Microsystems, Inc. PVC1000 Series PVC1000 Series Pirani Vacuum Sensors Description Posifa s PVC1000 series of MEMS Pirani Vacuum Sensors offer a breakthrough vacuum measurement solution that enhances miniaturization while delivering ultra-low power consumption, long lifetime, minimal field maintenance, and low cost. Based on the principal that the thermal conductivity of gases is proportional to pressure in the low vacuum range, the Posifa sensors measure minute changes in resistance to a heated element resulting from heat transfer to the surrounding gas. The heated element (i.e. measurement resistor) consists of a platinum thin-film resistor residing on a thermal insulating membrane. The membrane is suspended over a micro-machined cavity that is 5 µm in depth and has a bottom surface that is parallel to the membrane, ensuring precision measurement of heat transfer. Due to the minute volume of the gas measured (i.e. the volume within the cavity), the Posifa sensors deliver ultra-low power consumption and fast response time. The Posifa sensors also provide a reference resistor of the same Thermal Coefficient of Resistance (TCR) as the measurement resistor, residing on the sensor die substrate. It can be used by the sensor circuitry for ambient temperature compensation. The miniaturization of the Pirani technology using MEMS is emerging as an industry standard due to reliability, low cost, ease of use and ultra-low power consumption. Posifa s PVC1000 series of MEMS Pirani Vacuum Sensors help customers leverage this trend to improve their existing products and to develop innovative new products. Features Ultra low power consumption < 5 mw Fast Response Time < 5 msec Shock Resistance to 1,000g Suitable for gas volume as low as 0.1 cm Low Noise High Resolution On-chip temperature sensing Long Term Stability Can be cleaned by immersing in solvent, prolonging useful life Applications Absolute Maximum Ratings Analytical instruments Leak detection in any closed system maintained under primary vacuum Semiconductor equipment Vacuum packing machines Portable digital vacuum gauges Small mechanical systems (e.g. pumping) to achieve specified vacuum levels Low cost vacuum switches to verify vacuum below 1 torr Operating Temperature: -0 C to 15 C (higher temperature versions available) Humidity: 0 to 100% RH, non-condensing Shock: 1000g Overpressure: 7.5 Bar
ELECTRICAL CHARACTERISTICS Test Conditions: Heating Current = 7 ma, Ta=5 C PARAMETERS PVC1001 MIN TYP MAX UNIT Range 10-0 Torr CONDITIONS Resolution 1 0.05 Torr to 5 Torr 0.5 Torr 5-0 Torr 0.005 Torr 10 - to Torr ±10 % reading > 5 Torr Accuracy 1 ±5 % reading < 5 Torr Measurement Resistor 110 10 160 Ohm At 5 C Reference Resistor 10 60 00 Ohm At 5 C Resistor TCR 0.005 / K Humidity 0 100 % RH, Non-condensing Heating Current 7 7.5 ma Operating Temperature Range -0 85 C Power Consumption 5 mw 10 - to 0 Torr Shock Resistance 1000 g Overpressure 7.5 Bar Measurable Gas Volumes 0.1 cm Response Time 5 msec Notes: 1. For reference only. Actual resolution/accuracy depends on the associated circuit.. Tighter resistance ranges are also available.
Output Voltage vs. Vacuum Heating Current = 7 ma Ta = 5 C Measurement Resistor = 160 ohm
Package Dimensions TO5 Package Top View Bottom View TO6 Package 1 Top View Bottom Threaded Package 1 Custom Packaging Pirani sensors often require unique packaging to accommodate the diverse applications into which they can be used. Posifa offers design services to customize the packaging of the sensors element, including the necessary cabling and connectors as specified by our customers. Example: Custom Package
Ordering Information Part Number PVC1001 PVC100 PVC100 PVC100 PVC1999 Specifications 10 - to 0 Torr; TO5 metal can package 10 - to 0 Torr; Bare die 10 - to 0 Torr; Threaded package 10 - to 0 Torr; TO6 metal can package 10 - to 0 Torr; Custom package