High Precision Filter for Liquids Series Filtration efficiency: 99% or more HEPO2element Filtration accuracy: 2, 4, 6 or 13 µm (Filtration efficiency 99%) Membrane element Filtration accuracy: 0.2 or 0.4 µm (Filtration efficiency 99.9%) 797
High Precision Filter for Liquids Series Filtration efficiency: 99% or more Prevents particle generation in the housing Internal particle generation is eliminated by using stainless steel 316 and PTFE for the wetted material and adopting a clamp ring system. High cleanliness and high quality High cleanliness and high quality are ensured by manufacturing elements in a clean room (Class M 5.5 (ISO Class 7) ) and performing 100% inspection of integrity. Per F-STD 209E (ISO14644-1). Prevents residual liquid accumulation in the case A simple structure prevents the residual liquid from accumulating in the case. Application examples Ultrasonic cleaning machine Manufacture of electric and electronic industrial components Manufacture of semiconductor-related components Dual chamber ultrasonic cleaning machine Steam Triple chamber ultrasonic cleaning machine Jet cleaning machine Camera, lens and bearing for manufacture of highprecision processing components Nozzle for manufacture of automobile components Series Cleaning Cleaning Ultrasonic Boiling chamber chamber Ultrasonic chamber Dipping chamber Steam chamber Clean tank Dirty tank Clean tank Dirty tank 798 Pre-filter Series Series Pre-filter Pre-filter Series Pre-filter
HEPO 1Element Filtration accuracy: 2, 4, 6 or 13 m (Filtration efficiency 99%) High precision filtration: 99% or more High accuracy filtration is achieved by using a HEPO 1element with filtration accuracy of 2, 4, 6 or 13 µm (Filtration efficiency 99%). [Test conditions] Fluid: water / Test dust: ACFTD / Flow rate: 35 l/min Dust concentration: 10 mg/l / Temperature: 20 C Element: 801S Initial filtration efficiency (%) 100 99 95-4 µm -2 µm -6 µm 90 0 2 4 6 8 10 12 13 14 Particle diameter (µm) -13 µm Dust feeder Schematic diagram of filtration efficiency data measuring circuit There is almost no outflow of fibers or elution of components from the filter media because it uses ultrafine and long polyester fiber nonwoven fabric with no binder. Tank Pump The element is applicable for a wide range of liquids because it adopts PTFE seals. Applicable fluids Classification Water Alcohol Hydrocarbon Ester Oil/fuel oil Others Description Tap water, industrial water, distilled water, ion-exchange water, pure water, ultrapure water Isopropyl alcohol (IPA, propanol) Ethyl alcohol (ethanol) Methyl alcohol (methanol) Butyl alcohol (butanol) Ethylene glycol Petroleum ether, petroleum benzene Methyl acetate, ethyl acetate, methyl acrylate Hydraulic fluid, lubricating oil, light oil, kerosene, cutting oil, grinding oil Ammonia (10% solvent), ethyl ether, isopropyl ether Differential pressure gauge Pressure gauge Upstream side sampling Flow meter Measuring filter Automatic particle measuring instrument No outflow of fibers or elution of components from the filter media Applicable for a wide range of liquids µ Downstream side sampling 799
Membrane Element Filtration accuracy: 0.2 or 0.4 m (Filtration efficiency 99.9%) High precision filtration: 99.9% or more High accuracy filtration is achieved by using a membrane element with filtration accuracy of 0.2 or 0.4 µm (Filtration efficiency 99.9%) Test conditions Fluid: pure water Contaminant: polystyrene latex particles Particle measuring method: 0.2 µm automatic particle measuring instrument Filtration Particle Number of particles (/10 ml) Filtration rating diameter efficiency (µm) (µm) Upstream side Downstream side (%) 0.2 0.4 0.208 0.309 0.41 146380 103957 95019 1 2727 29.9 99.999 97.4 99.97 Easy to handle Long filtration life The element has a long filtration life because of the high porosity and low pressure drop of the filter media. The dust retention amount of the 0.2 µm version is 90 g. Pre-rinsed with ultrapure water There is no need of hydrophilic treatment using IPA and the like, because the element uses a hydrophilic filter media. (0.2 µm version only) µ Schematic diagram of filtration efficiency data measuring circuit Tank Pump Differential Flow meter pressure gauge Pressure gauge Upstream side sampling Automatic particle measuring instrument Downstream side sampling Measuring filter Applicable fluids Classification 0.2 µm 0.4 µm Water Tap water, ultrapure water, ion-exchange water, distilled water Alkalis Aldehyde Sodium hydroxide (10%) Potassium hydroxide (10%) Ammonia water (28%) Formaldehyde (35%) Ammonia water (28%) Formaldehyde (35%) Methyl alcohol, butyl alcohol, Alcohol ethyl alcohol, propyl alcohol Dioxane Ether Ethyl ether Ethyl ether Benzene Benzene, toluene, Hydrocarbon Hexane hexane, xylene Can be used depending on temperature conditions (please consult with SMC). Resistivity recovery characteristics [Measuring conditions] Element used: 801S-X20 Element size: ø70 x L247 Resistivity value (MΩ cm) 20 18 16 14 12 10 8 Filtration area: 4000 cm 2 Fluid: Ultrapure water (resistivity value 17.9 MΩ cm) Flow rate: 10l/min 800 0 0 5 10 15 20 25 30 35 40 45 50 55 60 Flow time (min) Per JISK3834
High Precision Filter for Liquids Series RoHS High precision filter for liquids How to Order 100 03 J 002 T Element seal Symbol T Material PTFE Symbol 100 200 300 Element length l117 l246 l496 Body size Applicable element 701S 801S, 801S 901S, 901S The membrane element cannot be selected for 100. Port size 03 Rc3/8 04 Rc1/2 06 Rc3/4 10 Rc1 Filtration accuracy Symbol Filtration accuracy Applicable for: Applicable body 002 2 µm Filtration 004 4 µm efficiency 006 6 µm 99% 013 13 µm X20 0.2 µm Filtration efficiency X40 0.4 µm 99.9% HEPO 2 Membrane 100 to 300 200 to 300 Element classification Note) Symbol Element J HEPO 2 D Membrane Note) Refer to pages 806 to 809 for details about specifications, models, dimensions, etc. regarding the elements. Specifications Model 100 200 300 Number of built-in elements (element length) (mm) Operating pressure Operating temperature Applicable fluid Port size (Rc) Material Mass (kg) Internal capacity (l) Description Tightening tool Housing Seals Part number FTT410S 1(125) Accessories for 100-300 (Option) Tool for tightening clamp rings 1(250) 1(500) MAX. 1 MPa MAX. 80 C (Not above the boiling point) Each kind of fluid (See the table of applicable fluids on pages 799 and 800) 3/8, 1/2, 3/4, 1 Stainless steel 316 (Electrolytic polishing) PTFE 2.6 1.0 3.2 1.8 4.3 3.3 801
Series Flow Rate Characteristics of Built-in HEPO 2 Elements (Fluid: water, temperature: 20 C) 002 (2 µm) 004 (4 µm) 006 (6 µm) 013 (13 µm) Series 100 100-03 {Rc3/8} Series 200 200-03 {Rc3/8} Series 300 300-03 {Rc3/8} 100-04 {Rc1/2} 200-04 {Rc1/2} 300-04 {Rc1/2} 100-06 {Rc3/4} 200-06 {Rc3/4} 300-06 {Rc3/4} 100-10 {Rc1} 200-10 {Rc1} 300-10 {Rc1} 802
High Precision Filter for Liquids Series Flow Rate Characteristics of Built-in Membrane Elements (Fluid: water, temperature: 20 C) Series 200 X20 (0.2 µm) X40 (0.4 µm) 200-03 {Rc3/8} 200-04 {Rc1/2} 200-06 {Rc3/4} 200-10 {Rc1} Series 300 300-03 {Rc3/8} 300-04 {Rc1/2} X20 (0.2 µm) X40 (0.4 µm) 300-06 {Rc3/4} 300-10 {Rc1} 803
Series Construction / Spare Parts and Seal List Hexagon head bolt AIRVENT w Seal Cover q Gasket Clamp ring Name plate Element Case e Seal Plug Spare Parts and Seal List No. Description Part number 100 200 300 1 2 3 Gasket Seal Seal AL-58S AL-43S AL-53S Note) Use each one of the above parts for each filter unit. 804
High Precision Filter for Liquids Series Dimensions 100/200 300 2 x Rc M6 x 1 2 x Rc M6 x 1 Pull-out dimension Pull-out dimension Dimensions Model Element length 100 ø70 x L117 200 ø70 x L246 300 ø70 x L496 Port size (Rc) 3/8, 1/2 3/4, 1 3/8, 1/2 3/4, 1 3/8, 1/2 3/4, 1 A 235 240 364 369 615 620 B 211 340 591 805
HEPO2Element for Series Series RoHS Specifications Model Filtration accuracy (Filtration efficiency 99%) Filtration area (cm 2 ) Heat resistant temperature ( C) Material Filter media Pressure resistance Reinforcement material Others Length 117 mm 246 mm 496 mm S-002 2 1890 4250 8500 Note) See "How to Order" below for items represented by. S-004 4 S-006 2310 2090 5200 4700 10400 9400 80 Polyester Polypropylene Polypropylene 0.5 MPa at 20 C, 0.125 MPa at 80 C 6 S-013 13 2490 5600 11200 How to Order Elements 701 S 002 T Element classification HEPO 2 Element seal T PTFE Element size symbol 701 For 100 801 For 200 901 For 300 Filtration accuracy (Filtration efficiency 99%) 002 2 µm 004 4 µm 006 6 µm 013 13 µm 806
HEPO 2 Element for Series Series Construction 701S, 801S, 901S Reinforcement material Filter media Dimensions B A ø70 ø53 Element Dimensions Model A 701S- T 157 801S- T 286 901S- T 536 B 117 246 496 Applicable container 100 200 300 807
Membrane Element for Series Series RoHS Specifications Model Filtration accuracy (Filtration efficiency 99.9%) Note 1) S-X20 0.2 S-X40 0.4 Filtration area (cm 2 ) 247 mm 495 mm 4,000 8,000 6,200 12,400 Heat resistant temperature ( C) 80 Material Filter media Reinforcement material Others Polyether sulfone Polypropylene Polypropylene Cellulose acetate & polyester Polyester Polypropylene Pressure resistance 0.5 MPa at 20 C, 0.125 MPa at 80 C Note 2) Resistivity recovery Others 60 min at 10 l/min 100 l/4000 cm 2 Pure water cleaning Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = MPa. Note 2) Resistivity recovery: time taken to recover to 18 MΩ cm with ultrapure water. Note 3) See How to Order below for items represented by. Length How to Order Elements 801 S X20 T Element classification Membrane Element seal T PTFE Element size symbol 801 For 200 901 For 300 Cannot be used for 100. Filtration accuracy (Filtration efficiency 99.9%) X20 X40 0.2 µm 0.4 µm 808
Membrane Element for Series Series Construction 0.2 µm S-X20 0.4 µm S-X40 Reinforcement material Reinforcement material Filter media 0.2 µm Filter media 0.4 µm Dimensions Element Dimensions Model A 801S-X T 285 901S-X T 533 B 247 495 Applicable container 200 300 809