Miniature Pneumatic Solenoid Valve. Power: 0.5 Watt & 1.0 Watt. Not all power options are available in all models, see ordering info.

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8 Ten-X 10 mm Normally Open/Closed Solenoid Valve Typical Applications Portable medical equipment Patient monitors Wound therapy Blood Pressure Monitoring Dialysis Product Specifications Mechanical Valve Type: 3 Port, Direct acting poppet style - Normally Open (NO) - Normally Closed (NC) - Distributor *Reference ordering information for available configurations. Media: Non-Reactive Gases Operating Environment: 3 to 1 F (0 to 50 C ) Storage Temperature: -40 to 158 F (-40 to 70 C) Dimensions: - Length: 1.5 in (31.8 mm) - Width: 0.39 in (9.9 mm) - Height: 0.48 in (1.1 mm) to Manifold Face / 0.65 in (16.4 mm) to Barb End Porting: - Barbs for 5/64 in ( mm) I. D. Tubing - Manifold Mount (Gasket accessory required, see ordering info) Weight: 0.39 oz (10.7 g) Internal Volume: 0.0080 in 3 (0.131 cm 3 ) The Ten-X miniature pneumatic solenoid valve measures only 10 mm in width and consumes as little as 0.5 watts of power making it an ideal solution for applications with limited space and available power. The Ten-X miniature pneumatic solenoid valve features repeatable on and off response times,stable performance and a universal body design that is suited for manifold or barbed-tube mounting. The Ten-X miniature pneumatic solenoid valve is available in -way or 3-way normally open/normally closed configurations. Features Quiet, lightweight design with small footprint providing up to 8 lpm of flow Compact, efficient side-to-side mounting to minimize system size Universal barb or manifold connections and PCB mount for added system design flexibility 0 million cycles (worst case tested, no performance degradation) RoHS compliant Electrical Power: 0.5 Watt & 1.0 Watt Not all power options are available in all models, see ordering info. Voltage: 5, 1 or 4 VDC Further power reduction may be achieved through the use of spike and hold or PWM electrical control. Electrical Connections: - PC Pins, 6 mm centers (all models) - Lead Wire/Connector Assembly, (Accessory, see ordering info) Wetted Materials Bobbin/Body: PBT (Polybutylene terephthalate) Glass Filled Pole & Plunger: 430 FR Series Stainless Steel Seal (Options): Silicone, EPDM, or FKM Other: 30 Stainless Steel, Nickel Plated Performance Characteristics Leak Rate: 0.016 sccm - (Air) - Valve Type #1 (Normally Open - Silicone/EPDM) - Valve Type #7 (Normally Open - Silicone) 0. sccm - (Air) - Valve Type # (Normally Closed - FKM) - Valve Type #6 (Distributor - FKM/EPDM) Response Time: < 5 ms maximum cycling (Silicone) < 0 ms maximum cycling (FKM, EPDM) < 0 ms cycling (Viton & EPDM) Pressure/Vacuum: 6 psid (0.4 bar differential) Proof Pressure: 00 psig (13.7 bar) Minimum Flow: 8 slpm @ 6 psid (0.4 bar differential) Orifice Sizes/Equivalent Cv: 0.060 (1.5 mm) / 0.04 Ten-X is a registered trademark of Parker Hannifin Corporation.

9 Ten-X Typical Flow Curve Model 1 0.060 (1.5 mm) Orifice (Tested w/air 4 C) Pressure (bar) 00 0.0 01 0.1 0 0. 03 0.3 04 0.4 10 8 pm) Rate (sl Flow 6 4 0 0 1 3 4 5 6 Pressure (psi) Pneumatic Interface / Electrical Interface Short Pin (For Pin/Wire Lead or PCB Terminal Housing Connection) [Reference Accessories section] Long Pin (For Pin/PCB solder mount connection)

30 Ten-X Pneumatic Interface / Electrical Interface Coil Connections Electrical Connection Options: Electrical terminals compatible with Molex 51065 series connector or equivalent. Mechanical Integration Dimensions SIDE VIEW NORMALLY OPEN PORT (3X) BARB FITTING FOR.078 [1.98] I.D. POLYURETHANE TUBING X.175 [4.45] TO PIN C/L.07 [5.6] BOTTOM VIEW.36 [5.99] RECEPTACLE CONTACTS FOR.00 [0.51] SQ. TERMINAL POSTS.1 [5.38].870 [.10].966 [4.54] 1.5 [31.75] COMMON PORT NORMALLY CLOSED PORT.170 [4.3].475 [1.07].195 [4.95].390 [9.91] UNITS IN [MM]

31 Ten-X LEGEND: SUPPLY: Pneumatic Source or Supply Pressure ANSI Symbols (1) EXTERNAL PLUG Pneumatic Schematics by Valve Types TYPE 1 (-WAY NORMALLY OPEN) (SILICONE AND EPDM ONLY) 3 EXHAUST: Exhaust to Atmospheric Pressure REQMT: Customer Requirement or Application ATM: Atmospheric Pressure EXTERNAL PLUG: External Port Plug (Customer Supplied) (3) REQMT () SUPPLY (1) EXTERNAL PLUG TYPE (-WAY NORMALLY CLOSED OPTION) (FKM ONLY) (3) EXTERNAL PLUG 1 (3) EXTERNAL PLUG () SUPPLY (1) REQMT TYPE (3-WAY NORMALLY CLOSED OPTION) (FKM ONLY) (3) EXHAUST 1 3 (1) ATM TYPE 6 (DISTRIBUTOR) (FKM AND EPDM ONLY) (3) REQMT 1 3 () SUPPLY (1) REQMT TYPE 7 (3-WAY NORMALLY OPEN) (SILICONE ONLY) 1 3 (3) ATM (1) EXHAUST

3 Ten-X Installation and Use Ten-X Manifold Mount Diagram Parker Precision Fluidics recommends 3-5 in-oz of torque for the screws.394 [10.01] -56 UNC-B.14 [3.6] (40 ).197 [5.00].005 [0.13] (Ø.154 [Ø3.91]) (Ø.13 [Ø3.35]).871 [.1].966 [4.54].394 [10.01] DETAIL "B".090 [.9] X "DEPTH".13 ±.001.180 [Ø3.35 ±0.03 4.6] Ø.154 ±.003.055 ±.00 [Ø3.91 ±0.08 1.40 ±0.05] 40 TO.13 (SEE DETAIL B) UNITS IN [MM] Recommended Ten-X Manifold Dimensions 4X Ø.070.19 ±.0 [Ø1.78 4.8 ±0.5] -56 UNC-B.14 ±.0 [3.6 ±0.5].600 [15.4].394 [10.01].170 [4.3].350 [8.89].197 [5.00].005 [0.13] SEE DETAIL "B".170 [4.3] TO PORT 1.55 [39.4].871 [.1] PORT TO PORT.966 [4.54] PORT TO PORT X Ø.090.375 [Ø.9 9.53] 10-3 UNF-B.5 ±.0 [6.4 ±0.5].375 [9.53].750 [19.05] (40 ) (Ø.154 [Ø3.91]) (Ø.13 [Ø3.35]) X.090.350 [Ø.9 8.89].13 ±.001.180 [Ø3.35 ±0.03 4.57] Ø.154 ±.003.055 ±.00 [Ø3.91 ±0.08 1.40 ±0.05] 40 TO.13 [Ø3.35] (SEE DETAIL A) DETAIL "A" (.005 [0.13]).375 [9.53].350 [8.89] Ø.090.415 [Ø.9 10.54] 10-3 UNF-B.5 ±.0 [6.4 ±0.5] DETAIL "B" UNITS IN [MM]

33 Ten-X Accessories Manifold Rubber Gasket (FKM) 195-00011-001 18 Wire Lead with connector 590-000106-001 (For use with Short Pin valve configuration) Mounting Options Manifold Rubber Gasket (EPDM) 195-0004-001 Screw #-56 x 5/8 Pan Head 191-00011-010 ( required for each valve) Ordering Information Sample Part ID 914 1 1 1 05 1 Electrical Description Series Elastomer Valve Type / Elastomer / Power Model Voltage Coil Connection Options 914 1: Silicone 1: -Way Normally Open* 6 PSIG Silicone / EPDM Elastomer / 0.5 Watt : FKM (viton) : /3 Way Normally Closed 6 PSIG FKM Elastomer Only / 1 Watt 1: Standard 05: 5 VDC 1: Pins (6 mm) 3: EPDM 6: Distributor 6 PSIG 4: 4 VDC 7: 3-Way Normally Open 6 PSIG Silicone Elastomer / 1 Watt 1: 1 VDC : PC Mount * Port 1 requires an external plug Accessories 195-00011-001: Manifold Rubber Gasket (FKM) 195-0004-001: Manifold Rubber Gasket (EPDM) 590-000106-001: 18 Wire Leads with connector 191-00011-010: Screw -56 x 5/8 Pan Head ( required for each valve) ORDER ON-LINE NOTE: In order to provide the best possible solution for your application, please provide the following requirements when contacting Applications Engineering: Media, Inlet & Outlet Pressures Minimum Required Flow Rate System Supply Voltage Media Ambient Temperature Range Please click on the Order On-line button (or go to www.parker.com/precisionfluidics/tenx) to configure your Ten-X. For more detailed information, visit us on the Web, or call and refer to Performance Spec. #790-0013-001 and Drawing #890-003150-003. For more information call +1 603 595 1500 or email ppfinfo@parker.com Visit www.parker.com/precisionfluidics PPF-MSV-00/US April 016