AGR Series ORDERING INFORMATION -TR105 -TR120 -TR135 -TR1 -TR165 -TR180 -TR195 -TR210 -TR2 -TR240 -TR5 -TR270 Limited travel, ±52.5 degrees Limited travel, ±60 degrees Limited travel, ±67.5 degrees Limited travel, ±75 degrees Limited travel, ±82.5 degrees Limited travel, ±90 degrees Limited travel, ±97.5 degrees Limited travel, ±105 degrees Limited travel, ±112.5 degrees Limited travel, ±120 degrees Limited travel, ±127.5 degrees Limited travel, ±135 degrees Note: -TRxxx limited travel options contain an extra 2 degrees of overtravel between the nominal travel and the electrical limit on each side (Ex: -TR270 contains ±135 degrees of nominal travel, with ±137 degrees of travel between electrical limits). Rotary Stages AGR Series Limits (Required) LI1 LI2 Normally-closed, end-of-travel limit switches with 9-pin connector Normally-open, end-of-travel limit switches with 9-pin connector Direct Rotary Feedback (Optional) -E1 Direct, amplified-sine output encoder -E2 Direct, square-wave TTL output encoder, X5 multiplication -E3 Direct, square-wave TTL output encoder, X multiplication Tabletop (Optional) -TT1 -TT2 Mounting Plate (Optional) -MP1 Seals (Optional) -SL1 Metrology (Required) -PL0 -PL1 -PL2 Metric tabletop English tabletop Universal English/metric mounting plate Labyrinth seal No metrology performance plots Metrology, uncalibrated with performance plots Metrology, calibrated (HALAR) with performance plots Integration (Required) Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system. -TAS -TAC Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. www.aerotech.com 15

AGR Series ORDERING INFORMATION AGR Series MOTOR ORIENTATION AGR Series Rotary Stages AGR SERIES MOTOR LOCATION AND ORIENTATION OPTIONS -ML1 (NO MOTOR) -ML1-2 -ML1-3 (STANDARD) -ML1-4 -ML1-5 -ML2 (NO MOTOR) -ML2-2 -ML2-3 -ML2-4 -ML2-5 16 www.aerotech.com

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