Extruded Positioning Stage

Extruded Positioning Stage Single-axis stage Turnkey operation Modular aluminum construction with integral brushless linear motor, linear encoder, limit switches, cable carrier, linear bearings and bellows BL Linear brushless iron core motor with peak force ratings to 240 pounds (1070 N) High speeds to 200 in/sec (5 m/sec) with standard 5 micron encoder resolution Strokes to 150 inches (3.8m) standard longer travels available as custom 5 micron linear magnetic encoder scale standard with other resolutions available as custom High stiffness linear recirculating ball bearings with low friction seals Required power supply: Trapezoidal or sinusoidal 3 phase brushless amplifier and single-axis motion controller to close the position loop Internal linear motor cable carrier The extruded positioning stage is a cost-effective solution for those applications requiring less stringent positioning requirements. It is ideally suited for long stroke high acceleration closed loop servo applications. It features lightweight moving parts for high acceleration of light loads. The brushless linear motor provides smooth, highly reliable non-contact operation with no backlash or component wear. Dynamic performance with low settling times is provided by the brushless motor stiffness. Its essentially square shape and integral cable carrier allows mounting multiple stages close together. These stages can also be stacked to provide multiaxis positioning. Technical Data MECHANICAL SPECIFICATIONS DYNAMIC CHARACTERISTICS Stroke, Maximum 150 in (3.8tm) Accuracy in/ft [µm/300mm] ± 0.002 [50.3] Payload, Maximum 300 Lbs [136kg] Repeatability in [µm] 0.001 [25.4] Base / Table Material Aluminum Straightness in/ft [µm/300mm] ± 0.003 [76.2] Home Limit Switches Non-contact Optical Flatness in/ft [µm/300mm] ± 0.003 [76.2] Hard Stops Cable Carrier Bearing Linear Feedback (5µm std) Moving Mass (Less Motor) Spring Loaded Flexible Composite Material Linear Recirculating Ball Linear Magnetic Scale 5µm std. 9 Lbs. [4.09kg] MOTOR TYPE IRON CORE BRUSHLESS Force @ 100% duty cycle to 80 Lbs (44-356N) Forces @ 10% duty cycle to 180 Lbs (260-800N) Velocity to 200 in/sec (5m/s) Acceleration to 10g s (98m/s 2 ) Servo Systems Co. 53 Pond Road, Green 187

Extruded Stage Dimensions Inches [mm] 188 Servo Systems Co. 53 Pond Road, Green

Extruded Stage Catalog Number Matrix L S X MOTOR TYPE Example: CF08D STROKE Rounded down to nearest inch F= fractional LINEAR ENCODER 0.1 µm = A 0.5 µm = B 1.0 µm = C 2.0 µm = D 5.0 µm = E 10 µm = F 20 µm = G other = Z MOUNT T = table W = wall NO. OF HEADS 1, 2... EXTRUDED STAGE 189

LSX Connections 190

Extruded Stage Catalog Numbers Motor LMBL06A BL08A Cont. Force 20 Lbs [89N] 30 Lbs [133N] Peak Force 60 Lbs [267N] 90 Lbs [400N] Stroke Overall Length Stage Stroke Overall Length Stage inch meter inch meter Catalog Number inch meter inch meter Catalog Number 0.20 0.01 10.25 0.26 LSX1TEBL06AF2 0.20 0.01 12.05 0.31 LSX1TEBL08AF2 2.00 0.05 12.05 0.31 LSX1TEBL06A2 2.0 0.05 13.85 0.35 LSX1TEBL08A2 5.60 0.14 15.65 0.40 LSX1TEBL06A5 5.60 0.14 17.45 0.44 LSX1TEBL08A5 11.00 0.28 21.05 0.53 LSX1TEBL06A11 11.00 0.28 22.85 0.58 LSX1TEBL08A11 16.43 0.42 26.45 0.67 LSX1TEBL06A16 16.40 0.42 28.25 0.72 LSX1TEBL08A16 21.33 0.54 31.85 0.81 LSX1TEBL06A21 20.00 0.51 31.85 0.81 LSX1TEBL08A20 26.19 0.67 37.25 0.95 LSX1TEBL06A26 25.38 0.64 37.25 0.95 LSX1TEBL08A25 31.05 0.79 42.65 1.08 LSX1TEBL06A31 30.24 0.77 42.65 1.08 LSX1TEBL08A30 35.91 0.91 48.05 1.22 LSX1TEBL06A35 35.10 0.89 48.05 1.22 LSX1TEBL08A35 40.77 1.04 53.45 1.36 LSX1TEBL06A40 39.96 1.01 53.45 1.36 LSX1TEBL08A39 45.63 1.16 58.85 1.49 LSX1TEBL06A45 44.82 1.14 58.85 1.49 LSX1TEBL08A44 50.49 1.28 64.25 1.63 LSX1TEBL06A50 49.68 1.26 64.25 1.63 LSX1TEBL08A49 55.35 1.41 69.65 1.77 LSX1TEBL06A55 54.54 1.39 69.65 1.77 LSX1TEBL08A54 60.21 1.53 75.05 1.91 LSX1TEBL06A60 59.40 1.51 75.05 1.91 LSX1TEBL08A59 65.07 1.65 80.45 2.04 LSX1TEBL06A65 65.88 1.67 82.25 2.09 LSX1TEBL08A65 69.93 1.78 85.85 2.18 LSX1TEBL06A69 70.74 1.80 87.65 2.23 LSX1TEBL08A70 74.79 1.90 91.25 2.32 LSX1TEBL06A74 75.60 1.92 93.05 2.36 LSX1TEBL08A75 79.65 2.02 96.65 2.45 LSX1TEBL06A79 80.46 2.04 98.45 2.50 LSX1TEBL08A80 84.51 2.15 102.05 2.59 LSX1TEBL06A84 85.32 2.17 103.85 2.64 LSX1TEBL08A85 90.99 2.31 109.25 2.77 LSX1TEBL06A90 90.18 2.29 109.25 2.77 LSX1TEBL08A90 95.85 2.43 114.65 2.91 LSX1TEBL06A95 95.04 2.41 114.65 2.91 LSX1TEBL08A95 100.71 2.56 120.05 3.05 LSX1TEBL06A100 99.90 2.54 120.05 3.05 LSX1TEBL08A99 105.57 2.68 125.45 3.19 LSX1TEBL06A105 104.76 2.66 125.45 3.19 LSX1TEBL08A104 110.43 2.80 130.85 3.32 LSX1TEBL06A110 109.62 2.78 130.85 3.32 LSX1TEBL08A109 115.29 2.93 136.25 3.46 LSX1TEBL06A115 114.48 2.91 136.25 3.46 LSX1TEBL08A114 120.15 3.05 141.65 3.60 LSX1TEBL06A120 120.96 3.07 143.45 3.64 LSX1TEBL08A120 125.01 3.18 147.05 3.74 LSX1TEBL06A125 125.82 3.20 148.85 3.78 LSX1TEBL08A125 129.87 3.30 152.45 3.87 LSX1TEBL06A129 130.68 3.32 154.25 3.92 LSX1TEBL08A130 134.73 3.42 157.85 4.01 LSX1TEBL06A134 135.54 3.44 159.65 4.06 LSX1TEBL08A135 139.59 3.55 163.25 4.15 LSX1TEBL06A139 140.40 3.57 165.05 4.19 LSX1TEBL08A140 146.07 3.71 170.45 4.33 LSX1TEBL06A146 145.26 3.69 170.45 4.33 LSX1TEBL08A145 150.93 3.83 175.85 4.47 LSX1TEBL06A150 150.12 3.81 175.85 4.47 LSX1TEBL08A150 155.79 3.96 181.25 4.60 LSX1TEBL06A155 154.98 3.94 181.25 4.60 LSX1TEBL08A154 191

Extruded Stage Catalog Numbers Motor LMBL10A LMBL12A Cont. Force 40 Lbs [178N] 50 Lbs [222N] Peak Force 120 Lbs [534N] 150 Lbs [667N] Stroke Overall Length Stage Stroke Overall Length Stage inch meter inch meter Catalog Number inch meter inch meter Catalog Number 0.20 0.01 13.85 0.35 LSX1TEBL10AF2 0.20 0.01 15.65 0.40 LSX1TEBL12AF2 2.00 0.05 15.65 0.40 LSX1TEBL10A2 2.0 0.05 17.45 0.44 LSX1TEBL12A2 5.60 0.14 19.25 0.49 LSX1TEBL10A5 5.60 0.14 21.05 0.53 LSX1TEBL12A5 11.00 0.28 24.65 0.63 LSX1TEBL10A11 11.00 0.28 26.45 0.67 LSX1TEBL12A11 14.60 0.37 28.25 0.72 LSX1TEBL10A14 14.60 0.37 30.05 0.76 LSX1TEBL12A14 20.00 0.51 33.65 0.85 LSX1TEBL10A20 20.00 0.51 35.45 0.90 LSX1TEBL12A20 25.29 0.64 39.05 0.99 LSX1TEBL10A25 25.20 0.64 40.85 1.04 LSX1TEBL12A25 30.15 0.77 44.45 1.13 LSX1TEBL10A30 30.06 0.76 46.25 1.17 LSX1TEBL12A30 35.01 0.89 49.85 1.27 LSX1TEBL10A35 34.92 0.89 51.65 1.31 LSX1TEBL12A34 39.87 1.01 55.25 1.40 LSX1TEBL10A39 39.78 1.01 57.05 1.45 LSX1TEBL12A39 44.73 1.14 60.65 1.54 LSX1TEBL10A44 44.64 1.13 62.45 1.59 LSX1TEBL12A44 49.59 1.26 66.05 1.68 LSX1TEBL10A49 51.12 1.30 69.65 1.77 LSX1TEBL12A51 54.45 1.38 71.45 1.81 LSX1TEBL10A54 55.98 1.42 75.05 1.91 LSX1TEBL12A55 60.93 1.55 78.65 2.00 LSX1TEBL10A60 60.84 1.55 80.45 2.04 LSX1TEBL12A60 65.79 1.67 84.05 2.13 LSX1TEBL10A65 65.70 1.67 85.85 2.18 LSX1TEBL12A65 70.65 1.79 89.45 2.27 LSX1TEBL10A70 70.56 1.79 91.25 2.32 LSX1TEBL12A70 75.51 1.92 94.85 2.41 LSX1TEBL10A75 75.42 1.92 96.65 2.45 LSX1TEBL12A75 80.37 2.04 100.25 2.55 LSX1TEBL10A80 80.28 2.04 102.05 2.59 LSX1TEBL12A80 85.23 2.16 105.65 2.68 LSX1TEBL10A85 85.14 2.16 107.45 2.73 LSX1TEBL12A85 90.09 2.29 111.05 2.82 LSX1TEBL10A90 90.00 2.29 112.85 2.87 LSX1TEBL12A90 94.95 2.41 116.45 2.96 LSX1TEBL10A94 94.86 2.41 118.25 3.00 LSX1TEBL12A94 99.81 2.54 121.85 3.09 LSX1TEBL10A99 99.72 2.54 123.65 3.14 LSX1TEBL12A99 104.67 2.66 127.25 3.23 LSX1TEBL10A104 104.58 2.66 129.05 3.28 LSX1TEBL12A104 109.53 2.78 132.65 3.37 LSX1TEBL10A109 109.44 2.78 134.45 3.42 LSX1TEBL12A109 114.39 2.91 138.05 3.51 LSX1TEBL10A114 115.92 2.94 141.65 3.60 LSX1TEBL12A115 120.87 3.07 145.25 3.69 LSX1TEBL10A120 120.78 3.07 147.05 3.74 LSX1TEBL12A120 125.73 3.19 150.65 3.83 LSX1TEBL10A125 125.64 3.19 152.45 3.87 LSX1TEBL12A125 130.59 3.32 156.05 3.96 LSX1TEBL10A130 130.50 3.31 157.85 4.01 LSX1TEBL12A130 135.45 3.44 161.45 4.10 LSX1TEBL10A135 135.36 3.44 163.25 4.15 LSX1TEBL12A135 140.31 3.56 166.85 4.24 LSX1TEBL10A140 140.22 3.56 168.65 4.28 LSX1TEBL12A140 145.17 3.69 172.25 4.38 LSX1TEBL10A145 145.08 3.69 174.05 4.42 LSX1TEBL12A145 150.03 3.81 177.65 4.51 LSX1TEBL10A150 149.94 3.81 179.45 4.56 LSX1TEBL12A149 153.27 3.89 181.25 4.60 LSX1TEBL10A153 151.56 3.85 181.25 4.60 LSX1TEBL12A151 192

Extruded Stage Catalog Numbers Motor LMBL14A LMBL16A Cont Force 30 Lbs [133N] 60 Lbs [267N] Peak Force 90 Lbs [400N] 180 Lbs [800N] Stroke Overall Length Stage Stroke Overall Length Stage inch meter inch meter Catalog Number inch meter inch meter Catalog Number 0.20 0.01 17.45 0.44 LSX1TEBL14AF2 0.20 0.01 19.25 0.49 LSX1TEBL16AF2 2.00 0.05 19.25 0.49 LSX1TEBL14A2 2.00 0.05 21.05 0.53 LSX1TEBL16A2 5.60 0.14 22.85 0.58 LSX1TEBL14A5 5.60 0.14 24.65 0.63 LSX1TEBL16A5 11.00 0.28 28.25 0.72 LSX1TEBL14A11 11.00 0.28 30.05 0.76 LSX1TEBL16A11 14.60 0.37 31.85 0.81 LSX1TEBL14A14 14.60 0.37 33.65 0.85 LSX1TEBL16A14 20.00 0.51 37.25 0.95 LSX1TEBL14A20 20.00 0.51 39.05 0.99 LSX1TEBL16A20 25.40 0.65 42.65 1.08 LSX1TEBL14A25 25.40 0.65 44.45 1.13 LSX1TEBL16A25 30.80 0.78 48.05 1.22 LSX1TEBL14A30 30.80 0.78 49.85 1.27 LSX1TEBL16A30 35.73 0.91 53.45 1.36 LSX1TEBL14A35 34.40 0.87 53.45 1.36 LSX1TEBL16A34 40.59 1.03 58.85 1.49 LSX1TEBL14A40 39.78 1.01 58.85 1.49 LSX1TEBL16A39 45.45 1.15 64.25 1.63 LSX1TEBL14A45 44.64 1.13 64.25 1.63 LSX1TEBL16A44 50.31 1.28 69.65 1.77 LSX1TEBL14A50 49.50 1.26 69.65 1.77 LSX1TEBL16A49 55.17 1.40 75.05 1.91 LSX1TEBL14A55 55.98 1.42 76.85 1.95 LSX1TEBL16A55 60.03 1.52 80.45 2.04 LSX1TEBL14A60 60.84 1.55 82.25 2.09 LSX1TEBL16A60 64.89 1.65 85.85 2.18 LSX1TEBL14A64 65.70 1.67 87.65 2.23 LSX1TEBL16A65 69.75 1.77 91.25 2.32 LSX1TEBL14A69 70.56 1.79 93.05 2.36 LSX1TEBL16A70 74.61 1.90 96.65 2.45 LSX1TEBL14A74 75.42 1.92 98.45 2.50 LSX1TEBL16A75 79.47 2.02 102.05 2.59 LSX1TEBL14A79 80.28 2.04 103.85 2.64 LSX1TEBL16A80 85.95 2.18 109.25 2.77 LSX1TEBL14A85 85.14 2.16 109.25 2.77 LSX1TEBL16A85 90.81 2.31 114.65 2.91 LSX1TEBL14A90 90.00 2.29 114.65 2.91 LSX1TEBL16A90 95.67 2.43 120.05 3.05 LSX1TEBL14A95 94.86 2.41 120.05 3.05 LSX1TEBL16A94 100.53 2.55 125.45 3.19 LSX1TEBL14A100 99.72 2.53 125.45 3.19 LSX1TEBL16A99 105.39 2.68 130.85 3.32 LSX1TEBL14A105 104.58 2.66 130.85 3.32 LSX1TEBL16A104 110.25 2.80 136.25 3.46 LSX1TEBL14A110 109.44 2.78 136.25 3.46 LSX1TEBL16A109 115.11 2.92 141.65 3.60 LSX1TEBL14A115 115.92 2.94 143.45 3.64 LSX1TEBL16A115 119.97 3.05 147.05 3.74 LSX1TEBL14A119 120.78 3.07 148.85 3.78 LSX1TEBL16A120 124.83 3.17 152.45 3.87 LSX1TEBL14A124 125.64 3.19 154.25 3.92 LSX1TEBL16A125 129.69 3.29 157.85 4.01 LSX1TEBL14A129 130.50 3.31 159.65 4.06 LSX1TEBL16A130 134.55 3.42 163.25 4.15 LSX1TEBL14A134 135.36 3.44 165.05 4.19 LSX1TEBL16A135 139.41 3.54 168.65 4.28 LSX1TEBL14A139 140.22 3.56 170.45 4.33 LSX1TEBL16A140 145.89 3.71 175.85 4.47 LSX1TEBL14A145 145.08 3.69 175.85 4.47 LSX1TEBL16A145 150.75 3.83 181.25 4.60 LSX1TEBL14A150 149.94 3.81 181.25 4.60 LSX1TEBL16A149 193

Extruded Stage Catalog Numbers Motor LMBL18A Cont Force 80 Lbs [356N] Peak Force 240 Lbs [1068N] Stroke Overall Length Stage inch meter inch meter Catalog Number 0.20 0.01 21.05 0.53 LSX1TEBL14AF2 2.00 0.05 22.85 0.58 LSX1TEBL14A2 5.60 0.14 26.45 0.67 LSX1TEBL14A5 11.00 0.28 31.85 0.81 LSX1TEBL14A11 14.60 0.37 35.45 0.90 LSX1TEBL14A14 20.00 0.51 40.85 1.04 LSX1TEBL14A20 25.40 0.65 46.25 1.17 LSX1TEBL14A25 30.80 0.78 51.65 1.31 LSX1TEBL14A30 34.40 0.87 55.25 1.40 LSX1TEBL14A35 39.80 1.01 60.65 1.54 LSX1TEBL14A40 45.20 1.15 66.05 1.68 LSX1TEBL14A45 50.31 1.28 71.45 1.81 LSX1TEBL14A50 55.17 1.40 76.85 1.95 LSX1TEBL14A55 60.03 1.52 82.25 2.09 LSX1TEBL14A60 64.89 1.65 87.65 2.23 LSX1TEBL14A64 69.75 1.77 93.05 2.36 LSX1TEBL14A69 74.61 1.90 98.45 2.50 LSX1TEBL14A74 79.47 2.02 103.85 2.64 LSX1TEBL14A79 85.95 2.18 111.05 2.82 LSX1TEBL14A85 90.81 2.31 116.45 2.96 LSX1TEBL14A90 95.67 2.43 121.85 3.09 LSX1TEBL14A95 100.53 2.55 127.25 3.23 LSX1TEBL14A100 105.39 2.68 132.65 3.37 LSX1TEBL14A105 110.25 2.80 138.05 3.51 LSX1TEBL14A110 115.11 2.92 143.45 3.64 LSX1TEBL14A115 119.97 3.05 148.85 3.78 LSX1TEBL14A119 124.83 3.17 154.25 3.92 LSX1TEBL14A124 129.69 3.29 159.65 4.06 LSX1TEBL14A129 134.55 3.42 165.05 4.19 LSX1TEBL14A134 139.41 3.54 170.45 4.33 LSX1TEBL14A139 145.89 3.71 177.65 4.51 LSX1TEBL14A145 149.13 3.79 181.25 4.60 LSX1TEBL14A150 194