ABL10 Series Air Bearing, Linear Motor Stage Designed for high-performance scanning and inspection Active air preload on all air-bearing surfaces Linear encoder feedback provides subnanometer resolution Linear Stages ABL10 Series High stiffness for heavy loads and excellent geometrical performance Travel up to 0 mm Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL10, with its fully active preload, exceptionally high stiffness, and excellent geometric characteristics was designed specifically to meet those demands. Air-Bearing Design for High Dynamic Performance The ABL10 incorporates an active preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading. Proprietary manufacturing techniques result in a stage with unsurpassed geometrical characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications. Linear Motor Drive The driving force behind this stage is Aerotech s BLMC series brushless linear servomotor. Aerotech s long history and experience as a motor manufacturer is reflected in this design. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLMC represents the ultimate combination of power and performance. Zero Maintenance Our totally noncontact air bearing, noncontact linear motor drive, and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL10 experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication only clean, dry gas air bearings are ideal for cleanroom and medical applications. Cable Management We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech s modular design makes cable replacement quick and easy with minimal downtime. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer s machine.
ABL10 Series SPECIFICATIONS Linear Stages ABL10 Series Basic Model ABL105 ABL110 ABL10 T otal Travel mm in) 100 mm 4 in) 00 mm 8 in) Drive System Bus Voltage Continuous Current Feedback Resolution 1) M aximum Travel Speed Maximum Linear Acceleration ) M aximum Load Continuous Stall Force 3,4) 4) P eak Force Overall Accuracy Repeatability S traightness and Flatness P itch/roll/yaw 7) O perating Pressure 8) A ir Consumption A pk A rms Linear Brushless Servomotor BLMC-19-A) Up to 80 VDC Up to 4.00 A Up to.83 A Noncontact Linear Encoder LN or LT) 0.001 µm - 0. µm 0.04 µin - 8 µin) 0.005 µm - 1.0 µm 0. µin - 40 µin) m/s 80 in/s ) g - 0 m/ s 768 in/s ) no-load) 35.0 kg 77. lb) 93.6 N 1.0 lb ) 5) ALAR 5) 54.8 N 1.0 lb) H ALAR ± 0. µm ±8 µin) ± 0. µm ±8 µin) ±0.5 µm ±0 µin) S tandard ± 1.0 µm ±40 µin) ±.0 µm ±80 µin) ±5.0 µm ±00 µin) H ± 0.3 µm ±1 µin) ± 0.3 µm ±1 µin) ±0.5 µm ±0 µin) S tandard ±.0 µm ±80 µin) ± 4.0 µm ±160 µin) ±8.0 µm ±30 µin) ± 0.1 µm ±4 µin) ±0. µm ±8 µin) ± 0.1 µm ±4 µin) ±0. µm ±8 µin) M ± 0.5 µm ±10 µin) ± 0.4 µm ±16 µin) ±0.5 µm ±0 µin) aximum Deviation 0.5 arc se c ± ± 1 arc sec ± arc sec 80 psi 5.5 bar) ±5 psig 0.3 bar) < scf m S tage Mass 14.7 kg 3.4 lb) 16.0 kg 35.3 lb) 18.6 kg 41.0 lb) Moving Mass no load) Material Finish 5.1 kg 11. lb) Aluminum Hard Coating 6 Rockwell Hardness) Notes: 1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements. 3. Thermal limitations of positioning stage with respect to performance may limit continuous force output. 4. Force may be limited by amplifier output. 5. Values with Aerotech controls and HALAR option. 6. Dependent on flatness of stage mounting surface. 7. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier E-stop input is recommended. 8. Air supply must be clean, dry to 0 F dewpoint and filtered to 0.5 µm or better; recommend nitrogen at 99.9% purity. 9. Maximum upper axis length is 00 mm when mounting the ABL10 in an XY configuration. Acceleration vs. Mass ABL10 with BLMC-19-A motor)
ABL10 Series SPECIFICATIONS Basic Model ABL130 ABL140 ABL1 T otal Travel 300 mm 1 in) 400 mm 16 in) 0 mm 0 in) Drive System Bus Voltage Continuous Current Feedback Resolution 1) M aximum Travel Speed Maximum Linear Acceleration ) M aximum Load Continuous Stall Force 3,4) 4) P eak Force Overall Accuracy Repeatability S traightness and Flatness P itch/roll/yaw 7) O perating Pressure 8) A ir Consumption A pk A rms Linear Brushless Servomotor BLMC-19-A) Up to 80 VDC Up to 4.00 A Up to.83 A Noncontact Linear Encoder LN or LT) 0.001 µm - 0. µm 0.04 µin - 8 µin) 0.005 µm - 1.0 µm 0. µin - 40 µin) m/s 80 in/s ) g - 0 m/ s 768 in/s ) no-load) 35.0 kg 77. lb) 93.6 N 1.0 lb ) 5) ALAR 5) 54.8 N 1.0 lb) H ALAR ± 0.5 µm ±0 µin) ± 0.75 µm ±30 µin) ±0.75 µm ±30 µin) S tandard ± 5.0 µm ±00 µin) ± 5.0 µm ±00 µin) ±5.0 µm ±00 µin) H ± 0.5 µm ±0 µin) ± 0.75 µm ±30 µin) ±0.75 µm ±30 µin) S tandard ± 1.0 µm ±480 µin) ± 16.0 µm ±640 µin) ±0.0 µm ±800 µin) ± 0. µm ±8 µin) ±0.3 µm ±1 µin) ± 0. µm ±8 µin) ±0.3 µm ±1 µin) M ± 0.75 µm ±30 µin) ± 1.5 µm ±60 µin) ±.0 µm ±80 µin) aximum Deviation 3 arc se c ± ± 4 arc sec ±5 arc sec 80 psi 5.5 bar) ±5 psig 0.3 bar) < scf m S tage Mass 1.3 kg 47.0 lb) 3.9 kg 5.7 lb) 6.5 kg 58.4 lb) Linear Stages ABL10 Series Moving Mass no load) Material Finish 5.1 kg 11. lb) Aluminum Hard Coating 6 Rockwell Hardness) Notes: 1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements. 3. Thermal limitations of positioning stage with respect to performance may limit continuous force output. 4. Force may be limited by amplifier output. 5. Values with Aerotech controls and HALAR option. 6. Dependent on flatness of stage mounting surface. 7. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier E-stop input is recommended. 8. Air supply must be clean, dry to 0 F dewpoint and filtered to 0.5 µm or better; recommend nitrogen at 99.9% purity. 9. Maximum upper axis length is 00 mm when mounting the ABL10 in an XY configuration. Lsc Cantilevered Load Capability ABL10)
ABL10 Series DIMENSIONS Linear Stages ADDITIONAL CABLE TRAY FOR XY-CMS OPTION M6x1.0 THD. X 9.0 DP. 1 PLACES 5 M5x0.8 THD. X 7.5 DP. 4) PLACES ABL10 Series 1 140 FEEDBACK AND MOTOR POWER CONNECTORS AIR INLET - FITTING FOR 4MM OR 5/3" OD TUBING 1 10 1/ TRAVEL 1/ TRAVEL 85 15 10 80 B C D A 7.1 THRU 1.7 C'BORE AS SHOWN STAGE MOUNTING HOLES E) PLACES DIMENSIONS - MILLIMETERS BASIC MODERAVEL A B C D E ABL105 3 1 - - 4 ABL110 100 400 1 - - 4 ABL10 00 0 1-10 ABL130 300 600 1 300-10 ABL140 400 700 1 300 4 14 ABL1 0 800 1 300 0 14
ABL10 Series ORDERING INFORMATION Ordering Example ABL15 010 -M -10 -NC -LN10AS -SINGLE-CMS Series Travel 005 010 00 030 040 0 Mounting and Grid Pattern Motor Limits Linear Encoder -M -10 -NC -LTnnAS -LTnnX -LNnnAS ABL10 Series Linear Air-Bearing Stage ABL105 mm in) travel linear air-bearing stage with linear motor and limits ABL110 100 mm 4 in) travel linear air-bearing stage with linear motor and limits ABL10 00 mm 8 in) travel linear air-bearing stage with linear motor and limits ABL130 300 mm 1 in) travel linear air-bearing stage with linear motor and limits ABL140 400 mm 16 in) travel linear air-bearing stage with linear motor and limits ABL1 0 mm 0 in) travel linear air-bearing stage with linear motor and limits Options -SINGLE-CMS -XY-CMS Linear Stages ABL10 Series Mounting and Grid Pattern -M Metric dimension mounting pattern and holes Motor -10 Brushless linear motor BLMC-19-A) Limits -NC Normally-closed end of travel limit switches standard) Standard Linear Encoders -LT05AS Linear encoder for ABL105; amplified sine output -LT10AS Linear encoder for ABL110; amplified sine output -LT0AS Linear encoder for ABL10; amplified sine output -LT30AS Linear encoder for ABL130; amplified sine output -LT40AS Linear encoder for ABL140; amplified sine output -LTAS Linear encoder for ABL1; amplified sine output -LT05X Linear encoder for ABL105; 0.1 micron line driver output -LT10X Linear encoder for ABL110; 0.1 micron line driver output -LT0X Linear encoder for ABL10; 0.1 micron line driver output -LT30X Linear encoder for ABL130; 0.1 micron line driver output -LT40X Linear encoder for ABL140; 0.1 micron line driver output -LTX Linear encoder for ABL1; 0.1 micron line driver output
ABL10 Series ORDERING INFORMATION Linear Stages ABL10 Series High-Accuracy Linear Encoders -LN05AS High-accuracy linear encoder for ABL105; amplified sine output -LN10AS High-accuracy linear encoder for ABL110; amplified sine output -LN0AS High-accuracy linear encoder for ABL10; amplified sine output -LN30AS High-accuracy linear encoder for ABL130; amplified sine output -LN40AS High-accuracy linear encoder for ABL140; amplified sine output -LNAS High-accuracy linear encoder for ABL1; amplified sine output Options -SINGLE-CMS Cable management system for single-axis applications -XY-CMS Cable management system for X-Y assembly Accessories to be ordered as separate line item) HALAR High-accuracy system - linear error correction for accuracy and repeatability ALIGNMENT-NPA Non-precision XY assembly ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal ALIGNMENT-PA XY assembly; arc sec orthogonal