THE NEW EXPERIENCE IN TURBOPUMPS

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THE NEW EXPERIENCE IN TURBOPUMPS INNOVATIVE PRODUCTS GLOBAL STRENGTH LOCAL SUPPORT VACUUM EXPERTISE

The new experience in Turbopumps Edwards, a world leader in vacuum technology, is proud to present the next generation of turbopump. Built on over two decades of experience based on our tried and trusted EXT and STP ranges, next sets the new benchmark for scientific turbopumps. next offers you the best turbopump for performance, reliability and end-user serviceability. Features & Benefits State-of-the-art rotor design to deliver exceptional pumping speeds and compression ratios. Field-proven reliability in the most demanding environments. Standard fit in many of the leading scientific instruments with over 100,000 turbopumps installed. Fully end-user self-serviceable in minimum time without complex tooling or major disassembly... you can do it.

next - The new experience in turbopumps Compact design allows for close pitch positioning in multiple pump installations Backwards compat EXT and DX ranges performance in a s envelope Multiple drag stages for higher compression ratios and greater backing pressure tolerance Sensorless drive for high efficiency and compactness with reduced stray magnetic fields Patented ceramic bearing suspension system provides a simple bearing changes in under five minutes in the field, with minimum disassembly and no need to rebalance the rotor Regenerative stage Boost port option for reduced pump numbers in differentially pumped systems for maximum system rationalisation User replaceable oil cartridge for a speedy interim service

ible with existing offering superior maller space Compatible with Edwards TIC Controllers Permanent magnet upper bearing for a hydrocarbon free vacuum, reduced vibration and minimum wear Advanced simulation tool derived rotor design to give better speed and compression performance Manual vent port with automatic valve accessories for rapid venting and quick cycle times Purge port for safe operation of pump with specialised gases Manual as well as serial setting of standby speed for flexible system tuning Simple parallel operation or more sophisticated serial control in both RS232 and RS485 protocols Automatic Wide operating voltage range from 24 V to 48 V dc for versatility in system integration

next - The new experience in turbopumps next has been designed to combine all the latest technological advances in turbopumps with some new thinking in design for manufacture, delivering truly class leading product to market. next is available in three sizes: next240 DN100 ISO-K or DN100 ISO CF next300 DN100 ISO-K or DN100 ISO CF next400 DN160 ISO-K or DN160 ISO CF The pump name refers to the true peak pumping speed for nitrogen gas. The next platform brings a high level of modularity to offer maximum flexibility for customer application and requirements. Each pump is available in two different internal configurations to offer differing performance Duplex - D - variants with both turbo-molecular and drag stages for improved tolerance to higher backing line pressures. Triplex T - variants with turbo, drag and Edwards unique fluid dynamic stages for the ultimate in compression ratio and Boost technology for maximum vacuum system rationalisation.

Boost Technology T variants of next employ a unique viscous pumping stage which can be used to boost the performance of the backing pump. This offers a much simplified vacuum solution with greatly improved pumping speeds and system power reduction. The example in the image below shows how the boost ports can be used to replace a primary pump on a differentially pumped system. To take maximum advantage of boost technology, please contact Edwards. Service New technologies employed in next have enabled the pumps to be serviced by the end user in the field. An interim oil lubrication change can be performed, where access allows in-situ, typically in less than 5 minutes with the minimum of specialist tooling. A bearing and oil lubrication service can be performed with minimum disassembly in less than 10 minutes, using basic workshop tools and an Edwards tool kit. next pumps will advise the user when a service is due and what level of intervention is required. The request for service is by a simple flashing LED sequence on the pumps and by serial comms notification. Flexibility is again key as these simple services can be performed either by the end user, on site by an Edwards Field Service Technician, or the pump can be returned to an Edwards service hub. Using remote diagnostics a user can interrogate the pump to determine how long it is to the next service so that a proactive approach to preventative maintenance can be planned.

next - The new experience in turbopumps Technical data Inlet flange next240 next300 next400 DN100 ISO-K or DN100CF DN100 ISO-K or DN100CF DN160 ISO-K or DN160-CF Inlet pumping speed (l/s) N 2 240 300 400 He 230 340 390 H 2 165 280 325 Compression ratio (D) N 2 >1 x 10 11 >1 x 10 11 >1 x 10 11 He 3 x 10 5 1 x 10 6 1 x 10 8 H 2 1 x 10 4 5 x 10 4 5 x 10 5 Compression ratio (T) N 2 >1 x 10 11 >1 x 10 11 >1 x 10 11 He 1 x 10 6 3 x 10 6 >1 x 10 8 H 2 1.5 x 10 4 1 x 10 5 1 x 10 6 Interstage pumping speed (l/s) N 2 13 13 13 He 13 13 13 H 2 11 11 11 Backing/interstage/boost ports NW25 NW25 NW25 Vent/purge port 1/8 BSPP 1/8 BSPP 1/8 BSPP Critical backing pressure D (mbar) 9.5 9.5 10 Critical backing pressure T (mbar) 20 20 20 Maximum continuous inlet flow (nitrogen, sccm) Water cooling (40 ºC ambient) 45 95 105 Forced air cooling (35 ºC ambient) 30 115 90 Natural convection (30 ºC ambient) 10 35 45 Maximum continuous backing pressure (mbar) Water cooling (40 ºC ambient) 6 6.8 7.5 Forced air cooling (35 ºC ambient) 4.8 7 7.5 Natural convection (30 ºC ambient) 1 2.8 4 Recommended backing pump* RV12/XDS10 RV12/XDS10 RV12/XDS10 Peak booster speed m 3 h -1 (T variants) RV12 N 2 26 26 26 XDS10 N 2 24 24 24 Normal rotational speed (rpm) 60,000 60,000 60,000 Start time to 90% speed (sec) D (T) 115 (150) 145 (190) 180 (210) Sound pressure level at 1 m (dba) <45 (+/-3) <45 (+/-3) <45 (+/-3) Mass (kg) D (T) ISO 5.7 (6) 5.7 (6) 6.5 (6.8) * a smaller backing pump may be used depending on application. CF 8.8 (9.1) 8.5 (8.8) 9.5 (9.8)

Pumping Speed Curves 300 next240d Pumping Speed 250 Pumping Speed (l/s) 200 150 100 50 Nitrogen Argon Helium Hydrogen 0 1.00E-06 1.00E-05 1.00E-04 1.00E-03 1.00E-02 1.00E-01 1.00E+00 Inlet Pressure (mbar) next300d Pumping Speed Pumping Speed (l/s) 400 350 300 250 200 150 100 50 Argon Nitrogen Helium Hydrogen 0 1.00E-06 1.00E-05 1.00E-04 1.00E-03 1.00E-02 1.00E-01 1.00E+00 Inlet Pressure (mbar) 500 450 next400d Pumping Speed Pumping Speed (l/s) 400 350 300 250 200 150 100 50 0 1.00E-06 1.00E-05 1.00E-04 1.00E-03 1.00E-02 1.00E-01 1.00E+00 Inlet Pressure (mbar) Argon Nitrogen Helium Hydrogen

15 next - The new experience in turbopumps Dimensions Envelope Vent Port 1/8 BSP (Interstage) (20x) Ø8.4 18º Electrical Drive Unit 30º 4 holes M8 x 12 deep base mounting holes and fan mountings (supplied with feet fitted but not shown) (32x) R4.2 R69.2 R65.1 R90.55 Body Purge Port 1/8 BSP 22.5º 87.65 24-48 V Supply Backing Port NW25 Ø124 PCD mounting points ISO CF Ø 129.9 Ø 159.5 20 Ø 152 G 189.5 154.4 (to ports) 147.3 (to purge) 83.1 (to vent) 116 (C of G) 133 197.5 162.4 130 89.5 (C of G) 12 next240 ISO ISO CF Ø A Ø H Ø K D E (to ports) F (to purge) B (to vent) C (C of G) M N L (CofG) P EARTH POINT (M5) 300 400 300 400 300 400 next300/400 ISO ISO CF A B C D E F G H J K L M N P next300 129.9 88.7 117 195 159.9 152.8 12 159.9 87 202.4 81.1 200 164.9 20 next400 179.9 88.7 102 195 159.9 152.8 12 159.9 87 152 100.4 209.5 174.4 20

next part numbers A selection of some of the more common part numbers are shown below. Description Order No. Order No. Pump Flange Max power - 80W Max power - 160W next240d DN100 ISO-K B81200101 B81200100 DN100 ISO-CF B81200201 B81200200 next300d DN100 ISO-K B82200101 B82200100 DN100 ISO-CF B82200201 B82200200 next400d DN160 ISO-K B83200301 B83200300 DN160 ISO-CF B83200401 B83200400 Note that all next pumps are supplied with a coarse inlet screen. Fine grade screens are available upon request. Interstage and/or T variants both with selectable port positions available upon request. Controllers and Accessories The TIC turbo and instrument controller automatically recognises and supports 1 turbo-molecular pump from the next range, plus 3 Edwards s active gauges. Cooling and vent valve support is provided directly from the controller. Backing pump power is provided for a compact 24V diaphragm pump (on 200W versions only), or where greater pumping speeds are required, mains backing pumps (up to RV12/XDS10) may be controlled via an optional relay box. The relay box can also be used to control a mains heater band and backing line isolation valve. Time delays and normal speed signals may be used to control events such as turbo start and there is a comprehensive selection of protection and safety interlock features. The TIC turbo controller may be either rack or bench mounted and provides a useful hub for the flexible operation of a wide range of vacuum system configurations. A selection of common Accessories is shown below: Order No. Description Order No. Description B58066010 TAV 5 Vent Valve D39700835 Turbo extension cable 1 m B58066020 TAV 6 Vent Valve D39700836 Turbo extension cable 2 m B58053175 next Radial Fan D39700837 Turbo extension cable 5 m B58053185 next Axial Fan D39721000 TIC (Turbo & Instruments) 100 W B80000815 next Water Cooling Block D39722000 TIC (Turbo & Instruments) 200 W For a full list of available accessories, please contact Edwards or visit our website.

Edwards the company you have known and trusted for nearly 100 years continues to deliver innovative vacuum pumps and related systems. We strive to lower your cost of ownership, increase your productivity and enhance your final product quality. Edwards products are based on a solid foundation of manufacturing excellence, field-proven technologies and are supported by a renowned global services network. Edwards stands behind each product with exceptional integrity and strength, supporting our customers beyond standard expectations. Edwards is essential to your process. PRODUCTS: SERVICES: Edwards Limited 2009. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited. Dry Vacuum Pumps Oil-sealed Vacuum Pumps Turbomolecular Pumps Exhaust Management Integrated Vacuum and Abatement Liquid Abatement Chillers Vacuum System Components GLOBAL CONTACTS: BELGIUM Brussels +32 2 300 0730 BRAZIL Sao Paulo +55 11 3952 5000 CHINA Shanghai +86 21 5866 9618 FRANCE Paris +33 1 4121 1256 GERMANY Munich 0800 000 1456 Equipment Service and Repair Product Exchange Refurbished Equipment Field and On-site Services Remote e-diagnostics Product Training INDIA Pune +91 20 4075 2222 ISRAEL Qiryat Gat +972 8 681 0633 ITALY Milan +39 02 48 4471 JAPAN Yachiyo +81 47 458 8831 KOREA Bundang +82 31 716 7070 SINGAPORE Singapore +65 6546 8408 TAIWAN R.O.C. Toufen Town +886 37 611 422 UNITED KINGDOM Crawley +44 1293 528844 UK Local Rate (UK Only) 08459 212223 UNITED STATES Tewksbury, MA +1 978 658 5410 Toll Free (US Only) +1 800 848 9800 info@edwardsvacuum.com Publication Number: B80000895, Issue A. Rev 01/2009