Direct Air Operated 2 Port Valve/Manifold For Air, Gas, Vacuum and Oil

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The VX series will be revised shortly. 1 Direct Operated 2 Port Valve/ For, Gas, Vacuum and Oil Series VVXA21/22 Common SUP type and individual SUP type (for vacuum use) standard models Compatible with a wide variety of fluids. VC VDW Courtesy of Steven Engineering, Inc.-20 Ryan Way, South San Francisco, CA 80-670-Main Office: (650) 588-200-Outside Local Area: (800) 258-200-www.stevenengineering.com Series VVXA22 Variations Normally closed (N. C.) Normally open (N. O.) Common SUP Individual SUP Common SUP Individual SUP Stations Series VVXA21 Valve B mount 2 to 10 stations A wide variety of applicable fluids. Combination of seal materials (NBR, FKM or EPDM) can be selected freely, depending on the purpose. Able to replace valves with the piping remained uchanged. Weight-saving aluminum base and body. Brass base and stainless steel base are available. Please contact SMC for details. Material Base, Body Seal base model VVXA211-stations VVXA212-stations VVXA221-stations VVXA222-stations Individual port Aluminum NBR, FKM, EPDM Common port 1 8 1 VQ VX2 VX VX VXA VN LVC LVA LVH LVD LVQ LQ LVN TI/ TIL PA PAX PB 17--7

Series VVXA21/22 The VX* series will be revised shortly. 2 Normally Closed (N.C.), Normally Open (N.O.) JIS Symbol Common SUP type (N.C.) Fluid Standard specifications Option (Standard, Dry) Vacuum (up to 1. x10 2 Pa) (V) Vacuum (up to 1. x10 2 Pa) Turbine oil Carbon dioxide (CO2), Nitrogen gas (N2) Non-leak (10 Ð6 Paám /s or less) (V) Note) Refer to page 17--1 ÒApplicable Fluids Check ListÓ for details of special fluids outside of the standard options and specifications. Courtesy of Steven Engineering, Inc.-20 Ryan Way, South San Francisco, CA 80-670-Main Office: (650) 588-200-Outside Local Area: (800) 258-200-www.stevenengineering.com (N.O.) Indivisual SUP type (N.C.) (N.O.) Construction/ Principal Parts Material Common SUP type (VAC) port No. Description Material Standard Option q Body Aluminum Ñ w Valve NBR, Stainless steel assembly Brass, Polyacetal FKM/EPDM e r Base Piston assembly Aluminum Polyacetal, NBR Ñ Ñ t O-ring NBR FKM/EPDM y Pilot cover Aluminum Ñ u Piston spring Stainless steel Ñ Specifications type Number of valves (With O-rings, screws) Base and Applicable Valve Part No. Solenoid Valve for Operating Fluid and Ambient Temperature Tightness of Valve (Leak rate) Pilot Pressure B Mount Common pressure supply, individual pressure supply (For vacuum) 2to10stations VVXA21 VVXA22 Note) Common port is placed on vacuum side. base Individual port Applicable valve VVXA211-stations VXA21-00 VVXA212-stations 1 1 VVXA221-stations VXA22 1-00 VVXA222-stations 1 Operating fluid temperature ( C ) (Standard) Oil (Standard) Vacuum () (V) 60 Ð5 (1) Ð5 (2) Note 1) Dew point: Ð5 C or less Note 2) 500 cst or less Note ) ÒVÓ in parentheses is option symbol. Temperature conditions Maximum Minimum VX011-001 VX011-006 Weight per one station (g) nx70+50 nx10+110 Orifice Max.operating Flow characteristics Max. system Proof pressure Weight size Oil pressure pressure differential (MPa) (MPa) (g) (mm ) (MPa) Av x10-6 m 2 Cv converted C [dm /(sábar)] b Cv VXA212-00 1.0 7. 0. 1. 0.50 0.8 120 VXA21-00 0.5.5 15 0.61 2. 0.5 0.70 1.0 1.5 VXA22-00 1.0 160 6 VXA22-00 0.6 26 1.1. 0.50 1.1 Note) Refer to ÒGlossaryÓ on page 17--15 for details of max. operating pressure differential Ambient temperature ( C ) Ð5 Ð5 Fluid Seal material NBR, FKM, EPDM 1cm /min or less Liquid 0.1 cm /min or less (1) Non-leak, Vacuum (2) 10 Ð6 Paám /s or less Note 1) Differs depending on the operating conditions such as pressure, etc. Note 2) Value on option ÒVÓ (Non-leak, Vacuum). VXA21 VXA22 Pressure (MPa) 0.25 to 0.7 17--8

Direct Operated 2 Port Valve/ For, Gas, Vacuum and Oil How to Order Series VVXA21/22 The VX series will be revised shortly. VXA21 VXA22 00 Orifice size 2 mmø.5 mmø 6 mmø Valve option Connection 00 (No connection screw) Select an option mark in page 17--1 by Applicable Fluids Check List for special fluids outside of the standard. VC VDW VQ VX2 Courtesy of Steven Engineering, Inc.-20 Ryan Way, South San Francisco, CA 80-670-Main Office: (650) 588-200-Outside Local Area: (800) 258-200-www.stevenengineering.com Refer to the table (1) given below for availability. Table (1) Orifice Size VXA21 VXA22 Orifice size (No.) 2 ( mmø) (.5 mmø) (6 mmø) Valve/Body 1 Normally closed (N.C.)/ Normally open (N.O.)/ How to Order Base VVXA21 VVXA22 base Symbol Applicable valve VVXA21 VXA21 1-00 VVXA22 VXA22 1-00 How to Order Nil V Write both the base part number and the solenoid valve to be mounted or blanking plate part number. (Example) 7 stations of VXA21 common pressure, individual port 1/8. (Base) VVXA211-07 1 pc. (Valve) VXA2121-00 6 pcs. () VX011-001 1 pc. type Number of stations 02 2 stations 10 Common SUP Individual pressure 10 stations Port size (Individual port) 1 2 1 All common ports are /8 Common SUP model has the indication of P and individual SUP has the indication of VAC. at the common port. Arrangement of solenoid valves Common port Individual port Plug The standard arrangement of manifolds should be placed on an individual port on this side, each solenoid valve from the left side and a blank plate in the right side. The right side of the common port provides plug. VX VX VXA VN LVC LVA LVH LVD LVQ LQ LVN TI/ TIL PA PAX PB 17--

Series VVXA21/22 The VX series will be revised shortly. Dimensions/ Common SUP type IN port Courtesy of Steven Engineering, Inc.-20 Ryan Way, South San Francisco, CA 80-670-Main Office: (650) 588-200-Outside Local Area: (800) 258-200-www.stevenengineering.com Individual SUP type (Pitch) Pitch (Pitch) Pitch VVXA21 VVXA22 OUT port IN port A 8 L Dimension VVXA21 VVXA22 B 20.5 [17.5] 26.5 [22.5] Stations Symbol L1 L2 L1 L2 C 10.5 1 2 100 86 126 108 D 11 1 16 122 172 15 E 25 0 172 158 218 200 F 2 5 208 1 26 26 G 6 6 6 2 20 10 22 H 12 15 OUT port 7 280 266 56 8 J 7 8 16 02 2 8 K 6.5 8.5 52 8 8 M 5 58 10 88 7 76 N 5 [ ]: Individual pressure type 17--100

The VX series will be revised shortly. 5 Direct Operated Port Valve/ For, Gas, Vacuum and Oil Series VVXA1/2 Courtesy of Steven Engineering, Inc.-20 Ryan Way, South San Francisco, CA 80-670-Main Office: (650) 588-200-Outside Local Area: (800) 258-200-www.stevenengineering.com Variations Port R stations Series VVXA2 Series VVXA1 Common (C.O.) Energized open Valve Energized closed B mount 2 to 10 stations A wide variety of applicable fluids. Combination of seal materials (NBR, FKM, or EPDM) can be selected freely, depending on the purpose. Able to replace valves with the piping remained unchanged. N.C./N.O. switchover is easy. Weight-saving aluminum base and body. (Not applicable to water or steam.) Material Base, Body Seal material base model VVXA11-stations VVXA12-stations VVXA21-stations VVXA22-stations Aluminum NBR, FKM, EPDM 1 1 Port R 1 1 VC VDW VQ VX2 VX VX VXA VN LVC LVA LVH LVD LVQ LQ LVN TI/ TIL PA PAX PB 17--105

Series VVXA1/2 The VX series will be revised shortly. 6 Common (C.O.) Courtesy of Steven Engineering, Inc.-20 Ryan Way, South San Francisco, CA 80-670-Main Office: (650) 588-200-Outside Local Area: (800) 258-200-www.stevenengineering.com JIS Symbol Port R Construction/ Principal Parts Material No. Description q body, Base Normally closed Normally open Port R Material Standard Option Brass Aluminum (Base is made of aluminum.) w Valve NBR, assembly Polyacetal FKM/EPDM e Adapter Aluminum FKM/EPDM r Travel NBR, assembly Polyacetal FKM/EPDM t O-ring NBR FKM/EPDM y Pilot cover Aluminum u Piston spring Stainless steel i Piston NBR, Polyacetal o Gasket NBR FKM/EPDM Fluid Standard specifications (Standard, Dry) Vacuum (up to 1. x 10 2 Pa) Turbine oil Carbon dioxide (CO2), Nitrogen gas (N2) Note) Refer to page 17--1 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications. Specifications type Number of valves (with gasket, screws) Base And Applicable Valve Part No. /Valve Specifications Orifice size (mmø) Operating Fluid and Ambient Temperature Tightness of Valve (Leak rate) Pilot Pressure B Mount Common supply, Common exhaust, Individual out 2 to 10 stations VVXA1 VX011-00 VVXA2 VX011-005 base Individual port Applicable valve Base weight (g) VVXA11-stations 1/8 VVXA12-stations 1/ VXA1 5-00 n x 100 + 50 VVXA21-stations 1/8 VVXA22-stations 1/ VXA2 5-00 n x 160 + 70 1.5 VXA115-00 VXA125-00 2.2 VXA225-00 VXA15-00 VXA25-00 VXA25-00 Note) Add the V type (VXA1) 80 g, (VXA2) 10 g Refer to Glossary on page 17--15 for details of max. operating pressure differential and max. system pressure. Temperature conditions Maximum Minimum Operating fluid temperature ( C) Oil Vacuum (Standard) (Standard) (V) 60 5 (1) 5 (2) Note 1) Dew point: 5 C or less Note 2) 500 cst or less Note ) V in parentheses is option symbol. VXA1 5 VXA2 5 Max. operating pressure differential (MPa) Oil Av x 10-6 (m 2 ) Cv converted C [dm /(s bar)] b Cv 1.0 1. 0.08 0.2 0.2 0.08 0.5 1.0 0. 0.6 0..8.6 8.0.0 12 0.16 0.1 0.2 0. 0.60 0.60 0.6 0.82 1.10 1.66 0.25 0. 0.20 0.25 0.20 0.15 0.17 0.20 0.27 0.8 Pressure (MPa) 0.25 to 0.7 Option Note) Vacuum (up to 1. x 10 1 Pa) (V) Non-leak (10 6 Pa m /s or less) (V) Other Flow characteristics () Max system pressure (MPa) 1.0 1.5 Ambient temperature ( C) 5 5 Proof Weight pressure (MPa) (g) Fluid Seal material NBR, FKM, EPDM 1 cm /min or less Liquid 0.1 cm /min or less(1) Non-leak, Vacuum 10 6 Pa m /s or less Note 1) Differs depending on the operating conditions such as pressure, etc. Note 2) Value on option V (Non-leak, Vacuum). 150 20 150 20 (2) 17--106

Courtesy of Steven Engineering, Inc.-20 Ryan Way, South San Francisco, CA 80-670-Main Office: (650) 588-200-Outside Local Area: (800) 258-200-www.stevenengineering.com Orifice size 1 1.5 mmø 2 2.2 mmø mmø mmø VXA1 VXA2 Refer to the table (1) given below for availability. Table (1) Orifice Size VXA1 VXA2 Direct Operated Port Valve/ For, Gas, Vacuum and Oil Orifice size (No) 1 2 (1.5 mmø) (2.2 mmø) ( mmø) ( mmø) 5 Nil V How to Order 00 Valve option Valve/Body 5 Common/For manifold Connection 00 No connection screw/for manifold Standard specifications For vacuum, non-leak Select an option mark in page 17--1 by Applicable Fluids Check List for special fluids outside of the standard. How to Order Base base Symbol Applicable valve VVXA1 VXA1 5-00 VVXA2 VXA2 5-00 VVXA1 VVXA2 How to Order Write both the base part number and the solenoid valve to be mounted or blanking plate part number. (Example) 7 stations of VXA1, Individual port (Base P/N) VXA11-07 1 pc (Valve P/N) VXA115-00 6 pcs ( P/N) VX011-00 1 pc Series VVXA1/2 The VX series will be revised shortly. Number of stations 02 2 stations 10 10 stations Port size (Individual port) 1 2 1 All common ports are 1/. The common SUP is indicated as P on the common port and the individual SUP is indicated as R. Arrangement of solenoid valves Common port Individual port Plug The standard arrangement of manifolds should be placed on an individual port on this side, each solenoid valve from the left side and a blank plate in the right side. The right side of the common port provides plug. VC VDW VQ VX2 VX VX VXA VN LVC LVA LVH LVD LVQ LQ LVN TI/ TIL PA PAX PB 7 17--107

Series VVXA1/2 The VX series will be revised shortly. 8 Dimensions 1 8 Mounting hole Indication of valve type Courtesy of Steven Engineering, Inc.-20 Ryan Way, South San Francisco, CA 80-670-Main Office: (650) 588-200-Outside Local Area: (800) 258-200-www.stevenengineering.com (Pitch) (Pitch) VVXA1 VVXA2 VVXA1 VVXA2 Symbol A Mounting hole Symbol B 20 22 1 n- 8, Stations L1 L2 L1 L2 C 10 1 2 6 8 126 108 D 22 2 12 120 172 15 E 5 66 Type indication (Gasket) 168 156 218 200 F 5 20 12 26 26 G 2 25 6 2 228 10 22 H 0 7 276 26 56 8 J 6 6 8 12 00 2 8 K 6 8 6 8 M 5.5 50.5 10 8 72 76 N 6 76 17--108