MAG integra Турбомолекулярный насос на магнитном подшипнике с интегрированным преобразователем частоты Part Nos. 4300Vxxxx 4600Vxxxx 4700Vxxxx 42200Vxxxx and pumps modified by Oerlikon Leybold Vacuum
MAG W 300 ip MAG W 600 ip Booster MAG W 700 MAG ip W 600 ip MAG W 600 ipl Booster MAG W 700 ipl MAG W 2200 ipl MAG W 2200 ip Fig.. MAG integra models Вакуумные насосы серии MAG integra состоят из: - Турбомолекулярного вакуумного насоса MAG integra - Преобразователя частоты и блока питания MAG.DRIVE 300324726_002_A5-08/202 - Oerlikon Leybold Vacuum
Технические характеристики MAG W 300 ip(l) 600 ip(l) Booster 700 ip(l) 2200 ip(l) High-vacuum flange DN 200 ISO-F 250 ISO-F 250 ISO-F 250 ISO-F 200 CF 250 CF 250 CF Pumping speed (PNEUROP) I s - N 2 0 600 6 20 Ar 50 470 480 900 He 220 770 7 2050 H 2 30 570 660 750 Max. Compression N 2 > 8 > 7 > 8 > 8 Ar > 8 > 7 > 8 > 8 He at sccm 2 5 6 4 2 5 5 4 H 2 at sccm 8 3 3 4 3 5 3 Max. gas throughput mbar I s - N 2 temporary, for pump down 30 60 30 30 N 2 continuous operation 20 30 20 20 Ar temporary, for pump down 20 30 20 20 Ar continuous operation 5 20 5 5 Max. forevacuum pressure mbar N 2 4 4 2.5 Ar 0.6 0.6 2.5 Nominal speed 37,800 min - 33,000 min - 33,000 min - 30,600 min - Stand-by speed to be set between 3,800 min - (230 Hz) and nominal speed Ultimate pressure ISO-F / CF flange Max. bake-out temperature 80 C Run-up time Forevacuum flange Purge gas / venting flange < -8 mbar / < - mbar < 7 min DN 40 KF DN 6 KF (clamp shoe) Cooling connection G /8 Weight, approx. 40 kg 45 kg 45 kg 50 kg Noise level acc. to ISO 3744 < 4 db(a) Vibration level at high-vacuum flange at max. speed < 0.0 µm 300324726_002_A5-08/202 - Oerlikon Leybold Vacuum 2
Технические характеристики преобразователя частоты MAG.DRIVE im Supply voltage 200-240 V ±% Mains frequency 50 / 60 Hz Power consumption maximum 750 VA at ultimate pressure 50 VA Max. load capability of the relays (interface X, optional) 32 V, 0.5 A (for SELV or PELV power circuits only) Max. load for each valve output 24 VDC, 0.35 A Temperature during operation - 45 C Storage temperature - 60 C Relative air humidity (non condensing) 5 to 85 % Type of protection IP 54 Overvoltage category II Contamination level acc. to IEC 6 2 3 300324726_002_A5-08/202 - Oerlikon Leybold Vacuum
2200 2000 l/s 800 MAG W 300 Saugvermögen Pumping speed 600 400 200 00 800 Helium Hydrogen Wasserstoff 600 400 200 0-6 -5-4 -3-2 mbar - Hochvakuumdruck Inlet pressure 0 MAG W 300 mbar l/s temporary Durchfluss Throughput Continuous operation 0. -4-3 -2 - Forevacuum Vorvakuumdruck pressure mbar Fig..3 Pumping speed curves and operation diagrams for the MAG W 300 300324726_002_A5-08/202 - Oerlikon Leybold Vacuum 4
2200 2000 l/s 800 600 Helium MAG W 600 Saugvermögen Pumping speed 400 200 00 800 Hydrogen Wasserstoff 600 400 200 0-6 -5-4 -3-2 mbar - Hochvakuumdruck Inlet pressure 0 mbar l/s temporary MAG W 600 Durchfluss Throughput Continuous operation 0. -4-3 -2 - Forevacuum Vorvakuumdruck pressure mbar Fig..4 Pumping speed curves and operation diagrams for the MAG W 600 5 300324726_002_A5-08/202 - Oerlikon Leybold Vacuum
2200 2000 l/s 800 Helium Hydrogen Wasserstoff MAG W 700 600 Pumping Saugvermögen speed 400 200 00 800 600 400 200 0-6 -5-4 -3-2 mbar - Hochvakuumdruck Inlet pressure 0 mbar l/s temporary MAG W 700 Throughput Durchfluss Continuous operation 0. -4-3 -2 - Forevacuum Vorvakuumdruck pressure mbar Fig..5 Pumping speed curves and operation diagrams for the MAG W 700 300324726_002_A5-08/202 - Oerlikon Leybold Vacuum 6
2200 2000 l/s 800 600 Helium Hydrogen Wasserstoff MAG W 2200 400 Saugvermögen Pumping speed 200 00 800 600 400 200 0-6 -5-4 -3-2 mbar - Hochvakuumdruck Inlet pressure 0 MAG W 2200 mbar l/s temporary Durchfluss Throughput Continuous operation 0. -4-3 -2 - Forevacuum Vorvakuumdruck pressure mbar Fig..6 Pumping speed curves and operation diagrams for the MAG W 2200 7 300324726_002_A5-08/202 - Oerlikon Leybold Vacuum
7 7 b Ø d 98 Ø d2 7 94 4 s2 260 h s3 I Описание ip ipl Ø d DN 25 s5 4 h h s 4 Forevacuum Vorvakuum connection s Sperrgas Purge gas connection l l 2 MAG W 300 600/700 2200 DN ø d ø d2 h h I l l2 b s s2 s3 s4 s5 200 ISO-F 285 285 305 442 3 ) 3 ) 332 ) 420 ) 42 40 0 5 24 200 CF 254 285 335 472 307 307 46 32 64 0 250 ISO-F 335 37 325 463 335 33 374 442 39 54 0 4 259 250 CF 305 37 330 467 335 322 432 29 73 0 9 285 250 ISO-F 335 349 355 492 343 340 392 450 34 65 0 2 272 250 CF 305 349 372 509 339 340 446 26 87 0 8 302 ) 4 mm for cooling coil Fig..7 Dimensional drawing of the pumps, dimensions in mm 300324726_002_A5-08/202 - Oerlikon Leybold Vacuum 8
Информация для заказа Part No. Pump with integrated converter and purge gas port, Type of protection IP 54 with Profibus 24 V PLC Interface MAG W 300 ip DN 200 ISO-F 4300V0504 4300V054 MAG W 300 ip DN 200 CF 4300V0506 4300V056 MAG W 300 ipl DN 200 ISO-F 4300V0704 4300V074 MAG W 300 ipl DN 200 CF 4300V0706 4300V076 MAG W 600 ip Booster DN 250 ISO-F 4600V0504 4600V054 MAG W 600 ipl Booster DN 250 ISO-F 4600V0704 4600V074 MAG W 700 ip DN 250 ISO-F 4700V0504 4700V054 MAG W 700 ip DN 250 CF 4700V0506 4700V056 MAG W 700 ipl DN 250 ISO-F 4700V0704 4700V074 MAG W 700 ipl DN 250 CF 4700V0706 4700V076 MAG W 2200 ip DN 250 ISO-F 42200V0504 42200V054 MAG W 2200 ip DN 250 CF 42200V0506 42200V056 MAG W 2200 ipl DN 250 ISO-F 42200V0704 42200V074 MAG W 2200 ipl DN 250 CF 42200V0706 42200V076 other interfaces on request 9 300324726_002_A5-08/202 - Oerlikon Leybold Vacuum
Аксессуары Необходимые Set of bolts, nuts and washers for ISO-F flange (2 each) 40053V002 Bolts M x 50 Bolts M 2 x 35 40053V00 Bolt quality 2.9 acc. to EN ISO 898- with coating; 0,2 % yield strength > 80 N/mm 2 Centering ring with O-ring DN 200 DN 250 Al/FPM 268 44 268 45 Stainless steel/fpm 887 02 887 08 Set of bolts, nuts and washers for CF flange (8 each) 40053V006 Bolts M 8 x 40 Bolt quality.9 acc. to EN ISO 898- with coating; 0,2 % yield strength > 900 N/mm 2 (for DN 200 3 sets required, for DN 250 4 sets) Copper gasket rings for CF flange DN 200 (Set of pieces) 839 47 DN 250 (Set of 5 pieces) 839 48 Set of hex. screws with nuts, screws and washers for CF flange DN 200 839 07 DN 250 (2 sets required) 839 07 Дополнительные Mains cable for MAG.DRIVE im, 2.5 m EU 43V03 US 4320V03 Inlet screen DN 200 ISO-F and DN 200 CF E 200 04 558 DN 250 ISO-F and DN 250 CF E 200 04 557 Seal Kit DN 250 Metal 200 07 90 Seal Kit Metal for other flanges on request Purge gas and venting valve 24 V DC 0.6 mbar l/s at.5 to 6 bar 2 33 0.6 mbar l/s at to.5 bar 80052V00 Cable set (2 pieces) for connection to the pump 4300V0 Cooling water valve kit 4300V02 300324726_002_A5-08/202 - Oerlikon Leybold Vacuum