Bourdon Tube Pressure Gauges Ultra High Purity (UHP) Series Type

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Bourdon Tube Pressure Gauges Ultra High Purity (UHP) Series Type 230.15 Mechanical Pressure Measurement WIKA Datasheet 230.15 Applications Semiconductor and electronic industry, medical industry, gene technology, biotechnology and pharmaceutical industries. Suitable for corrosive environments and gaseous or liquid media that will not obstruct the pressure system Where measurement of high purity gases is needed without contamination of the process media. Special features 316L wetted parts Electro-polished SS case & face-seal connection Positive and compound pressure ranges to 10,000 psi Standard Features Design ASME B40.100 Sizes 2 (53 mm) 1 1/2 (40 mm) Accuracy Class 2 : ± 2/1/2% of span (ASME B40.100 Grade A) 1 1/2 : ± 3/2/3% of span (ASME B40.100 Grade B) Ranges Vacuum / compound to 30 Hg/0/200 psi Pressure from 0 psi up to 10,000 psi or other equivalent units of pressure or vacuum Working Pressure Steady: 3/4 scale value Fluctuating: 2/3 full scale value Short time: full scale value Operating Temperature Ambient: -40 F to +140 F (-40 C to +60 C) Medium: +212 F (+100 C) maximum Temperature Error Additional error when temperature changes from reference temperature of 68 F (20 C) ±0.4% for every 18 F (10 C) rising or falling. Percentage of span. Weather Protection Weather resistant (NEMA 3 / IP 54) WIKA Datasheet 230.15 05/2007 Bourdon Tube Pressure Gauge Model 230.15 Pressure Connection Material: Face-seal nut 316 stainless steel Face-seal gland 316L Position: Lower mount (LM) Center back mount (CBM) Type of Connection: Face-seal fixed male Swivel male or female Wetted Surface Finish: R a < 0.25μm (Ra < 10μinch)-internal Pressure Connection Option, NPT Material: 316L stainless steel Position: Lower mount (LM) & center back mount (CBM) Type of connection: 1/4 NPT - male Wetted surface finish: R a < 1.0μm (Ra < 40μinch)-internal Bourdon Tube Material: 316L stainless steel 30 Hg (vac) to 1,000 psi, C-type 1,500 to 10,000 psi, helical type Helium leak tested 1 x 10-9 scc/sec (inboard) Socket Material: 316L stainless steel R a < 0.5μm (R a < 20μinch) - internal Movement Stainless steel Dial White aluminum with stop pin and black lettering Pointer Black aluminum Case 304 stainless steel, electropolished Window Polycarbonate: twist-lock (2 ); snap cap (1½ ) (Standard Features continued on Page 2 of 7) Page 1 of 8

Cleanliness UHP clean for semiconductor gas applications - in accordance with SEMI/SEMATECH Cleaned and packed in class 100/10 cleanroom Packaged in two bags Purged with Nitrogen Protective cap over threaded connection Order Options (minimum order may apply) Alarm contact (830.1E), inductive Other special connections limited to wrench flat area Custom dial layout Stainless steel restrictor Particle test with certificate Dual pressure scales Additional process wetted materials available per request Dimensions 230.15 1½ LM FACE SEAL FEMALE SWIVEL (FSF) FACE SEAL FIXED MALE (FSFM) ¼ NPT-MALE (NPTM) ¼ WELD STUB Page 2 of 8 WIKA Datasheet 230.15 05/2007

Dimensions FACE SEAL MALE SWIVEL (FSM) FACE SEAL FEMALE SWIVEL (FSF) 230.15 1½ CBM ¼ NPT-MALE (NPTM) WIKA Datasheet 230.15 05/2007 Page 3 of 8

Dimensions 230.15 1½ CBM FACE SEAL FIXED MALE (FSFM) 230.15 1½ CBM FACE SEAL MALE SWIVEL (FSM) 230.15 1½ CBM FACE SEAL FEMALE SWIVEL (FSF) Page 4 of 8 WIKA Datasheet 230.15 05/2007

Dimensions FACE SEAL FIXED MALE (FSFM) ¼ NPT-MALE (NPTM) FACE SEAL MALE SWIVEL (FSM) FACE SEAL FEMALE SWIVEL (FSF) WIKA Datasheet 230.15 05/2007 Page 5 of 8

Dimensions ¼ WELD STUB 230.15 2" CBM U-CLAMP OPTION 230.15 2" CBM FRONT FLANGE OPTION TYPE/SIE WEIGHT KEY A B C D J M N P R S T 230.15 2 mm 57.8 30.3 12.6 53.4-66.4 71 16 9.80 2.5 63 0.44 lbs. CBM / UC in 2.28 1.19 0.50 2.10-2.61 2.80 0.63 0.39 0.10 2.48 230.15 2 0.38 lbs. mm 57.8 30.2 12.6 53.4 3.6 76.2 65 - - - - CBM / FF in 2.28 1.19 0.50 2.10 0.14 3.0 2.56 - - - - Recommended panel cutout = 55 mm (2.17 in.) Page 6 of 8 WIKA Datasheet 230.15 05/2007

Case 304 stainless steel, electropolished Wetted Material 316L stainless steel, electropolished Window Polycarbonate Dial Aluminum, white with stop pin Pointer Aluminum black Accuracy 2 +/- 2/1/2% of span (ASME B40.1 Grade A) 1½ +/-2/3/2% of span (ASME B40.1 Grade B) Cleanliness UHP clean for semiconductor gas applications - in accordance with SEMI/SEMATECH Packaginguble Double plastic bagged, nitrogen purged Code Features Nominal Size, Case A 1.5 (40mm) 1 B 2.0 (50mm) Unit, Primary Scale P psi B Bar L kpa E MPa K Kg/cm2 2? other - please specify Range V310-30 inhg...0 V321-30inHg...15 psi V331-30 inhg...30 psi V352-30 inhg...60 psi V379-30 inhg...100 psi V412-30 inhg...160 psi V415-30 inhg...200 psi V422-30 inhg...300 psi G310 0 psi...15 psi G321 0 psi...30 psi G341 0 psi...60 psi G369 0 psi...100 psi G411 0 psi...160 psi G414 0 psi...200 psi G421 0 psi...300 psi G428 0 psi...400 psi G441 0 psi...600 psi G455 0 psi...800 psi G469 0 psi...1000 psi G510 0 psi...1500 psi G514 0 psi...2000 psi G521 0 psi...3000 psi G528 0 psi 4000 psi G541 0 psi 6000 psi G569 0 psi 10000 psi 3??? Other - Please Specify (psi) Unit, Secondary Scale Without P psi B Bar L kpa E MPa K Kg/cm2 4? other - please specify WIKA Datasheet 230.15 Page 7 of 8

Process connection WH 1/4 Face Seal Male Swivel (FSM) WI 1/4 Face Seal Swivel Female (FSF) WG 1/4 Face Seal Fixed Male (FSFM) WK 1/2 Face Seal Male Swivel WL 1/2 Face Seal Female Swivel NB 1/4 NPT-male (NPTM) VN 1/4 Weld Stub WN 3/8 T -Connector 5??? Other-Please Specify Connector position B Center Back Mount U Lower Mount 6? other - please specify! Mounting Flange/Bracket Without K Panel Mount with SS Mounting Bracket (2 Case Only) F Front Flange, Polished SS (2 Case Only) 7? other - please specify Switch Type Without N Inductive NPN (2 Case Only) 830.1E P Inductive PNP (2 Case Only) 830.1E 8 R Reed (2 Case Only) Switch Function Without 1 Normally Open 2 Normally Closed 9 3 Single Pole Changeover Electrical Connection Without DA Flying Leads M4 Circular Connector M12 x 1, 4-Pin (Reed Switch Only) 10? Other - Please Specify Quality certificates without 11? other - please specify Additional order details without 12 T additional text Order Code: 1 2 3 4 5 6 7 8 9 10 11 12 230.15 - - - - - - Specifi cations given in this price list represent the state of engineering at the time of printing. Modifi cations may take place and the specifi ed materials may change without prior notice Page 8 of 8 WIKA Datasheet 230.15 05/2007 WIKA Instrument Corporation 1000 Wiegand Boulevard Lawrenceville, GA 30043-5868 Tel: 888-WIKA-USA 770-513-8200 Fax: 770-338-5118 E-Mail: info@wika.com www.wika.com