Export Oriented Liaison Firm Logic Control, Inc Hon-Machi 6-chome, Toyonaka, Japan Normally Offline FAX

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Murata Kikai is an original equipment manufacturer of various sensors that are designed and made to meet the requirements of each client contractor who is a device, equipment or machine manufacturer, or an engineering or construction company. Murata, therefore, does not have so called Standar Products that are sold to many different users. As to new or additonal order for the same end user shall be placed by the same contractor who had purchased in the past from Murata. Export Oriented Liaison Firm Logic Control, Inc. 101 1-15 Hon-Machi 6-chome, Toyonaka, 560-0021 Japan 06-6858-9181 Normally Offline FAX 06-6858-9182 logicc@wind.ocn.ne.jp 0 http://www.logiccon.jp

Contents Steel, Metals 1 Sheet edge tracing control, Web control, Environment-resistant built-in linear sensor CIC for cylinders, Roll gap control, Roll application, Coil flattening device, Roller height control, Steel converter tilt angle detection and control, Target spot detection for high frequency induction hardening Optronics, Precision engineering, Laboratory 1 4 Measurement of polishing value and polishing disc wear amount, Position detection and determining under the microscope, Position determining of optical elements, Variable setting of optical slit width, Application to medical devices, Application to viscometers, Tripod table height determining, Minute angle setting of a swivel table, Angle measurement of a tilt stage, Non-contact linear stage, Linear guide sensor, Displacement (Increment) measurement under high pressure Semiconductors, Electronic parts 4 Wire flexure detection of a wire saw for silicon ingot, Small linear actuator position making and control, Non-contact type multi-turn potentiometer, Electronic parts feeder Processing, Food, Chemical & Pharmaceutical 4 5 Needle valve opening degree control, Viscosity and hardness meter by drop-weight impact method, Impact line flow meter, Level meter, Specific gravity meter, Flow meter, Pressure measurement, Valve opening value detection, Liquid level management in a tank, Open/Close control of a small valve, Balanced-type water level meter Machine tools, Robots 6 Mechanical hand gripping force detection, Detection of bottom dead center of a press, Drill unit stroke control, Handling size measurement, Small manipulator application, ATC mechanism, Small actuator application, Null method tracing machining, Pneumatic servo application Automatic machines, Inspection machines 6 9 Tensioner displacement measurement, Cam shaft eccentricity measurement, Shock absorber dynamic characteristic measurement, Nozzle position control of a laser machining tool, a dispenser etc., Servo motor control, Linear pulse motor control, Measurement by tracing, Position detection in the water, Tension detection device, Torque sensor, Servo motor with a build-in sensor, Hydraulic oscillating motor operating angle detection, Chemical liquid dispenser piston position control, Small sensor with a linear guide for a light load, Constant length cutting system application, Rotary lever touch sensor, Filling machine angular position determining and control, potentiometer, Torque sensor, Small servo unit application, Servo motor control, Thickness measurement, Overlapped sheets detection, Surface undulation measurement on a flat glass, Parts dimension and level management, Press-fit device application, Sheet width continuous measurement Molding machines, Dies & Molds 10 Injection molding machine control, Detection of hoist levelness and deformation on a press machine, Press motion control, Tiebar clamping force detection Conveyance, Automated warehouse 10 11 Chain conveyer elongation measurement, Movable carriage position detection, Unmanned traveling carriage power control according to bank tilting angle, Conveyer carriage stopping position making, Carriage position detection by wire sensor, Steel belt running position detection, Electric power cylinder stroke position detection Materials 11 Material elasticity test, Electronic balance, Density measurement, Measurement of a coefficient of linear expansion Acoustics, Vibration 11 12 Non-contact slide volume, Vibration, frequency and amplitude measurement, Vibration exciter, Damping performance inspection Building and Civil engineering 12 14 Detection of the link bend angle of a small diameter shield machine, Landslide detection, Inspection application to a small inside diameter pipe, Snow removing blade control of a tractor grader, Rotating laser levelness making, Vertical construction management of an auger, For posture angle detection, Piler driving angle management, Tilt angle and turning angle measurement, Slant and dip measurement of an excavation shaft and of a stratum, Line laser levelness making, Rut depth measurement application, grader, Asphalt finisher, Slant direction measurement, Tilt control of the boom arm on an excavator, Angle making application to a structure, Ground inclination measurement, Horizontality detection of a crane outrigger, Gate open/close control Ship, Aviation, Railroad 14 15 Angular speed detection, For rail point gap measurement, Gyro gimbal and horizontal platform, Antenna directing system, Ship posture angle detection, Sea bed contour profile probing system, Servo accelerometer, Electric control of a diesel engine Disaster prevention, Air conditioning 15 Infrared sensor control, Temperature control, Temperature sensor Classification of Inductcoders 16 Installation of Sensors 16 17 Copyright reserved. Copy or reprint by other parties are strictly prohibited. This application guide includes examples that Murata Kikai K.K. has applied for patents. 1

Steel, Metal / Optronics, Precision Engineering, Laboratory Sheet edge tracing control Web control CIC Environment-resistant built-in linear sensor for cylinders Environment-proof structure, protected by an Air Cylinder with ports 1 and 2 are directly connected Skew Roller CIC Head Constant value control CIC Rod Ultrasonic Inspector Cylinder Rod Linear Sensor Linear Sensor 0616 Roll gap control 0616 Roll application CIC Coil flattening device Roller height control Multi-turn CIC1816 2016 Hydraulic Cylinder Roll Gap setting Flattening Roller CIC Steel converter tilt angle detection and control Target spot detection for high frequency induction hardening Measurement of polishing value and polishing disc wear amount Linear 34 Sensor Polishing Disc 34 2

Optronics, Precision Engineering, Laboratory Position detection and determining under a microscope Position determining of optical elements Variable setting of optical slit width Amount of light received CCD1 Amount of light received CCD2 Activate by Linear etc. Linear Stage CCD2 CCD1 Optical Slit Linear Stage Application to medical devices Application to viscometers Tripod table height determining Application Detection Coil Active Sensor A DC The viscosity of the object liquid to be measured Distortion Parts generates the difference of phases between A and B. 10 Passive Sensor B Ultrasonic oscillator Ultrasonic Mechanical Scanner for Bio diagnosis Scanning direction Ultrasonic beam 10 Measuring Cone PIC, Minute angle setting of a swivel table Special Angle measurement of a tilt stage Stage Fine Adjustment Screw PIC Laser Beam PIC, Non-contact linear stage Air Pad Bearing or PIC Spring Plunger Shaft Adjusting Screw PIC, 0308 PIC 3

Optronics, Precision Engineering, Laboratory / Semiconductors, Electronic parts / Processing, Food, Chemical & Pharmaceutical Linear guid sensor Displacement measurement under high pressure Wire flexure detection of wire saw for silicon ingot High Pressure Tank Ingot Clamp Head Tracing Roller Ball Spline Non-Magnetic SS Spline Rod Built-in Rod Wire CIC 35MPa Applicable 0616 Small linear actuator position making and control Silicon Ingot CIC Multi-turn potentiometer Non-contact type Electronic parts feeder Spline Shaft Spline Nut Voice Coil, Solenoid etc. Linear Thread Connection Sensor rod R Air sucker pad H Needle valve opening degree control Viscosity and hardness meter by drop-weight impact method Impact line flow meter Rod Powder Head Head Feed (Lead) Screw Drop Weight O-Ring Rod Test Material Needle 4

Processing, Food, Chemical & Pharmaceutical Level meter Specific gravity meter Rod Flow meter Main Line Head Torque tube Tapered Float Float Displacement Float Spring Specific Gravity Measuring Part Pressure measurement Pressure measurement Valve opening value detection Bourdon Tube Bellows Linear Actuator * Air Cylinder * + Linear Converter etc. Valve Stem Stem Seal Valve Input Pressure Input Pressure Liquid level management in a Tank Open/Close control of a small valve Balanced-type water level meter Atmospheric Pressure Input Line Signal Line Coil Servo Height Magnet Diaphragm 10 5

Machine tools, Robots / Automatic machines, Inspection machines Mechanical hand gripping force detection Detection of bottom dead center of a press Drill unit stroke control Arm Elastic Support Base Plate Drill Finger Work Finger Handling size measurement 0616 Small manipulator application ATC mechanism 0308, 0616 Versatile Servo Servo Work 10 Chuck 10, 0616 Small actuator application 10 Null method tracing machining 34 Pneumatic servo application Air Pressure Tool Slide Deviation Detection Biometal Fiber Work Master 10 Bite Work Slide Small Arm Position Making Control Pneumatic Cylinder Contactor 10 6

Automatic machines, Inspection machines Tensioner displacement measurement Cam shaft eccentricity measurement Shock absorber dynamic characteristic measurement Servo Shock Absorber Cam Shaft Nozzle position control of a laser machining tool, a dispenser etc. PIC Servo motor control 0616 Linear pulse motor control Command Linear Pulse Nozzle Work Servo Measurement by tracing 030, 0616 Position detection in the water Tension detection device Rod WIC 0308 Head In the water, PIC Welding Ultrasonic Probe PIC WIC 0308 7

Automatic machines, Inspection machines Torque sensor Servo motor with a built-in sensor Hydraulic oscillating motor operating angle detection Sensor Rod Head 0308 0616 Tortion Bar Gear Train Servo 0616 Chemical liquid dispenser piston position control Small sensor with a linear guide for a light load, 0616 Constant length cutting system application Rod Hard chromium plated Cutter L 33mm Measuring Roller Linear Ball Bush Shaft Piston Head Counter Rotary lever touch sensor Filling machine angular position determining and control potentiometer Sensor output display and recording. Remote control of setting and reading values. For automatic control. Micro Pole Bearing Contactor Multi-position output Winding Check 34 Detection of Sheet thickness and of existence of a label 10, 34 34 8 Special

Automatic machines, Inspection machines Torque sensor Small servo unit application Solid of continuous revolution Servo motor control Servo Command 10 Eccentric Magnet Detection Coil Torsion Bar Servo Gear Train Phase Difference Detection Torque Sensor Thickness measurement 10 Overlapped sheets detection, 0616 Surface undulation measurement on a flat glass, PIC PIC Work PIC PIC Parts dimension and level management, PIC Press-fit device application PIC Sheet width continuous measurement Parts dimension measurement by high accuracy pencil sensors. Hydraulic Cylinder PIC 0808SS CIC Head CIC Rod Press-fit position and pressure control Piezo-Electric Element PIC Parts to be press-fitted. Parts PIC 0808SS CIC 9 PIC

Molding machines, Dies & Molds / Conveyance, Automated warehouse Injection molding machine control Detection of hoist levelness and deformation on a press machine Press motion control Control of positive and negative acceleration and of bottom dead center positioning 0616 Tiebar clamping force detection Chain conveyer elongation measurement Stopper position adjustment Clamping forces are measured by tiebar's elongation value (several tens of μmeters). Tiebar Sensor Reference Rod Pneumatic Cylinder Movable Die Servo Fixed Die PIC Stopper PIC Movable carriage position detection 0616 Unmanned traveling carriage power control according to bank tilting angle, 0616 Conveyer carriage stopping position making Carriage Detection Plate 10 Special Linear

Conveyance, Automated warehouse / Materials / Acoustics, Vibration Carriage position detection by wire sensor Steel belt running position detection Electric power cylinder stroke position detection Steel Belt Carriage CIC Detection Coil Magnet Worm Gear CIC Non-magnetic Wire Material elasticity test Special Linear Electronic balance CIC Density measurement Measuring Pan Leaf Spring Rod Spring Head Output h1 (A, B empty) h2 (A loaded) h3 (B loaded) Force Coil Magnet : Material density Test Material Plate A : Liquid density Test Material Plate B, 0616 Measurement of a coefficient of linear expansion Non-contact slide volume Vibration, frequency and amplitude measurement Recorder Converter Electric Furnace Test Material Rod Reference Rod Special Linear 11

Acoustics, Vibration / Building and Civil engineering Vibration exciter Damping performance inspection Detection of the link bend angle of a small diameter shield machine Vibration Coil Mass Table Linear Sensor Test Material Hydraulic Cylinder Vibration Exciter Landslide detection Inspection of a small inside diameter pipe, 0616 Snow removing blade control of a tractor grader Inspection by Ultrasonic, Optronics, etc. 34 Protection Pipe Lower part of Vehicle Body Weight Pipe to be inspected. Wire Built-in CIC Lifting Cylinder Movable Stake Built-in CIC Cylinder for Tilting 10 Snow removing Blade Extension Tube Blade up and down direction Blade Slant Direction 34 Rotating laser levelness making Reflector (Prism) 10 Vertical construction management of an auger XY 2 Axial CIC For posture angle detection Precise Tilt Meter realizes detection of posture angle, reference horizontal surface, etc. Turning Laser Application Laser Beam XY Plane Level Detection Tilt Meter Rolling Laser Scanning Surface Installation Tripod 007 Activation Wall Marking Work Pitching Screw Concrete Pumping, Floor Level Finishing 12

Building and Civil engineering Piler driving angle management Tilt and turning angle measurement Slant and dip measurement of an excavation shaft and of a stratum Tilt Meter Guiding Pipe Tilt Meter 007 Axial X Axial Y Line laser levelness making Rut depth measurement application grader Line CCD / Rotating Angle Setting Tilt Meter XY Plane Level Detection Tilt Meter Forward Direction Automatic Level Making Mechanism Laser Displacement Meter Installation Tripod Line Laser Tilt Meter Cutting Angle Setting Tilt Angleθ Compensation Asphalt finisher Slant direction measurement, Tilt control of the boom arm on an excavator Rotating Laser Hopper Slip Ring Hydraulic Cylinder / CIC Tilt Meter Ultrasonic Level Tracker Asphalt Pavement Surface Encoder Tilt Angle Measuring Unit Asphalt Mixture Axial Y Axial X Screed Plate Tilt Max. Level Detection Tilt Meter / Horizontal and road slanting angle setting, CIC Tilt Max. Tilt Control Laser Level / Turning Laser H Constant Cutting Work 13

Building and Civil engineering / Ship, Aviation, Railroad Angle measurement application to a structure Ground inclination measurement Horizontality detection of crane outrigger Structure Tilt Meter Gate open/close control Angular speed detection For rail point gap measurement Flying object's rotation angular velocity detection for stabilization control of its azimuth. CIC Gap Single Axial Gimbal Direct Drive Hydraulic Servo Point Switching Direction Hydraulic Pressure Control Unit Hydraulic Cylinder Gate Tracing Spring Gyro Rotor LIDC Air Plane Azimuth Magnetic Direction Sensor etc. CIC Gyro gimbal and horizontal platform LIC 0308 Antenna directing system 0616 Ship posture angle detection Rolling Elevation Axial Pitching Azimuth Axial LIC 0308 14

Ship, Aviation, Railroad / Disaster prevention, Air conditioning Sea bed contour profile probing system Servo accelerometer Electric control of a diesel engine Elastic Flexure Hinge Rack Actuator Ultrasonic Array Sensor Rod Towing Direction Head Torquer Coil Sea Surface Magnet Sea Bed Surface Sensor Converter Rack Position Sensor Tilt compensation is made to the picture, using the tilt angle, θ. Torquer Coil Infrared sensor control Temperature control Special Temperature sensor Rod Azimuth Detection Sensor Head Helical Bimetal Elevation Detection Sensor Infrared Sensor Balanced Bimetal Temperature sensor Spiral Bimetal 15

Classification of Inductcoders Detection Type Model Name Linear sensor Features Ultra-miniature, Built-in Application FA, OEM Small linear encoder to be built in the various devices and equipment. Basic type, ideal for general application to FA. Built-in sensor for cylinder High Temperature- and Environment-resistant Steel manufacturing, etc. making the best use of it's environment resistance. Excellent in environment-resistance, and best suited to build in a hydraulic and/or pneumatic cylinder. Linear Displacement Waterproof sensor Submersible to 50 m depth Under water use Applicable to measuring and mechanical controlling under water. Pencil sensor High accuracy, Long range Precise measurement of thickness and length 2μm linearity at a measured length of 5mm has been realized. Length measuring gauge, ideal for low pressure input. Rotary encoder Miniature, High resolution Industries where environment-resistance is needed. FA Small and high resolution rotary encoder. With its excellent repeatability, suitable for overall FA use and applicable to the fields that require an environment-resistance as well. Angular Displacement Tilt meter Temperature characteristic Accurate tilt measurement Applicable to the industries related to the precise tilt angle measurement. With it's 0.9 sec. high resolution and the digital output capability make it easy to construct the whole system. 16

Installation of Sensors Linear Sensor Fig. 1 ① 0616 and 1632 Make it a rule not to let the sensor head and sensor rod contact each other when used. moving direction cross section view Gap cross section view ② A head holder is available for sensors and 0616, as shown in fig. 2. Refer to the sensor catalog for detailed dimensions. Fasten the sensor head with the U-shaped holder and the bolt. Fig. 2 ③ Fix the sensor rod in the manner shown in fig. 3. Fig. 3 Head Holder Sensor Rod Pressing Screw + Washer U-shaped holder fix As for the sensor rod with a screw, screw it in the threaded tap, as shown in fig. 4, and use a locking nut and/or a lock tight agent so that it will not work loose. Fig. 4 Pressing Screw + Washer fix Lock Nut Rod Screw 17

④ Long length Rod Rod may bend and hit the inner surface of the sensor head if its length is long. It can scratch the inner surface of the sensor head resulting in damage. Fig. 5 Sensor Cable Inner surface bushes ⑤ Sensor with a Guide A sensor with a linear guide as shown in figures 5 and 6 is also available. Fig. 6 Spline Guide Built-in Sensor CIC for Cylinder Mount the sensor rod in the center of the piston rod and screw the sensor head in the threaded (tapped) hole of the head cover, as shown fig. 7. Fig. 7 Port Cylinder Tube Port Thread on the Piston Seal Sensor Cable Piston Rod Double Thread Screw Detection Coil Head Cover Built-in Sensor Schematic Drawing 18