WGL Series. Wide Guide Linear Motor Stage. Zero backlash ironless linear motor. Choice of linear encoder resolutions of up to 1um

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GL Series ide Guide Linear Motor Stage Direct drive Zero cogging Zero backlash ironless linear motor Choice of linear encoder resolutions of up to 1um Simple design with fewer parts Corrosion resistant wide guide recirculating linear guide 78

GL138 Series AUM3 Features Direct drive, zero cogging, zero backlash ironless linear motor Linear encoder options of 5μm, 1μm, and 0.1μm Size 15 (wide) linear guidance rails High accelerations (up to 10) and speeds (up to 5m/s) Smooth motion at low speeds (low velocity ripple) Motor Parameter Specifications AUM3-S2 AUM3-S3 AUM3-S4 Performance Parameters Unit Series Parallel Series Parallel Series Parallel Continuous Force, coil @100 C N 57 85 113 Peak Force N 289 433 578 Motor Constant N/SqRt() 10.2 12.5 14.5 Continuous Power 30.5 45.7 60.9 Peak Power 796.0 1193.0 1591.0 Electrical Cycle 60 60 60 Max Bus Voltage V 330 330 330 Max Coil Temperature C 125 125 125 Thermal Dissipation Constant / C 0.41 0.61 0.81 Continuous Current Arms 1.8 3.6 1.8 3.6 1.8 3.6 Peak Current Arms 9.2 18.4 9.2 18.4 9.2 18.4 Force Constant N/Arms 31.4 15.7 47.1 23.6 62.8 31.4 Back EMF Constant Vpeak/(m/s) 25.6 12.8 38.5 19.2 51.3 25.6 Inductance mh 6.26 1.57 9.39 2.35 12.52 3.13 Terminal Resistance @25 C Ohms 9.40 2.35 14.10 3.53 18.80 4.70 Electrical Time Constant ms 0.67 0.67 0.67 0.67 0.67 0.67 Mechanical Parameters Coil 0.45 0.68 0.91 Coil 121 181 241 Track (per 120 ) 1.00 Magnetic Attraction N (lb) 0 79

Dimensional Drawing Model GL138 AUM3 Coil Effective Stroke (Z) Overall (X) (A) Height Moving () () Hard Stopper Position (Y) Mounting Hole (B) 200 386 9.2 300 486 10.9 400 586 13.2 S2 500 686 160 65.8 1.3 15.6 88 37.25 600 786 17.4 1000 1186 26.1 1200 1386 30.2 200 446 11.4 300 546 12.5 400 646 14.9 S3 500 746 220 65.8 1.7 17.3 118 67.25 600 846 19.1 1000 1246 27.8 1200 1446 31.8 200 506 12.6 300 606 14.2 400 706 16.7 S4 500 806 280 65.8 2.1 19 148 97.25 600 906 20.8 1000 1306 29.5 1200 1506 33.6 80

Bearing Parameters Specifications Unit S2 S3 S4 Maximum bearing load N 1824 1824 1824 Recoended row moment Nm 17.6 17.6 17.6 Recoended pitch moment Nm 135.9 245.3 354.8 Recoended yaw moment Nm 135.9 245.3 354.8 Performance Parameter Acceleration G 10 Velocity(1μm resolution) 5 (40µm scale pitch and 20MHz counter frequency) Velocity(0.5μm resolution) 2.5 (20µm scale pitch and 20MHz counter frequency) Velocity(0.1μm resolution) Velocity(Analogue) m/s 1.3 (20µm scale pitch and 20MHz counter frequency) 8 (40µm scale pitch and 200kHz input frequency) 4 (20µm scale pitch and 200kHz input frequency) 3 Straightness ±3µm/25, NTE±10µm/300 3 Flatness ±3µm/25, NTE±10µm/300 Repeatability(1μm resolution) Repeatability(0.5μm resolution) Repeatability(0.1μm resolution) Repeatability(Analogue) Part Numbering (Rapid Delivery Series) μm ±3µm (40µm scale pitch) ±1.5µm (20µm scale pitch) ±1µm(20µm scale pitch) ±5 counts GL 138 Hall Option Cable Coil Version Effective Stroke Encoder Resolution Motor Connection Sensor Encoder Option Rail Motor Size (type) (m) (type) (micron, μ) (type) AUM3 P,S S2,S3,S4 J,K H9D 3.0 V3 1 100 1200 R22, R41, 4 R10 0.1, 1.0, 5.0 2 T 1. For customized stroke length (up to 2.7m), please contact us. 2. For applications that have specific straightness and flatness requirements, precision class (P) is available. Please contact us for more details. 3. All measurement taken when module is mounted on a 5micron flat granite table. 4. Available for 1um only. Example: GL138-AUM3-S-S2-J-H9D-3.0-V3-300-R10-1.0-T 81

GL138 Series AUM4 Features Direct drive, zero cogging, zero backlash ironless linear motor Linear encoder options of 5μm, 1μm, and 0.1μm Size 15 (wide) linear guidance rails High accelerations (up to 10) and speeds (up to 5m/s) Smooth motion at low speeds (low velocity ripple) Motor Parameter Specifications AUM4-S2 AUM4-S3 AUM4-S4 Performance Parameters Unit Series Parallel Series Parallel Series Parallel Continuous Force, coil @100 C N 110.0 166.0 221.0 Peak Force N 624.0 936.0 1248.0 Motor Constant N/SqRt() 15.8 19.4 22.4 Continuous Power 48.7 73.0 97.3 Peak Power 1555 2332 3110 Electrical Cycle 60 60 60 Max Bus Voltage V 330 330 330 Max Coil Temperature C 125 125 125 Thermal Dissipation Constant / C 0.65 0.97 1.30 Continuous Current Arms 2.3 4.6 2.3 4.6 2.3 4.6 Peak Current Arms 13.0 26.0 13.0 26.0 13.0 26.0 Force Constant N/Arms 48.0 24.0 72.0 36.0 96.0 48.0 Back EMF Constant Vpeak/(m/s) 39.2 19.6 58.8 29.4 78.4 39.2 Inductance mh 7.00 1.75 10.50 2.63 14.00 3.50 Terminal Resistance @25 C Ohms 9.20 2.30 13.80 3.45 18.40 4.60 Electrical Time Constant ms 0.76 0.76 0.76 0.76 0.76 0.76 Mechanical Parameters Coil 0.56 0.89 1.19 Coil 121 181 241 Track (per 120 ) 1.77 Magnetic Attraction N (lb) 0 82

Dimensional Drawing Model GL138 AUM4 Coil Effective Stroke (Z) Overall (X) (A) Height Moving () () 200 386 11.8 300 486 13.9 400 586 17 S2 500 686 160 65.8 1.4 20.1 600 786 22.4 1000 1186 33.9 1200 1386 39.1 200 446 14 300 546 16.1 400 646 19.2 Hard Stopper Position (Y) Mounting Hole (B) S3 500 746 220 65.8 1.9 22.3 118 67.25 600 846 24.6 1000 1246 36.1 1200 1446 41.4 200 506 15.7 300 606 17.8 400 706 20.9 S4 500 806 280 65.8 2.5 24 600 906 26.2 1000 1306 37.7 1200 1506 43 88 37.25 148 97.25 83

Bearing Parameters Specifications Unit S2 S3 S4 Maximum bearing load N 1824 1824 1824 Recoended row moment Nm 17.6 17.6 17.6 Recoended pitch moment Nm 135.9 245.3 354.8 Recoended yaw moment Nm 135.9 245.3 354.8 Performance Parameter Acceleration G 10 Velocity(1μm resolution) 5 (40µm scale pitch and 20MHz counter frequency) Velocity(0.5μm resolution) 2.5 (20µm scale pitch and 20MHz counter frequency) Velocity(0.1μm resolution) Velocity(Analogue) m/s 1.3 (20µm scale pitch and 20MHz counter frequency) 8 (40µm scale pitch and 200kHz input frequency) 4 (20µm scale pitch and 200kHz input frequency) 3 Straightness ±3µm/25, NTE±10µm/300 3 Flatness ±3µm/25, NTE±10µm/300 Repeatability(1μm resolution) Repeatability(0.5μm resolution) Repeatability(0.1μm resolution) Repeatability(Analogue) Part Numbering (Rapid Delivery Series) μm ±3µm (40µm scale pitch) ±1.5µm (20µm scale pitch) ±1µm(20µm scale pitch) ±5 counts GL 138 Hall Option Cable Coil Version Effective Stroke Encoder Option Encoder Resolution Motor Connection Sensor Rail Motor Size (type) (m) (type) (micron, μ) (type) AUM4 P,S S2,S3,S4 J,K H9D 3.0 V4 1 100 1200 R22, R41, 4 R10 0.1, 1.0, 5.0 2 T 1. For customized stroke length (up to 2.7m), please contact us. 2. For applications that have specific straightness and flatness requirements, precision class (P) is available. Please contact us for more details. 3. All measurement taken when module is mounted on a 5micron flat granite table. 4. Available for 1um only. Example: GL138-AUM4-S-S2-J-H9D-3.0-V4-300-R10-1.0-T 84