UHV gate valve Series Main applications The standard valve for UHV isolation applications in research and industry Ordering information Valve with manual actuator crank handle Ordering numbers ISO-F metric threads UNF threads S-LP JIS -PE01 -E01 -UE01 -TE01 -JE01 -PE01 -E01 -UE01 -TE01 -JE01 0-PE01 0-E01 0-UE01 0-TE01 0-JE01 -PE01 -E01 -UE01 -TE01 -JE01 -PE01 -E01 -UE01 -TE01 -JE01 -PE01 -E01 -UE01 -TE01 -JE01 20 50-PE01 on request on request 50-TE01 50-JE01 with position indicator:.. -. E0 Valve with pneumatic actuator double acting with solenoid valve with position indicator Ordering numbers (specify control voltage) ISO-F metric threads UNF threads S-LP JIS -PE -E -UE -TE -JE -PE -E -UE -TE -JE 0-PE 0-E 0-UE 0-TE 0-JE -PE -E -UE -TE -JE -PE -E -UE -TE -JE -PE -E -UE -TE -JE 20 50-PE on request on request 50-TE 50-JE without solenoid valve, without position indicator:.. -. E1 without solenoid valve, with position indicator:.. -. E2 with solenoid valve, without position indicator:.. -. E (specify control voltage) Further ordering information on next page www.vatvalve.com K1
Features ody material: stainless steel ellows sealed, unlubricated mechanism with vulcanized seal (no dead volumes at the gate seal): see glossary Functional principle Series 1 Gate all pairs 7 Spring stop 2 ounter-plate 5 all detents Valve seat side Leaf springs Gate seal Technical data 1) Maximum values: depending on operating conditions and sealing materials Leak rate Valve body < 5 - mbar Is -1 Valve seat < 1-9 mbar Is -1 Pressure range 1 - mbar to 1. bar (abs) 20 1 - mbar to 1.2 bar (abs) ifferential pressure on the gate 1. bar 20 1.2 bar ifferential pressure at opening 0 mbar ycles until first service 50 000 Temperature 1) Valve body open, closed Manual actuator Pneumatic actuator Solenoid valve 50 Position indicator Further technical data on next page ontinued Ordering information Valve with -position pneumatic actuator double acting with solenoid valve with position indicator ISO-F Ordering numbers (specify control voltage) metric threads UNF threads S-LP JIS -PE -E -UE -TE -JE -PE -E -UE -TE -JE 0-PE 0-E 0-UE 0-TE 0-JE -PE -E -UE -TE -JE -PE -E -UE -TE -JE -PE -E -UE -TE -JE 20 50-PE on request on request 50-TE 50-JE without solenoid valve, with position indicator:.. -. E2 K1 www.vatvalve.com 7
UHV gate valve Series ontinued Technical data Heating and cooling rate 50 h -1 Material Valve body ISI 0 () Mechanism ISI 1L (1.0) 20 ISI 0 () ellows ISI 1L (1.0, 1.5) Seal onnet metal Gate FKM (Viton ) Feedthrough Mounting position Solenoid valve bellows any Position indicator: contact rating Voltage 50 V / urrent 1.2 Valve position indication 2 V, 5. W (others on request) visual (mechanical) Valve with manual actuator Valve with pneumatic actuator (nominal I..) Standard flanges onductance (molecular flow) (depending on dimension and flange type) Turns per stroke Weight ompressed air min. max. overpressure Volume of pneumatic actuator losing or opening time Weight ls -1 n kg lbs bar psi l ft s kg lbs 00 9 20 7 5 2 0.0 0.002 1 9 20 See pages 2 75 9 20 7 5 2 0.0 0.002 1 9 20 1 70 1 2 7 5 2 0.11 0.00 1.2 2 5 17 1 0 7 5 2 0.1 0.009 1.5 1 0 17 25 55 7 5 2 0.25 0.007 2 2 5 21 0 52 11 5 7 7 2 0.5 0.02 2 92 20 29 5 1 5 7 7 2 0. 0.017 5 95 2 Options ia. 1 ctuator Solenoid valve for impulse actuation: last valve position is maintained at power failure Solenoid valve separate, for external mounting Other solenoid valve voltage (standard: 2 V ) Manual emergency operation on solenoid valve lockable -position pneumatic actuator for throttling (ia. 1): ordering information on page 7, technical data on request ouble position indicator (2 switches each for the positions «open» and «closed») akeable position indicator: manual actuator bakeable to max., pneumatic actuator to max. Position indicator with change-over contact www.vatvalve.com K1
Series ia. 2 O-ring seal Valve ustomer specified flanges with / without watercooling Other sealing materials Vulcanized seal O-ring seal in gate (ia. 2) with,,, (standard: vulcanized seal) See glossary ia. Ports for roughing (by-pass), venting or for gauges (ia. ), possible in positions and valve Recoended port X Y Other ports on request 20 0 0 0 0 0 0 0 1. 1.7 1. 1.7.72 1.7 205.07 1.7 20.2 1.9 5 1.19 2 2. 1. 72 2. Space saving compact version, + (ia. ) Special gate for the installation of various foils Window in gate with,,, (ia. 5): window screwed into gate, window material: e. g. borosilicate, elastomer seal ia. 5 ia. 1 Valve body 5 Screwed window 2 Gate retainer Elastomer seal Valve seat side Window valve Optically free diameter «S» 0 1.57 1.9 2.7.5 Thickness of glass 0. 0. 0.2 0.2 Ordering information for options: Ordering No. of valve-x (e. g. -E-X, X = port 0 in position ) Spare parts Seals on request (specify fabrication number of valve) ccessories Heater on request (specify fabrication number of valve) Flange connections for installation of the valve: see series 2 and K1 www.vatvalve.com 9
UHV gate valve Series Main dimensions Valve with manual actuator: crank handle (2½" ") Valve with manual actuator: crank handle 20 (" ") g Required for dismantling e Mechanical position indication d Leak detection hole i For attachment Projection E Flange dimensions: see pages 2 K L M N O O1 P Q S T U U1 W 0 1.0 5 2.09 192 7.5 1.5.0. 1.1 11 0. 1 7.2.27.0 21 1.57 5 2.09 205.07 1.5.0. 1.1 11 0. 1 7.2.27.0 2 1.19 9 2.72 27 9.72 1.0 5.0 5.59 9 0.5 1 7.2.27.0 552 21.7 9.50.72 1.2 1. 7.2 192 7.5 25 0.9 1 7.2.27.0 1 1.22 0 25.9.72 0 1.9 9. 20 9.0 50 1.7.50 1.52.5.0 9. 1 1.1 1.11 11. 559 22.01 1.5 21. 50 17.72 7 2. 20 9.5.5.0 1 5.2 20 5 2.1 0.7 19 7. 72 2.50 17. 9.59 11.9 50 22.05 272.71.5.0 1 5.2 0 www.vatvalve.com K1
Main dimensions Valve with pneumatic actuator: double acting (2½" ") Valve with pneumatic actuator: double acting 20 (" ") Series g Required for dismantling b ompressed air connection c Electrical connection e Mechanical position indication f Position indicator d Leak detection hole h Emergency operation i For attachment Projection E Flange dimensions: see pages 2 K L M N O O1 P Q S T U U1 V W 1.2 5 2.09 192 7.5 1.5.0. 1.1 11 0..0.27.0 5 1.09 5 2.09 205.07 1.5.0. 1.1 11 0..0.27.0 1 1. 9 2.72 27 9.72 1.0 5.0 5.59 9 0.5 171.7.27.0 52 2 9.50.72 1.2 1. 7.2 192 7.5 25 0.9 17 7..27.0 1 1.22 0 2..72 0 1.9 9. 20 9.0 50 1.7.50 1.52.5.0 5. 7. 1 1.1 0 1.50 11. 559 22.01 1.5 21. 50 17.72 7 2. 20 9.5.5.0 5. 7. 20 5 2.1 1 9. 19 7. 72 2.50 17. 9.59 11.9 50 22.05 29 11..5.0 5. 7. K1 www.vatvalve.com 1
UHV gate valve Series Flange dimensions ISO-F 20 (2½" ") 5. 1. 5.92 7.50 225. 0 25 11.22 20.2 50 1.7.20 21.2 20.72 25 1.7 95.55 0.05 E F M M M M M M M G H I 1 1.27 0. 1 2.02 0. 1.02 5 0.20 21.9 5 0.20 1 0.71 1.52 5 0.20, metric threads (2½" ") O.. ½ ⅝ 11.50.7 92.. 117.50. 2.0.0 7 1.0 5.97.20 5.1 202.0 7.97 11 7.1 0 25.20 9.97 21. 9.1 50 1.7 2 11.1 25.00 E F M M 1 M 20 M 2 M 2 M H1 H2 2.50.25.0.05 91.5.1.0.0..75 1.50.55 171.5.75 1.5 222.0.7 217.5 27.75 27.51, UNF threads (2½" ") *) *) O.. ½ ⅝ 1 ¼ E F H1 H2 11.50.7 92.. 5 / 1" 2 UNF 2.50.25.0.05 117.50. 2.0.0 7 5 / 1" 2 UNF 91.5.1.0.0 1.0 5.97.20 5.1 1 5 / 1" 2 UNF..75 1.50.55 202.0 7.97 11 7.1 0 20 5 / 1" 2 UNF 171.5.75 1.5 25.20 9.97 21. 9.1 2 5 / 1" 2 UNF 222.0.7 217.5 50 1.7 2 11.1 25.00 2 5 / 1" 2 UNF 27.75 27.51 50 1.7 0.0.0 25.00 0 / " 2 UNF 29. 11.0 2.0 11.5 Projection E *) O.. " VT standard, O.. 1 ¼" option Ordering information for option: O.. 1¼" Ordering No. of valve-x (e. g. -UE-X, X = O.. 1¼") 2 www.vatvalve.com K1
Flange dimensions S-LP 20 (2½" ") with or without O-ring groove Series S-LP 2 20 For orders with O-ring groove specify:, or «+» E F G H O-ring I.. d 2.0.00..75 ⅜" 1 UN..50.9.5..19 1. 7.00 19. 5.50 7 ⅜" 1 UN..50.9.5..19 1.50 7.50 2.0.00 ⅜" 1 UN.5.75 225. 1.50 7.50 0 ⅜" 1 UN.75.25 279.0 11.00 21.0 9.50 ¾" UN 19 0.75 20.0.1 50 1.7 29.50 11.75 25.00 ¾" UN 19 0.75 2..50.72 25 1.7 2 1.25 00 11.1 ¾" UN 19 0.75 17.50.50.2.5..5 202.79.5 2.29.5 1.7 7.00.7.19.2.19 7.9.19..19.7.275 JIS 22: 199 / ISO 9 5 00 (2½" ") 5 1 5.5.72.50 5.1 7 7.2.0 0 25 9.25 2.27 0 00 11.1 2. 50 1.7 20.0 21.2 00.72 25 1.7 1.57 0.05 E F M M M M M M M G 1 1 1 1 1 0. Projection E K1 www.vatvalve.com