DR175/240 Series Mechanical-Bearing Rotary Stage Direct-drive brushless servomotor Cog-free design for outstanding velocity stability Outstanding error motions Direct coupled, high-accuracy rotary encoder ccuracy Repeatablility Wobble EROTECH CERTIFIED Rotary Stages DR175/240 Series High-accuracy angular contact bearings erotech s DR series direct-drive rotary stages provide superior angular positioning and velocity control. pplications range from high-speed laser machining to precision wafer inspection. Superior Mechanical Design Large diameter, matched-set BEC-7 angular contact bearings are used to maximize performance with respect to error motions, moment stiffness and rotating friction. thick-walled, precision-ground shaft further minimizes tilt error motion. The large diameter bearings permit large payloads without compromising performance. Brushless Direct Drive To maximize positioning performance, the DR series utilizes erotech s S-series brushless, slotless motor. This motor has all the advantages of a brushless direct-drive motor no brushes to wear, no gear trains to maintain, and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the DR ideal for applications requiring outstanding contoured motion, smooth scan velocity, or precise incremental steps. With its low inherent inertia and high power output, the DR is capable of speeds and accelerations that are an order of magnitude greater than typical direct-drive devices or worm-driven stages. The low inertia and zero backlash makes the DR the ideal solution for applications requiring frequent directional changes. ccurate Positioning wide range of performance feedback grades is available. Typical line counts range from 3600 to 36000 lines per revolution. When coupled with erotech s MX series resolution multipliers, resolutions can be as fine as 0.036 arc sec. The motor and high-performance rotary encoder are directly coupled to a common shaft. The absence of gear trains and mechanical couplings means no position errors caused by hysteresis, windup, or backlash. s a result, absolute accuracies of ±1 arc sec are attainable. Flexible Configurations Options include large throurgh-hole apertures, over-travel limits, and adjustable hardstops. Larger diameter stages with larger motors are available, as are Z-EL gimbal mounts (see OM360D). erotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete integrated package. 345
DR175/240 Series SPECIFICTIONS DR175/240 Series Rotary Stages DR175/240 Series DR175-9 DR175-15 DR240-22 DR240-59 Table Diameter 175 mm (7 in) 240 mm (9.5 in) Total Travel ±360 Continuous Drive System Direct-Drive Brushless Servomotor Feedback Directly-Coupled Rotary Encoder (RE) Resolution 0.17-63.1 µrad (0.036-13.0 arc sec) -RE10S N/ ±4.8 µrad (±1 arc sec) -RE30S ±24.2 µrad (±5 arc sec) ccuracy (1) ±24.2 µrad (±5 arc sec) -RE50S ±63 µrad (±13 arc sec) Repeatability (2) ±1 arc sec Maximum Rotary Speed (3) 200 rpm Maximum Load Torque Output Inertia (unloaded) xial 30 kg (66 lb) 150 kg (330 lb) Radial 25 kg 90 kg Peak 11.7 N-m (8.6 lb-ft) 21.2 N-m (15.6 lb-ft) 30.0 N-m (22.1 lb-ft) 80.0 N-m (59.0 lb-ft) Continuous 2.8 N-m (2.1 lb-ft) 5.2 N-m (3.8 lb-ft) 7.4 N-m (5.5 lb-ft) 19.9 N-m (14.7 lb-ft) 0.0083 kg-m 2 0.0099 kg-m 2 0.039 kg-m 2 0.056 kg-m 2 0.0061 lb-ft-s 2 0.0073 lb-ft-s 2 0.029 lb-ft-s 2 0.041 lb-ft-s 2 cceleration (Unloaded) 1050 rad/s 2 1575 rad/s 2 577 rad/s 2 1069 rad/s 2 Tilt 24.3 µrad (5 arc sec) 9.7 µrad (2 arc sec) xis Error Motion xial 1.0 µm (40 µin) 0.5 µm (20 µin) Radial (4) 2.0 µm (80 µin) 1.0 µm (40 µin) Nominal Stage Weight 11.0 kg (24.3 lb) 14.0 kg (30.9 lb) 24.0 kg (52.9 lb) 35.0 kg (77.2 lb) Finish Table Stage Hardcoat Black nodize Notes: 1. Listed accuracy specifications require HLR calibration available with erotech controllers. 2. Repeatability may be limited by stage resolution. Resolution will be determined by the encoder option. 3. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution. 4. Radial error motion is measured 50 mm above tabletop and may include components from tilt error motion. High-speed, high-resolution, direct-drive inspection machine includes integral vacuum lines for wafer chuck. xial and Radial Cantilevered Load Capability (DR175) 346
DR175/240 Series DIMENSIONS DR175 M6-1.0 Thd. x 7.0 Dp. [1/4-20 Thd. x.281 Dp.] 16 Places perture (Standard) Ø13 [Ø0.5] Thru. with RE30 Ø18 [Ø0.7] Thru. with RE50 50.0 [2.00] 100.0 [4.00] 150.0 [6.00] Rotary Stages DR175/240 Series Ø7.1 [Ø0.28] Thru. Stage Mounting Holes 3 Places Equally Spaced s Shown on Ø165.0 [Ø6.50] B.C. Ø175.0 [Ø6.89] 35.0 [1.38] M6-1.0 Thd. x 10.0 Dp. 2 Places (Customer Hardstop Mount) 25.0 [0.98] Purge Fitting 1 " NPT Thd. 8 Motor Connector Feedback Connector 15.0 [0.59] 38.0 [1.50] 56.0 [2.20] Dimensions - Millimeters [Inches] Basic Model DR175-9-RE50 175.0 [6.89] DR175-9-RE30 175.0 [6.89] DR175-15-RE50 196.0 [7.72] DR175-15-RE30 196.0 [7.72] xial and Radial Cantilevered Load Capability (DR240-22) xial and Radial Cantilevered Load Capability (DR240-59) 347
DR175/240 Series DIMENSIONS DR175/240 Series Rotary Stages DR240 M6-1.0 Thd. x 9.0 Dp. 1/4-20 Thd. x.375 Dp. 24 Places perture (Standard) Ø50 [Ø1.9] Thru. with RE10 Ø13 [Ø0.5] Thru. with RE30 Ø18 [Ø0.7] Thru. with RE50 50.0 [2.00] 100.0 [4.00] 150.0 [6.00] 200.0 [8.00] 22.7 [0.89] RE10 Option Only Ø7.1 [Ø0.28] Thru. Stage Mounting Holes 3 Places Equally Spaced s Shown on Ø230.0 [ Ø9.06] B.C. Ø240.0 [Ø9.45] 42.0 [1.65] M6-1.0 Thd. x 10.0 Dp. 2 Places (Customer Hardstop Mount) 25.0 [0.98] Purge Fitting 1 " NPT Thd. 8 Motor Connector Feedback Connector 40.0 [1.57] 89.0 [3.50] 15.8 [0.62] Dimensions - Millimeters [Inches] Basic Model DR240-22-RE50 DR240-22-RE30 DR240-22-RE10 DR240-59-RE50 DR240-59-RE30 DR240-59-RE10 348
DR175/240 Series ORDERING INFORMTION Ordering Example DR -240 -M -22 -RE10S -NC Series Table Diameter (mm) 175 240 Mounting and Grid Pattern -M -U -U/RE10S -M/RE10S DR Series Direct-Drive Rotary Stage DR175 175 mm (7 in) diameter direct drive rotary stage DR175 175 mm (7 in) diameter direct drive rotary stage DR240 240 mm (9.5 in) diameter direct drive rotary stage DR240 240 mm (9.5 in) diameter direct drive rotary stage Motor Encoder Options Limits -9-15 -22-59 -RE50S -RE30S -RE10S -NC -NO Rotary Stages DR175/240 Series Mounting and Grid Pattern -M Tabletop with metric-dimension mounting pattern and holes -U Tabletop with English-dimension mounting pattern and holes -U/RE10S Tabletop with English-dimension mounting pattern and holes, for DR240 with RE10S encoder -M/RE10S Tabletop with metric-dimension mounting pattern and holes, for DR240 with RE10S encoder Motor Options -9 9 ft-lb (12 N-m) motor for DR175 (standard) -15 15 ft-lb (21 N-m) motor for DR175-22 22 ft-lb (30 N-m) motor for DR240 (standard) -59 59 ft-lb (80 N-m) motor for DR240 Encoder Options -RE50S -RE30S -RE10S Incremental encoder, 5000 ppr Incremental encoder, 90000 ppr (18000 line with integral X5 multiplier) Incremental encoder, 18000 ppr Incremental encoder, 36000 ppr (DR240 only) Stage Construction Option /VC3 Vacuum preparation of stage to 10-3 torr /VC6 Vacuum preparation of stage to 10-6 torr Limits -NC -NO Normally closed home limit Normally open home limit 349