PFEIFFER VACUUM SOLUTIONS FOR THE SEMICONDUCTOR MARKET

PFEIFFER VACUUM SOLUTIONS FOR THE SEMICONDUCTOR MARKET

Pfeiffer Vacuum: Many years of expertise Many decades of know-how in high and ultra-high vacuum and in low and medium vacuum Expert knowledge from > 500,000 installed turbopumps and > 700,000 installed backing pumps 2

Pfeiffer Vacuum Group Founded in 1890 and headquartered in Asslar/Germany with other production plants in Annecy/France, Asan/Korea, Göttingen/Germany and Cluj/Romania For 125 years our employees (currently ~2,250) have been developing, producing, selling and servicing vacuum pumps vacuum chambers vacuum components 3

Worldwide presence of sales and service The Americas ~150 Europe ~1,600 Asia ~500 Sales and Service Production Distributors Total workforce: ~2,250 Sales and Service: R & D: Administration: Production: ~850 ~170 ~230 ~1000 4

We offer complete vacuum solutions Customer Solutions = Service + Pumps and Components Competence Experience Quality Technology 5

Sales Development (in million ) 600 500 400 300 200 100 0 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 6

Regions 23% 45% 32% Sales and Service Production Distributors The Americas Europe Asia 7

Sales Split by Market Segments Business Unit Semi & Coating Business Unit Analytics & Industry Semiconductor Coating Industry Analytics R & D 33 % 12% 24 % 20 % 11 % Lithography Inspection Deposition Etching Ion Implant BackEnd Packaging Surface Refinement Architectural Glass Data Storage Display Solar Cells General Applications Electron Beam Welding Freeze Drying Vacuum Drying Electron- Microscopy Surface Analysis Gas Analysis Biotechnology Renewable Energies Nanotechnology Particle Accelerator Space Simulation 8

Products Turbopumps Instruments & Components Backing Pumps Service Systems 30% 24% 22% 21% 3% 9

Best in class products from Pfeiffer Vacuum Turbopumps Rotary Vane Pumps Hybrid Bearing SplitFlow SplitFlow Magnetically 1-stage Levitated levitated 2-stage Roots Vacuum Pumps Air Cooled Gas Cooled Water Cooled cooled Light duty Light Medium Duty duty Medium Duty Harsh Duty 10

Best in class products from Pfeiffer Vacuum Leak Detectors Mass Spectrometer Portable High Performance Modular Compact HiPressure Analyzer High pressure analyser Gas Analysis Chambers Systems Vacuum Parts Vertical Cubical Pumping Contamination Leak HV-Vertical Gauges Systems Management Detection Gauges Components 11

Vacuum Solutions for a Semiconductor Fab Cleanroom Subfloor Basement 12

Global Market Share Semiconductor Dry Pumps > 13 % Turbopumps > 32 % Leak Detectors > 48 % 13

Dry Pumps Clean Pumps ACP Series Integrated Pumps A 100 L / A 200 L Process Pumps A4 Series Large Process Pumps AD Series 14

Dry Pump Top Applications Application ACP A 100 L A 200 L Series 4 Easy Series 4 Harsh Series 4 Extreme AD Range Etch SACVD / PECVD HDPCVD ALD Implantation PVD Inspection Load lock 15

Advantages Byproduct Prevention Excellent temperature management for process pumps with wider temperature window Special material mix for longer pump lifetime for extreme harsh applications Temperature setting A4 Series 40 C < T HP < 155 C 40 C < T LP < 120 C 16

Turbopumps 10 1,000 l/s Drag stage Maglev HiPace 300 M ATH 500 M HiPace 700 M HiPace 800 M Drag stage hybrid bearing HiPace 10 HiPace 80 HiPace 300 HiPace 400 HiPace 700 HiPace 800 No drag stage P/C version HiPace 60 HiPace 300 C HiPace 700 P HiPace 800 P 17

Turbopumps > 1.000 l/s No drag stage ATP 2300 M Drag stage TMS ATH 1600 MT ATH 2300 MT ATH 2804 MT ATH 3204 MT Drag stage ATH 1603 M ATH 2303 M ATH 2804 M ATH 3204 M No drag stage C version TMS version HiPace1200 HiPace1500 HiPace 1800 HiPace 2300 HiPace 2800 IT 18

Turbopump Top Applications Application HiPace Small HiPace Medium HiPace Large ATH Mid size ATH Large Metal Etch Poly Etch Oxide Etch HDPCVD Implantation PVD CD-SEM DR-SEM Load Lock Transfer 19

Global Service & Application Network 20

Please join the Green Manufacturing Session: Next step in electrical power consumption reduction. Presented by: Patrick Colin, Global Product Manager, Pfeiffer Vacuum Date: 8. October 2015 Time: 10:20 12:00 Location: TechARENA 1 Contact details & safe harbor statement Pfeiffer Vacuum GmbH Silicon Saxony Booth Daniel Sälzer Market Manager Semiconductor +49 (6441) 802 1861 Daniel.Saelzer@pfeiffer-vacuum.de www.pfeiffer-vacuum.com This presentation may include predictions, estimates or other information that might be considered forward-looking. While these forward-looking statements represent our current judgment on what the future holds, they are subject to risks and uncertainties that could cause actual results to differ materially. You are cautioned not to place undue reliance on these forward-looking statements, which reflect our opinions only as of the date of this presentation. Please keep in mind that we are not obligating ourselves to revise or publicly release the results of any revision to these forward-looking statements in light of new information or future events.