Small size flow sensor

Small size flow sensor FSM2 Sensors / flow sensor Refrigerating type dryer Desiccant type dryer High polymer membrane type dryer Air filter Auto. drain / others F.R.L. (Module unit) F.R.L. (Separate) Compact F.R. Precise regulator F.R.L. (Related products) Clean F.R. Electro pneumatic regulator Air booster Speed control valve Silencer Check valve / others Joint / tube Vacuum filter CONTENTS Product introduction 1268 Applications 1270 Safety precautions 1272 Display integrated type/display separate type 1278 FSM series dedicated inline filter FSM2 technical data 1307 Vacuum regulator Suction plate Magnetic spring buffer Mechanical pressure SW Electronic pressure SW Contact / close contact conf. SW Air sensor Pressure SW for coolant Small flow sensor Small flow controller Flow sensor for air Flow sensor for water Total air system Total air system (Gamma) Ending Small Flow sensor 1267

Small flow sensor Line-up to match your every need New models for small flow sensor FSM2 Series Needle valve integrated type The needle valve, which can adjust the flow, has been integrated with the sensor to simplify piping and realize space saving. Stainless steel bodies also available Separate indicator When connected to a sensor, the separate indicator automatically recognizes the flow range, so settings with the display are not required.* Complete wiring easily with the connector connection method. Stainless steel body Resin body 1268 * Only in the default state or when settings are reset. Refer to Explanation of Functions on page 1315 for details.

Functions which pursue the operability of the small flow sensor provide the best selections for various scenes and applications. Clean specifications, Twin display/bi-color display function The P70 (particle prevention) and P80 (oil prohibited) specifications are available as a standard. These models are perfect for semiconductor and liquid crystal manufacturing applications. A main screen and sub screen can be provided with the display integrated type, allowing operability to be improved. The errors can be seen in a glance with the bi-color display. Flow rate unit Panel mounting possible A panel mounting bracket is available. The separate indicator, sensor unit (up to display integrated 200L/min. type), and needle valve integrated type can be mounted onto a panel. Close mounting with one panel opening is possible, allowing man-hours and space to be reduced when using multiple units. Main screen (instantaneous flow rate display) Bi-color display Sub screen (flow direction, etc.) Close mounting possible Bar display function On the separate indicator type, the reference flow rate can be seen in a glance with the flow bar display. Compact even with large flow rate With the 500 and 1000L/min types, the body size has been reduced by 30% compared to conventional models, attaining the highest downsizing in the industry. Downsize and lighten your equipment with this model. 30% compared to conventional unit (for 1000L/min. type) Increased precision Flow bar display or less A precision of ±3%F.S. allows a more accurate flow measurement. High speed response or less The platinum sensor chip manufactured with silicone micromachining realizes a high speed response, and contributes to reducing the tact time. Free mounting position Bidirectional fluid measurement The sensor can be mounted in any direction, top, bottom, left or right. The flow direction can be randomly set for measurement with the display integrated bidirectional type. This increases the freedom of piping installation, and can be used as for detecting reverse flows. Straight piping not required Forward direction Bidirectional Reverse direction The newly proposed rectifying mechanism eliminates the need for straight piping at either the upstream or downstream side. Elbows are OK 1269

Diverse lineup to match your needs Flow range, port size, body material Body material Port size Full scale flow Resin Stainless steel ø4 push-in ø6 push-in ø8 push-in ø10 push-in Aluminum Note 1: Excluding carbon oxide models. Note 2: Excluding argon models and carbon gas models. Compatible fluid Compatible fluid Air, nitrogen Argon Carbon oxide Body material Resin Stainless steel Aluminum Stainless steel Stainless steel Full scale flow Output formats Type Display integrated type Output Analog output 1 point (1-5V or 4-20mA) Switch output 2 points (NPN or PNP) Needle valve integrated type (option) Up to full scale 200 supported (only display integrated type) Resin body Stainless steel body Separate indicator type Analog output 1 point (1-5V or 4-20mA) Separated display can be connected Flow direction Bidirectional type Single-direction type Clean specifications (option) P70 specifications: particle prevention P80 specifications: oil prohibited Flow direction can be selected with button operations (display integrated type) 1270

Applications Air consumption flow control The air consumed by the isolated facility can be seen by monitoring the cumulative pulse output or analog output. Painting air flow control P80 (oil prohibited specifications) are perfect for controlling the flow of painting air. FSM2 is free of siloxane (organic silicone), so the paint quality is stable. Cumulative flow rate Switch output Time Approx. 40ms. (fixed value) The pulse is output at the specified cumulative value. Semiconductor manufacturing system purge gas flow control Control of the purge gas is indispensable for maintaining the performance of a semiconductor manufacturing system. The stainless steel body type is suitable for applications which are susceptible to discharged gases. Errors can be detected by using the switch output. Wind operation This mode turns the switch output ON or OFF at the flow within the set range. Hysteresis operation In this mode, the switch output hysteresis is randomly set to control the ON and OFF settings. Flow Flow Switch output Switch output Switch output Switch output Ionizer flow control The flow rate can be easily adjusted with the needle valve integrated type. The P80 (oil prohibited specifications) are suitable for clean applications. Errors can be detected by using the switch output. Vacuum confirmation Since the flow is detected, there s no need to make adjustments according to pressure fluctuations and incorrect detections are eliminated. Detect clogging of the nozzle or filter, and control pickup mistakes during inclined pickup, etc. Comparison with pressure sensor (at nozzle diameter ø0.3, vacuum pressure 70kPa) Flow sensor Flow difference: 830ml/min Flow rate is clear! Pressures sensor Pressure difference: 2kPa Vacuum Vacuum 1271

Safety precautions Pneumatic components: Warning and Cautions Always read this section before starting use. Design & Selection Working fluid DANGER n Do not use this product for flammable fluids. WARNING n This product cannot be used as a business meter. This product does not comply with Measurement Laws, and cannot be used for commercial business. Use this as an industrial sensor. n Do not use fluids other than the applicable fluid because accuracy cannot be guaranteed. n When using compressed air, use clean air that complies to JIS B 8392-1:2003 Class 1.1.1 to 1.6.2. Compressed air from the compressor contains drainage - water, oil oxide, foreign substances, etc. - so install a filter, air dryer, and oil mist filter on the primary side (upper stream side) of the sensor. The sensor's meshing rectifies flow in the pipe. It does not filter out foreign substances, so provide a filter. <Recommended circuit> WARNING n Corrosive environment Do not use this product in an environment containing corrosive gases such as sulfurous acid. n Ambient temperature, fluid temperature Use ambient temperature/fluid temperature from O to 50 C within specified range. Even if the temperature is within the specified range, do not use this product if the ambient temperature and fluid temperature could suddenly change and cause dew to condense. n Maximum working pressure and specified flow rate range Applications exceeding the maximum working pressure and specified flow rate range may result in faults. Use this product only within the specified range. n Drip-proof environment This product's protective structure is IP40 or equivalent. Do not install it where it could be exposed to water, salt, dust, or cutting chips, or a compressed or decompressed environment. This product cannot be used where the temperature changes sharply or in a highly humid environment where internal damage could be caused by dew condensation. 1272 Source pressure Air dryer Filter Regulator Oil mist filter (Micro alescer) n When using a valve on the primary side of this product, use only an oil-prohibit specification valve. This sensor could malfunction or fail if exposed to splattering grease, oil, etc. Friction powder could be generated depending on the valve so mount a filter to prevent the powder from entering the sensor. n When using the valve with liquified gases such as carbon dioxide, always vaporize the gas. Faults could result if the liquified gas enters this product. n Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. n Depending on the fluid, retaining the fluid for a long time could adversely affect the performance. Do not seal the fluid in the pipe for long periods of time. Working environment Flow sensor FSM Series DANGER n Flammable environment Do not use this product in an explosive gas environment. The structure is not explosionproof, and explosions or fires could occur. Flow unit CAUTION n This product's flow rate is measured at a mass flow unaffected by temperature or pressure. The unit is /min., but this is the display when the mass flow is converted to volumetric flow at 20 C 1 barometric pressure (101 kpa). Withstand pressure CAUTION n Withstanding pressure differs by each series. Selection time care must be taken. Overflow CAUTION n With each series, no problem will occur in the sensor, even in an overflow double the measurement range. If dynamic pressure is applied near the maximum working pressure (when a pressure difference exceeding the maximum working pressure is applied between primary and secondary sides), a problem could occur with the sensor. If dynamic pressure is applied, such as when a workpiece is filled for leakage inspection, provide a bypass circuit or restrictor so that dynamic pressure is not applied to the sensor.

FSM2 Series Use for vacuum confirmation, etc. CAUTION n When this product is used to confirm vacuum, etc., select the flow range based on the working vacuum pressure and vacuum nozzle. Refer to "Methods for calculating theoretic flow" on page 1358 for details. n When this product is used to confirm vacuum, etc., provide an air filter upstream from suction to prevent the entry of foreign matter. n When this product is used to confirm vacuum, etc., consider the atmospheric dew point and this product's ambient temperature, and use under conditions in which dew does not condense in pipes. n When this product is used to confirm vacuum, etc., response speed may be delayed by the capacity of the pipe between the vacuum nozzle and this product. In this case, take measures to reduce piping capacity. n When this product is used for vacuum applications such as air supply, do not bend the tube near the push in joint. If stress is applied to the tube near the push in joint, insert an insert ring into the tube, and connect the tube to the push in joint. Using for leakage inspections n The working pressure range of this product is -0.09 to 1.00MPa. If it is energized in a vacuum state less than -0.09Mpa, the sensor s heat dissipation performance will drop and could degrade the sensor. n When the vacuum confirmation sensor is switched from a pressure sensor (switch) to a flow sensor (switch), sensor output (switch output) logic will be reversed. See the drawing below. Note that the PLC sequence program must be changed or revised. If source pressure or vacuum source is not supplied when device power is turned on, "flow 0" = "sensor output (switch output) on" status is set at the flow sensor (switch). Check that this is not a problem with the PLC sequence program, etc. Suction confirmation Pressure sensor (switch) Flow sensor (switch) ON when higher than setting value ON when lower than setting value Atmospheric pressure side ON ON OFF OFF High vacuum side Flow O side Large flow rate side Installation & Adjustment Piping CAUTION n Always attach the pipes before starting wiring. n Align the fluid flow direction to the direction indicated on the pipe when connecting the pipes. n When installing the sensor on piping, see the torque below so that excessive screw-in torque or load torque is not applied to the connection port. (Reference value) n Check that sealing tape or adhesive does not get inside during piping. * When using for clean specifications, make sure that the sealing material matches the system being used. When winding fluorine resin sealing tape around threads, wind sealing tape once or twice, leaving two to three threads open at the end of the screw. Press tape with a nail tip to stick it onto threads.when using liquid sealing agent, leave one to two threads open from the end, and avoid applying too much. Check that the sealing agent does not get on device threads. Port thread Tightening torque N m M5 1.0 to 1.5 Rc1/8 (G1/8) 3 to 5 Rc1/4 6 to 8 Rc1/2 16 to 18 n Clean out pipe with air blow to remove foreign substances, swarf, etc., before piping. The rectifier or sensor chip could be damaged if a large amount of foreign matter, swarf, etc., occurs. n Attach a wrench to metal sections when tightening pipes so that pressure is not applied to the resin section. n Connect a joint even when using the metal body type with the out side opened. The port filter could come off. n When using a push in joint, accurately insert tube and confirm that it does not become dislocated even when pulled. Cut tube at a right angle with a dedicated cutter before use. n Make sure that the monge solution does not enter the case when inspecting the pipe for leaks. Installation CAUTION n The display integrated type s flow meter uses a liquid crystal display which may be difficult to read depending on the angle. 1273

FSM2 Series n This product can be installed in any direction; top, bottom, left, or right. Horizontal installation (through hole used) Set screw Tighten the set screw with a torque of 0.5 N.m. Bracket installation (bracket used) Port size : Push-in joint ø4ø6ø8ø10 Rc1/8, Rc1/4, M5 Discrete bracket model no. : FSM2-LB1 Tighten the set screw with a torque of 0.5 N.m. Panel mounting (Panel mount) Tighten the set screw with a torque of 0.06N. m. Complete the piping before assembly. If the pipes are connected after assembly, excessive strain will be applied and may damage the product. When using the panel mounting method, make sure that vibration is not applied on the product. When using on a stainless steel body, the vibration will be amplified and could damage the product. Wiring Set screw DANGER Set screw Vertical installation (bottom side female thread used) Set screw n Use power voltage and output within the specified voltage. If voltage exceeding the specified voltage is applied, the sensor could malfunction or be damaged, or electrical shock or fire could occur. Do not use a load exceeding the output rating. Failure to observe this could result in output damage or fire. Installation & Adjustment Set screw Set screw Port size : Rc1/2 Discrete bracket model no. : FSM2-LB2 n Check that stress is not directly applied to cable lead outs or connectors. n Stop the control device and machine devices, and turn the power off before wiring. Starting operation suddenly could result in unpredictable operation and hazards. Conduct an energized test with control devices and machine devices stopped, and set target switch data. Discharge electrostatic accumulated in personnel or tools before and during work. Connect and wire bend-resistant material, such as robot wire material, for movable sections. n Do not use this product at levels exceeding the power voltage range. If voltage exceeding this range is applied or if AC power is applied, the controller could rupture or burn. n Install the product and wiring as far away as possible from sources of noise such as power distribution wires. Provide separate measures for surge applied to the power cable. The display or output could fluctuate. n Do not short-circuit the load. Failure to observe this could result in rupture or burning. n For metal body (stainless steel, aluminum) power supplies, use DC-stabilized power separated from the AC primary side. Connect either the plus or minus side of the power supply to the F.G. A varistor (limit voltage 40 V) is connected between the metal body internal power circuit and metal body to prevent dielectric breakdown of the sensor. Do not conduct a withstand voltage test or insulation resistance test between the internal power circuit and metal body. Disconnect wiring if this testing is required. An excessive potential difference between power and metal body will burn internal parts. After installation, connecting and wiring the metal body, electrical welding of the device or frame, or short-circuit accidents, etc., could cause welding current, excessive high voltage caused by welding, or surge voltage, etc., to run through wiring or ground line connected between such devices, damaging lines or devices. Do any work such as electrical wiring after removing this device and disconnecting all electric wires connected to the F.G. n Connecting load The output impedance of the analog output section is 1KΩ. If the impedance of the connected load is small, output error increases. Check the error of the connected load impedance before using. (The analog output current output type is excluded.) WARNING n Check line color when wiring. Incorrect wiring connections could result in sensor damage, problems, and malfunctions, so check wire color against the instruction manual before wiring. n Check wiring insulation. Check that wires do not contact other circuits and that there are no ground faults or insulation faults across terminals. Overcurrent could flow in and damage the sensor. n Use a DC stabilized power supply, within the specified rating, insulated from the AC power supply. A noninsulated power supply could result in electrical shock. If power is not stabilized, the peak value could be exceeded. This could damage the product or impair accuracy. n Always attach the connector bar after connecting the connector. 1274 Example of calculation FSM2-*V output impedance Ro1KΩ Internal impedance of the load Rx1MΩ Ro Output1 100 RoRx Output error 1KΩ 1 100 Approx. 0.1 1KΩ1MΩ Adjustment CAUTION n If switches are operated when flow is not stable, such as pulsating, operation may be unstable. In this case, provide sufficient margin between the two setting values and avoid setting switches in an unstable area. Confirm that switch operation is stable before use.

FSM2 Series During Use & Maintenance WARNING n Output accuracy is affected by temperature characteristics and heat generated when energized. Provide standby time of five minutes or more after turning power on when using. n This product does not use flow control for four seconds after power is turned ON to complete selfdiagnostics. Provide a control circuit and program that ignore signals for 4 seconds after power is turned ON. CAUTION n This product uses a micro-sensor chip, and must be installed where it will not be subject to dropping, impact or vibration. Handle this product as a precision device during installation and transportation. n If a problem occurs during operation, immediately turn power off, stop use, and contact your dealer. n Keep this product's flow within the rated flow range. n Use this product within the working pressure range. n If the output setting value is changed, control system devices could operate unintentionally. Stop devices before changing settings. n Do not disassemble or modify this product. Doing so could result in faults. n The case is made of resin. Do not use solvent, alcohol or any other cleaning agent to remove contamination, etc., or the resin case could be corroded or damaged. Wipe contaminations with a well wrung rag, etc., after soaked in weakened neutral detergent. n Pay attention to reverse currents caused by disconnected wires and wiring resistance. If other devices, including a flow sensor, are connected to the same power sensor as the flow sensor, and the switch output wire and power cable minus (-) side are short-circuited to check the operation of the control panel s input device, or if the power cable s minus (-) side is disconnected, back current could flow to the flow sensor's switch output circuit and cause damage. Other components Diode to prevent reverse flow Flow sensor Control panel Main circuit Current from other components Disconnection PLC input Test SW or short circuit n Take the following measures to prevent damage caused by reverse current: (1) Avoid centralizing current at the power cable, especially the minus side power cable, and use as thick wire as possible. (2) Limit the number of devices connected to the same power source as the flow sensor. (3) Insert a diode parallel to the flow sensor's output line to prevent current backflow. (4) Insert a diode parallel to the flow sensor power wire's minus (-) side to prevent current backflow. n Pay attention to leading of surge current. When flow sensor power is shared with an inductive load that generates surges, such as a solenoid valve or relay, if the circuit is cut off while the inductive load is functioning, surge current could enter the output circuit and cause damage depending on where the surge absorption element is installed. Flow sensor Main circuit Relay Surge absorbing element (installed later) Surge current Circuit shutdown caused by disconnection or emergency stop Solenoid valve Surge absorbing element (integrated) ON PLC Output of PLC Take countermeasures as followings to prevent damage caused by surge current leading. (1) Separate the power supply for output including the inductive load, such as the solenoid valve and relay, and input, such as the flow controller. (2) If separate power supplies cannot be used, directly install a surge absorption element for all inductive loads. Remember that the surge absorption element connected to the PLC, etc., protects only that device. (3) Connect a surge absorption element to the following places on the power wiring as shown below as a measure against disconnections in unspecific areas. Input components Input components Input components When the devices are connected to a connector, the output circuit could be damaged by the above phenomenon if the connector is disconnected while the power is ON. Turn power OFF before connecting or disconnecting the connector. n Analog output continues even if the flow range is exceeded. With the display integrated type, Hi or Lo will display. With the display separated type, the bar display will flicker. Note that this is outside guaranteed precision. n When using the display integrated type, do not press down on the display section. It could break. n Regularly inspect the product at least once a year or more, and confirm that it is operating correctly. n The sensor chip will degrade when used for a long time and cause the detected flow to vary. Periodically inspect the sensor chip. 1275

FSM2 Series Needle valve integrated type FSM2-*N Series Design & Selection CAUTION n This valve can not be used as a stop valve that has no leakage. Slight leakage is allowed in product specifications. n The flow path in the needle valve is not completely free of dust generation. A final clean filter should be used in circuits where dust generation could be a problem. Installation & Adjustment CAUTION n Do not turn the dial with force when fully opening or closing the dial (0.05N. m or less). Do not hold the lock nut when adjusting the needle as the needle could score or break. CAUTION n Vibration could cause the needle to turn and the flow to change. During Use & Maintenance 1276

FSM2 Series Separated display FSM2-D Series CAUTION CAUTION Design & Selection n The voltage output (1-5V) type sensor is supported. If the current output type or other voltage output type is connected, it will not operate properly. Use the FSM2-AV* when using the FSM2. Installation & Adjustment n Cut the half stop section at the end of the e-con connector wiring before using. Insert the wire to the back of the connector, and securely crimp with pliers, etc. The wire sheath does not need to be removed. Check that the pin No. and wire color are correct before crimping. Incorrect wiring can lead to sensor or separated display damage, faults or malfunction. Insert wire to the back. Crimp with pliers, etc. 2 1 4 3 1 Blue White Black Brown Blue White Black Brown 4-conductor cable (FSM2-C4*) e-con connector Refer to page 1307 for model no. Do not mistake the color order. 1-brown, 2-black, 3-white, 4-blue Match this number to the color. n When attaching or removing the cable, hold the connector instead of the cable. Holding the cable could result in a contact fault, broken wire or short-circuit, etc., could damage the sensor or separated display, or cause malfunctions. n Do not apply a load of 15N or more onto the cable. * The e-con connector is enclosed with the separated display. 1277

Small flow sensor Display integrated type / display separated type FSM2 Series Resin body type (flow range: 500m to 200) Aluminum body type (flow range: 500, 1000) Stainless steel body type (flow range: 500m to 200) Display integrated type (resin/aluminum body type) specifications Descriptions Display integrated type (resin/aluminum body) FSM2-[*1][*2][*3][*4]-[*5][*6]-[*7] Full scale flow 005 010 020 050 100 200 500 101 201 501 102 005 500m 010 1 020 2 050 5 100 10 Flow range * 4 200 20 Note 1 500 50 101 100 201 200 501 500 102 1000 H04 ø4 push-in / resin H06 ø6 push-in / resin Port size / * 5 H08 ø8 push-in / resin body material H10 ø10 push-in / resin A15 Rc1/2 / aluminum Needle valve integrated type Note 11 * 6 N Type of display 4 digits + 4 digits Bi-color LCD Flow display Note 1, Note 2 Integrating functions Note 3 Working conditions Display range * 3 F R 0 to 500 m -500 to 500 m 0 to 1000 m -1000 to 1000 m 0 to 2.00-2.00 to 2.00 0 to 5.00-5.00 to 5.00 0 to 10.00-10.00 to 10.00 0 to 20.0-20.0 to 20.0 0 to 50.0-50.0 to 50.0 0 to 100.0-100.0 to 100.0 0 to 200-200 to 200 0 to 500-500 to 500 0 to 1000-1000 to 1000 Display resolution 1m 0.01 0.1 1 Display range 9999999ml 99999.99l 999999.9l 9999999l Display resolution 1ml 0.01l 0.1l 1l Cumulative pulse output rate 5ml 10ml 0.02l 0.05l 0.1l 0.2l 0.5l 1l 2l 5l 10l Working fluid Note 4 Clean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2), nitrogen gas Max. working pressure 0.7MPa Min. working pressure -0.09MPa Withstanding pressure 1MPa Ambient temperature/humidity 0 to 50 C, 90%RH or less Working fluid temperature 0 to 50 C (with no dew condensation) Guaranteed accuracy range 3 to 100%F.S. Linearity (display/analog output) ±3%F.S. or less (secondary side released to atmosphere, 25 C) Note 12 Pressure characteristics ±5%F.S. or less (-0.09 to 0.7MPa, where secondary side is released to atmosphere) Temperature characteristics ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) Repeatability ±1%F.S. or less Response time Note 5 50ms or less N Output 2 points (NPN open collector output, 50mA or less, voltage drop 2.4V or less) Switch output * 1 P Output 2 points (PNP open collector output, 50mA or less, voltage drop 2.4V or less) V 1 to 5V voltage output 1 point (connected load impedance 50kΩ and over) Analog output * 2 A 4 to 20mA current output 1 point (connected load impedance 0 to 300Ω) V 12 to 24 VDC (10.8 to 26.4V) Power supply voltage Note 6 * 2 A 24VDC (21.6 to 26.4V) Current consumption Note 7 50mA or less Lead wire ø3.7, AWG26 or equivalent 5-conductors (connector connection), insulator outer diameter ø1.0 Functions Flow display, flow display peak hold, switch output, analog output, etc. Installation attitude Horizontal or vertical Straight piping section Not required Protective structure IEC standards IP40 Protective circuit Note 8 Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection EMC directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8 H04 Approx. 50g (approx. 80g with needle valve) H06 Approx. 50g (approx. 80g with needle valve) Weight (main body only) * 5 H08 Approx. 70g (approx. 110g with needle valve) H10 Approx. 75g (approx. 115g with needle valve) A15 Approx. 155g Clean room specifications * 7 P70 Dust generation preventing Note 9 P80 Oil-prohibited Note 10 Precision Output Installation 1278

Display integrated type (stainless steel body type) specifications FSM2 Series Specifications Descriptions Flow range Note 1 Port size / body material * 4 * 5 Display integrated type (stainless steel body) FSM2-[*1][*2][*3][*4]-[*5][*6][*7]-[*8] Full scale flow 005 010 020 050 100 200 500 101 201 005 500m 010 1 020 2 050 5 100 10 200 20 500 50 101 100 201 200 S06 Rc1/8 stainless steel (Not for carbon dioxide) S08 Rc1/4 stainless steel Only air and nitrogen gas M5 stainless steel SM5 (custom order) (Not for carbon dioxide) * 7 Type of display 4 digits + 4 digits Bi-color LCD Needle valve integrated type Note 11 N Flow display Note 1, Note 2 Display range * 3 F R 0 to 500 m -500 to 500 m 0 to 1000 m -1000 to 1000 m 0 to 2.00-2.00 to 2.00 0 to 5.00-5.00 to 5.00 0 to 10.00-10.00 to 10.00 0 to 20.0-20.0 to 20.0 0 to 50.0-50.0 to 50.0 0 to 100.0-100.0 to 100.0 0 to 200-200 to 200 Display resolution 1m 0.01 0.1 1 Display range 9999999ml 99999.99l 999999.9l 9999999l Integrating functions Display resolution 1ml 0.01l 0.1l 1l Note 3 Cumulative pulse output rate 5ml 10ml 0.02l 0.05l 0.1l 0.2l 0.5l 1l 2l Blank Clean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2), nitrogen gas Working fluid * 6 AR Argon Note 4 C2 Carbon dioxide Max. working pressure 1.0MPa Min. working pressure -0.09MPa Withstanding pressure 1.5MPa Ambient temperature/humidity 0 to 50 C, 90%RH or less Working fluid temperature 0 to 50 C (with no dew condensation) Guaranteed accuracy range 3 to 100%F.S. Linearity (display/analog output) ±3%F.S. or less (secondary side released to atmosphere, 25 C) Pressure characteristics ±5%F.S. or less (-0.09 to 0.7MPa, where secondary side is released to atmosphere) Temperature characteristics ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) Repeatability ±1%F.S. or less Response time Note 5 50ms or less N Output 2 points (NPN open collector output, 50mA or less, voltage drop 2.4V or less) Switch output * 1 P Output 2 points (PNP open collector output, 50mA or less, voltage drop 2.4V or less) V 1 to 5V voltage output 1 point (connected load impedance 50kΩ and over) Note 12 Analog output * 2 A 4 to 20mA current output 1 point (connected load impedance 0 to 300Ω) V 12 to 24 VDC (10.8 to 26.4V) Power supply voltage Note 6 * 2 A 24 VDC (21.6 to 26.4V) Current consumption Note 7 50mA or less Lead wire ø3.7, AWG26 or equivalent 5-conductors (connector connection), insulator outer diameter ø1.0 Functions Flow display, flow display peak hold, switch output, analog output, etc. Installation attitude Horizontal or vertical Straight piping section Not required Protective structure IEC standards IP40 Protective circuit Note 8 Power reverse connection protection, switch output reverse connection protection, switch output load short-circuit protection EMC directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8 S06 Approx. 95g (approx. 160g with needle valve) Weight (main body only) * 5 S08 Approx. 115g (approx. 200g with needle valve) SM5 Approx. 140g Clean room specifications * 8 P70 Dust generation preventing Note 9 P80 Oil-prohibited Note 10 Working conditions Precision Output Installation Note 1: Converted to volumetric flow at 20 C 1 barometric pressure (101 kpa). Note 2: The flow display is rounded off at approx. ±1%F.S. or less(forced zero). Note 3: The cumulative flow is a calculated (reference value). It is reset when the power is turned OFF. Note 4: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. When using compressed air, use clean air that complies to JIS B 8392-1: 2003 Class 1.1.1 to 1.6.2. Compressed air fed from a compressor contains drainage (water, oxidized oil, debris, etc.). To maintain the functions of this product, attach a filter to the primary side (upstream) of the product, an air dryer (minimum pressure dew point 10 C or less), and an oil mist filter (maximum coil concentration 0.1mg/m 3 ). <Recommended circuit> Oil mist filter Filter (Micro alescer) <Recommended component> Air filter: F Series Oil mist filter: M Series Pneumatics pressure source Air dryer Regulator FSM2 Series Note 5: Response time can be set in seven steps from 50ms. or less to approx. 1.5s. Note 6: The power voltage specifications differ for the voltage output type and current output type. Note 7: Current for when 24VDC is connected, and no load is connected. The current consumption will vary depending on how the load is connected. Note 8: This product s protection circuit is effective only for specific mis-connections and a load short-circuit. It does not provide protection against various mis-connections. Note 9: <P70> Particle prevention (product surface is decreased and cleaned before packaging. Heat sealed into anti-static bag in clean bench (Class 1000 or more). Note 10: <P80> Oil-prohibited (In addition to P70 specifications, wetted sections are degreased and washed. Refer to the Internal structure drawing and parts list for details on the wetted section members.) Note 11: Do not use this product as a stop valve which requires zero leakage. The product specifications are designed to tolerate a slight leak. Note 12: The output impedance of the analog output section is 1KΩ. If the impedance of the connected load is small, output error increases. Check error with the impedance of the connected load before using. 1279

FSM2 Series Display separate type (resin/aluminum body type) specifications Descriptions Display separate type(resin/aluminum body) FSM2-A[*1][*2][*3]-[*4]-[*5] Full scale flow 005 010 020 050 100 200 500 101 201 501 102 005 500m 010 1 020 2 050 5 100 10 Flow range * 3 200 20 Note 1 500 50 /min. 101 100 201 200 501 500 102 1000 H04 ø4 push-in / resin H06 ø6 push-in / resin Port size / * 4 H08 ø8 push-in / resin body material H10 ø10 push-in / resin A15 Rc1/2 / aluminum F Single-direction Flow direction * 2 R Bi-directional Working fluid Note 2 Clean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2), nitrogen gas Max. working pressure 0.7MPa Min. working pressure -0.09MPa Withstanding pressure 1MPa Ambient temperature/humidity 0 to 50 C, 90%RH or less Working fluid temperature 0 to 50 C (with no dew condensation) Guaranteed accuracy range 3 to 100%F.S. Linearity (analog output) ±3%F.S. or less (secondary side released to atmosphere, 25 C) Pressure characteristics ±5%F.S. or less (-0.09 to 0.7MPa, where secondary side is released to atmosphere) Temperature characteristics ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) Repeatability ±1%F.S. or less Response time 50ms or less Type of display Flow bar display V 1 to 5V voltage output 1 point (connected load impedance 50kΩ and over) Note 2 Analog output * 1 A 4 to 20mA current output 1 point (connected load impedance 0 to 300Ω) V 12 to 24 VDC (10.8 to 26.4V) Power supply voltage Note 3 * 1 A 24VDC (21.6 to 26.4V) Current consumption Note 4 50mA or less Lead wire ø3.7, AWG26 or equivalent 4-conductors (connector connection), insulator outer diameter ø1.0 Functions Analog output, flow bar display, error display Installation attitude Horizontal or vertical Straight piping section Not required Protective structure IEC standards IP40 Protective circuit Note 5 Power supply reverse connection protection EMC directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8 H04 Approx. 40g H06 Approx. 40g Weight (main body only) * 4 H08 Approx. 60g H10 Approx. 65g A15 Approx. 145g P70 Dust generation preventing Note 6 Clean room specifications * 5 P80 Oil-prohibited Note 7 Working conditions Precision Output Installation 1280

Display separate type (stainless steel body type) specifications FSM2 Series Specifications Descriptions Flow range Note 1 Port size / body material * 3 * 4 Display separate type(stainless steel body) FSM2-A[*1][*2][*3]-[*4][*5]-[*6] Full scale flow 005 010 020 050 100 200 500 101 201 005 500m 010 1 020 2 050 5 100 10 200 20 500 50 101 100 201 200 S06 Rc1/8 stainless steel (Not for carbon dioxide) S08 Rc1/4 stainless steel Only air and nitrogen gas M5 stainless steel SM5 (custom order) F Flow direction * 2 R Working conditions Precision Output Installation (Not for carbon dioxide) Single-direction Bi-directional Clean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2), nitrogen gas Argon Carbon dioxide 1.0MPa -0.09MPa 1.5MPa 0 to 50 C, 90%RH or less 0 to 50 C (with no dew condensation) 3 to 100%F.S. ±3%F.S. or less (secondary side released to atmosphere, 25 C) ±5%F.S. or less (-0.09 to 0.7MPa, where secondary side is released to atmosphere) ±0.2%F.S./ C or less (15 to 35 C, where 25 C is reference) ±1%F.S. or less 50ms or less Flow bar display Blank Working fluid * 5 AR Note 2 C2 Max. working pressure Min. working pressure Withstanding pressure Ambient temperature/humidity Working fluid temperature Guaranteed accuracy range Linearity (analog output) Pressure characteristics Temperature characteristics Repeatability Response time Type of display V 1 to 5V voltage output 1 point (connected load impedance 50kΩ and over) Note 8 Analog output * 1 A 4 to 20mA current output 1 point (connected load impedance 0 to 300Ω) V 12 to 24 VDC (10.8 to 26.4V) Power supply voltage Note 3 * 1 A 24 VDC (21.6 to 26.4V) Current consumption Note 4 50mA or less Lead wire ø3.7, AWG26 or equivalent 4-conductors (connector connection), insulator outer diameter ø1.0 Functions Analog output, flow bar display, error display Installation attitude Horizontal or vertical Straight piping section Not required Protective structure IEC standards IP40 Protective circuit Note 5 Power supply reverse connection protection EMC directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8 S06 Approx. 85g Weight (main body only) * 4 S08 Approx. 105g SM5 Approx. 130g Clean room specifications * 6 P70 Dust generation preventing Note 6 P80 Oil-prohibited Note 7 Note 1: Converted to volumetric flow at 20 C 1 barometric pressure (101 kpa). Note 2: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. When using compressed air, use clean air that complies to JIS B 8392-1: 2003 Class 1.1.1 to 1.6.2. Compressed air fed from a compressor contains drainage (water, oxidized oil, debris, etc.). To maintain the functions of this product, attach a filter to the primary side (upstream) of the product, an air dryer (minimum pressure dew point 10 C or less), and an oil mist filter (maximum coil concentration 0.1mg/m 3 ). <Recommended circuit> Oil mist filter Filter (Micro alescer) <Recommended component> Pneumatics pressure source Air dryer Regulator FSM2 Series Air filter: F Series Oil mist filter: M Series Note 3: The power voltage specifications differ for the voltage output type and current output type. Note 4: Current for when 24 VDC is connected, and no load is connected. The current consumption will vary depending on how the load is connected. Note 5: This product s protection circuit is effective only for specific mis-connections and a load short-circuit. It does not provide protection against various mis-connections. Note 6: <P70> Particle prevention (product surface is decreased and cleaned before packaging. Heat sealed into anti-static bag in clean bench (Class 1000 or more). Note 7: <P80> Oil-prohibited (In addition to P70 specifications, wetted sections are degreased and washed. Refer to the Internal structure drawing and parts list for details on the wetted section members.) Note 8: The output impedance of the analog putput section is 1 kω. If the impedance of the connected load is small, output error increases. Check error with the impedance of the connected load before using. 1281

FSM2 Series Separate indicator specifications Descriptions Separate indicator FSM2-D-[*1][*2]-*-[*3] ml 5,10,50,100,500 Settable flow range Note 1 1,2,4,5,10,12,20,25,32,50,100, l 200, 500, 1000, 1500 Ambient temperature/humidity 0 to 50 C Type of display 4 digits + 4 digits Bi-color LCD Input voltage 1 to 5V N Output 2 points (NPNopen collector output, 50mA or less, voltage drop 2.4V or less) Switch output * 1 P Output 2 points (PNPopen collector output, 50mA or less, voltage drop 2.4V or less) V 1 to 5V voltage output 1 point (connected load impedance 50kΩ and over) Note 6 Analog output * 2 A 4 to 20mA current output 1 point (connected load impedance 0 to 300Ω) V 12 to 24 VDC (10.8 to 26.4V) Power voltage * 2 A 24 VDC (21.6 to 26.4V) Current consumption Note 2 40mA or less (at 24VDC, with no load connected) Lead wire ø3.7, AWG26 or equivalent 5-conductors (connector connection), insulator outer diameter ø1.0 Functions Flow display, flow display peak hold, switch output, analog output, etc. Protective structure IEC standards IP40 Protective circuit Note 3 Power supply reverse connection protection EMC directive EN55011, EN61000-6-2, EN61000-4-2/3/4/6/8 Accessory One sensor connection connector (e-con), applicable cable AWG24 to 26, insulator outer diameter ø1.0 to 1.2 Weight (main body only) Approx. 40g Clean room specifications Note 4 * 3 P70 Dust generation preventing Output Note 1: The flow range, flow direction and gas type are automatically recognized only when the FSM2 display separated type is connected. (Default state) The FSM-H Series, SFM-V Series and WFK3000 Series flow ranges are supported in addition to the FSM2 Series, but automatic recognition is supported only with the FSM2 Series. Always set the product s flow range, flow direction and gas type before starting use. The connectable flow ranges are shown in Display for each flow range below. When the sensor section is changed, the previous flow range settings, etc., will still be recorded. Always reset the settings before using. Note 2: Current for when 24 VDC is connected, and no load is connected. The current consumption will vary depending on how the load is connected. Note 3: This product s protection circuit is effective only for specific mis-connections and a load short-circuit. It does not provide protection against various mis-connections. Note 4: <P70> Particle prevention (product surface is decreased and cleaned before packaging. Heat sealed into anti-static bag in clean bench (Class 1000 or more). Note 5: When connecting to the FSM-V Series or WFK3000 Series, the cable size is different so the separate compatible sensor connection connector (e-con) will be required. Contact the CKD Sales Office or dealer for more information. The enclosed sensor connection connector (e-con) can be used with the FSM Series and FSM-H Series. Note 6: The output impedance of the analog output section is 1KΩ. If the impedance of the connected load is small, output error increases. Check error with the impedance of the connected load before using. Display for each flow range Flow display Display range Singledirection Bidirectional 0 to 500 m -500 to 500 m 0 to 1000 m -1000 to 1000 m 0 to 2.00-2 to 2.00 0 to 4.00-0 to 5.00-5 to 5.00 0 to 10.00-10 to 10.00 0 to 12.0-0 to 20.0-20 to 20.0 0 to 25.0 0 to 32.0 - - 0 to 50.0-50 to 50.0 0 to 100.0-100 to 100.0 0 to 200-200 to 200 0 to 500-500 to 500 0 to 1000-1000 to 1000 0 to 1.50 m 3 /min. -1.50 to 1.50 m 3 /min. 0 to 5.00 m -5.00 to 5.00 m 0 to 10.00 m -10 to 10.00 m 0 to 50.0 m -50 to 50.0 m 0 to 100.0 m -100 to 100.0 m Display resolution 1m 0.01 0.1 1 0.01m 3 /min. 0.01m 0.1m Display range 9999999ml 99999.99l 999999.9l 9999999l 99999.99m 3 99999.99ml 999999.9ml Display resolution 1ml 0.01l 0.1l 1l 0.01m 3 0.01ml 0.1ml Cumulative pulse output rate 5ml 10ml 0.02l 0.04l 0.05l 0.1l 0.12l 0.2l 0.25l 0.32l 0.5l 1l 2l 5l 10l 15l 0.05ml 0.1ml 0.5ml 1ml * The voltage output (1-5V) type sensor is supported. If the current output type or other voltage output type is connected, it will not operate properly. Integrating functions 1282

MEMO 1283

FSM2 Series How to order Display integrated type, display separated type, needle valve integrated type FSM2 A V R 005 S06 AR 1 B K N P70 A Output type B Analog output type Note 2 C Flow direction D Flow range * Refer to the table on the next page for the flow range, port size (body material), and gas type combinations. E Port size (Body material) Note 3 <Example of model number> F Gas type FSM2-NVF005-S06AR1BKN-P70 Model: small size flow sensor FSM2 A Output type : Display integrated type (NPN) B Analog output type : Voltage output (1-5V) G Cable C Flow direction : Single-direction D Flow range : 500m E Port size (body material) : Rc1/8(stainless steel) F Gas type G Cable : Argon : 1m H Bracket H Bracket : With bracket I Traceability : With company certification J With needle valve : With needle valve I Traceability K Clean room specifications : Dust generation preventing Note on model no. selection Note 1: For the item "A" output type A, the H panel mounting option P cannot be selected. The separated display is not enclosed with the item "A"output type A. Note 2: When using the FSM2-D for the separated display with the display separated type, select V. Note 3: When the item "E" port size A15, the H panel mounting option P cannot be selected. J With needle valve K Clean room specifications Symbol Descriptions A Output type A Note 1 Display separated type (one analog output point only) (Setting not valid for type with needle valve) N Display integrated type (switch output (NPN)2 points, analog output 1 point) P Display integrated type (switch output (PNP)2 points, analog output 1 point) B Analog output type V Voltage output (1-5V) A Current output (4-20mA) C Flow direction F Single-direction R Bi-directional (Setting not valid for type with needle valve) D Flow range (Full scale flow) 005 500 m 010 1 020 2 050 5 100 10 200 20 500 50 101 100 201 200 501 500 (Setting not valid for type with needle valve) 102 1000 (Setting not valid for type with needle valve) E Port size (body material) H04 Push-in ø4 (resin) H06 Push-in ø6(resin) H08 Push-in ø8 (resin) H10 Push-in ø10 (resin) S06 Rc1/8 (stainless steel) S08 Rc1/4 (stainless steel) A15 Rc1/2(aluminum) (Setting not valid for type with needle valve) SM5 M5 (stainless steel) (custom order) (Setting not valid for type with needle valve) F Gas type Blank Air and nitrogen gas AR Argon C2 Carbon dioxide G Cable Blank None 1 1m 3 3m H Bracket Blank None B With bracket P Note 1 With panel mounting option I Traceability Blank None T K With company certification With treaceability certificate, system diagram and inspection results J With needle valve Blank None N Needle valve integrated type K Clean room specifications Blank None P70 Dust generation preventing P80 Oil-prohibited 1284

Flow range, port size (body material), and gas type combinations D Flow range Port size and clean specification combinations J Clean room specifications E Port ;size (body material) H04 H06 H08 H10 S06 S08 A15 SM5 005 010 020 050 100 200 500 101 201 501 102 E Port size (body material) H04 H06 H08 H10 S06 S08 A15 SM5 P70 P80 FSM2 Series How to order F Gas type : Air and nitrogen gas : Argon : Carbon dioxide : Not available J With needle valve : Needle valve integrated type : Available : Not available Discrete option model no. FSM2 LB1 P70 Symbol Descriptions Symbol Descriptions A Option B Clean room specifications A Option LB1 Bracket (ø4,ø6,ø8,ø10,rc1/8,rc1/4,m5) Blank None B Clean room specifications LB2 Bracket (Rc 1/2) P70 Dust generation preventing KHS Panel mounting kit (for display integrated type, for separated display) KHS-N Panel mounting kit set (for needle valve integrated type) C51 5-core cable 1m (for display integrated type, for separated display) C53 5-core cable 3m (for display integrated type, for separated display) C41 4-core cable 1m (for display separated type) C43 4-core cable 3m (for display separated type) * The panel mounting kit cannot be mounted on the FSM2-*-A15* type. Separate indicator FSM2 D N V 3 P P70 A Output type B Analog output type C Cable D Bracket E Clean room specifications Discrete option model no. FSM2 KHS P70 A Option B Clean room specifications Symbol Descriptions A Output type N Switch output (NPN)2 points, analog output 1 point P Switch output (PNP)2 points, analog output 1 point B Analog output type V Voltage output (1-5V) A Current output (4-20mA) C Cable Blank None 1 1m 3 3m D Bracket Blank None P With panel mounting option Symbol Descriptions A Option KHS Panel mounting kit set C51 5-core cable 1m (for display integrated type, for separated display) C53 5-core cable 3m (for display integrated type, for separated display) EC Sensor connection connector (e-con) 5 pc. set B Clean room specifications Blank None P70 Dust generation preventing E Clean room specifications Blank None P70 Dust generation preventing The voltage output (1-5V) type sensor is supported. If the current output type or other voltage output type is connected, it will CAUTION not operate properly. Use the FSM2-AV* when using the FSM2. 1285

FSM2 Series Internal structure and parts list Display integrated type resin body port size ø6 push-in 1 2 3 14 4 13 5 12 6 11 10 9 8 7 Main parts list * The part materials are subject to change without notice. No. Parts name Material No. Parts name Material 1 Liquid crystal cover Acryl resin 8 Resin body ( ) Polyamide resin 2 Liquid crystal - 9 Sensor chip ( ) Semiconductor chip 3 Switch EPDM 10 Rectification plate( ) Stainless steel 4 Substrate spacer Polycarbonate resin 11 Port filter( ) Stainless steel 5 Module holder Polyamide resin 12 Sensor circuit board ( ) Alumina 6 Push-in joint - 13 Electron circuit board - 7 Sensor gasket ( ) Fluoro rubber 14 Case ABS resin ( ) P80 specification washed part Display separate type stainless steel body port size Rc1/4 1 2 14 3 4 13 5 12 6 11 10 9 8 7 Main parts list * The part materials are subject to change without notice. No. Parts name Material No. Parts name Material 1 Front seat PET film 8 Spacer( ) Stainless steel 2 Case ABS resin 9 Port filter ( ) Stainless steel 3 Electron circuit board - 10 Rectification plate( ) Stainless steel 4 Module holder Polyamide resin 11 Sensor chip ( ) Semiconductor chip 5 C ring Stainless steel( ) 12 Stainless steel body( ) Stainless steel 6 O-ring holder Stainless steel( ) 13 Sensor gasket ( ) Fluoro rubber 7 O ring Fluoro rubber ( ) 14 Sensor circuit board ( ) Alumina 1286 ( ) P80 specification washed part

Internal structure and parts list FSM2 Series Internal structure and parts list Display separate type aluminum body port size Rc1/2 1 2 14 3 4 13 5 12 6 11 10 9 8 7 Main parts list * The part materials are subject to change without notice. No. Parts name Material No. Parts name Material 1 Front seat PET film 8 Spacer( ) Aluminum 2 Case ABS resin 9 Port filter ( ) Stainless steel 3 Electron circuit board - 10 Rectification plate( ) Stainless steel 4 Module holder Polyamide resin 11 Sensor chip ( ) Semiconductor chip 5 C ring ( ) Stainless steel 12 Aluminum body( ) Aluminum 6 O-ring holder Stainless steel 13 Sensor gasket ( ) Fluoro rubber 7 O ring( ) Fluoro rubber 14 Sensor circuit board ( ) Alumina ( ) P80 specification washed part 1287

FSM2 Series Internal structure and parts list Sensor with needle valve (resin body) FSM2-*-H*N Sensor section Note 1 1 2 3 4 5 6 7 8 15 14 13 12 11 10 9 Main parts list No. Parts name Material No. Parts name Material 1 Knob PBT 9 Joint fixing pin Stainless steel 2 lock nut Brass/nickeling 10 Needle valve body Polyamide resin 3 Needle guide Brass/nickeling 11 Port filter Stainless steel 4 Needle Brass/nickeling Note 2 12 O ring Fluoro rubber 5 Fixing pin Stainless steel 13 Orifice Brass/nickeling Note 3 6 O ring Fluorine rubber (fluorine resin coating) 14 Joint fixing pin Stainless steel 7 O ring Fluorine rubber (fluorine resin coating) 15 O ring Fluorine rubber (fluorine resin coating) 8 Cartridge joint - Note 1: Refer to page 1286 for details on the sensor s main components. Note 2: The needle is stainless steel for FSM2-*005/010/020. Note 3: The orifice is PTFE for the FSM2-*005/010/020. * The part materials are subject to change without notice. Sensor with needle valve (stainless steel body) FSM2-*-S*N Sensor section Note 1 1 2 3 4 5 6 7 13 12 11 10 9 8 Main parts list * The part materials are subject to change without notice. No. Parts name Material No. Parts name Material 1 Knob PBT 8 Needle valve body Stainless steel 2 lock nut Brass/nickeling 9 Port filter Stainless steel 3 Needle guide Stainless steel 10 O ring Fluoro rubber 4 Needle Stainless steel 11 Orifice PTFE 5 Fixing pin Stainless steel 12 Spring pin Stainless steel 6 O ring Fluorine rubber (fluorine resin coating) 13 O ring Fluorine rubber (fluorine resin coating) 7 O ring Fluorine rubber (fluorine resin coating) Note 1: Refer to page 1286 for details on the sensor s main components. 1288

Internal structure and parts list FSM2 Series Internal structure and parts list Separate indicator FSM2-D-* 1 2 3 7 4 6 5 Main parts list * The part materials are subject to change without notice. No. Parts name Material No. Parts name Material 1 Liquid crystal cover Acryl resin 5 Rear side guard Polyamide resin 2 Liquid crystal - 6 Electron circuit board - 3 Switch EPDM 7 Case ABS resin 4 Substrate spacer Polycarbonate resin 1289

FSM2 Series Dimensions (display integrated type) Display integrated type, port size: push-in ø4, ø6 FSM2-N/P*-H04/H06* (full scale flow: 0.5, 1, 2, 5, 10, 20, 50 ) 15 55 8.5 3.6 37 1.5 17 ø4 or ø6 Push-in joint 2-ø3.4 penetrating 27 (A) 9.5 (24.2) 2-M3 depth 5 15.5 Model no. Joint (A) dimensions FSM2-N/P*-H04* Push-in ø4 64 FSM2-N/P*-H06* Push-in ø6 65 Display integrated type, port size: push-in ø8, ø10 FSM2-N/P*-H08/H10* (full scale flow: 50, 100, 200 ) 15 55 13 (30.2) 3.6 43 1.5 17 ø8 or ø10 Push-in joint 2-ø3.4 penetrating 27 (A) 2-M3 depth 5 15.5 9.5 Model no. Joint (A) dimensions FSM2-N/P*-H08* Push-in ø8 70.6 FSM2-N/P*-H10* Push-in ø10 82.1 1290

Dimensions (display integrated type) Display integrated type, port size: Rc1/8, M5 FSM2-N/P*-S06/SM5*(full scale flow: 0.5, 1, 2, 5, 10, 20, 50 ) FSM2 Series Dimensions 15 55 8.5 (24.2) 3.6 37 1.5 17 2-ø3.4 penetrating 27 Rc1/8 or M5 9.5 2-M3 depth 5 15.5 Display integrated type, port size: Rc1/4 FSM2-N/P*-S08*(full scale flow: 50, 100, 200 ) 2-ø3.4 penetrating Rc1/4 9.5 13 (30.2) 3.6 43 1.5 17 15 55 27 2-M3 depth 5 15.5 1291

FSM2 Series Dimensions (display integrated type) Display integrated type, port size: Rc1/2 FSM2-N/P*-A15*(full scale flow: 500, 1000 ) 80 2-M3 depth 5 13 15 (37) 30 50 1.5 30 Rc1/2 30 1292

Dimensions (display separate type) Display separate type, port size: push-in ø4, ø6 FSM2-A*-H04/H06*(full scale flow: 0.5, 1, 2, 5, 10, 20, 50 ) FSM2 Series Dimensions 8.5 (24.2) 17 15 55 3.6 29 ø4 or ø6 Push-in joint 2-ø3.4 penetrating 27 (A) 2-M3 depth 5 15.5 9.5 Model no. Joint (A) dimensions FSM2-A*-H04* Push-in ø4 64 FSM2-A*-H06* Push-in ø6 65 Display separate type, port size: push-in ø8, ø10 FSM2-A*-H08/H10*(full scale flow: 50, 100, 200 ) 13 (30.2) 3.6 35 17 15 55 ø8 or ø10 Push-in joint 2-ø3.4 penetrating 27 (A) 2-M3 depth 5 15.5 9.5 Model no. Joint (A) dimensions FSM2-A*-H08* Push-in ø8 70.6 FSM2-A*-H10* Push-in ø15 82.1 1293

FSM2 Series Dimensions (display separate type) Display separate type, port size: Rc1/8, M5 FSM2-A*-S06/SM5*(full scale flow: 0.5, 1, 2, 5, 10, 20, 50) 15 55 8.5 (24.2) 3.6 29 17 2-ø3.4 penetrating 27 Rc1/8 or M5 2-M3 depth 5 15.5 Display separate type, port size: Rc1/4 FSM2-A*-S08*(full scale flow: 50, 100, 200 ) Rc1/4 9.5 13 (30.2) 3.6 35 17 9.5 15 55 2-ø3.4 penetrating 27 2-M3 depth 5 15.5 1294

Dimensions (display separate type) Display separate type, port size: Rc1/2 FSM2-A*-A15*(full scale flow: 500, 1000) FSM2 Series Dimensions Rc1/2 (37) 15 2-M3 depth 5 13 30 30 80 42 30 1295

FSM2 Series Dimensions (display integrated type, needle valve integrated type) Display integrated type, port size: push-in ø4, ø6 FSM2-N/P*-H04/H06*N (full scale flow: 0.5, 1, 2, 5, 10, 20, 50) (24.2) 8.5 17 37 (10.5 to 19) ø4 or ø6 Push-in joint 2-ø3.4 penetrating 9.5 17 15 70 27.5 8 27 55 80 (A) 2-M3 depth 5 15.5 Model no. Joint (A) dimensions FSM2-N/P*-H04* Push-in ø4 89 FSM2-N/P*-H06* Push-in ø6 90 Display integrated type, port size: push-in ø8, ø10 FSM2-N/P*-H08/H10*N (full scale flow: 50, 100, 200) (30.2) 23 43 (10.5 to 19) ø8 or ø10 Push-in joint 2-ø3.4 penetrating 9.5 13 17 15 70 27.5 8 27 55 86 (A) 2-M3 depth 5 15.5 Model no. Joint (A) dimensions FSM2-N/P*-H08* Push-in ø8 101.6 FSM2-N/P*-H10* Push-in ø10 113.1 1296

Dimensions (display integrated type, needle valve integrated type) FSM2 Series Dimensions Display integrated type, port size: Rc1/8 FSM2-N/P*-S06*N (full scale flow: 0.5, 1, 2, 5, 10, 20, 50) Rc1/8 2-ø3.4 penetrating 9.5 (24.2) 8.5 17 37 17 15 27.5 70 8 (10.5 to 19) 27 55 80 2-M3 depth 5 15.5 Display integrated type, port size: Rc1/4 FSM2-N/P*-S08/*N (full scale flow: 50, 100, 200) 2-ø3.4 penetrating 9.5 13 (30.2) 23 43 17 15 27.5 70 8 (10.5 to 19) Rc1/4 27 55 86 2-M3 depth 5 15.5 1297

FSM2 Series Dimensions with options (B: with bracket) Display integrated type, port size: push-in ø4, ø6, Rc1/8, M5 FSM2-N/P*-H04/H06/S06/SM5*B (full scale flow: 0.5, 1, 2, 5, 10, 20, 50) 30 R1.75 6 1 13.5 5 8.6 (29.2) 42 27 23 17 3.5 1.5 14.5 18.5 27 Display integrated type, port size: push-in ø8, ø10, Rc1/4 FSM2-N/P*-H08/H10/S08*B (full scale flow: 50, 100, 200) 30 R1.75 6 17 27 23 3.5 14.5 18.5 15 55 1 5 8.6 18 (35.2) 48 1.5 27 1298

Dimensions with options (B: with bracket) Display integrated type, port size: Rc1/2 FSM2-N/P*-A15*B (full scale flow: 500, 1000) FSM2 Series Dimensions with options 65 R1.75 6 30 30 40 50 80 5 1 20 (42) 35 1.5 55 25 20 Display separate type, port size: push-in ø4,ø6, Rc1/8, M5 FSM2-A*-H04/H06/S06/SM5*B (full scale flow: 0.5, 1, 2, 5, 10, 20, 50) 30 R1.75 6 (29.2) 17 3.5 27 23 14.5 18.5 15 55 1 13.5 5 8.6 34 27 1299

FSM2 Series Dimensions with options (B: with bracket) Display separate type, port size: push-in ø8, ø10, Rc1/4 FSM2-A*-H08/H10/S08*B (full scale flow: 50, 100, 200) 30 R1.75 6 17 27 23 3.5 14.5 18.5 15 55 1 5 8.6 18 (35.2) 40 27 Display separate type, port size: Rc1/2 FSM2-A*-A15*B (full scale flow: 500, 1000) 65 R1.75 6 30 5 1 20 (42) 35 47 30 40 50 25 20 80 1300

Dimensions with options (B: with bracket) FSM2 Series Dimensions with options Needle valve integrated type, port size: push-in ø4, ø6. Rc1/8 FSM2-N/P*-H04/H06/S06*BN (full scale flow: 0.5, 1, 2, 5, 10, 20, 50) R1.75 6 30 3.5 42 (29.2) 13.5 5 1.5 1 17 27 23 14.5 18.5 27 8.6 30 Needle valve integrated type, port size: push-in ø8, ø10, Rc1/4 FSM2-N/P*-H08/H10/S08*BN (full scale flow: 50, 100, 200) R1.75 6 30 17 27 23 14.5 18.5 3.5 15 55 48 1 (35.2) 18 5 1.5 27 8.6 30 1301

FSM2 Series Outline dimensions with options mounted (P: with panel mounting kit option) Display integrated type 78 71 (Panel cut dimensions) 61 For single part mounting 4-R 57.5±0.5 r le ss 22.5±0.5 18 Panel vessel Panel vessel retainer 2- fixing screw Tightening torque 0.06N m 1.4 28 1o For seated mounting 57.5±0.5 1o r le ss A B 20 4 4-R Model no. FSM2-N/P*-H04/H06/S06/SM5* FSM2-N/P*-H08/H10/S08* A 40.5 46.5 B 28.5 30.0 28 Panel holder 22.5+28 (n-1) 28 15 * Cannot be mounted on FSM-N/P*-A15*. Panel thickness 6mm or less Needle valve integrated type 95 (Panel cut dimensions) 88 For single part mounting 4-R 1o 74.5±0.5 r le ss 22.5±0.5 18 28 78 Panel vessel 1.4 Panel vessel retainer 2- fixing screw Tightening torque 0.06N m For seated mounting 4-R B 4 1o ss 22.5±0.5 A 15 74.5±0.5 r le B 28.5 30.0 22.5+28 (n-1) A 40.5 46.5 28 Model no. FSM2-N/P*-H04/H06/S06*N FSM2-N/P*-H08/H10/S08*N 28 Panel holder Panel thickness 6mm or less 1302

Option external dimensions Bracket Model no.: FSM2-LB1 (Full scale flow: 0.5, 1, 2, 5, 10, 20, 50, 100, 200 ) Model no.: FSM2-LB2 (Full scale flow: 500, 1000 ) FSM2 Series Dimensions with options R1.75 55 30 6 3.5 1 2-ø3.5 65 30 1 17 9.5 40 13 30 50 27 14.5 18.5 8.4 4 15.5 2-ø3.5 5 * Enclosed two M3 (length 6mm) setscrews for fixing R1.75 6 3.5 5 * Enclosed two M3 (length 6mm) setscrews for fixing Cable option Model no.: FSM2-C51,C53 5-conductor cable (display integrated type FSM2-N/P*-*, separate indicator FSM2-D) 30 or less 5-AWG26 L Connector guard Material: EPDM 25 Half stop Terminal No. Cable color 1 Brown 2 Black 3 White 4 Gray 5 Blue Housing: JST GHR-05V-S Contact: JST 5-SSHL-002T-P0.2 (3.7) Halogen-free wire 5 Model no. (L) dimensions FSM2-C51 1040±20 FSM2-C53 3040±20 Model no.: FSM2-C41,C43 4-conductor cable (display separate type FSM2-A*-*) 30 or less 4-AWG26 L Connector guard Material: EPDM 25 Half stop Terminal No. Cable color 1 Brown 2 Black 3 White 4 Blue Housing: JST GHR-04V-S Contact: JST 4-SSHL-002T-P0.2 (3.7) Halogen-free wire 5 Model no. (L) dimensions FSM2-C41 1040±20 FSM2-C43 3040±20 1303

FSM2 Series Separate indicator dimensions FSM2-D ー * 55 7 27 17 23 33 1.6 21 25 2-ø2.6 depth 7 Outline dimensions with panel mounting kit option mounted 78 71 61 (Panel cut dimensions) For single part mounting 4-R1 or less 57.5±0.5 15 1.4 20 30.5 28 18 22.5±0.5 Opening width 22.5 Panel vessel retainer 2- fixing screw Tightening torque 0.06N m Panel vessel For seated mounting 4-R1 or less 57.5±0.5 28 Panel holder 3.5 28 22.5+28 (n-1) 4 With sensor side connector (e-con) connected Panel thickness 6mm or less 1304

MEMO 1305

FSM2 Series Example of internal circuit and load connection FSM2-N* ー *(display integrated type NPN output) FSM2-D-N* ー *(separate indicator NPN output) <CH2 is used as SW output> <CH2 is used as external input> (Brown) power supply + 1 (Black) CH1 Load SW output 1 2 (Brown) power supply + 1 (Black) CH1 Load SW output 1 2 Main circuit (White) CH2 SW output 2 3 Load Main circuit 3 (White) CH2 External input R* (Gray) analog output 4 (Blue) power supply - 5 Load R* (Gray) analog output 4 (Blue) power supply - 5 Load *Analog output voltage output type Analog output current output type R: approx. 1KΩ R: approx. 100Ω Terminal No. Option cable color Name Brown Power supply + (voltage output: 12 to 24V, Current output: 24V) Black CH1(switch output 1: max50ma) White CH2(switch output 2: max50ma, or external input) (FSM2 side) Gray Analog output Voltage output: 1-5V load impedance 50kΩ and over Current output: 4-20mA load impedance 300Ω or less Blue Power supply -(GND) FSM2-P* ー *(display integrated type PNP output) FSM2-D-P* ー *(separate indicator PNP output) <CH2 is used as SW output> <CH2 is used as external input> (Brown) power supply + 1 1 (Brown) power supply + Main circuit 2 3 (Black) CH1 SW output 1 (White) CH2 SW output 2 Load Main circuit 2 3 (Black) CH1 SW output 1 (White) CH2 External input Load (FSM2 side) Load R* (Gray) analog output R* 4 (Blue) power Load supply - 5 Terminal No. *Analog output voltage output type R: approx. 1KΩ Analog output current output type R: approx. 100Ω Option cable color Name Brown Power supply + (voltage output: 12 to 24V, Current output: 24V) Black CH1(switch output 1: max50ma) White CH2(switch output 2: max50ma, or external input) Gray Analog output Voltage output: 1-5V load impedance 50kΩ and over Current output: 4-20mA load impedance 300Ω or less Blue Power supply -(GND) 4 5 (Gray) analog output (Blue) power supply - Load 1306

Example of internal circuit and load connection FSM2 Series Technical data FSM2-A* ー *(display separate type) Main circuit (Brown) power supply + (Black) analog output (White) N.C. (model identification signal) Load Terminal No. Option cable Name color Brown Power supply + (voltage output: 12 to 24V, Current output: 24V) Analog output Voltage output: 1-5V Load impedance 50kΩ and over Black Current output: 4-20mA Load impedance 300Ω or less (Blue) power supply - *Analog output voltage output type R: approx. 1KΩ Analog output current output type R: approx. 100Ω White Blue N.C. (model identification signal; do not connect when using as single part) Power supply -(GND) (FSM2 side) Connecting the separated display and FSM2 display separated type e-con Sumitomo 3M wire mount plug 37104-3122-000 FL Connecting the separated display and FSM2 display separated type e-con Sumitomo 3M wire mount plug 37104-3122-000 FL Separate indicator (FSM2-D-*) (Brown) power supply + (Black) sensor (White) N.C. (model identification signal) (Blue) power supply - FSM2 display separated type Voltage output type (FSM2-AV*) (Current output type cannot be connected) Separate indicator (FSM2-D-*) (Brown) power supply + (Black) sensor Not connected (Blue) power supply - FSM display separated type (FSM-A-*-* / FSM-H-A-*-*) e-con Sumitomo 3M mini plug board mount socket Straight, signal-row type 37204-62B3-004 PL Analog output characteristics e-con Sumitomo 3Mmini plug board mount socket Straight, signal-row type37204-62b3-004 PL When connecting to the FSM-V Series or WFK3000 Series, the cable size is different so the separate compatible sensor connection connector (e-con) will be required. Voltage output type uni-direction flow Current output type uni-direction flow 5 20 Analog output (V) 3 1 0 F.S. flow Flow /min. Voltage output type bi-direction flow Current output type bi-direction flow Analog output (V) 5 3 Analog output (ma) Analog output (ma) 12 4 0 Flow /min. 20 12 F.S. flow 1 4 - F.S. flow 0 F.S. flow - F.S. flow Flow /min. 0 Flow /min. With the display integrated bi-directional type, output can be changed to a uni-direction output with the button settings. Refer to page 1318 for details. F.S. flow 1307

FSM2 Series Pressure loss characteristics (air, nitrogen gas) FSM2-*005-* FSM2-*010-* Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) FSM2-*020-* FSM2-*050-* Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) FSM2-*100-* FSM2-*200-* Pressure loss (kpa) Flow (/min.) Pressure loss (kpa) Flow (/min.) 1308

Pressure loss characteristics (air, nitrogen gas) FSM2-*500-* FSM2-*101-* FSM2 Series Technical data Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) FSM2-*201-* FSM2-*501-* Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) FSM2-*102-* Pressure loss (kpa) Flow (/min.) 1309

FSM2 Series Pressure loss characteristics (argon) FSM2-*005-*AR FSM2-*010-*AR Pressure loss (kpa) Pressure loss (kpa) FSM2-*020-*AR Flow (/min.) FSM2-*050-*AR Flow (/min.) Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) FSM2-*100-*AR FSM2-*200-*AR Pressure loss (kpa) Pressure loss (kpa) FSM2-*500-*AR Flow (/min.) FSM2-*101-*AR Flow (/min.) Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) 1310

Pressure loss characteristics (carbon dioxide) FSM2-*005-*C2 FSM2-*010-*C2 FSM2 Series Technical data Pressure loss (kpa) Pressure loss (kpa) FSM2-*020-*C2 Flow (/min.) FSM2-*050-*C2 Flow (/min.) Pressure loss (kpa) Pressure loss (kpa) FSM2-*100-*C2 Flow (/min.) FSM2-*200-*C2 Flow (/min.) Pressure loss (kpa) Pressure loss (kpa) FSM2-*500-*C2 Flow (/min.) FSM2-*101-*C2 Flow (/min.) Pressure loss (kpa) Pressure loss (kpa) Flow (/min.) Flow (/min.) 1311

FSM2 Series Flow charasteristics with needle valve (air, nitrogen gas) FSM2-*005/010/020 (resin body) FSM2-*050/100 (resin body) Flow [/min.(anr)] Number of needle turn Flow [/min.(anr)] Number of needle turn FSM2-*200/500-H04/H06 (resin body) FSM2-*500/101/201-H08/H10 (resin body) Flow [/min.(anr)] Number of needle turn FSM2-*005/010/020 (Stainless steel body) Flow [/min.(anr)] Number of needle turn FSM2-*050/100 (Stainless steel body) Flow [/min.(anr)] Flow [/min.(anr)] Number of needle turn Number of needle turn FSM2-*200/500-S06 (Stainless steel body) FSM2-*500/101/201-S08 (Stainless steel body) Flow [/min.(anr)] Flow [/min.(anr)] Number of needle turn Number of needle turn 1312 CAUTION: This characteristic value is a typical value and is not a guaranteed value.

MEMO 1313

FSM2 Series Names and functions of display and operation section Display integrated type Main display area (green/red) Flow rate unit display (green) Output (OUT1) display (green) Output (OUT2) display (green) Displays flow rate and setting values. Selectable display color. Only the first 3 digits display for cumulative flow rate displays. Displays the flow rate unit. Turns on when CH1 output is on. Blinks when overcurrent is detected. Turns on when CH2 output is on. Blinks when overcurrent is detected. (UP) key Sequentially displays CH1 data when the flow rate is displayed. Displays maximum during peak hold operation. Sets the mode when the mode is selected. Used to increment values, etc., when data is set. MODE key Use to enter setting mode. Use to return to the flow display. Use to release the peak hold operation. Sub-display area (green/red) Displays the flow direction and the operation status, etc. Selectable display color. The last 4 digits display for cumulative flow rate displays. (DOWN) key Sequentially displays CH2 data when the flow rate is displayed. Displays the minimum during peak hold operation. Used to decrement the value, etc., when data is set. <Display example> For FSM2-NVR100-* model Display Liquid crystal display Instantaneous flow display : Reverse direction 10L/min(ANR) Hi is displayed at an overflow. (Hi is displayed at -10%F.S. or more.) * Applies for a bi-directional setting (Note: At uni-directional types, "Lo" displays.) Integrated flow display For 99999.99L * When the display range of "99999.99" is exceed, the display resets to "0.00". * With the uni-directional type, Lo is displayed at -10%F.S. (Ex., With the 10l type, Lo is displayed if -10l flows to the reverse side.) With the bi-directional type, Hi is displayed at ±10%F.S. or more. 1314

FSM2 Series Operation Display separated type Flow rate bar display Lights in accordance with the present flow rate. Blinks when an excessive flow rate condition occurs. <Display example> For FSM2-A*F101-* 0%F.S. Flow Single-direction type Bidirectional type +60%F.S. (Forward direction) +120%F.S. (Forward direction) Flashes at overflow. * Flashes at +10%F.S. or less. Blinking -60%F.S. (Reverse direction) -120%F.S. (Reverse direction) Flashes at overflow. * Flashes at -10%F.S. or less. Blinking 1315

FSM2 Series Explanation of functions (display integrated type) The functions and various settings are made during the normal flow display and during the setting mode. The setting mode is divided into the standard setting mode and detailed setting mode according to the frequency of use. Normal operations Descriptions Explanation Default settings Instantaneous flow display The instantaneous flow rate is displayed. - Cumulative flow display The cumulative flow can be displayed. The switch output function includes a function to turn the switch ON/OFF at a level higher than the Instantaneous flow display prescribed cumulative value, and a cumulative pulse function to output the pulse at a set cumulative value. The settings are reset at power OFF, and can also be reset with button operations or external inputs. Peak hold function Maximum and minimum values for the flow rate within a set interval is displayed. Peak hold OFF Key lock The key operations can be invalidated to prevent inadvertent operations. Key lock invalid Error display function The error status is displayed when a fault or error occurs. - Standard setting mode Descriptions Explanation Default settings Switch output function Forced output function This product has 2-point switch output, and uses seven operation modes and stopping. Use this function to forcibly turn the switch output ON and confirm the wiring connection of initial operation of the input unit. Switch is set to OFF for both CH1 and CH2 - Zero adjustment The zero point deviation is compensated. (Range: 0±10%F.S.) Adjust value: 0 Detailed setting mode Descriptions Explanation Default settings Flow direction selection (Selectable only for display integrated bi-directional type) Selection of CH2 operation Automatic reference function Response time setting Display speed setting Sub-display setting Display color setting Setting hysteresis Setting the flow direction. Setting available for Bi-directional, one-side forward direction or one-side reverse direction. Select the CH2 setting. Select whether to use CH2 as a switch output, or to use as an external input (cumulative value reset/auto reference). When CH2 is selected as auto reference, the switch output s threshold can be imported with external inputs or button operations. The threshold can be changed automatically if the switch threshold value changes, such as when the workpiece is changed. Set the response time. The response can be set in seven steps from 50ms to approx. 1.5s. Chattering and mis-operation caused by sudden flow changes or noise are prevented. The digital display refresh cycle can be set in three stages from 250ms to 1s. If the display flickers, it may be improved by setting a longer display refresh cycle. Set the sub-display section's display method. The display can be changed to flow direction, flow unit or gas type display. Set the display color. The color for a normal display and for switch output ON can be set. Set the switch setting value hysteresis. Use this if the flow pulsates or if the switch chatters near the threshold, etc. Bi-directional setting Switch output Auto reference function OFF Response time: 50ms Display speed: 250ms Flow direction display When both main and sub are normal display: Green When switch is ON: Red Hysteresis: 1%FS Setting flow unit Select the display unit from the standard state or reference state. Flow unit: ANR Standard state (ANR): Converted into volumetric flow at 20 C, 1 barometric pressure Reference state (NOR): Converted into volumetric flow at 0 C, 1 barometric pressure (Note 1) Setting ECO MODE An eco mode can be set. ECO MODE OFF If the buttons are not operated for approx. one minute, the eco mode will activate and turn off the display s backlight. Current consumption can be reduced with this mode. Initialization Returns the settings to the default settings. With the separated display, if the settings - are reset and then the power is turned ON again with the FSM2 display separated type (sensor section) connected, the flow range will be automatically recognized. Model selection (only separated display) Select the flow range, flow direction and gas type. Not set (Note 2) Note 1: The reference state display is a calculated (reference) value. Note 2: The default setting is Not set. If Not set is selected during use, the operation will start from the model selection mode after the power is turned ON. Always set the model before starting use. The model is automatically recognized in the Not set state (default state) only when the FSM2 display separated type (sensor) is connected. 1316

Switch output function FSM2 Series Operation The output function can be selected from seven types of switch operations according to the required application. The functions are compatible with both CH1 and CH2. Operation pattern name Explanation Operation waveform LCD display Window operation (1) (ON out of specified range) The switch turns ON when the level is within the designated flow rate range. Sub-display section ON set point OFF set point Flow Window operation (2) (ON out of specified range) The switch turns ON when the level is not within the designated flow rate range. OFF set point ON set point Flow Hysteresis operation (1) (Flow small side ON) The hysteresis is randomly set, and the switch output turns OFF at the designated flow and higher. ON set point OFF set point Flow Hysteresis operation (2) (Flow large side ON) The hysteresis is randomly set, and the switch output turns ON at the designated flow and higher. (The output is held even during the Hi display. ) OFF set point ON set point Flow Cumulative output (1) (ON at cumulative flow or higher) Switch output turns ON at set cumulative value and higher. Cumulative output (2) (OFF at cumulative flow or higher) Switch output turns OFF at set cumulative value and higher. Integrated pulse output The cumulative pulse is output at the preset cumulative value. Refer to the Cumulative function in the specifications for details on the preset cumulative value. (Pages 1278, 1279) Switch operation OFF The switch operation is turned OFF. 1317

FSM2 Series Automatic reference function When CH2 is selected as auto reference, the switch output s threshold can be imported with external inputs or button operations. The threshold can be changed automatically if the switch threshold value changes, such as when the workpiece is changed. The flow value at the point where the external input is turned ON is read for the input value. The CH2 switch settings are invalid during auto referencing. Input no. Operation pattern name Explanation Operation waveform LCD display ON at input value or higher ON when higher than imported value. (Threshold: input value) <Main display> <Sub-display section> 1 point OFF at input value or higher OFF when higher than imported value. (Threshold: input value) ON at middle value of 2 points or higher ON when higher than middle value of two imported points. (Threshold: (input (1)+input (2))/2) OFF at middle value of 2 points or higher OFF when higher than middle value of two imported points. (Threshold: (input (1)+input (2))/2) 2 points ON between two points ON during two imported points. (Threshold (1): input value (1)) (Threshold (2): input value (2)) OFF between two points OFF during two imported points. (Threshold (1): input value (1)) (Threshold (2): input value (2)) 1318

Selecting the flow direction (Only display integrated, bi-directional type) FSM2 Series Operation The flow rate for the display integrated, bi-directional type can be set with the buttons. Flow direction LCD display Analog output characteristics <Bi-directional> Main display (V) (ma) 5 20 A minus mark (-) displays during reverse-direction flows Sub-display section The arrow-mark display changes in accordance withe the flow direction Analog output 3 12 1 4 -F.S. flow 0 F.S. flow reverse direction /min. forword direction <Uni-directional (forward direction)> Main display (V) (ma) 5 20 Sub-display section Analog output 3 12 1 4 0 F.S. flow /min. forword direction <Uni-directional (reverse direction)> Main display (V) (ma) 5 20 Sub-display section Analog output 3 12 1 4 0 F.S. flow /min.reverse direction 1319

FSM2 Series FSM2 Series Measurement Principle The FSM2 Series incorporates a platinum sensor chip (3mmx3.5mm) machined with silicon micro-machining. The sensor is thermally insulated from the silicon substrate. The heating capacity is extremely low, enabling high sensitivity with a high-speed response. At the sensor, two temperature sensor are arranged with a heater in between. Platinum, which has a resistance that changes based on temperature, is used for the temperature sensor. When the heater is turned on and heated, the temperature distribution is symmetrical to the center of the heater if there is not flow. When flow is received, the symmetrical property of the temperature distribution is lost, and temperature upstream from the heater drops, and that downstream rises. This temperature difference appears as the difference in temperature sensor resistance, and varies with the flow rate. If flow is reversed, the temperature difference (resistance value difference) is reversed. A bidirectional flow is thus detected. This is suitable for detecting relatively small flows. (without flow) Thermo sensor (1) Thermo sensor (2) Heater FLOW (with flow) R1 Rh R2 R1 Rh R2 Temperature resistance Temperature distribution symmetry Temperature resistance Symmetry of temperature distribution are lost R1 R2 R1 R2 5V Voltage 5V Voltage R1 R1 V out 2.5V V out 2.5V R2 R2 V out V out 1320

FSM all series common Refrigerating type dryer Desiccant type dryer High polymer membrane type dryer Air filter Auto. drain / others F.R.L. (Module unit) F.R.L. (Separate) Compact F.R. Precise regulator F.R.L. (Related products) Clean F.R. Electro pneumatic regulator Air booster Speed control valve 1 How to select flow sensor Use this as a guide to selecting the flow range when using a flow sensor to confirm suction and release with a suction nozzle or for leakage tests, etc. The flow is calculated by the effective nozzle (pin hole) sectional area, and the pressure difference inside and outside the nozzle. P2 : Vacuum P1 : Pressurization When P1 1.89P2 (sonic) Q=113.2SP1 When P1 < 1.89P2 (subsonic) Q=226.4S P2 (P1-P2) Q : Flow rate R/min. P1 : Primary absolute pressure MPa P2 : Secondary absolute pressure MPa S : Effective sectional area of nozzle (pin hole) mm 2 P1 : Atmospheric pressure Suction nozzle P1 : Pressurization P2 : Atmospheric pressure Silencer Check valve / others Joint / tube Vacuum filter Vacuum regulator Example of calculation P2 : Atmospheric pressure The following table gives the flow calculation values when using ø0.1 to 2 nozzle diameter and variable P2. Pin hole Suction plate Magnetic spring buffer Mechanical pressure SW Electronic pressure SW Contact / close contact conf. SW Air sensor Pressure SW for coolant Suction P1 (MPa) Absolute pressure 0.1013 0.1013 0.1013 0.1013 0.1013 0.1013 0.1013 0.1113 P1 (MPa) Gauge pressure 0 0 0 0 0 0 0 0.01 P2 (MPa) Absolute pressure 0.0313 0.0413 0.0513 0.0613 0.0713 0.0813 0.0913 0.1013 P2 (MPa) Gauge pressure -0.07-0.06-0.05-0.04-0.03-0.02-0.01 0 Sonic/ subsonic Sonic Sonic Sonic Subsonic Subsonic Subsonic Subsonic Subsonic ø0.1 0.090 0.090 0.090 0.088 0.082 0.072 0.054 0.057 ø0.2 0.360 0.360 0.360 0.352 0.329 0.287 0.215 0.226 ø0.3 0.810 0.810 0.810 0.792 0.740 0.645 0.483 0.509 Calculated flow rate value (R/min.) ø0.4 ø0.5 ø0.7 ø1 1.440 2.250 4.411 9.002 1.440 2.250 4.411 9.002 1.440 2.250 4.411 9.002 1.408 2.200 4.312 8.800 1.315 2.055 4.028 8.220 1.147 1.792 3.512 7.166 0.859 1.343 2.631 5.370 0.905 1.414 2.772 5.657 ø1.5 20.254 20.254 20.254 17.249 16.110 14.046 10.525 11.087 ø2 36.007 36.007 36.007 35.202 32.878 28.666 21.480 22.626 Small flow sensor Small flow controller Flow sensor for air Flow sensor for water Total air system Total air system (Gamma) Blow (leakage inspection) 0.1213 0.1413 0.1613 0.1813 0.2013 0.3013 0.4013 0.5013 0.6013 0.02 0.04 0.06 0.08 0.1 0.2 0.3 0.4 0.5 0.1013 0.1013 0.1013 0.1013 0.1013 0.1013 0.1013 0.1013 0.1013 0 0 0 0 0 0 0 0 0 Subsonic Subsonic Subsonic Subsonic Sonic Sonic Sonic Sonic Sonic 0.080 0.113 0.139 0.160 0.179 0.268 0.357 0.445 0.534 0.320 0.453 0.554 0.640 0.716 1.071 1.426 1.782 2.137 0.720 1.018 1.247 1.440 1.610 2.410 3.209 4.009 4.809 1.280 1.810 2.217 2.560 2.862 4.284 5.706 7.127 8.549 2.000 2.828 3.464 4.000 4.472 6.694 8.915 11.137 13.358 3.920 5.543 6.789 7.840 8.765 13.119 17.474 21.828 26.182 8.000 11.313 13.856 15.999 17.888 26.774 35.660 44.547 53.433 15.679 22.174 27.157 31.358 40.248 60.242 80.236 100.230 120.224 31.998 45.252 55.423 63.996 71.552 107.096 142.641 178.186 213.731 Ending (CAUTION) If there is leakage in piping, etc., the actual flow exceeds the calculated flow. Take pipe leakage into account when selecting the flow. If a piping section is thinner in diameter than the suction nozzle, the flow is restricted, and may be less than the calculated value. It may also not be possible to check suction, etc. The effective sectional area is a guideline. If the nozzle is long and thin, the effective sectional area is smaller than the nozzle opening. Response speed is determined by piping volume between the flow sensor and suction nozzle (pin hole). During high-speed detection, set the flow sensor near the suction nozzle, or reduce the volume when possible. 1358

Suction confirmation 1 Response time Response time during suction confirmation is determined by the piping's volume and the vacuum pump's exhaust capacity, etc. When using piping as shown at right, for example, response time depends on piping as shown below. Based on this, to shorten the response time, piping volume should be made as small as possible. Analog voltage output (V) 5.5 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 Suction 0.5 (R/min.) 2 Using a collet nozzle Gas flows to piping B. Suction 0 (R/min.) The collet nozzle is often used when the workpiece to be picked up should not be directly seated against the nozzle. The collet nozzle is triangular, so when the workpiece is picked up, a gap is created at the four corners. This causes leakage during pickup. If the effective area of piping, including valves and joints, etc., is too small compared to the collet nozzle and workpiece gap (effective sectional area), the flow is determined by the piping's effective sectional area, and the difference in flow during suction and without suction is small. In this case, suction is accurately confirmed by keeping the effective sectional area of the piping larger than the effective sectional area of the gap between the collet nozzle and workpiece. FSM all series common Pressure sensor 3 way valve Pressurization source (20kPa) Vacuum source (-70kPa) Release (blow) Gas is released from piping B. -0.3 (R/min.) Time (msec.) Dependency of response on piping A Examination piping A FSM-V Suction B 0.5 (R/min.) A-A cross section Nozzle (ø0.25) A: ø440 B: ø440 A: ø440 B: ø41000 A: ø41000 B: ø440 0 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 A Technical data Nozzle Workpiece Refrigerating type dryer Desiccant type dryer High polymer membrane type dryer Air filter Auto. drain / others F.R.L. (Module unit) F.R.L. (Separate) Compact F.R. Precise regulator F.R.L. (Related products) Clean F.R. Electro pneumatic regulator Air booster Speed control valve Silencer Check valve / others Joint / tube Vacuum filter Vacuum regulator Suction plate Magnetic spring buffer Mechanical pressure SW Electronic pressure SW Contact / close contact conf. SW Air sensor Pressure SW for coolant Small flow sensor Small flow controller Flow sensor for air Flow sensor for water Total air system Total air system (Gamma) Ending Small Flow sensor Collet nozzle 1359

FSM all series common Refrigerating type dryer Desiccant type dryer High polymer membrane type dryer Air filter Auto. drain / others F.R.L. (Module unit) F.R.L. (Separate) Compact F.R. Precise regulator F.R.L. (Related products) Clean F.R. Electro pneumatic regulator Air booster Speed control valve Silencer Check valve / others Joint / tube Vacuum filter Vacuum regulator Suction plate Magnetic spring buffer Mechanical pressure SW Electronic pressure SW Contact / close contact conf. SW Air sensor Pressure SW for coolant Small flow sensor Small flow controller Flow sensor for air Flow sensor for water Total air system Total air system (Gamma) Ending Leakage inspection (Note 1) 1 How to calculate leakage amount When changing from the pressure gauge, use the following formula to calculate leakage: Q = V Q: Leakage amount (mr/min.), P: Differential pressure (Pa), V: Workpiece inner volume (mr) T: Detection time (s) Example: When the workpiece has an inner volume of 500 mr, leakage when a 20 Pa difference in pressure occurs at 5-second detection time is: 2 Percent of leakage amount of gas and liquid Use this as a reference when inspecting leaks in a workpiece for gas by using air. This formula is based on the Hagen Poiseuille formula, and as a condition, the pinhole must be smooth-surfaced round tubing. Pinholes caused by welding faults, etc., may not fit the logical formula. QI Qa Qa Ql a nl Pa Pl P 1.01310 5 a = l 60 T 20 60 Q=500 1.18 (mr/min.) 1.01310 5 5 : Air leakage (mr/s) : Liquid leakage (mr/s) : Air viscosity (Pa s) : Liquid viscosity (Pa s) : Air test pressure (kpa) : Liquid test pressure (kpa) 101.3Pl (101.3+Pa/2)Pa Viscosity coefficient(pa s10-3) Temperature Air ( a) Water ( l) Brake oil ( l) 20 C 50 C 70 C 0.0181 0.0195 0.0204 1.00 0.55 0.40 26 10 7 Ratio of air (20 C) and gas leak rate Liquid Water Brake oil Brake oil 20 C 50 C 50 C l, Pa s Pneumatics Pa Liquid pressure Pl Ql/Qa 0.001 0.01 0.01 0.4MPa 0.4MPa 0.4MPa 0.4MPa 0.4MPa 15MPa 0.006 0.0006 0.02 Example: When inspecting a workpiece with water leakage of 0.1 mr/min. (test pressure of 0.4 MPa) with air (test pressure 0.4 MPa), leakage Qa is as follows: QR 0.1 = 0.006 Qa = 16.7 (mr/min.) Qa 0.006 1360

Refrigerating type dryer Desiccant type dryer High polymer membrane type dryer Air filter Auto. drain / others F.R.L. (Module unit) F.R.L. (Separate) Compact F.R. Precise regulator F.R.L. (Related products) Clean F.R. Electro pneumatic regulator Air booster Speed control valve Silencer Check valve / others Joint / tube Vacuum filter Vacuum regulator Suction plate Magnetic spring buffer Mechanical pressure SW Electronic pressure SW Contact / close contact conf. SW Air sensor Pressure SW for coolant Small flow sensor Small flow controller Flow sensor for air Flow sensor for water Total air system Total air system (Gamma) Ending Features FSM, FSM-V dedicated series Miniature inline filter FSM-VFM Series This is an inline filter for the small flow sensor FSM and FSM-V Series. The content volume is small so high-speed response is not obstructed when suction is confirmed. Miniature, space-saving body does not get in the way Easy-to-replace element Polyamide resin with outstanding chemical resistance used for the case Transparent case enables element contamination to be checked from outside Specifications Descriptions FSM-VFM-H22 FSM-VFM-H44 FSM-VFM-M55 Working fluid Clean air (JIS B 8392-1. 1. 1 to 5. 6. 2), compressed air (JIS B 8392-1. 1. 1 to 1. 6. 2) Note 1 Applicable tube outer ø1.8 ø4 diameter (Fiber tube) (Push-in ) Port size M5 Withstanding pressure MPa Working pressure range MPa 0.75-0.1 to 0.5 Ambient temperature range C 0 to 50 Material Case Polyamide Element Polypropylene, polyethylene Filtration rating μm 10 Product weight g 5.2 9.5 4.2 Recommended flow rate R/min. 10 Note 2 Note 1: Refer to a compressed air quality grade JIS B 8392-1: 2000 on page 1331. Note 2: Pressure loss increases when flow exceeds 10R/min., so use at 10R/min. or less. How to order FSM VFM H44 B Model no. A Tube outer diameter B Attached Symbol Descriptions A Tube outer diameter H22 H44 M55 B ø1.8 (fiber tube) ø4 (push-in ) Port size M5 Attached Blank Without bracket B Bracket attached Bracket part model no. FSM VFM B (Cross-headed flat tapping screw M2.56: 1pc.) Model no. FSM VFM E (Element: 5 pcs., joint fixing pin: 1 pc.) Clean room specifications (catalog No. CB-033SA) Heat sealed into anti-static bag in clean bench (Class 1000 or more). FSM-VFM P70 1362