50~160mm Table 50mm Table Timing Belt, Ground Screw, Aluminum Body, Cross-Roller Bearing 166 Ground Screw, Aluminum Body, Cross-Roller Bearing 17 70mm Table Timing Belt, Ball Screw, Aluminum Body, Cross-Roller Bearing 166 1/-Wedge, Aluminum Body, Cross-Roller Bearing 166 Rack & Pinion, Aluminum Body, Cross-Roller Bearing 168 1/4-Wedge, Aluminum Body, Cross-Roller Bearing 168 Ground Screw, Aluminum Body, Cross-Roller Bearing 17 Ground Screw, Steel Body, Cross-Roller Bearing 17 100mm Table Timing Belt, Ground Screw, Aluminum Body, Cross-Roller Bearing 170 1/-Wedge, Aluminum Body, Cross-Roller Bearing 170 1/4-Wedge, Aluminum Body, Cross-Roller Bearing 170 Ground Screw, Aluminum Body, Cross-Roller Bearing 17 Ground Screw, Steel Body, Cross-Roller Bearing 17 Ground Screw, Aluminum Body, Linear Guide 174 160mm Table Ground Screw, Aluminum Body, Cross-Roller Bearing 174
Understanding Vertical Linear Stage Specifications Precision Positioning Stages ZA07A-R3S Specifications Model Number ZA07A-R3S Table Size 70mm Guide Mechanism Cross-Roller Bearing Motion Range 1.5mm Lead Mechanism Rack & Pinion 0.5m / step (Half Step).5mm / sec. Repeatability 0.5m Lost Motion 3m Vertically 8m / 5mm Load Capacity (Horizontal) 10kg Material Finish Weight.kg Standard Motor PX533MH-B Standard Connector RP13A-1RA-0PC Description 1. Kohzu's significant alpha-numeric model numbers offer quick product insight.. Table size refers to the stage's upper-most mounting surface. 3. Type of guide mechanism used on this stage. 4. Stage travel range in the positive and negative directions from it's centered or neutral position. 5. Feeding Mechanism and lead screw pitch. 6. of standard stage (half step). 7. of standard stage (half step, 10kpps). 8. See "Kohzu Stage Inspection Standards" section, page 94. 9. See "Kohzu Stage Inspection Standards" section, page 95. 10. See "Kohzu Stage Inspection Standards" section, page 96. 11. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate. 1. Material specification is for stage's main body components only. 13. Surface finish type and color. 14. Stage weight includes all components depicted in product photograph. 15. Actuator type. 16. Connector type and pin quantity of standard stage. See page 16. Guide Mechanism Type Cross Roller Bearing In cross roller bearing guides quench hardened and precision ground bearing surfaces move upon loose hardened steel cylinders (rollers) with rotation axes oriented in alternating 90 degree angles (Ref. Fig.1). Having rollers arranged in an alternating cross pattern allows preloading and operation at any angle. The roller bearings are held apart from one another by a bearing cage, which prevents adjacent rollers from touching. Since cross-roller bearing have little difference between static and dynamic friction they minimize start-to-stop slip-motion typical of other bearing types. The line contact of roller bearings along with precise roller-to-race gap management provide larger load bearing surfaces, higher preloads and meet very tight runout and stiffness specifications. Wedge Type Cross Roller Guides One set of wedge type cross roller guides are mounted on the horizontal plane and the other set of guides are tilted so that tangent is 1/4 (approximately 14 degree) (see Fig. 1). If the wedge is pushed in from one side, the table fixed to the central axis moves vertically. Since the tilted cross roller guide supports the horizontal component of force, the moment load rigidity on the table top face is reinforced. Fig.1 164
Feeding Mechanism Ground screw, Ball screw + Timing belt Ground screw: The ground screw is ground at high precision and is held in place by a female screw. Since the ground screw and female screw are in contact each other over a wide area, the friction is high. Ball screw: The ball screw consists of a screw axis, a nut, and a ball between them. When the screw is rotated, the ball rolls and moves between the ball screw axis and the nut, and then returns to its original position. Since a ball is rolled, the friction is low, a high transmission effect is obtained, the difference between static friction and dynamic friction is small, and stick-slip does not easily occur. Ball screw + Wedge Since the vertical-to-horizontal of the wedge is 1: and 1:4, the vertical movement distance is 1/ and 1/4 of the push-in depth. Rack & pinion + Worm shaft and worm wheel With these stages, the motor driving force is decelerated by a worm shaft and worm wheel and is converted to vertical force by means of the rack and pinion system (see Fig. ). of standard stage is calculated based on the following formula. P = ( 360 nm ) X = p/360nmx Basic step angle of motor p Feed screw pitch n Reduction ratio of belt drive / Reduction ratio of Wedge / Reduction ratio of Worm shaft and worm wheel mdivision number of micro-step Kohzu uses two motors with basic step angles of / pulse and 0.7/ pulse, which is combined with Feed Screw and Timing belt, or Wedge, or Rack & Pinion plus Worm shaft and Worm wheel. The minimum resolution described in this catalog is calculated with two () divisions of the standard motor step (half-step, where the value of m is ). pinion rack Fig. Precision Positioning Stages Timing belt type Model number ZA05A-V1 ZA07A-V ZA10A-V1 Ground Screw Type Model number ZA05A-X1 ZA07A (F)-X1 ZA10A (F)-X1 Wedge type Model number ZA07A-W, ZA10A-W ZA07A-WC, ZA10A-WC Screw pitch (mm / p) Reduction ratio of belt drive Basic step angular of motor (/ p) Micro-step Resolution (m / p) 0.5 1 0.4 1 1 0.5 0.5 0.1 Screw pitch (mm / p) - Basic step angular of motor (/ p) Micro-step Resolution (m / p) 0.5-0.5 0.5-0.5 0.5-0.5 Screw pitch (mm / rev.) Reduction ratio of Wedge Basic step angular of motor (/ p) Micro-step Resolution (m / p) 1 0.5 1 4 0.15 Rack & Pinion plus Worm shaft and Worm wheel Model number Screw pitch (mm / rev.) Reduction ratio of Worm shaft and worm wheel Basic step angular of motor (/ p) Micro-step Resolution (m / p) ZA07A-R3, ZA07A-R3S 4 48 0.5 Maximum speed depends on individual motor torque characteristics. However, we calculate maximum speed at 10kpps with motor in half-step mode. CONTACT TEL:+81-44-981-131 FAX:+81-44-981-181 [E-mail] info@kohzu.com [URL] www.kohzu.com 165
50~70mm Table ZA05A-V1 ZA07A-V ZA07A-W Motorized vertical linear stages ZA05A-V1 and ZA07A-V are fitted with belt drive and precision cross-roller bearings. Motorized vertical linear stage ZA07A-W is fitted with wedge and precision cross-roller bearing. Stage body is made of Aluminum and finished with a clear-matte anodizing. Motorized vertical linear stages are fitted with Five (5) phase stepper motor. Uses SC-Series motor controller, see page 06. Specifications Model Number Table Size Guide Mechanism Motion Range Lead Mechanism Repeatability Lost Motion Vertically Load Capacity (Horizontal) Material Finish Weight Standard Motor Standard Connector ZA05A-V1 50mm.5mm Ground screw, Pitch 0.5mm 3m 7m / 5mm 1kg 650g (PX533MH-A) RP13A-1RA-0PC ZA07A-V 70mm Cross-Roller Bearing 7.5mm Ball screw, Pitch 1.0mm 0.5m / step (Half Step).5mm / sec 0.5m 1m 8m / 15mm (PX535MH-B) P160BAP-160A-STA 5kg 1.6kg ZA07A-W 70mm 4mm 1/-Wedge 3m 5m / 8mm (PX533MH-B) RP13A-1RA-0PC Motor exchange is available on request. We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange Lubricant Type Sample Model Number Modification Cost Clean Room 1 1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot Vacuum ZA05A-V1-C ZA05A-V1-V be guaranteed.. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. 166
Belt Drive, Ball Screw, Wedge, Aluminum Body, Cross-Roller Bearing ZA05A-V1 0 5 ZA07A-V ZA07A-W CONTACT TEL:+81-44-981-131 FAX:+81-44-981-181 [E-mail] info@kohzu.com [URL] www.kohzu.com 167
70mm Table ZA07A-R3 ZA07A-R3S ZA07A-WC Motorized vertical linear stages ZA07A-R3 and ZA07A-R3S are fitted with rack & pinion and precision cross-roller bearings. The ZM07A-R3S is a high horizontal load capacity stage. Motorized vertical linear stage ZA07A-WC is fitted with wedge and precision cross-roller bearings. Stage body is made of Aluminum and finished with a clear-matte anodizing. Motorized vertical linear stages are fitted with Five (5) phase stepper motor. Uses SC-Series motor controller, see page 06. Specifications Model Number Table Size Guide Mechanism Motion Range Lead Mechanism Repeatability Lost Motion Vertically Load Capacity (Horizontal) Material Finish Weight Standard Motor Standard Connector ZA07A-R3 5kg 1.8kg ZA07A-R3S ZA07A-WC 70mm Cross-Roller Bearing 1.5mm Rack & Pinion 0.5m / step (Half step).5mm 1/4-Wedge 0.15m / step (Half step).5mm / sec 1.5mm / sec 0.5m 3m 8m / 5mm 0.5m 5m / 5mm 10kg 5kg.kg 1.3kg (PX535MH-B) (PX534MH-B) RP13A-1RA-0PC Motor exchange is available on request. We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange Lubricant Type Sample Model Number Modification Cost Clean Room 1 1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot Vacuum ZA07A-R3-C ZA07A-R3-V be guaranteed.. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. 168
Rack & Pinion, Wedge, Aluminum Body, Cross-Roller Bearing ZA07A-R3 0 10 0 ZA07A-R3S ZA07A-WC CONTACT TEL:+81-44-981-131 FAX:+81-44-981-181 [E-mail] info@kohzu.com [URL] www.kohzu.com 169
100mm Table ZA10A-V1 ZA10A-W ZA10A-WC Motorized vertical linear stage ZA10A-V1 is fitted with belt drive and precision cross-roller bearing. Motorized vertical linear stages ZA10A-W and ZA10A-WC are fitted with wedge and precision cross-roller bearing. Stage body is made of Aluminum and finished with a clear-matte anodizing. Motorized vertical linear stages are fitted with Five (5) phase stepper motor. Uses SC-Series motor controller, see page 06. Specifications Model Number Table Size Guide Mechanism Motion Range Lead Mechanism Repeatability Lost Motion Vertically Load Capacity (Horizontal) Material Finish Weight Standard Motor Standard Connector ZA10A-V1 5mm Ground screw, Pitch 0.4mm 0.1m / step (Half step) 1mm / sec 1m 5m / 10mm 5kg kg (PX533MH-A) ZA10A-W 100mm Cross-Roller Bearing 7mm 1/-Wedge 0.5m / step (Half step).5mm / sec 0.5m 4m 5m / 14mm 10kg 3.1kg (PX535MH-B) ZA10A-WC.5mm 1/4-Wedge 0.15m / step (Half step) 1.5mm / sec 0.5m 5m / 5mm P-160BAP-160A-STA RP13A-1RA-0PC Motor exchange is available on request. We offer custom products such as vacuum stages, clean room stages, and many other modifications. 7kg.1kg (PX534MH-B) Optional Lubricant Exchange Lubricant Type Sample Model Number Modification Cost Clean Room 1 1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot Vacuum ZA10A-V1-C ZA10A-V1-V be guaranteed.. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. 170
Belt Drive, Ground Screw, Wedge, Aluminum Body, Cross-Roller Bearing ZA10A-V1 ZA10A-W ZA10A-WC CONTACT TEL:+81-44-981-131 FAX:+81-44-981-181 [E-mail] info@kohzu.com [URL] www.kohzu.com 171
50~100mm Table ZA05A-X1 ZA07A-X1 ZA07F-X1 Specifications Model Number Mirror Model Number Table Size Guide Mechanism Motion Range Lead Mechanism Repeatability Lost Motion Vertically Load Capacity (Horizontal) Material Finish Weight Standard Motor ZA10A-X1 ZA05A-X1 ZA05A-X1-R ZA07A-X1 ZA07A-X1-R ZA07F-X1 ZA07F-X1-R ZA10A-X1 ZA10A-X1-R ZA10F-X1 ZA10F-X1-R 50mm 70mm 100mm Cross-Roller Bearing 7.5mm 10mm 1.5mm Ground screw, Pitch 0.5mm 0.5m / step (Half step).5mm / sec 0.5m 1m 1.5m m 3m / 15mm m / 0mm m / 5mm.5kg 5kg 10kg steel steel nickel plating nickel plating 950g 1.6kg kg 3.3kg 4.3kg (PX533MH-B) ZA10F-X1 Bracket type motorized vertical linear stages are fitted with precision cross- roller bearing. Stage body is made of aluminum or steel, and finished with clear-matte anodizing or nickel plating. Motorized vertical linear stages are fitted with. Uses SC-Series motor controller, see page 06. (PX535MH-B) Standard Connector RP13A-1RA-0PC P-160BAP-160A-STA Motor exchange is available on request. We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange Lubricant Type Clean Room 1 Vacuum Sample Model Number ZA05A-X1-C ZA05A-X1-R-C ZA05A-X1-V ZA05A-X1-R-V Modification Cost 1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot be guaranteed.. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. 17
Ground Screw, Aluminum Body, Steel Body, Cross-Roller Bearing ZA05A-X1 ZA07A-X1 ZA07F-X1 ZA10A-X1 ZA10F-X1 CONTACT TEL:+81-44-981-131 FAX:+81-44-981-181 [E-mail] info@kohzu.com [URL] www.kohzu.com 173
100~160mm Table Model Number Mirror Model Number Table Size Guide Mechanism Motion Range Lead Mechanism Repeatability Lost Motion Vertically Load Capacity (Horizontal) Material Finish Weight Standard Motor ZA10A-X1T ZA10A-X1T ZA10A-X1T-R 100mm Linear Guide 50mm m 8m / 100mm 6.8kg Ground screw, Pitch 1.0mm 1m / step (Half step) 10mm / sec 0.5m 10kg (PK566-B) ZA16A-X1 Bracket type motorized vertical linear stage ZA10A-X1T is fitted with precision linear guide. Bracket type motorized vertical linear stage ZA16A-X1T is fitted with precision cross-roller bearing. Stage body is made of Aluminum and finished with a clear-matte anodizing. Motorized vertical linear stages are fitted with. Uses SC-Series motor controller, see page 06. Specifications ZA16A-X1 ZA16A-X1-R 160mm14mm Cross-Roller Bearing 5mm 4m 4m / 50mm 6.kg Standard Connector P-160BAP-160A-STA Motor exchange is available on request. We offer custom products such as vacuum stages, clean room stages, and many other modifications. Optional Lubricant Exchange Lubricant Type Clean Room 1 Vacuum Sample Model Number ZA10A-X1T-C ZA10A-X1T-R-C ZA10A-X1T-V ZA10A-X1T-R-V Modification Cost 1. Although clean room grease aids in the reduction of particulate output, a specific cleanliness level cannot be guaranteed.. Although vacuum oil is low in particle emissions, a specific degree of vacuum cannot be guaranteed. 174
Ground Screw, Aluminum Body, Cross-Roller Bearing, Linear Guide ZA10A-X1T ZA16A-X1 CONTACT TEL:+81-44-981-131 FAX:+81-44-981-181 [E-mail] info@kohzu.com [URL] www.kohzu.com 175