CF Components. Introduction. Functional principle 1-45

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Introduction The generation of ultra high vacuum (UHV) makes great demands on the material and on the connections. Therefore the CF standard was created in the UHV technology (ISO 3669; enhancement ISO/TS 3669-2). The following figure shows the principle construction: Functional principle CF flanges are manufactured from circular blanks of stainless steel on CNC machines. Rotatable flanges are bipartite and consist of an inner part with the seal face and an outer part with the bolt holes. CF flanges have an annular groove on the vacuum side for the reception of the gasket and a knife-edge. The sealing is realised by means of a flat gasket of oxygen-free (OFHC) copper because of the low leak rate and high bakeout temperature necessary for UHV technology. This gasket can be used generally only one time due to the plastic deformation by the knife-edge. The pressing-on is realised by bolts which must be fastened uniformly crosswise in order to avoid any kind of distortion. The so realised flange connection has a leak rate of <.0E- mbar l/s and is bakeable up to 450 C. -45

Introduction imensions VCOM provides CF flanges and components of the dimensions 0 to 250 according to the pre-norm ISO/TS 3669-2. These flanges are fully intermateable with ConFlat and CF flanges of other manufacturers. Micro CF flanges of the dimension 0 are exclusively supplied by VCOM. Please note that apart from this there are individual standards of institutions in the market available. Please add the auxiliary dimensions (25, 50, 75, 25) in case of requests and offers of CF flanges and components. In addition, please add the size and the number of required bolts and the to use copper gasket. imensions of CF Flanges Nominal diameter 50 200 250 250 "imperial" (mm (inch)) 0 25,4 ( ) 6 25 54 (2.2 ) 2 33 4 4 x M4 35 50 86 (3.38 ) 6 6 72 6 x M6 63 4 (4.5 ) 7 82 92 8 x M8 75 7 (4.62 ) 8 92 02 0 x M8 00 34 (.33 ) 70 (2.75 ) 54 (6 ) 25 7 (6.75 ) 2 42 52 8 x M8 203 (8 ) 254 (0 ) 305 (2 ) 305 (2 ) Thickness (mm) 6 8 3 20 22 25 25 27 CU gasket (mm) 3.4 2 48 20 7 222 272.7 270 Bolt circle (mm) 8 27 59 30 8 232 284 283 Number of holes 6 x M3 6 x M4 6 x M6 6 x M8 20 x M8 24 x M8 32 x M8 32 x M0 Materials Gaskets Flanges Components FPM OFHC Copper OFHC Copper silver plated OFHC Copper soft annealed Stainless steel 304 Stainless steel 304 Stainless steel 36 Stainless steel 36N ESR Stainless steel 304 Stainless steel 304 Stainless steel 36 Stainless steel 36Ti -46

CF Clamps CF Nut, bolt and washer sets, stainless steel Material Packing unit 2 25 pieces GM NBW36 0 M3 6 NBW420 6 M4 20 NBW635 35 M6 35 NBW845 63 M8 45 NBW850 00 M8 50 NBW860 50-200 M8 60 NBW865 250 M8 65 CF Nut, bolt and washer sets for double sided flanges, stainless steel Material Packing unit 2 25 pieces GM NBW435 6 M4 35 NBW650 35 M6 50 NBW860 63 M8 60 NBW870 00 M8 70 NBW880 50 M8 80 NBW890 200 M8 90 CF Nut, bolt and washer sets for tapped flanges, stainless steel Material Packing unit 2 25 pieces GM BW32 0 M3 2 BW46 6 M4 6 BW625 35 M6 25 BW830 63 M8 30 BW835 00-50 M8 35 BW845 200 M8 45-47

CF Clamps CF llen head bolt and washer sets for tapped flanges, stainless steel Material Packing unit 2 25 pieces GM CW46 6 M4 6 CW625 35 M6 25 CW830 63 M8 30 CW835 00-50 M8 35 CW845 200 M8 45 For high and ultra high vacuum applications we also offer different screws, nuts and washers with and without vent hole. Further information in chapter 3. CF Plate nuts, stainless steel Packing unit 25 pieces Order cod 2 3 GM Gravure PN6 6 20 3 7 M4 M PN35 35 4 29 M6 2.75 PN63 63 5 35 2 M8 4 PN00 00 44 25 2 M8 50 PN50 50 44 28 2 M8 200 PN200 200 45 30 3 M8 250 CF Horse shoe plate nuts, stainless steel Scope of delivery with screws and washers 2 PN6HS 6 34 20 6 PN35HS 35 70 43 9 PN63HS 63 3 65 2 PN00HS 00 5 03 2 PN50HS 50 202 54 2 CF Thread lubricant pplication T00 loosening of screws after bakeout Material MoS -48

CF Copper gaskets CF Copper gaskets Material OFHC copper Hardness approx. 85 Brinell Bakeout temperature 450 C 2 Pack size CU0 0 3.4 8.5 0 CU6 6 2 6 0 CU38 35 48 39 0 CU63 63 82 63 0 CU00 00 20 0 0 CU50 50 7 52 5 CU200 200 222 203 5 SPCU250 250 272.7 254 5 Other measures on request CF Copper gaskets, annealed Material OFHC copper Hardness approx. 45 Brinell Bakeout temperature 450 C pplication feedthroughs, viewports, glass-to-metal connection Packing unit 5 pieces 2 CU6 6 2 6 CU38 35 48 39 CU63 63 82 63 CU00 00 20 0 CU50 50 7 52 CU200 200 222 203 SPCU250 250 272.7 254-49

CF Copper gaskets CF Copper gaskets, silver plated Material OFHC copper, silver plated Hardness approx. 85 Brinell Bakeout temperature 450 C Packing unit 5 pieces 2 CU6SP 6 2 6 CU38SP 35 48 39 CU63SP 63 82 63 CU00SP 00 20 0 CU50SP 50 7 52 CU200SP 200 222 203 SPCU250SP 250 272.7 254 CF Copper gaskets, silver plated, annealed Material Hardness Packing unit OFHC copper approx. 85 Brinell 5 pieces 2 CU6SP 6 2 6 CU38SP 35 48 39 CU63SP 63 82 63 CU00SP 00 20 0 CU50SP 50 7 52 CU200SP 200 222 203 SPCU250SP 250 272.7 254 CF Gaskets, FPM Temperature range -0 C to 50 C (intermittent 200 C) pplication multiple use possible -50 VGF0 0 3.4 7 2 VGF6 6 2 6 VGF35 35 48 37 VGF63 63 82 63 VGF00 00 20 0 VGF50 50 7 52 VGF200 200 222 202 VGF250-B 250 272.7 254

CF Fittings CF Blank flanges, fixed, stainless steel Option with tapped holes and (basic dimensions) serve as orientation Stainless steel 304 Stainless steel 36 Stainless steel 36N ESR - F0-36 - 0 25 3.2 6 F6-304 F6-36 F6-36NS 6 34 4.3 7 F35-304 F35-36 F35-36NS 35 70 6.7 3 F63-304 F63-36 F63-36NS 63 4 8.3 7 F00-304 F00-36 F00-36NS 00 52 8.3 20 F50-304 F50-36 F50-36NS 50 203 8.3 22 F200-304 F200-36 F200-36NS 200 254 8.3 24 F250-304 F250-36 F250-36NS 250 304 8.3 25 2 CF Blank flanges, rotatable, stainless steel Option with tapped holes and (basic dimensions) serve as orientation Stainless steel 304 Stainless steel 36 Stainless steel 36N ESR F6R-304 F6R-36 F6R-36NS 6 34 4.3 7 F35R-304 F35R-36 F35R-36NS 35 70 6.7 3 F63R-304 F63R-36 F63R-36NS 63 4 8.3 7 F00R-304 F00R-36 F00R-36NS 00 52 8.3 20 F50R-304 F50R-36 F50R-36NS 50 203 8.3 22 F200R-304 F200R-36 F200R-36NS 200 254 8.3 24 F250R-304 F250R-36 F250R-36NS 250 304 8.3 25 2-5

CF Fittings CF Bored flanges, fixed, stainless steel Option with tapped holes Stainless steel 304 Stainless steel 36 Stainless steel 36N ESR - F0B0-36 - 0 25 0 9 6 3 F6B9-304 F6B9-36 F6B9-36NS 6 34 9 6 7 4.8 F35B4-304 F35B4-36 F35B4-36NS 35 70 4 38 3 4.8 F35B42-304 F35B42-36 F35B42-36NS 35 70 42 38 3 4.8 F63B63-304 - - 63 4 63 6 7 7.9 F63B70-304 F63B70-36 F63B70-36NS 63 4 70 66 7 7.9 F00B0-304 - - 00 52 0 98 20 9.5 F00B04-304 F00B04-36 F00B04-36NS 00 52 04 00 20 9.5 F50B52-304 - F50B52-36NS 50 203 52 49 22 9.5 F50B54-304 F50B54-36 F50B54-36NS 50 203 54 54 22 9.5 F200B204-304 F200B204-36 F200B204-36NS 200 254 204 200 25 9.5 F250B254-304 F250B254-36 F250B254-36NS 250 304 254 250 25 2.7 and (basic dimensions) serve as orientation R 2-52

CF Fittings CF Bored flanges, rotatable, stainless steel Option with tapped holes Stainless steel 304 Stainless steel 36 Stainless steel 36N ESR F6RB9-304 F6RB9-36 F6RB9-36NS 6 34 9 6 7 4.8 F35RB4-304 F35RB4-36 F35RB4-36NS 35 70 4 38 3 4.8 F35RB42-304 F35RB42-36 F35RB42-36NS 35 70 42 38 3 4.8 F63RB63-304 - - 63 4 63 6 7 7.9 F63RB70-304 F63RB70-36 F63RB70-36NS 63 4 70 66 7 7.9 F00RB0-304 - - 00 52 0 98 20 9.5 F00RB04-304 F00RB04-36 F00RB04-36NS 00 52 04 00 20 9.5 F50RB52-304 - F50RB52-36NS 50 203 52 49 22 9.5 F50RB54-304 F50RB54-36 F50RB54-36NS 50 203 54 54 22 9.5 F200RB204-304 F200RB204-36 F200RB204-36NS 200 253 204 200 25 9.5 F250RB254-304 F250RB254-36 F250RB254-36NS 250 305 254 250 25 2.7 and (basic dimensions) serve as orientation R 2 CF Tube, m length, stainless steel engthwise welded Outside and inside etched Ra Ra (welding seam area) < 0.8 m <.6 m St. steel 36 St. steel 304 R R36-9x.5- R304-9x.5-6 6 9 R36-4x.5- R304-4x.5-35 38 4 R36-70x2.0- R304-70x2.0-63 66 70 R36-04x2.0- R304-04x2.0-00 00 04 R36-54x2.0- R304-54x2.0-50 50 54 R36-204x2.0- R304-204x2.0-200 200 204 RI -53

CF Fittings CF Welded flanges, stainless steel F6WF 6 34 6 6 M4 F35WF 35 70 24 37 M6 F63WF 63 4 24 63 M8 F00WF 00 52 24 00 M8 R and (basic dimensions) serve as orientation M CF ouble sided blank flanges, stainless steel F6B F6BNS 6 34 7 F35B F35BNS 35 70 3 F63B F63BNS 63 4 7 F00B F00BNS 00 52 20 F50B F50BNS 50 203 22 St. steel 304 St. steel 36N ESR and (basic dimensions) serve as orientation CF ouble sided bored flanges, stainless steel Option radial connections F64-6 34 3 7 - F66NS 6 34 6 7 F3538 F3538NS 35 70 38 3 F6363-63 4 6 7 - F6366NS 63 4 66 7 F0000 F0000NS 00 52 00 20 F5050 F5050NS 50 203 50 22 St. steel 304 St. steel 36N ESR and (basic dimensions) serve as orientation -54

CF Fittings CF Zero length flange adapters, stainless steel 2 Z60 6 0 34 9 M3 0 Z350 35 0 70 9 M4 3 Z356 35 6 70 3 M4 3 Z636 63 6 4 3 M4 7 Z6335 63 35 4 37 M6 7 Z035 00 35 52 37 M6 20 Z063 00 63 52 6 M8 20 Z535 50 35 203 37 M6 22 Z563 50 63 203 6 M8 22 Z50 50 00 203 00 M8 22 Z200 200 00 254 00 M8 25 Z205 200 50 254 50 M8 25 Other reductions on request and (basic dimensions) serve as orientation M CF Zero length flange adapters, stainless steel 36N ESR 2 Z406NS 35 6 70 6 M4 3 Z636NS 63 6 4 6 M4 7 Z6340NS 63 35 4 38 M6 7 Z040NS 00 35 52 38 M6 20 Z063NS 00 63 52 66 M8 20 Z50NS 60 00 202 00 M8 22 Z540NS 60 35 202 38 M6 22 Z563NS 60 63 202 66 M8 22 Z200NS 200 00 253 00 M8 25 Z206NS 200 50 253 50 M8 25 Other reductions on request and (basic dimensions) serve as orientation M -55

CF Fittings CF Tubulations (half nipples), fixed, stainless steel Option with tapped holes Stainless steel 304 Stainless steel 36N ESR TU0-0 25 30 0 TU6 TU6NS 6 34 38 9 TU38 TU38NS 35 70 63 4 TU63-63 4 05 63 TU63-70 TU63NS 63 4 05 70 TU00-00 52 35 0 TU00-04 TU00NS 00 52 35 04 TU50-50 203 67 52 TU50-54 TU50NS 50 203 67 54 TU200-200 254 67 203 TU200-204 TU200NS 200 254 67 204 R CF Tubulations, rotatable, stainless steel Option with tapped holes Stainless steel 304 TU6R TU6RNS 6 34 38 9 TU38R TU38RNS 35 70 63 4 TU63R - 63 4 05 63 TU63R-70 TU63RNS 63 4 05 70 TU00R - 00 52 35 0 TU00R-04 TU00RNS 00 52 35 04 TU50R - 50 203 67 52 TU50R-54 TU50RNS 50 203 67 54 TU200R - 200 254 67 203 TU200R-204 TU200RNS 200 254 67 204-56 Stainless steel 36N ESR R

CF Fittings CF Straight connectors Fixed flanges Rotatable flange SC6 SC6R 6 34 76 SC38 SC38R 35 70 26 SC63 SC63R 63 4 20 SC00 SC00R 00 52 270 SC50 SC50R 50 203 334 SC200 SC200R 200 254 334 CF Tubulated reducing adapters, fixed 2 Bolt holes T356 35 6 70 34 70 in-line T636 63 6 4 34 70 in-line and straddled T6338 63 35 4 70 70 in-line and straddled T038 00 35 52 70 70 in-line and straddled T063 00 63 52 4 70 in-line T563 50 63 203 4 27 in-line and straddled T50 50 00 203 52 27 in-line and straddled 2-57

CF Fittings CF Tubulated reducing adapters, small flange rotatable 2 2 T356R 35 6 70 34 70 T636R 63 6 4 34 70 T6338R 63 35 4 70 70 T038R 00 35 52 70 70 T063R 00 63 52 4 70 T563R 50 63 203 4 27 T50R 50 00 203 52 27 CF-KF dapter 2 2 K66 6 6 34 30 36 K356 35 6 70 30 36 K3525 35 25 70 40 36 K3540 35 40 70 55 50 K6325 63 25 4 40 50 K6340 63 40 4 55 50 K6350 63 50 4 75 50 K025 00 25 52 40 50 K040 00 40 52 55 50 CF-ISO-K dapter 2 2 S6363 63 63 4 95 S063 00 63 52 95 S00 00 00 52 30 S50 50 00 203 30 S56 50 60 203 80-58

CF Fittings CF to VCR dapters female male F6VCR6F F6VCR6M 6 34 4.6 36 /4" F6VCR3F F6VCR3M 6 34 0. 4 /2" F35VCR6F F35VCR6M 35 70 4.6 4 /4" F35VCR9F F35VCR9M 35 70 7. 46 3/8" F35VCR3F F35VCR3M 35 70 0. 46 /2" F35VCR9F F35VCR9M 35 70 5.7 53 3/4" F35VCR25F F35VCR25M 35 70 22 58 " Female VCR compatible Male RZ CF to Swagelok adapters, metric F6SW6M 6 34 4.8 38 6 F6SW8M 6 34 7.9 44 8 F6SW0M 6 34 7.9 44 0 F35SW6M 35 70 4.8 43 6 F35SW8M 35 70 6.4 47 8 F35SW0M 35 70 7.9 49 0 Swagelok compatible RM CF to Swagelok adapters, imperial F6SW7 6 34 4.8 38 /4" F35SW7 35 70 4.8 43 /4" F35SW9 35 70 7. 48 3/8" F35SW3 35 70 0.4 52 /2" Swagelok compatible RZ -59

CF Fittings CF Elbows 90 fixed flanges rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 2 Rotatable flanges E6 E6R 6 34 38 E38 E38R 35 70 63 E63 E63R 63 4 05 E00 E00R 00 52 35 E50 E50R 50 203 67 E200 E200R 200 254 203 S CF Tees fixed flanges 2 rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 2 Rotatable flanges TE6 TE6R 6 34 76 38 TE38 TE38R 38 70 26 63 TE63 TE63R 63 4 20 05 TE00 TE00R 00 52 270 35 TE50 TE50R 50 203 334 67 TE200 TE200R 200 254 406 203 S2-60

CF Fittings CF Unequal tees fixed flanges 2 rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 2 Rotatable flanges UTE356 UTE356R 35 6 70 34 26 60 UTE6335 UTE6335R 63 35 4 70 20 77 UTE035 UTE035R 00 35 52 70 270 95 UTE063 UTE063R 00 63 52 4 270 95 UTE563 UTE563R 50 63 203 4 334 20 UTE50 UTE50R 50 00 203 52 334 20 2 2 S2 CF 4-way crosses fixed flanges 2 rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 2 Rotatable flanges X6 X6R 6 34 76 X38 X38R 35 70 26 X63 X63R 63 4 20 X00 X00R 00 52 270 X50 X50R 50 203 334 X200 X200R 200 254 406-6

CF Fittings CF 4-way reducing crosses fixed flanges 2 rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 2 Rotatable flanges UX356 UX356R 35 6 70 34 26 20 UX6335 UX6335R 63 35 4 70 20 54 UX063 UX063R 00 63 52 4 270 90 UX563 UX563R 50 63 203 4 334 240 UX200 UX200R 200 00 254 52 406 290 2 2 2 CF 6-way crosses fixed flanges 3 rotatable flanges In-line bolt holes (straddled bolt holes on request) Fixed flanges 3 Rotatable flanges XX6 XX6R 6 34 76 XX38 XX38R 35 70 26 XX63 XX63R 63 4 20 XX00 XX00R 00 52 270 XX50 XX50R 50 203 334 XX200 XX200R 200 254 406-62

CF Fittings CF Cubes CUBE6 6 5 35 CUBE35 35 38 70 CUBE63 63 63 4 CUBE00 00 0 52 CUBE50 50 52 203 CUBE200 200 200 254 CF Cluster flanges 2 No. of ports 2 R R2 CF3P 00 35 3 52 70 35 208.9 CF4P 50 35 4 203 70 67 250 3 Other versions on request CF Flange caps, plastics Packing unit 0 pieces CF6CP CF35CP CF63CP CF00CP CF50CP 6 35 63 00 50-63

CF Flexible hoses CF Flexible hoses Material flange stainless steel 304 Material hose stainless steel 36 Fixed flanges Rotatable flange FX6CF25 FX6CF25R 6 34 250 FX6CF50 FX6CF50R 6 34 500 FX6CF75 FX6CF75R 6 34 750 FX6CF00 FX6CF00R 6 34 000 FX35CF25 FX35CF25R 35 70 250 FX35CF50 FX35CF50R 35 70 500 FX35CF75 FX35CF75R 35 70 750 FX35CF00 FX35CF00R 35 70 000 FX63CF25 FX63CF25R 63 4 250 FX63CF50 FX63CF50R 63 4 500 FX63CF75 FX63CF75R 63 4 750 FX63CF00 FX63CF00R 63 4 000 FX00CF25 FX00CF25R 00 52 250 FX00CF50 FX00CF50R 00 52 500 FX00CF75 FX00CF75R 00 52 750 FX00CF00 FX00CF00R 00 52 000-64

CF Flexible hoses CF Hydroformed bellows Material flange stainless steel 304 Material bellows stainless steel 36 Fixed flanges Rotatable flange FXB6 FXB6R 6 34 0 74 FXB35 FXB35R 35 70 75 2 FXB63 FXB63R 63 4 250 73 FXB00 FXB00R 00 52 250 78 FXB50 FXB50R 50 203 270 92 min CF Glass-to-metal connections and quick access doors CF Quick access doors with viewport ssembly directly on the chamber, (with allen screw) Sealing FPM Bakeout temperature to 200 C 2 3 4 Q35 35 0 70 39 40 36 Q63 63 65 4 63 63 44 Q00 00 206 52 00 63 63 Q50 50 263 203 47 89 70-65

CF Glass-to-metal connections and quick access doors CF Quick access doors without viewport ssembly directly on the chamber, (with allen screw) Sealing FPM Bakeout temperature to 200 C 2 Q35BK 35 70 0 36 Q63BK 63 4 65 44 Q00BK 00 52 206 63 Q50BK 50 203 263 70 CF Glass-to-metal connections, Pyrex Material flange stainless steel 304 Tolerances R ± mm, ±3 mm Bakeout temperature max. 200 C Bakeout rate 2-3 C/min Seal OFHC copper, vacuum annealed R T3P 6 34 3 04 T25P 35 70 25 04 T38P 35 70 38 04 T64P 63 4 64 90 CF Glass-to-metal connections, quartz Material flange stainless steel 304 Tolerances R ± mm, ±3 mm Bakeout temperature max. 200 C Bakeout rate 2-3 C/min Seal OFHC copper, vacuum annealed Construction metal-to-quartz transition using intermediate glass layers R T3Q 6 34 3 43 T25Q 35 70 25 65 T38Q 35 70 38 65-66

CF iquid feedthroughs CF iquid feedthrough, stainless steel for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side tmosphere side F6PP NF6PP 6 34 75 45 tube 6 mm tube 6 mm F6PS NF6PS 6 34 03 45 tube 6 mm Swagelok 6 mm F35PP NF35PP 35 70 75 45 tube 6 mm tube 6 mm - NF35PS 35 70 03 45 tube 6 mm Swagelok 6 mm - NF35PP 35 70 75 45 tube 2 mm tube 2 mm - NF35PS 35 70 4 45 tube 2 mm Swagelok 2 mm 2 CF iquid feedthrough, double, stainless steel, of NW35CF- flange for liquid for liquid nitrogen iquid iquid nitrogen Vacuum side tmosphere side F352PP NF352PP 75 45 45 75 tube 6 mm tube 6 mm F352PS NF352PS 75 73 45 03 tube 6 mm Swagelok 6 mm F352SP NF352SP 03 45 73 75 Swagelok 6 mm Tube 6 mm 2 F352SS NF352SS 03 73 73 03 Swagelok 6 mm Swagelok 6 mm 3 4-67

CF Micro Components CF Micro fittings CF Micro gaskets 2 Material CU0 0 3.4 8.5 2 OFHC VGF0 0 3.5 7.5 3 FPM CF Bolts Packing unit 25 pieces Screw type NBW36 0 M3 6 hexagon NBW635 35 M6 35 hexagon BW32 0 M3 2 hexagon CW46 6 M4 6 allen M CF Blank flanges, fixed, stainless steel Option with tapped holes 2 F0-36 0 25 3.2 6 CF Bored flanges, fixed, stainless steel Option with tapped holes R F0B0-36 0 25 9 6 3 0 2-68

CF Micro Components CF Micro fittings CF Tubulations (half nipples), fixed, stainless steel R TU0 0 25 30 0 CF Zero length flange adapters, stainless steel 2 Z60 6 0 34 9 0 Z350 35 0 70 9 3 Z60: applicable with 6 x M4 allen screws and 6 x M3 hexagon screws Mechanical CF micro feedthroughs CF Micro rotary feedthrough M0 Smallest rotary feedthrough Big torque Compact Construction one piece Housing material stainless steel 36 Bellow type blunt, Ø 3.5 mm, with flattening Brake-away torque 0.8 Nm Maximum no load spin 200 U/Min. speed Maximum shaft axial thrust 20 N Bakeout temperature 250 C M0TX000Z escription M0-feedthroughs Other versions in chapter "Mechanical Feedthroughs" -69

CF Micro Components Mechanical CF micro feedthroughs CF Micro linear translator SM0 High capability Rugged frame construction Smooth and precise motion along the Z axis ( mm stroke / revolution of the handwheel) ctuation manual handwheel Standard stroke 25 mm Material bellow stainless steel 36 ife cycle 0,000 cycles Bakeout temperature 250 C SM0-25H escription SM0 Micro linear translator -70

CF Micro Components Electrical CF micro feedthroughs Micro feedthrough, 4 pin, on a NW0CF flange Very compact Stainless steel housing, ceramic isolator, gold-plated Kovar contacts tmosphere side standard MINI-SNP connector, strain-relieved eakage rate <.0E-9 mbar l / s Temperature range -200 C to 350 C Current (all contacts 5.25 loaded) Magnetic yes CF0-VB-0B-04 Further information concerning connectors see chapter "Electrical Feedthroughs" Micro SM feedthrough, on a NW0CF flange Very compact Stainless steel housing, ceramic isolator, gold-plated Kovar contacts tmosphere and vacuum side standard MINI-SNP con strain-relieved eakage rate <.0E-9 mbar l / s Impedance 50 Ohm Temperature range -200 C to 350 C Current 0 Magnetic yes CF0-VB-SM2 Further information concerning connectors see chapter "Electrical Feedthroughs" CF Micro welded bellows CF Micro welded bellows Material flange stainless steel 36 Material bellows stainless steel 36 Bakeout temperature to 450 C EWB0-0 0 20 0 57 47 0 Other lengths on request 2 max min Hub -7