Product data sheet. Series 210, DN (2½ - 6 ) Ordering No PE

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Series 210, DN 63 160 (2½ - 6 ) Ordering No. 210..-PE06-000. Manual actuator with hand lever Advantages Three sizes available: DN 63, 100, 160 with ISO-F flanges All vacuum parts made of stainless steel Robust and compact design with low installation height High conductance Lateral vacuum connections for gauges and valves are standard Long cycle life Created by: T. Eugster Release date: 2013-09-02 1 of 3 Modified by: Release date: 602411EA

Series 210, DN 63 160 (2½ - 6 ) Ordering No. 210..-PE06-000. Ordering Information Selection Data Vacuum connection DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F Material body AISI / DIN 304 / 1.4301 304 / 1.4301 304 / 1.4301 shaft, valve plate AISI / DIN 304 / 1.4301 304 / 1.4301 304 / 1.4301 Lateral vacuum connections 1 x DN 10 ISO-KF 1 x DN 16 ISO-KF 2 DN 10 ISO-KF 1 x DN 25 ISO-KF 2 DN 10 ISO-KF 1 x DN 25 ISO-KF Type 21036-PE06-000. 21040-PE06-000. 21044-PE06-000. Specifications Cycle life cycles 100 000 1) 100 000 1) 100 000 1) Conductance for molecular flow l/s 350 1000 3400 Leak rate mbar l/s 1 10-9 1 10-9 1 10-9 Pressure range mbar / bar min / max 1 10-8 / 4 (abs) 1 10-8 / 4 (abs) 1 10-8 / 4 (abs) Diff. pressure on the plate in either direction bar 4 2) 4 2) 4 2) Diff. pressure at opening bar 4 4 4 Bakeout temp body C 150 150 150 Seals FKM FKM FKM Weight kg 3.1 5.2 9.3 Spare Parts Seal kit 579965 580187 580255 Accessories Connections elements 580672 580691 580706 1) Cycle life tested at room temperature and under clean and static conditions. Expandable parts are excluded 2) Opening above atmospheric pressure reduces specified cycle life Created by: T. Eugster Release date: 2013-09-02 2 of 3 Modified by: Release date: 602411EA

Series 210, DN 63 160 (2½ - 6 ) Ordering No. 210..-PE06-000. DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F Created by: T. Eugster Release date: 2013-09-02 3 of 3 Modified by: Release date: 602411EA

Series 210, DN 63 250 (2½ 10 ) Ordering No. 210..-.E14-. Pneumatic actuator, double acting, without position indicator, without solenoid valve Advantages Four sizes available: DN 63, 100, 160, with ISO-F flanges DN 250 with ISO-K flanges All vacuum parts made of stainless steel Robust and compact design with low installation height High conductance With or without lateral vacuum connections for gauges and valves Extremely long cycle life Direct pneumatic actuation or via solenoid valve Solenoid valve available as accessories Electrical and visual position indicator available as accessories Created by: T. Eugster Release date: 2013-08-09 1 of 5 Modified by: T. Eugster Release date: 2013-08-22 602412EB

Series 210, DN 63 250 (2½ 10 ) Ordering No. 210..-.E14-. Ordering Information Selection Data Vacuum connection DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F DN 250 ISO-K Body, shaft, valve plate AISI / DIN 304 / 1.4301 304 / 1.4301 304 / 1.4301 304 / 1.4301 Lateral vacuum connections 1 x DN 10 ISO-KF 1 x DN 16 ISO-KF 2 DN 10 ISO-KF 1 x DN 25 ISO-KF 2 DN 10 ISO-KF 1 x DN 25 ISO-KF 2 DN 10 ISO-KF 1 x DN 25 ISO-KF 1 x DN 40 ISO-KF With lateral vacuum connections X Type 21036-PE14-000. 21040-PE14-000. 21044-PE14-000. 21048-QE14-000. Without lateral vacuum connections Z Type 21036-PE14-ABA. 21040-PE14-ABA. 21044-PE14-ABA. 21048-QE14-ABA. Specifications Cycle life cycles 1.0 Mio 1) 1.5 Mio 1) 1.5 Mio 1) 1.0 Mio 1) Conductance for molecular flow X Type l/s 350 1000 3400 8200 Z Type l/s 400 1400 4000 8200 Leak rate mbar l/s 1 10-9 1 10-9 1 10-9 1 10-9 Pressure range mbar / bar min / max 1 10-8 / 4 (abs) 1 10-8 / 4 (abs) 1 10-8 / 4 (abs) 1 10-8 / 4 (abs) Diff. pressure at opening bar 4 2) 4 2) 4 2) 4 2) Diff pressure in the plate in either direction bar 4 4 4 4 Bakeout temp body C 150 150 150 150 Seals FKM FKM FKM FKM Weight X Type kg 3.8 6.5 10 15.7 Z Type kg 3.5 5 8 16 Spare Parts Seal kit X Type 579965 580187 580255 580280 Z Type 579980 580400 580259 580280 Actuator 587851 587852 587852 580617 1) Cycle life tested at room temperature and under clean and static conditions. Expandable parts are excluded 2) Opening above atmospheric pressure reduces specified cycle life Created by: T. Eugster Release date: 2013-08-09 2 of 5 Modified by: T. Eugster Release date: 2013-08-22 602412EB

Series 210, DN 63 250 (2½ 10 ) Ordering No. 210..-.E14-. Accessories Vacuum connection DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F DN 250 ISO-K Position indicator 587850 587850 587850 587850 Solenoid valve 220/230 V AC; 50Hz 586579 586579 586579 586579 110/115 V AC; 60Hz 586580 586580 586580 586580 24 V AC; 50Hz 586581 586581 586581 586581 24 V DC 586582 586582 586582 586582 Set of connection elements X Type 580672 580691 580706 12 32036-QNKS-0001 Z Type 580683 580701 580723 12 32036-QNKS-0001 DN 63 / X Type DN 63 / Z Type Created by: T. Eugster Release date: 2013-08-09 3 of 5 Modified by: T. Eugster Release date: 2013-08-22 602412EB

Series 210, DN 63 250 (2½ 10 ) Ordering No. 210..-.E14-. DN100 / X Type DN 100 / Z Type DN 160 / X Type DN 160 / Z Type Created by: T. Eugster Release date: 2013-08-09 4 of 5 Modified by: T. Eugster Release date: 2013-08-22 602412EB

Series 210, DN 63 250 (2½ 10 ) Ordering No. 210..-.E14-. DN 250 / X Type DN 250 / Z Type Created by: T. Eugster Release date: 2013-08-09 5 of 5 Modified by: T. Eugster Release date: 2013-08-22 602412EB

Series 210, DN 250 (10 ) Ordering No. 21048-PE.4-ABE. Pneumatic actuator, double acting, with position indicator, with or without solenoid valve 24 VDC Advantages Extended body for direct mounting All vacuum parts made of stainless steel Strengthened DN250 body with ISO-F flanges for high torque application High conductance Extremely long cycle life Direct pneumatic actuation or via solenoid valve Electrical and visual position indicator Created by: T. Eugster Release date: 2013-08-09 1 of 3 Modified by: T. Eugster Release date: 2013-08-22 602503EB

Series 210, DN 250 (10 ) Ordering No. 21048-PE.4-ABE. Ordering Information Selection Data Vacuum connection DN 250 ISO-F Body, shaft, plate AISI / DIN 304 / 1.4301 With position indicator With position indicator and 24 VDC solenoid valve 21048-PE24-ABE. 21048-PE44-ABE. Specifications Cycle life cycles 1.0 Mio 1) Conductance for molecular flow l/s 8200 Leak rate mbar l/s 1 10-9 Pressure range Diff pressure on the plate in either direction 1 10-8 / 4 (abs) bar 4 Diff. pressure at opening bar 4 2) Body without screws knm 50 Bakeout temperature body C 150 Seals Weight kg 36 FKM Spare Parts Seal kit 580291 Actuator 580617 Position indicator 587850 Solenoid valve 24 VDC 586582 1) Cycle life tested at room temperature and under clean and static conditions. Expandable parts are excluded 2) Opening above atmospheric pressure reduces specified cycle life Created by: T. Eugster Release date: 2013-08-09 2 of 3 Modified by: T. Eugster Release date: 2013-08-22 602503EB

Series 210, DN 250 (10 ) Ordering No. 21048-PE.4-ABE. Created by: T. Eugster Release date: 2013-08-09 3 of 3 Modified by: T. Eugster Release date: 2013-08-22 602503EB