Body width of 10mm, Nl/min (49.08) 2W (Standard) Nl/min (78.52) 4W (U type: Large flow) Vacuum applications possible (up to 100kPa) 3 S.

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High speed coil with stable response times ON: 4ms, OFF: 2ms, Dispersion accuracy: ±1ms (With light and surge voltage suppressor at a supply pressure of 0.5MPa, subject to clean, dry air) 4 Port Direct Operated Poppet Solenoid Valve SeriesVQ D1000 Vacuum applications possible (up to 100kPa) 3 S (Valve leakage: 0.03cm / He or less) Can be used for vacuum and vacuum release circuits. When used as a 3 port valve, conversion from N.O. to N.C. and vice versa is possible by plugging either port 4(A) or 2(B). Compact and lightweight (34g) with large flow capacity Body width of 10mm, Nl/min (49.08) 2W (Standard) Nl/min (78.52) 4W (U type: Large flow) Clean room specifications available as special. Main valve has no sliding seals or grease and air is not exhausted to the atmosphere. Body ported Copper free specifications standard Components of the valve that are in contact with fluid are all copper free. Cylinder Speed Port size Effective area mm 2 Cylinder speed (mm/s) Cylinder bore size (mm) Series CJ2 Series CM2 Pressure: 0.5MPa Pressure: 0.5MPa Load ratio: 50% Load ratio: 50% Cylinder stroke: 60mm Cylinder stroke: 300mm Note 1) Cylinder speed varies depending on piping and air component equipment used. Use the table as a guideline for selection. Note 2) Cylinder speed of CJ2 and CM2 is limited by the fixed orifice built-in. Note 3) Cylinder speed: when the cylinder is extended. (Nl/min) ø6 ø10 ø16 ø20 ø25 ø32 ø40 150 VQD1151U (Large flow capacity) M5 1.5 (78.52) 300 450 600 750 Characteristic values mentioned in the catalog are typical values and are not to be guaranteed. 1.16-1

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Precautions Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. Warning Manual Operation Connected actuator is started by manual operation. Use the manual override after confirming that there is no danger. Non-locking push style (Flush) How to Use Plug Connector Caution Installation and removal of connector For installation of the connector, insert the connector straight on the pins of the solenoid, making sure that the lip of the lever is securely positioned in the groove of the cover and locked. To remove the connector, press the lever against the connector and pull connector away from the solenoid. Note: To avoid contact failure and broken wires, do not pull out the lead wire with excessive force. Lever Cover ø3 In order to turn it ON, push down the manual override button in the direction the arrow ( ) indicates until it stops ( 5mm), and release it to turn it OFF. Groove Pin Connector Wiring Specifications Caution Standard: 2W specification Lead wire Timer circuit Diode LED ZNR Coil Large flow capacity: 4W specification Coil LED Connector (+, ) Red A (+, ) Black C Lead wire Connector (+) Red A i1 i2 ( ) Black C i1: Inrush current i2: Holding current How to order connector assembly AXT661-14A- Lever Connector Lead wire length 6 10 20 30 300mm 600mm 1000mm 2000mm 3000mm For the 4W specification (power saver), power consumption at holding is reduced with the above circuit. Refer to the power wave form below. <Power saver style power wave form> (Rated voltage: 24V DC) 24V 0V 4W 2W 0W Applied voltage 10ms Power saver Lead wire length of plug connector Lead wire length of plug connector valve with lead wire is 300mm. When lead wire length of 600mm or longer is required, order a valve without connector and order connector assembly separately. How to Use the Valve for Vacuum Applications (When used as a 3 port valve) Caution Application example of VQD1151 V/W (Symbols used are typical.) Vacuum valve 3(R) 4(A) Vacuum pad Caution How to Mount Valve After confirming that the gasket is snug, tighten the mounting screws securely with the clamping torque shown in the table below. Appropriate clamping torque (Nm) 0.18 to 0.25 1(P) 2(B) Air for vacuum release atmosphere or air pressure Use a VQD1151V/W valve for vacuum applications. Connect the vacuum source to the 3(R) port. Air pressure cannot be applied to the 3(R) port. When used as a 3 port valve, conversion from N.O. to N.C. and vice versa is possible by plugging either port 4(A) or 2(B). Cannot be used as 2 port valve. 1.16-3

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000 How to Order VQD11 5 1 5 L Q 2 3 5 Body Body ported (Single unit) Body ported (Manifold) V U W (1) (1) Valve option Standard (2W) Vacuum (2W) Large flow (4W) Large flow, Vacuum (4W) Note 1) Power saver type 5 6 9 Order Made Rated voltage 24V DC 12V DC Less than 50VDC Contact SMC for other voltages (9) Protective class class III (Mark: ) Sub-plate port size Body ported M5 M5 thread Without sub-plate (Manifold) M5 M5 thread Electrical entry L: Plug lead L plug connector, With lead wire and light and surge suppressor LO: Plug lead L plug connector, Without lead wire and light and surge suppressor M: Plug lead M plug connector, With lead wire and light and surge suppressor MO: Plug lead M plug connector, Without lead wire and light and surge suppressor L plug connector M plug connector JIS Symbol 1.16-4 (A) (B) 4 2 3 1 (R) (P) L plug connector Body ported M plug connector Body ported Standard Specifications Item Valve specifications Solenoid specifications Model Valve structure Fluid Max. operating pressure Min. operating pressure/vacuum Effective area (Nl/min) Response time (1) Ambient and fluid temperature Lubrication Manual override Shock/Vibration resistance Mounting orientation Enclosure Weight Coil rated voltage DC Allowable voltage Type of coil insulation Power consumption DC Electrical entry Standard Large flow capacity (2W) (4W, Power Saver) 4 port direct operated poppet valve Air, lnert gas 0.7MPa 0MPa/ 100kPa 0.9mm 2 (Nl/min 49.08) 1.5mm 2 (Nl/min 78.52) ON: 4ms, OFF: 2ms 10 to 50 C (2) Not required Non-locking push style 150/30m/s 2 (3) Free Dust proof 34g (Without sub-plate) 24V, 12V ±10% of rated voltage Class B or equivalent 4W (Power saving) 2W (Inrush: 4W, Holding: 2W) L plug connector, M plug connector (With light and surge voltage suppressor) Note 1) According to JISB8375-1981. Factor: With light and surge suppressor (Subject to clean air). Dispersion accuracy: ±1ms Note 2) Operating the valve at low temperatures may cause condensate to form, therefore dry air must be used. Note 3) Shock resistance: No malfunction resulted from the impact test using a drop impact tester. The test was performed on the axis and right angle direction of the main valve and armature, for both energized and de-energized states. Vibration resistance: No malfunction occurred in a one-sweep test between 8.3 and 2000Hz. Test was performed at both energized and de-energized states to the axis and right angle direction of the main valve and armature. (Value in the initial stage.)

Construction JIS Symbol (A) (B) 4 2 3 1 (R) (P) q u e!0 t r y i o w Component Parts No. q w e r t y u i o!0 Part name Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw Material Aluminum ZDC Aluminum HNBR Resin Stainless steel Aluminum NBR Steel Note) Body cannot be disassembled. Note VQD1000-S-M5( only) VQD1000-9-1 AXT632-7-13(M1.7 X 18) 3(R) 4(A) 1(P) 2(B) 1(P) Valve Single Unit Option Piping plate assembly VQD1000-20A Manifold style (VQD1131) can be changed to single unit style (VQD1121) by mounting plate assembly. Note) Plate should be mounted with manifold mounting screws (M1.7 X 20). Tightening torque: 0.18 to 0.25Nm 1.16-5

Dimensions L plug connector: VQD1121 - L-M5-Q M plug connector: VQD1121 - M-M5-Q 2-M5 (P, R port) 3 (R) 1 (P) 7.4 3 (13) 3 6 34 25.5 29 33 21.5 4 28.5 2-ø3.5 Mounting hole 49 50.5 Direct manual override Lead wire length: 300mm Light 2-M5 (A, B port) 15 5.5 (11) 4 2 0.6 0.6 0.5 0.5 11 5.3 5.3 13 1.16-6

SMC Series VQD1000 Dimensions L plug connector: VQD1151 - L -M5-Q M plug connector: VQD1151 - M-M5-Q 4-M5 (P, A, B, R port) 13 49 50.5 5.5 5 5 5.5 38 28.5 33.5 37 1(P) 1(P) 12 L plug connector (L) M plug connector (M) 5.5 Lead wire length: 300mm Light 27 Direct manual override 2-ø3.5 Mounting hole 10.9 9.1 3 11.2 17.6 9 3(R) 2(B) 4(A) 1.16-7

How to Order Manifold How to Order Valve Plug lead unit manifold VQD11 5 1 5 L M5 Q VV4QD1 5 2 5 Manifold Body ported 02 20 Stations 2 stations 20 stations (Max.) CE-compliant Q CE-compliant 3 5 Body Body ported type type V U W Valve option Standard (2W) Vacuum (2W) Large flow (4W) Large flow, Vacuum (4W) Power saver Port size(cylinder port) Body ported M5 thread M5 M5 thread C4 One-touch fitting for ø4 1(P), 3(R) port: Rc 1/8 Rated voltage 5 24V DC 6 12V DC Note) Consult SMC for other voltages. How to Order Manifold Assembly Specify the model numbers of valve and option together with the manifold base part number. <Example> Plug lead unit manifold VV4QD15-05M5-Q 1 set VVQD1000-10A-5 1 set VQD1151-5L-Q...4 sets D side U side Station 1 2 3 4 5 Manifold base part number Blank plate part number (1st station) Valve part number (2 to 5th station) Specify part numbers in order from the first station starting from the D side of the manifold. VQD1151-5L-Q L: Plug lead L plug connector, With lead wire and light and surge voltage suppressor LO: Plug lead L plug connector, Without lead wire and light and surge voltage suppressor M: Plug lead M plug connector, With lead wire and light and surge voltage suppressor MO: Plug lead M plug connector, Without lead wire and light and surge voltage suppressor Electrical entry Port size (Body ported only) M5 M5 thread VQD1000-10A-5-Q 3R 1P 2B 4A 2B 4A VV4QD15-05M5-Q 1.16-8

Manifold Option Blank Plate Assembly/Body Ported VVQD1000-10A-2 Blank plate assembly includes 2 screws and 1 gasket. Blank Plate Assembly/Base Mounted VVQD1000-10A-5 Blank plate assembly includes 2 screws and 1 gasket. 1.16-9

Dimensions Plug lead unit manifold(vv4qd12- -Q) D side Station 1 2 3 4 5 n U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) Lead wire length: 300mm Light 4-1/8 (P, R port) 2-ø4.5 (Mounting hole) 5.3 57 15 3 1 R P 1 3 P R 0.6 5.3 52 50.5 30 17 0.5 0.5 P=11 L2 L1 10 4 2n-M5 (A, B port) M5: M5 thread 6.5 7 35 38 42 M plug connector (M) Dimensions n: Station L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 28 20 39 31 50 42 61 53 72 64 83 75 94 86 105 97 116 108 127 119 138 130 149 141 160 152 171 163 182 174 193 185 204 196 215 207 226 218 237 229 1.16-10

Dimensions Plug lead manifold unit(vv4qd15- -Q) D side U side Stations 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: ø4 One-touch fitting M5: M5 thread 27.5 2(B) 2(B) 20 15 5 4(A) 4(A) 46 P=11 12.5 L plug connector (L) Lead wire length: 300mm ACB ACB ACB ACB ACB Light 4-1/8 (P, R port) 57.5 2-ø4.5 (Mounting hole) 17 3(R) 1(P) 4 1(P) 3(R) 52.5 51 32 9 16 P=11 L2 L1 10 4 10 36.5 41.5 45 M plug connector (M) Dimensions L n 2 L1 L2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 n: Station 20 237 229 1.16-11

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