Positioning Systems. Torque Motor Rotary Tables Product Overview and Application Areas

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62 M99TE5-15 5.1 Product Overview and Application Areas The extremely rigid connection between motor and load, and a servo-drive regulation ensures excellent acceleration capabilities and good uniformity of movement. HIWIN rotary tables and torque motors are especially well suited for tasks in automation due to the hollow shaft design. Media, cable systems or mechanical parts can be fed through without problems. HIWIN Rotary Tables: TMS series utilize cross roller bearing. Drive free of clearance Hollow shaft No gear transmission losses Maintenance free and compact Driver can be selected freely Brush-free drive Extremely rigid support with cross-roller Meet IP65 enclosure standards as an option Integrated brake is available as an option Short and compact: HIWIN rotary tables are optimized for high torques and robust dynamics. Table 5.1 Application Areas of Rotary Tables Classification Application Features and main reasons for use Production equipment Assembly machines Machine tools Inspection/ testing equipment Robots Accuracy Speed Rigidity Compactness Clearliness Freedom from maintenance CVD, wafer cleaning, ion implantation Semi-conductor transport, inspection/processing Assembly machines for electric components High-speed assembly machines for electronic components Various assembly machines Tool changers C axes Machine part inspection Inspection of electric components Inspection of optical components Chemical analysis of liquids Various Inspection/testing equipment Various assembly robots Various transport robots Inspection/transport robots in clean rooms

M99TE5-15 63 5.2 TMS Rotary Tables 5.2.1 TMSx Rotary Tables Dimensions of TMSx rotary tables (Values see Table 5.2) 6X6 =36 Ø24 Rotating hollow shaft 6-M5x.8Px1DP P.C.D Ø6(Rotor fixture) 45.5 Ø8 6-M6x1Px9DP P.C.D Ø9(Stator fixture) 6x6 =36 1 Motor connection H±.3 Encoder connection Ø11 X View X Table 5.2 Specifications for TMSx rotary table Except dimensions, all the specifications in the table are in ±1% of tolerance. Symbol Unit TMS3 TMS7 Continuous torque T c Nm 3.1 6.2 Continuous current I c A (rms) 2 2 Peak torque for 1 sec. T p Nm 7.7 15.5 Peak current for 1 sec. I p A (rms) 5 5 Torque constant K t Nm/A (rms) 1.55 3.1 Electrical time constant K e ms 2.1 2.5 Resistance (line to line, 25 C) R 25 Ω 7.1 12.4 Inductance (line to line) L mh 15.2 3.4 Number of poles 2p 1 1 Back emf constant (line to line) K v Vrms/(rad/s).82 1.7 Motor constant (25 C) K m Nm/ W.5.7 Thermal resistance R th C/W 1.8 1. 1 C, Bimetal(opener), DC12V/6A or DC24V/3A Max. DC bus voltage V 5 Inertia of rotating parts J kg m 2.3.6 Mass of motor M m kg 4 7 Max. axial load F a N 37 37 Max. radial load F r N 82 82 Max. speed n rpm 7 7 Repeatability Arc sec ± 3 Accuracy* Arc sec ± 1 Height H mm 117.5 15

64 M99TE5-15 5.2.2 TMS1x Rotary Tables Dimensions of TMS1x rotary tables (Values see Table 5.3) 6x6 =36 Ø35 Rotating Hollow Shaft 6-M6X1PX9DP P.C.D Ø6 (Rotor fixture) 45.5 Ø99 H±.3 1 8-M6x1Px12DP P.C.D Ø142 (Stator fixture) Motor Connection 8x45 =36 Ø15 X Encoder Connection X View Table 5.3 Specifications for TMS1x rotary table Symbol Unit TMS12 TMS14 TMS16 TMS18 Continuous torque T c Nm 5 1 15 2 Continuous current I c A (rms) 4 4 4 4 Peak torque for 1 sec. T p Nm 12.5 25 37.5 5 Peak current for 1 sec. I p A (rms) 1 1 1 1 Torque constant K t Nm/A (rms) 1.25 2.5 3.75 5. Electrical time constant K e ms 3.2 3.6 3.8 4. Resistance (line to line, 25 C) R 25 Ω 2.6 3.9 5.2 6.5 Inductance (line to line) L mh 8.2 14 2 26 Number of poles 2p 22 22 22 22 Back emf constant (line to line) K v Vrms/(rad/s).6 1.2 1.8 2.4 Motor constant (25 C) K m Nm/ W.6 1. 1.3 1.6 Thermal resistance R th C/W 1.2.8.6.5 1 C, Bimetal(opener), DC12V/6A or DC24V/3A Max. DC bus voltage V 5 Inertia of rotating parts J kg m 2.6.65.7.75 Mass of motor M m kg 5.7 7 8.3 9.5 Max. axial load F a N 37 37 37 37 Max. radial load F r N 17 17 17 17 Max. speed n rpm 7 7 7 7 Repeatability Arc sec ± 3 Accuracy* Arc sec ± 1 Height H mm 1 12 14 16 Except dimensions, all the specifications in the table are in ±1% of tolerance.

M99TE5-15 65 5.2.3 TMS3x Rotary Tables Dimensions of TMS3x rotary tables (Values see Table 5.4) 22.5 8X45 =36 5 Ø 6 Rotating Hollow Shaft 8-M6x1Px12DP P.C.D Ø142 ±.5 Ø17.5 1x3 =3 1-M6x1Px12DP P.C.D Ø18 ±.5.5 Motor Connection 45 H±.4 Encoder Connection Ø2 X X View Table 5.4 Specifications for TMS3x rotary table Except dimensions, all the specifications in the table are in ±1% of tolerance. Symbol Unit TMS32 TMS34 TMS38 TMS3C Continuous torque T c Nm 1 2 4 6 Continuous current I c A (rms) 3 3 3 3 Peak torque for 1 sec. T p Nm 25 5 1 15 Peak current for 1 sec. I p A (rms) 7.5 7.5 7.5 7.5 Torque constant K t Nm/A (rms) 3.3 6.6 13.3 2. Electrical time constant K e ms 4.7 5.4 5.7 5.9 Resistance (line to line, 25 C) R 25 Ω 5.8 8.4 13.6 18.8 Inductance (line to line) L mh 27 45 78 111 Number of poles 2p 22 22 22 22 Back emf constant (line to line) K v Vrms/(rad/s) 1.6 3.2 6.4 9.6 Motor constant (25 C) K m Nm/ W 1.1 1.9 3. 3.8 Thermal resistance R th C/W 1..7.4.3 1 C, Bimetal(opener), DC12V/6A or DC24V/3A Max. DC bus voltage V 5 Inertia of rotating parts J kg m 2.14.2.26.35 Mass of motor M m kg 15 21 26 32 Max. axial load F a N 8 8 8 8 Max. radial load F r N 65 65 65 65 Max. speed n rpm 7 5 24 12 Repeatability Arc sec ± 2.5 Accuracy* Arc sec ± 1 Height H mm 13 15 19 23

66 M99TE5-15 5.2.4 TMS7x Rotary Tables Dimensions of TMS7x rotary tables (Values see Table 5.5) 22.5 8X45 =36 5 Ø14 Rotating hollow shaft 8-M8x1.25Px16DP P.C.D Ø19 2 9x4 =36 Ø23.5 Motor connection 9-M8x1.25Px2DP P.C.D Ø28 H±.4 Encoder connection Ø3 X X View Table 5.5 Specifications for TMS7x rotary table Symbol Unit TMS74 TMS76 TMS7C Continuous torque T c Nm 5 75 15 Continuous current I c A (rms) 3 3 3 Peak torque for 1 sec. T p Nm 13 19 38 Peak current for 1 sec. I p A (rms) 8 8 8 Torque constant K t Nm/A (rms) 16.7 25. 5. Electrical time constant K e ms 5. 5.1 5.4 Resistance (line to line, 25 C) R 25 Ω 14. 19. 32.5 Inductance (line to line) L mh 7. 96.5 176. Number of poles 2p 44 44 44 Back emf constant (line to line) K v Vrms/(rad/s) 1.8 16.2 32.4 Motor constant (25 C) K m Nm/ W 3.6 4.7 7.2 Thermal resistance R th C/W.4.3.2 1 C, Bimetal(opener), DC12V/6A or DC24V/3A Max. DC bus voltage V 5 Inertia of rotating parts J kg m 2.152.174.241 Mass of motor M m kg 39 44.5 61.5 Max. axial load F a N 8 8 8 Max. radial load F r N 65 65 65 Max. speed n rpm 18 12 48 Repeatability Arc sec ± 2.5 Accuracy* Arc sec ± 1 Height H mm 16 18 24 Except dimensions, all the specifications in the table are in ±1% of tolerance.

M99TE5-15 67 TMS series T-N curves Torque vs. Velocity curves are calculated with DC bus voltage=3 VDC TMSx Series TMS1x Series 7 25 6 5 TMS7 2 TMS18 4 3 2 1 TMS3 15 1 5 TMS16 TMS14 TMS12 2 4 6 8 2 4 6 8 Speed (rpm) Speed (rpm) TMS3x Series TMS7x Series 7 16 6 TMS3C 14 TMS7C 5 4 3 2 1 TMS38 TMS34 TMS32 12 1 8 6 4 2 TMS76 TMS74 2 4 6 8 Speed (rpm) 5 1 15 2 25 3 Speed (rpm) Structure of the order number of TMS rotary tables TM S 3 4 Series Type Size Rotor height S: Complete rotary table : External diameter 11 mm 1: External diameter 15 mm 3: External diameter 2 mm 7: External diameter 3 mm 2: 2 mm 4: 4 mm 6: 6 mm 8: 8 mm C: 12 mm

68 M99TE5-15 5.3 TMX Rotary Tables High torque direct drive motor, no gear box and no backlash High resolution resolver integrated, full servo loop control Compact size and high stiffness Simple motor structure Table 5.6 Specifications for TMX rotary tables Symbol Unit TMX44 TMX48 TMX63 TMX65 TMX68 Continuous torque T c Nm 4 8 7 14 21 Continuous current I c A (rms) 2.7 2.7 7.3 7.3 7.3 Peak torque for 1 sec. T p Nm 12 24 18 36 54 Peak current for 1 sec. I p A (rms) 8.1 8.1 21.9 21.9 21.9 Torque constant K t Nm/A (rms) 1.55 3.1.96 1.92 2.88 Electrical time constant K e ms 2.9 2.9 4.4 4.4 4.4 Resistance (line to line, 25 C) R 25 Ω 2.4 4.8.5 1 1.5 Inductance (line to line) L mh 7 14 2.2 4.4 6.6 Number of poles 2p 14 14 16 16 16 Back emf constant (line to line) K v Vrms/(rad/s).9 1.8.6 1.2 1.8 Motor constant (25 C) K m Nm/ W.8 1.2 1.9 2.7 3.3 Thermal resistance R th C/W 2.8 3.4 2. 2.4 2.9 1 C, Bimetal(opener), DC12V/6A or DC24V/3A Max. DC bus voltage V 5 Inertia of rotating parts J kg m 2.5.1.2.3.4 Mass of motor M m kg 4.5 7 8 11 15 Max. axial load F a N 1 1 37 37 37 Max. speed n rpm 3 Repeatability Arc sec ± 3 Accuracy* Arc sec ± 75 Height H mm 12 16 19.5 134.5 159.5 Except dimensions, all the specifications in the table are in ±1% of tolerance.

M99TE5-15 69 Torque to rotational speed curve TMX4 Series 1 9 8 7 TMX48 6 5 4 3 TMX44 2 1 5 1 15 2 25 3 35 Rotation Speed (rpm) TMX6 Series 25 2 TMX68 15 TMX65 1 5 TMX63 5 1 15 2 25 3 35 Rotation Speed (rpm) The torque to speed curve may vary from different types of driving systems. The curves showing below are base on Hiwin standard drivers (amplifiers).tmx4 series are driven by LMDR6 which is using 11V AC as input voltage. TMX6 is driven by Xenus driver which is using 22V AC as input voltage. 5.3.1 TMX4 Rotary Tables Dimensions of TMX4 rotary tables (Values see Table 5.6) 6x6 =(36 ) 3 Connecting Thread 6xM4x8DP 1.3 A Ø11.3 A Ø35 Hollow Shaft 55 Signal Connection Rotation Section H 5 Motor Connection Ø6 A View-X View X Connecting Thread 4xM6x12DP

7 M99TE5-15 5.3.2 TMX6 Rotary Tables Dimensions of TMX6 rotary tables (Values see Table 5.6) 4x9 =(36 ) 45 Connecting Thread 4xM6x12DP Ø16 15.3 A.3 A Ø 17 Ø 45 Hollow shaft Connecting Thread 4xM6x12DP Rotation Section Signal Connection H 5 23 Motor Connection A (2.5) Ø 14 h7 Ø 18 Ø16 45 4x9 =(36 ) View-X View X Structure of the order number of TMX rotary tables TM X 4 4 Series Type Motor Outer Diameter Length of stack Torque Motor X: Resolver type 4: 11 mm 6: 17 mm 3: 3 mm 4: 4 mm 5: 5 mm 8: 8 mm