Compact Guide Cylinder

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Compact Guide Cylinder Series ø, ø, ø, ø, ø, ø, ø, ø, ø, ø ir cylinder with guide integrated that has achieved anti-lateral load and high non-rotating accuracy. Space-saving cylinder. Suitable as stoppers or lifters in conveyor line. Pusher Stopper ottom mounting ifter Cylinder position can be detected. ll models have built-in magnets for auto switches. Can be mounted from two directions Side mounting Two types of guide rod bearing for different applications Slide bearing Slide bearing Strength against side load is more than 2 times as compared current stopper cylinder (Compared to SMC RSQ series, round bar type). all bushing bearing Smooth operation is suitable for pushing, lifter and applications where high precision is required. Non-rotating accuracy Non-rotating accuracy θ ±0.0 ±0. ±0.07 ±0.0 ±0.06 ±0.0 ±0.0 ±0.06 ±0.0 ±0.0 uto switches, lead wires and terminals can be fixed in the groove of cylinder body. Terminal (Except ø, ø, ø, ø) MGJ JMGP MGP MGPW MGG MGC MGF MGZ MGT and 1 D- -X

Compact Guide Cylinder Series ø, ø, ø, ø, ø, ø, ø, ø, ø, ø How to Order M MW Made to Order (Refer to page for details.) Compact Guide Cylinder M earing type Slide bearing all bushing bearing mm mm mm mm mm mm mm mm mm mm Thread type Nil TN TF Cylinder stroke Refer to Standard Stroke on page. M x 0. Rc NPT G ø, ø ø to ø Number of auto switches Nil S n n pcs. uto switch Without auto switch Nil (uilt-in magnet) For the applicable auto switch model, refer to the table below. pplicable uto Switches/Refer to pages 111 to for further information on auto switches. Type Solid state auto switch Reed auto switch Special function Diagnostic indication (2-color indicator) Water resistant (2-color indicator) Electrical entry Indicator light Wiring (Output) Grommet 3-wire (NPN) 3-wire (PNP) 2-wire Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 2 V 3-wire Yes (NPN equivalent) Grommet No 2-wire 2 V oad voltage DC V, V V V, V V V, V V V V MNV MN MPV MP MV M MNWV MNW MPWV MPW MWV MW MNV 1 MN 1 MPV 1 MP 1 MV 1 M 1 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance. Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-3. ead wire length symbols: 0. m Nil (Example) MNW Solid state auto switches marked with are produced upon receipt of order. 1 m M (Example) MNWM 3 m (Example) MNW m Z (Example) MNWZ Since there are other applicable auto switches than listed, refer to page 31 for details. For details about auto switches with pre-wired connector, refer to pages 112 and 1. uto switches are shipped together (not assembled). C V V or less uto switch model ead wire length (m) 0. 1 3 Perpendicular In-line (Nil) (M) () (Z) 6V 3V 2 0V 6 3 0 Pre-wired connector pplicable load IC circuit IC circuit IC circuit IC circuit IC circuit Relay, PC Relay, PC

Compact Guide Cylinder Series ir cylinder integrated with guide has achieved antilateral load and high nonrotating accuracy. Space-saving and compact design Suitable as stoppers or lifters in conveyor line 2 types of guide rod bearing are available depending upon the application Slide bearing/all bushing bearing Specifications earing type Model ction Fluid Proof pressure Max. operating pressure Min. operating pressure mbient and fluid temperature Piston speed Cushion ubrication Stroke length tolerance Slide bearing all bushing bearing,,,,,,,,, Double acting ir 1. MPa 1.0 MPa ø, ø 0. MPa ø to ø 0.1 MPa ø to ø ø, ø to 60 C (No freezing) to 0 mm/s to 0 mm/s Rubber bumper on both ends Non-lube +1. 0 mm Symbol -X -X6 -X -X -XC22 -XC6 -XC7 Symbol Rubberbumper Made to Order: Individual Specifications (For details, refer to pages and 33.) Symbol Specifications -X Helical insert thread -X367 ottom mounting type -X3 ong bushing type -X With anti-strong magnetic field switch (D-PDW) Made to Order Specifications (For details, refer to pages 7 to 1.) Specifications Change of rod end shape Heat resistant cylinder ( to 1 C) ow speed cylinder ( to mm/s) Intermediate stroke (Using exclusive body) Fluororubber seals With knock pin holes Machining tapped hole, drilled hole, and pin hole additionally Standard Stroke Model M,, M Standard stroke,,,,, 7,,,,, 7, 1, 1, 17, 0,,, 7,, 1 M, 1, 17, 0, Theoretical Output Intermediate stroke s for the intermediate strokes other than the standard strokes at left are manufactured by means of installing a spacer. ø to ø Stroke available in 1 stroke increments ø to ø Stroke available in stroke increments (Example) 1. For - st, - st is provided with a mm + mm mm width spacer. 2. For - st, - st is provided with a mm width spacer. OUT(N) ore Rod size Operating Piston area Operating pressure (MPa) size direction (mm 2 ) 0.2 0.3 0. 0. 0.6 0.7 0. 6 1 1 11 31 236 1 37 603 17 6 1 3117 23 27 36 7 717 23 17 7 76 1 1 1 1 33 3 623 61 07 171 12 3 60 71 17 1 11 377 317 3 1 1 61 236 3 60 6 16 11 2 3 22 7 660 7 11 11 11 312 2 7 3 1 76 17 11 1 2 2 62 2 2 1 1 2 327 37 6 1 1 1 1 12 2 227 2 362 7 117 0 170 2 2722 7 2 7 60 11 6 2 3 22 73 7 11 2 162 31 317 03 0 6 1 1 1 1 33 2 63 2 6 170 1 2 222 22 362 623 71 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm 2 ) (N) 0. 2 77 11 6 23 2 2 3 72 3 11 1767 1 2 23 2 2 706 6 (N) 1.0 1 1 11 31 236 1 37 603 17 6 1 3117 23 27 36 7 717 MGJ JMGP MGP MGPW MGG MGC MGF MGZ MGT D- -X

Weight/Slide earing: to Model 0.23 0.3 0.27 0.3 0. 0.3 1.1 1.6 2. 3.01.66.6 0.31 0. 0.61 0.3 Standard stroke 0.3 0. 0.6 1.0 0.3 0. 0.76 1. 1.1 2.2 3.0 3. 6..27 7 0. 0.6 0. 1. 2.2 2.6 3.6.23 7. 11.7 0. 0. 1.0 1.6 2.6 2.7...1.0 1 1.2 1.2 3.0 3.2.77.7.33 1.23 1 1.3 2. 3. 3.6.33 6.0. 1.6 17 1. 2. 3... 6.71 11.17. 0 1.6 2.6.2.1 6. 7.33.0 1.22 (kg) Weight/all ushing earing: to Model 0.23 0.3 0. 0.3 0. 0. 1. 1.6 2.11 2.6..3 0.2 0. 0.60 0.3 Standard stroke 0.3 0.2 0.70 1.0 0.3 0.7 0.7 1.17 1.67 1.2 2. 3.1 6.3.3 7 0.6 0.70 0.0 1.37 2.0 2.27 3.1 3. 7. 11.7 0.3 0.2 1.0 1. 2. 2. 3.6.3.7.6 1 1.1 1.7 2.1 2..17.3. 1.1 1 1. 2.00 3.17 3.3.66.7.7 1. 17 1.6 2. 3.3 3.71.1 6.01 11.31. 0 1.60 2.2 3..07.6 6..1 17.6 (kg) Series 22

earing type 27 3 3 1 22 2 1 70 71 16 16 2 7 2 7 33 23 3 70 1 17 7 60 61 Stroke 22 37 3 7 3 77 1 1 33 3 6 7 72 7 7 17 70 3 7 1 1 2 7 3 77 7 27 7 27 32 32 70 23 6 1 2 2 176 3 176 3 6 66 33 70 1 2 6 2 7 16 7 16 7 7 6 27 70 1 37 36 77 6 77 6 3 12 3 12 11 11 2 627 17 33 23 6 1 6 1 111 2 111 2 7 36 2 62 0 2 1 16 1 16 6 333 1 F(N) earing type 0.2 0. 0.1 0.73 0.2 0.3 0.3 0. 0.1 1. 1.3 1.6 3.2 1.6.1 2. 7.3 3.3 7. 3.2 11.76.31 22..6 0. 0.31 0.3 0. 0.7 1.06 1.31 1.6 Stroke 0.1 0.37 0.31 0.71 0.71 1.77 1. 2. 0. 0.33 0.27 0.6 0. 1. 1.03 2.00 2. 0. 3.3 1.7. 2. 6.37 2... 1.60.72 7 0. 0.27 0.23 0.3 1.0 1.22 1.6 1.6 2.. 2. 6.37.0.7.3 11.76 7. 31.36.66.70 0. 0.23 0.1 0. 0. 1.01 1.2 1.1 3.6.1 2..3.1.33.0.31 6.6 2. 1.70.00 1 0.77 0.6 1.2 1.1 1.72 3. 1. 3.1 3.3.1 3.77.6..2 11.1.0 1 0.6 0.60 1.0 1.01 1.3 2.72 1.72 3.06 3.06. 3.37.01.2 1.3.67.6 17 0.60 0.3 0. 0.0 1.37 2.2 1. 2.72 2.77.0 3.0.6.7..7 23. 0 0. 0. 0. 0.1 1.2 2.1 1. 2. 2.2 3.6 2.77.02.3 11.66.6. T (N. m) ±0.0 ±0.07 ±0.06 ±0.0 ±0.0 ±0. ±0.0 ±0.0 ±0.06 ±0.0 Non-rotating accuracy θ Operating Conditions llowable ateral oad (Ordinary load) llowable Rotational Torque of Plate Non-rotating ccuracy of Plate Torque: T (N m) For non-rotating accuracy θ without load, use a value no more than the values in the table as a guide. Compact Guide Cylinder Series 23 MGJ JMGP MGP MGPW MGG MGC MGF MGZ MGT D- -X

Series Operating Range when Used as Stopper ore Size ø to ø/ to (Slide earing) mm mm to (Slide bearing) 0 ø 70 When selecting a model with a longer dimension, be sure to choose a bore size which is sufficiently large. Caution on handling Note 1) When using as a stopper, select a model with stroke or less. Note 2) Model (all bushing bearing) cannot be used as a stopper. Mass of transferred object m (kg) 60 ø ø ø 0 Transfer speed υ (m/min) ore Size ø to ø/ to (Slide earing) to (Slide bearing) mm mm ø When selecting a model with a longer dimension, be sure to choose a bore size which is sufficiently large. Caution on handling Note 1) When using as a stopper, select a model with stroke or less. Note 2) Model (all bushing bearing) cannot be used as a stopper. Mass of transferred object m (kg) 0 00 0 700 600 0 0 0 ø ø ø 0 ø ø 0 Transfer speed υ (m/min) 2

Compact Guide Cylinder Series Operating Range when Used as ifter Select the bore size so that the total load mass is bellow the theoretical output (see the table below).,, to Theoretical output % or below % or below 60% or below m m /Slide bearing /all bushing bearing to - to - (,, Stroke) to -Over stroke oad mass m (kg) Eccentric distance oad mass m (kg) Eccentric distance Eccentric distance to (Slide bearing) to - (, stroke) to -Over stroke oad mass m (kg) MGJ JMGP MGP MGPW MGG MGC MGF MGZ MGT oad mass m (kg) oad mass m (kg) oad mass m (kg) Eccentric distance Eccentric distance Eccentric distance D- -X

Series Construction/ Series to!0 i!!7!3 e!6 u q! @0 @2 @2!1 r o @1!1! y w ø, ø stroke or less ø, ø Over stroke to!0!!7 @2!3 e!6 q u w! t!1 @3 i @0 @1!1 r! o y Over stroke Component Parts No. Description Material Note 1 ody Hard anodized 2 Piston 3 Piston rod Collar ushing 6 Head cover 7 Guide rod Plate Plate mounting bolt Guide bolt luminum alloy luminum alloy Stainless steel Carbon steel luminum bearing alloy luminum alloy casted earing alloy luminum alloy Carbon steel Carbon steel Carbon steel Carbon steel Replacement Parts: Seal Kit Kit no. ø to ø ø to ø ø to ø ø to ø ø to ø ø to ø ø to ø Hard chrome plated White anodized Painted Chromated Painted Hard chrome plated Nickel plated Nickel plated Nickel plated Description Description Material Note Carbon tool steel Carbon tool steel Urethane Urethane Retaining ring Retaining ring umper umper Magnet Slide earing Felt Holder all bushing Piston seal Rod seal Gasket Gasket Kit no. earing alloy Felt Resin NR NR NR NR Phosphate coated Phosphate coated Description -PS -PS -PS -PS -PS set of,, 22 and 23 listed above -PS -PS -PS -PS -PS set of,, 22 and 23 listed above Seal kit includes to 23. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-0 ( g) No. 11 1 1 17 1 1 22 23

Compact Guide Cylinder Series Construction/ Series to!2! ø, ø Over stroke stroke or less ø, ø Over stroke to!2! ø or more MGJ JMGP MGP MGPW MGG MGC MGF MGZ MGT 27 D- -X

X U Series ore Size ø to ø:, x YY depth Y Z W + Stroke x NN through 2 x P x MM depth M R T ød ød V H PW T Q S T 2 G G C + Stroke + Stroke + Stroke E J K G, Common Dimensions Standard stroke,,,,, 7,,,,, 7, 1, 1, 17, 0 C 3 2 3 33 7 37 7. 37. D G 6 2 33 36 2 G 11 11. 11. G 7.. H 6 7 J 1 1 K 1 17 1 22 MM M NN M x 0.7 M x 0.7 M x 0. M x 0. M x 0. M x 0. M6 x 1.0 1 M6 x 1.0 Nil M x 0. M x 0. Rc1/ Rc1/ P TN NPT1/ NPT1/ TF G1/ G1/ PW 7 7 Q 1 1 R 2 60 70 S 22 3 T 6 62 72 6 T T 2 2.. 2 2 2 U 36 3 6 6 V 2 2 62 W 7 X 6 76 YY Y Z M x 0.7 M x 0. M x 0. M6 x 1.0 7 1 (Slide bearing)/, D, E Dimensions E D st or less Over st st or less Over st 3 3 0 0 7 7. 61. 62 0 0 1. 1. (all bushing bearing)/, D, E Dimensions st or less 3 7. Over st 6 7 7. Note) For intermediate strokes other than standard strokes, refer to the Manufacture of Intermediate Stroke on page. and are only for the M x 0. port. For bore size or more, Rc, NPT and G ports can be selected. (Refer to page.) 2 D 6 E st or less 6 Over st 22 27

R T ød ød PW X V H Compact Guide Cylinder Series ore Size ø to ø:, x YY depth Y x NN through Z W + Stroke 2 x P x MM depth M T Q S T, Common Dimensions Standard stroke,, 7, 1,1 17, 0 7. 6 61 7. C 37. 6. 66 T T T V W X D F YY G 1 1 72 2 1 Y G. 1 1. 1 23 Z 2 F G 11. 1. 1 G G C + Stroke + Stroke + Stroke H 11 1 1 1 22 J 2 3... K 36. 6. 6. 3 3 6 62 (Slide bearing)/, D, E Dimensions MM M x 1. M x 1. M x 1. M x 1. M x 1.7 M1 x 2 E M 3 NN M x 1. M x 1. M x 1. M x 1. M x 1.7 M1 x 2 J Nil Rc1/ Rc1/ Rc1/ Rc1/ Rc3/ Rc3/ (all bushing bearing)/, D, E Dimensions 1 2 1 M x 1. 11 2 2 1 0 1 M x 1. 11 17 D E st or less 2 1 M x 1.. 17 71. 2 3 1 2 1 1 1 M x 1. 1 1 71. 17. 1 2. 1. 1 1 6 M x 1.7 1 1 60 2 2. 1. 170 1 0 M1 x 2 1 61 3 2 36 1. Note) For intermediate strokes other than standard strokes, refer to the Manufacture of Intermediate Stroke on page. Rc, NPT and G ports can be selected. (Refer to page.) G K P TN NPT1/ NPT1/ NPT1/ NPT1/ NPT3/ NPT3/ Over st 0 0 2 2 13 TF G1/ G1/ G1/ G1/ G3/ G3/ D PW Q R 1 27 33 37 st or less. 0 0. 60 E 6 6 1 1 0 10 S 6 6 Over st 2. 36 6 1 6. 6 MGJ JMGP MGP MGPW MGG MGC MGF MGZ MGT Grooves (Except ø, ø, ø, ø) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case. (pplicable bolt size is M3.) These grooves can be used for firmly fixing the tying bands of lead wires of the auto switch, etc., and also terminal boards, etc., to the main body of the cylinder. When the terminal block is fixed on a cylinder directly. 1.. 3.1 Detailed figure of a section a a. 3.1 1. Detailed figure of b section b b Model D- to to 2 -X

uto switch model D- D- V D-M V D-M D-M W D-M WV D-M V D-M D-Z7 D-Z D-Y D-Y7P D-Y6 D-Y7PV D-Y7 W D-Y7 WV D-Y7 Series uto Switch Mounting Minimum Stroke for uto Switch No. of auto switches mounted ø ø ø ø ø ø ø ø ø ø Note 1) Note 1) Note 1) Note 1) Note 2) Note 2) Note 2) Note 2) Note 2) Note 1) Note 1) Note 2) Note 1) Confirm that it is possible to secure the bending radius of mm of the auto switch lead wire before use. Note 2) Confirm that it is possible to securely set the auto switch(es) within the range of indicator green light ON range before use. For in-line entry type, please also consider Note 1) shown above. uto Switch Proper Mounting Position (Detection at Sroke End) uto switch Hs uto Switch Proper Mounting Position uto switch model D-M D-M V D-Z7 /Z D-Y /Y7P D-M W D-M WV D- D- V D-Y6 /Y7PV D-Y7 W ore D-M D-Y7 WV size D-M V D-Y7 6... 1.. 1 1 22.. 1.. 1 23. 2. 2.. 6... 11 1 1.... 1 1. 2. 1.... 7. 17. 3 7. 7. 11. 1 1. 23. Note) djust the auto switch after confirming the operating conditions in the actual setting. uto Switch Mounting Height uto switch model ore size Note 2) D- D-M D-M W D-M D-Z7 D-Z D-Y D-Y7P D-Y7 W D-Y7 Hs 1. 1. 2. 2 2 3. 2 D- V Hs 1. 22. 23. 27 36. 6. D-M V D-M WV D-M V Hs. 23 2. 2. 27. 31. 3.. 6 D-Y6 D-Y7PV D-Y7 WV Hs 17 1.. 22. 2 3. 2.

uto Switch Mounting Series Operating Range uto switch model D- / V D-M /M V D-M W/M WV 7....... 6. 7 D-Z7 /Z 6 6 6... 11. D-Y /Y6 /Y7 Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming approximately ±% dispersion). It may vary substantially depending on an ambient environment. uto Switch Mounting racket: Part No. uto switch model D- / V D-M /M V D-M W/M WV ø to ø MG2-0 D- (V)/M (V)/M W(V) MG2-0 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. For detailed specifications, refer to pages 111 to. uto switch type Model Electrical entry (Fetching direction) Features Reed D-Z73, Z76 Grommet (In-line) D-Z Without indicator light D-Y6, Y6, Y7PV Grommet (Perpendicular) D-Y7NWV, Y7PWV, Y7WV Diagnostic indication (2-color indicator) Solid state D-Y, Y, Y7P D-Y7NW, Y7PW, Y7W D-Y7 Grommet (In-line) Diagnostic indication (2-color indicator) Water resistant (2-color indicator) For solid state auto switches, auto switches with a pre-wired connector are also available. Refer to pages 112 and 1 for details. Normally closed (NC = b contact), solid state auto switch (D-FG/FH/Y7G/Y7H type) are also available. For details, refer to pages 17 and 1. MGJ JMGP MGP MGPW MGG MGC MGF MGZ MGT 31 D- -X

Series Made to Order: Individual Specifications Please contact SMC for detailed dimensions, specifications and lead times. 1 Helical Insert Thread Specifications Symbol -X M Stroke uto switch type ead wire length No. of auto switches X Helical insert thread specifications Mounting thread type has been changed to the helical insert thread type. Specifications earing type Slide bearing all bushing bearing Series,,,,, ubrication Non-lube uto switch Mountable x MM depth M (Helical insert) x YY depth Y (Helical insert) MM M YY Y M6 x 1.0 M6 x 1.0 M x 1. M x 1. M x 1. M x 1.7 Note) Other dimensions are the same as standard type. 2 M6 x 1.0 M6 x 1.0 M x 1. M x 1. M x 1. M x 1.7 1 1 2 ottom Mounting Type ( type is only available.) Symbol -X367 Stroke uto switch type ead wire length No. of auto switches X367 ottom mounting ecause the guide rods do not protrude from the bottom surface of the body, it is not necessary to machine relief holes for the guide rods. Same dimensions as for series standard type. ZZ Mounting face of cylinder Note) Full length dimension of bushing for guide rod (ZZ) is shorter than the standard type.

Made to Order: Individual Specifications Series 3 ong ushing Type ( type is only available.) Symbol -X3 Stroke uto switch type ead wire length No. of auto switches X3 ø to ø/-x3: ong bushing type ong bushing type ore C pplicable stroke E,, 1,,,,, 177 177 22 2. 1 6 1. 1 1. 11 11 1. 11 2. 36 6 1 6. 6 0 0 Note 1) Dimensions are the same as for standard type of 7 stroke. Note 2) pplicable stroke is available at mm intervals and the spacer is installed inside. Note 3) all bushing bearing type with stroke or less is twice as long as the normal bearing length to strengthen the guide. Magnetic Field Resistant uto Switch (D-PDW) M C E W Stroke PDW ead wire length No. of auto switches X Specifications earing type Slide bearing all bushing bearing Series,,,, ubrication Non-lube uto switch Mountable Note) For, stroke, the number of available auto switch is W Magnetic field resistant auto switch (D-PDW) Symbol -X MGJ JMGP MGP MGPW MGG MGC MGF MGZ MGT Hs Ht Hs 31. 3.0 2. 3. 60. Ht.1 3.7 36.1 3.7.1 33 D- -X

Series Specific Product Precautions e sure to read this before handling the products. Refer to back page for Safety Instructions and pages 3 to for ctuator and uto Switch Precautions. Warning 2 2 62 0 1 1 170 1 22 3 3 6 62 Mounting 1. void placing your hands or fingers between the plate and the body. e very careful to prevent your hands or fingers from getting caught in the gap between the cylinder body and the plate when air is applied. Caution 1. Do not scratch or gouge the sliding portion of the piston rod and the guide rod. Damaged seals, etc. will result in leakage or malfunction. 2. Do not dent or scratch the mounting surface of a body and a plate. The flatness of the mounting surface may not be maintained, which would cause the sliding resistance to increase. 3. Make sure that the cylinder mounting surface has a flatness of 0.0 mm or less. If the flatness of the workpieces and brackets mounted on the plate is not appropriate, sliding resistance may increase.. When mounting on the bottom of the cylinder, the guide rod protrudes from the bottom at the retraction stroke end. Therefore, drill holes for the hexagon socket bolts used for mounting purposes, and relief holes for the guide rods. Moreover, in applications where impact occurs from a stopper, etc., the mounting bolts should be inserted to a depth of 2 d or more. C±0.2 ±0.2 ±0.2 C 36 3 6 6 ±0.2 ±0.2 2d or more (d = Thread O.D.) ød y-pass port dia. ød 1 1 1 22 1 22 1 27 22 27 22 31 2 3 33 ød y-pass port dia. Hexagon socket head cap screw M x 0.7 M x 0. M x 0. M6 x 1 M x 1. M x 1. M x 1. M x 1. M x 1.7 M1 x 2 C dimension for a bore size of to is identical to the dimension. 3 llowable Kinetic Energy oad mass and cylinder speed should be observed within the range given in the graph below. with a rubber bumper 0 oad mass (kg) oad mass (kg) ø ø ø ø ø ø ø ø 1 0.1 ø ø 0.01 0 0 0 0 Max. speed (mm/s) without a cushion (X6, XC22) 0 ø ø ø ø ø ø ø ø 1 0.1 ø ø 0.01 0 0 Max. speed (mm/s) 0 0