GateKeeper Aluminum Gate Valves 250 mm Air-Operated 100 mm Air-Operated 63 mm Air-Operated The GateKeeper Series Aluminum Gate Valves are economical, reliable vacuum shut-off devices designed and manufactured by Varian. The valves provide a low-cost, low-particle, low profile means of isolating a high vacuum pump, and are a less expensive alternative to stainless steel valves. The GateKeeper Series valve design employs a cast aluminum body, a linear drive mechanism, a counter-plate sealing mechanism, and an elastomer shaft seal. The result is a clean, economical, smoothly actuated valve. The body is cast using the VaPore process which tightly controls each material input and process step to deliver a casting that is free of porosity. A reliable high vacuum shaft seal eliminates the need for a bellows. The linear drive and counter-plate sealing mechanism have been designed to minimize metal-on-metal contact. The assembly is an elegant mechanism that uses a small number of precisionmachined components. The required sealing forces are generated with a minimum of moving parts, and without adjustment screws. As a result, very few particles are generated within the valve. The Varian aluminum gate valve has a small flange face-to-face profile. ISO/F flange details are machined into the cast body to provide the convenience of standard ISO claw clamp connections. Features Cast aluminum body using VaPore process for vacuum integrity Low-cost, lightweight, high vacuum compatible valve High vacuum shaft seal no bellows Trouble-free operation Extruded aluminum air cylinder with internal dampening High cycle life to reduce shock Precision ball bearings guided in contoured ramps Quiet, low vibration valve actuation Seal plate assembly traveling on guide rails no rollers Very low particle generation contacting aluminum casting No seal plate adjusting screws that wear into the aluminum casting No adjustments required to provide the necessary sealing force Highly repeatable, long-lasting seal Small flange face-to-face dimension Convenience for system design and installation Remote and visual position indication switches Ease of operation 1
Valves High Vacuum Right-Angle H/O Stainless Steel Valve inches (millimeters) E B C Hand Actuator Air Actuator C A Solenoid Valve Seat Side ISO Flanged Style Body H x J PLCS. on ø K B.C. A G F F D Insert Style Body Valve Style 63mm ISO flange A/O 63mm ISO flange H/O 63mm Insert body A/O 63mm Insert body H/O 100mm ISO flange A/O 100mm ISO flange H/O 100mm Insert body A/O 100mm Insert body H/O 160mm ISO flange A/O 160mm ISO flange H/O 200mm ISO flange A/O Overall Overall Actuator Flange Actuator Opening Opening Thread Number Bolt Circle Length Width Height Width Width to End Dia. Size of Holes Dia. A 13.48 B 4.00 C 6.28 D 2.36 E 1.75 F 2.56 G 2.67 H M8x1 J 4 K 4.33 13.50 4.00 6.30 2.36 1.75 2.56 2.67 M8x1 4 4.33 12.89 4.00 6.28 1.26 1.75 1.97 2.67 N/A N/A N/A 12.91 4.00 6.30 1.26 1.75 1.97 2.67 N/A N/A N/A 18.00 6.00 7.82 2.36 1.75 3.25 3.94 M8x1 8 5.71 17.34 6.00 7.16 2.36 1.75 3.25 3.94 M8x1 8 5.71 17.55 6.00 7.82 1.26 1.75 2.78 3.94 N/A N/A N/A 16.89 24.29 6.00 8.46 7.16 9.73 1.26 2.36 1.75 2.05 2.78 4.43 3.94 6.02 N/A M10x1.5 N/A 8 N/A 7.87 24.10 8.46 9.54 2.36 2.05 4.43 6.02 M10x1.5 8 7.87 33.00 11.22 12.36 2.76 2.51 5.75 8.39 M10x1.5 12 10.24 250mm ISO flange A/O 39.92 13.50 16.23 3.15 3.02 6.46 10.25 M10x1.5 12 12.20 4 in. ASA flange A/O 24.29 8.46 9.73 2.36 2.05 4.43 6.02 5 /8-11 8 7.50 4 in. ASA flange H/O 24.10 8.46 9.54 2.36 2.05 4.43 6.02 5 /8-11 12 12.20 6 in. ASA flange A/O 33.00 11.22 12.36 2.76 2.52 5.75 7.80 3/4-10 8 9.50 2
GateKeeper Aluminum Gate Valves Technical Specifications Vacuum range Sealing mechanism type 63 mm 100 mm 160 mm/4 in. ASA 200 mm/6 in. ASA 250 mm Atmosphere to below 1 x 10-7 torr Linear drive with seal plate and backing plate Feedthrough type Viton shaft seal Leak rates Valve Body: < 1 x 10-9 std cc/sec helium Main Seal: <1 x 10-9 std cc/sec helium Seal materials Gate: Viton Bonnet: Viton Pneumatic operation Actuation: Compressed Air (80 to 120 psi) Normally closed; valve closes on power loss Open/close <2 seconds Conductance @ molecular flow 550 l/s 2,000 l/s 7,000 l/s 15,000 l/s 26,000 l/s Flanges (ISO/F bolted tapped) NW63 NW100 NW160 NW200 NW250 Mounting position Bakeable to Pneumatic actuator and solenoid Any Valve Body: 150 C 80 C Cycles before first service 100,000 Position indication Remote standard 3
Valves High Vacuum Size Solenoid Part Number Shipping Weight lbs. (kg) ISO flanged versions 63 mm (2.5 in.) VGA063IM 7.0 (2.9) 100 mm (4 in.) VGA100IM 10.0 (4.2) 160 mm (6 in.) VGA160IM 16.0 (6.7) Pneumatically Operated without solenoid 63 mm (2.5 in.) VGA063IEP 7.0 (2.9) 100 mm (4 in.) VGA100IEP 10.0 (4.2) 160 mm (6 in.) VGA160IEP 16.0 (6.7) 200 mm (8 in.) VGA200IEP 38.0 (17.2) 250 mm (10 in.) VGA250IEP 48.0 (20.0 Pneumatically Operated with Solenoid (see below for ordering information)* 63 mm (2.5 in.) VGA063IExxxP* 7.0 (2.9) 100 mm (4 in.) VGA100IExxxP* 10.0 (4.2) 160 mm (6 in.) VGA160IExxxP* 16.0 (6.7) 200 mm (8 in.) VGA200IExxxP* 38.0 (17.2) 250 mm (10 in.) VGA250IExxxP* 48.0 (20.0 ASA flanged versions Manually Operated 4 in. ASA VGA4AM 10.0 (4.2) Pneumatically Operated without solenoid 4 in. ASA VGA4AEP 10.0 (4.2) 6 in. ASA VGA6AEP 16.0 (6.7) Pneumatically Operated with Solenoid (see below for ordering information)* 4 in. ASA VGA4AExxxP* 10.0 (4.2) 6 in. ASA VGA6AExxxP* 16.0 (6.7) Insertable versions Manually Operated 63 mm (2.5 in.) VGA063NM 4.8 (2.0) 100 mm (4 in.) VGA100NM 7.3 (3.0) Pneumatically Operated without solenoid 63 mm (2.5 in.) VGA063NEP 4.8 (2.0) 100 mm (4 in.) VGA100NEP 7.3 (3.0) Pneumatically Operated with Solenoid (see below for ordering information)* 63 mm (2.5 in.) VGA063NExxxP* 4.8 (2.0) 100 mm (4 in.) VGA100NExxxP* 7.3 (3.0) * Replace xxx in Part Number with Solenoid Voltage Rating Example: VGA063IE115P 115V AC 220V AC 24V DC xxx=115 xxx=220 xxx=24d Description Part Number Shipping Weight lbs. (kg Spare Seals Kits (includes gate, stem (shaft) and bonnet seals) 63 mm (2.5 in.) VGA063SEALS 1.0 (0.5) 100 mm (4 in.) VGA100SEALS 1.0 (0.5) 160 mm (6 in.) VGA160SEALS 1.0 (0.5) 200 mm (8 in.) VGA200SEALS 1.0 (0.5) 250 mm (10 in.) VGA250SEALS 1.0 (0.5) 4
Swing Gate Valves Viton Sealed Swing gate valves combine ultra-high vacuum performance with ease of operation. These high conductance, stainless steel valves feature short-stroke, welded stainless steel bellows and no-scuff main sealing for reliable operation, and are ideal for applications not requiring bakeout over 200 C. 5
Viton-Sealed Swing Gate Valve 4 in. Valves High Vacuum Hand Operated inches (millimeters) Electropneumatic Operated inches (millimeters) 6 in. x 4 in. Inlet CFF Dimensions ID: 4.00 (101.6) OD: 5.97 (151.6) THK: 0.67 (17.0) BC: 5.128 (130.3) 16 holes, 5 16 24 thread Technical Specifications Vacuum Range Leak Rate Bakeable To Service Life Air Pressure Inlet Flange Loss of Power Atmosphere to below 10-9 torr (mbar) Main seal less than 1 x 10-9 std cc/sec for helium with 15 psi differential, either direction. Body and bellows less than 1 x 10-10 std cc/sec for helium with 15 psi differential, either direction 200 C 100,000 cycles 40 to 100 psig Standard 6 x 4 ConFlat Flange (NW 100CFF) Valve closes in the event of electrical power failures whenever air pressure applied; upon loss of both electrical and pneumatic, gravity controls position of gate. Description Voltage Rating Part Shipping Number Weight lbs. (kg) Manually Operated 9515226 19.0 (8.6) Electropneumatic 100 V; 50/60 Hz 9515251 19.0 (8.6) 120 V; 50/60 Hz 9515227 19.0 (8.6) 200 V; 50/60 Hz 9515252 19.0 (8.6) 220/240 V; 50/60 Hz 9515231 19.0 (8.6) 24 VDC 9515250 19.0 (8.6) For Metric threaded CFFs, add M to ordering part number. Example: 9515226M Accessories Main seal, Viton 2740275500 0.3 (0.2) Bonnet seal 2740242500 0.3 (0.2) Bellows seal 9530017 0.3 (0.2) Bellows assembly, SST, manual valve Q2061301 1.0 (0.5) Bellows assembly, SST, pneumatic valve Q2247301 1.0 (0.5) Position indicator 9530122 0.3 (0.2) Flange gaskets, OFHC copper, 10/pkg FG0600CI 1.5 (0.7) Screw and washer set for tapped flange, 25 sets/pkg FB0450T12 1.5 (0.7) 6
Viton-Sealed Swing Gate Valve 6 in. Outline Drawing inches (millimeters) Outline Drawing inches (millimeters) 8 in. x 6 in. Inlet CFF Dimensions ID: 6.00 (152.4) OD: 7.97 (202.4) THK: 0.67 (17.0) BC: 7.13 (181.1) 20 holes, 5 16 24 thread* *Us 5 16 24 x 1 1 2 in. long bolts Technical Specifications Vacuum Range Leak Rate Bakeable To Service Life Air Pressure Loss of Power Atmosphere to below 10-9 torr (mbar) Main seal less than 1 x 10-9 std cc/sec for helium. Body and bellows less than 1 x 10-10 std cc/sec for helium (both rates with 15 psi differential, either direction, when measured with helium mass spectrometer). 200 C/50 C (actuator) 100,000 cycles 40 to 100 psig Valve closes in the event of electrical power failure whenever air pressure is applied; upon loss of both electrical and pneumatic, gravity controls position of gate. Description Voltage Rating Part Shipping Number Weight lbs. (kg) Manually Operated 9515218 31.0 (14.0) Electropneumatic 120 V, 50/60 Hz 9515219 31.0 (14.0) 100 V, 50/60 Hz 9515255 31.0 (14.0) 200 V, 50/60 Hz 9515256 31.0 (14.0) 220/240 V, 50/60 Hz 9515233 31.0 (14.0) 24 VDC 9515234 31.0 (14.0) For Metric threaded CFFs, add M to ordering part number. Example: 9515234M Accessories Main seal, Viton 660892258 0.3 (0.2) Bonnet seal 2740924300 0.3 (0.2) Bellows seal 9530017 0.3 (0.2) Bellows assembly, SST, manual valve Q2061301 1.0 (0.5) Bellows assembly, SST, pneumatic valve Q2247301 1.0 (0.5) Position indicator 9530122 0.3 (0.1) Flange gaskets, OFHC copper, 10/pkg FG0800CI 1.5 (0.7) 7
Viton-Sealed Swing Gate Valve 8 in. Valves High Vacuum Outline Drawing inches (millimeters) Technical Specifications Vacuum Range Atmosphere to below 10-9 torr (mbar) Leak Rate Main seal less than 1 x 10-9 std cc/sec for helium. Body and bellows less than 1 x 10-10 std cc/sec for helium (both rates with 15 psi differential, either direction, when measured with a helium mass spectrometer). Bakeable To Viton 200 C/50 C (actuator) Service Life 100,000 cycles Air Pressure 55 to 100 psig Inlet Flange ASA, ConFlat, or ISO options Loss of Power Valve closes in the event of electrical power failure whenever air pressure is applied; upon loss of both electrical and pneumatic, gravity controls position of gate. Description Voltage Option Part Number Shipping Weight lbs. (kg) ASA Flange ConFlat Flange ISO Flange Stainless Steel Swing Gate Valves 6 in. 10 x 8 in. NW200 Manually Operated 9515209 9515264 9515270 48.0 (22.0) Electropneumatic 120 V, 50/60 Hz 9515210 9515266 9515271 48.0 (22.0) 100 V, 50/60 Hz 9515258 9515262 9515272 48.0 (22.0) 200 V, 50/60 Hz 9515259 9515263 9515273 48.0 (22.0) 220/240 V, 50/60 Hz 9515260 9515235 9515274 48.0 (22.0) 24 VDC 9515257 9515261 9515275 48.0 (22.0) For Metric threaded CFFs, add M to ordering part number. Example: 9515264M Description Part Number Shipping Weight lbs. (kg) Accessories Position indicator Q3083301 0.3 (0.2) Blank-off kit, roughing/ion gauge port 9535004 2.0 (0.9) Rebuild/repair kit, manual and pneumatic valves (Includes bellows seal (9530017) and o-rings) 9535006 7.0 (3.2) 8