Bourdon Tube Pressure Gauges Ultra High Purity (UHP) Series Type

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Transcription:

Bourdon Tube Pressure Gauges Ultra High Purity (UHP) Series Type 230.15 Mechanical Pressure Measurement WIKA Datasheet 230.15 Applications Semiconductor and electronic industry, medical industry, gene technology, biotechnology and pharmaceutical industries. Suitable for corrosive environments and gaseous or liquid media that will not obstruct the pressure system Where measurement of high purity gases is needed without contamination of the process media. Special features 316L wetted parts Electro-polished SS case and face-seal connection Positive and compound pressure ranges to 10,000 psi Standard Features Design ASME B40.100 Sizes 2 (53 mm) 1 1/2 (40 mm) Accuracy Class 2 : ± 2/1/2% of span (ASME B40.100 Grade A) 1 1/2 : ± 3/2/3% of span (ASME B40.100 Grade B) Ranges Vacuum / compound to 30 Hg/0/200 psi Pressure from 0 psi up to 10,000 psi or other equivalent units of pressure or vacuum Working Pressure Steady: 3/4 scale value Fluctuating: 2/3 full scale value Short time: full scale value Operating Temperature Ambient: -40 F to +140 F (-40 C to +60 C) Medium: +212 F (+100 C) maximum Temperature Error Additional error when temperature changes from reference temperature of 68 F (20 C) ±0.4% for every 18 F (10 C) rising or falling. Percentage of span. Weather Protection Weather resistant (NEMA 3 / IP 54) Bourdon Tube Pressure Gauge Model 230.15 Material: Face-seal nut 316 stainless steel Face-seal gland 316L Position: Lower mount (LM) Center back mount (CBM) Type of Connection: Face-seal fixed male Swivel male or female Wetted Surface Finish: Ra < 0.25µm (Ra < 10µinch)-internal Bourdon Tube Material: 316L stainless steel 30 Hg (vac) to 1,000 psi, C-type 1,500 to 10,000 psi, helical type Helium leak tested 1 x 10-9 scc/sec (inboard) Socket Material: 316L stainless steel Ra < 0.5µm (Ra < 20µinch) - internal Movement Stainless steel Dial White aluminum with stop pin and black lettering Pointer Black aluminum Case 304 stainless steel, electropolished Window Polycarbonate: twist-lock (2 ); snap cap (1½ ) ( continued on Page 2 of 8) Pressure Connection WIKA Datasheet 230.15 09/2010 Page 1 of 8 R

Cleanliness UHP clean for semiconductor gas applications - in accordance with SEMI/SEMATECH Cleaned and packed in class 100/10 cleanroom Packaged in two bags Purged with Nitrogen Protective cap over threaded connection Order Options (minimum order may apply) Alarm contact (830.1E), inductive Other special connections limited to wrench flat area Custom dial layout Stainless steel restrictor Particle test with certificate Dual pressure scales Additional process wetted materials available per request Dimensions For pressure ranges greater than 250 bar (3,625 psi), the dimension of the face seal gland diameter changes from 9.53 mm (0.375 inches) to 8.86 mm (0.349 inches). 230.15 1½ LM FACE SEAL FEMALE SWIVEL (FSF) 230.15 2 LM FACE SEAL FIXED MALE (FSFM) 230.15 2 LM ¼ WELD STUB Page 2 of 8 WIKA Datasheet 230.15 09/2010

Dimensions 230.15 2 LM FACE SEAL MALE SWIVEL (FSM) 230.15 2 LM FACE SEAL FEMALE SWIVEL (FSF) WIKA Datasheet 230.15 09/2010 Page 3 of 8

Dimensions 230.15 1½ CBM FACE SEAL FIXED MALE (FSFM) 230.15 1½ CBM FACE SEAL MALE SWIVEL (FSM) 230.15 1½ CBM FACE SEAL FEMALE SWIVEL (FSF) Page 4 of 8 WIKA Datasheet 230.15 09/2010

Dimensions 230.15 2 CBM FACE SEAL FIXED MALE (FSFM) 230.15 2 CBM FACE SEAL MALE SWIVEL (FSM) 230.15 2 CBM FACE SEAL FEMALE SWIVEL (FSF) WIKA Datasheet 230.15 09/2010 Page 5 of 8

Dimensions 230.15 2 CBM ¼ WELD STUB J B M C B P 120 C A D A D T N R S N 230.15 2" CBM U-CLAMP OPTION M 230.15 2" CBM FRONT FLANGE OPTION TYPE/SIZE WEIGHT KEY A B C D J M N P R S T 230.15 2 mm 57.8 30.3 12.6 53.4-66.4 71 16 9.80 2.5 63 0.44 lbs. CBM / UC in 2.28 1.19 0.50 2.10-2.61 2.80 0.63 0.39 0.10 2.48 230.15 2 0.38 lbs. mm 57.8 30.2 12.6 53.4 3.6 76.2 65 - - - - CBM / FF in 2.28 1.19 0.50 2.10 0.14 3.0 2.56 - - - - Recommended panel cutout = 55 mm (2.17 in.) Page 6 of 8 WIKA Datasheet 230.15 09/2010

Case 304 stainless steel, electropolished Wetted Material 316L stainless steel, electropolished Window Polycarbonate Dial Aluminum, white with stop pin Pointer Aluminum black Accuracy 2 : +/- 2/1/2% of span (ASME B40.1 Grade A) 1 1/2 : +/- 3/2/3% of span (ASME B40.1 Grade B) Cleanliness UHP clean for semiconductor gas applications - in accordance with SEMI/SEMATECH Packaginguble Double plastic bagged, nitrogen purged Field No. Code Feature Nominal Case Size A 1.5" (40 mm) 1 B 2.0" (50 mm) Unit P psi B bar L kpa E MPa K Kg/cm2 2? other Pressure Range V310-30 inhg... 0 psi V321-30 inhg... 15 psi V331-30 inhg... 30 psi V352-30 inhg... 60 psi V379-30 inhg... 100 psi V412-30 inhg... 160 psi V415-30 inhg... 200 psi V422-30 inhg... 300 psi G310 0... 15 psi G321 0... 30 psi G341 0... 60 psi G369 0... 100 psi G411 0... 160 psi G414 0... 200 psi G421 0... 300 psi G428 0... 400 psi G441 0... 600 psi G455 0... 800 psi G469 0... 1000 psi G510 0... 1500 psi G514 0... 2000 psi G521 0... 3000 psi G528 0... 4000 psi G541 0... 6000 psi 3???? other - please specify Unit Z without P psi B bar L kpa E MPa K Kg/cm2 4? other WIKA Datasheet 230.15 09/2010 Page 7 of 8

Field No. Code Feature Process Connection WH 1/4" swivel male face seal WI 1/4" swivel female face seal WG 1/4" fixed male face seal WK 1/2" swivel male face seal WL 1/2" swivel female face seal VN 1/4 Weld Stub WN 3/8 T connector 5?? other - please specify Connector Position B Center back mount 6 U Lower mount Mounting Flange/Bracket Z Without K Panel mount with SS mounting bracket (2 CBM only) F Front flange, polished SS (2 CBM only) 7? other - please specify Switch Type Z without N Inductive NPN (2 Case only) 830.1E 8 P Inductive PNP (2 Case only) 830.1E Electrical Connection ZZ without 9 DA Flying leads, 10' (3 meters) Quality Certificates Z without 10? other - please specify Additional Order Details Z without 11 T Additional text Order Code: 1 2 3 4 5 6 7 8 9 10 11* 230.15 - - - - - Z *Additional order details Specifications provided in this datasheet represent the state of engineering at the time of printing. Modifications may take place and the specified materials may change without prior notice Page 8 of 8 WIKA Datasheet 230.15 09/2010 R WIKA Instrument Corporation 1000 Wiegand Boulevard Lawrenceville, GA 30043-5868 Tel: 888-WIKA-USA 770-513-8200 Fax: 770-338-5118 E-Mail: info@wika.com www.wika.com