FLOW CONTROLLERS Instrument/Analyzer Products. Catalog 4513/USA April 2003

Similar documents
Flow Controllers. Instrument / Analyzer Products. Catalog 4513/USA April 2005

Packless Valves. Instrument / Analyzer Products. Catalog 4515/USA April 2006

BELLOWS VALVES. Microelectronics Product Line. Catalog 4506/USA October 2003

BULK GAS VALVES. Microelectronics Product Line. Catalog 4507/USA October 2003

Flow Limit Safety Shutoff Valves Model 1

packless valves Packless Valves Index Bellows & Diaphragm

VSO Thermally Compensated Proportional Valve

Normally Open Miniature Proportional Valve Thermally Compensated Proportional Valve

Models 415 & 425. Electronic Pressure Regulators. Customer Value Proposition: Contact Information:

Miniature Proportional Valve Thermally Compensated Proportional Valve. Physical Properties

Miniature Pneumatic Solenoid Valve. Power: 0.5 Watt & 1.0 Watt. Not all power options are available in all models, see ordering info.

Check Valve AP64 P.149. Vacuum Generator Vacuum Generator Module Vacuum Generator Module AP7 & 70 AP71 AP72. Flow Switch Flow Switch (For high flow)

Inline Adapters are Electro Polished to 10 Ra Max. 2 Valves supplied with Metal to Metal Face Seal connections have

pressure regulators Back Pressure Regulators

Pressure Regulators K Series

Miniature Multimedia Valves

Miniature Proportional Valves Precision Fluidics

Glass Tube Full-View Flowmeters

Colorflow and Ball Valves. Industrial Flow Control, Check, Gauge Control. Catalog HY /US

1Valcor Scientific. Subminiature Teflon Valve. 2-Way, Normally Closed Solenoid Valve Model: SV20-1 APPLICATIONS FEATURES INTRODUCTION DESCRIPTION

Series Regulators - Pressure Reducing

Phone (toll-free): (888) Phone (local): (973) Fax: (973) Web:

PORTER FLOWMETERS & FLOW CONTROLLERS. Technology you can trust

P99 Pressure Reducing Regulator

Series 11 Miniature Pneumatic Solenoid Valve 15mm Solenoid Valve

Thermal Mass Flow Meter (Analog)

Bourdon Tube Pressure Gauges Ultra High Purity (UHP) Series Type

SERIES. CRYOGENIC/PRESSURE BUILD REGULATOR 3/8 and 1/2" NPT, BSPT Inlet 400 Psig (28 Bar) Description

Miniature Proportional Valve. Non-Thermally Compensated Proportional Valve

VSO - MI thermally compensated proportional valve

Miniature Pneumatic Solenoid Valve

EVP SERIES PROPORTIONAL CONTROL VALVES

TELEDYNE HASTINGS INSTRUMENTS

Conductivity Sensors. Model 140, 141, 142. Product Data Sheet series/rev.b February 2011

(Accessory, see ordering info) Wetted Materials

Miniature Solenoid Valves Precision Fluidics. PNEUMATIK. HYDRAULIK. E-ACHSEN. BILDVERARBEITUNG Komponenten & Systemintegration

Regulators, valves, & gas delivery systems. March, 2019 Edition.

[THE MEASURABLE DIFFERENCE] UHP VALVES

Sanitary Valves JSB Series Back Pressure Valves

Table of Contents. Page. See Catalog and Product Updates on our Website

Valves. E Valves. Multiple Hydraulic System Applications

P95H Regulator Applications P95H Part Matrix Specifi cations Materials of Construction P95H Flow Coeffi cients Wide Open Coeffi cients

specification DAtA V R0 pilot operated tank blanket VAlVe, pressure regulating VAlVe SERIES V500

Thermo Scientific Gilmont

Miniature Solenoid Valves

Pneutronics. Miniature Proportional Valves. Catalog PND-MPV-001/US January 2007

Performance Data. Temperature Range. -20 o to 160 o F 26 Hg to 125 psi. C v Flow Rate (scfm) Fill Time Exhaust. Port.

Ball Valves (B Series) Catalog 4121-B Revised, November 2001

Pressure Regulators RHPS Series

Check Valves, Filters and Relief Valves

M-100 Series. Adjustable flow switch with right-angle flow

Evans SS-G & GXL -Series Integrated Stainless Gas Sticks

Bourdon Tube Pressure Gauges Ultra High Purity (UHP) Series Type

WDV-2 2-way normally closed poppet with air pilot. When valve closes a spring biased internal piston draws back a small volume on outlet side (approx.

D I V I S I O N O F M A R S H B E L L O F R A M

MANIFOLDS VALVE. Mfg & Exp. : Valves & Fittings. A Trusted Name in Valves and Fittings ISO 9001:2008 COMPANY. Catalogue No.

Filters. FW, F, and TF Series. Remove system particulate contaminants. Gas and liquid service. 1/8 to 1/2 in. and 3 to 12 mm end connections

SPRAGUE PRODUCTS AIR DRIVEN HYDRAULIC PUMPS

O-Rings. Back pressure may be required to reseal the valves with nominal cracking pressure of 5psi or lower.

Ball Valves (B Series) Catalog 4121-B January 2006

Ball Valves (B Series) Catalog 4121-B September 1999

Introduction to Inline Lubrication. Master Pneumatic

Ball and Plug Valves

Model RVL-20. Stainless Steel Low-Pressure Diaphragm Relief Valve

Flow Control Valves Check Valves Gauge Control Valves. Colorflow Valves

needle valves Needle Valves

needle valves Needle Valves

Bourdon Tube Pressure Gauges Ultra High Purity (UHP) Series Type

HM SERIES ULTRA-HIGH PURITY, METAL-DIAPHRAGM VALVES FOR GAS DELIVERY SYSTEMS ULTRA CLEAN VALVES

TECHNICAL DATA 1-1/2 (dn40)

INSTRUMENTATION ULTRA HIGH PURITY FITTINGS & VALVES

500 Series Adjustable Popoff & Inline Relief Valves.5 to 150 PSIG

Control Valves & Valve Accessories

Product overview. Technical data

ANDERSON GREENWOOD LOW PRESSURE POPRV CATALOG SERIES 90 AND 9000 PILOT OPERATED PRESSURE RELIEF VALVES. Product overview

E. Clark & Associates 10 Brent Drive Hudson, MA Tel. 978 / Fax 978 / Two Switch Output Hex Screw Adjustment

5100 Series Inline Relief Valve 10 to 2,400 PSIG

Check Valves (C Series) Catalog 4130-C Revised, July 2004

INSTRUMENTATION METERING VALVES. VMT Series.

AIR PREPARATION PRODUCTS. Table of Contents

metering valves Metering Valves Index 1300 Series Series Series 8

CASH VALVE SERIES FR BACK PRESSURE VALVES

Sinclair Collins. Process Control Valves. For Steam, Hot and Cold Liquids -40 to 450 F up to 500 psi. Catalog SCV-100/USA April 2001

74 Series Combination Filter/Regulator and Lubricator Unit, featuring an in-line shut-off valve, and Quikclamp system.

ball valves General Purpose Ball Valves

Technical Data... 3 How to Order... 4 Dimensions... 5 Inline Mount Valve... 6 Manifold Dimensions and Part Numbers... 6

Check Valves, Filters and Relief Valves

Rotary Plug Valves (PR Series) Catalog 4126-PR Revised, July 2003

Pressure Instrument Testing Equipment

Technology for a Better Future. VALVES International Edition.

Hydraulic and Pneumatic In-line and Cartridge Insert Control Valves for any fluid or gas.

JSBLF Series Compact, High Purity Low Flow Back Pressure Regulating Valve

Anderson Greenwood Low Pressure POPRV Catalog Series 90 and 9000 Pilot Operated Pressure Relief Valves

Flow Monitors Excess Flow Valves Flow Meters. ChemTec.com

Introduction Parker are designed for uni-directional flow control of fluids and gases in industries such as chemical processing, oil and gas productio

Pneumatic and Electronic Motion Control Distributor AIROYAL COMPANY airoyalcompany.net Ph: Fax:

Springless Diaphragm Valves (1.125 in.)

Series 1, 2 & 6 Options selector. Port 4 = 1/8" NPT 5 = 1/4" NPT (Series 6* only) 7 = #10-32 UNF 8 = 1/4-28 UNF

Baumann Pneumatic Pressure Controller (for Industrial and Sanitary Applications)

Valves, Fittings, and Manifolds Catalog. We make things MOVE

Transcription:

FLOW CONTROLLERS Instrument/Analyzer Products Catalog 4513/USA April 2003

FLOW CONTROLLERS Instrument/Analyzer Products Catalog 4513/USA April 2003 table of contents SC420 Series............. 1-2 SC423XL Series........... 3-6 LC221S Series............ 7-8 LC223S Series........... 9-10 Quantum FS190......... 11-12 VR7 Series............. 13-14 Parker Hannifin Corporation Veriflo Division 250 Canal Boulevard Richmond, CA 94804-0034 Telephone 510.235.9590 Fax 510.232.7396 http://www.veriflo.com

SC420 Series Low Flow Controller Parker Hannifin Corporation s Veriflo Division presents the SC420 Series low flow controller. The SC420 is manufactured for Precise Flow Control of Corrosive and Non-Corrosive Gases at Extremely Low Flow Rates. SC423S_T materials of construction Body.............. 316L Stainless Steel or Brass Seat................................ Viton Seals............................... PCTFE Diaphragm............... 316L Stainless Steel Range Spring........... 17-7PH Stainless Steel operating conditions Inlet pressure.............. 150 psig (10 barg) functional performance Flow range.................. see flow charts Supply pressure effect............... 0.6 psig.......... (0.03 barg) per 100 psig (6.80 barg) Flow Control Fine............. to 1000 scc/min. (see chart) Extra Fine.......... to 500 scc/min. (see chart) standard connections 1/8 NPT female approximate weight Stainless Steel........................ 1.5 lbs Brass................................. 1 lb SC423B features Corrosion resistant. Precise control at extremely low flows. Tamper-proof option available. 1 FLOW CONTROLLERS

SC420 Series Dimensional Drawing Micrometering Cartridges 2 1/8" 5/8" 9/16" 1 5/8" 1/2"DIA Hole Required For Panel Mounting Adjusting Knob Tamper-Proof Cover 1/2" Non-Rotating Stem 2 Mounting Holes 10-32, 1/4" DEEP 1 7/8" 1/8"Max Panel Thickness 1 3/4" Panel Mounting Nut O Ring Seal O Ring Seal 1 1/2" Body Seat Gasket O Ring Seal.875" 1.93" Flow Curves Flow in scc/min. of air 1000 500 Fine Metering Valve Extra Fine Metering Valve 0 0 50 100 150 Inlet pressure in psig Maximum flow as a function of inlet pressure. Flow in scc/min. of air 1000 500 200 100 50 20 10 5 2 1 20 psig inlet 20 psig inlet 10 psig inlet 10 psig inlet a b Outlet To Atmosphere 0 1 2 3 4 5 6 7 8 9 Valve opening in number of turns a:typical flow curves: Fine metering range. b:typical flow curves: Extra Fine metering range. 10 Ordering Information SC423 B XF PM BASIC SERIES SC421 = Constant Downstream SC423 = Constant Upstream MATERIALS B = Brass S = 316L Stainless Steel Viton is a registered trademark of DuPont Dow Elastomers. OPTIONAL FEATURES PM = Panel Mount T = Tamper Proof Cover MICROMETERING VALVE F = Fine Metering XF = Extra Fine Metering FLOW CONTROLLERS 2

SC423XL Series Precision Low Flow Control Parker Hannifin Corporation s Veriflo Division presents the SC423XL. The SC423XL is a unique device which supplies a constant flow with a self correcting action to compensate for changes in downstream pressure. The SC423XL was designed for air and analyzer sampling systems which require very low flow rates (less than 10 scc/m). Connected to a vacuum cylinder, the SC423XL provides consistent flow control despite changes in the vacuum. features materials of construction Wetted Body.................... 316L Stainless Steel Seat................................ Viton Seals............................... Viton Piston.................... 316L Stainless Steel Diaphragm.................. Hastelloy C-22 Inlet Fitting................ 316 Stainless Steel Outlet Fitting............... 316 Stainless Steel Non-wetted Cap..................... 316L Stainless Steel Filter...................... Sintered Hastelloy Cap Nut.................. 316 Stainless Steel operating conditions Inlet pressure................... Atmospheric Outlet pressure.................... Vacuum Flow..................... As low as 1 scc/m (See Flow Curve) functional performance Design Leak Rate: (outboard)................. 1x10-6 scc/sec HE temperature range -40 F(-40 C) to 200 F (94 C) standard configurations 1/4 NPT Female.............. inlet and outlet connections Inlet (Atmosphere)........... 1/4 NPT x 1/4........................ Compression Fitting Outlet (Vacuum)............. 1/4 NPT X 1/4.. Tube Adapter Rugged Design. Reliable Precision Flow Control as low as 1 scc/m. approximate weight 1.75 lbs. (.80 kg) Adjustable Flows. Hastelloy C-22 Diaphragms. Stable flows as vacuum pressure changes from 28 in Hg to 5 in Hg. Stable flows over a wide temperature band. Color coded orifices. Special CFC Free Cleaning. Tamper Proof. 3 FLOW CONTROLLERS

SC423XL Series Flow Curves 8 Flow Stability Curve-.0016 orifice 7 6 Flow Rate (scc/m) 5 4 3 2 1 0 0 5 10 15 20 25 30 Tank Pressure (Inches Hg Vacuum) 16 Flow Stability Curve-.002 orifice 14 Flow Rate (scc/m) 12 10 8 6 4 2 0 0 5 10 15 20 25 30 Tank Pressure (Inches Hg Vacuum) 30 Temperature Effect On Flow Rate 25 5% Flow Drop Flow Rate (scc/m) 20 15 10 8% Flow Drop 5 6% Flow Drop 0 75 80 85 90 95 100 105 110 115 120 125 Temperature ( F) FLOW CONTROLLERS 4

SC423XL Series Flow Curves 4 Flow Stability Curve-.0012 orifice 3.5 Flow Rate (scc/m) 3 2.5 2 1.5 1 0.5 0 0 5 10 15 20 25 30 Tank Pressure (Inches Hg Vacuum) 35 Flow Stability Curve-.003 orifice 30 Flow Rate (scc/m) 25 20 15 10 5 0 0 5 10 15 20 25 30 Tank Pressure (Inches Hg Vacuum) 5 FLOW CONTROLLERS

SC423XL Series Cross Sectional View 4.29 (109 mm) 1.13 (28.7 mm).55 (14 mm) OUTLET ø1.88 (47.8 mm) INLET Ordering Information BASIC SERIES SC423XL MATERIAL S = 316L Stainless Steel SC423XL S 24 SAMPLE TIME/FLOW RATE 3 = 27.1-27.7 sccm (Yellow) 8 = 10.0-10.4 sccm (Green) 12 = 6.5-6.9 sccm (Blue) 24 = 3.1-3.4 sccm (Red) 4T 4TS OUTLET CONNECTION X = No Connections 4TS = 1/4" Tube Fitting INLET CONNECTION 4T = 1/4" Compression Fitting (Incudes Flow Restrictor Kit) Hastelloy C-22 is a registered trademark of Haynes International, Inc. Viton is a registered trademark of DuPontDow Elatomers. FLOW CONTROLLERS 6

LC221S Series Liquid Flow Controller Parker Hannifin Corporation s Veriflo Division presents the LC221S Liquid Flow Controller. The LC221S is designed to control a constant downstream pressure. This is accomplished by maintaining a constant pressure differential across the unit s flow restrictor(customer supplied). The LC221S is ideally suited for applications in liquid chromatography, chemical injection, sampling systems, research labs and purge flows to instrumentation. materials of construction Body.................... 316L Stainless Steel Seat..................... 316L Stainless Steel Seals..................... Teflon and PCTFE... Kalrez and PCTFE operating conditions Maximum inlet pressure... 4000 psig (275 barg) Maximum downstream pressure:....................... 3800 psig (262 barg) Operating differential pressure:.................. 100 psig maximum (7barg) Operating Temperature........ -20ºF to +200ºF (-29ºC to +94ºC) internal volume Dome.............................. 3.2 cc Body.............................. 1.9 cc standard configuration Ports: Body and Dome 1/8 NPT female functional performance Flow range: Less than 0.1 scc/m to 1 lpm features Constant liquid flow with varying downstream pressure. Stable flow with upstream pressure variations. Wide flow range: less than 0.1 scc/m to 1 slpm. Wide pressure range: 200 to 4000 psig (14-275 barg). Flow trimming adjustment. Corrosion resistant. 7 FLOW CONTROLLERS

LC221S Series Specifications Flow Range: Less than 0.1scc/m to 1 slpm established by flow restrictor (user supplied). Flow Adjustment: Trimmable 2 1/2 to 1 with preselected flow restrictor (user supplied). Repeatability: Flow is stable within 0.5% of flow value under the following conditions: 1. Ambient temperature varies no more than 1 F. 2. Inlet pressure does not vary by more than 100 psig. 3. Downstream pressure does not vary by more than 15% of established value. Cross Sectional Drawing 1/8" NPT OPTIONAL: TO COLUMN OR PROCESS 4.00" (101 mm) 2.13 DIA (54 mm) 3.31" (84 mm) 1/8" NPT.69" (17.5 mm).88" (22 mm) 1.25" DIA (31.7 mm) 1.88" DIA (48 mm) 10-32 UNF.31 Deep 2 Plc's IN FLOW RESTRICTOR TO COLUMN OR PROCESS Ordering Information LC221S PCTFE and Teflon........................................................... 421 00 500 LC221SK PCTFE and Kalrez.......................................................... 421 00 550 Teflon and Kalrez are registered trademarks of DuPont. FLOW CONTROLLERS 8

LC223S Series Gas or Liquid Flow Controller Parker Hannifin Corporation s Veriflo Division presents the LC223S. The LC223S is a high pressure gas or liquid flow controller for liquid chromatography, chemical injection and sampling. features materials of construction Body................... 316L Stainless Steel Seal........................ Teflon, PCTFE Spring.................. 316L Stainless Steel O-Ring............................ Viton Diaphragm.............. 316L Stainless Steel operating conditions Maximum inlet pressure............ 5000 psig.............................. (345 barg) Maximum dome pressure.......... 5000 psig.............................. (345 barg) Required differencial pressure:....... 200 psig............................... (14 barg) Temperature: Teflon......... -20 F to 200 F (-29 C to 94 C) PCTFE......... -20 F to 150 F (-29 C to 66 C) functional performance Flow range........... 25 scc/m to 40 slpm Established by customer supplied flow restriction device. internal volume Dome........................... Body............................ 2.0 cc 2.1 cc standard configurations Body Ports................. 1/8 NPT female Dome Port................ 1/8 NPT female Constant flow with varying downstream pressure. Wide flow range: from 25 scc/m to 40 slpm. Wide pressure range: 200-5000 psig (13-345 barg). Corrosion resistant. Repeatability: Flow is stable within ± 0.2% of flow value under the following conditions: 1. Ambient temperature varies no more than 10 F. 2. Inlet pressure remains constant. 3. Downstream pressure does not vary by more than 70% of established value. 9 FLOW CONTROLLERS

LC223S Series Dimensional Drawing 2.41" (61 mm) 1/8 NPT 2 PLC'S.69" (18 mm) Outlet Inlet To Column or Process.88" (22 mm) 10-32 UNF - 2B 5/16" Deep 2 PLC'S Flow Restriction 1.88" DIA (48 mm) Ordering Information LC223K PCTFE................................................. 423 00 249 LC223S (Teflon )................................................ 423 00 250 Teflon is a registered trademark of DuPont Company. Viton is a registered trademark of DuPont Dow Elastomers. FLOW CONTROLLERS 10

FS190 Excess Flow Shut-Off Valve Parker Hannifin Corporation s Veriflo Division presents the FS190. The FS190 is a non-attitude sensitive, excess flow shut-off valve designed to operate with a wide range of inlet pressures. The capability of operating from 10 to 3500 psig allows it to be used either between a high pressure source at the inlet to the pressure regulator, or in the low pressure delivery line to a process. In both applications, this control valve will automatically shut off the delivery of gas if the flow exceeds a preset limit. The functional components of the FS190 are incorporated within the body style of a 1-1/4 inch Quantum valve. An actuating knob has been designed to manually operate the valve and clearly indicate the relative operating position - either Open (Reset) or Auto (Shut Off). A pneumatic actuator may be substituted for the knob, which makes it possible to reset the valve by sending a pressure signal from a remote source. The FS190 is offered with six different pressure/ flow limits: A,B,C,D,E, and F (see flow curve). The nominal differential pressure created at the flow limit is 5 psig for limit values A,B,C, and D. For limit values E and F, the differential pressure is 12 psig. The differential pressure that is created is not affected by mounting orientation (non-attitude sensitive). materials of construction Wetted Body.............. VeriClean, Veriflo s custom............. high purity type 316L Stainless Steel Compression member........ 316L Stainless Steel Seat.................................. PCTFE Diaphragm................ Elgiloy or equivalent Spring......................... Hastelloy C-22 Poppet..................... 316L Stainless Steel Orifice...................... 316L Stainless Steel Non-wetted Knob................ Anodized Aluminum (Red) Stem.............. 416 stainless steel (lubricated) Cap........................ 316L stainless steel operating conditions Supply Pressure............. 10 psig to 3,500 psig......................... (.7 barg to 241 barg) Differential Pressure............. 5 psig or 12 psig........................... (.3 barg or.8 barg) Flow Limit Settings.................. 6 available Temperature.................... -10 F to 150 F............................. (-23 C to 66 C) functional performance Design Leak Rate: Outboard................... 2 x 10-9 cc/sec. He Inboard.................... 2 x 10-10 cc/sec. He standard configurations 1/4" NPT female, 1/4" face seals or 1/4 tube stubs internal volume 1.86 cc (including face seal fittings) surface finishes Standard Ra..................... 15-20 micro in (.38 to.5 micrometer) or less Optional Ra....................... 10 micro in (.25 micrometer) or less approximate weight 12.5 oz. (.32 kg) 11 FLOW CONTROLLERS

FS190 Series Dimensional Drawings Flow Curve 1000 2.72 (69.1 mm) 1.67 (42.4 mm) 1.50 (38.1 mm) 1.25 (31.8 mm).44 (11.2 mm) FLOW LIMIT(slpm nitrogen) 100 10 1 F E D C B A #10-32 UNF-2B 4-PL 1.25 SQ (31.8 mm) 2.78 (70.6 mm) 0.1 10 (.7) 100 (7.0) 1000 (69) 3000 (207) INLET PRESSURE psig (barg).708 (18 mm) 1.00 (25.4 mm) Ordering Information BASIC SERIES FS190 MATERIAL S = 316L Stainless Steel FS190 S A FLOW LIMIT SETTING Nominal Flow Limit At 1000 psig inlet 30 psig inlet A = 4.8 SLPM 0.4 SLPM B = 9.1 SLPM 1.7 SLPM C = 21.8 SLPM 3.9 SLPM D = 39.5 SLPM 9.0 SLPM E = 72.3 SLPM 14.4 SLPM F = 120.6 SLPM 22.5 SLPM FSFM * Includes: Hastelloy C-22 Compression member, poppet, spring and orifice. AOP OPTIONS AOP = Air Operated TH = Hastelloy C-22 Trim internals* 3.70 = FLV 120 Dimensional Replacement 3.46 = FLV 110 Dimensional Replacement CONNECTION (Inlet & Outlet) P = 1/4" NPTF FSMM = 1/4" FS Male In - Male Out FSFF = 1/4" FS Female In - Female Out FSFM = 1/4" FS Female In - Male Out FSMF = 1/4" FS Male In - Female Out TS = 1/4" Welded Tube Stubs Elgiloy is a registered trademark of Elgiloy Company. Hastelloy C-22 is a registered trademark of Haynes International, Inc. FLOW CONTROLLERS 12

VR7 Series Pressure Relief Valve Parker Hannifin Corporation s Veriflo Division presents the VR7 Series relief valve. The VR7 is an economical relief valve designed to vent excess pressure from a regulator should a minor seat leak occur. The VR7 is recommended for use with regulators to protect the regulator and outlet pressure gauge. The VR7 is not intended for applications where repeated or frequent venting is required. features Choice of seal materials for system compatibility. Hex body provides wrench flats. Available with a variety of connections, seat materials, and pressure settings Note: The VR7 SHOULD ONLY be used to protect Article 3, Paragraph 3 category equipment as defined in Pressure Equipment Directive 97/23/EC Dated: 29, May 1997. materials of construction Wetted Body................ Brass, 316L Stainless Steel Seal............. Viton, Neoprene or Kalrez Spring..................... 302 Stainless Steel Poppet.............. Brass, 316L Stainless Steel Screw............. Delrin, 316L Stainless Steel operating conditions Adjustable Ranges:.... 10-20 psig (.6-1.4 barg),................... 20-100 psig (1.4-6.9 barg).................... 100-250 psig (7-17 barg)................... 250-500 psig (17-34 barg) Temperature Range Viton and Kalrez.............. -30 F 400 F......................... (-35 C to 204 C) Neoprene................... -40 F to 240 F.. (-40 C to 116 C) Maximum Pressure................. 750 psig surface finishes Standard Ra................ 15-20 micro inch... (.38 to.5 micro meter) or less functional performance Flow capacity..................... C v = 0.37. (SEMI Flow Coefficient Test# F-32-0998) standard connections ¼ inch pipe threads male inlet, female outlet (NPT). ¼ inch female pipe thread outlet, FS male or female fitting inlet. approximate weight 2.0 oz. (.06 kg) 13 FLOW CONTROLLERS

VR7 Series Dimensional Drawing Flow Curve (IN) 250 (17) 1.67 (42.4 mm) 2.32 (58.9 mm) INLET PRESSURE psig (barg) 200 (14) 150 (10.3) 100 (7) 50 (3.4) 5/8 HEX (15.9 mm) (OUT) 0 0 50 100 150 200 250 300 FLOW (slpm) Air Ordering Information VR7 44MF 1 S V BASIC SERIES VR7 CONNECTIONS (Inlet & Outlet) 44MF = 1/4" NPTM X 1/4" NPTF 4FSF = 1/4" FSF x 1/4" NPTF (Stainless Steel Body Only) 4FSM = 1/4" FSM x 1/4" NPTF Stainless Steel Body Only) Note: After relieving, service is required. Viton is a registered trademark of DuPont Dow Elastomers. Neoprene and Kalrez are registered trademarks of DuPont Company SEAL K = Kalrez N = Neoprene V = Viton MATERIAL S = 316L Stainless Steel B = Brass ADJUSTABLE RANGE 1= 10-20 psig 2= 20-100 psig 3= 100-250 psig 4= 250-550 psig FLOW CONTROLLERS 14

Parker Hannifin Corporation Veriflo Division 250 Canal Boulevard Richmond, CA 94804-0034 Telephone 510.235.9590 Fax 510.232.7396 http://www.veriflo.com Catalog: 4513 LitPN: 25000175 Revision: 0 4/03