MPM160 Pressure Sensor Features Ranges: 0kPa~7kPa 700kPa MEMS Technology Gauge SOP or DIP package For non-corrosive gas Pressurize from back side Optional for pin direction Applications For medical fields, such as electronic sphygmomanometer, breathing machine, oxygen generating equipment, patient monitor etc. For automotive electronics fields, such as tire pressure gage, brake booster, power steering and MAP sensor etc. For sports and fitness equipment fields, such massagers, massage chairs, air beds etc. Other fields, such as washing machines, beer/coffee machines, emergency lights, vacuum cleaners, water purifiers, pressure meters, pneumatic components etc. Introduction MPM160 is a piezo-resistive pressure sensor for fields such as medical, automotive electronics etc. The core is a pressure sensing die processed by MEMS technology. The pressure sensing die is composed of a springy diaphragm and four resistors integrated in the diaphragm. Four piezo-resistors form a Wheatstone bridge structure. When the springy diaphragm is pressured, Wheatstone bridge will output linear proportional voltage signal with the pressure on. With standard SOP6 or DIP6 package, MPM160 is easy for users to install by surface mounting or Dual In-line Package. 1
With good repeatability, linearity, stability and sensibility, MPM160 is also easy for users to adjust output, thermal drift and make temperature compensation using operational amplifier or integrated circuit. Electronic Performance Power supply: 15VDC or 3.0mADC Input impedance: 4kΩ~6kΩ Output impedance: 4kΩ~6kΩ Insulation resistor: 100MΩ, 100VDC Overpressure: 0kPa~10kPa 200kPa: 2 times FS 0kPa~500kPa 700kPa: 1.5 times FS Construction Sensing die: silicon Leading wire: gold wire Package housing: PPS Pin: silver plated copper Net weight: around 0.4g Environment Condition Orientation: deviate 90 from any direction, zero change ±0.05%FS Shock: no change at 10gRMS, (20~2000)Hz Impact: 100g, 11ms Media compatibility: Pressure side: gas compatible with silicone, silicone glue and PPS material Reference side: non-conductive and non-corrosive gas compatible with PPS material, silicon, silicone glue or epoxy glue, gold, aluminum and silver. Basic Condition Media: Air Media temp: (25±1) Tel: +86 917 3600739/3600832 Fax:3609977 2
Environment temp.: (25±1) Shock: 0.1g (1m/s 2 ) Max Humidity: (50%±10%) RH Power supply: (5±0.005) VDC Specifications FS output Specifications Min. Typ. Max Unit Range 10,20,40,100,200,500,700 kpa Working temp. -30 100 Storage temp. -40 150 Bridge resistance 4 5 6 kω Zero output -5 10 mv Bridge resistance thermal coefficient Zero thermal coefficient FS thermal coefficient 10kPa 20 35 50 mv 20kPa 30 45 60 mv 40kPa 50 70 90 mv 100kPa 60 90 150 mv 2000 2500 3000 ppm/ C -0.08 0.08 %FS/,constant voltage -0.05 0.05 %FS/,constant current -0.25-0.21-0.17 %FS/,constant voltage -0.05 0.05 %FS/,constant current Non-linearity -0.3 0.3 %FS Hysteresis -0.3 0.3 %FS Note: 1. Testing at basic condition. 2. Powered current:(1±0.001)ma DC at constant current testing 3. Temp. range for Thermal drift: 0 ~70. 3
Outline construction (Unit:mm) SOP Package (Code 1) DIP Package (Code 2) Options for Pin direction in DIP Package: Electric connection 4
Pin 1 2 3 4 5 6 Definition 1 -out +in +out Null -in -out Definition 2 -in +out +in Null -out -in Note: For one same product, users can choose any one of pins definitions according to requests. Order Guide MPM160 Piezo-resistive pressure sensor Range Notes [0~10]kPa 1 [0~20]kPa 1 [0~40]kPa R, F 1, 2 [0~100]kPa 1, 2 [0~200]kPa 1, 2 [0~500]kPa 1, 2 [0~700]kPa 1, 2 Code Package type 1 SOP 2 DIP Code Pin direction R Pin direction is opposite to pressure side direction F Pin direction is the same as pressure side direction MPM160 [0~100]kPa 2 R the whole spec. Notes: If customers have special requirements, please contact us and make notes clearly on the order. 5