ONTMINTION ONTROL SOLUTIONS Torrento high-flux, HIGH-RETENTION Filters The new standard for nondewetting PTFE filters enabling unsurpassed particle protection and yield enhancement
ultimate particle retention with ultra-high flow rate performance Overview Torrento filters provide the ultimate particle retention with ultra-high flow rate performance using an advanced nondewetting PTFE membrane. Torrento filters are specially designed to meet the critical customer demands for advanced technology during wet etch and cleaning processes. These filters provide high-yield, rapid bath cleanup cycles, extended filter life, fast changeouts and cleanliness all in a prewet package for ease-of-use. High-flux Membrane Technology Torrento filters use high-flux filter membrane that provides an ultra-high flow rate at the specified pore size rating. The combination of high flow and retention performance provides an optimal bath cleanup profile to minimize particle-related wafer defects and reduce process cycle time. The capability to maintain flow rate at an extremely small pore size in outgassing chemistries such as SPM, S1 and S ensures the stable processing conditions needed for the high pk results demanded at advanced technology nodes. ost-minimized Performance Torrento T3 and TE filters incorporate Entegris advanced device construction technology to provide more surface area in each filter, leading to extended filter lifetime. The membrane also reduces overall maintenance and replacement costs related to wet bench pumps as the low filter resistance design reduces pump strokes, thereby reducing wear and tear. pplication-oriented Design Leveraging Entegris applications expertise, the Torrento filter design allows development teams to avoid the performance compromises of general use filters. This design is supported by Entegris world-class global analytical services and applications support teams. Rapid hangeouts and Safety Torrento filters are available in a wide variety of cartridge and disposable formats to maximize installation flexibility and upgrades. Torrento TE and T3 cartridges and disposable filters are designed for recirculation bath applications, while Torrento 15/3 disposables are useful for single wafer processing. The disposable filters eliminate operator handling of the filter element, thus minimizing contamination risk. The disposable design also reduces the potential for operator exposure to chemicals during installation and disposal. leanliness Torrento 15 nm and nm filters are offered with both standard and UM cleanliness options. The Torrento P15 and P3 disposables are delivered standard with ultra-low metallic specifications. Torrento nm TE filters are offered with UM cleanliness as an option. Use of UM ultra-low extractable products will ensure bath cleanliness for critical cleaning processes, like S1. These filters are certified to low cleanliness limits.
Features and enefits Features High-flux membrane Nondewetting PTFE membrane filter in a prewet package Optimized patented membrane Minimized cost of ownership Disposable filter options Ultra-clean metallics option enefits Low membrane resistance design allows high particle retention with high flow Eliminates prewetting and flushing cycle High-purity, clean, ready-to-use filter Excellent performance in outgassing chemistries Recommended for aqueous-based chemicals at ambient temperatures (including H SO, H 3 PO, HNO 3, HL, NH F, H O, TMH, NH OH and ozonated water) and elevated temper ature applications (including S1, S, SPM, nitride etch, metal etch and various other resist stripping chemistries) TE and T3 designs incorporate more membrane for ultra-high flow and extended filter lifetime Nondewetting membrane enables rapid filter changeout to maximize process uptime Reduced wear and tear of wet bench pumps minimizes maintenance and replacement costs Requires less space for changeout llows quick installation and minimizes downtime while limiting the handling and exposure to hazardous chemicals Ensures bath cleanliness for sensitive wet cleaning processes Entegris, Inc.
Product ttributes and Specifications * Per 1 cartridge equivalent TE/T3 Type 15/3 Type Materials: Membrane Prewet, nondewetting PTFE Prewet, nondewetting PTFE rating: Membrane area: Maximum operating conditions, TE type: Metallic extractable levels:* Particle shedding cleanliness: TO recovery (per 1 equivalent): Resistivity recovery (per 1 equivalent): Supports PF PF artridge o-ring options E-FKM, hemraz or Kalrez, Viton Extreme ETP Disposable shell PF PF Maximum operating pressure Maximum forward differential pressure Maximum reverse differential pressure Maximum operating temperature nm (. µm) 15 nm (.15 µm) TE 1 : m (1 ft ) T3 1 : 3 m (3 ft ) TE : m ( ft ) T3 : m ( ft ).5 MPa (5. bar; psi) @ 5.97 MPa (.97 bar; 1 psi) @ 1. MPa (. bar; psi) @ 5.5 MPa (.5 bar; 7.5 psi) @ 1 N/ 15 nm (.15 µm) 15 type:.19 m (.5 ft ) 3 type:. m (.7 ft ). MPa (. bar; psi) @ 5.19 MPa (1.9 bar; psi) @ 95.39 MPa (3.9 bar; 57 psi) @ 5.19 MPa (1.9 bar; psi) @ 95.3 MPa (3.5 bar; 5 psi) @ 5.9 MPa (.9 bar; psi) @ 5 1 95 Standard artridge <5 µg/device Disposable <1 µg/device UM artridge <1 µg/device (guaranteed levels) Disposable <3 µg/device Performance Data <15 particles/1 ml. µm @ @ 5 L/min DI water flow artridge within 1 ppb of feed after 1 L flush @ 1 L/min Disposable within 5 ppb of feed after 5 min flush @ 5 L/min Within.5 MΩ of feed after a 1 L water flush @ 1 L/min N/ <3 µg/device <1 particles/1 ml. µm @ 5 L/min DI water flow Within 5 ppb of feed after 3 min flush @ 3. L/min Hydraulic Performance for Disposable Products Pressure Limit (psi) 1 1 1 1 hem-line II 1 hem-line I 5 5 75 1 15 15 175 Temperature ( ) Entegris, Inc. 3
Torrento 15 nm and nm artridge Filters Dimensions End View with hemlock Key on artridge Ø 95.3 mm (3.75 ) REF Ø 3. mm (3.7 ). mm REF (.15 ) Performance Data 1 :. mm (9.1 ) : 71. mm (1.5 ) mm (. ) Ordering Information TE 1 artridge Filters 1 1.7. 9.5 15 nm 7. 5.3 nm. 3.1 1 1 3 5 Flow Rate (L/min) 1 cp @ ( F) TE artridge Filters 1 1.35.3.5..15.1.5 15 nm nm 1 3 5 Flow Rate (L/min) 1 cp @ ( F) T3 1 artridge Filters 1 1 5 3 1 nm TRX 15 nm TPW 1 3 5 Typical Flow Rate (L/min) 1 cp @.5. 3.5 3..5. 1.5 1..5 7 5 3 1 Torrento TE artridge Filter STNDRD LEN T K* RX = nm Length TE = 1 TE = Torrento TE artridge Filter UM LEN T K* RW = 15 nm RX = nm Torrento T3 artridge Filter STNDRD LEN T 1 K* PW = 15 nm RX = nm Length E = 1 E = Torrento T3 artridge Filter UM LEN T 3E 1 K* PW = 15 nm RX = nm Length 3TE = 1 3T = Length 3E = 1 *Optional hemlock key attached to cartridge for use with hemlock housing ONLY. O-ring 1 = TEV 1 = E-ETP 1 = hemraz K1 = Kalrez 79 R1 = Kalrez 375 O-ring 1 = TEV 1 = E-ETP R1 = Kalrez 375 O-ring 1 = E-ETP O-ring 1 = E-ETP Entegris, Inc.
Torrento hem-line TM II 15 nm and nm Disposable Filters Nominal Dimensions for hem-line II onfigurations Flaretek with 1 Vent/Drain Flaretek with 1 Vent/Drain Flowell Series with 1 Vent/Drain Flowell Series with 1 Vent/Drain. mm (.1 ). mm (.1 ) Ø11 mm (.3 ) Ø11 mm (.3 ) Ø11 mm (.3 ) Ø11 mm (.3 ) Ø1 mm (.1 ) Ø1 mm (.1 ) Ø1 mm (.1 ) Ø1 mm (.1 ) Flaretek s Male Inlet/ Outlet Vent/ Drain Filter 1 Filter 3 1 3 mm (9.5 ) 37 mm (1.5 ) 33 mm (13.5 ) 37 mm (1.5 ) 1 1 3 mm (9.5 ) 37 mm (1.5 ) 35 mm (1.1 ) 37 mm (1.5 ) 3 1 mm (9. ) 37 mm (1.5 ) 359 mm (1.13 ) 37 mm (1.5 ) 1 1 55 mm (1.3 ) 37 mm (1.5 ) 3 mm (1. ) 37 mm (1.5 ) 3 1 5 mm (9. ) 1 mm (1.1 ) 33 mm (1.9 ) 1 mm (1.1 ) 1 1 3 mm (1.3 ) 1 mm (1.1 ) 37 mm (1. ) 1 mm (1.1 ) Flowell Series s Male Inlet/ Outlet Vent/ Drain Filter 1 Filter 3 1 mm (9.7 ) 37 mm (1.5 ) 31 mm (1.17 ) 37 mm (1.5 ) 1 1 5 mm (1.15 ) 37 mm (1.5 ) 371 mm (1. ) 37 mm (1.5 ) 3 1 1 mm (9. ) 1 mm (1.1 ) 35 mm (13.9 ) 1 mm (1.1 ) 1 1 53 mm (9.9 ) 1 mm (1.1 ) 3 mm (1. ) 1 mm (1.1 ) Entegris, Inc. 5
Nominal Dimensions for hem-line II onfigurations Super 3 Type Pillar (Male) with 1 Vent/Drain Super 3 Type Pillar (Male) 1 Vent/Drain Super 3 Type Pillar (Female) 1 Vent/Drain. mm (.1 ) Ø11 mm (.3 ) Ø11 mm (.3 ) Ø11 mm (.3 ) Ø1 mm (.1 ) Ø1 mm (.1 ) Ø1 mm (.1 ) Super 3 Type Pillar s Male Inlet/ Outlet Vent/ Drain Filter 1 Filter 1 1 mm (. ) 1 mm (1.1 ) 337 mm (13.7 ) 1 mm (1.1 ) 3 1 37 mm (9.33 ) 37 mm (1. ) 35 mm (13.7 ) 37 mm (1. ) 1 1 7 mm (1.3 ) 37 mm (1. ) 33 mm (15. ) 37 mm (1. ) 3 1 (9. ) 1 mm (1.1 ) 39 mm (13.7 ) 1 mm (1.1 ) 1 1 73 mm (1.35 ) 1 mm (1.1 ) 3 mm (15. ) 1 mm (1.1 ) Super 3 Type Pillar s Female Inlet/ Outlet Vent/ Drain Filter 1 Filter 3 1 5 mm (9.5 ) 37 mm (1. ) 35 mm (1.9 ) 37 mm (1. ) Entegris, Inc.
Performance Data hemline I and hemline II Disposable Filters TE 1 Disposable Filters with 3 s 1 3 5 1. 1. 1..... 15 nm nm 5 1 15 5 Flow Rate (L/min) 1 cp @ ( F) 1 1 1 1 1 TE 1 Disposable Filters with 1 s 1 3 5 1. 1. 1..... 15 nm nm 5 1 15 5 Flow Rate (L/min) 1 cp @ ( F) 1 1 1 1 1 TE 1 Disposable Filters with 3 s TE 1 Disposable Filters with 1 s 1 3 5 1 3 5.7.7. 9..5 7.5. 15 nm. 5 15 nm.3.3. 3. nm.1 1.1 nm 5 1 15 5 5 1 15 5 Flow Rate (L/min) 1 cp @ ( F) Flow Rate (L/min) 1 cp @ ( F) 9 7 5 3 1 T3 1 Disposable Filters with 3 s T3 1 Disposable Filters with 1 s 1 1 1 1...5 7.5 15 nm 15 nm. TPW. TPW 5.3 nm.3 TRX nm. 3. TRX.1 1.1 1 3 5 Flow Rate (L/min) 1 cp @ ( F) 1 3 5 Flow Rate (L/min) 1 cp @ ( F) 7 5 3 1 Entegris, Inc. 7
Ordering Information Torrento TE hem-line II Disposable Filter STNDRD LEN T TE RDX = nm OF = 3 inlet/outlet, 1 vent/drain, 1F = 3 inlet/outlet, 1 vent/drain, F = 1 inlet/outlet, 1 vent/drain, F = 1 inlet/outlet, 1 vent/drain, OW = 3 inlet/outlet, 1 vent/drain, Flowell series fittings W = 1 inlet/outlet, 1 vent/drain, Flowell series fittings OFF = 3 inlet/outlet, 1 vent/drain, FF = 1 inlet/outlet, 1 vent/drain, OWW = 3 inlet/outlet, 1 vent/drain, Flowell series fittings WW = 1 inlet/outlet, 1 vent/drain, Flowell series fittings PPM = 3 inlet/outlet, 1 vent/drain, P3PM = 3 inlet/outlet, 1 vent/drain, PPM = 1 inlet/outlet, 1 vent/drain, P3PM = 3 inlet/outlet, 1 vent/drain, Torrento TE hem-line II Disposable Filter UM LEN T E RDW = 15 nm RDX = nm OF = 3 inlet/outlet, 1 vent/drain, F = 1 inlet/outlet, 1 vent/drain, F = 1 inlet/outlet, 1 vent/drain, W = 3 inlet/outlet, 1 vent/drain, Flowell series fittings W = 1 inlet/outlet, 1 vent/drain, Flowell series fittings PPM = 3 inlet/outlet, 1 vent/drain, PPM = 1 inlet/outlet, 1 vent/drain, Torrento T3 hem-line II Disposable Filter STNDRD LEN T 3TE PDW = 15 nm RDX = nm OF = 3 inlet/outlet, 1 vent/drain, 1F = 3 inlet/outlet, 1 vent/drain, F = 1 inlet/outlet, 1 vent/drain, F = 1 inlet/outlet, 1 vent/drain, W = 3 inlet/outlet, 1 vent/drain, Flowell series fittings W = 1 inlet/outlet, 1 vent/drain, Flowell series fittings Torrento T3 hem-line II Disposable Filter UM LEN T 3E PDW = 15 nm RDX = nm OF = 3 inlet/outlet, 1 vent/drain, 1F = 3 inlet/outlet, 1 vent/drain, F = 1 inlet/outlet, 1 vent/drain, F = 1 inlet/outlet, 1 vent/drain, W = 3 inlet/outlet, 1 vent/drain, Flowell series fittings W = 1 inlet/outlet, 1 vent/drain, Flowell series fittings Entegris, Inc.
hem-line I ore Vent Disposable Filters Dimensions LH: L-Line 3 Super Type Pillar with ore Vent 1 mm (.55 ) 37 mm (1. ) mm TH: T-Line 3 Super Type Pillar with ore Vent mm 1 mm (.55 ) H: T-Line 3 Super Type Pillar with ore Vent mm 1 mm (.55 ) mm 15 mm DP 5 mm (.9 ) mm 15 mm DP 5 mm (.9 ) mm mm DP 33 mm (1.3 ) (1. ) Ø1 mm (. ) (1. ) Ø1 mm (. ) (1. ) Ø1 mm (. ) mm (1.57 ) mm (1.57 ) mm (1.57 ) TW: T-Tube 3 Flowell Series with ore Vent 1 mm (.55 ) 3S: T-Line 3 Super Type Pillar with ore Vent mm S: T-Line 1 Super Type Pillar with ore Vent mm mm (1.57 ) mm (1.57 ) 17.5 mm DP 5 mm (.9 ) mm DP mm 33 mm (1.3 ) mm DP mm 33 mm (1.3 ) (1. ) Ø1 mm (. ) (1. ) Ø1 mm (. ) (1. ) Ø1 mm (. ) mm (1.57 ) mm (1.57 ) mm (1.57 ) Entegris, Inc. 9
hem-line I ore Vent s Products Sleeve LH: L-Line: 3 inlet/outlet; TH: T-Line: 3 inlet/outlet; H: T-Line: 3 inlet/outlet; 1 vent/drain; TW: T-Tube: 3 inlet/outlet; Flowell Series fittings 3S: T-Line: 3 inlet/outlet; S: T-Line: 1 inlet/outlet; Length (Overall Height) TE, T3 1 37 mm (15. ) TE, T3 1 3 mm (15. ) TE, T3 1 39 mm (15.51 ) TE, T3 1 (17.17 ) TE, T3 1 391 mm (15.39 ) TE, T3 1 391 mm (15.39 ) Length (ottom to enterline ) 37 mm (1.7 ) 37 mm (17.7 ) 333 mm (13.11 ) 33 mm (1.9 ) 333 mm (13.11 ) 333 mm (13.11 ) Length (Inlet to Outlet) 9 mm (.5 ) 1 mm (7.9 ) 1 mm (7. ) 5 mm (9.9 ) 17 mm (.77 ) 1 mm (7.1 ) 1 Entegris, Inc.
Ordering Information Torrento TE hem-line I ore Vent Disposable Filter STNDRD LEN T TE RVX = nm LH = 3 inlet/outlet, L-line, 1 vent/drain, TH = 3 inlet/outlet, T-line, 1 vent/drain, H = 3 inlet/outlet, T-line, 1 vent/drain, TW = 3 inlet/outlet, T-tube, 1 vent/drain, Flowell series fittings 3S = 3 inlet/outlet, T-line, 1 vent/drain, S = 1 inlet/outlet, T-line, 1 vent/drain, Torrento TE hem-line I ore Vent Disposable Filter UM LEN T E PVW = 15 nm RVX = nm TH = 3 inlet/outlet, T-line, 1 vent/drain, H = 1 inlet/outlet, T-line, 1 vent/drain, 3S = 3 inlet/outlet, T-line, 1 vent/drain, S = 1 inlet/outlet, T-line, 1 vent/drain, Torrento T3 hem-line I ore Vent Disposable Filter STNDRD LEN T 3TE PVW = 15 nm RVX = nm TH = 3 inlet/outlet, T-line, 1 vent/drain, H = 1 inlet/outlet, T-line, 1 vent/drain, 3S = 3 inlet/outlet, T-line, 1 vent/drain, S = 1 inlet/outlet, T-line, 1 vent/drain, Torrento T3 hem-line I ore Vent Disposable Filter UM LEN T 3E PVW = 15 nm RVX = nm TH = 3 inlet/outlet, T-line, 1 vent/drain, H = 1 inlet/outlet, T-line, 1 vent/drain, 3S = 3 inlet/outlet, T-line, 1 vent/drain, S = 1 inlet/outlet, T-line, 1 vent/drain, Entegris, Inc. 11
Standard hem-line I Disposable Filters Dimensions S: T-Line 3 inlet/outlet, 1 vent/ drain, Super Type Pillar mm 1 mm (.55 ) H: T-Line 1 inlet/outlet, 1 vent/ drain, Super Type Pillar mm 1 mm (.55 ) LH: L-Line 3 inlet/outlet, 1 vent/ drain, Super Type Pillar 37 mm (1. ) 1 mm (.55 ) 9 mm (3.5 ) mm 15 mm DP 5 mm (.9 ) mm mm DP mm mm (1. ) (. ) Ø1 mm (1. ) (. ) Ø1 mm (1. ) Ø1 mm (. ) T3: T-Tube 3 inlet/outlet, 1 vent/ drain, Super 3 Type Pillar 1 mm (.55 ) TW: T-Tube 3 inlet/outlet, 1 vent/ drain, Flowell Series 1 mm (.55 ) TF: T-Tube 3 inlet/outlet, 1 vent/ drain, FlareLock II 1 mm (.55 ) mm (1.57 ) mm (1.57 ) 17.5 mm DP 5 mm (.9 ) mm (1.57 ) mm (1.57 ) 17.5 mm DP 5 mm (.9 ) mm (1.57 ) 73 mm (.7 ) mm (1.57 ) 17.5 mm DP 5 mm (.9 ) (1. ) Ø1 mm (. ) (1. ) Ø1 mm (. ) (1. ) Ø1 mm (. ) 1 Entegris, Inc.
3S: T-Line 3 inlet/outlet, 1 vent/ drain, Super 3 Type Pillar mm S: T-Line 1 inlet/outlet, 1 vent/ drain, Super 3 Type Pillar mm mm DP mm 33 mm (1.3 ) mm DP mm 33 mm (1.3 ) (1. ) (. ) (. ) Ø1 mm Ø1 mm Standard hem-line I s Products Sleeve LH: L-Line: 3 inlet/outlet; TH: T-Line: 3 inlet/outlet; H: T-Line: 1 inlet/outlet; S: T-Line: 1 inlet/outlet; 3S: T-Line: 3 inlet/outlet; TW: T-Tube: 3 inlet/outlet; Flowell Series fittings T3: T-Tube: 3 inlet/outlet; TF: T-Tube: 3 inlet/outlet; FlareLock II fittings Length (Overall Height) Length (ottom to enterline ) Length (Inlet to Outlet) TE, T3 1 1 mm (1. ) 351 mm (13. ) 9 mm (3.5 ) TE, T3 1 39 mm (15.59 ) 3 (13. ) 1 mm (7. ) TE, T3 1 mm (15. ) 31 mm (13. ) 1 mm (7. ) TE, T3 1 399 mm (15.7 ) 31 mm (13. ) 1 mm (7.1 ) TE, T3 1 399 mm (15.7 ) 31 mm (13. ) 17 mm (.77 ) TE, T3 1 (17.1 ) 33 mm (1.9 ) 5 mm (9.9 ) TE, T3 1 9 mm (17.7 ) 39 mm (1.5) mm (1.55 ) TE, T3 1 3 mm (1.59 ) 7 mm (9.7 ) 5 mm (9.9 ) Entegris, Inc. 13
Ordering Information Torrento TE Standard hem-line I Disposable Filter STNDRD LEN TRD TE X = nm LH = 3 inlet/outlet, L-line, 1 vent/drain, TH = 3 inlet/outlet, T-line, 1 vent/drain, H = 1 inlet/outlet, T-line, 1 vent/drain, T3 = 3 inlet/outlet, T-tube, 1 vent/drain, TW = 3 inlet/outlet, T-tube, 1 vent/drain, Flowell series fittings TF = 3 inlet/outlet, T-tube, 1 vent/drain, FlareLock II fittings Torrento TE Standard hem-line I Disposable Filter UM LEN TRV E W = 15 nm X = nm LH = 3 inlet/outlet, L-line, 1 vent/drain, TH = 3 inlet/outlet, T-line, 1 vent/drain, H = 1 inlet/outlet, T-line, 1 vent/drain, TF = 3 inlet/outlet, T-tube, 1 vent/drain, FlareLock II fittings Torrento TE Standard hem-line I Disposable Filter with Modified Vent STNDRD LEN TRM TE X = nm 3S = 3 inlet/outlet, T-line, 1 vent/drain, S = 1 inlet/outlet, T-line, 1 vent/drain, Torrento TE Standard hem-line I Disposable Filter with Modified Vent UM LEN TRM E W = 15 nm X = nm 3S = 3 inlet/outlet, T-line, 1 vent/drain, S = 1 inlet/outlet, T-line, 1 vent/drain, Torrento T3 Standard hem-line I Disposable Filter STNDRD LEN T 3TE TH = 3 inlet/outlet, T-line, 1 vent/drain, RDX = nm Torrento T3 Standard hem-line I Disposable Filter UM LEN T 3E TH = 3 inlet/outlet, T-line, 1 vent/drain, RDX = nm 1 Entegris, Inc.
Torrento 3 15 nm Disposable Filters UM LEN Dimensions mm Super Type Pillar 3. mm (1. ) 1 Super Type Pillar 3. mm (1. ) 3 Flaretek ompatible 3. mm (1. ) 19 mm (7. ). mm (3.31 ) 9. mm (3.5 ) mm (.3 ). mm (3.31 ) 9. mm (3.5 ) mm (. ). mm (3.31 ) 9. mm (3.5 ) 3. mm (1. ) 3. mm (1. ) 3. mm (1. ) mm Super 3 Type Pillar 3 Super 3 Type Pillar 1 Super 3 Type Pillar 31. mm (1. ) 31. mm (1. ) 31. mm (1. ) 19 mm 7. ). mm (3.31 ) 9. mm (3.5 ) 19 mm 7. ). mm (3.31 ) 9. mm (3.5 ) 199 mm (7. ). mm (3.31 ) 9. mm (3.5 ) 31. mm (1. ) 31. mm (1. ) 31. mm (1. ) Ordering Information Torrento 3 Disposable Filter UM LEN TRP 3 W = 15 nm fitting P = 1 inlet/outlet, 1 vent/drain, S = 1 inlet/outlet, 1 vent/drain, 3S = 3 inlet/outlet, 1 vent/drain, 3F = 3 inlet/outlet, 1 vent/drain, S = mm inlet/outlet, mm vent/drain, P = mm inlet/outlet, mm vent/drain, Performance Data 3 15 nm Disposable Filters.... 1. 1..7..5..3 mm fittings 1 fittings..1 1 3 5 Typical Flow Rate (L/min) 1 cp @ ( F) 9 7 5 3 1 Entegris, Inc. 15
Torrento 15 15 nm Disposable Filters UM LEN Dimensions mm Super Type Pillar 3 Flaretek ompatible 3. mm (1. ) 3. mm (1. ) 1. mm (5.5 ). mm (3.31 ) 9. mm (3.5 ) 15. mm (.5 ). mm (3.31 ) 9. mm (3.5 ) 3. mm (1. ) 3. mm (1. ) mm Super 3 Type Pillar 3 Super 3 Type Pillar 31. mm (1. ) 31. mm (1. ) 135. mm (5.3 ). mm (3.31 ) 9. mm (3.5 ) 11. mm (5.55 ). mm (3.31 ) 9. mm (3.5 ) 31. mm (1. ) 31. mm (1. ) Performance Data 15 15 nm Disposable Filters.... 1. 1..7..5 15 nm fittings..3..1 1 3 5 Typical Flow Rate (L/min) 1 cp @ ( F) 9 7 5 3 1 Ordering Information Torrento 15 Disposable Filter UM LEN TRP 15 W = 15 nm P = mm inlet/outlet, mm vent/drain, 3S = 3 inlet/outlet, 1 vent/drain, S = mm inlet/outlet, mm vent/drain, 3F = 3 inlet/outlet, 1 vent/drain, 1 Entegris, Inc.
For More Information Please call your Regional ustomer Service enter today to learn what Entegris can do for you. Visit www.entegris.com and select the ustomer Service link for the center nearest you. Terms and onditions of Sale ll purchases are subject to Entegris Terms and onditions of Sale. To view and print this information, visit www.entegris.com and select the Legal Notices link from the footer. Entegris, the Entegris Rings Design, hemlock, Flaretek, FlareLock, Torrento and hem-line TM are trademarks of Entegris, Inc. Teflon is a registered trademark of E.I. du Pont de Nemours and ompany. hemraz is a registered trademark of Greene, Tweed & o. Viton, Viton Extreme TM and Kalrez are trademarks of DuPont Dow Elastomers, L.L.. Flowell is a registered trademark of Flowell orporation. Pillar is a registered trademark of Nippon Pillar Packaging ompany, Ltd. ENTEGRIS, IN. orporate Headquarters 19 oncord Road illerica, M 11 US ustomer Service Tel. +1 95 55 11 ustomer Service Fax +1 95 55 In North merica 39 3 www.entegris.com 1 Entegris, Inc. ll rights reserved Printed in US 3-55ENT-11