Systems. Systems. Pneumatic components for clean room specifications. Reduced wiring control system SAVE NET. Coolant proof component.

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Systems Page Pneumatic components for clean room specifications Reduced wiring control system SAVE NET Coolant proof component 4 4 Systems Ozone proof component JIS symbol New product 4G4 Series Index

Systems Pneumatic components for clean room specifications Pneumatic components for clean room specification Catalog No. CB-033SA Compatible with a diverse range and level of clean room cleanliness Pneumatic cylinder Electric driven slider Directional switching valve F.R.unit Auxiliary components Electronics components Valve for air blow Ver. Catalog No.CB-033SA Accurately producing ultra clean air Model circuit for clean blow system Inside clean room Differential pressure gauge Pressure gauge Main line filter Filter Flow rate sensor Solenoid valve for air blow Needle valve Final filter Exhaust treatment Oil removing filter Regulator Clean air blow is ensured by installing a final filter at the end.

Systems Zero particle generation with vacuum and exhaust treatment Circuit configuration for pneumatic actuators Inside clean room Differential pressure gauge Differential pressure gauge Pressure gauge Standard cylinder Screw air compressor Refrigerating dryer Filter Filter Cylinder Main line filter Oil removing filter Oil removing filter Regulator Switching valve Speed control valve Standard cylinder Exhaust treatment Cylinder Exhaust treatment Speed control valve P7 Series P5 Series Double rod packing is incorporated. Dust is exhausted outside the clean room from the pipe connected to the relief port at the middle section. Switching valve Vacuum treatment P7 Series P5 Series A relief port is provided at the sliding section of the piston rod on the outer side of rod packing. Dust is vacuumed from this port and forced out and exhausted. Vacuum treatment Guided cylinder Speed control valve Guided cylinder Low particle generating exhaust treatment Switching valve P7 Series P5 Series Double rod packing is incorporated as with the standard cylinder. Dust is exhausted outside the clean room from the pipe connected to the relief port at the middle section. Low-dust grease is used in the sliding section (piston rod, guide rod). Exhaust treatment Cylinder Speed control valve Low particle generating vacuum treatment P73 Series P53 Series As with the standard cylinder, a relief port is provided at the sliding section of the piston rod on the outside of rod packing. Dust is vacuumed from this port and forced out and exhausted. Low-dust grease is used in the sliding section (piston rod, guide rod). Vacuum treatment Switching valve Cylinder Systems 3

4 MEMO

Ozone proof component Page Effect of Ozone 6 Ozone Proof Component Selection Guide 7 Compliance of Product Groups 8 Ozone proof component 5

Factory environments easily affected by ozone High rates of lightning (electrical discharge) Clean air Plant Strong sun Down wash (in-flow) Turbo compressor (Dry air) Inlets and lakes (reflection) Pneumatic components affected by ozone Diaphragm and valve seat of regulator Valve seat of air blow valve Hose for piping Repeated stress accelerates rubber deterioration High flow of air at orifice 6

Ozone Proof Component Selection Guide A typical pneumatic component consists of the following devices: Devices in the dotted box require ozone measures. Compressed air source Compressed air cleaner Control unit Actuator Compressor Main line filter Valve After cooler Regulator Cylinder Tank Dryer Filter Lubricator Range for selecting ozone proof components Filter Speed control valve Ejector Pad Safety precautions Ozone-proof components use fluorine rubber or hydrogen nitrile rubber for rubber parts. Special working environment and working conditions different from the standard part are considered when evaluating performance and life. Ozone proof component 7

Compliance of Product Groups. Pneumatic cylinder Compatible with standard specifications. Pneumatic valves Pneumatic valves are available as indicated below. Option Ozone proof specifications are available as an option. -P Parts are available as ozone-proof specifications by adding -P to the end of the model. (Custom order) Ozone countermeasures The material of rubber parts differs from that of standard parts. (Dimension drawings are the same as for standard parts. ) Optional models Series 4G Series W4G Series MN4E0 Series 4, 5 port valve 3 port valve 4, 5 port valve 3 port valve 4 port valve 3 port valve A 4G * Model no. B A M4G B* A MN4G B* A 3G B* A M3G B * A MN3G * B W4GB* A MW4G B * Z MW3GA* MN4E0* MN3E0* How to order Selectable with option symbol A Example: Discrete [Model No.] [Solenoid position] - [Port size] - [Erectric connection] [Option] A - [Voltage] Example: Manifold [Model No.] [Solenoid position] - [Port size] - [Erectric connection] [Option] A - [Station No.] - [Voltage] -P applicable model Series 4S0 Series 4S Series MN4S0 Series 4K Series 3M Series 3P Series 5 port valve 5 port valve 3 port valve 4 port valve 3 port valve 4, 5 port valve 3 port valve 3 port valve 3 port valve A 4S 0* A M4S B0* A 4S B* A M (D) 4S B* 3SA* M (D) 3SA* MN4S0* MT4S0* MN3S0* MT3S0* A 4K B* A M4K B* MN4KB* 3KA* M3KA* A 3M B0* A M3M B0* 3P B* Model no. B A A M3P B * How to order Available by adding -P to the end of the model. (Custom order) Example: Discrete [Model No.] [Solenoid position] - [Port size] - [Manual override] [Erectric connection] [Option] - [Voltage] - P Example: Manifold [Model No.] [Solenoid position] - [Port size] - [Manual override] [Erectric connection] [Option] - [Station No.] - [Voltage] - P 8

3. Refining and Pressure Adjusting Components (FRL) Refer to How to Order for each device ( 0 to 9). 4. Pneumatic auxiliary components Pneumatic auxiliary components are available as follows: Option Ozone proof specifications are available as an option. -P Parts are available as ozone-proof specifications by adding -P to the end of the model. (Custom order) Ozone countermeasures The material of rubber parts differs from that of standard parts. (Dimension drawings are the same as for standard parts. ) Optional models Series Speed control valve Medium bore size type Model no. SC How to order Selectable with option symbol "X". SC - [Port size] - X -P applicable model Series Speed control valve Direct piping elbow type Speed control valve Elbow type, push-in joint Miniature joint Joint Stainless steel type joint Model no. SC3R SC3W F GW ZW How to order SC3R - [Port size] - [Option] P SC3W - [Port size] - [Applicable tube] - [Option] P F [Shape] [Flow path shape] [Applicable tube] - [Port size] - P GW [Shape] [Applicable tube] - [Port size] - [Other combination] - P ZW - [Shape] [Applicable tube] - [Port size] - P * The following models are available as standard parts: Speed control valve SCL/SCD series, silencer SLM/SLW series, stainless steel type joint ZJ series, tube F.U.KX 5. Sensors * The following models are available as standard parts: Mechanical pressure switch (reed type small pressure switch) P*00 Series Pressure switch P4000 Series Ozone proof component 9

Filter regulator: Ozone proof W000/W3000 W4000/W8000-P Series Fluorine rubber and hydrogen nitrile rubber, etc is used for rubber part material. Port size: Rc/8 to Rc JIS symbol How to order A Model no. W000 A Model no. 6 Z P A6 B Port size Ozone proof Specifications G49P B Symbol Port size 6 8 0 5 0 5 /8 /4 3/8 / 3/4 Descriptions W 0 0 W 30 0 W 40 0 W 80 0 C Piping thread type C Piping thread type Blank Rc thread N NPT thread G G thread Note 9 0 Note on model no. selection Note : Refer to "Pneumatic, Vacuum and Auxiliary Components (Catalog No. CB-04SA)" for specifications and attachments. Note : Select options per drainage, bowl material, element, differential pressure detection, and regulator sections. When selecting options for several items, list options in order from the top. Note 3: If "L" is selected for pressure range, a low pressure gauge (0-0.4 MPa) is provided. Note 4: Min. operating pressure is 0. MPa automatic drain for option symbol "F". Purge air with initially generated drain until pressure rising to 0. MPa. Note 5: Min. operating pressure of automatic drain is 0.5 MPa for option symbol "F". Note 6: For "T", a gauge plug is assembled instead of a pressure gauge. Note 7: A piping adaptor set A*00-** is attached. Note 8: The piping adapter set and C bracket cannot be used together. Note 9: G threads and NPT threads are available for IN, OUT, gauge port, and drain discharge port (metal bowl with automatic drain). Note 0: The adaptor port size can be selected from Rc, NPT or G. Blank: Rc thread, N: NPT thread, G: G thread. (Example) A8G Note : If NPT is selected for the C piping thread, an NPT pressure gauge is enclosed. If an Rc or G thread is selected, an R thread pressure gauge is enclosed. Dimensions D Option Note Note 3 Note 4 Note 5 Note 6 Display unit F Piping adapter set (Attached) Note 7 Note 8 G Attachment Same as standard products. Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)." E D Option Blank With manual drain cock F Automatic drain with manual override (N.O. type) Drainage F Automatic drain with manual override (N.C. type) FF Large automatic drain with manual override (N.O. type) FF Large automatic drain with manual override (N.C.type) Blank Polycarbonate bowl Bowl Z Nylon bowl material M Metal bowl Blank 5 µm Element Y 0.3 µm (submicron) Pressure Blank 0.05 to 0.85 MPa range L 0.05 to 0.35 MPa Blank With relief mechanism Relief N Nonrelief type Blank With standard pressure gauge (G40) Pressure T Without pressure gauge (gauge port is sealed) gauge T8 Pressure gauge attached option (gauge port is not sealed) X IN/OUT reverse flow (right left) E Display unit Blank MPa display, Rc thread J MPa display, NPT/G thread F Piping adapter set (attached) Note 0 Blank Without attachment A6* /8 piping adapter set A8* /4 piping adapter set A0* 3/8 piping adapter set A5* / piping adapter set A0* 3/4 piping adapter set A5* piping adapter set A3* /4 piping adapter set *Adaptor screw type Blank Rc thread N NPT thread G G thread G Attachment (attached) Note Blank Without attachment B C type bracket B3 L type bracket G49P Pressure gauge: G49D-8-P0 G59P Pressure gauge: G59D-8-P0 G40P Pressure gauge: G40D-8-P0 G50P Pressure gauge: G50D-8-P0 G4P Pressure gauge: G4D-8-P0

Reverse filter / regulator: Ozone proof W00/W300 W400/W800-P Series Fluorine rubber and hydrogen nitrile rubber, etc is used for rubber part material. Port size: Rc/8 to Rc JIS symbol How to order A Model no. W00 A Model no. 6 Z P A6 B Port size Ozone proof Specifications G49P B Symbol Port size 6 8 0 5 0 5 /8 /4 3/8 / 3/4 Descriptions W 0 W 3 0 W 4 0 W 8 0 C Piping thread type C Piping thread type Blank Rc thread N NPT thread G G thread Note 0 Note on model no. selection Note : Refer to "Pneumatic, Vacuum and Auxiliary Components (Catalog No. CB-04SA)" for specifications and attachments. Note : Select options per drainage, bowl material, element, differential pressure detection, and regulator sections. When selecting options for several items, list options in order from the top. Note 3: If "L" is selected for pressure range, a low pressure gauge (0-0.4 MPa) is provided. Note 4: The positions of check valve and pressure gauge can not be changed. If the reverse direction of IN and OUT are required, indicate "X" in the end of optional section. Note 5: Min. operating pressure is 0. MPa automatic drain for option symbol "F". Purge air with initially generated drain until pressure rising to 0. MPa. Note 6: Min. operating pressure of automatic drain is 0.5 MPa for option symbol "F". Note 7: For "T", a gauge plug is assembled instead of a pressure gauge. Note 8: A piping adaptor set A*00-** is attached. Note 9: The piping adapter set and C bracket cannot be used together. Note 0: G threads and NPT threads are available for IN, OUT, gauge port, and drain discharge port (metal bowl with automatic drain). Note : The adaptor port size can be selected from Rc, NPT or G. Blank: Rc thread, N: NPT thread, G: G thread. (Example) A8G Note : If NPT is selected for the C piping thread, an NPT pressure gauge is enclosed. If an Rc or G thread is selected, an R thread pressure gauge is enclosed. Dimensions Option Note Note 3 Note 4 Note 5 Note 6 Note 7 * For explanation of option, refer to "Pneumatic, vacuum and Auxiliary components". E Display unit Piping adapter set (Attached) Note 8 Note 9 G Attachment Same as standard products. Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)." D F D Option Blank With manual drain cock F Automatic drain with manual override (N.O. type) Drainage F Automatic drain with manual override (N.C. type) FF Large automatic drain with manual override (N.O. type) FF Large automatic drain with manual override (N.C.type) Blank Polycarbonate bowl Bowl Z Nylon bowl material M Metal bowl Blank 5 µm Element Y 0.3 µm (submicron) Pressure Blank 0.05 to 0.85 MPa range L 0.05 to 0.35 MPa Blank With relief mechanism Relief N Nonrelief type Blank With standard pressure gauge (G40) Pressure gauge T Without pressure gauge (gauge port is sealed) T8 Pressure gauge attached option (gauge port is not sealed) X IN/OUT reverse flow (right left) E Display unit Blank MPa display, Rc thread J MPa display, NPT/G thread F Piping adapter set (attached) Note Blank Without attachment A6* /8 piping adapter set A8* /4 piping adapter set A0* 3/8 piping adapter set A5* / piping adapter set A0* 3/4 piping adapter set A5* piping adapter set A3* /4 piping adapter set *Adaptor screw type Blank Rc thread N NPT thread G G thread G Attachment (attached) Note Blank Without attachment B C type bracket B3 L type bracket G49P Pressure gauge: G49D-8-P0 G59P Pressure gauge: G59D-8-P0 G40P Pressure gauge: G40D-8-P0 G50P Pressure gauge: G50D-8-P0 G4P Pressure gauge: G4D-8-P0 Ozone proof component

Regulator: Ozone proof R000/R000/R3000 R4000/R6000/R8000-P Series Fluorine rubber and hydrogen nitrile rubber, etc is used for rubber part material. Port size: Rc/8 to Rc JIS symbol How to order A Model no. R000 A Model no. 6 L P A6 B Port size Ozone proof Specifications B G Attachment Symbol B Port size 6 8 0 5 0 5 /8 /4 3/8 / 3/4 Descriptions R 0 0 0 R 0 0 0 R 30 0 0 R 40 0 0 R 60 0 0 R 80 0 0 C Piping thread type C Piping thread type Note 7 Blank N G Rc thread NPT thread G thread D Option Note Note 3 Note 4 * Refer to "Pneumatic, vacuum and Auxiliary components". E Display unit D Option Pressure Blank range L Blank Relief N Blank Pressure T gauge T8 X 0.05 to 0.85 MPa 0.05 to 0.35 MPa With relief mechanism Nonrelief type With standard pressure gauge (G40) Without pressure gauge (gauge port is sealed) Pressure gauge attached option (gauge port is not sealed) IN/OUT reverse flow (right left) Note on model no. selection Note : Refer to "Pneumatic, Vacuum and Auxiliary Components (Catalog No. CB-04SA)" for specifications and attachments. Note : When selecting options for several items, list options in order from the top. Note 3: If "L" is selected for pressure range, a low pressure gauge (0-0.4 MPa) is provided. Note 4: For "T", a gauge plug is assembled instead of a pressure gauge. Working temperature is 5 to 50 C. Note 5: A piping adaptor set A*00-** is attached. Note 6: The piping adapter set and C bracket cannot be used together. Note 7: G threads and NPT threads are available for IN, OUT and gauge port. Note 8: The adaptor port size can be selected from Rc, NPT or G. Blank: Rc thread, N: NPT thread, G: G thread. (Example) A8G Note 9: If NPT is selected for the C piping thread, an NPT pressure gauge is enclosed. If an Rc or G thread is selected, an R thread pressure gauge is enclosed. Dimensions Piping adapter set (Attached) Note 5 Note 6 Same as standard products. Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)." F E F Display unit Blank MPa display, Rc thread J MPa display, NPT/G thread Piping adapter set (attached) Note 7 Blank Without attachment A6* /8 piping adapter set A8* /4 piping adapter set A0* 3/8 piping adapter set A5* / piping adapter set A0* 3/4 piping adapter set A5* piping adapter set A3* /4 piping adapter set *Adaptor screw type Blank Rc thread N NPT thread G G thread G Attachment (attached) Note 8 Blank Without attachment B C type bracket B3 L type bracket B4 B type bracket G49P Pressure gauge: G49D-8-P0 G59P Pressure gauge: G59D-8-P0 G40P Pressure gauge: G40D-8-P0 G50P Pressure gauge: G50D-8-P0 G4P Pressure gauge: G4D-8-P0

Reverse regulator: Ozone proof R00/R00/R300 R400/R600/R800-P Series Fluorine rubber and hydrogen nitrile rubber, etc is used for rubber part material. Port size : Rc/8 to Rc JIS symbol How to order A Model no. R00 A Model no. 6 L P A6 B Port size Ozone proof Specifications B G Attachment Symbol B Port size 6 8 0 5 0 5 /8 /4 3/8 / 3/4 Descriptions R 0 R 0 R 3 0 R 4 0 R 6 0 R 8 0 C Piping thread type C Piping thread type Note 7 Blank Rc thread N NPT thread G G thread D Option Note Note 3 Note 4 * Refer to "Pneumatic, vacuum and Auxiliary components". Piping adapter set (attached) Note 5 Note 6 Note on model no. selection Note : Refer to "Pneumatic, Vacuum and Auxiliary Components (Catalog No. CB-04SA)" for specifications and attachments. Note : When selecting options for several items, list options in order from the top. Note 3: If "L" is selected for pressure range, a low pressure gauge (0-0.4 MPa) is provided. Note 4: The positions of check valve and pressure gauge can not be changed. If the reverse direction of IN and OUT are required, indicate "X" in the end of optional section. Note 4: For "T", a gauge plug is assembled instead of a pressure gauge. Note 5: A piping adaptor set A*00-** is attached. Note 6: The piping adapter set and C bracket cannot be used together. Note 7: G threads and NPT threads are available for IN, OUT and gauge port. Note 8: The adaptor port size can be selected from Rc, NPT or G. Blank: Rc thread, N: NPT thread, G: G thread. (Example) A8G Note 9: If NPT is selected for the C piping thread, an NPT pressure gauge is enclosed. If an Rc or G thread is selected, an R thread pressure gauge is enclosed. Dimensions Same as standard products. Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)." F E Display unit D Option Pressure range Relief Pressure gauge Blank L Blank N Blank T T8 0.05 to 0.85 MPa 0.05 to 0.35 MPa With relief mechanism Nonrelief type With standard pressure gauge (G40) Without pressure gauge (gauge port is sealed) Pressure gauge attached option (gauge port is not sealed) X IN/OUT reverse flow (right left) E Display unit Blank MPa display, Rc thread J MPa display, NPT/G thread F Piping adapter set (attached) Note 8 Blank Without attachment A6* /8 piping adapter set A8* /4 piping adapter set A0* 3/8 piping adapter set A5* / piping adapter set A0* 3/4 piping adapter set A5* piping adapter set A3* /4 piping adapter set *Adaptor screw type Blank Rc thread N NPT thread G G thread G Attachment (attached) Note 9 Blank Without attachment B C type bracket B3 L type bracket B4 B type bracket G49P Pressure gauge: G49D-8-P0 G59P Pressure gauge: G59D-8-P0 G40P Pressure gauge: G40D-8-P0 G50P Pressure gauge: G50D-8-P0 G4P Pressure gauge: G4D-8-P0 3 Ozone proof component

Miniature regulator: Ozone proof RB500-P Series Fluorine rubber and hydrogen nitrile rubber, etc is used for rubber part material. Port size: Push-in joint ø4, ø6 JIS symbol How to order RB500 SSC4 P G39 P Model no. A Connection Ozone proof Specifications Symbol Descriptions A Connection S Straight IN L Elbow S Straight OUT L Elbow Port size C4 ø4 C6 ø6 direction B Option B Option Panel Blank Mount P Blank Pressure range L Blank Relief N Without nut With nut Note 3 0.05 to 0.7MPa 0.05 to 0.35 MPa Relief type Nonrelief type C Pressure gauge C Pressure gauge T Without pressure gauge Blank (pressure range: blank) With pressure gauge (G9D-6-P0) Blank (pressure range: L) With pressure gauge (G39D-6-P04) G39D With pressure gauge (G39D-6-P0) Note on model no. selection Note : Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)" for specifications. Note : ø: 0 to.0 MPa pressure gauge is provided as standard. For low pressure, ø7: 0 to 0.4 MPa low pressure gauge is provided. Note 3: Indicate option symbol "P" for panel installation. Dimensions Same as standard products. Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)." 4

Block manifold regulator: Ozone proof MNRB500-P Series Fluorine rubber and hydrogen nitrile rubber, etc is used for rubber part material. Port size: Push-in joint ø4, ø6, ø8 How to order MNRB500A SSC64 5 N G39 D P JIS symbol A Model no. Note Common supply type IN B Joint type OUT OUT C Port size Note on model no. selection F D Station number Note Ozone proof Specifications G How to install the product Pressure gauge Note 4 Option Note 3 Note : Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)" for specifications. Note : Air supply block is to be station. When using three or more stations simultaneously with the common supply, increase one supply block station for every three stations. In this case, indicate specifications in the mix manifold specification sheet. Note 3: Maximum station number of direct mount type is 5 stations. Note 4: Options and pressure gauges for each regulator block are the same parts. Note 5: ø: 0 to.0 MPa pressure gauge is provided as standard. For low pressure, ø7: 0 to 0.4 MPa low pressure gauge is provided. Note 6: Complete mixed manifold specifications in the "Pneumatic, Vacuum, and Auxiliary Components (catalog No. CB- 04SA)" when selecting specifications other than the basic model. Dimensions Individual supply type IN IN OUT OUT E Symbol A Model no. MNRB500A MNRB500B B Joint type IN direction S L OUT direction S L C D E F G Port size IN-OUT C64 C66 C84 C86 C4 C6 Station number station stations 3 3 stations 4 4 stations 5 5 stations Descriptions Common supply type Individual supply type Straight Elbow Straight Elbow IN; ø6, OUT; ø4 IN; ø6, OUT; ø6 IN; ø8, OUT; ø4 IN; ø8, OUT; ø6 IN/OUT; ø4 IN/OUT; ø6 Same as standard products. Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)." MNRB500A MNRB500B Option MNRB500A MNRB500B Blank Standard products L For low pressure N Nonrelief T Without pressure gauge X Right IN Pressure gauge Pressure gauge (G9D-6-P0) Blank Low pressure gauge (for option "L") G39D-6-P04 G39 Pressure gauge (G39D-6-P0) How to install the product Blank DIN rail installation D Direct mount 5 Ozone proof component

Precision F.R. unit: Ozone proof 770 Series Fluorine rubber and hydrogen nitrile rubber, etc is used for rubber part material. Port size: Rc/4, 3/8 How to order 770 C EZXGB LP A Model no. B Port size Note C Option Note Note 3 Note 4 Note 5 Note on model no. selection Ozone proof Specifications Note : Refer to "Pneumatic, Vacuum and Auxiliary Components (Catalog No. CB-04SA)" for specifications and attachments. Note : If NPT thread is required, do not indicate nominal size C. (Example) 770- If a pressure gauge is selected, the NPT thread pressure gauge is enclosed. Note 3: Two or more symbols can be selected each for "Regulator" and "Accessories." Note 4: Drainage "E" and bowl material "M" or "MG" can not be combined. Note 5: When selecting bowl material "M" or "MG" and attachment "G", indicate as "M-G" or "MG-G". Symbol Descriptions B Port size C Rc/4 3C Rc3/8 C Option Blank Manual cock E Flexible drain Blank Polycarbonate bowl Z Nylon bowl M Metal bowl MG Metal bowl with gauge Blank 5 µm X 3 µm Y 0.3 µm Blank Standard K Plastic knob L For low pressure (0.0 to 0.5) Blank Without attachment G Pressure gauge (G59D-8-P0) B Bracket Drainage Bowl material Attachment Regulator Element Dimensions Same as standard products. Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)." 6

Regulator: Ozone proof B09/A000-P Series Fluorine rubber and hydrogen nitrile rubber, etc is used for rubber part material. Port size : Rc/8, Rc/4 JIS symbol How to order B09 C NPB P A Model no. Miniature Compact B A 0 0 A Model no. B Port size Note Ozone proof Specifications B Symbol Port size C C 3C Rc/8 Rc/4 Rc3/8 Descriptions 9 0 0 C Option Note Note 3 Note on model no. selection Note : Refer to "Pneumatic, Vacuum and Auxiliary Components (Catalog No. CB-04SA)" for specifications and attachments. Note : If NPT thread is required, do not indicate nominal size C. Example) B09- Note 3: For the B09, the G49D-6-P0 (G49D-6-P04 for low-pressure) pressure gauge is enclosed, and for the A000type, the G59D-8-P0 (G59D-8-P04 for low-pressure) is enclosed. C Option Blank N Regulator L K P Blank Attachment G B Standard Nonrelief Low pressure (0.0 to 0.34 MPa) Plastic knob Panel mount Without attachment Pressure gauge Bracket Dimensions Same as standard products. Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)." Ozone proof component 7

Reverse regulator (chuck valve integrated): Ozone proof 400/45-P Series Fluorine rubber and hydrogen nitrile rubber, etc is used for rubber part material. Port size: Rc/8, Rc/4 JIS symbol How to order 400 C NLGB A Model no. B Port size Note P Ozone proof Specifications B Symbol Port size C 3C 6C 8C 0C Rc/4 Rc3/8 Rc3/4 Rc Rc/ Descriptions A Model no. Compact Large 4 0 4 5 C Option Note Note 3 Note on model no. selection Note : Refer to "Pneumatic, Vacuum and Auxiliary Components (Catalog No. CB-04SA)" for specifications and attachments. Note : If NPT thread is required, do not indicate nominal size C. Example) 400- Note 3: The G59D-8-P0 (G59D-8-P04 for low pressure) pressure gauge is enclosed. C Option Blank N Regulator L K P Blank Attachment G B Standard Nonrelief Low pressure (0.0 to 0.34 MPa) Plastic knob Panel mount Without attachment Pressure gauge (G59D-8-P0) Bracket Dimensions Same as standard products. Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)." 8

Precision regulator: Ozone proof 00-P Series Fluorine rubber and hydrogen nitrile rubber, etc is used for rubber part material. Port size: Rc/4, Rc3/8 JIS symbol How to order 00 C L K P Model no. A Port size Note Ozone proof Specifications B Option Note 3 Note on model no. selection Note : Refer to "Pneumatic, Vacuum and Auxiliary Components (Catalog No. CB-04SA)" for specifications and attachments. Note : If NPT thread is required, do not indicate nominal size C. Example) 00--L Symbol A Port size C 3C B Option K Regulator P Blank Attachment G B Descriptions Rc/4 Rc3/8 Plastic knob Panel mount Without attachment Pressure gauge (G59D-8-P0) Bracket Dimensions Same as standard products. Refer to "Pneumatic, vacuum and Auxiliary components (catalog No. CB-04SA)." Ozone proof component 9

International unit system (SI unit) Conversion of SI units and conventional units SI units (International units) are used in this catalog. Conversion for SI and conventional units is shown below. SI unit conversion (Bold units indicate SI units) Conversion example (for pressure) kgf/cm 9.80665 0 - MPa MPa.097 0 kgf/cm Force N x 0-5 9.80665 dyn x 0 5 9.80665 x 0 5 kgf.097 x 0 -.097 x 0-6 Viscosity Pa s x 0-3 x 0 - cp x 0 3 x 0 P x 0 x 0 - Note: P = dyn s/cm = g/cm s, Pa s = N s/m, cp = mpa S Stress Pa or N/m MPa or N/mm x 0-6 x 0 6 9.80665 x 0 6 9.80665 9.80665 x 0 4 9.80665 x 0 - kgf/mm.097 x 0-7.097 x 0 - x 0 - Note: Pa = N/m, MPa = N/mm kgf/cm.097 x 0-5.097 x 0 x 0 Dynamic viscosity m /s x 0-6 x 0-4 cst x 0 6 x 0 St x 0 4 x 0 - Note: St = cm /s, cst = mm /s Pressure Pa x 0 3 x 0 6 x 0 5 9.80665 x 0 4.035 x 0 5 9.80665.333 x 0 kpa x 0-3 x 0 3 x 0 9.80665 x 0.035 x 0 9.80665 x 0-3.333 x 0 - MPa x 0-6 x 0-3 x 0-9.80665 x 0 -.035 x 0-9.80665 x 0-6.333 x 0-4 bar x 0-5 x 0 - x 0 9.80665 x 0 -.035 9.80665 x 0-5.333 x 0-3 kgf/cm.097 x 0-5.097 x 0 -.097 x 0.097.0333 x 0-4.3595 x 0-3 atm 9.8693 x 0-6 9.8693 x 0-3 9.8693 9.8693 x 0-9.6784 x 0-9.6784 x 0-5.3579 x 0-3 mmh0 or mmag.097 x 0 -.097 x 0.097 x 0 5.097 x 0 4 x 0 4.0333 x 0 4.3595 x 0 mmhg or Torr 7.5006 x 0-3 7.5006 7.5006 x 0 3 7.5006 x 0 7.35559 x 0 7.60000 x 0 7.35559 x 0 - Note: Pa = N/m Work, energy, calorie J 3.600 x 0 6 9.80665 4.8605 x 0 3 kw h.77778 x 0-7.7407 x 0-6.679 x 0-3 kgf m.097 x 0-3.67098 x 0 5 4.6858 x 0 kcal.38889 x 0-4 8.6000 x 0.3470 x 0-3 Note: J = W s, J = N m, cal = 4.8605J (according to the Measurement Low) Work duty (power, drive) heat flow W 9.80665 7.355 x 0.679 kgf m/s.097 x 0-7.5 x 0.857 x 0 - PS.3596 x 0-3.33333 x 0 -.58095 x 0-3 kcal/h 8.6000 x 0-8.4337 6.359 x 0 Note: W = J/s, PS: French horsepower PS = 0.7355 kw (according to the Measurement Low and Construction Low) cal = 4.8605J (according to the Measurement Low) Thermal conduction ratio W/ (m k) kcal/ (h m C) 8.6000 x 0 -.679 Note: cal = 4.8605J (according to the Measurement Low) Thermal conduction coefficient W/ (m k) kcal/ (h m C) 8.6000 x 0 -.679 Note: cal = 4.8605J (according to the Measurement Low) Specific heat kcal/ (kg C) J/ (kg k) cal/ (g C) -4.38889 x 0 4.8605 x 0 3 Note: cal = 4.8605J (according to the Measurement Low) 0

JIS symbol Page. Element of symbol. Line and connecting port 3 3. Directional control valve 3 4. Pressure control valve 9 5. Speed control valve 9 6. Cylinder and motor 7. Power source and tank 9 30 8. Clean air unit 9. Auxiliary and other components 30 3 JIS symbol CAD data available.

JIS JIS symbol list. Element of symbol (a) Symbol element Name Symbol Applications Remarks Line Continuous line Broken line Dashed line Double line Circle Large circle Medium circle Small circle Point Half circle Square Rectangle () Main line () Supply line to pilot operated valve (3) Electric signals line () Pilot operation line () Drain line (3) Filter (4) Valve switching position Envelopment line Mechanical connection Energy converter () Measuring instrument () Rotary joint () Check valve () Link (3) Roller () Line connection () Roller shaft Pump or actuator whose turning angle is limited. () Fluid control components () Driving motor other than electric motor Fluid adjustment component () Cushion in cylinder () Weight in accumulator () Cylinder () Valve Piston Return line included Others: Indicate the electrical symbol to identify from the piping path. Internal pilot External pilot Dotted line indicating unit with more than one function Rotary shaft, lever, piston rod, etc. Pump, compressor, electric motor etc. Roller: Put a point on the center. The port intersects vertically with the side. The port intersects with the corner. Filter, drain separator, lubricator, heat exchanger etc. (b) Element Name Symbol Applications Remarks Equilateral triangle Painted White Arrow display Straight or oblique line Curve Oblique line Others Hydraulics Compressed air and other gas pressure () Linear movement () Fluid flow path and direction in valve (3) Direction of heat flow Rotary motion Variable operation or adjustment method Electric Closed path or closed port Solenoid Thermometer Driving motor Spring Needle valve Mnemonic symbol of valve seat of check valve Direction of fluid energy Fluid type Energy source display Including emission to atmosphere Arrow indicates the rotational direction viewed from a free end of a shaft. Draw oblique line with appropriate length Pump, spring, variable solenoid etc. Use the following symbols when AC and DC identification is required: Closed path Closed port Refer to 7 The number of crests should be two. Others Hollow type (large) Hollow type (small) Specific operations Refer to 3 (a) Oil tank (ventilation type) Local display of oil tank (ventilation type) (c) Mechanical element Name Symbol Remarks Rod Rotary shaft way operation Arrow indication is optional way operation Arrow indication is optional Capsule type () Oil tank (Closed type) () Pneumatics tank (3) Accumulator (4) Auxiliary gas vessel Detent Latch way operation Vertical line on notch indicates clamp way operation * symbol shows release method.

JIS Name Symbol Remarks Name No. Symbol Remarks Over center mechanism way operation Lever 4 way operation (rotary motion included) Line and connecting port (a) Line Pedal 5 way operation (rotary motion included) Name Symbol Remarks Connection Pedal for both foot 6 way operation (rotary motion included) Cross Not connected. Mechanical control plunger 0 way operation Flexible line Hose (normally connected to movable portion) Variable stroke length limiter way operation (b) Connecting port Name Symbol Remarks Spring 3 way operation Air vent Performing air vent continuously. Roller 4 way operation Performing air vent in the specified period, then closes. Pull roller 5 Arrow shows operation direction. Indication may be omitted. way operation Exhaust port Performing air vent by using check mechanism, if required. Pneumatics dedicated Without connecting port With connecting port Electrical control Direct electric actuator Single acting solenoid Double acting solenoid 30 3 3 Solenoid, torque motor etc. way operation The oblique line can slant downward to the right. way operation The oblique line can spread upward. Quick joint Rotary joint line 3 line Connected Disconnected Without check valve With check valve (Self seal joint) Swivel and rotary joint way rotation way rotation Single-acting variable solenoid actuator Double acting variable solenoid actuator Rotary electric actuator Indirect electric actuator Single acting solenoid Double acting solenoid 33 34 35 36 37 way operation Proportional solenoid Force motor etc. way operation Torque motor way operation Electric motor * JIS categorize this as pilot operation, but the valve is typically used as a solenoid valve, so the transfer symbol 36 and 37 has been used for the electric operation classification. Pilot operation 40 3 Directional control valve (a) Operation method Name No. Symbol Remarks Manual control Pushbutton 0 General symbols when the operation method is not indicated or when the number of operation directions is not specified. way operation Direct pilot operation Internal pilot 4 43 If pressurized areas differ, indicate numbers. indicating the area ratio in the rectangle if necessary. The operation flow path is inside device. JIS symbol Pull-button Push/pull button 3 way operation way operation External pilot 44 The operation flow path is outside device. 3

JIS No. of port Name No. Symbol Remarks Indirect pilot operation Pressurized operation method Pneumatics pilot Electromagnetic/ pneumatics pilot Electromagnetic/ pneumatics pilot Manual override (b) Directional control valve basic type No. of Status of position normal position 4 36 36 0 Normally closed No. A Internal pilot No primary operation With primary operation by single-acting solenoid Internal pilot * Since this is generally used as solenoid valve, categorized as electric operation code. Signs are arranged as 30 's Valve with manual override added to the above operation Symbol Remarks Normally closed No. of port 4 5 No. of position 3 3 Status of normal position P/A/B connection P/A/B connection (c) Manual control valve Name Basic type and operation method Direct acting normally closed Pushbutton, spring return Direct acting normally open Pushbutton, spring return No. of port No. K L Solenoid position Operation mechanism Combination symbol Basic type A B Symbol 4 4 Operation mechanism 3 3 3 5 3 Note: Symbols indicate JISB8375 (ISO5599). Symbol Remarks Normally open B Normally open Direct acting normally closed Pushbutton, spring return 3 C 3 3 Normally closed C Direct acting normally open Pushbutton, spring return 3 D 3 3 Normally open D Direct acting normally closed Pull-button, spring return A 3 4 4 PB connection E Direct acting normally open Pull-button, spring return B 3 3 Note: Symbols indicate JISB8375 (ISO5599). 4 Direct acting normally closed Pull-button, spring return 3 C 3 5 PB connection F 5 3 Direct acting normally open Pull-button, spring return 3 D 3 4 4 3 All ports closed G Direct acting normally closed Push/pull button 3 A 3 5 3 All ports closed H 4 Direct acting normally open Push/pull button 3 B 5 3 4 3 A/B/R connection I 4 Direct acting normally closed Push/pull button 3 3 C 5 3 A/B/R connection J 3 4 Direct acting normally open Push/pull button 3 3 D 5 3 4

JIS Name Combination symbol Name Combination symbol Basic type and operation method No. of port Solenoid position Operation mechanism Basic type Operation mechanism Symbol Basic type and operation method No. of port Solenoid position Operation mechanism Basic type Operation mechanism Symbol Direct acting normally closed Lever, spring return 4 A 3 Direct acting both sides operation Pushbutton 4 E 4 Direct acting normally open Lever, spring return 4 B 3 Direct acting both sides operation Pushbutton 5 F 4 Direct acting normally closed Lever, spring return 3 4 C 3 Direct acting Push/pull button 4 3 E 4 Direct acting normally open Lever, spring return 3 4 D 3 Direct acting Push/pull button 5 3 F 4 Direct acting lever with detent 4 A 3 Direct acting closed center lever with detent 4 3 4 G 3 4 Direct acting lever with detent 3 4 C 3 (3) Detent (c) (4) Latch (c) Generally, key selector valve Direct acting closed center lever with detent 5 3 4 H 3 4 Direct acting lever with latch 4 A 4 Direct acting pedal spring return (foot valve) 4 5 E 3 4 Direct acting lever with latch 3 4 C 4 Direct acting pedal spring return (foot valve) 5 5 F 3 4 Direct acting normally closed Pedal, spring return (foot valve) 5 A 3 Direct acting double pedal (foot valve) 4 6 E 4 3 Direct acting normally open Pedal, spring return 5 B 3 Direct acting double pedal (foot valve) 5 6 F 4 5 3 Direct acting normally closed Pedal 3 5 C 3 Direct acting double pedal all ports closed with detent 4 3 6 G 3 4 3 Direct acting normally open Pedal 3 5 D 3 Direct acting double pedal all ports closed with detent 5 3 6 H 3 4 5 3 Direct acting double pedal (foot valve for both foot) 6 A (d) Mechanical control valve Note: Symbols indicate JISB8375 (ISO5599). Direct acting double pedal (foot valve for both foot) 3 6 C Name Basic type and operation method No. of port Solenoid position Operation mechanism Combination symbol Basic type Operation mechanism Symbol Direct acting pushbutton spring return Direct acting pushbutton spring return 4 E 3 5 F 3 4 4 Direct acting normally closed plunger spring return Direct acting normally open plunger spring return A 3 B 3 JIS symbol 5

JIS Name Combination symbol Name Combination symbol Basic type and operation method No. of port Solenoid position Operation mechanism Basic type Operation mechanism Symbol Basic type and operation method No. of port Solenoid position Operation mechanism Basic type Operation mechanism Symbol Direct acting normally closed plunger 3 C 3 Direct acting both sides pilot 4 A 4 Direct acting normally open plunger 3 D 3 Direct acting both sides pilot 3 4 C 4 Direct acting normally closed roller spring return 4 A 3 Direct acting pilot spring return 4 4 E 3 4 Direct acting normally open roller spring return 4 B 3 Direct acting pilot spring return 5 4 F 3 4 3 Direct acting normally closed roller spring return 3 4 C 3 Direct acting both sides pilot 4 4 E 4 5 3 4 Direct acting normally open roller spring return 3 4 D 3 Direct acting both sides pilot 5 4 F 4 3 4 Direct acting normally closed pull roller spring return 5 A 3 Direct acting all ports closed both sides pilot spring center 4 3 4 G 4 3 3 5 3 4 Direct acting normally open pull roller spring return 5 B 3 Direct acting all ports closed both sides pilot spring center 5 3 4 3 H 4 3 3 4 5 3 Direct acting normally closed pull roller spring return 3 5 C 3 Direct acting A/B/R connection both sides pilot spring center 4 3 Direct acting normally open pull roller spring return (e) Pilot operated valve Name Basic type and operation method Direct acting pilot normally closed spring return Direct acting pilot normally open spring return 3 5 D 3 No. of port Solenoid position Operation mechanism Combination symbol Basic type Operation mechanism 4 A 3 4 B 3 Symbol Direct acting both sides pilot A/B/R connection spring center Direct acting P/A/B connection both sides pilot spring center Direct acting P/A/B connection both sides pilot spring center 4 5 3 4 3 4 5 3 *The basic valve s center position operation symbol can be written with a leader line to the basic valve center position in the drawing. Example 4 Direct acting pilot normally closed spring return 3 4 C 3 3 Direct acting pilot normally open pilot 3 4 D 3 Indirect acting normally closed pilot spring return Note: Symbols indicate JISB8375 (ISO5599). 6

JIS (f) Check, shuttle and exhaust valve (g) Solenoid valve Name Check valve without spring Combination symbol Symbol Operation Basic Operation (Details and simple symbol) mechanism type mechanism 43 A 43 Simple symbol No. a Name Basic type and operation method Direct acting normally closed Single acting solenoid spring return No. of port Solenoid position Combination symbol Operation mechanism Basic type Operation mechanism 3 A 3 Symbol Check valve with spring 43 3 A 43 Simple symbol a ' Direct acting normally open Single acting solenoid spring return Direct acting normally closed Single acting solenoid 3 B 3 3 3 C 3 Pilot operation Check valve 4 43 A 43 Direct acting normally open Single acting solenoid 3 3 D 3 Valve is closed by external pilot Simple symbol b Direct acting Both sides solenoid 3 A 3 Direct acting Both sides solenoid 3 3 C 3 High pressure priority type shuttle valve 43 C 43 Simple symbol c Direct acting Double acting solenoid * Use this when the relationship to the electric signal need not be indicated. Direct acting Single acting solenoid 3 3 C 4 3 E 3 * * Position and functions of valving element is specified. 4 Low pressure priority type shuttle valve The low pressure inlet is connected to the low-pressure priority output, and the high-pressure inlet is closed. Simple symbol d Direct acting Single acting solenoid Indirect acting Single acting solenoid spring return * Pressure return 5 3 F 3 4 36 E 3 43 3 4 53 4 3 Quick exhaust valve Indirect acting Single acting solenoid spring return * Pressure return 5 36 F 3 4 5 3 * For the pressure and return operation symbol, indicate the function element triangle at the edge. JIS symbol Simple symbol e Direct acting Both sides solenoid 4 3 E 3 4 3 Note: Symbols indicate JISB8375 (ISO5599). 7

JIS Name Combination symbol Name Combination symbol Basic type and operation method No. of port Solenoid position Operation mechanism Basic type Operation mechanism Symbol Basic type and operation method No. of port Solenoid position Operation mechanism Basic type Operation mechanism Symbol Direct acting Double acting solenoid Direct acting Both sides solenoid 4 3 E 5 3 F 3 4 3 * As stated above, JIS stipulates that this is not required if the relationship to the electrical signal need not be indicated. If it is specified, 3 may be used as mnemonic symbol of 3 -O- 3. 4 Direct acting P/A/B Both sides solenoid spring center pressure center used together Direct acting P/A/B connection Both sides solenoid with mannual override 5 3 3 3 43 3 0 3 43 L L 3 43 3 3 0 43 3 4 53 4 * 53 * If the diagram is difficult to read when all symbols are indicated on both ends, separate symbols. Direct acting Double acting solenoid Indirect acting Both sides solenoid 5 4 3 F 36 E 36 5 3 4 5 3 4 Indirect acting All ports closed Both sides solenoid spring center 4 3 36 3 G 36 3 4 3 Indirect acting Double acting solenoid Indirect acting Both sides solenoid 4 5 37 E 36 F 36 4 3 4 3 Indirect acting All ports closed Both sides solenoid spring center 5 3 36 3 43 H 36 3 4 53 5 3 Indirect acting Double acting solenoid Direct acting all ports closed Both sides solenoid spring center Direct acting all ports closed Both sides solenoid spring center 5 4 3 5 3 37 F 3 3 3 3 G H 3 3 3 3 4 5 3 4 3 4 5 3 Indirect acting A/B/R connection Both sides solenoid spring center pressure center used together Indirect acting A/B/R connection Both sides solenoid spring center pressure center used together 4 3 36 3 43 5 3 36 3 43 I J 36 43 3 36 43 3 4 3 4 53 Direct acting A/B/R connection Both sides solenoid spring center Direct acting A/B/R connection Both sides solenoid spring center Direct acting P/A/B connection Both sides solenoid spring center 4 3 5 3 4 3 3 3 3 3 I J 3 3 3 3 3 K 3 4 3 4 5 3 4 3 Indirect acting P/A/B connection Both sides solenoid spring center Pilot manual with override Indirect acting P/A/B connection Both sides solenoid spring center with mannual override 4 3 36 K 36 0 0 3 3 5 3 36 L 36 0 0 3 3 4 3 4 53 8 Note: Symbols indicate JISB8375 (ISO5599).

JIS Name Basic type and operation method (Proportional control valve) Direct acting electromagnetic proportional speed control valve No. of port Solenoid position Combination symbol Operation mechanism Basic type Operation mechanism 33 A 3 Symbol 5 Speed control valve Name Metering valve Variable metering valve Stop valve Symbol Detail symbol Mnemonic symbol Remarks Operation method and valve status are not indicated in mnemonic symbols. The fully closed state is not usually used. Direct acting electromagnetic proportional speed control valve (Servo valve) Direct acting electromagnetic servo control spring center 3 33 C 3 4 34 3 G 3 4 3 Speed control valve Metering valve With variable aperture Free flow in direction, and controlled flow in the opposite direction Direct acting electromagnetic servo control spring center 5 36 3 H 3 4 5 3 Metering valve with silencer 4 Pressure control valve Relief valve Name Pilot operated Relief valve Note: Symbols indicate JISB8375 (ISO5599). Symbol Remarks Direct acting or general symbol 6 Cylinder and motor Name Symbol Remarks Single acting cylinder Detail symbol Simple symbol Extend type Single rod type Exhaust to atmosphere Regulator Non-relief type Single acting cylinder (With spring) () () Single rod type () Rod extended by spring force () Rod retracted by spring force Regulator with relief Double acting cylinder () () Single rod type () Double rod type () Pilot operated regulator Regulator with filter Double acting telescope type cylinder Regulator with check valve Sequence valve Proportional electromagnetic control valve Cylinder with adjustable stroke (Head side) Cylinder with adjustable stroke (Rod side) Cybinder with speed control valve Reference: Followed JISB8368 names. In JISB04984, the head is on the cap side and the rod side is on the head side. Example of meter-out JIS symbol 9

JIS Name Symbol Remarks Name Symbol Remarks Cylinder with brake Describe the braking method if required. Driving motor (Excluding electric motor) Air tank Cylinder with end lock () () * Symbol showing how to release. () Head side () Rod side Note: Followed JISB8368999 names. 8 Clean air unit Filter Name () Symbol Remarks () General symbols () () With magnet Cylinder with switch Specify a and b contact (3) (3) With clogging indicator Non-rotating cylinder Filter with drain separator () () Manual discharge () () Automatic discharge Rodless cylinder Oil mist separator () () Manual discharge () () Automatic discharge Cylinder with valve Example of push type during energizing. Micro mist separator () () Manual discharge Air motor way flow way rotation type () () Automatic discharge way flow way rotation type (3) (3) Deodorization filter Drain separator () () Manual discharge Oscillator Pneumatics Constant angle way oscillation type Drawings of arrows to indicate relationship of the shaft rotation direction and flow direction are optional. Air dryer () () Automatic discharge 7 Power source and tank Name Symbol Remarks After cooler () () Water cooling type (When not expressing the coolant pipe path) Hydraulics (power) source Pneumatics (power) source General symbols General symbols () () Water cooling type (When expressing the coolant pipe path) Electric motor (3) (3) Air cooling type 30

JIS Name Symbol Remarks Name Symbol Remarks Lubricator Direct type Selection type Limit switch Can be indicated as follows if drawing could not be misread: Air ejector Caused by JIS Z 807 Pneumatics adjustment unit Simple symbol The vertical arrow indicates a discharger. Pneumatics counter Detail symbol Detail symbol Filter with manual discharge valve Nonrelief type regulator Example of direct type lubricator Pressure indicator Simple indicator without measurement Oil mist separator for exhaust Pressure gauge Noise reduction device Differential pressure gauge Oil injector Thermometer 9 Auxiliary and other components Galvanoscope Name Symbol Remarks Pneumatic-hydraulic transducer () () Single acting Flow meter () () Continuous type Booster () When pressure ratio : For two fluid types () Single acting Integrating flow meter () () Continuous type Tachometer Booster valve Pressure ratio : Torque meter Delay valve Alarm (Example) Indicate with a compound symbol based on the mechanism (Refer to JISB05-: 00 and JPAS00.) Note: mark is an original JPAS00 symbol. Use is limited to those indicated. JIS symbol Pressure switch Can be indicated as follows if drawing could not be misread: 3

3

New product introduction 4GA4/4GB4 Series Catalog No. CC-863A Achieving long life with a large flow rate 4GA4/4GB4 Series New product 4GA4 4GB4 SERIES CKD Corporation CC-863A New product 4G4 Series 33

Large flow rate, long life. Theproperty propertyofofthe thepopular popular4g, 4G,,,and and33series Serieshas has been been passed passed on on toto realize The realize the powerful 4G Series. Series. factorsrequired requiredbybythe thetimes, times,including includingecological ecological performance, performance, safety safety function, function, and flexibility, AllAllfactors havebeen beenimproved improvedwith withthis thislarge largeflow flowrate ratepneumatic pneumatic 55 port port valve valve 4G4 4G4 Series Series (metal base type). have type). Discretevalve, valve,body bodyporting, porting,sub-base sub-baseporting porting Discrete A A 4G Series 4G BB44Series MaximumCCofof55achieved achievedwithin withinaacompact compactbody! body! Maximum Individual wiring wiring manifold manifold Individual M4G 4 Series Series A A B B Maximum manifold manifold C C of Maximum of 9.5! 9.5! 34

Pneumatic 5 port valve Upgraded: Reliability Long life Life is now even longer with the improved sliding section and packing, etc. Filter on air supplying port This filter prevents the entry of foreign matter and solves problems. This filter is also installable on the A/B port.(optional) Upgraded: Safety P port filter P port filter (standard) assembly example Reliability increased with the protective cover Mis-operation of the manual override caused by external force, etc., is prevented. This safe design prevents the cover from being closed when locked.(pat.) Upgraded: Operability Tool-free manual override This locking/non-locking combination manual override enables finger-tip operation. Common wiring connector for top or side installation Use either top or side installation simply by changing the connector insertion location. P/R port front lead-out Front lead-out from the P and R ports is possible by using the supply/exhaust block. P port Upgraded: Durability RoHS Directive compliant R port Halogen and vinyl chloride materials have been eliminated from leads. This eco-friendly design complies with RoHS Directives. New product 4G4 Series 35

Series variation 4GA4/4GB4 Series Valve performance Appearance Model no. Position No. of solenoid JIS symbol Flow characteristics C (dm 3 / (s bar)) Note Applicable cylinder bore size (ø) Voltage (v) Discrete Sub-base porting Body porting 5 port valve -position single solenoid 5 port 4GA4 4 7.5 to 8.6 00 to 40 a (A)(B) 5 3 (R ) (P) (R ) -position double solenoid 5 port 4GB4 4 (A)(B) to 5 5 to 60 a 5 3 (R )(P)(R ) b AC00 AC0 DC4 DC Individual wiring manifold (metal base) Sub-base porting Body porting 3-position All ports closed Direct mount type M4GA4 4 8. to 9.3 00 to 40 Direct mount type DIN rail mount type (-D) M4GB4 Note a (A)(B) 5 3 (R )(P)(R ) 3-position A/B/R connection 4 (A)(B) a b 5 3 (R )(P)(R ) b 6.8 to 7. 8.7 to 9.5 Note 3 00 to 40 3-position P/A/B connection 4 (A)(B) a b M4GB4 6.8 to 7. 00 to 5 5 3 (R )(P)(R ) AC00 AC0 DC4 DC Note : Effective sectional area S and sonic conductance C are converted as S 5.0 x C. Note : types of base are available. Dimensions of P/R/R port differ per port size. Note 3: The value applies when port size (A/B port) is Rc/, G/ or NPT/. 36

4GA4/4GB4 Series Series variation Solenoid position A/B piping port Electric connection -position 3-position Push-in joint Female thread Single solenoid Double solenoid All ports closed A/B/R connection P/A/B connection Mix ø8 ø0 ø Rc /4 Rc 3/8 Rc / G /4 G 3/8 C8 C0 C 08 0 5 08G 0G 5G 08N 0N 5N Blank E* E*J B G / NPT /4 NPT 3/8 NPT / Grommet lead E-connector EJ-connector DIN terminal box New product 4G4 Series 37

Acquisition of ISO900 and ISO400 Certification Providing a safe quality, friendly to users, machines and environment CKD has acquired International Standards ISO900 and ISO400 certification and structured a quality and environment management system. With safety, environment, and energy conservation as our most important priorities, we are working company-wide to promote safe product and quality creation friendly to users, machines, society, and the global environment. User-friendly Environment-friendly Earth-friendly Environment Quality 38

Acquisition of ISO900 and ISO400 Certification International Standard ISO900 Certification International Standard for quality management systems CKD acquired certification for our pneumatic division and control division in 994. Currently, our automated machine division headquarters and production headquarters have acquired ISO900:000. Approach to quality system To respond to diverse product needs, CKD develops products individualized for each industry and which are easy to use. We are conducting quality management activities to increase customer satisfaction. International Standard ISO400 Certification International Standard for environment management systems. CKD s production division acquired certification in 000, and all CKD divisions, including the Sales Division, acquired certification in 003. Approach to environment and energy conservation CKD is aware that preserving the global environment is a global priority. We conduct environment management activities based on CKD Environment Policy. 39