What s here and what s coming in wide bandgap power semiconductor transistors

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What s here and what s coming in wide bandgap power semiconductor transistors 1238 Benedum Hall wes25@pitt.edu; (412) 624-7629 William E. Stanchina, Professor Dept. of Electrical and Computer Engineering Swanson School of Engineering, University of Pittsburgh

Wide BandgapTransistors are an Enabling Technology and GaN Scmiconductors Source: http://www.slideshare.net/geresearch/ges-advanced-silicon-carbide-technology/7

Today s Topics Wide Bandgap Semiconductors (WBGs) What s special/unique about these materials? What does a WBGS power transistor look like? Basic operating principles Who s building/supplying these devices? What s their status? What s coming new technologies? Disclaimer: Despite numerous slides from other organizations/companies, these are not intended to promote any of these; but are used only for illustrative purposes.

Percent of all electricity flowing through power semiconductors DOE-EERE Power America Program Anticipated Impact of WBG Semiconductors

A Bit of Semiconductors The Upper Right-Hand Corner of the Periodic Table of Elements from which the elements of most of the more common semiconductor materials come including Group IV Elemental Semiconductors silicon (Si) and germanium (Ge) but ALSO compound semiconductor silicon carbide (SiC) Covalent tetrahedral bonds but similar covalent tetrahedral bonds can be found in Group III-V Compound Semiconductors gallium nitride (GaN)

Simple Comparisons of Selected Semiconductors µ e ε WBG Key Advantages (High frequency/microwave)

Figure of Merit Comparison of Power Semiconductor Technologies

Transistor Technology Comparison vs. Frequency Performance vs. Frequency Source: CPES, Va Tech. http://www.cpes.vt.edu/public/nugget/2013_d1.1.php SPICE Simulation of Full Bridge Inverter 1200 V SiC vertical DMOSFET (Cree) 3 series 200 V GaN lateral HFET (EPC) Si IGBT SiC GaN GaN SiC effects of Capac.

WBG Transistor Structure Comparison Source Contact Metal N + Inter-metal Dielectric Degenerately doped Poly Si Gate Gate Oxide N + Source P-Well Optimized doping N + 4H SiC Substrate Drain Contact Metal Cree Gen 3 DMOS Vertical device Source: Cree Power Sept 2014 HMW Direct-Drive Motor Workshop EPC GaN HFET Lateral device Source: GaN Transistors for Efficient Power Conversion, A. Lidow, et al. Power Conversion Publns., 2012.

Other Advantages of WBGs Transistors Higher Temperature Operation ( 150 o C more than Si) Reduced Requirements for Cooling System Less Area, Less Cost Improved Reliability Under Harsh Operating Conditions Higher Switching Frequency ( 10X more than Si) Lower Switching Losses Better Efficiency Smaller Area Required for Capacitors and Inductors Greater Power Density ( 2X more than Si) Bottom Line: Opportunity for Smaller, Less costly, More Efficient, More Reliable Power Electronics

SiC and GaN power market to grow by factor of 17 during the next decade THE EMERGING MARKET for SiC and GaN power semiconductors is forecast to grow by a factor of 17, during the next 10 years, energised by growing demand for power supplies hybrid and electric vehicles photovoltaic (PV) inverters other established applications (e.g. variable speed motor drives). Worldwide revenue from sales of SiC and GaN power semiconductors is projected to rise to $2.5 billion in 2023, up from just $150 million in 2013, according to The World Market for SiC & GaN Power Semiconductors - 2014 Edition a new report from IHS Inc. From Compound Semiconductor, April/May 2015; www.compoundsemiconductor.net Note: LED lighting market expected to be $42B by 2019

Companies Producing SiC Power Transistors (various types) Infineon Technologies AG (formerly Wolfspeed, formerly CREE of Durham, NC), Neubiberg, Germany GeneSiC Semiconductor, Dulles, VA STMicroelectronics NV, Geneva, Switzerland ROHM Semiconductor, Kyoto, Japan TranSiC AB, Kista, Sweden IXYS, Milpitas, CA APEI, Fayetteville, AR Powerex, Youngwood, PA General Electric, Global Research Ctr. Niskayuna, NY Toyota, Japan Mitsubishi, Japan others

Companies Producing SiC Power Transistors (6 dia. Wafers) http://www.electronicseetimes.com/news/sic-technology-sooncome-age

Comparison of a Si MOSFET and a GaN HFET of the Same Dimsension Ref: Panasonic to Launch Industry s Smallest Enhancement-Mode 600V GaN Power Transistors, http://www.semicon.panasonic.co.jp/en/products/powerics/ganpower/

Today s transistors Like MOSFET except High BV with High Current: Furukawa Electric High Power GaN HFETs on Si Substrates, pp. 17-23, Furukawa Review, No. 34, 2008. L g = 2 µm, L gd = 15 µm, W g = 340 mm 120 A G S G 1.5 mm D 6.8 mm

Companies Producing GaN Power Transistors Efficient Power Conversion Corp. (EPC), El Segundo, CA International Rectifier (now Infineon Technologies AG), El Segundo, CA Transphorm Inc., Goleta, CA RFMD, Greensboro, NC GaN Systems, Inc., Ottawa, Ontario, CANADA Panasonic Semiconductor Solutions Co., Nagaokakyo City, Kyoto, JAPAN VisIC Technologies, Ltd., Rehovot, ISRAEL Texas Instruments, Dallas, TX >>>>>>>>>>>>>> Avogy, San Jose, CA

What s Coming? Keep a sharp lookout for exciting new research, development, and product offerings in WBGs and GaN, in particular, as well as new power electronic applications of these devices. New devices will open up more application opportunities.

Today s Cutting Edge in GaN Power Transistors Avogy Corp: Vertical GaN grown by MOCVD on 2 -GaN substrates ref: I.C. Kizilyalli, P. Bui-Quanga, D. Disney, H. Bhatia, O. Aktas Reliability studies of vertical GaN devices based on bulk GaN substrates, Microelectronics Reliability, MR-11704, 2015.

What Else?... Farther Out in Time Gallium Oxide (β-ga2o3) Preliminary Research: Nano-Wires TEM: Single crystal (monoclinic) Ga2O3 NW Growth Apparatus Advantages (Why?): W.S. Hwang, et al., High Voltage Field-Effect Transistors with Wide-Bandgap bga2o3 Nanomembranes, Appl. Phys. Lett., 104, 203111(2014). High electron velocity (in micro-size GaN) at high electric fields: can this support fast devices at useful voltages in nano-size structures? Power device figure of merit (on-resistance vs. breakdown voltage) shows advantage of GaN and even further potential for Ga2O3 Applications? possible ultra-compact power switching devices and/or high dynamic range mixed-signal (interface) ICs to complement super-scaled CMOS or for monolithic control ckt.

Conclusions Wide Bandgap Semiconductors are a LEVERAGING TECHNOLOGY for Power Electronics Converters that offer potential advantages such as: Compact Size (and reduced weight) Higher Efficiency Improved Reliability Market Trends and Predictions point to rapidly increasing adoption of WBGS technologies replacing Si. SiC and GaN will be carving out their respective domains of benefit and application (including into harsh enviroments). New technological advances will continue in these and other emerging WBGS.