Electro-Pneumatic Regulator/Electronic Vacuum Regulator

Electro-Pneumatic Regulator/Electronic Vacuum Regulator Series Stepless control of air pressure proportional to an electrical signal // series are compatible with various input specifications, including serial communications. ARJ RoHS IP6 ARX AMR Serial communications specifications ARM Applicable Fieldbus protocols ARP IR -A Note ) Built-in communication board, so no converter needed. IR 98(8) RS-C specification to serial communications is standardized. Compact/lightweight (Integrated communicatioin parts) Weight: g () Power consumption: W or less IRV VEX Note ) 4 SRP Note ) Note ) Value for communications type. (PROFIBUS DP) Electro-Pneumatic Regulators SRH SRF AR4 to 9 Note ). Dimensions in parentheses ( ) are for the CC-Link or PROFIBUS DP. Series Series IC Maximum flow rate Maximum flow rate H Set pressure:.6 MPa Supply pressure:. MPa Set pressure:.6 MPa Supply pressure:. MPa 6 L /min (ANR) L /min (ANR) X PVQ Grease-free specification (wetted parts) Series Series Maximum flow rate Maximum flow rate Set pressure:.6 MPa Supply pressure:. MPa Set pressure:.6 MPa Supply pressure:. MPa L /min (ANR) VY VBA VBAT 4 L /min (ANR) AP Electronic Vacuum Regulators 9 Series 9 Series 89

Compact Electro-Pneumatic Regulator Series Compact Vacuum Regulator 9 Series Compact mm With a simplified highdensity circuit board design, an extremely compact size has been achieved. Cable connectors Straight type and right angle type are available. Straight type Right angle type Built-in One-touch fittings With error indication LED Brackets Flat and L-brackets are available. Lightweight g Flat bracket L-bracket Realizes spacesaving and reduction of weight for manifold use. Stations can easily be increased or decreased due to DIN rail mount design. Model Pressure range. MPa MPa.9 MPa 9 kpa Power supply voltage 4 VDC VDC Input signal Output signal 4 to ma DC to ma DC to VDC to VDC Analog output to VDC Option Cable connectors Straight type Right angle type Brackets Flat bracket L-bracket Equivalent to IP6 Linearity: ±% F.S. or less Hysteresis: % F.S. or less Repeatability: ±% F.S. or less High-speed response time:. sec (Without load) Note) This is not a guaranteed value as it depends on the operating environment. High stability Sensitivity.% F.S. or less (Electro-pneumatic regulator) Air Filter ( µm or less) Mist separator (. µm or less) ( µm or less) IR (Precision regulator) Electro-Pneumatic Regulator // Series Electronic Vacuum Regulator 9 Series Serial communications specifications to // series are standardized. Reduced wiring Applicable Fieldbus protocols 9 RS-C specification to serial communications is standardized. Sensitivity:.% F.S. or less Linearity: ±% F.S. or less Hysteresis: % F.S. or less IP6 Cable connections in directions Straight type Right angle type Application examples Multi-stage control to analog control Controller s Pressure regulators. Electro-pneumatic regulator. Electrostatic coating control Air filter. Electro-pneumatic regulator Control signal Coating material. Air filter Mist separator Controller Coating nozzle Grease-free specification ( series). Controller Analog control 894

Electro-Pneumatic Regulator Electronic Vacuum Regulator Electro-Pneumatic Regulator Electronic Vacuum Regulator Stepless control of air pressure proportional to an electrical signal. Series Series Series Series 9 Series 9 Series Series Model Set pressure range Input signal Port size 9 to. MPa to MPa to.9 MPa to. MPa to MPa to.9 MPa to. MPa to MPa to.9 MPa to. MPa to MPa to.9 MPa to kpa Current type: 4 to ma DC (Sink type) Current type: to ma DC (Sink type) Voltage type: to VDC Voltage type: to VDC Current type: 4 to ma DC (Sink type) Current type: to ma DC (Sink type) Voltage type: to VDC Voltage type: to VDC Preset input (4 points/6 points) bit digital input CC-Link compatible DeviceNet compatible PROFIBUS DP compatible RS-C communication Current type: 4 to ma DC (Sink type) Current type: to ma DC (Sink type) Voltage type: to VDC Voltage type: to VDC Built-in One-touch fittings Metric size: ø4 Inch size: ø/ /8, /4 /4, /8 /4, /8, / Built-in One-touch fittings Metric size: ø4 Inch size: ø/ Current type: 4 to ma DC (Sink type) Current type: to ma DC (Sink type) Voltage type: to VDC Voltage type: to VDC 9. to 8 kpa Preset input /4 (4 points/6 points) bit digital input CC-Link compatible DeviceNet compatible PROFIBUS DP compatible RS-C communication Series Page 896 94 94 94 98 9 89 ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP

Compact Electro-Pneumatic Regulator Series How to Order For single unit and single unit for manifold N RoHS Pressure range. MPa MPa.9 MPa Built-in One-touch fittings type For single unit Symbol z x c Metric size Nil ø4 (Light gray) U Power supply voltage Manifold I n Stations stations stations stations One-touch fitting size for supply/ exhaust parts (End plate) Nil U U 4 VDC ±% to VDC Input signal Current type 4 to ma DC (Sink type) Current type to ma DC (Sink type) Voltage type to VDC Voltage type to VDC Inch size (Orange) For manifold Symbol Metric size Nil (Light gray) ø6 (Light gray) ø/4" (Orange) Inch size (Orange) ø/" z x c ø6 ø/4" ø4 ø/" Option If a DIN rail longer than the specified stations is required, specify the applicable stations in two digits. (Maximum stations) Example) I--7 ø6 ø/4" Nil M Nil B C Base type Cable connector (Option) N S L Without cable connector Straight type m Right angle type m Bracket/Option for single unit only Without bracket Flat Bracket L-bracket For single unit For manifolds How to Order Manifold Assembly (Example) Indicate the part numbers of electro-pneumatic regulators to be mounted below the manifold part number. Example) Due to the common supply/exhaust feature, note that different pressure range combinations are not available. I- set (Manifold part no.) -MS sets (Electro-pneumatic regulator part no. (, stations)) -ML set (Electro-pneumatic regulator part no. ( stations)) Indicate part numbers in order starting from the first station on the D side. Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. The asterisk ( ) specifies mounting. Add an asterisk ( ) at the beginning of electro-pneumatic regulator part numbers to be mounted. D side Note) A DIN rail with the length specified by the number of stations is attached to the manifold. For dimensions of the DIN rail, refer to the external dimensions. DIN rail 896 -MS -ML

Compact Electro-Pneumatic Regulator Series Specifications Accessories (Option) Bracket Flat bracket assembly (includes mounting screws) P98 Model Minimum supply pressure Maximum supply pressure. MPa Set pressure +. MPa. MPa Set pressure range to. MPa to MPa to.9 MPa Power supply Voltage Current consumption 4 VDC ±%, to VDC Power supply voltage 4 VDC type:. A or less Power supply voltage to VDC type:.8 A or less Input signal Input impedance Voltage type Voltage type to VDC, to VDC Approx. kω Current type Current type 4 to ma DC, to ma DC (Sink type) Approx. Ω Note 4) Output signal Analog output to VDC (Output impedance: Approx. kω) Output accuracy: ±6% F.S. or less Linearity ±% F.S. or less Hysteresis % F.S. or less Repeatability ±% F.S. or less Sensitivity.% F.S. or less Temperature characteristics ±.% F.S./ C or less Operating temperature range to C (No condensation) Enclosure Equivalent to IP6 Connection type Built-in One-touch fittings Metric size z, x, c: ø4 For single unit Inch size z, x, c: ø/" Connection size Metric size z, c: ø6, x: ø4 Manifold Inch size z, c: ø/4", x: ø/" Note ) Weight g or less (without option) Note ) Indicates the weight of a single unit. For I-n Total weight (g) Stations (n) x + (Weight of end block A, B assembly) + Weight (g) of DIN rail Note ) When there is a downstream flow consumption, pressure may become unstable depending on piping conditions. Note ) When the input signal is at %, the exhaust solenoid is controlled to reduce the outlet pressure to zero. For this reason, a noise may be generated. This noise is normal and does not indicate a fault. Note 4) When measuring analog output from to VDC, if the load impedance is less than kω, the analog output monitor accuracy of ±6% F.S. or less may not be available. The product with the accuracy of within ±6% is supplied upon your request. Output pressure remains unaffected. When using under the conditions equivalent to IP6, connect the fitting or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on page 94.) Cable connector Straight type M8-4DSXMG4 ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP L-bracket assembly (includes mounting screws) P98 Right angle type P98-- Tighting torque when assembling is. N m. 897

Series Working Principle When the input signal rises, the air supply soloenoid q turns ON. Due to this, part of the supply pressure passes through the air supply solenoid q and changes to output pressure. This output pressure feeds back to the control circuit r via the pressure sensor e. Here, pressure corrections continue until output pressure becomes proportional to the input signal, enabling output pressure that is proportional to the input signal. Working Principle Diagram Power supply and error LED indication Power supply Input signal r Control circuit Output signal P e Pressure sensor q Air supply solenoid w Exhaust solenoid Block Diagram Supply pressure Input signal + r Control circuit q Air supply solenoid w Exhaust solenoid Output pressure Discharged to atmosphere e Pressure sensor 898

Compact Electro-Pneumatic Regulator Series Series Linearity, Hyteresis Output deviation factor (% F.S.).8.6.4...4.6.8 7 Input signal (%F.S.) Pressure Characteristics Output deviation factor (% F.S.).6.7.8.9 Supply pressure (MPa) Series Return Out Out Return Set pressure: MPa Repeatability Output deviation factor (% F.S.) 4 Count Flow Rate Characteristics Set pressure (kpa) 8 6 4 With % of signal input Supply pressure:. MPa kpa 8kPa 6kPa 4kPa kpa kpa... Flow rate (L/min (ANR)) 4 ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF Linearity, Hyteresis Repeatability With % of signal input IC Output deviation factor (% F.S.).8.6.4...4.6.8 Return Out Output deviation factor (% F.S.) H X PVQ VY VBA VBAT 7 Input signal (%F.S.) 4 Count AP Pressure Characteristics Set pressure:. MPa Flow Rate Characteristics Supply pressure:.6 MPa 6 Output deviation factor (% F.S.) Out Return Set pressure (kpa) 4 kpa 4kPa kpa kpa kpa kpa...4.6.7.8.9 Supply pressure (MPa). 4 6 Flow rate (L/min (ANR)) 7 899

Series Series Linearity, Hyteresis Output deviation factor (% F.S.).8.6.4...4.6.8 Return Out 7 Input signal (%F.S.) Repeatability Output deviation factor (% F.S.) 4 Count With % of signal input Pressure Characteristics Output deviation factor (% F.S.) Out Return.4.6.8. Supply pressure (MPa) Set pressure:.4 MPa. Flow Rate Characteristics Set pressure (kpa) Supply pressure:. MPa 9kPa 9 8kPa 8 7kPa 7 6kPa 6 kpa 4kPa 4 kpa kpa kpa kpa 4 6 7 Flow rate (L/min (ANR)) 9

Compact Electro-Pneumatic Regulator Series Dimensions For Single Unit 8 L-bracket (Option) M8 x Cable connection thread 8 PWR ERR 4 x ø6 7 4 x ø. Mounting hole 74 64 PWR ERR Flat bracket (Option) x ø6 x ø. Mounting hole ARJ AR4 to 9 ARX AMR 6 ARM ARP IR-A Note) Breathing hole (M x ) port (ø4, ø/") L-bracket (Option).7.7 SMC SMC 6.7 7 x Flat bracket (Option) z c. 7 port (ø4, ø/") port (ø4, ø/").7 8 IR IRV VEX SRH + (.9) ø4 7 4 8.7 9.9 Minimum bending radius 8 (.8) () (4) (4) M8 ø SRP Port Location No. z x c Note) When using under the conditions equivalent to IP6, connect the fittings or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on page 94.) Cable connector (4 cores) Straight type (Option) x M x thread depth. Mounting thread Cable connector (4 cores) Right angle type (Option) 9 Body SRF IC H X PVQ VY VBA VBAT AP Minimum bending radius 8 (4) Body ø4 9

Series Dimensions Single unit for manifold PWR ERR M8 x Cable connection thread 6 8 Note) Breathing hole (M x ).7.7 x port (ø4, ø/") () (4) Note) When using under the conditions equivalent to IP6, connect the fittings or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on page 94.) Bushing assembly (.7) Note) For dimensions of the cable connector, refer to single unit on page 9. 9

Compact Electro-Pneumatic Regulator Series Dimensions Manifold 7. 4 4 7. ARJ AR4 to 9 ARX AMR Port Location No. z x c Note) Stations are counted starting from the D side. 4 x M x thread depth. Mounting hole L L PWR ERR PWR ERR PWR ERR PWR ERR 8. ARM ARP IR-A IR IRV VEX SRH 8. 4 (Pitch) 8.. (Pitch). SRP SRF 6 D side stations U side IC H (8) Dimensions in inch are noted in parentheses. z port (ø6, ø/4") c port (ø6, ø/4") 8 89. X PVQ VY.7 Note) Breathing hole (M x ) x port (ø4, ø/") 7.... 47. VBA VBAT AP Note) For dimensions of the cable connector, refer to single unit on page 9. Manifold stations n L L Weight of DIN rail (g) 6 7 4 9 48 7 6 9 6 7 7 8. 4 8 98 6 9 6 4 (mm) 8. 4 Note) When using under the conditions equivalent to IP6, connect the fittings or tubing to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on page 94.) 9

Electro-Pneumatic Regulator // Series How to Order RoHS S Model type type type Pressure range. MPa MPa.9 MPa Power supply voltage 4 VDC to VDC Note) Communication models (CC, DE PR, RC), 6 points preset input and bit digital input are available only for 4 VDC. Made to Order Specifications Refer to pages 96, 9, and 9 for details. Pressure display unit Nil MPa Note) kgf/cm bar Note) 4 psi kpa Note) Under Japan's new Measurement Act, this is only for overseas sales (SI units are to be used inside Japan). For the communication models, CC, DE, PR and RC, only Nil is available as it does not have a pressure display. Input signal/ Communication model Current type 4 to ma DC (Sink type) Current type to ma DC (Sink type) 4 6 CC DE PR RC Voltage type to VDC Voltage type to VDC 4 points preset input 6 points preset input (Switch output/npn output) 6 points preset input (Switch output/pnp output) bit digital input CC-Link DeviceNet PROFIBUS DP RS-C communication 4 Nil Monitor output Analog output to VDC Switch output/npn output Switch output/pnp output Analog output 4 to ma DC (Sink type) None Thread type Nil N T F Rc NPT NPTF G Cable connector type S L N Bracket Nil B C Port size 4 Straight type m Right angle type m Without cable connector Note) Even when a cable connector is selected, communication cable is not included in the communication models, CC, DE and PR. Please order it separately. Refer to the below. For bit digital input, right angle type cannot be selected. Without bracket Flat bracket L-bracket Bracket is included. /8 ( type) /4 (,, type) /8 (, type) / ( type) For communication cables, use the parts listed below (refer to M8/M connector in Best Pneumatics No.- for details) or order the product certified for the respective protocol (with M connector) separately. Application Communication cable part number Note CC-Link compatibility PCA-677 (Socket type) Dedicated Bus adapter supplied PCA-6777 (Plug type) with the product. DeviceNet PROFIBUS DP PCA-76 (Socket type) PCA-7688 (Socket type) compatibility compatibility PCA-7646 (Plug type) PCA-769 (Plug type) T-branch connector not supplied. T-branch connector not supplied. 94

Electro-Pneumatic Regulator // Series Symbol Rated pressure Output pressure (MPa) MPa Input signal (%F.S.) Figure. Input/output characteristics chart Note 4) Electric insulation Terminating resistor Current consumption Weight Serial-communications model This range is outside of the control (output). Built into the product (Switch setting).6 A or less 4 7 Standard Specifications Model Minimum supply pressure Maximum supply pressure. Note ) Set pressure range Voltage Power supply Current consumption Current type Note ) Note 9) Input signal Input impedance Note ) Output signal (monitor output) Voltage type Preset input Digital input Current type Voltage type Preset input Digital input Analog output Switch output Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Output pressure Accuracy display Note 4) Minimum unit Ambient and fluid temperature Enclosure Weight Note ) Communication Specifications (CC, DE, PR, RC) Model Protocol Version Note ) -CC CC-Link Ver. Set pressure +. MPa MPa. MPa to. MPa to MPa to.9 MPa 4 VDC ± %, to VDC Power supply voltage 4 VDC type:. A or less Note 9) Power supply voltage to VDC type:.8 A or less 4 to ma DC, to ma DC (Sink type) to VDC, to VDC 4 points (Negative common), 6 points (No common polarity) bit (Parallel) Note 6) Ω or less Approx. 6. kω Power supply voltage 4 VDC type: Approx. 4.7 kω Power supply voltage VDC type: Approx.. kω Approx. 4.7 kω to VDC (Output impedance: Approx. kω) 4 to ma DC (Sink type) (Output impedance: Ω or less) Output accuracy ± 6% F.S. or less NPN open collector output: Max. V, 8 ma PNP open collector output: Max. 8 ma ± % F.S. or less % F.S. or less ± % F.S. or less.% F.S. or less ±.% F.S./ C or less ± % F.S. ± digit or less MPa:, kgf/cm :, bar:, psi:. Note ), kpa: to C (No condensation) IP6 Approx. g (without options) Approx. g (without options) Approx. 64 g (without options) Note 8) Note 8) Note 8) Note ) Please refer to Figure for the relationship between set pressure and input. Because the maximum set pressure differs for each pressure display, refer to page 94. Note ) -wire type 4 to ma DC is not available. Power supply voltage (4 VDC or to VDC) is required. Note ) Select either analog output or switch output. Further, when switch output is selected, select either NPN output or PNP output. When measuring analog output from to VDC, if the load impedance is less than kω, the analog output monitor accuracy of within ±6% (full span) may not be available. The product with the accuracy of within ±6% is supplied upon your request. Output pressure remains unaffected. Note 4) Adjustment of numerical values such as the zero/span adjustment or preset input type is set based on the minimum units for output pressure display (e.g. to MPa). Note that the unit cannot be changed. Note ) The minimum unit for.9 MPa ( psi) types is psi. Note 6) Value for the state with no over current circuit included. If an allowance is provided for an over current circuit, the input impedance varies depending on the input current. This is Ω or less for an input current of ma DC. Note 7) The above characteristics are confined to the static state. When air is consumed on the output side, the pressure may fluctuate. Note 8) The series is a Grease-free specification (Wetted parts). Note 9) Refer to the table below for communication specifications. Note ) Add g for digital input type, 7 g for 6 points preset input type respectively. -DE DeviceNet Volume (Edition.8), Volume (Edition.) -PR PROFIBUS DP DP-V 9.6 k/9. k/4.4 k 9.7 k/87. k/ k Communication 6 k/6 k k/ k/ k bps 9.6 kbps speed. M/ M/ M bps. M/ M/6 M/ M bps Configulation file Note ) EDS GSD I/O occupation area 4 word/4 word, bit/ bit (input/output data) (per station, remote device station) 6 bit/6 bit 6 bit/6 bit Communication data resolution bit (496 resolution) bit (496 resolution) bit (496 resolution) bit (4 resolution) Fail safe HOLD Note ) /CLEAR HOLD/CLEAR CLEAR HOLD (Switch setting) (Switch setting) Insulation Insulation Insulation Non-insulation Not built into the product Built into the product (Switch setting).4 A or less 4 7.6 A or less 4 7. A or less 4 7 Note ) Note that version information is subject to change. Note ) Configuration files can be downloaded from the operation manual page on SMC's website:http://www.smcworld.com Note ) The output HOLD value when a CC-Link communications error occurs can be set based on the bit area data. Note 4) The insulation between the electrical signal of the communication system and power supply. -RC RS-C 9 ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP

// Series Modular Products and Accessory Combinations 89 rspacer el-bracket Applicable products and accessories q Air filter w Mist separator e L-bracket r Spacer t Spacer with L-bracket (e + r) y Spacer with T-bracket AF-A AFM-A BL Y YL For, use a modular adapter (Refer to page 64 for details). Applicable model AF4-A AFM4-A B4L Y4 Y4L Y4T 78 Accessories (Option)/Part No. 4 7 Symbol X X4 X X88 X6 X4 X4 qaf-a qaf4-a wafm-a 4 wafm4-a Made to Order (Refer to pages 9 to 96 for details.) Specifications Reverse type High pressure type (. MPa,. MPa) Set pressure range to kpa (Except series) High speed response type (Except series) For manifold mounting (Except series) Linearity: ±% F.S. or less With alarm output Note ) Manifolds are compatible with to 8 stations. Consult with SMC for 9 stations or more. Note ) Products without symbols are also compatible. Consult with SMC separately. Note ) Compliant with CE marking [Bracket] Applicable model,, [Bus adapter] Applicable model Dimensions Flat bracket Description Flat bracket assembly (including mounting screws) L-bracket assembly (including mounting screws) [Cable connector] Applicable model Description Current type Voltage type Straight type m Cable connector (4 cores) 4 points preset input Right angle type m Straight type m Power cable (4 cores) Right angle type m 6 points preset input Straight type m Signal cable ( cores) bit digital input CC-Link PROFIBUS DP DeviceNet TM RS-C Cable connector ( cores) Power cable (4 cores) Power cable (4 cores) Communication cables connector ( cores) Right angle type m Straight type m Straight type m Right angle type m Straight type m Right angle type m Straight type m Right angle type m Description L-bracket Part No. P98-6 P98-6 P98-6 P98-6 Part No. P98-- P98-- P98-- P98-- P98-- P98-- INI-98--9 P98-- P98-- P98-- P98-- P98-- P98-- Note ) For the -bit digital type, there is no right angle type cable connector. Note ) Even when "with cable connector" is selected the communication cable is not included in the communication model (CC, DE, PR). Please order separately. Part No. CC-Link Bus adapter (Bus adapter supplied with the product.) EX9-ACY-MJ 4 (8.). 4 x ø7 84 6.6 7 7 4 x R. Model / Bracket tightening torque.76 ± N m. ± N m 96

Electro-Pneumatic Regulator // Series Working Principles When the input signal rises, the air supply solenoid q turns ON, and the exhaust solenoid w turns OFF. Therefore, supply pressure passes through the air supply solenoid q and is applied to the pilot chamber e. The pressure in the pilot chamber e increases and operates on the upper surface of the diaphragm r. As a result, the air supply t linked to the diaphragm r opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u. Here, a correct operation functions until the output pressure is proportional to the input signal, making it possible to always obtain output pressure proportional to the input signal. Power supply Input signal q Air supply solenoid r Diaphragm y Exhaust Input signal Pressure display i Control circuit i Control circuit P Output signal Working Principle Diagram u Pressure sensor w Exhaust solenoid e Pilot chamber t Supply Supply pressure q Air supply solenoid w Exhaust solenoid Block Diagram q Air supply solenoid r Diaphragm Power supply Input signal y Exhaust t Supply r Diaphragm Pressure display i Control circuit, Pilot P Output signal u Pressure sensor w Exhaust solenoid Output pressure e Pilot chamber ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP u Pressure sensor 97

// Series Series Linearity 9 8 7 6 4 7 Input signal (%F.S.) Hysteresis. Out Return. 7 Input signal (%F.S.) Repeatability.. 4 6 8 Repetition Pressure characteristics Set pressure: MPa. Set point.... Supply pressure (MPa) Flow rate characteristics Supply pressure:. MPa 4 6 8 Flow rate (L/min (ANR)) Relief flow characteristics Supply pressure:. MPa. 4 6 8 Flow rate (L/min (ANR)) Series Linearity 9 8 7 6 4 7 Input signal (%F.S.) Hysteresis. Out Return. 7 Input signal (%F.S.) Repeatability.. 4 6 8 Repetition Pressure characteristics Set pressure: MPa. Set point.... Supply pressure (MPa) Flow rate characteristics Supply pressure:. MPa 4 6 Flow rate (L/min (ANR)) Relief flow characteristics Supply pressure:. MPa. 4 6 8 Flow rate (L/min (ANR)) 98

Electro-Pneumatic Regulator // Series Series Linearity 9 8 7 6 4 7 Input signal (%F.S.) Pressure characteristics.... Supply pressure (MPa) Hysteresis.. 7 Set pressure: MPa Set point. Flow rate characteristics Out Input signal (%F.S.) Return Supply pressure:. MPa Flow rate (L/min (ANR)) Repeatability.. 4 6 8 Repetition Relief flow characteristics. Flow rate (L/min (ANR)) Supply pressure:. MPa ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP 99

// Series Series Linearity.6 Hysteresis. Repeatability..4... Out Return 7 Input signal (%F.S.). 7 Input signal (%F.S.). 4 6 8 Repetition Pressure characteristics Set pressure:. MPa. Set point...4.6.8 Supply pressure (MPa) Flow rate characteristics Supply pressure:.7 MPa.6.4... Flow rate (L/min (ANR)) Relief flow characteristics.8.7.6.4... Supply pressure:.7 MPa Flow rate (L/min (ANR)) Series Linearity.6.4... 7 Input signal (%F.S.) Hysteresis.. 7 Out Input signal (%F.S.) Return Repeatability.. 4 6 8 Repetition Pressure characteristics Set pressure:. MPa. Set point...4.6.8 Supply pressure (MPa) Flow rate characteristics Supply pressure:.7 MPa.6.4... Flow rate (L/min (ANR)) Relief flow characteristics Supply pressure:.7 MPa.8.7.6.4... Flow rate (L/min (ANR)) 9

Electro-Pneumatic Regulator // Series Series Linearity.6.4... 7 Pressure characteristics. Input signal (%F.S.)...4.6 Supply pressure (MPa) Hysteresis.. 7 Set pressure:. MPa Set point.8 Flow rate characteristics.6.4... Out Retirm Input signal (%F.S.) Supply pressure:.7 MPa 4 6 Flow rate (L/min (ANR)) Repeatability.. 4 6 8 Relief flow characteristics.8.7.6.4... Repetition 4 Flow rate (L/min (ANR)) Supply pressure:.7 MPa ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP 9

// Series Series Linearity..9.8.7.6.4... 7 Input signal (%F.S.) Hysteresis. Out Return. 7 Input signal (%F.S.) Repeatability.. 4 6 8 Repetition Pressure characteristics Set pressure:.4 MPa. Set point..4.6.8. Supply pressure (MPa) Flow rate characteristics..9.8.7.6.4... Supply pressure:. MPa Flow rate (L/min (ANR)) Relief flow characteristics..9.8.7.6.4... Supply pressure:. MPa Flow rate (L/min (ANR)) Series Linearity..9.8.7.6.4... 7 Input signal (%F.S.) Hysteresis. Out Return. 7 Input signal (%F.S.) Repeatability. 4 6 8 Repetition Pressure characteristics Set pressure:.4 MPa. Set point..4.6.8.. Supply pressure (MPa) Flow rate characteristics..9.8.7.6.4... Supply pressure:. MPa Flow rate (L/min (ANR)) Relief flow characteristics..9.8.7.6.4... Supply pressure:. MPa Flow rate (L/min (ANR)) 9

Electro-Pneumatic Regulator // Series Series Linearity..9.8.7.6.4... 7 Pressure characteristics. Input signal (%F.S.)..4.6.8.. Supply pressure (MPa) Hysteresis.. 7 Set pressure:.4 MPa Set point Flow rate characteristics..9.8.7.6.4... Out Return Input signal (%F.S.) 4 6 7 Flow rate (L/min (ANR)) Supply pressure:. MPa Repeatability.. 4 6 8 Relief flow characteristics..9.8.7.6.4... Repetition 4 6 Flow rate (L/min (ANR)) Supply pressure:. MPa ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP 9

// Series Construction Main Component Parts No. Description Material o! Body Cover Aluminum alloy Aluminum alloy y t 4 Valve guide Diaphragm assembly Aluminum alloy Aluminum alloy Weather resistant NBR!4 i u w 6 7 8 Seal Bowl assembly Sub-plate Seal Steel NBR Resin Silicone rubber Resin NBR r! 9 Control circuit assembly Bumper NBR!!! q 4 Valve O-ring Round head Phillips screw Flat washer Stainless steel HNBR NBR Steel Stainless steel e Parts in contact with fluid are indicated with a mark.!7 Main Component Parts No. Description Material!4!8 Body Intermediate body Cover Aluminum alloy Aluminum alloy Aluminum alloy @!6 o!! e! 4 6 7 8 9 Valve guide Valve (Supply ) Valve (Exhaust ) Valve spring Valve spring Diaphragm assembly Aluminum alloy HNBR/Brass HNBR/Brass Stainless steel Stainless steel Stainless steel Aluminum alloy Weather resistant NBR! w Seal Steel NBR u @!!9 q y 4 6 7 Bias spring O-ring Seal Bowl assembly Sub-plate Seal Control circuit assembly Stainless steel NBR NBR Resin Silicone rubber Resin NBR @ t 8 9 O-ring NBR i r O-ring Round head Phillips screw Retaining ring NBR Steel Stainless steel Parts in contact with fluid are indicated with a mark. 94

Electro-Pneumatic Regulator // Series Construction Main Component Parts!8! @!7 y @! i! @ @ o!9!4!6 q! r t! u w e No. Description Material 4 6 7 8 9 4 6 7 8 9 Cover Body Valve guide Bias spring Intermediate body Diaphragm assembly Valve (Supply ) Valve (Exhaust ) Valve spring Seal Seal Rod guide O-ring retainer Seal Bowl assembly Sub-plate Seal Control circuit assembly O-ring O-ring O-ring Round head Phillips screw Aluminum alloy Aluminum alloy Aluminum alloy Stainless steel Aluminum alloy Weather resistant NBR Rolled sheet steel Stainless steel Aluminum alloy Steel HNBR/Brass HNBR/Brass Stainless steel NBR NBR Brass Aluminum alloy NBR Resin Silicone rubber Resin NBR NBR NBR NBR Steel Parts in contact with fluid are indicated with a mark. ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP 9

// Series Dimensions Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn. 84 Right angle type (4 cores) Cable connector m () Straight type (4 cores) Cable connector m 4 4 x ø7 Setting part M x Cable connection thread (Plug type). Digital pressure display M x /8 (Rc, NPT, NPTF, G) port 7 8. (). 4 Flat bracket assembly P98-6 (Option) 4 x M4 x.7 thread depth 6 mm x /8, /4 (Rc, NPT, NPTF, G) port, port L-bracket assembly P98-6 (Option).6 L-bracket 7 4. (8.) 96

Electro-Pneumatic Regulator // Series Dimensions (6 points preset input, bit digital input, CC-Link, DeviceNet, PROFIBUS DP and RS-C) Digital pressure display 8. 8. 6 points preset input bit digital input M x M x Signal cable connection thread (Plug type) ().. 98 CC-Link/-CC M x M x Power cable connection thread (Plug type) 8. 8 M x Communication cable connection thread (Socket type) M x Power cable connection thread (Plug type) Dimensions not shown are same as on page 96. PROFIBUS DP/-PR 6. M x 8. M x Communication cable connection thread (Socket type).. () IN M x Communication cable connection thread (Plug type) 8. (6) M x Power cable connection thread (Plug type) 9. 8 Dimensions not shown are same as on page 96. BUS adapter () () HIROSE ELECTRIC CO., LTD. Made RPA-RB-PA (7) (ø4.) Digital pressure display M x 8. 8. 8. M x M x... M x Communication cable connection thread (Plug type) 9 98 DeviceNet /-DE M x Power cable connection thread (Plug type) 8. 98 98 (ø4.) Dimensions not shown are same as on page 96. RS-C/-RC M x M x Communication cable connection thread (Plug type) Power cable connection thread (Plug type) 8. Dimensions not shown are same as on page 96. () () () ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP With power cable connector CC - DE common dimensions PR RC Straight type (4 cores) Cable connector m () Right angle type (4 cores) Cable connector m Note) Order communication cable (other than 6 points, RS-C) separately. (Refer to page 94.) Note) Do not attempt to rotate, as the cable connector does not turn. 97

// Series Dimensions Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn. 84 Right angle type (4 cores) Cable connector m Straight type (4 cores) Cable connector m () 4 4 x ø7 M x Cable connection thread (Plug type). Digital pressure display M x.8 9. /4 (Rc, NPT, NPTF, G) port () 9 9.6 6 Flat bracket assembly P98-6 (Option) 4 x M x.8 thread depth 6 mm x /4, /8 (Rc, NPT, NPTF, G) port, port L-bracket L-bracket assembly P98-6 (Option) (8.) 7. 4 98

Electro-Pneumatic Regulator // Series Dimensions (6 points preset input, bit digital input, CC-Link, DeviceNet, PROFIBUS DP and RS-C) 6 points preset input M x Signal cable connection thread (Plug type) Digital pressure display M x.8 9. 9. () M x Power cable connection thread (Plug type) 8. CC-Link/-CC Dimensions not shown are same as on page 98. Dimensions not shown are same as on page 98. 8. () BUS adapter () HIROSE ELECTRIC CO., LTD. Made RPA-RB-PA (7) (ø4.) Digital pressure display M x.8 M x Power cable connection thread thread (Plug type) (Plug type) (6) M x M x Communication cable connection thread (Plug type) M x.8 M x Communication cable connection thread (Socket type) PROFIBUS DP/-PR M x Communication cable connection thread (Socket type). 6. M x.8 9. IN M x Communication cable connection M x Power cable connection thread (Plug type) 9. () bit digital input 9. M x.8. 9. 9 M x Communication cable connection thread (Plug type) 9 DeviceNet /-DE Dimensions not shown are same as on page 98. RS-C/-RC M x.8 Dimensions not shown are same as on page 98. (ø4.) Power cable connection thread (Plug type) 8. M x Power cable connection thread (Plug type) 8. () () () ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP With power cable connector CC - DE common dimensions PR RC Straight type (4 cores) Cable connector m () Right angle type (4 cores) Cable connector m Note) Order communication cable (other than 6 points, RS-C) separately. (Refer to page 94.) Note) Do not attempt to rotate, as the cable connector does not turn. 99

// Series Dimensions Flat bracket Note) Do not attempt to rotate, as the cable connector does not turn. 4 4 x ø7 Mounting hole Right angle type (4 cores) Cable connector m Straight type (4 cores) Cable connector m 84 66. 4 () M x Cable connection thread (Plug type) Digital pressure display M x.8 44 / (Rc, NPT, NPTF, G) port ()..6 Flat bracket assembly P98-6 (Option) 4 x M x.8 thread depth 6 mm 6 x /4, /8, / (Rc, NPT, NPTF, G) port, port L-bracket L-bracket assembly P98-6 (Option) 7. 4 9 (8.)

Electro-Pneumatic Regulator // Series Dimensions (6 points preset input, bit digital input, CC-Link, DeviceNet, PROFIBUS DP and RS-C) 6 points preset input Digital pressure display M x.8 44 44 M x Signal cable connection thread (Plug type) ().. CC-Link/-CC M x.8 4 Dimensions not shown are same as on page 9. PROFIBUS DP/-PR. Dimensions not shown are same as on page 9. 8. 8. () () HIROSE ELECTRIC CO., LTD. Made RPA-RB-PA (7) (ø4.) Digital pressure display M x.8 M x Power cable connection thread thread (Plug type) (Plug type) M x M x (6) Communication cable connection thread (Plug type) M x.8 44 M x Communication cable connection thread (Socket type). 6. M x Power cable connection thread (Plug type) IN M x Communication cable connection M x Communication cable connection thread (Socket type) BUS adapter M x Power cable connection thread (Plug type) 9. () bit digital input 44 44 44 M x.8.. RS-C/-RC M x Communication cable connection thread (Plug type) 4 9 DeviceNet /-DE 4 Dimensions not shown are same as on page 9. M x.8 4. Dimensions not shown are same as on page 9. (ø4.) Power cable connection thread (Plug type) 8. M x Power cable connection thread (Plug type) 8. () () () ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP With power cable connector CC - DE PR RC Note) Order communication cable (other than 6 points, RS-C) separately. (Refer to page 94.) common dimensions Straight type (4 cores) Cable connector m () Right angle type (4 cores) Cable connector m Note) Do not attempt to rotate, as the cable connector does not turn. 9

Made to Order Specifications // Series Please contact SMC for detailed dimensions, specifications and lead times. RoHS Reverse Type In compliance with input, inverse proportional pressure is displayed. Rated pressure Output pressure (MPa) This range is outside of the control (output). MPa X X X High Pressure Type (. MPa,. MPa) X4 X4 X4 Note ) For preset input type, digital input type and communication models, consult SMC for availability. Input signal (%F.S.) Input/output characteristics chart Note ) in part number is the same model no. for the standard products. Note ) Except for preset input type and digital input type. Note ) For communication models, consult SMC for availability. Set Pressure Range to kpa X X Note ) For preset input type, digital input type and communication models, consult SMC for availability. 9

// Series Made to Order Specifications Please contact SMC for detailed dimensions, specifications and lead times. RoHS 4 High-Speed Response Time Type Pressure response with no load is approx.. sec. Note ) This is not a guaranteed value as it depends on the operating environment. Note ) When the input signal is at %, the exhaust solenoid is controlled to reduce the outlet pressure to zero. For this reason, a noise may be generated. This noise is normal and does not indicate a fault. Model type type Pressure range S. MPa MPa.9 MPa Power supply voltage 4 VDC to VDC Input signal Current type 4 to ma DC (Sink type) Current type to ma DC (Sink type) Voltage type to VDC Voltage type to VDC Monitor output Analog output to VDC Switch output/npn output Switch output/pnp output Analog output 4 to ma DC 4 (Sink type) Thread type Nil N T F Rc NPT NPTF G Port size Bracket Nil B C Pressure display unit Nil MPa kgf/cm bar 4 psi kpa Under Japan's new Measurement Act, this is only for overseas sales (SI units are to be used inside Japan). Cable connector type S L N Without bracket Flat bracket L-bracket Bracket is included. /8 ( type) /4 (, type) /8 ( type) X88 Straight type m Right angle type m Without cable connector ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP 9

Made to Order Specifications // Series Please contact SMC for detailed dimensions, specifications and lead times. RoHS Manifold Specifications (Except series) through 8 station manifold. How to Order Manifolds, I Stations 8 8 stations port size /4 /8 Connection thread type Nil N F Rc NPT NPTF stations How to Order Manifold Assemblies Example Blanking plate assembly Electro-pneumatic regulator P98- -S-X6 Electro-pneumatic regulator -S-X6 Rc, NPT, NPTF/ x port How to Order for Manifold Mounted X6 X6 Note ) in part number is the same model no. for the standard products. Note ) For communication models, consult SMC for availability. Note ) The thread type is Rc only. Note 4) For series, the port size is /8 only. Note ) For series, the port size is /4 only. Note 6) The bracket accessory can not be selected. Note 7) Not applicable to series I-- set ( station manifold base part no.) -S-X6 set (Electro-pneumatic regulator part no.) Note ) P98- set (Blanking plate assembly part no.) -S-X6 set (Electro-pneumatic regulator part no.) Note ) The is the symbol for mounting. Add the symbol at the beginning of part numbers for electro-pneumatic regulators, etc. to be mounted on the base. Note) Refer to the table below for possible mixed combination. Model Manifold base ( stations) I-- Rc, NPT, NPTF/4 port Stations Note ) Note ) Electro-pneumatic regulators are counted starting from station on the left side with the ports in front. Note ) The port size for mounted electro-pneumatic regulators is Rc /8 (), Rc /4 () only. Note ) When there is a large number of stations, use piping with the largest possible inside diameter for the supply side, such as steel piping. Note 4) The use of the straight type cable connector is recommended. To mount right angle type, be certain to check that no possible interference occurs. Note ) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. 94

// Series Made to Order Specifications 4 Please contact SMC for detailed dimensions, specifications, and lead times. RoHS 6 Linearity: ±% F.S. or Less Application examples: Polishing equipment and peripheral equipment for wafers, LCD glasses, color filters, etc. Model type type type Specifications Fluid Minimum supply pressure Maximum supply pressure (Supply side) Proof pressure (Output side) Set pressure range Power supply voltage Current consumption Input signal Input impedance Output signal Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Accuracy Output pressure display Minimum unit Ambient and fluid temperature Enclosure Weight Pressure range Power supply voltage. MPa MPa.9 MPa S 4 VDC to VDC Input signal Current type 4 to ma DC (Sink type) Current type to ma DC (Sink type) Voltage type to VDC Voltage type to VDC 4 Monitor output Analog output to VDC Switch output/npn output Switch output/pnp output Analog output 4 to ma DC (Sink type) Nil N T F Thread type Rc NPT NPTF G Bracket Bracket is included. Port size Output pressure (MPa) -X4 ±% F.S. X4 Linearity: ±% F.S. or less Standard model ±% F.S. Input signal (% F.S.) The graph shown above is a typical example. (This graph shows that the output pressure curve is in a negative range when compared to the ideal line.) Air Set pressure +. MPa. MPa (Pressure range. MPa type:. MPa). MPa (Pressure range. MPa type:. MPa) MPa (Pressure range. MPa type:. MPa) : to. MPa, : to MPa, : to.9 MPa : 4 VDC ±%, : to VDC. A or less (4 VDC ±% type).8 A or less ( to VDC type) : 4 to ma, : to ma, : to VDC, : to VDC Voltage type: Approx. 6. kω, Current type: Ω or less Analog output: to VDC/4 to ma DC, Switch output (NPN/PNP) ±% F.S. or less % F.S. or less ±% F.S. or less.% F.S. or less ±.% F.S./ C or less ±% F.S. ± digit or less MPa:, kgf/cm :, bar:, psi:., kpa: to C (No condensation) IP6 : Approx. g, : Approx. g, : Approx. 64 g (without brackets) The above characteristics (specifications) are confined to the static state. When air is consumed on the output side, the pressure may fluctuate. 4 Nil B C Without bracket Flat bracket L-bracket /8 ( type) /4 (,, type) /8 (, type) / ( type) Rated pressure Pressure display unit Nil MPa Note) kgf/cm bar 4 Note) psi kpa Note) Under Japan, s new Measurement Act, this is only for overseas sales (SI units are to be used inside Japan). Cable connector type S L N Straight type m Right angle type m Without cable connector 9 ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP

// Series Made to Order Specifications Please contact SMC for detailed dimensions, specifications, and lead times. RoHS 7 Alarm is output if the set pressure is not reached or maintained for seconds or more. Application examples: Pressure management for thrust control, etc. Model type type type Specifications Input signal Current type 4 to ma DC (Sink type) Current type to ma DC (Sink type) Voltage type to VDC Voltage type to VDC Rated pressure Output pressure (MPa) With Alarm Output Fluid Minimum supply pressure Maximum supply pressure (Supply side) Proof pressure (Output side) Set pressure range Power supply voltage Current consumption Input signal Input impedance Output signal Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Accuracy Output pressure display Minimum unit Ambient and fluid temperature Enclosure Weight Pressure range Power supply voltage. MPa MPa.9 MPa S 4 VDC to VDC Monitor output Alarm output/npn output Alarm output/pnp output Thread type Nil Rc N NPT T NPTF F G Alarm detection range: Detects output pressure outside the ±% F.S. range. For example, in the case of (.9 MPa), a % input (.4 MPa) creates a detectable range of.6 to 4 MPa. +% Set pressure % ON Alarm output OFF X4 With alarm output Pressure display unit Cable connector type Nil MPa Note) kgf/cm sec. Figure. Relationship between output pressure and alarm output Air Set pressure +. MPa. MPa (Pressure range. MPa type:. MPa). MPa (Pressure range. MPa type:. MPa) MPa (Pressure range. MPa type:. MPa) : to. MPa, : to MPa, : to.9 MPa : 4 VDC ±%, : to VDC. A or less (4 VDC ±% type).8 A or less ( to VDC type) : 4 to ma, : to ma, : to VDC, : to VDC Voltage type: Approx. 6. kω, Current type: Ω or less Alarm output (NPN/PNP) ±.% F.S. or less % F.S. or less ±% F.S. or less.% F.S. or less ±.% F.S./ C or less ±% F.S. ± digit or less MPa:, kgf/cm :, bar:, psi:., kpa: to C (No condensation) IP6 : Approx. g, : Approx. g, : Approx. 64 g (without brackets) The above characteristics (specifications) are confined to the static state. When air is consumed on the output side, the pressure may fluctuate. 96 Input signal (% F.S.) Figure. Alarm output range S L N Bracket Nil B C Bracket is included. Port size 4 Straight type m Right angle type m Without cable connector Without bracket Flat bracket L-bracket /8 ( type) /4 (,, type) /8 (, type) / ( type) bar 4 Note) psi kpa Note) Under Japan s new Measurement Act, this is only for overseas sales (SI units are to be used inside Japan).

Compact Vacuum Regulator 9 Series How to Order RoHS For single unit and single unit for manifold 9 Pressure range 9 kpa Power supply voltage 4 VDC ±% to VDC Input signal Current type 4 to ma DC (Sink type) Current type to ma DC (Sink type) Voltage type to VDC Voltage type to VDC Built-in One-touch fittings type For single unit Symbol VACz x ATMc Nil U Metric size (Light gray) Inch size (Orange) ø4 ø/" N Bracket/Option for single unit only Nil Without bracket Flat Bracket B C Cable connector (Option) N Without cable connector S Straight type m L Right angle type m L-bracket For manifold Symbol Metric size Nil (Light gray) Inch size U (Orange) VACz x ATMc ø6 ø/4" ø4 ø/" ø6 ø/4" Base type Nil For single unit M For manifolds Manifold I n Stations stations stations stations One-touch fitting size for supply/ exhaust parts (End plate) Nil U ø6 (Light gray) ø/4" (Orange) Option If a DIN rail longer than the specified stations is required, specify the applicable stations in two digits. (Maximum stations) Example) I--7 How to Order Manifold Assembly (Example) Indicate the part numbers of electro-pneumatic regulators to be mounted below the manifold part number. Example) Due to the common supply/exhaust feature, note that different pressure range combinations are not available. I- set (Manifold part no.) 9-MS sets (Vacuum regulator part no. (, stations)) 9-ML set (Vacuum regulator part no. ( stations)) Indicate part numbers in order starting from the first station on the D side. Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. The asterisk ( ) specifies mounting. Add an asterisk ( ) at the beginning of electro-pneumatic regulator part numbers to be mounted. D side Note) A DIN rail with the length specified by the number of stations is attached to the manifold. For dimensions of the DIN rail, refer to the external dimensions. DIN rail 98 9-MS 9-ML

Compact Vacuum Regulator 9 Series Specifications Accessories (Option) Bracket Flat bracket assembly (including mounting screws) P98 Model Minimum supply pressure Maximum supply pressure Set pressure range Power supply Input signal Input impedance Note 4) Output signal Voltage Current consumption Voltage type Current type Voltage type Current type Analog output 9 Set pressure kpa kpa to kpa 4 VDC ±%, to VDC Power supply voltage 4 VDC type:. A or less Power supply voltage to VDC type:.8 A or less to VDC, to VDC 4 to ma DC, to ma DC (Sink type) Approx. kω Approx. Ω to VDC (Output impedance: Approx. kω) Output accuracy: ±6% F.S. or less Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Operating temperature range Enclosure Connection type ±% F.S. or less % F.S. or less ±% F.S. or less.% F.S. or less ±.% F.S./ C or less to C (No condensation) IP6 equivalent Built-in One-touch fittings For single Metric size z, x, c: ø4 unit Inch size z, x, c: ø/" Connection size Metric size z, c: ø6, x: ø4 Manifold Inch size z, c: ø/4", x: ø/" Weight g or less (without option) Note ) Note ) Indicates the weight of a single unit. For I-n Total weight (g) Stations (n) x + (Weight of end block A, B assembly) + Weight (g) of DIN rail Note ) When there is a downstream flow consumption, pressure may become unstable depending on piping conditions. Note ) When the power is turned on, a noise may be generated. This noise is normal and does not indicate a fault. Note 4) When measuring analog output from to VDC, if the load impedance is less than kω, the analog output monitor accuracy of ±6% F.S. or less may not be available. The product with the accuracy of within ±6% is supplied upon your request. Output pressure remains unaffected. When using under the conditions equivalent to IP6, connect the fitting or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on page 94.) Cable connector Straight type M8-4DSXMG4 ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP L-bracket assembly (including mounting screws) P98 Right angle type P98-- Tighting torque when assembling is. N m. 99

9 Series Working Principle When the input signal rises, the vacuum pressure soloenoid q turns ON. Due to this, part of the vacuum pressure (VAC.) passes through the vacuum pressure solenoid q and changes to a vacuum pressure. This vacuum pressure feeds back to the control circuit r via the pressure sensor e. Here, the vacuum pressure soloenoid and the atmospheric pressure soloenoid work alternately to make continuous pressure corrections until vacuum pressure becomes proportional to the input signal, thus, supplying vacuum pressure that is consistently proportional to the input signal. Working Principle Diagram Power supply and error LED indication Power supply Input signal r Control circuit Output signal P e Pressure sensor q Vacuum pressure solenoid w Atmospheric pressure solenoid VAC. (Vacuum pump, etc.) ATM (Atmospheric pressure) Block Diagram VAC. Input signal + r Control circuit q Vacuum pressure solenoid w Atmospheric pressure solenoid Output pressure ATM e Pressure sensor A 9

Compact Vacuum Regulator 9 Series 9 Series Linearity, Hyteresis Repeatability With % of signal input Output deviation factor (% F.S.) Return Out Output deviation factor (% F.S.) ARJ AR4 to 9 ARX AMR 7 Input signal (%F.S.) Pressure Characteristics Output deviation factor (% F.S.) Out Return 8 6 4 Supply pressure (kpa) Set pressure: kpa 4 Count Flow Rate Characteristics Set pressure (kpa) 4 6 8 kpa kpa 4 kpa 6 kpa 8 kpa kpa... Flow rate (L/min (ANR)) 4 ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP 9

9 Series Dimensions For Single Unit 8 L-bracket (Option) M8 x Cable connection thread 8 PWR ERR 4 x ø6 7 4 x ø. Mounting hole 74 64 PWR ERR Flat bracket (Option) x ø6 x ø. Mounting hole 6 Breathing hole Note) (M x ) port (ø4, ø/ ) VAC port (ø4, ø/ ).7 L-bracket (Option) Flat bracket (Option) Cable connector (4 cores) Straight type (Option) x M x thread depth. Mounting thread Cable connector (4 cores) Right angle type (Option) SMC SMC 8. 7 ATM port (ø4, ø/ ) + (.9) ø4 7 4 (.8) () (4) (4) M8 ø 7.7.7.7 VACz x ATMc 6 9 Port Location No. 9 z x c VAC ATM Note) When using under the conditions equivalent to IP6, connect the fittings or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on page 94.) 8.7 9.9 Body Minimum bending radius 8 Minimum bending radius 8 (4) Body ø4 ± 9

Compact Vacuum Regulator 9 Series Dimensions Single unit for manifold ARJ M8 x Cable connection thread PWR ERR AR4 to 9 ARX AMR 6 ARM ARP IR-A IR IRV 8 VEX SRH Breathing hole Note) (M x ).7.7 SRP SRF x port (ø4, ø/") () (4) IC Note) When using under the conditions equivalent to IP6, connect the fittings or tube to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on page 94.) Bushing assembly (.7) H X PVQ VY VBA VBAT AP Note) For dimensions of the cable connector, refer to single unit on page 9. 9

9 Series Dimensions Manifold 4 x M x thread depth. Mounting hole Port Location No. z x c 9 VAC ATM Note) Stations are counted starting from the D side. PWR ERR 4 PWR ERR 7. L L PWR ERR 4 7. PWR ERR 8.. 8. 4 (Pitch) 8.. (Pitch) 6 D side U side stations (8) Dimensions in inch are noted in parentheses. VACz port (ø6, ø/4") ATMc port (ø6, ø/4") 8 89.... 47..7 Breathing hole Note) (M x ) x port (ø4, ø/") 7. Note) For dimensions of the cable connector, refer to single unit on page 9. Manifold stations n L L Weight of DIN rail (g) 6 7 4 9 48 7 6 9 6 7 7 8. 4 8 98 6 9 6 4 (mm) 8. 4 Note) When using under the conditions equivalent to IP6, connect the fittings or tubing to the breathing hole prior to use. (For details, refer to "Specific Product Precautions " on page 94.) 94

Electronic Vacuum Regulator 9/9 Series Input signal/ Communication model Current type 4 to ma DC (Sink type) Current type to ma DC (Sink type) 4 6 CC DE PR RC Voltage type to VDC Voltage type to VDC 4 points preset input 6 points preset input (Switch output/npn output) 6 points preset input (Switch output/pnp output) bit digital input CC-Link DeviceNet PROFIBUS DP RS-C communication How to Order 9 S Pressure range 9. to 8 kpa Power supply voltage 4 VDC to VDC Note) Communication models (CC, DE, PR, RC), 6 points preset input and bit digital input are available only for 4 VDC. Monitor output Analog output to VDC Switch output/npn output Switch output/pnp output Analog output 4 to ma DC 4 (Sink type) Nil None Pressure display unit kpa Note) For the communication models, CC, DE, PR and RC, only Nil is available as it does not have a pressure display. Cable connector type S Straight type m L Right angle type m N Without cable connector Note) Even when a cable connector is selected, communication cable is not included in the communication models, CC, DE and PR. Please order it separately. Refer to the below. For bit digital input, right angle type cannot be selected. Bracket Nil B C Port size /4 Thread type Nil N T F Rc NPT NPTF G Without bracket Flat bracket L-bracket Bracket is included. For communications cables, use the parts listed below (refer to M8/M connector in Best Pneumatics No.- for details) or order the product certified for the respective protocol (with M connector) separately. Application Communication cable part number Note CC-Link compatibility PCA-677 (Socket type) Dedicated Bus adapter supplied PCA-6777 (Plug type) with the product. DeviceNet PROFIBUS DP PCA-76 (Socket type) PCA-7688 (Socket type) compatibility compatibility PCA-7646 (Plug type) PCA-769 (Plug type) T-branch connector not supplied. T-branch connector not supplied. RoHS ARJ AR4 to 9 ARX AMR ARM ARP IR-A IR IRV VEX SRH SRP SRF IC H X PVQ VY VBA VBAT AP 9

9/9 Series Stepless control of vacuum pressure proportional to an electrical signal Piping/Wiring Diagram Power supply and input signal (VDC, ma DC) VAC 9 Vacuum pump, Ejector Tank Set pressure (Vacuum) Standard Specifications Model Note ) Minimum supply vacuum pressure Maximum supply vacuum pressure Set pressure range Voltage Power supply Current consumption Note ) Current type Note 7) Input signal Input impedance Note 4) Output signal (Monitor output) Analog output Switch output Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Output pressure display Voltage type Preset input Digital input Current type Voltage type Preset input Digital input Accuracy Units Ambient and fluid temperature Enclosure Note 7, 8) Weight Communication Specifications (CC, DE, PR, RC) 9 9 Set pressure. kpa kpa. to 8 kpa 4 VDC ±% to VDC Note 7) Power supply voltage 4 VDC type:. A or less Power supply voltage to VDC type:.8 A or less 4 to ma DC, to ma DC (Sink type) to VDC, to VDC 4 points (Negative common), 6 points (No common polarity) bit (Parallel) Note ) Ω or less Approx. 6. kω Power supply voltage 4 VDC type: Approx. 4.7 kω Power supply voltage VDC type: Approx.. kω Approx. 4.7 kω to VDC (Output impedance: Approx. kω) 4 to ma DC (Sink type) (Output impedance: Ω or less) Output accuracy ± 6% F.S. or less NPN open collector output: Max. V, 8 ma PNP open collector output: Max. 8 ma ± % F.S. or less % F.S. or less ± % F.S. or less.% F.S. or less ±.% F.S./ C or less ± % F.S. ± digit or less kpa Note ) Minimum display: to C (No condensation) IP6 9 g Note ) The minimum supply vacuum pressure should be. kpa less than the maximum vacuum pressure setting value. Note ) 4 to ma DC is not possible with the -wire type. Power supply voltage (4 VDC or to VDC) is required. Note ) Value for the state with no over current circuit included. If an allowance is provided for an over current circuit, the input impedance varies depending on the input power supply. This is Ω or less for an input current of ma DC. When measuring analog output from to VDC, if the load impedance is less than kω, the analog output monitor accuracy of within ±6% (full span) may not be available. The product with the accuracy of within ±6% is supplied upon your request. Output pressure remains unaffected. Note 4) Either analog output or switch output must be selected. Furthermore, when switch output is selected, either NPN output or PNP output must also be selected. Use caution that the preset input type is not equipped with an output signal function. Note ) Please contact SMC regarding indication with other units of pressure. Note 6) The product characteristics are confined to the static state. Pressure may fluctuate when air is consumed at the output side. Note 7) Refer to the table below for communication specifications. Note 8) Add g for digital input type, 7 g for 6 points preset input type respectively. Model Protocol Note ) Version Communication speed Configulation file Note ) I/O occupation area (input/output data) -CC CC-Link Ver. 6 k/6 k. M/ M/ M bps 4 word/4 word, bit/ bit (per station, remote device station) -DE DeviceNet Volume (Edition.8), Volume (Edition.) k/ k/ k bps -PR PROFIBUS DP DP-V 9.6 k/9. k/4.4 k 9.7 k/87. k/ k. M/ M/6 M/ M bps Communication data resolution bit (496 resolution) bit (496 resolution) bit (496 resolution) Fail safe HOLD Note ) /CLEAR HOLD/CLEAR (Switch setting) (Switch setting) CLEAR Note 4) Electric insulation Terminating resistor Current consumption Insulation Built into the product (Switch setting).6 A or less Insulation Not built into the product.4 A or less Insulation Built into the product (Switch setting).6 A or less Weight 9 47 46 49 Note ) Note that version information is subject to change. Note ) Configuration files can be downloaded from the operation manual page on SMC s website: http://www.smcworld.com Note ) The output HOLD value when a CC-Link communications error occurs can be set based on the bit area data. Note 4) The insulation between the electrical signal of the communication system and power supply. 96 EDS 6 bit/6 bit GSD 6 bit/6 bit -RC RS-C 9.6 kbps bit (4 resolution) HOLD Non-insulation. A or less 46