Aluminum High Vacuum Angle Valve

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Aluminum High Vacuum Angle Valve

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Transcription:

luminum High Vacuum ngle Valve Series X X High fluorine resistance inimal outgassing inimal contamination from heavy metals X Q X YV ø00, ø60 XF(V) ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 9

ightweight, ompact arge conductance, small body Excellent resistance against fluorine corrosion (body) luminum High Vacuum ngle Valve Series X ow outgassing ow outgassing makes it possible to use a lower capacity pump and also to shorten evaluation time. X Series ase odel (mm) X-6 X-5 50 X- 65 X-50 70 X-6 88 X-80 90 XF-00 08 XF-60 8 ommon to all series. omparison with F5 flange (mm) 0 58 70 96 5 54 00 ass (kg) 0.5 0.45..6.9 5.0 0.6 8.5 Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. e ody r ody t ody w ellows q Valve Heater onductance (l/s) 5 4 45 80 60 00 00 800 luminum (Set temp.: 0 ) 0 00 Temperature ( ) e, r, t ittle heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or r (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. q, w Stainless steel (Set temp.: 0 ) 0 00 Temperature ( ) 0 0 60 0 0 60 Time (minutes) Time (minutes) 80 e r q t w High Vacuum ngle Valves Series X Features X/XV (ellows seal, Single acting) Particulate-free and clean room compatible bellows type Pressure-balance mechanism X/XV (ellows seal, Double acting) Particulate-free and clean room compatible bellows type Pressure-balance mechanism XF/XFV ( seal, Single acting) High speed response Particulates are reduced through special surface treatment of shaft seal. XG/XGV ( seal, Double acting) High speed response Particulates are reduced through special surface treatment of shaft seal. 0 XD/XDV (-Step control, Single acting) Initial stage exhaust valve and main exhaust valve are combined. (flow rate -step control valve) Designed with a compact system and reduced piping Prevents particulate turbulence inside the chamber during exhaustion. Prevents pumps from running while overloaded. Initial exhaust valve flow is adjustable. XH (ellows seal, anual) ellows type is particulate free and cleaned. Pressure balance mechanism allows unrestricted exhaust direction. ow actuation torque (0.5 N m or less) Spring provides standard sealing load. Handle height is the same when valve is open or closed. Indicator to confirm opening and closing of valve is standard equipment. XS (ellows pressure balance, Normally closed XS electromagnetic) Particulates are reduced because there are no sliding metal parts. Pressure balance mechanism allows unrestricted exhaust direction. control power supply circuit for solenoid valve drive has been made standard. an be used in portable equipment since air for drive is not necessary. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

Series Variations High Vacuum ngle Valves ctuation pplication Shaft seal system odel X Valve type Operating pressure (Pa) eakage (Pa m /s) Note ) Internal Flange size Option Note ) External 6 5 50 6 80 00 60 Switch Heater Indicator High temperature spec. Page (Size 6: None) XV (With solenoid valves) Single acting (N..) P. to P.5 X Particle free cleaned ellows seal X tmospheric pressure to 0-6 0-0 0 - X Q X XV (With solenoid valves) Double acting (Size 6: None) P.6 to P.9 XF YV Electromagnetic anual ir operated High speed operation High volume operation Prevents turbulence of particulates. Prevents a pump from running overloaded. Particle free cleaned For portable equipment not requiring air seal ellows seal seal ellows seal (ellows balance) XFV (With solenoid valves) XG XGV (With solenoid valves) XD XDV (With solenoid valves) XH XS Single acting (N..) Double acting Single acting (N..) anual Single acting (N..) tmospheric pressure to 0-5 tmospheric pressure to 0-6 tmospheric pressure to 0-6 0. Pa (G) to 0-6 0-0 0-0 0-0 0-8 0-0 0-0 - 0 - (Size 6: None) (Size 6: None) Standard Standard Standard Standard (Size 6: None) P.0 to P.9 P.0 to P.4 P.44 to P.49 P.50 P.5 P.5 to P.54 Note) In case of standard seal material (F) Heater and high temperature specifications are not available with switches. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Normally losed/ellows Seal Series X/XV How to Order X 6 9N q w e r t y u X q Flange size Size 6 5 50 6 80 w Flange type Type F (NW) D (DN) pplicable flange 6, 5,, 50, 6, 80 6, 80 e Indicator/ Indicator F G J Without indicator With indicator Flange side Flange side Without indicator Flange side r Temperature specifications/heater High H0 temperature H type H y Number of auto switches/ounting position Temperature 5 to 60 5 to 50 Note) Size 6 is not applicable for H, H, Size 5 not for H. Quantity Without auto switch pcs. pc. pc. Heater With 00 heater With 0 heater ounting position Valve open/closed Valve open Valve closed t uto switch type 9N()()(Z) 9P()()(Z) 9()()(Z) 90() 9() 9// uto switch model D-9N()()(Z) D-9P()()(Z) D-9()()(Z) D-90() D-9() Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) uto switches are not applicable for high temperature specifications (Temperature specifications H0, H, H). Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N u ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Seal material N P Q R R R S T U Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of DuPont Performance Elastomers. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. Note ) hanged part None w, e w e eakage (Pa m /s or less) Note ) Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F) External. x 0 - (F). x 0-9. x 0 - (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page 4 for changed part. Number indicates parts number of onstruction accordingly. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) X-6-9N-XN ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

ir Operated/with Solenoid Valve luminum High Vacuum ngle Valve Series X/XV How to Order [Option] XV q Flange size Size 6 5 50 6 80 XV w Flange type Type F (NW) D (DN) 6 G 9N G q w e r t y u i ir operated/with solenoid valve pplicable flange 6, 5,, 50, 6, 80 6, 80 e Indicator/ Indicator F With G indicator J Without indicator type plug connector ( power supply) not attached for J, of sizes 6 and 5. o!0 X X Q X YV r uto switch type 9N()()(Z) 9P()()(Z) 9()()(Z) 90() 9() 9// uto switch model D-9N()()(Z) D-9P()()(Z) D-9()()(Z) D-90() D-9() Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N y Rated voltage E-compliant 00 V, 50/60 Hz 00 V, 50/60 Hz 4 0 V, 50/60 Hz 0 V, 50/60 Hz 5 4 VD 6 VD u Electrical entry G Grommet (ead wire length 00 mm) H Grommet (ead wire length 600 mm) type plug connector type plug connector i ight/surge voltage suppressor With light/surge voltage suppressor U (Non-polar type) S type: Not available for. U type: D only. o ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Seal material N P Q R R R S T U Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 t Number of auto switches/ounting position Quantity Without auto switch pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed S Z None With surge voltage suppressor With light/surge voltage suppressor Note ) hanged part None w, e w e eakage (Pa m /s or less) Note ) Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F)!0 E-compliant Q E-compliant External. x 0 - (F). x 0-9. x 0 - (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page 4 for changed part. Number indicates parts number of onstruction accordingly. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XV-6-9N-G-XN Note ) Option specifications/ombinations This model has indicator, auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves XV-6, 5,, 50: SYJ9, XV-6, 80: SYJ59 Example) SYJ9-GS, etc. For further details on solenoid valves, refer to Series SYJ00/500/700 in est Pneumatics No.. For option Q, the solenoid valve should be a E-compliant product. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

R P Series X/XV Specifications odel X(V)-6 X(V)-5 X(V)- X(V)-50 X(V)-6 X(V)-80 Valve type Fluid Operating temperature ( ) Operating pressure (Pa) X XV Normally closed (Pressurize to open, Spring seal) Inert gas under vacuum 5 to 60 (High temperature type: 5 to 50) 5 to 50 tmospheric pressure to x 0-6 onductance (l/s) Note ) 5 4 45 80 60 00 eakage (Pa m /s) Flange type Principal materials Surface treatment Pilot pressure (Pa) Internal External In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation In case of standard material F:. x 0 - at normal temperature, excluding gas permeation F (NW) F (NW), (DN) ody: luminum alloy, ellows: Stainless steel 6, ain part: Stainless steel, F (Standard seal material) External: Hard anodized X 5 Pilot port size XV 5: Port (P), Port (R) X 0.5 0.45. ass (kg) XV 0.9 0.49.4 Note ) onductance is the value for an elbow with the same dimensions. Note ) For valve heater specifications, refer to ommon Option [] Heater on page 55. 0.4 to 0.7 Internal: Raw material.6.64 Rc/8 Rc/8: Port (P), 5: Port (R).9 5.0.96 5.06 onstruction/operation uto switch (Option) Port (P) (Pressure port) Port (R) (Exhaust port) Indicator (Option) Heater (Option) q onnet assembly (aintenance parts) (Including w, t, y, u) agnet (Option) Pilot port Solenoid valve u ellows holder (aterial: Stainless steel 04) e Exterior seal (aintenance part) y ellows (aterial: Stainless steel 6) t Valve (aterial: Stainless steel 04) With solenoid valve ellows side exhaust w Valve seal (aintenance part) r ody (aterial: 606) Valve side exhaust Refer to the back of page 6 for aintenance Parts. <Working principle> y applying pressure from the pilot port, the piston-coupled valve overcomes the force of the spring or operating force by pressure, and the valve opens. In the case of the XV, port (P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 4 <Options> uto switch: Heater: Indicator: The magnet activates the auto switch. With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 0, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly is a heat resistant structure. This does not apply in cases where a solenoid valve is attached. When the valve is open, an orange marker appears in the center of the name plate. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

R P luminum High Vacuum ngle Valve Series X/XV Dimensions X/ir operated (b) D (a) E øfn (F flange) øfd ( flange) X E (c) Heater (Option) uto switch (Option) X Q X øg H YV odel X-6 X-5 X- X-50 X-6 X-80 50 65 70 88 90 (mm) D E Note ) Fn Fd G H 0 58 70 96 5 8 48 66 79 00 7 0 55 75 87 4 95 0 7 6 4 5 70 8 9 6 68 69 96 Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. XV/With solenoid valve J Port P (Pressure port) N Port R (Exhaust port) (mm) odel XV-6 XV-5 XV- J 5.5.5 50.5.4 4.9.7 8.5 8.5 8.5.7.7.7 N odel XV-50 XV-6 XV-80 J 57 78.5 87 5.7 8.7 8.7 8.5.7 4 4 Other dimensions are the same as the X. Other dimensions are the same as the X. Note) For further details on solenoid valves, refer to Series SYJ00/500/700 in est Pneumatics No.. (mm) N ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 5

luminum High Vacuum ngle Valve Double cting/ellows Seal Series X/XV How to Order Flange size 6, 5, X 6 9N Flange size 50, 6, 80 X 50 9N q w e r t y u X6 to q Flange size Size 6 5 50 6 80 w Flange type Type F (NW) D (DN) pplicable flange 6, 5,, 50, 6, 80 6, 80 e Flange side r Temperature specifications/heater Temperature Heater 5 to 60 High H0 temperature H 5 to 50 With 00 heater type H With 0 heater Note) Size 6 is not applicable for H, H, Size 5 not for H. y Number of auto switches/ounting position Quantity Without auto switch pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed u ody surface treatment/seal material and its changed part ody surface treatment Seal material N P Q R R R S T U Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 t uto switch type uto switch model D-9N()()(Z) D-9P()()(Z) 9N()()(Z) 9P()()(Z) 9()()(Z) 90() 9() 9// D-9()()(Z) D-90() D-9() Seal material changed part and leakage Note ) hanged part None w, e w e Flange side Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) uto switches are not applicable for high temperature specifications (Temperature specifications H0, H, H). dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N eakage (Pa m /s or less) Note ) Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F) External. x 0 - (F). x 0-9. x 0 - (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page 8 for changed part.number indicates parts number of onstruction accordingly. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) X-6-9N-XN 6 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

ir Operated/with Solenoid Valve luminum High Vacuum ngle Valve Series X/XV How to Order [Option] q Flange size Size 6 5 50 Note) 6 Note) 80 Note) Note) Please consult S for specifications of flange size 50, 6 and 80. Seal material N P Q R R R S T U XV w Flange type Type F (NW) D (DN) Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. pplicable flange 6, 5,, 50, 6, 80 6, 80 r uto switch type 9N()()(Z) 9P()()(Z) 9()()(Z) 90() 9() 9// uto switch model D-9N()()(Z) D-9P()()(Z) D-9()()(Z) D-90() D-9() Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N y Rated voltage E-compliant u Type of actuation 00 V, 50/60 Hz 00 V, 50/60 Hz 0 V, 50/60 Hz 4 0 V, 50/60 Hz 5 4 VD 6 VD W position single position double ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 e Solenoid valve direction i Electrical entry G H Solenoid valve direction type plug connector ( power supply) not attached for of sizes 6 and 5. t Number of auto switches/ounting position Quantity Without auto switch pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed Grommet (ead wire length 00 mm) Grommet (ead wire length 600 mm) type plug connector type plug connector o ight/surge voltage suppressor With light/surge voltage suppressor U (Non-polar type) S type: Not available for. U type: D only.!0 ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Surface treatment Note ) eakage (Pa m /s or less) Note ) External: Hard anodized Internal: Raw material hanged part External: Hard anodized Internal: Oxalic acid anodized! E-compliant Q E-compliant XV 6 9N q w e r t ir operated/with solenoid valve None w, e w e G y u i o!0! S Z Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F) None With surge voltage suppressor With light/surge voltage suppressor To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XV-6-9N-G-XN Note ) Option specifications/ombinations This model has auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves position single: XV-6, 5, : SYJ90 position double: XV-6, 5, : SYJ90 Example) SYJ90-GS, SYJ90-GS For further details on solenoid valves, refer to Series SYJ000/5000/7000 in est Pneumatics No.. For option Q, the solenoid valve should be a E-compliant product. External. x 0 - (F). x 0-9. x 0 - (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page 8 for changed part.number indicates parts number of onstruction accordingly. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 7 X X Q X YV

P Series X/XV Specifications odel X(V)-6 X(V)-5 X(V)- X-50 X-6 X-80 Valve type Fluid Operating X Double acting (Dual operation), Pressurize to open/close Inert gas under vacuum 5 to 60 (High temperature type: 5 to 50) temperature ( ) XV 5 to 50 Operating pressure (Pa) tmospheric pressure to x 0-6 onductance (l/s) Note ) 5 4 45 80 60 00 eakage (Pa m /s) Internal External In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation In case of standard material F:. x 0 - at normal temperature, excluding gas permeation Flange type F (NW) F (NW), (DN) Principal materials ody: luminum alloy, ellows: Stainless steel 6, ain part: Stainless steel, F (Standard seal material) Surface treatment Pilot pressure (Pa) External: Hard anodized 0. to 0.6 Internal: Raw material 0.4 to 0.6 Pilot port size ass (kg) X 5 Rc/8 XV 5: Port (P), Port (R), Port 5(R) X 0.8 0.46..7. 5. XV 0. 0.5.5 Note ) onductance is the value for an elbow with the same dimensions. Note ) For valve heater specifications, refer to ommon Option [] Heater on page 55. onstruction/operation Port 5(R) (Exhaust port) Plate Heater (Option) agnet (Option) uto switch (Option) Pilot port (pressurize to close) P- q onnet assembly (aintenance parts) (Including w, t, y, u) Pilot port (pressurize to open) P- R RPort (P) (Pressure port) Port (R) (Exhaust port) Solenoid valve u ellows holder (aterial: Stainless steel 04) e Exterior seal (aintenance part) y ellows (aterial: Stainless steel 6) t Valve (aterial: Stainless steel 04) With solenoid valve ellows side exhaust w Valve seal (aintenance part) r ody (aterial: 606) Valve side exhaust Refer to the back of page 6 for aintenance Parts. <Working principle> y applying pressure from the pilot port P-, the pistoncoupled valve overcomes the operating force by the pressure, and the valve opens. (Pilot port P- is open) lternatively, by applying pressure to actuation port P-, the valve closes. (Pilot port P- is open) In the case of the XV, port (P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. In the case of a double solenoid, the valve moves to the opposite side from that in which the solenoid valve is turned ON. 8 <Options> uto switch: Heater: The magnet activates the auto switch. With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 0, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly is a heat resistant structure. This does not apply in cases where a solenoid valve is attached. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series X/XV Dimensions X6, 5, / ir operated E (b) D (a) øfn (F flange) X E (c) Heater (Option) uto switch (Option) X Q X H J øg YV odel X-6 X-5 X- 50 65 0 7 8 48 66 D E Note ) Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions.oreover, heater mounting positions will differ depending on the type of heater.for further details, refer to mounting positions under Replacement Heaters on page 6. Fn 0 55 G 7 6 4 H 9 6 (mm) J 6 8 6 X50, 6, 80/ ir operated E E (b) D (a) øfn (F flange) øfd ( flange) E (c) H J øg odel X-50 X-6 X-80 70 88 90 8 09 50 80 00 7 D 9 45.5 E Note ) 0.5 Fn 75 87 4 Fd 95 0 G 5 70 8 H 77 76.5 05 J 9 6 44 (mm) 0.5 9 9 Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions.oreover, heater mounting positions will differ depending on the type of heater.for further details, refer to mounting positions under Replacement Heaters on page 6. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 9

R R P luminum High Vacuum ngle Valve Series X/XV Dimensions XV/With solenoid valve R X Port R (Exhaust port) P N In case of double solenoid valve Q X Q X Port P (Pressure port) In case of single solenoid valve YV odel XV-6 XV-5 XV- 4. 5.8 9 9. 9. 9. 6.4 6.4 6.4 N.5.5.5 P.7.7.7 Q 7. 5.8.6 (mm) R 6 4 5 Other dimensions are the same as the X. Note) For further details on solenoid valves, refer to Series SYJ000/5000/7000 in est Pneumatics No.. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 9-

I luminum High Vacuum ngle Valve Normally losed/ Seal Series XF/XFV How to Order ade to Order ade to order specifications (For details, refer to page 4 to 9) XF 6 9N q w e r t y u XF q Flange size Size 6 5 50 6 80 00 60 w Flange type Type F (NW) D (DN) pplicable flange 6, 5,, 50, 6 80, 00, 60 6, 80, 00, 60 e Indicator/ Indicator F G J Without indicator With indicator Flange side Flange side Without indicator V V E U H V U G H Flange side r Temperature specifications/heater Temperature 5 to 60 High H0 temperature H type H y Number of auto switches/ounting position 5 to 50 Note) Size 6 is not applicable for H, H, Size 5 not for H. Quantity Without auto switch pcs. pc. pc. Heater With 00 heater With 0 heater ounting position Valve open/closed Valve open Valve closed t uto switch type uto switch model 9N()()(Z) 9P()()(Z) 9()()(Z) D-9N()()(Z) D-9P()()(Z) D-9()()(Z) Remarks Without auto switch (without built-in magnet) Solid state auto switch 90() 9() 9// D-90() D-9() Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) uto switches are not applicable for high temperature specifications(temperature specifications H0, H, H). Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N u ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Surface treatment Note ) External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material N P Q R R R S T U Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 hanged part None w, e w e eakage (Pa m /s or less) Note ) Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F) External. x 0-0 (F). x 0-8. x 0-0 (F). x 0-8 Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page for changed part. Number indicates parts number of onstruction accordingly. Note ) Part e (exterior seal) is not changeable for sizes 6 and 5. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XF--9N-XN 0 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

I ir Operated/with Solenoid Valve luminum High Vacuum ngle Valve Series XF/XFV How to Order [Option] XFV q Flange size Size 6 5 50 6 80 00 60 XFV w Flange type Type D F (NW) (DN) 6 G 9N G q w e r t y u ir operated/with solenoid valve pplicable flange 6, 5,, 50, 6 80, 00, 60 6, 80, 00, 60 i e Indicator/ Indicator F With G indicator J Without indicator type plug connector ( power supply) not attached for J, of sizes 6 and 5. o!0 V V E U H V U G H X X Q X YV r uto switch type uto switch model 9N()()(Z) 9P()()(Z) 9()()(Z) D-9N()()(Z) D-9P()()(Z) D-9()()(Z) Remarks Without auto switch (without built-in magnet) Solid state auto switch 90() 9() 9// D-90() D-9() Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N y Rated voltage E-compliant u Electrical entry 00 V, 50/60 Hz G 00 V, 50/60 Hz H 0 V, 50/60 Hz 4 0 V, 50/60 Hz 5 4 VD 6 VD Seal material N P Q R R R S T U Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. Grommet (ead wire length 00 mm) Grommet (ead wire length 600 mm) type plug connector type plug connector ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 t Number of auto switches/ounting position S Z Quantity Without auto switch pcs. pc. pc. i ight/surge voltage suppressor None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor U (Non-polar type) S type: Not available for. U type: D only. o ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Surface treatment Note ) External: Hard anodized Internal: Raw material hanged part External: Hard anodized Internal: Oxalic acid anodized None w, e w e ounting position Valve open/closed Valve open Valve closed eakage (Pa m /s or less) Note ) Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F)!0 E-compliant Q E-compliant External. x 0-0 (F). x 0-8. x 0-0 (F). x 0-8 Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page for changed part. Number indicates parts number of onstruction accordingly. Note ) Part e (exterior seal) is not changeable for sizes 6 and 5. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XFV--9N-G-XN Note ) Option specifications/ombinations This model has indicator, auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves XFV-6, 5, : SYJ9, XFV-50, 6, 80, 00, 60: SYJ59 Example) SYJ9-GS. For further details on solenoid valves, refer to Series SYJ00/500/700 in est Pneumatics No.. For option Q, the solenoid valve should be a E-compliant product. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

Series XF/XFV Specifications odel Valve type Fluid Operating XF temperature ( ) XFV Operating pressure (Pa) {Torr} onductance (l/s) Note ) Internal eakage (Pa m /s) External Flange type Principal materials Note ) Surface treatment Pilot pressure (Pa) Pilot port size ass (kg) XF XFV XF XFV XF(V)-6 XF(V)-5 XF(V)- XF(V)-50 XF(V)-6 XF(V)-80 XF(V)-00 XF(V)-60 Normally closed (Pressurize to open, Spring seal) Inert gas under vacuum 5 to 60 (High temperature type: 5 to 50) 5 to 50 tmospheric pressure to x 0-5 {760 to 7.5 x 0-8 } 5 4 45 80 60 00 00 800 In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation F (NW) F (NW), (DN) ody: luminum alloy, ain part: Stainless steel, F (Standard seal material) External: Hard anodized Internal: Raw material 0.4 to 0.7 5 Rc/8 Rc/4 5: Port (P), Port (R) Rc/8: Port (P), 5: Port (R) 0.5 0.45..6.0 4.8 0 8 0.9 0.49.4.66.06 4.86 0. 8. Note ) onductance is the value for an elbow with the same dimensions. Note ) For valve heater specifications, refer to ommon Option [] Heater on page 55. Note ) coating of vacuum grease [Y-V] is applied to the seal-material sliding portion of the vacuum part. onstruction/operation Heater (Option) agnet (Option) Indicator (Option) uto switch (Option) q onnet assembly (aintenance parts) (Including w, t, y, u, i) R P Port (P) (Pressure port) Plate Port (R) (Exhaust port) Solenoid valve Pilot port (pressurize to open) e Exterior seal (aintenance part) i Shaft seal (aterial: F) o Scraper (aterial: F) y Spring (aterial: Oil-tempered wire/ Electroless nickel plated) Shaft side exhaust With solenoid valve u Shaft (aterial: Stainless steel 04) t Valve (aterial: Stainless steel 04) w Valve seal (aintenance part) r ody (aterial: 606) Valve side exhaust Refer to the back of page 6 for aintenance Parts. <Working principle> y applying pressure from the pilot port, the piston-coupled valve overcomes the force of the spring or operating force by pressure, and the valve opens. In the case of the XFV, port (P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. <Options> uto switch: Heater: Indicator: The magnet activates the auto switch. With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 0, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly is a heat resistant structure. This does not apply in cases where a solenoid valve is attached. When the valve is open, an orange marker appears in the center of the name plate. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

R P luminum High Vacuum ngle Valve Series XF/XFV Dimensions XF/ir operated (b) D E (a) E (c) øfn (F flange) Heater (Option) uto switch (Option) øfd ( flange) X X Q X øg H YV odel XF-6 XF-5 XF- XF-50 XF-6 XF-80 XF-00 XF-60 50 65 70 88 90 08 8 0 58 70 96 5 00 5 8 48 66 79 00 7 54 00 D E Note ) Fn 0 55 75 87 4 4 90 Fd 95 0 0 80 G 7 6 4 5 70 8 0 5 Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. (mm) H 9 6 68 69 96 XFV/With solenoid valve J N Port P (Pressure port) Port R (Exhaust port) odel XFV-6 XFV-5 XFV- XFV-50 XFV-6 XFV-80 XFV-00 XFV-60 J 5.5.5 50.5 67 78.5 87 05.5 8.5.4 5.7.7 8.7 8.7 49.7 58 8.5 8.5 8.5 4 4 4 4 4 Other dimensions are the same as the XF. Note) For further details on solenoid valves, refer to Series SYJ00/500/700 in est Pneumatics No.. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com (mm) N.7.7.7

luminum High Vacuum ngle Valve/Normally losed/ Seal Series XF ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. ade to Order With ypass Valve (Flange size: 80) () 48.5 7 () H I 7 GH VU U VVE () Shaft seal (F) Scraper (F) Pilot port: 5 e tw u X-6 -X65 r 0. 96 ead wire length: 500 mm ( type: 000 mm) y Pilot port: Rc/8 ypass valve adjustment nut (Initial exhaust) djustment pitch: mm/rotation ock nut Width across flats (ax. ) 7.5 i!0 ø8 ø ø4 90 0. ø8 ø ø4 90 - q 5 8-8- o omponent Parts No. Description aterial Remarks - 4 5 6 7 8 8-8- 9 0 ody onnet assembly Hexagon socket head cap screw omputer name plate uto switch Indicator ypass valve Hexagon socket head cap screw 606 Stainless steel Stainless steel 0, l = 60 Option Option 4, l = 4 Part No. Seal material symbol N P Q R R R S T U Part No. Seal material symbol N P Q R R R S T U Internal seal - -V85V -V85-XN -V85-XP -V85-XQ -V85-XR -V85-XR -V85-XR -V85-XS -V85-XT -V85-XU External seal r S568-045V S568-045-XN S568-045-XP S568-045-XQ S568-045-XR S568-045-XR S568-045-XR S568-045-XS S568-045-XT S568-045-XU Internal seal 8- External seal 8- External seal o -V5V S568-05V S568-07V -V5-XN S568-05-XN S568-07-XN -V5-XP S568-05-XP S568-07-XP -V5-XQ S568-05-XQ S568-07-XQ -V5-XR S568-05-XR S568-07-XR -V5-XR S568-05-XR S568-07-XR -V5-XR S568-05-XR S568-07-XR -V5-XS S568-05-XS S568-07-XS -V5-XT S568-05-XT S568-07-XT -V5-XU S568-05-XU S568-07-XU Note) coating of vacuum grease (fluorinated grease: Y-V) is applied to the shaft seal, scraper and o. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series XF aintenance Parts How to Order Valve XFR 80 9N X ain valve: Indicator/ Indicator Without indicator Flange side Flange side F With indicator G J Without indicator Flange: uto switch type (Operating temperature 5 to 60 ) uto switch model Switch type Without auto switch (without built-in magnet) 9N() D-9N() Solid state 9P() D-9P() auto switch 9() D-9() 90() D-90() 9() D-9() Reed auto switch 9// Without auto switch (with built-in magnet) Note) Types with auto switches are not available in case of high temperature types. type: ead wire length 000 mm Number of auto switches/ounting position Quantity Without auto switch pcs. pc. pc. q ody Part No. XR80 onnet assembly Temperature Indicator 5 to 60 Without indicator With indicator 5 to 50 Without indicator With indicator ounting position Valve open/closed Valve open Valve closed S ypass valve mounting position ounting position Flange: w onnet ssembly Part No. XF80-0-H Part no. XF80-0- XF80-0- XF80-0-H XF80-0-H Temperature specifications Temperature 5 to 60 H0 5 to 50 ypass valve mounting position/ ounting position Flange side eft flange surface Flange side Right flange surface Rear flange surface Flange: 9N-XN Same as How to Order. Seal material Seal material N P Q R R R S T U F EPD arrel Perfluoro alrez hemraz VQ F FOR PS UTI ROR ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of DuPont Performance Elastomers. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. Seal material changed part hanged part eakage (Pa m /s or less) Note) Internal External None. x 0-9 (F). x 0-9 (F) - 8- r 8- o. x 0-7. x 0-7 - 8-. x 0-7. x 0-9 (F) r 8- o. x 0-9 (F). x 0-7 Note) Values at normal temperature, excluding gas permeation. i ypass Valve Part No. X Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) Temperature specifications Temperature 5 to 60 H0 5 to 50 Specifications Valve type Shaft seal type Operating pressure range Fluid Operating temperature onductance Operating pressure Flange 6 X65 Seal material changed part hanged part None 8-8- 8-8- Seal material: Same as the seal materials of How to Order Valve. ain valve: Normally closed ypass valve: Normally closed seal ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 00 l/s ax. 5 l/s (alculated value) 0.4 to 0.7 Pa F80 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 5 X X Q X YV

luminum High Vacuum ngle Valve/Normally losed/ Seal Series XF ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. ade to Order With ypass Valve (Flange size: 00) () 85 54 () H I GH 54 VU U VVE () e tw u X-6 -X65 ead wire length: 500 mm ( type: 000 mm) y Shaft seal (F) Scraper (F) Pilot port: 5 r 0. Pilot port: Rc/8 ypass valve adjustment nut (Initial exhaust) djustment pitch: mm/rotation 99 ock nut Width across flats 7.5 i!0 ø0 ø ø4 08 ø0 ø ø4 Part No. Seal material symbol N P Q R R R S T U omponent Parts No. Description aterial Remarks Part No. - ody onnet assembly 606 Seal material symbol N 4 5 6 7 8 8-8- 9 0 Hexagon socket head cap screw Stainless steel omputer name plate uto switch Indicator ypass valve Hexagon socket head cap screw Stainless steel, l = 70 Option Option 4, l = P Q R R R S T U 6 (ax. ) 0. - q 08 8-8- o Internal seal - S568-49V S568-49-XN S568-49-XP S568-49-XQ S568-49-XR S568-49-XR S568-49-XR S568-49-XS S568-49-XT S568-49-XU External seal r S568-050V S568-050-XN S568-050-XP S568-050-XQ S568-050-XR S568-050-XR S568-050-XR S568-050-XS S568-050-XT S568-050-XU Internal seal 8- External seal 8- External seal o -V5V S568-05V S568-07V -V5-XN S568-05-XN S568-07-XN -V5-XP S568-05-XP S568-07-XP -V5-XQ S568-05-XQ S568-07-XQ -V5-XR S568-05-XR S568-07-XR -V5-XR S568-05-XR S568-07-XR -V5-XR S568-05-XR S568-07-XR -V5-XS S568-05-XS S568-07-XS -V5-XT S568-05-XT S568-07-XT -V5-XU S568-05-XU S568-07-XU Note) coating of vacuum grease (fluorinated grease: Y-V) is applied to the shaft seal, scraper and o. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series XF ain valve: Indicator/ Indicator Without indicator Flange side Flange side F With indicator G J Without indicator Flange: 9N()()(Z) 9P()()(Z) 9()()(Z) 90() 9() 9// aintenance Parts q ody Part No. XR00 S ypass valve mounting position ounting position w onnet ssembly Part No. XF00-0- onnet assembly Temperature Indicator Without indicator 5 to 60 With indicator Without indicator 5 to 50 With indicator Specifications Valve type Shaft seal type Operating pressure range Fluid Operating temperature onductance Operating pressure Flange How to Order Valve XFR 00 9N X uto switch type uto switch model Switch type Without auto switch (without built-in magnet) D-9N()()(Z) D-9P()()(Z) D-9()()(Z) D-90() D-9() Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Note ) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Note ) Types with auto switches are not available in case of high temperature types. Part no. XF00-0- XF00-0- XF00-0-H XF00-0-H Number of auto switches/ounting position Quantity ounting position Without auto switch pcs. pc. pc. Valve open/closed Valve open Valve closed ypass valve mounting position/ ounting position Flange side eft flange surface Flange side Right flange surface Rear flange surface Flange: Temperature specifications Temperature 5 to 60 H0 5 to 50 i ypass Valve Part No. X Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) Temperature specifications Temperature 9N-XN 5 to 60 H0 5 to 50 Same as How to Order. ain valve: Normally closed ypass valve: Normally closed seal ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 00 l/s ax..5 l/s (alculated value) 0.4 to 0.7 Pa F00 Seal material Seal material N P Q R R R S T U F EPD arrel Perfluoro alrez hemraz VQ F FOR PS UTI ROR ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of DuPont Performance Elastomers. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. Seal material changed part hanged part eakage (Pa m /s or less) Note) Internal External None. x 0-9 (F). x 0-9 (F) - 8- r 8- o. x 0-7. x 0-7 - 8-. x 0-7. x 0-9 (F) r 8- o. x 0-9 (F). x 0-7 Note) Values at normal temperature, excluding gas permeation. 6 X65 Seal material changed part hanged part None 8-8- 8-8- Seal material: Same as the seal materials of How to Order Valve. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 7 X X Q X YV

luminum High Vacuum ngle Valve/Normally losed/ Seal Series XF ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. ade to Order With ypass Valve (Flange size: 60) () 8 00 () () 00 H e t w u I GH VU U VVE X-6 -X65 ead wire length: 500 mm ( type: 000 mm) y Shaft seal (F) Scraper (F) r 0. Pilot port: Rc/4 ypass valve adjustment nut (Initial exhaust) djustment pitch: mm/rotation i!0 ø5 ø88 ø90 omponent Parts No. Description aterial Remarks - ody onnet assembly 606 4 5 6 7 8 8-8- 9 0 Hexagon socket head cap screw Stainless steel omputer name plate uto switch Indicator ypass valve Hexagon socket head cap screw Stainless steel 0, l = 70 Option Option 4, l = 8 Pilot port: 5 (ax. ) 7.5 8 0. ø5 ø88 ø90 - q 8 5 Part No. Seal material symbol N P Q R R R S T U Part No. Seal material symbol N P Q R R R S T U ock nut Width across flats 8-8- o Internal seal - -G55V -G55-XN -G55-XP -G55-XQ -G55-XR -G55-XR -G55-XR -G55-XS -G55-XT -G55-XU External seal r S568-67V S568-67-XN S568-67-XP S568-67-XQ S568-67-XR S568-67-XR S568-67-XR S568-67-XS S568-67-XT S568-67-XU Internal seal 8- External seal 8- External seal o -V5V S568-05V S568-07V -V5-XN S568-05-XN S568-07-XN -V5-XP S568-05-XP S568-07-XP -V5-XQ S568-05-XQ S568-07-XQ -V5-XR S568-05-XR S568-07-XR -V5-XR S568-05-XR S568-07-XR -V5-XR S568-05-XR S568-07-XR -V5-XS S568-05-XS S568-07-XS -V5-XT S568-05-XT S568-07-XT -V5-XU S568-05-XU S568-07-XU Note) coating of vacuum grease (fluorinated grease: Y-V) is applied to the shaft seal, scraper and o. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series XF ain valve: Indicator/ Indicator Without indicator Flange side Flange side F With indicator G J Without indicator Flange: q ody Part No. XR60 S w onnet ssembly Part No. XF60-0- 9N-XN ypass valve mounting position ounting position Specifications Valve type Shaft seal type Operating pressure range Fluid Operating temperature onductance Operating pressure Flange How to Order Valve XFR 60 9N X uto switch type uto switch model Switch type Without auto switch (without built-in magnet) 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9() D-9() 9// aintenance Parts onnet assembly Temperature Indicator Without indicator 5 to 60 With indicator Without indicator 5 to 50 With indicator Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Note ) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Note ) Types with auto switches are not available in case of high temperature types. Part no. XF60-0- XF60-0- XF60-0-H XF60-0-H Number of auto switches/ounting position Quantity ypass valve mounting position/ ounting position Flange side eft flange surface Flange side Right flange surface Rear flange surface Flange: Temperature specifications Temperature 5 to 60 H0 5 to 50 Same as How to Order. Without auto switch pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed i ypass Valve Part No. X Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) ain valve: Normally closed ypass valve: Normally closed seal ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 800 l/s ax..5 l/s (alculated value) 0.4 to 0.7 Pa F60 Seal material Seal material N P Q R R R S T U F EPD arrel Perfluoro alrez hemraz VQ F FOR PS UTI ROR 6 X65 ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of DuPont Performance Elastomers. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. Seal material changed part hanged part eakage (Pa m /s or less) Note) Internal External None. x 0-9 (F). x 0-9 (F) - 8- r 8- o. x 0-7. x 0-7 - 8-. x 0-7. x 0-9 (F) r 8- o. x 0-9 (F). x 0-7 Note) Values at normal temperature, excluding gas permeation. Temperature specifications Temperature 5 to 60 H0 5 to 50 Seal material changed part hanged part None 8-8- 8-8- Seal material: Same as the seal materials of How to Order Valve. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 9 X X Q X YV

I luminum High Vacuum ngle Valve Double cting/ Seal Series XG/XGV How to Order ade to Order ade to order specifications (For details, refer to page 8 to 4) Flange size 6, 5, XG 6 9N XG Flange size 50, 6, 80, 00, 60 XG 50 9N q w e r t y u q Flange size Size 6 5 50 6 80 00 60 r Temperature specifications/heater High H0 temperature H type H w Flange type Type Note) Size 6 is not applicable for H, H, Size 5 not for H. D Temperature 5 to 60 5 to 50 F (NW) (DN) pplicable flange 6, 5,, 50 6, 80, 00, 60 6, 80, 00, 60 Heater With 00 heater With 0 heater y Number of auto switches/ounting position Quantity Without auto switch pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed e t uto switch type 9N()()(Z) 9P()()(Z) 9()()(Z) 90() 9() 9// Flange side uto switch model D-9N()()(Z) D-9P()()(Z) D-9()()(Z) D-90() D-9() Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) uto switches are not applicable for high temperature specifications (Temperature specifications H0, H, H). Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N V V E U H V U G H Flange side u ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Seal material N P Q R R R S T U Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 Note ) hanged part None w, e w e eakage (Pa m /s or less) Note ) Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F) External. x 0-0 (F). x 0-8. x 0-0 (F). x 0-8 Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page for changed part. Number indicates parts number of onstruction accordingly. Note ) Part e (exterior seal) is not changeable for sizes 6 and 5. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XG--9N-XN 0 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

I ir Operated/with Solenoid Valve luminum High Vacuum ngle Valve Series XG/XGV How to Order [Option] XGV q Flange size Size 6 5 50 Note) 6 Note) 80 Note) Note) Please consult S for specifications of flange size 50, 6 and 80. r uto switch type 9N()()(Z) 9P()()(Z) 9()()(Z) 90() 9() Seal material N P Q R R R S T U w Flange type D y Rated voltage E-compliant 00 V, 50/60 Hz 00 V, 50/60 Hz 4 0 V, 50/60 Hz 0 V, 50/60 Hz 5 4 VD 6 VD Seal material F EPD arrel Perfluoro alrez hemraz Type F (NW) (DN) VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. pplicable flange 6, 5,, 50, 6, 80 6, 80 9// Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N u Type of actuation W position single position double ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 e Solenoid valve direction t Number of auto switches/ounting position Solenoid valve direction type plug connector ( power supply) not attached for of sizes 6 and 5. i Electrical entry G Grommet (ead wire length 00 mm) H Grommet (ead wire length 600 mm) type plug connector type plug connector Quantity Without auto switch pcs. pc. pc.!0 ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Surface treatment Note ) External: Hard anodized Internal: Raw material hanged part External: Hard anodized Internal: Oxalic acid anodized! E-compliant Q E-compliant XGV uto switch model D-9N()()(Z) D-9P()()(Z) D-9()()(Z) D-90() D-9() 6 9N G q w e r t y u ir operated/with solenoid valve Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) None w, e w e i S Z ounting position Valve open/closed Valve open Valve closed V V E U H V U G H o ight/surge voltage suppressor None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor U (Non-polar type) S type: Not available for. U type: D only. eakage (Pa m /s or less) Note ) Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F) o!0 External. x 0-0 (F). x 0-8. x 0-0 (F). x 0-8 Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page for changed part. Number indicates parts number of onstruction accordingly. Note ) Part e (exterior seal) is not changeable for sizes 6 and 5. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XGV--9N-G-XN Note ) Option specifications/ombinations This model has auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves position single: XGV-6, 5, : SYJ90 position double: XGV-6, 5, : SYJ90 Example) SYJ90-GS, SYJ90-GS For further details on solenoid valves, refer to Series SYJ000/5000/7000 in est Pneumatics No.. For option Q, the solenoid valve should be a E-compliant product. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com! X X Q X YV

P Series XG/XGV Specifications odel XG(V)-6 XG(V)-5 XG(V)- XG-50 XG-6 XG-80 XG-00 XG-60 Valve type Fluid Operating temperature ( ) XG XGV 5 to 50 Double acting (Dual operation), Pressurize to open/close Inert gas under vacuum 5 to 60 (High temperature type: 5 to 50) Operating pressure (Pa) tmospheric pressure to x 0-5 onductance (l/s) Note ) 5 4 45 80 60 00 00 800 eakage (Pa m /s) Internal External In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation Flange type F (NW) F (NW), (DN) Principal materials ody: luminum alloy, ain part: Stainless steel, F (Standard seal material) Surface treatment External: Hard anodized Internal: Raw material Pilot pressure (Pa) 0. to 0.6 0.4 to 0.6 Pilot port size ass (kg) XG 5 Rc/8 XGV 5: Port (P), Port (R), Port 5(R) XG 0.8 0.46..7. 5. 7.6 4.9 XGV 0. 0.5.4 Note ) onductance is the value for an elbow with the same dimensions. Note ) For valve heater specifications, refer to ommon Option [] Heater on page 55. Note ) coating of vacuum grease [Y-V] is applied to the seal-material sliding portion of the vacuum part. onstruction/operation uto switch (Option) Heater (Option) Pilot port (pressurize to close) Port 5(R) (Exhaust port) q onnet assembly (aintenance parts) (Including w, t, y, u) Plate agnet (Option) R R Port (P) (Pressure port) Port (R) (Exhaust port) Pilot port (pressurize to open) e Exterior seal (aintenance part) Solenoid valve y Shaft seal (aterial: F) u Scraper (aterial: F) With solenoid valve Shaft side exhaust t Valve (aterial: Stainless steel 04) w Valve seal (aintenance part) r ody (aterial: 606) <Working principle> y applying pressure from the pilot port P-, the pistoncoupled valve overcomes the operating force by the pressure, and the valve opens. (Pilot port P- is open) lternatively, by applying pressure to pilot port P-, the valve closes. (Pilot port P- is open) In the case of the XGV, port (P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. In the case of a double solenoid, the valve moves to the opposite side from that in which the solenoid valve is turned ON. Valve side exhaust Refer to the back of page 6 for aintenance Parts. <Options> uto switch: The magnet activates the auto switch. With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 0, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly is a heat resistant structure. This does not apply in cases where a solenoid valve is attached. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series XG/XGV Dimensions XG6, 5, / ir operated E (b) D (a) E (c) øfn (F flange) Heater (Option) uto switch (Option) X X Q X J øg H YV odel D E Note ) XG-6 XG-5 XG- 50 65 0 7 8 48 66 0 55 7 6 4 9 6 6 8 6 Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. Fn G H (mm) J XG50, 6, 80, 00, 60/ ir operated E E (b) D (a) øfn (F flange) øfd ( flange) E (c) H J øg odel XG-50 XG-6 XG-80 XG-00 XG-60 70 88 90 08 8 8 09 50 70.5 9 80 00 7 54 00 D 9 45.5 55 65 E Note ) 0.5 Fn 75 87 4 4 90 Fd 95 0 0 80 G 5 70 8 0 5 H 77 76.5 05 9 4 Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com J 9 6 44 58 6 (mm) 0.5 9 9 9.5

R R P luminum High Vacuum ngle Valve Series XG/XGV Dimensions XGV/With solenoid valve R X Port R (Exhaust port) P N In case of double solenoid valve Q X Q X Port P (Pressure port) In case of single solenoid valve YV (mm) odel XGV-6 XGV-5 XGV- 4. 5.8 9 9. 9. 9. 6.4 6.4 6.4 N.5.5.5 P.7.7.7 Q 7. 5.8.6 R 6 4 5 Other dimensions are the same as the XG. Note) For further details on solenoid valves, refer to Series SYJ000/5000/7000 in est Pneumatics No.. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com -

luminum High Vacuum ngle Valve/Double cting/ Seal Series XG ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. ade to Order Flange size: 00 54 00 85 H I GH 54 00 U VU t w e V VE r 0. 69 0 87 ead wire length: 500 mm ( type: 000 mm) y Pilot port: Rc/8 ø0 ø ø4 q 08 ø0 ø 0. - ø4 08 JIS05 JISZ807 omponent Parts No. Description aterial Remarks - 4 5 6 ody onnet assembly Hexagon socket head cap screw omputer name plate uto switch 606 F Stainless steel F X00-S-X898 S568-49V, l = 0 S568-050V 4 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series XG How to Order Valve XG 00 9N X0 Flange: aintenance Parts Flange side Temperature specifications Temperature 5 to 60 H0 5 to 50 Number of auto switches/ounting position Quantity Without auto switch pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed uto switch type (Operating temperature 5 to 60 ) 9N()()(Z) 9P()()(Z) 9()()(Z) uto switch model D-9N()()(Z) D-9P()()(Z) D-9()()(Z) Switch type Without auto switch (without built-in magnet) Solid state auto switch 90() D-90() 9() D-9() Reed auto switch 9// Without auto switch (with built-in magnet) Note) Types with auto switches are not available in case of high temperature types. Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. X X Q X YV w onnet ssembly Part No. XG00-0-H 9N X0 onnet assembly Temperature Part no. 5 to 60 XG00-0- 5 to 50 XG00-0-H Same as How to Order. Specifications Valve type Shaft seal type Operating pressure range Fluid Internal leakage External leakage Operating temperature onductance Operating pressure Flange Double acting seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum. x 0-9 Pa m /s or less. x 0-9 Pa m /s or less 5 to 60 (Option: 5 to 50 ) 00 l/s 0.4 to 0.6 Pa F00 Values at normal temperature, excluding gas permeation. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 5

luminum High Vacuum ngle Valve/Double cting/ Seal Series XG ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. ade to Order Flange size: 60 00 7 8 H I 00 7 t w GH VU U VVE ead wire length: 500 mm ( type: 000 mm) y Pilot port: Rc/8 e r 56 75 0. 8 ø5 ø88 ø90 6 q ø5 0. - ø88 ø90 8 JIS05 JISZ807 omponent Parts No. Description aterial Remarks - 4 5 6 ody onnet assembly Hexagon socket head cap screw omputer name plate uto switch 606 F Stainless steel F X60-S -G55V 0, l = S568-67V 6 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series XG How to Order Valve aintenance Parts XG 60 9N X0 Flange: Flange side Temperature specifications Temperature 5 to 60 H0 5 to 50 Number of auto switches/ounting position Quantity Without auto switch pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed uto switch type (Operating temperature 5 to 60 ) 9N()()(Z) 9P()()(Z) 9()()(Z) uto switch model D-9N()()(Z) D-9P()()(Z) D-9()()(Z) Switch type Without auto switch (without built-in magnet) Solid state auto switch 90() D-90() 9() D-9() Reed auto switch 9// Without auto switch (with built-in magnet) Note) Types with auto switches are not available in case of high temperature types. Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. X X Q X YV w onnet ssembly Part No. XG60-0-H 9N X0 onnet assembly Temperature Part no. 5 to 60 XG60-0- 5 to 50 XG60-0-H Same as How to Order. Specifications Valve type Shaft seal type Operating pressure range Fluid Internal leakage External leakage Operating temperature onductance Operating pressure Flange Double acting seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum. x 0-9 Pa m /s or less. x 0-9 Pa m /s or less 5 to 60 (Option: 5 to 50 ) 800 l/s 0.4 to 0.6 Pa F60 Note) Values at normal temperature, excluding gas permeation. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 7

luminum High Vacuum ngle Valve/Double cting/ Seal Series XG ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. ade to Order With ypass Valve (Flange size: 80) () 48.5 7 45.5 7 () () e Shaft seal (F) Scraper (F) Pilot port: 5 (ax. ) 7.5 u o t w ø8 ø ø4 90 X-6 -X65 0. r 0. 9 ø8 ø4 05 44 90 - q ead wire length: 500 mm ( type:,000 mm) ( type:,000 mm) (Z type: 5,000 mm) 50 F flange ø8 ø0 omponent Parts No. Description aterial Remarks - 4 5 6 ody onnet assembly Hexagon socket head cap screw omputer name plate uto switch 606 SS Refer to maintenance parts Refer to maintenance parts 0, l = 0 Option 7 High vacuum angle valve (ypass valve) Refer to maintenance parts 7-7- 8 9 Hexagon socket head cap screw Stainless steel 4, l = 8 flange ypass valve adjustment nut (Initial exhaust) djustment pitch: mm/rotation ock nut Width across flats 7- Part No. Seal material symbol N P Q R R R S T U Part No. Seal material symbol N P Q R R R S T U 7- i Internal seal - -V85V -V85-XN -V85-XP -V85-XQ -V85-XR -V85-XR -V85-XR -V85-XS -V85-XT -V85-XU y Pilot port: Rc/8 External seal r S568-045V S568-045-XN S568-045-XP S568-045-XQ S568-045-XR S568-045-XR S568-045-XR S568-045-XS S568-045-XT S568-045-XU Internal seal 7- External seal 7- External seal i -V5V S568-05V S568-07V -V5-XN S568-05-XN S568-07-XN -V5-XP S568-05-XP S568-07-XP -V5-XQ S568-05-XQ S568-07-XQ -V5-XR S568-05-XR S568-07-XR -V5-XR S568-05-XR S568-07-XR -V5-XR S568-05-XR S568-07-XR -V5-XS S568-05-XS S568-07-XS -V5-XT S568-05-XT S568-07-XT -V5-XU S568-05-XU S568-07-XU Note) coating of vacuum grease (fluorinated grease: Y-V) is applied to the shaft seal, scraper and i. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series XG Flange type D Type F (NW) (DN) 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9() D-9() 9// How to Order Valve XGR 80 X ain valve: Flange side Flange: Temperature specifications Temperature Heater 5 to 60 H0 5 to 50 uto switch type (Operating temperature 5 to 60 ) uto switch model Switch type Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Note) Types with auto switches are not available in case of high temperature types. Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. aintenance Parts q ody Part No. XR80 ypass valve mounting position/ ounting position eft flange surface Right flange surface Rear flange surface Flange: Number of auto switches/ounting position Quantity ounting position Without auto switch pcs. Valve open/closed pc. Valve open pc. Valve closed S ypass valve mounting position/ body part no. ounting position ody part no. XR80-S- XR80-S- XR80-S- Flange: w onnet ssembly Part No. XG80-0-H- 9N-XN onnet assembly Temperature Part no. 5 to 60 XG80-0-- 5 to 50 XG80-0-H- Same as How to Order. Flange side Flange side Seal material Seal material N P Q R R R S T U F EPD arrel Perfluoro alrez hemraz VQ F FOR PS UTI ROR ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of DuPont Performance Elastomers. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. When the seal material is not being changed, there is no need to select a symbol. Seal material changed part hanged part eakage (Pa m /s or less) Note) Internal External None. x 0-9 (F). x 0-9 (F) - 7- r 7- i. x 0-7. x 0-7 - 7-. x 0-7. x 0-9 (F) r 7- i. x 0-9 (F). x 0-7 Note) Values at normal temperature, excluding gas permeation. i ypass Valve Part No. X Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) Specifications Valve type Shaft seal type Operating pressure range Fluid Operating temperature onductance Operating pressure Flange ass 6 X65 Temperature specifications Temperature 5 to 60 H0 5 to 50 Seal material changed part hanged part None 7-7- 7-7- Seal material: Same as the seal materials of How to Order Valve. ain valve: Double acting ypass valve: Normally closed seal ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 00 l/s ax. 5 l/s (alculated value) 0.4 to 0.6 Pa F80, 80 4.9 kg onductance is the value for the molecular flow of an elbow with the same dimensions. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 9 X X Q X YV

luminum High Vacuum ngle Valve/Double cting/ Seal Series XG ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. ade to Order With ypass Valve (Flange size: 00) () 54 85 55 54 () () Shaft seal (F) Scraper (F) Pilot port: 5 (ax. ) 7.5 t w e X-6 -X65 r 0. 9 ø0 ø4 9 58 70.5 ead wire length: 500 mm ( type:,000 mm) ( type:,000 mm) (Z type: 5,000 mm) ø0 ø0 ypass valve adjustment thread (Initial exhaust) djustment pitch: mm/rotation ock nut Width across flats 7- y Pilot port: Rc/8 u o ø0 ø ø4 08 0. - q 08 F flange flange Part No. Seal material symbol N P Q R R R S T U omponent Parts No. Description aterial Remarks Part No. - 4 5 6 ody onnet assembly Hexagon socket head cap screw omputer name plate uto switch 606 SS Refer to maintenance parts Refer to maintenance parts, l = 0 Option 7 7-7- 8 9 High vacuum angle valve (ypass valve) Hexagon socket head cap screw Stainless steel Refer to maintenance parts 4, l = Seal material symbol N P Q R R R S T U 7- i Internal seal - S568-49V S568-49-XN S568-49-XP S568-49-XQ S568-49-XR S568-49-XR S568-49-XR S568-49-XS S568-49-XT S568-49-XU External seal r S568-050V S568-050-XN S568-050-XP S568-050-XQ S568-050-XR S568-050-XR S568-050-XR S568-050-XS S568-050-XT S568-050-XU Internal seal 7- External seal 7- External seal i -V5V S568-05V S568-07V -V5-XN -V5-XP -V5-XQ -V5-XR -V5-XR -V5-XR -V5-XS -V5-XT -V5-XU S568-05-XN S568-05-XP S568-05-XQ S568-05-XR S568-05-XR S568-05-XR S568-05-XS S568-05-XT S568-05-XU S568-07-XN S568-07-XP S568-07-XQ S568-07-XR S568-07-XR S568-07-XR S568-07-XS S568-07-XT S568-07-XU Note) coating of vacuum grease (fluorinated grease: Y-V) is applied to the shaft seal, scraper and i. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series XG Flange type XGR aintenance Parts q ody Part No. XGR00 S w onnet ssembly Part No. XG00-0-H- 9N-XN onnet assembly Temperature 5 to 60 5 to 50 00 Part no. XG00-0-- XG00-0-H- Same as How to Order. Type ain valve: D F (NW) (DN) Flange side Flange: Temperature specifications Temperature Heater 5 to 60 H0 5 to 50 uto switch type (Operating temperature 5 to 60 ) uto switch model Switch type Without auto switch ypass valve mounting position/ (without built-in magnet) ounting position 9N()()(Z) D-9N()()(Z) Solid state 9P()()(Z) D-9P()()(Z) auto switch 9()()(Z) D-9()()(Z) 90() D-90() Reed auto switch 9() D-9() 9// Without auto switch (with built-in magnet) Note) Types with auto switches are not available in case of high temperature types. Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Number of auto switches/ounting position Quantity pcs. pc. pc. ounting position Without auto switch Valve open/closed Valve open Valve closed ypass valve mounting position/ body part no. ounting position ody part no. XGR00-S- XGR00-S- XGR00-S- Flange: Flange: eft flange surface Right flange surface Rear flange surface i ypass Valve Part No. X 6 X65 How to Order Valve Specifications Valve type Shaft seal type Operating pressure range Fluid Operating temperature onductance Operating pressure Flange ass X Flange side Flange side Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) Temperature specifications Temperature 5 to 60 H0 5 to 50 Seal material Seal material N P Q R R R S T U F EPD arrel Perfluoro alrez hemraz VQ F FOR PS UTI ROR ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of DuPont Performance Elastomers. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. When the seal material is not being changed, there is no need to select a symbol. Seal material changed part hanged part eakage (Pa m /s or less) Note) Internal External None. x 0-9 (F). x 0-9 (F) - 7- r 7- i. x 0-7. x 0-7 - 7-. x 0-7. x 0-9 (F) r 7- i. x 0-9 (F). x 0-7 Note) Values at normal temperature, excluding gas permeation. Seal material changed part hanged part None 7-7- 7-7- Seal material: Same as the seal materials of How to Order Valve. ain valve: Double acting ypass valve: Normally closed seal ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 00 l/s ax..5 l/s (alculated value) 0.4 to 0.6 Pa F00, 00 8. kg onductance is the value for the molecular flow of an elbow with the same dimensions. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 4 X X Q X YV

luminum High Vacuum ngle Valve/Double cting/ Seal Series XG ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. ade to Order With ypass Valve (Flange size: 60) () 00 8 65 () 00 () t w e Shaft seal (F) Scraper (F) Pilot port: 5 X-6 -X65 r 0..5 4 6 ead wire length: 500 mm ( type:,000 mm) ( type:,000 mm) (Z type: 5,000 mm) 9 ypass valve adjustment thread (Initial exhaust) djustment pitch: mm/rotation ock nut Width across flats y Pilot port: Rc/8 (ax. ) 7.5 u o ø5 ø88 ø90 8 0. ø5 ø90 - q 8 F flange omponent Parts No. Description aterial Remarks - 4 5 6 ody onnet assembly Hexagon socket head cap screw omputer name plate uto switch 606 SS Refer to maintenance parts Refer to maintenance parts 0, l = 0 Option 7 High vacuum angle valve (ypass valve) Refer to maintenance parts 7-7- 8 9 Hexagon socket head cap screw Stainless steel 4, l = 4 ø5 ø80 flange Part No. Seal material symbol N P Q R R R S T U Part No. Seal material symbol N P Q R R R S T U 7-7- i Internal seal - -G55V -G55-XN -G55-XP -G55-XQ -G55-XR -G55-XR -G55-XR -G55-XS -G55-XT -G55-XU External seal r S568-67V S568-67-XN S568-67-XP S568-67-XQ S568-67-XR S568-67-XR S568-67-XR S568-67-XS S568-67-XT S568-67-XU Internal seal 7- External seal 7- External seal i -V5V S568-05V S568-07V -V5-XN -V5-XP -V5-XQ -V5-XR -V5-XR -V5-XR -V5-XS -V5-XT -V5-XU S568-05-XN S568-05-XP S568-05-XQ S568-05-XR S568-05-XR S568-05-XR S568-05-XS S568-05-XT S568-05-XU S568-07-XN S568-07-XP S568-07-XQ S568-07-XR S568-07-XR S568-07-XR S568-07-XS S568-07-XT S568-07-XU Note) coating of vacuum grease (fluorinated grease: Y-V) is applied to the shaft seal, scraper and i. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series XG Flange type D XGR Type F (NW) (DN) aintenance Parts q ody Part No. XR60 S 60 ain valve: Flange side Flange: Temperature specifications Temperature Heater 5 to 60 H0 5 to 50 ypass valve mounting position/ body part no. ounting position ody part no. XR60-S- XR60-S- XR60-S- Flange: w onnet ssembly Part No. XG60-0-H- 9N-XN onnet assembly Temperature Part no. 5 to 60 XG60-0-- 5 to 50 XG60-0-H- Same as How to Order. uto switch type (Operating temperature 5 to 60 ) uto switch model Switch type Without auto switch ypass valve mounting position/ (without built-in magnet) 9N()()(Z) D-9N()()(Z) Solid state ounting position 9P()()(Z) D-9P()()(Z) auto switch Flange side 9()()(Z) D-9()()(Z) eft flange 90() D-90() surface Reed auto switch 9() D-9() Flange side 9// Without auto switch (with built-in magnet) Right flange surface Note) Types with auto switches are not available in case of high temperature types. Standard lead wire length is 0.5 m. dd to Rear flange the end of the part number when m is desired, when m, and Z when 5 m. surface Number of auto switches/ounting position Flange: Quantity pcs. pc. pc. ounting position Without auto switch Valve open/closed Valve open Valve closed i ypass Valve Part No. X 6 X65 How to Order Valve Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) Temperature specifications Temperature 5 to 60 H0 5 to 50 Specifications Valve type Shaft seal type Operating pressure range Fluid Operating temperature onductance Operating pressure Flange ass X hanged part Seal material Seal material N P Q R R R S T U F EPD arrel Perfluoro alrez hemraz VQ F FOR PS UTI ROR ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of DuPont Performance Elastomers. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. When the seal material is not being changed, there is no need to select a symbol. Seal material changed part eakage (Pa m /s or less) Note) Internal External. x 0-9 (F). x 0-9 (F). x 0-7. x 0-7. x 0-7. x 0-9 (F). x 0-9 (F). x 0-7 None - 7- r 7- i - 7- r 7- i Note) Values at normal temperature, excluding gas permeation. Seal material changed part hanged part None 7-7- 7-7- Seal material: Same as the seal materials of How to Order Valve. ain valve: Double acting ypass valve: Normally closed seal ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 800 l/s ax..5 l/s (alculated value) 0.4 to 0.6 Pa F60, 60 5.7 kg onductance is the value for the molecular flow of an elbow with the same dimensions. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 4 X X Q X YV

luminum High Vacuum ngle Valve -Step ontrol, Single cting/ellows Seal, Seal PT. Series XD/XDV How to Order XD 5 9N q w e r t y u XD q Flange size Size 5 50 6 80 w Flange type Type F (NW) D (DN) pplicable flange 5,, 50, 6, 80 6, 80 e Flange side Flange side r Temperature specifications/heater High H0 temperature H type H Temperature 5 to 60 5 to 50 Note) Size 5 is not applicable for H. Heater With 00 heater With 0 heater y Number of auto switches/ounting position Quantity Without auto switch pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed t uto switch type 9N()()(Z) 9P()()(Z) 9()()(Z) 90() 9() 9// uto switch model D-9N()()(Z) D-9P()()(Z) D-9()()(Z) D-90() D-9() Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) uto switches are not applicable for high temperature specifications (Temperature specifications H0, H, H). Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N u ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Seal material N P Q R R R S T U Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 Note ), ) hanged eakage (Pa m /s or less) Note ) part Internal External None w, e, r, t w, r, t e. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F). x 0 - (F). x 0-9. x 0 - (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page 47 for changed part. Number indicates parts number of onstruction accordingly. Note ) hanges to seal material for part no. r S valve seal assembly are only applicable for sizes 5, and 50. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XD-5-9N-XN 44 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

ir Operated/with Solenoid Valve luminum High Vacuum ngle Valve Series XD/XDV How to Order [Option] XDV q Flange size Size 5 50 6 80 9N()()(Z) 9P()()(Z) 9()()(Z) 90() 9() 9// D-9N()()(Z) D-9P()()(Z) D-9()()(Z) XDV w Flange type Type F (NW) D (DN) r uto switch type uto switch model D-90() D-9() 5 9N q w e r t y ir operated/with solenoid valve pplicable flange 5,, 50, 6, 80 6, 80 Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N type is not available for size 5. G e Solenoid valve direction u Solenoid valve direction i o t Number of auto switches/ounting position Quantity Without auto switch pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed!0 X X Q X YV y Rated voltage E-compliant 00 V, 50/60 Hz 00 V, 50/60 Hz 4 0 V, 50/60 Hz 0 V, 50/60 Hz 5 4 VD 6 VD o ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Surface treatment Note ), ) eakage (Pa m /s or less) Note ) hanged External: Hard anodized Internal: Raw material part Internal External External: Hard anodized Internal: Oxalic acid anodized None. x 0-0 (F). x 0 - (F) w, e, r, t w, r, t e. x 0-8. x 0-8. x 0-0 (F). x 0-9. x 0 - (F). x 0-9 Seal material N P Q R R R S T U Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. u Electrical entry G Grommet (ead wire length 00 mm) H Grommet (ead wire length 600 mm) type plug connector type plug connector ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 i ight/surge voltage suppressor S Z U None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (Non-polar type) S type: Not available for. U type: D only.!0 E-compliant Q E-compliant Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page 47 for changed part. Number indicates parts number of onstruction accordingly. Note ) hanges to seal material for part no. r S valve seal assembly are only applicable for sizes 5, and 50. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XDV-5-9N-G-XN Note ) Option specifications/ombinations This model has auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves ain exhaust odel Initial exhaust valve valve Example XDV-5 V4 V4-GS V4 XDV-/50/6/80 SYJ4 SYJ4-GS For further details on solenoid valves, refer to Series V00 and Series SYJ00/500/700 in est Pneumatics No.. For option Q, the solenoid valve should be a E-compliant product. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 45

Series XD/XDV Specifications odel XD(V)-5 XD(V)- XD(V)-50 XD(V)-6 XD(V)-80 Valve type Fluid Operating temperature ( ) Operating pressure (Pa) Normally closed (Spring Return and seal) [oth main & initial exhaust valves] Inert gas under vacuum tmospheric pressure to x 0-6 XD 5 to 60 (High temperature type: 5 to 50) XDV 5 to 50 onductance (l/s) Note ) ain exhaust valve Initial exhaust valve 4 0.5 to 45 to 8 80.5 to 60 4 to 8 00 4 to 8 Internal In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation eakage (Pa m /s) External In case of standard material F:. x 0 - at normal temperature, excluding gas permeation Flange type F (NW) F (NW), (DN) Principal materials Note ) ody: luminum alloy, ellows: Stainless steel 6, ain part: Stainless steel, F (Standard seal material) Surface treatment External: Hard anodized Internal: Raw material Pilot pressure (Pa) Pilot port size ass (kg) 0.4 to 0.7 [oth main & initial exhaust valves] XD XD 5 0.5 Rc/8..8.4 5.6 XDV XDV 0.57 5: Port (P), Port (R)..9.5 5.7 Note ) The main exhaust valve conductance is the valve for the molecular flow of an elbow with the same dimensions. The initial exhaust valve conductance is the value for the viscous flow. Note ) For valve heater specifications, refer to ommon Option [] Heater on page 55. Note ) coating of vacuum grease [Y-V] is applied to the seal-material sliding portion (initial exhaust valves sliding parts) of the vacuum part. 46 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve Series XD/XDV onstruction/operation With solenoid valve Initial exhaust solenoid valve djustment nut (External knurling product) Valve open adjustment for initial exhaust) agnet (Option) uto switch (Option) q onnet assembly (aintenance parts) (Including w, r, t, u, i, o,!0) Port (R) (Exhaust port) ain exhaust solenoid valve Initial exhaust solenoid valve ain exhaust solenoid valve XDV-5 Port (P) (Supply port) Plate Port (R) (Exhaust port) Port (P) (Pressure port) ellows holder!0 (aterial: Stainless steel 04) Heater (Option) ellows o (aterial: Stainless steel 6) for S Valve sliding (aterial: F) for fixing t Valve u (aterial: Stainless steel 04) ody y (aterial: 606) S Valve i (aterial: Stainless steel 04) ellows side exhaust Valve side exhaust Refer to the back of page 6 for aintenance Parts. for S valve sliding Pilot port S (for initial exhaust valve) Pilot port (for main exhaust valve) e Exterior seal (aintenance part) w Valve seal (aintenance part) r S Valve seat assembly (aintenance parts) (aterial: Stainless steel 04 + Sealant) X X Q X YV XDV- to 80 t <Working principle> z Initial exhaust valve opening adjustment The initial exhaust rate should be adjusted before operation, with the pilot port S in an unpressurized state. The initial exhaust rate is set to zero by gently turning the adjustment nut to the right until it stops. (Do not use any tools.) The initial exhaust rate is adjusted by turning the nut to the left. x Opening of the initial exhaust valve (valve S) When pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount. When the initial exhaust solenoid valve is turned ON and pressure is constantly applied to port (P) on model XDV, the valve opens the adjusted amount. c Opening of the main exhaust valve (valve ) When pressure is applied to the pilot port, the valve is removed from the body sheet portion, and the valve fully opens. When the initial exhaust solenoid valve is turned ON and pressure is constantly applied to port (P) on model XDV, the valve fully opens. v losing of the initial exhaust / main exhaust valves y removing pressure from pilot port S and pilot port, both S and valves revert to their previous positions and are sealed. y turning OFF the initial exhaust valve and main exhaust valve on model XDV, both valves revert to their previous position and are sealed. <Options> uto switch: (for main exhaust valve Heater: Note) fter the opening adjustment of the initial exhaust valve, it will be lightly locked in place and will not rotate. To fix it in place, please tighten with the tightening torque shown in the below table. (Tightening with excessive torque can result in damaged components or the generation of abnormal noise.) Initial exhaust valve conductance l/s (viscous flow) 0 5 0 5 0 5 0 0 XD-5 XD-50 XD- XD-6 XD-80 0.5.5.5.5 4 4.5 5 5.5 6 6.5 7 djustment nut rotations n Initial exhaust valve conductance The magnet actuates the auto switch. With two auto switches, the open and closed positions are detected, and with one auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 0, depending on the heater option and valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly is a heat resistant structure. This is not available with solenoid valve. Section Thread Tightening Torque odel XD(V)-5 XD(V)- XD(V)-50 XD(V)-6 XD(V)-80 Tightening torque 0.08 N m (0.8 kgf cm) or less 0. N m ( kgf cm) or less i r ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 47

Series XD/XDV Dimensions XD/ir operated (b) D E (a) øfn (F flange) øfd ( flange) E (c) Heater (Option) S J H uto switch (Option) øg odel XD-5 XD- XD-50 XD-6 XD-80 50 65 70 88 90 70 8 7 56 48 66 79 00 7 D Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. E Fn 55 75 87 4 Fd 95 0 G 6 4 5 70 8 H 4 6 68 7 98 J 6 0 0 0 0 (mm) 7.5 5 7.5 0 6.5 48 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

XDV- to 80/With solenoid valve øfn (F flange) luminum High Vacuum ngle Valve Series XD/XDV Dimensions XDV-5/With solenoid valve 88.5 48 74 57.6 (For ) 55.4 (For D) 48 UUVV GHV E I H ø (F flange) X (8.5) X Q. 8.5 7.5 max. X Initial exhaust solenoid valve 5 Port (R) (EXH) (Exhaust port) 4.5 ø6 øfd ( flange).5 5 Port (P) (Pressure port) 49.4 50 50 5 Port (R) (Exhaust port) uto switch (Option) Initial exhaust solenoid valve N 5.5 YV ain exhaust solenoid valve ain exhaust solenoid valve 5 Port (P) (Pressure port) øg 8.5 8.5 odel Fn Fd G N XDV- 65 70 66 55 4 48.5 5.5 XDV-50 70 8 79 75 5 55 57.5 XDV-6 88 7 00 87 95 70 66.5 7. XDV-80 90 56 7 4 0 8 75 8.6 (mm) 5 7.5 0 6.5 Note) For further details on solenoid valves, refer to Series V00 and Series SYJ00/500/700 in est Pneumatics No.. 49 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

luminum High Vacuum ngle Valve anual/ellows Seal Series XH RoHS XH XH 6 q w e w Heater H H Heater With 00 heater With 0 heater pplicable flange size 6 5 50 eody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Seal material N P Q R R R S T U Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. Specifications High vacuum manual angle valve (ellows seal) q Flange size Size 6 5 50 ompound No. 49-80 0-80 70W 79 SS59 SS60 SSE8-70 0-75 U46 How to Order Note ) hanged part None w, e w e eakage (Pa m /s or less) Note ) Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F) External. x 0 - (F). x 0-9. x 0 - (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note ) Refer to parts number of onstruction on page 5 for changed part. Number indicates parts number of onstruction accordingly. To order something other than (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed part. Example) XH-6-XN odel XH-6 XH-5 XH- Valve type Fluid ( ) Operating pressure (Pa) Inert gas under vacuum 5 to 50 tmospheric pressure to 0-6 onductance (l/s) Note ) 5 4 45 XH-50 Internal In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation eakage (Pa m /s) External In case of standard material F:. x 0 - at normal temperature, excluding gas permeation Flange type F (NW) Principal materials ody: luminum alloy, ellows: Stainless steel 6, ain part: Stainless steel, F (Standard seal material) Surface treatment External: Hard anodized Internal: Raw material ctuation torque (N m) 0. 0.5 0.5 0.5 Handle revolutions 5 7 0 ass (kg) 0. 0.4.05.6 Note ) The conductance is the same as that of an elbow of the same dimensions. Note ) For valve heater specifications, refer to ommon Option [] Heater on page 55. 50 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com 80

luminum High Vacuum ngle Valve Series XH onstruction/operation Indicator Handle assembly (aintenance parts) q (Including w, t, y, u) Heater (Option) Valve side exhaust u ellows holder (aterial: Stainless steel 04) e Exterior seal (aintenance part) y ellows (aterial: Stainless steel 6) ellows side exhaust t Valve (aterial: Stainless steel 04) w Valve seal (aintenance part) r ody (aterial: 606) Refer to the back of page 6 for aintenance Parts. X X Q X YV <Working principle> y turning the handle to the left, the valve opens. The handle does not move up and down, but the indicator shows the open or closed position of the valve. s the handle is turned to the right, the valve closes, and when the turning force of the handle suddenly ceases to be felt, the valve is sealed. The sealing force for the valve comes from the spring, and is constant. <Options> Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 0, depending on the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. Indicator: When the valve is open, an orange marker appears in the center of the name plate. Dimensions E (b) D øf E E (a) (c) øh øg odel XH-6 XH-5 XH- XH-50 50 65 70 00.5 4 6.5 79.5 8 48 66 79 D E Note ) Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com F 0 55 75 G 7 6 4 5 (mm) H 5 4 57 70 5

luminum High Vacuum ngle Valve Electromagnetic/ellows Pressure alance Series XS RoHS How to Order Electrical entry G T D Grommet onduit Terminal DIN terminal 5 9 Starting voltage 4 VD Others (48, 00 VD) Note) Holding voltage is 5% of starting voltage. E compliant Q Note) E compliant Note) DIN terminal D only for 00 VD Without control power supply With control power supply XS 5 5 G XS 5 P G High vacuum angle valve (ellows pressure balance, -stage voltage switching type) 6 5 Valve size F6 F5 ontrol power supply P With control power supply Electrical entry G Grommet Voltage 00 V 00 V 5 4 VD Warning () In case there is no control power supply (XS-5- : 4/48/00 VD), starting voltage should be applied for only 0.5 to 0. s, in accordance with the prescribed method (indicated on the back of the coil). ontinuously applying starting voltage can cause overheating of the coil and fire. Holding voltage is 5% of the starting voltage (the application method is shown on the back of the solenoid coil). Example) Starting voltage Voltage 6 VD 4 VD Holding voltage 0.5 to 0. Time (s) 5 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San Francisco, 980-670-ain Office: (650) 588-900-Outside ocal rea: (800) 58-900-www.stevenengineering.com

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