St Louis, MO Thursday May 4, 2006 2006 NAFA Technical Seminar Managing Current Issues in the Cleanroom
St Louis, MO Thursday May 4, 2006 2006 NAFA Technical Seminar David Brande (919) 350-6000 A part of NNE-US, Inc. 7868 Highway 70 West Suite B Clayton, North Carolina 27520
Background on HEPA Filters
Background on HEPA Filters Most Penetrating Particle Size (MPPS) early on thought to be 0.3um now considered to be 0.12um
HEPA Filter Mechanisms RELATIVE EFFECT OF PARTICLE COLLECTION MECHANISMS 99 98 OVERALL EFFICIENCY 95 COLLECTION EFFICIENCY(%) 70 60 50 40 30 20 INTERCEPTION DIFFUSION IMPACTION PARTICLE DIAMETER (MICRONS) 0.01 0.1 1.0 10.0
HEPA Filter Mechanisms 99.999 99.99 99.9 THEORETICAL HEPA FILTER COLLECTION EFFICIENCY 0.3µm 99 COLLECTION EFFICIENCY(%) 90 0.12µm 50 10 PARTICLE DIAMETER (MICRONS) 0.01 0.1 1.0 10.0
HEPA Filter Mechanisms THEORETICAL HEPA FILTER COLLECTION EFFICIENCY 99.999 99.99 99.9 99 COLLECTION EFFICIENCY(%) 90 Actual 50 10 PARTICLE DIAMETER (MICRONS) 0.01 0.1 1.0 10.0
HEPA Filter Mechanisms ACTUAL HEPA FILTER COLLECTION EFFICIENCY 99.999 99.99 99.9 99 COLLECTION EFFICIENCY(%) 90 50 10 PARTICLE DIAMETER (MICRONS) 0.01 0.1 1.0 10.0
Background on HEPA Filters
Background on HEPA Filters Testing at the FACTORY for grading of the filters A, B, C, D, E, F and G
Background on HEPA Filters
Background on HEPA Filters
Background on HEPA Filters
Filter Integrity Testing Unexplained High Background address the problem of mass leakage through the HEPA filter media when leak testing with a thermally-generated, oil-based aerosol challenge.
Filter Integrity Testing a phenomena we have coined as BLEEDTHROUGH not site specific, cannot be pinpointed
Filter Integrity Testing Bleedthrough area Bleedthrough area
Filter Integrity Testing Leakage directly through the media When comparing the thermal generator to Laskin nozzle type generators Leakage is not present when using the Laskin nozzle generators addressed in IEST 34.2-section 5.2, page 10
Filter Integrity Testing
Filter Integrity Testing
Filter Integrity Testing
Filter Integrity Testing FACTOR #1 Test equipment Thermal generator output had MMD distribution shift from 0.49 µm to 0.27 µm
Filter Integrity Testing FACTOR #2 Filter Manufacturers Push toward thin paper with a relationship between filter efficiency and pressure drop
Filter Integrity Testing Introduction of the Condensation Nuclei Counter Has revolutionized the industry
Filter Integrity Testing CNC efficiency @ 1.8 cm/sec (3.5 fpm) Grade 0.3 µm 0.26 µm mpps 4350 99.983 99.978 99.97 4450 99.991 99.988 99.98
Filter Integrity Testing CNC efficiency @ 2.5 cm/sec (5.0 fpm) Grade 0.3 µm 0.26 µm mpps 4350 99.997 99.961 99.94 4450 99.985 99.977
Filter Integrity Testing ACTUAL HEPA FILTER COLLECTION EFFICIENCY 99.999 99.99 0.3µm 99.9 99 COLLECTION EFFICIENCY(%) 90 Test Aerosol 50 10 PARTICLE DIAMETER (MICRONS) 0.01 0.1 1.0 10.0
Filter Integrity Testing CNC efficiency @ 0.26µm (Test aerosol) Grade 1.8 cm/sec 2.5 cm/sec 4350 99.978 99.961 4450 99.988 99.977
Filter Integrity Testing The production of HEPA media has moved away from MIL-STD-282 (sic MIL-F-51079B) media to a commercial HEPA product line. The HEPA product line includes traditional HEPA products as well as additional media designed to meet HEPA requirements at application conditions.
What Can You Do Today? Inform your people that HEPA filters have changed and buy ULPA filters in the future
Filter Integrity Testing ULPA ACTUAL HEPA FILTER COLLECTION EFFICIENCY 99.999 99.99 99.9 99 COLLECTION EFFICIENCY(%) 90 50 10 PARTICLE DIAMETER (MICRONS) 0.01 0.1 1.0 10.0
Airflow Pattern Testing
Nitrogen and Carbon Dioxide
CO 2 and Unidirectional Flow QuickTime and a DV/DVCPRO - NTSC decompressor are needed to see this picture.
Polyethylene Glycol
QuickTime and a DV/DVCPRO - NTSC decompressor are needed to see this picture.
QuickTime and a DV/DVCPRO - NTSC decompressor are needed to see this picture.
Airflow Pattern Visualization LEGEND: HEPA Filter Blank
QuickTime and a DV - NTSC decompressor are needed to see this picture.
QuickTime and a DV/DVCPRO - NTSC decompressor are needed to see this picture.
Silicone Gel Issues QuickTime and a YUV420 codec decompressor are needed to see this picture.
Silicone Gel Issues QuickTime and a YUV420 codec decompressor are needed to see this picture.
Silicone Gel Issues QuickTime and a DV/DVCPRO - NTSC decompressor are needed to see this picture.
Silicone Gel Issue
Silicone Gel Issue
Silicone Gel Issue
Silicone Gel Issue
Who Ya Gonna Call Controlled Environment Testing Association 1500 Sunday Drive, Suite 102 Raleigh, NC 27607 (919) 787-5181 www.cetainternational.org
Thank You St Louis, MO Thursday May 4, 2006 2006 NAFA Technical Seminar